Data Group

Control Name / Readback Name

FE XBPMs

S01BMFE-XBPM:P1:AM                        / S01BMFE-XBPM:P1:AM S01BMFE-XBPM:P1:BM                        / S01BMFE-XBPM:P1:BM S01BMFE-XBPM:P1:y                         / S01BMFE-XBPM:P1:y S01BMFE-XBPM:P1:y:LowPass1sM              / S01BMFE-XBPM:P1:y:LowPass1sM S01BMFE-XBPM:P1:y:LowPass8sM              / S01BMFE-XBPM:P1:y:LowPass8sM S01BMFE-XBPM:P1:y:LowPass64sM             / S01BMFE-XBPM:P1:y:LowPass64sM S01BMFE-XBPM:P1:y:StdDevM                 / S01BMFE-XBPM:P1:y:StdDevM S01BMFE-XBPM:P1:y:StdDev1sM               / S01BMFE-XBPM:P1:y:StdDev1sM S01BMFE-XBPM:P1:y:StdDev8sM               / S01BMFE-XBPM:P1:y:StdDev8sM S01BMFE-XBPM:P1:y:StdDev64sM              / S01BMFE-XBPM:P1:y:StdDev64sM S01BMFE-XBPM:P2:AM                        / S01BMFE-XBPM:P2:AM S01BMFE-XBPM:P2:BM                        / S01BMFE-XBPM:P2:BM S01BMFE-XBPM:P2:y                         / S01BMFE-XBPM:P2:y S01BMFE-XBPM:P2:y:LowPass1sM              / S01BMFE-XBPM:P2:y:LowPass1sM S01BMFE-XBPM:P2:y:LowPass8sM              / S01BMFE-XBPM:P2:y:LowPass8sM S01BMFE-XBPM:P2:y:LowPass64sM             / S01BMFE-XBPM:P2:y:LowPass64sM S01BMFE-XBPM:P2:y:StdDevM                 / S01BMFE-XBPM:P2:y:StdDevM S01BMFE-XBPM:P2:y:StdDev1sM               / S01BMFE-XBPM:P2:y:StdDev1sM S01BMFE-XBPM:P2:y:StdDev8sM               / S01BMFE-XBPM:P2:y:StdDev8sM S01BMFE-XBPM:P2:y:StdDev64sM              / S01BMFE-XBPM:P2:y:StdDev64sM S01IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S01IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S01IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S01IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S01IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S01IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S01IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S01IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S01IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S01IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S01IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S01IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S01IDFE-XBPM:CM1ds:PositionOffsetX        / S01IDFE-XBPM:CM1ds:PositionOffsetX S01IDFE-XBPM:CM1ds:PositionOffsetY        / S01IDFE-XBPM:CM1ds:PositionOffsetY S01IDFE-XBPM:CM1ds:PositionScaleX         / S01IDFE-XBPM:CM1ds:PositionScaleX S01IDFE-XBPM:CM1ds:PositionScaleY         / S01IDFE-XBPM:CM1ds:PositionScaleY S01IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S01IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S01IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S01IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S01IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S01IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S01IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S01IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S01IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S01IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S01IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S01IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S01IDFE-XBPM:CM2ds:PositionOffsetX        / S01IDFE-XBPM:CM2ds:PositionOffsetX S01IDFE-XBPM:CM2ds:PositionOffsetY        / S01IDFE-XBPM:CM2ds:PositionOffsetY S01IDFE-XBPM:CM2ds:PositionScaleX         / S01IDFE-XBPM:CM2ds:PositionScaleX S01IDFE-XBPM:CM2ds:PositionScaleY         / S01IDFE-XBPM:CM2ds:PositionScaleY S01IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S01IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S01IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S01IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S01IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S01IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S01IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S01IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S01IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S01IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S01IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S01IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S01IDFE-XBPM:CM3ds:PositionOffsetX        / S01IDFE-XBPM:CM3ds:PositionOffsetX S01IDFE-XBPM:CM3ds:PositionOffsetY        / S01IDFE-XBPM:CM3ds:PositionOffsetY S01IDFE-XBPM:CM3ds:PositionScaleX         / S01IDFE-XBPM:CM3ds:PositionScaleX