Table 1: Source Point Data Generated Fri Dec 04 08:15:00 CST 2020 for I=102.27 mA, along with nominal (0) values.
Name exEff CplngEff Sx Sxp Sy Syp exEff0 CplngEff0 Sx0 Sxp0 Sy0 Syp0
  nm % um urad um urad nm % um urad um urad
S1ID 2.99 1.8 267.9 11.2 11.6 4.6 3.33 1.1 279.5 11.9 9.1 4.0
S2ID 3.01 1.8 269.3 11.2 11.6 4.6 3.35 1.1 280.8 11.9 9.2 3.9
S3ID 3.01 1.7 271.1 11.1 11.7 4.4 3.35 1.0 282.7 11.8 9.2 3.7
S4ID 3.00 1.7 271.8 11.1 11.8 4.3 3.34 1.0 283.4 11.8 9.3 3.6
S5ID 2.99 1.7 271.3 11.0 12.1 4.3 3.33 1.0 282.9 11.8 9.7 3.6
S6ID 2.98 1.7 268.4 11.1 12.5 4.2 3.32 1.0 280.0 11.9 10.2 3.5
S7ID 2.94 1.6 173.1 17.0 11.5 4.2 3.28 0.9 180.9 18.1 9.1 3.4
S8ID 2.96 1.6 267.3 11.1 11.9 4.1 3.30 1.0 279.1 11.8 9.3 3.4
S9ID 2.96 1.7 269.2 11.0 12.7 4.0 3.30 1.0 281.0 11.7 10.4 3.3
S10ID 2.98 1.6 269.0 11.1 12.1 4.1 3.32 1.0 280.8 11.8 9.6 3.4
S11ID 3.00 1.6 268.5 11.2 12.1 4.0 3.34 0.9 280.0 11.9 9.6 3.3
S12ID 3.01 1.6 269.3 11.2 12.2 4.0 3.35 0.9 280.8 11.9 9.7 3.2
S13ID 3.01 1.6 271.2 11.1 12.1 4.0 3.35 0.9 282.8 11.8 9.5 3.3
S14ID 2.99 1.6 271.8 11.0 12.3 3.9 3.33 0.9 283.6 11.7 9.8 3.2
S15ID 2.98 1.6 269.9 11.0 12.1 3.9 3.32 0.9 281.7 11.8 9.6 3.1
S16ID 2.98 1.6 267.0 11.2 11.9 3.9 3.32 0.9 278.6 11.9 9.4 3.1
S17ID 2.97 1.6 265.6 11.2 12.0 3.9 3.31 0.9 277.2 11.9 9.4 3.2
S18ID 2.95 1.6 266.4 11.1 11.9 4.0 3.29 0.9 278.2 11.8 9.4 3.2
S19ID 2.95 1.6 268.0 11.0 12.1 3.8 3.29 0.9 280.0 11.7 9.7 3.1
S20ID 2.97 1.6 268.7 11.0 12.3 4.0 3.31 1.0 280.5 11.8 9.9 3.2
S21ID 2.99 1.6 268.3 11.2 11.9 3.9 3.33 0.9 279.9 11.9 9.4 3.2
S22ID 3.01 1.5 269.0 11.2 11.8 3.9 3.35 0.9 280.5 11.9 9.3 3.2
S23ID 3.01 1.5 271.2 11.1 12.1 3.8 3.35 0.9 282.7 11.9 9.6 3.0
S24ID 3.00 1.6 272.5 11.0 12.4 3.9 3.34 0.9 284.2 11.7 10.0 3.1
S25ID 2.99 1.6 271.4 11.0 11.9 4.0 3.33 0.9 283.2 11.7 9.5 3.2
S26ID 2.98 1.8 269.1 11.1 13.0 4.1 3.32 1.1 280.7 11.8 10.7 3.4
S27ID 2.98 1.7 266.8 11.2 13.5 3.9 3.32 1.0 278.3 11.9 11.3 3.1
S28ID 2.97 1.7 266.0 11.2 12.5 4.0 3.31 1.0 277.6 11.9 10.2 3.3
S29ID 2.96 1.6 267.8 11.1 11.8 4.1 3.30 0.9 279.6 11.8 9.3 3.4
S30ID 2.96 1.7 269.0 11.0 11.8 4.2 3.30 1.0 280.9 11.7 9.3 3.5
S31ID 2.98 1.7 268.8 11.1 12.5 4.1 3.32 1.0 280.5 11.8 10.2 3.4
S32ID 2.95 1.8 113.5 26.0 16.9 3.1 3.29 1.1 118.6 27.7 13.9 2.6
S33ID 3.00 1.8 270.8 11.1 12.6 4.3 3.34 1.1 282.4 11.8 10.3 3.6
S34ID 3.00 2.2 272.5 11.0 15.8 4.5 3.34 1.4 284.1 11.8 14.1 3.9
S35ID 3.00 2.3 272.0 11.1 17.3 4.3 3.34 1.5 283.6 11.8 15.7 3.6


Table 2: Source Point Data Generated Fri Dec 04 08:15:00 CST 2020 for I=102.27 mA
Name betax alphax etax etaxp betay alphay etay etayp
  m   m   m   m  
S1ID 19.1 -0.014 0.170 -0.000 3.1 -0.002 0.000 0.003
S2ID 19.1 -0.001 0.172 -0.000 3.1 0.017 0.000 -0.003
S3ID 19.3 0.005 0.174 0.000 3.1 0.038 0.000 0.002
S4ID 19.5 0.001 0.174 0.000 3.2 0.035 0.001 -0.002
S5ID 19.5 -0.008 0.172 0.000 3.2 0.030 -0.003 0.002
S6ID 19.3 -0.010 0.169 0.000 3.2 0.030 0.004 -0.002
S7ID 8.3 0.005 0.106 0.000 3.0 0.023 0.000 0.002
S8ID 19.4 0.016 0.166 -0.000 3.2 0.017 -0.000 -0.002
S9ID 19.7 -0.002 0.167 -0.000 3.2 0.016 -0.005 0.002
S10ID 19.4 -0.017 0.169 -0.000 3.2 0.014 0.002 -0.002
S11ID 19.1 -0.011 0.171 -0.000 3.2 0.013 0.002 0.002
S12ID 19.0 0.006 0.173 -0.000 3.2 0.010 -0.002 -0.002
S13ID 19.4 0.022 0.173 0.000 3.3 0.005 -0.001 0.002
S14ID 19.7 0.007 0.172 0.000 3.3 -0.002 0.003 -0.001
S15ID 19.5 -0.016 0.170 0.000 3.3 -0.009 -0.002 0.001
S16ID 19.1 -0.016 0.168 0.000 3.2 -0.013 -0.000 -0.001
S17ID 19.0 0.008 0.166 0.000 3.3 -0.015 -0.001 0.001
S18ID 19.4 0.022 0.165 0.000 3.2 -0.016 -0.001 -0.001
S19ID 19.7 0.008 0.165 -0.000 3.2 -0.018 0.003 0.001
S20ID 19.5 -0.019 0.168 -0.000 3.2 -0.019 -0.003 -0.002
S21ID 19.1 -0.014 0.170 -0.000 3.2 -0.016 0.001 0.001
S22ID 19.0 0.003 0.172 -0.000 3.2 -0.015 -0.001 -0.001
S23ID 19.3 0.018 0.174 -0.000 3.2 -0.013 0.003 0.001
S24ID 19.7 0.004 0.173 0.000 3.1 -0.011 -0.004 -0.001
S25ID 19.7 -0.010 0.172 0.000 3.1 0.003 0.003 0.001
S26ID 19.4 -0.022 0.170 0.000 3.1 0.004 -0.006 -0.002
S27ID 19.0 -0.010 0.168 0.000 3.1 0.012 0.007 0.001
S28ID 19.0 0.011 0.167 0.000 3.2 0.013 -0.004 -0.002
S29ID 19.4 0.014 0.167 -0.000 3.2 0.011 -0.000 0.002
S30ID 19.7 0.001 0.167 -0.000 3.2 0.013 -0.001 -0.002
S31ID 19.4 -0.013 0.169 -0.000 3.1 0.015 0.004 0.002
S32ID 3.5 -0.002 0.070 -0.000 5.5 0.003 -0.007 -0.001
S33ID 19.4 0.012 0.173 -0.000 3.2 -0.013 0.005 0.002
S34ID 19.6 -0.002 0.174 0.000 3.1 -0.010 -0.011 -0.003
S35ID 19.5 -0.020 0.174 0.000 3.1 0.003 0.013 0.002


Table 3: Source Point Data Generated Fri Dec 04 08:15:00 CST 2020 for I=102.27 mA, along with nominal (0) values.