S01IDFE-XBPM:CM3ds:PositionScaleY         / S01IDFE-XBPM:CM3ds:PositionScaleY S01IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S01IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S01IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S01IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S01IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S01IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S01IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S01IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S01IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S01IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S01IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S01IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S01IDFE-XBPM:CM4ds:PositionOffsetX        / S01IDFE-XBPM:CM4ds:PositionOffsetX S01IDFE-XBPM:CM4ds:PositionOffsetY        / S01IDFE-XBPM:CM4ds:PositionOffsetY S01IDFE-XBPM:CM4ds:PositionScaleX         / S01IDFE-XBPM:CM4ds:PositionScaleX S01IDFE-XBPM:CM4ds:PositionScaleY         / S01IDFE-XBPM:CM4ds:PositionScaleY S01IDFE-XBPM:P1ds:BMcUsedM                / S01IDFE-XBPM:P1ds:BMcUsedM S01IDFE-XBPM:P1ds:GapUsedC                / S01IDFE-XBPM:P1ds:GapUsedC S01IDFE-XBPM:P1ds:Wx1UsedM                / S01IDFE-XBPM:P1ds:Wx1UsedM S01IDFE-XBPM:P1ds:Wx2UsedM                / S01IDFE-XBPM:P1ds:Wx2UsedM S01IDFE-XBPM:P1ds:Wx3UsedM                / S01IDFE-XBPM:P1ds:Wx3UsedM S01IDFE-XBPM:P1ds:Wy1UsedM                / S01IDFE-XBPM:P1ds:Wy1UsedM S01IDFE-XBPM:P1ds:Wy2UsedM                / S01IDFE-XBPM:P1ds:Wy2UsedM S01IDFE-XBPM:P1ds:Wy3UsedM                / S01IDFE-XBPM:P1ds:Wy3UsedM S01IDFE-XBPM:P1ds:x                       / S01IDFE-XBPM:P1ds:x S01IDFE-XBPM:P1ds:x:CalFactor1M           / S01IDFE-XBPM:P1ds:x:CalFactor1M S01IDFE-XBPM:P1ds:x:CalFactor2M           / S01IDFE-XBPM:P1ds:x:CalFactor2M S01IDFE-XBPM:P1ds:x:LowPass1sM            / S01IDFE-XBPM:P1ds:x:LowPass1sM S01IDFE-XBPM:P1ds:x:LowPass8sM            / S01IDFE-XBPM:P1ds:x:LowPass8sM S01IDFE-XBPM:P1ds:x:LowPass64sM           / S01IDFE-XBPM:P1ds:x:LowPass64sM S01IDFE-XBPM:P1ds:x:Offset1M              / S01IDFE-XBPM:P1ds:x:Offset1M S01IDFE-XBPM:P1ds:x:Offset2M              / S01IDFE-XBPM:P1ds:x:Offset2M S01IDFE-XBPM:P1ds:x:ResolutionM           / S01IDFE-XBPM:P1ds:x:ResolutionM S01IDFE-XBPM:P1ds:x:Resolution1sM         / S01IDFE-XBPM:P1ds:x:Resolution1sM S01IDFE-XBPM:P1ds:x:Resolution8sM         / S01IDFE-XBPM:P1ds:x:Resolution8sM S01IDFE-XBPM:P1ds:x:Resolution64sM        / S01IDFE-XBPM:P1ds:x:Resolution64sM S01IDFE-XBPM:P1ds:x:StdDevM               / S01IDFE-XBPM:P1ds:x:StdDevM S01IDFE-XBPM:P1ds:x:StdDev1sM             / S01IDFE-XBPM:P1ds:x:StdDev1sM S01IDFE-XBPM:P1ds:x:StdDev8sM             / S01IDFE-XBPM:P1ds:x:StdDev8sM S01IDFE-XBPM:P1ds:x:StdDev64sM            / S01IDFE-XBPM:P1ds:x:StdDev64sM S01IDFE-XBPM:P1ds:x1:LowPass1sM           / S01IDFE-XBPM:P1ds:x1:LowPass1sM S01IDFE-XBPM:P1ds:x1:LowPass8sM           / S01IDFE-XBPM:P1ds:x1:LowPass8sM S01IDFE-XBPM:P1ds:x1:LowPass64sM          / S01IDFE-XBPM:P1ds:x1:LowPass64sM S01IDFE-XBPM:P1ds:x2:LowPass1sM           / S01IDFE-XBPM:P1ds:x2:LowPass1sM S01IDFE-XBPM:P1ds:x2:LowPass8sM           / S01IDFE-XBPM:P1ds:x2:LowPass8sM S01IDFE-XBPM:P1ds:x2:LowPass64sM          / S01IDFE-XBPM:P1ds:x2:LowPass64sM S01IDFE-XBPM:P1ds:y                       / S01IDFE-XBPM:P1ds:y S01IDFE-XBPM:P1ds:y:CalFactor1M           / S01IDFE-XBPM:P1ds:y:CalFactor1M S01IDFE-XBPM:P1ds:y:CalFactor2M           / S01IDFE-XBPM:P1ds:y:CalFactor2M S01IDFE-XBPM:P1ds:y:LowPass1sM            / S01IDFE-XBPM:P1ds:y:LowPass1sM S01IDFE-XBPM:P1ds:y:LowPass8sM            / S01IDFE-XBPM:P1ds:y:LowPass8sM S01IDFE-XBPM:P1ds:y:LowPass64sM           / S01IDFE-XBPM:P1ds:y:LowPass64sM S01IDFE-XBPM:P1ds:y:Offset1M              / S01IDFE-XBPM:P1ds:y:Offset1M S01IDFE-XBPM:P1ds:y:Offset2M              / S01IDFE-XBPM:P1ds:y:Offset2M S01IDFE-XBPM:P1ds:y:ResolutionM           / S01IDFE-XBPM:P1ds:y:ResolutionM S01IDFE-XBPM:P1ds:y:Resolution1sM         / S01IDFE-XBPM:P1ds:y:Resolution1sM S01IDFE-XBPM:P1ds:y:Resolution8sM         / S01IDFE-XBPM:P1ds:y:Resolution8sM S01IDFE-XBPM:P1ds:y:Resolution64sM        / S01IDFE-XBPM:P1ds:y:Resolution64sM S01IDFE-XBPM:P1ds:y:StdDevM               / S01IDFE-XBPM:P1ds:y:StdDevM S01IDFE-XBPM:P1ds:y:StdDev1sM             / S01IDFE-XBPM:P1ds:y:StdDev1sM