Name exEff CplngEff Sx Sxp Sy Syp exEff0 CplngEff0 Sx0 Sxp0 Sy0 Syp0
  nm % um urad um urad nm % um urad um urad
S1BM 3.02 1.8 82.0 52.5 39.3 1.6 3.36 1.1 85.5 55.2 33.8 1.3
S2BM 3.03 1.8 81.3 52.1 39.0 1.7 3.37 1.1 84.8 54.9 33.4 1.4
S3BM 3.01 1.7 80.5 52.2 37.8 1.6 3.35 1.0 83.9 54.9 32.0 1.4
S4BM 3.00 1.7 80.2 52.4 37.6 1.6 3.33 1.0 83.7 55.2 31.7 1.3
S5BM 2.99 1.7 80.4 52.6 38.4 1.5 3.33 1.0 83.9 55.4 32.7 1.2
S6BM 2.99 1.7 80.6 52.7 37.6 1.5 3.33 1.0 84.1 55.4 31.9 1.2
S7BM 3.19 1.5 85.9 49.9 35.2 2.2 3.54 0.9 90.2 51.8 28.8 1.8
S8BM 3.77 1.3 85.3 52.7 35.8 2.1 4.14 0.7 87.7 55.3 29.5 1.7
S9BM 3.05 1.7 81.6 53.3 36.5 1.5 3.39 1.0 85.0 56.1 30.6 1.2
S10BM 3.03 1.6 81.9 52.8 35.3 1.5 3.37 0.9 85.4 55.6 29.1 1.2
S11BM 3.02 1.5 81.7 52.2 33.5 1.5 3.36 0.9 85.2 55.0 27.0 1.2
S12BM 3.02 1.6 81.0 52.0 33.8 1.7 3.36 0.9 84.4 54.7 27.4 1.4
S13BM 3.01 1.6 80.0 52.3 34.6 1.6 3.35 0.9 83.4 55.1 28.4 1.3
S14BM 3.00 1.6 80.0 52.8 34.5 1.6 3.34 0.9 83.5 55.6 28.4 1.2
S15BM 2.99 1.6 80.8 52.8 33.4 1.5 3.33 0.9 84.3 55.6 27.0 1.2
S16BM 3.00 1.5 81.2 52.6 33.2 1.6 3.34 0.9 84.7 55.3 26.7 1.2
S17BM 3.03 1.5 81.0 52.6 33.8 1.5 3.37 0.9 84.5 55.3 27.5 1.2
S18BM 3.05 1.6 80.9 53.1 33.6 1.6 3.39 0.9 84.3 55.9 27.2 1.3
S19BM 3.05 1.5 81.4 53.4 32.5 1.7 3.39 0.9 84.8 56.2 25.8 1.4
S20BM 3.04 1.5 82.2 53.1 33.2 1.6 3.38 0.9 85.6 55.8 26.7 1.3
S21BM 3.03 1.6 82.0 52.4 33.8 1.6 3.37 0.9 85.5 55.2 27.4 1.3
S22BM 3.02 1.6 81.2 52.0 33.6 1.6 3.36 0.9 84.7 54.8 27.2 1.3
S23BM 3.01 1.5 80.2 52.1 32.6 1.6 3.35 0.9 83.7 54.9 25.8 1.3
S24BM 3.00 1.6 80.2 52.6 32.7 1.7 3.34 0.9 83.7 55.4 26.0 1.4
S25BM 2.99 1.6 80.4 52.8 33.4 1.6 3.33 0.9 83.9 55.6 26.8 1.3
S26BM 2.99 1.7 81.0 52.7 33.5 1.7 3.33 1.0 84.5 55.4 26.8 1.5
S27BM 3.01 1.8 81.1 52.4 32.8 1.9 3.35 1.1 84.5 55.1 25.9 1.6
S28BM 3.03 1.6 80.9 52.6 34.0 1.7 3.37 1.0 84.4 55.3 27.4 1.4
S29BM 3.05 1.6 81.1 53.0 35.6 1.6 3.39 0.9 84.5 55.8 29.4 1.3
S30BM 3.04 1.6 81.4 53.2 35.8 1.6 3.38 0.9 84.8 56.0 29.7 1.3
S31BM 3.03 1.7 81.8 52.8 34.4 1.7 3.37 1.0 85.2 55.5 27.9 1.4
S32BM 3.76 1.4 85.9 50.2 30.4 3.2 4.12 0.9 90.1 51.7 24.7 2.7
S33BM 4.26 1.3 98.5 49.6 35.0 2.1 4.65 0.8 101.0 51.9 29.1 1.9