S01IDFE-XBPM:P1ds:y:StdDev8sM             / S01IDFE-XBPM:P1ds:y:StdDev8sM S01IDFE-XBPM:P1ds:y:StdDev64sM            / S01IDFE-XBPM:P1ds:y:StdDev64sM S01IDFE-XBPM:P1ds:y1:LowPass1sM           / S01IDFE-XBPM:P1ds:y1:LowPass1sM S01IDFE-XBPM:P1ds:y1:LowPass8sM           / S01IDFE-XBPM:P1ds:y1:LowPass8sM S01IDFE-XBPM:P1ds:y1:LowPass64sM          / S01IDFE-XBPM:P1ds:y1:LowPass64sM S01IDFE-XBPM:P1ds:y2:LowPass1sM           / S01IDFE-XBPM:P1ds:y2:LowPass1sM S01IDFE-XBPM:P1ds:y2:LowPass8sM           / S01IDFE-XBPM:P1ds:y2:LowPass8sM S01IDFE-XBPM:P1ds:y2:LowPass64sM          / S01IDFE-XBPM:P1ds:y2:LowPass64sM S01IDFE-XBPM:P2ds:GapUsedC                / S01IDFE-XBPM:P2ds:GapUsedC S01IDFE-XBPM:P2ds:XCalM                   / S01IDFE-XBPM:P2ds:XCalM S01IDFE-XBPM:P2ds:YCalM                   / S01IDFE-XBPM:P2ds:YCalM S01IDFE-XBPM:P2ds:x:CalFactorM            / S01IDFE-XBPM:P2ds:x:CalFactorM S01IDFE-XBPM:P2ds:x:OffsetM               / S01IDFE-XBPM:P2ds:x:OffsetM S01IDFE-XBPM:P2ds:y:CalFactorM            / S01IDFE-XBPM:P2ds:y:CalFactorM S01IDFE-XBPM:P2ds:y:OffsetM               / S01IDFE-XBPM:P2ds:y:OffsetM S02BMFE-XBPM:P1:AM                        / S02BMFE-XBPM:P1:AM S02BMFE-XBPM:P1:BM                        / S02BMFE-XBPM:P1:BM S02BMFE-XBPM:P1:y                         / S02BMFE-XBPM:P1:y S02BMFE-XBPM:P1:y:LowPass1sM              / S02BMFE-XBPM:P1:y:LowPass1sM S02BMFE-XBPM:P1:y:LowPass8sM              / S02BMFE-XBPM:P1:y:LowPass8sM S02BMFE-XBPM:P1:y:LowPass64sM             / S02BMFE-XBPM:P1:y:LowPass64sM S02BMFE-XBPM:P1:y:StdDevM                 / S02BMFE-XBPM:P1:y:StdDevM S02BMFE-XBPM:P1:y:StdDev1sM               / S02BMFE-XBPM:P1:y:StdDev1sM S02BMFE-XBPM:P1:y:StdDev8sM               / S02BMFE-XBPM:P1:y:StdDev8sM S02BMFE-XBPM:P1:y:StdDev64sM              / S02BMFE-XBPM:P1:y:StdDev64sM S02BMFE-XBPM:P2:AM                        / S02BMFE-XBPM:P2:AM S02BMFE-XBPM:P2:BM                        / S02BMFE-XBPM:P2:BM S02BMFE-XBPM:P2:y                         / S02BMFE-XBPM:P2:y S02BMFE-XBPM:P2:y:LowPass1sM              / S02BMFE-XBPM:P2:y:LowPass1sM S02BMFE-XBPM:P2:y:LowPass8sM              / S02BMFE-XBPM:P2:y:LowPass8sM S02BMFE-XBPM:P2:y:LowPass64sM             / S02BMFE-XBPM:P2:y:LowPass64sM S02BMFE-XBPM:P2:y:StdDevM                 / S02BMFE-XBPM:P2:y:StdDevM S02BMFE-XBPM:P2:y:StdDev1sM               / S02BMFE-XBPM:P2:y:StdDev1sM S02BMFE-XBPM:P2:y:StdDev8sM               / S02BMFE-XBPM:P2:y:StdDev8sM S02BMFE-XBPM:P2:y:StdDev64sM              / S02BMFE-XBPM:P2:y:StdDev64sM S02IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S02IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S02IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S02IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S02IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S02IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S02IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S02IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S02IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S02IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S02IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S02IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S02IDFE-XBPM:CM1ds:PositionOffsetX        / S02IDFE-XBPM:CM1ds:PositionOffsetX S02IDFE-XBPM:CM1ds:PositionOffsetY        / S02IDFE-XBPM:CM1ds:PositionOffsetY S02IDFE-XBPM:CM1ds:PositionScaleX         / S02IDFE-XBPM:CM1ds:PositionScaleX S02IDFE-XBPM:CM1ds:PositionScaleY         / S02IDFE-XBPM:CM1ds:PositionScaleY S02IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S02IDFE-XBPM:CM1us:Current1:MeanValue_RBV S02IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S02IDFE-XBPM:CM1us:Current2:MeanValue_RBV S02IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S02IDFE-XBPM:CM1us:Current3:MeanValue_RBV S02IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S02IDFE-XBPM:CM1us:Current4:MeanValue_RBV S02IDFE-XBPM:CM1us:PosX:MeanValue_RBV     / S02IDFE-XBPM:CM1us:PosX:MeanValue_RBV S02IDFE-XBPM:CM1us:PosY:MeanValue_RBV     / S02IDFE-XBPM:CM1us:PosY:MeanValue_RBV S02IDFE-XBPM:CM1us:PositionOffsetX        / S02IDFE-XBPM:CM1us:PositionOffsetX S02IDFE-XBPM:CM1us:PositionOffsetY        / S02IDFE-XBPM:CM1us:PositionOffsetY S02IDFE-XBPM:CM1us:PositionScaleX         / S02IDFE-XBPM:CM1us:PositionScaleX S02IDFE-XBPM:CM1us:PositionScaleY         / S02IDFE-XBPM:CM1us:PositionScaleY S02IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S02IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S02IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S02IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S02IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S02IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S02IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S02IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S02IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S02IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S02IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S02IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S02IDFE-XBPM:CM2ds:PositionOffsetX        / S02IDFE-XBPM:CM2ds:PositionOffsetX S02IDFE-XBPM:CM2ds:PositionOffsetY        / S02IDFE-XBPM:CM2ds:PositionOffsetY S02IDFE-XBPM:CM2ds:PositionScaleX         / S02IDFE-XBPM:CM2ds:PositionScaleX S02IDFE-XBPM:CM2ds:PositionScaleY         / S02IDFE-XBPM:CM2ds:PositionScaleY S02IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S02IDFE-XBPM:CM2us:Current1:MeanValue_RBV S02IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S02IDFE-XBPM:CM2us:Current2:MeanValue_RBV S02IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S02IDFE-XBPM:CM2us:Current3:MeanValue_RBV S02IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S02IDFE-XBPM:CM2us:Current4:MeanValue_RBV S02IDFE-XBPM:CM2us:PosX:MeanValue_RBV     / S02IDFE-XBPM:CM2us:PosX:MeanValue_RBV S02IDFE-XBPM:CM2us:PosY:MeanValue_RBV     / S02IDFE-XBPM:CM2us:PosY:MeanValue_RBV S02IDFE-XBPM:CM2us:PositionOffsetX        / S02IDFE-XBPM:CM2us:PositionOffsetX S02IDFE-XBPM:CM2us:PositionOffsetY        / S02IDFE-XBPM:CM2us:PositionOffsetY S02IDFE-XBPM:CM2us:PositionScaleX         / S02IDFE-XBPM:CM2us:PositionScaleX S02IDFE-XBPM:CM2us:PositionScaleY         / S02IDFE-XBPM:CM2us:PositionScaleY S02IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S02IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S02IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S02IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S02IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S02IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S02IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S02IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S02IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S02IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S02IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S02IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S02IDFE-XBPM:CM3ds:PositionOffsetX        / S02IDFE-XBPM:CM3ds:PositionOffsetX S02IDFE-XBPM:CM3ds:PositionOffsetY        / S02IDFE-XBPM:CM3ds:PositionOffsetY S02IDFE-XBPM:CM3ds:PositionScaleX         / S02IDFE-XBPM:CM3ds:PositionScaleX S02IDFE-XBPM:CM3ds:PositionScaleY         / S02IDFE-XBPM:CM3ds:PositionScaleY S02IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S02IDFE-XBPM:CM3us:Current1:MeanValue_RBV S02IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S02IDFE-XBPM:CM3us:Current2:MeanValue_RBV S02IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S02IDFE-XBPM:CM3us:Current3:MeanValue_RBV S02IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S02IDFE-XBPM:CM3us:Current4:MeanValue_RBV S02IDFE-XBPM:CM3us:PosX:MeanValue_RBV     / S02IDFE-XBPM:CM3us:PosX:MeanValue_RBV S02IDFE-XBPM:CM3us:PosY:MeanValue_RBV     / S02IDFE-XBPM:CM3us:PosY:MeanValue_RBV S02IDFE-XBPM:CM3us:PositionOffsetX        / S02IDFE-XBPM:CM3us:PositionOffsetX S02IDFE-XBPM:CM3us:PositionOffsetY        / S02IDFE-XBPM:CM3us:PositionOffsetY S02IDFE-XBPM:CM3us:PositionScaleX         / S02IDFE-XBPM:CM3us:PositionScaleX S02IDFE-XBPM:CM3us:PositionScaleY         / S02IDFE-XBPM:CM3us:PositionScaleY S02IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S02IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S02IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S02IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S02IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S02IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S02IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S02IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S02IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S02IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S02IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S02IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S02IDFE-XBPM:CM4ds:PositionOffsetX        / S02IDFE-XBPM:CM4ds:PositionOffsetX S02IDFE-XBPM:CM4ds:PositionOffsetY        / S02IDFE-XBPM:CM4ds:PositionOffsetY S02IDFE-XBPM:CM4ds:PositionScaleX         / S02IDFE-XBPM:CM4ds:PositionScaleX S02IDFE-XBPM:CM4ds:PositionScaleY         / S02IDFE-XBPM:CM4ds:PositionScaleY S02IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S02IDFE-XBPM:CM4us:Current1:MeanValue_RBV S02IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S02IDFE-XBPM:CM4us:Current2:MeanValue_RBV S02IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S02IDFE-XBPM:CM4us:Current3:MeanValue_RBV S02IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S02IDFE-XBPM:CM4us:Current4:MeanValue_RBV S02IDFE-XBPM:CM4us:PosX:MeanValue_RBV     / S02IDFE-XBPM:CM4us:PosX:MeanValue_RBV S02IDFE-XBPM:CM4us:PosY:MeanValue_RBV     / S02IDFE-XBPM:CM4us:PosY:MeanValue_RBV S02IDFE-XBPM:CM4us:PositionOffsetX        / S02IDFE-XBPM:CM4us:PositionOffsetX S02IDFE-XBPM:CM4us:PositionOffsetY        / S02IDFE-XBPM:CM4us:PositionOffsetY S02IDFE-XBPM:CM4us:PositionScaleX         / S02IDFE-XBPM:CM4us:PositionScaleX S02IDFE-XBPM:CM4us:PositionScaleY         / S02IDFE-XBPM:CM4us:PositionScaleY S02IDFE-XBPM:P1ds:BMcUsedM                / S02IDFE-XBPM:P1ds:BMcUsedM S02IDFE-XBPM:P1ds:GapUsedC                / S02IDFE-XBPM:P1ds:GapUsedC S02IDFE-XBPM:P1ds:Wx1UsedM                / S02IDFE-XBPM:P1ds:Wx1UsedM S02IDFE-XBPM:P1ds:Wx2UsedM                / S02IDFE-XBPM:P1ds:Wx2UsedM S02IDFE-XBPM:P1ds:Wx3UsedM                / S02IDFE-XBPM:P1ds:Wx3UsedM S02IDFE-XBPM:P1ds:Wy1UsedM                / S02IDFE-XBPM:P1ds:Wy1UsedM S02IDFE-XBPM:P1ds:Wy2UsedM                / S02IDFE-XBPM:P1ds:Wy2UsedM S02IDFE-XBPM:P1ds:Wy3UsedM                / S02IDFE-XBPM:P1ds:Wy3UsedM S02IDFE-XBPM:P1ds:x                       / S02IDFE-XBPM:P1ds:x S02IDFE-XBPM:P1ds:x:CalFactor1M           / S02IDFE-XBPM:P1ds:x:CalFactor1M S02IDFE-XBPM:P1ds:x:CalFactor2M           / S02IDFE-XBPM:P1ds:x:CalFactor2M S02IDFE-XBPM:P1ds:x:LowPass1sM            / S02IDFE-XBPM:P1ds:x:LowPass1sM S02IDFE-XBPM:P1ds:x:LowPass8sM            / S02IDFE-XBPM:P1ds:x:LowPass8sM S02IDFE-XBPM:P1ds:x:LowPass64sM           / S02IDFE-XBPM:P1ds:x:LowPass64sM S02IDFE-XBPM:P1ds:x:Offset1M              / S02IDFE-XBPM:P1ds:x:Offset1M S02IDFE-XBPM:P1ds:x:Offset2M              / S02IDFE-XBPM:P1ds:x:Offset2M S02IDFE-XBPM:P1ds:x:ResolutionM           / S02IDFE-XBPM:P1ds:x:ResolutionM S02IDFE-XBPM:P1ds:x:Resolution1sM         / S02IDFE-XBPM:P1ds:x:Resolution1sM S02IDFE-XBPM:P1ds:x:Resolution8sM         / S02IDFE-XBPM:P1ds:x:Resolution8sM S02IDFE-XBPM:P1ds:x:Resolution64sM        / S02IDFE-XBPM:P1ds:x:Resolution64sM S02IDFE-XBPM:P1ds:x:StdDevM               / S02IDFE-XBPM:P1ds:x:StdDevM S02IDFE-XBPM:P1ds:x:StdDev1sM             / S02IDFE-XBPM:P1ds:x:StdDev1sM S02IDFE-XBPM:P1ds:x:StdDev8sM             / S02IDFE-XBPM:P1ds:x:StdDev8sM S02IDFE-XBPM:P1ds:x:StdDev64sM            / S02IDFE-XBPM:P1ds:x:StdDev64sM S02IDFE-XBPM:P1ds:x1:LowPass1sM           / S02IDFE-XBPM:P1ds:x1:LowPass1sM S02IDFE-XBPM:P1ds:x1:LowPass8sM           / S02IDFE-XBPM:P1ds:x1:LowPass8sM S02IDFE-XBPM:P1ds:x1:LowPass64sM          / S02IDFE-XBPM:P1ds:x1:LowPass64sM S02IDFE-XBPM:P1ds:x2:LowPass1sM           / S02IDFE-XBPM:P1ds:x2:LowPass1sM S02IDFE-XBPM:P1ds:x2:LowPass8sM           / S02IDFE-XBPM:P1ds:x2:LowPass8sM S02IDFE-XBPM:P1ds:x2:LowPass64sM          / S02IDFE-XBPM:P1ds:x2:LowPass64sM S02IDFE-XBPM:P1ds:y                       / S02IDFE-XBPM:P1ds:y S02IDFE-XBPM:P1ds:y:CalFactor1M           / S02IDFE-XBPM:P1ds:y:CalFactor1M S02IDFE-XBPM:P1ds:y:CalFactor2M           / S02IDFE-XBPM:P1ds:y:CalFactor2M S02IDFE-XBPM:P1ds:y:LowPass1sM            / S02IDFE-XBPM:P1ds:y:LowPass1sM S02IDFE-XBPM:P1ds:y:LowPass8sM            / S02IDFE-XBPM:P1ds:y:LowPass8sM S02IDFE-XBPM:P1ds:y:LowPass64sM           / S02IDFE-XBPM:P1ds:y:LowPass64sM S02IDFE-XBPM:P1ds:y:Offset1M              / S02IDFE-XBPM:P1ds:y:Offset1M S02IDFE-XBPM:P1ds:y:Offset2M              / S02IDFE-XBPM:P1ds:y:Offset2M S02IDFE-XBPM:P1ds:y:ResolutionM           / S02IDFE-XBPM:P1ds:y:ResolutionM S02IDFE-XBPM:P1ds:y:Resolution1sM         / S02IDFE-XBPM:P1ds:y:Resolution1sM S02IDFE-XBPM:P1ds:y:Resolution8sM         / S02IDFE-XBPM:P1ds:y:Resolution8sM S02IDFE-XBPM:P1ds:y:Resolution64sM        / S02IDFE-XBPM:P1ds:y:Resolution64sM S02IDFE-XBPM:P1ds:y:StdDevM               / S02IDFE-XBPM:P1ds:y:StdDevM S02IDFE-XBPM:P1ds:y:StdDev1sM             / S02IDFE-XBPM:P1ds:y:StdDev1sM S02IDFE-XBPM:P1ds:y:StdDev8sM             / S02IDFE-XBPM:P1ds:y:StdDev8sM S02IDFE-XBPM:P1ds:y:StdDev64sM            / S02IDFE-XBPM:P1ds:y:StdDev64sM S02IDFE-XBPM:P1ds:y1:LowPass1sM           / S02IDFE-XBPM:P1ds:y1:LowPass1sM S02IDFE-XBPM:P1ds:y1:LowPass8sM           / S02IDFE-XBPM:P1ds:y1:LowPass8sM S02IDFE-XBPM:P1ds:y1:LowPass64sM          / S02IDFE-XBPM:P1ds:y1:LowPass64sM S02IDFE-XBPM:P1ds:y2:LowPass1sM           / S02IDFE-XBPM:P1ds:y2:LowPass1sM S02IDFE-XBPM:P1ds:y2:LowPass8sM           / S02IDFE-XBPM:P1ds:y2:LowPass8sM S02IDFE-XBPM:P1ds:y2:LowPass64sM          / S02IDFE-XBPM:P1ds:y2:LowPass64sM S02IDFE-XBPM:P1us:BMcUsedM                / S02IDFE-XBPM:P1us:BMcUsedM S02IDFE-XBPM:P1us:GapUsedC                / S02IDFE-XBPM:P1us:GapUsedC S02IDFE-XBPM:P1us:Wx1UsedM                / S02IDFE-XBPM:P1us:Wx1UsedM S02IDFE-XBPM:P1us:Wx2UsedM                / S02IDFE-XBPM:P1us:Wx2UsedM S02IDFE-XBPM:P1us:Wx3UsedM                / S02IDFE-XBPM:P1us:Wx3UsedM S02IDFE-XBPM:P1us:Wy1UsedM                / S02IDFE-XBPM:P1us:Wy1UsedM S02IDFE-XBPM:P1us:Wy2UsedM                / S02IDFE-XBPM:P1us:Wy2UsedM S02IDFE-XBPM:P1us:Wy3UsedM                / S02IDFE-XBPM:P1us:Wy3UsedM S02IDFE-XBPM:P1us:x                       / S02IDFE-XBPM:P1us:x S02IDFE-XBPM:P1us:x:CalFactor1M           / S02IDFE-XBPM:P1us:x:CalFactor1M S02IDFE-XBPM:P1us:x:CalFactor2M           / S02IDFE-XBPM:P1us:x:CalFactor2M S02IDFE-XBPM:P1us:x:LowPass1sM            / S02IDFE-XBPM:P1us:x:LowPass1sM S02IDFE-XBPM:P1us:x:LowPass8sM            / S02IDFE-XBPM:P1us:x:LowPass8sM S02IDFE-XBPM:P1us:x:LowPass64sM           / S02IDFE-XBPM:P1us:x:LowPass64sM S02IDFE-XBPM:P1us:x:Offset1M              / S02IDFE-XBPM:P1us:x:Offset1M S02IDFE-XBPM:P1us:x:Offset2M              / S02IDFE-XBPM:P1us:x:Offset2M S02IDFE-XBPM:P1us:x:ResolutionM           / S02IDFE-XBPM:P1us:x:ResolutionM S02IDFE-XBPM:P1us:x:Resolution1sM         / S02IDFE-XBPM:P1us:x:Resolution1sM S02IDFE-XBPM:P1us:x:Resolution8sM         / S02IDFE-XBPM:P1us:x:Resolution8sM S02IDFE-XBPM:P1us:x:Resolution64sM        / S02IDFE-XBPM:P1us:x:Resolution64sM S02IDFE-XBPM:P1us:x:StdDevM               / S02IDFE-XBPM:P1us:x:StdDevM S02IDFE-XBPM:P1us:x:StdDev1sM             / S02IDFE-XBPM:P1us:x:StdDev1sM S02IDFE-XBPM:P1us:x:StdDev8sM             / S02IDFE-XBPM:P1us:x:StdDev8sM S02IDFE-XBPM:P1us:x:StdDev64sM            / S02IDFE-XBPM:P1us:x:StdDev64sM S02IDFE-XBPM:P1us:x1:LowPass1sM           / S02IDFE-XBPM:P1us:x1:LowPass1sM S02IDFE-XBPM:P1us:x1:LowPass8sM           / S02IDFE-XBPM:P1us:x1:LowPass8sM S02IDFE-XBPM:P1us:x1:LowPass64sM          / S02IDFE-XBPM:P1us:x1:LowPass64sM S02IDFE-XBPM:P1us:x2:LowPass1sM           / S02IDFE-XBPM:P1us:x2:LowPass1sM S02IDFE-XBPM:P1us:x2:LowPass8sM           / S02IDFE-XBPM:P1us:x2:LowPass8sM S02IDFE-XBPM:P1us:x2:LowPass64sM          / S02IDFE-XBPM:P1us:x2:LowPass64sM S02IDFE-XBPM:P1us:y                       / S02IDFE-XBPM:P1us:y S02IDFE-XBPM:P1us:y:CalFactor1M           / S02IDFE-XBPM:P1us:y:CalFactor1M S02IDFE-XBPM:P1us:y:CalFactor2M           / S02IDFE-XBPM:P1us:y:CalFactor2M S02IDFE-XBPM:P1us:y:LowPass1sM            / S02IDFE-XBPM:P1us:y:LowPass1sM S02IDFE-XBPM:P1us:y:LowPass8sM            / S02IDFE-XBPM:P1us:y:LowPass8sM S02IDFE-XBPM:P1us:y:LowPass64sM           / S02IDFE-XBPM:P1us:y:LowPass64sM S02IDFE-XBPM:P1us:y:Offset1M              / S02IDFE-XBPM:P1us:y:Offset1M S02IDFE-XBPM:P1us:y:Offset2M              / S02IDFE-XBPM:P1us:y:Offset2M S02IDFE-XBPM:P1us:y:ResolutionM           / S02IDFE-XBPM:P1us:y:ResolutionM S02IDFE-XBPM:P1us:y:Resolution1sM         / S02IDFE-XBPM:P1us:y:Resolution1sM S02IDFE-XBPM:P1us:y:Resolution8sM         / S02IDFE-XBPM:P1us:y:Resolution8sM S02IDFE-XBPM:P1us:y:Resolution64sM        / S02IDFE-XBPM:P1us:y:Resolution64sM S02IDFE-XBPM:P1us:y:StdDevM               / S02IDFE-XBPM:P1us:y:StdDevM S02IDFE-XBPM:P1us:y:StdDev1sM             / S02IDFE-XBPM:P1us:y:StdDev1sM S02IDFE-XBPM:P1us:y:StdDev8sM             / S02IDFE-XBPM:P1us:y:StdDev8sM S02IDFE-XBPM:P1us:y:StdDev64sM            / S02IDFE-XBPM:P1us:y:StdDev64sM S02IDFE-XBPM:P1us:y1:LowPass1sM           / S02IDFE-XBPM:P1us:y1:LowPass1sM S02IDFE-XBPM:P1us:y1:LowPass8sM           / S02IDFE-XBPM:P1us:y1:LowPass8sM S02IDFE-XBPM:P1us:y1:LowPass64sM          / S02IDFE-XBPM:P1us:y1:LowPass64sM S02IDFE-XBPM:P1us:y2:LowPass1sM           / S02IDFE-XBPM:P1us:y2:LowPass1sM S02IDFE-XBPM:P1us:y2:LowPass8sM           / S02IDFE-XBPM:P1us:y2:LowPass8sM S02IDFE-XBPM:P1us:y2:LowPass64sM          / S02IDFE-XBPM:P1us:y2:LowPass64sM S02IDFE-XBPM:P2ds:GapUsedC                / S02IDFE-XBPM:P2ds:GapUsedC S02IDFE-XBPM:P2ds:XCalM                   / S02IDFE-XBPM:P2ds:XCalM S02IDFE-XBPM:P2ds:YCalM                   / S02IDFE-XBPM:P2ds:YCalM S02IDFE-XBPM:P2ds:x:CalFactorM            / S02IDFE-XBPM:P2ds:x:CalFactorM S02IDFE-XBPM:P2ds:x:OffsetM               / S02IDFE-XBPM:P2ds:x:OffsetM S02IDFE-XBPM:P2ds:y:CalFactorM            / S02IDFE-XBPM:P2ds:y:CalFactorM S02IDFE-XBPM:P2ds:y:OffsetM               / S02IDFE-XBPM:P2ds:y:OffsetM S02IDFE-XBPM:P2us:GapUsedC                / S02IDFE-XBPM:P2us:GapUsedC S02IDFE-XBPM:P2us:XCalM                   / S02IDFE-XBPM:P2us:XCalM S02IDFE-XBPM:P2us:YCalM                   / S02IDFE-XBPM:P2us:YCalM S02IDFE-XBPM:P2us:x:CalFactorM            / S02IDFE-XBPM:P2us:x:CalFactorM S02IDFE-XBPM:P2us:x:OffsetM               / S02IDFE-XBPM:P2us:x:OffsetM S02IDFE-XBPM:P2us:y:CalFactorM            / S02IDFE-XBPM:P2us:y:CalFactorM S02IDFE-XBPM:P2us:y:OffsetM               / S02IDFE-XBPM:P2us:y:OffsetM S03IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S03IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S03IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S03IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S03IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S03IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S03IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S03IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S03IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S03IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S03IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S03IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S03IDFE-XBPM:CM1ds:PositionOffsetX        / S03IDFE-XBPM:CM1ds:PositionOffsetX S03IDFE-XBPM:CM1ds:PositionOffsetY        / S03IDFE-XBPM:CM1ds:PositionOffsetY S03IDFE-XBPM:CM1ds:PositionScaleX         / S03IDFE-XBPM:CM1ds:PositionScaleX S03IDFE-XBPM:CM1ds:PositionScaleY         / S03IDFE-XBPM:CM1ds:PositionScaleY S03IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S03IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S03IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S03IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S03IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S03IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S03IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S03IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S03IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S03IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S03IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S03IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S03IDFE-XBPM:CM2ds:PositionOffsetX        / S03IDFE-XBPM:CM2ds:PositionOffsetX S03IDFE-XBPM:CM2ds:PositionOffsetY        / S03IDFE-XBPM:CM2ds:PositionOffsetY S03IDFE-XBPM:CM2ds:PositionScaleX         / S03IDFE-XBPM:CM2ds:PositionScaleX S03IDFE-XBPM:CM2ds:PositionScaleY         / S03IDFE-XBPM:CM2ds:PositionScaleY S03IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S03IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S03IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S03IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S03IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S03IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S03IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S03IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S03IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S03IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S03IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S03IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S03IDFE-XBPM:CM3ds:PositionOffsetX        / S03IDFE-XBPM:CM3ds:PositionOffsetX S03IDFE-XBPM:CM3ds:PositionOffsetY        / S03IDFE-XBPM:CM3ds:PositionOffsetY S03IDFE-XBPM:CM3ds:PositionScaleX         / S03IDFE-XBPM:CM3ds:PositionScaleX S03IDFE-XBPM:CM3ds:PositionScaleY         / S03IDFE-XBPM:CM3ds:PositionScaleY