S34BM 3.00 2.0 80.4 52.5 34.5 2.1 3.34 1.3 83.9 55.4 28.2 1.9
S35BM 3.04 2.5 94.4 56.5 34.0 2.5 3.38 1.6 98.4 59.1 27.5 2.4


Table 4: Source Point Data Generated Fri Dec 04 08:15:00 CST 2020 for I=102.27 mA
Name betax alphax etax etaxp betay alphay etay etayp
  m   m   m   m  
S1BM 1.8 0.759 0.053 -0.026 24.1 0.526 -0.023 0.001
S2BM 1.7 0.732 0.052 -0.026 24.1 0.493 0.022 -0.001
S3BM 1.7 0.729 0.051 -0.025 24.2 0.475 -0.020 0.001
S4BM 1.7 0.747 0.051 -0.025 24.3 0.504 0.020 -0.001
S5BM 1.7 0.761 0.051 -0.026 24.1 0.514 -0.021 0.000
S6BM 1.7 0.756 0.051 -0.026 23.9 0.494 0.020 -0.000
S7BM 2.3 0.586 0.047 -0.034 24.6 1.178 -0.013 0.001
S8BM 1.2 0.300 0.069 -0.027 24.7 1.151 0.015 -0.001
S9BM 1.7 0.760 0.053 -0.027 23.6 0.498 -0.018 0.000
S10BM 1.8 0.769 0.053 -0.026 23.5 0.489 0.015 -0.000
S11BM 1.8 0.747 0.052 -0.026 23.4 0.474 -0.010 0.000
S12BM 1.7 0.726 0.052 -0.025 23.3 0.477 0.012 -0.001
S13BM 1.7 0.726 0.051 -0.025 23.2 0.493 -0.014 0.000
S14BM 1.7 0.753 0.051 -0.026 23.1 0.499 0.014 -0.000
S15BM 1.7 0.770 0.051 -0.026 23.1 0.498 -0.011 0.000
S16BM 1.8 0.753 0.052 -0.027 23.0 0.492 0.010 -0.000
S17BM 1.7 0.725 0.052 -0.027 23.1 0.505 -0.012 0.000
S18BM 1.7 0.728 0.053 -0.027 23.2 0.502 0.011 -0.001
S19BM 1.7 0.751 0.053 -0.027 23.2 0.506 -0.006 0.001
S20BM 1.7 0.768 0.053 -0.027 23.4 0.521 0.009 -0.001
S21BM 1.8 0.755 0.053 -0.026 23.4 0.509 -0.011 0.001
S22BM 1.7 0.729 0.052 -0.026 23.5 0.521 0.011 -0.001
S23BM 1.7 0.722 0.051 -0.025 23.6 0.534 -0.005 0.001
S24BM 1.7 0.753 0.051 -0.025 23.7 0.516 0.006 -0.001
S25BM 1.7 0.770 0.051 -0.026 23.8 0.485 -0.009 0.001
S26BM 1.8 0.766 0.051 -0.026 23.9 0.499 0.009 -0.001
S27BM 1.7 0.739 0.051 -0.026 24.0 0.506 -0.005 0.001
S28BM 1.7 0.726 0.052 -0.027 24.1 0.534 0.010 -0.001
S29BM 1.7 0.736 0.053 -0.027 24.1 0.540 -0.015 0.001
S30BM 1.7 0.758 0.053 -0.027 24.0 0.515 0.016 -0.000
S31BM 1.7 0.763 0.053 -0.026 23.9 0.504 -0.012 0.001
S32BM 2.3 0.177 0.047 -0.040 18.6 1.454 0.011 -0.002
S33BM 1.5 0.042 0.082 -0.031 22.5 0.644 -0.016 0.001
S34BM 1.7 0.752 0.051 -0.025 23.5 0.493 0.013 -0.002
S35BM 2.3 1.061 0.060 -0.034 23.9 0.498 -0.011 0.002





Operations Analysis - Louis Emery 2020-12-04