S03IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S03IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S03IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S03IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S03IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S03IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S03IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S03IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S03IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S03IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S03IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S03IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S03IDFE-XBPM:CM4ds:PositionOffsetX        / S03IDFE-XBPM:CM4ds:PositionOffsetX S03IDFE-XBPM:CM4ds:PositionOffsetY        / S03IDFE-XBPM:CM4ds:PositionOffsetY S03IDFE-XBPM:CM4ds:PositionScaleX         / S03IDFE-XBPM:CM4ds:PositionScaleX S03IDFE-XBPM:CM4ds:PositionScaleY         / S03IDFE-XBPM:CM4ds:PositionScaleY S03IDFE-XBPM:P1ds:BMcUsedM                / S03IDFE-XBPM:P1ds:BMcUsedM S03IDFE-XBPM:P1ds:GapUsedC                / S03IDFE-XBPM:P1ds:GapUsedC S03IDFE-XBPM:P1ds:Wx1UsedM                / S03IDFE-XBPM:P1ds:Wx1UsedM S03IDFE-XBPM:P1ds:Wx2UsedM                / S03IDFE-XBPM:P1ds:Wx2UsedM S03IDFE-XBPM:P1ds:Wx3UsedM                / S03IDFE-XBPM:P1ds:Wx3UsedM S03IDFE-XBPM:P1ds:Wy1UsedM                / S03IDFE-XBPM:P1ds:Wy1UsedM S03IDFE-XBPM:P1ds:Wy2UsedM                / S03IDFE-XBPM:P1ds:Wy2UsedM S03IDFE-XBPM:P1ds:Wy3UsedM                / S03IDFE-XBPM:P1ds:Wy3UsedM S03IDFE-XBPM:P1ds:x                       / S03IDFE-XBPM:P1ds:x S03IDFE-XBPM:P1ds:x:CalFactor1M           / S03IDFE-XBPM:P1ds:x:CalFactor1M S03IDFE-XBPM:P1ds:x:CalFactor2M           / S03IDFE-XBPM:P1ds:x:CalFactor2M S03IDFE-XBPM:P1ds:x:LowPass1sM            / S03IDFE-XBPM:P1ds:x:LowPass1sM S03IDFE-XBPM:P1ds:x:LowPass8sM            / S03IDFE-XBPM:P1ds:x:LowPass8sM S03IDFE-XBPM:P1ds:x:LowPass64sM           / S03IDFE-XBPM:P1ds:x:LowPass64sM S03IDFE-XBPM:P1ds:x:Offset1M              / S03IDFE-XBPM:P1ds:x:Offset1M S03IDFE-XBPM:P1ds:x:Offset2M              / S03IDFE-XBPM:P1ds:x:Offset2M S03IDFE-XBPM:P1ds:x:ResolutionM           / S03IDFE-XBPM:P1ds:x:ResolutionM S03IDFE-XBPM:P1ds:x:Resolution1sM         / S03IDFE-XBPM:P1ds:x:Resolution1sM S03IDFE-XBPM:P1ds:x:Resolution8sM         / S03IDFE-XBPM:P1ds:x:Resolution8sM S03IDFE-XBPM:P1ds:x:Resolution64sM        / S03IDFE-XBPM:P1ds:x:Resolution64sM S03IDFE-XBPM:P1ds:x:StdDevM               / S03IDFE-XBPM:P1ds:x:StdDevM S03IDFE-XBPM:P1ds:x:StdDev1sM             / S03IDFE-XBPM:P1ds:x:StdDev1sM S03IDFE-XBPM:P1ds:x:StdDev8sM             / S03IDFE-XBPM:P1ds:x:StdDev8sM S03IDFE-XBPM:P1ds:x:StdDev64sM            / S03IDFE-XBPM:P1ds:x:StdDev64sM S03IDFE-XBPM:P1ds:x1:LowPass1sM           / S03IDFE-XBPM:P1ds:x1:LowPass1sM S03IDFE-XBPM:P1ds:x1:LowPass8sM           / S03IDFE-XBPM:P1ds:x1:LowPass8sM S03IDFE-XBPM:P1ds:x1:LowPass64sM          / S03IDFE-XBPM:P1ds:x1:LowPass64sM S03IDFE-XBPM:P1ds:x2:LowPass1sM           / S03IDFE-XBPM:P1ds:x2:LowPass1sM S03IDFE-XBPM:P1ds:x2:LowPass8sM           / S03IDFE-XBPM:P1ds:x2:LowPass8sM S03IDFE-XBPM:P1ds:x2:LowPass64sM          / S03IDFE-XBPM:P1ds:x2:LowPass64sM S03IDFE-XBPM:P1ds:y                       / S03IDFE-XBPM:P1ds:y S03IDFE-XBPM:P1ds:y:CalFactor1M           / S03IDFE-XBPM:P1ds:y:CalFactor1M S03IDFE-XBPM:P1ds:y:CalFactor2M           / S03IDFE-XBPM:P1ds:y:CalFactor2M S03IDFE-XBPM:P1ds:y:LowPass1sM            / S03IDFE-XBPM:P1ds:y:LowPass1sM S03IDFE-XBPM:P1ds:y:LowPass8sM            / S03IDFE-XBPM:P1ds:y:LowPass8sM S03IDFE-XBPM:P1ds:y:LowPass64sM           / S03IDFE-XBPM:P1ds:y:LowPass64sM S03IDFE-XBPM:P1ds:y:Offset1M              / S03IDFE-XBPM:P1ds:y:Offset1M S03IDFE-XBPM:P1ds:y:Offset2M              / S03IDFE-XBPM:P1ds:y:Offset2M S03IDFE-XBPM:P1ds:y:ResolutionM           / S03IDFE-XBPM:P1ds:y:ResolutionM S03IDFE-XBPM:P1ds:y:Resolution1sM         / S03IDFE-XBPM:P1ds:y:Resolution1sM S03IDFE-XBPM:P1ds:y:Resolution8sM         / S03IDFE-XBPM:P1ds:y:Resolution8sM S03IDFE-XBPM:P1ds:y:Resolution64sM        / S03IDFE-XBPM:P1ds:y:Resolution64sM S03IDFE-XBPM:P1ds:y:StdDevM               / S03IDFE-XBPM:P1ds:y:StdDevM S03IDFE-XBPM:P1ds:y:StdDev1sM             / S03IDFE-XBPM:P1ds:y:StdDev1sM S03IDFE-XBPM:P1ds:y:StdDev8sM             / S03IDFE-XBPM:P1ds:y:StdDev8sM S03IDFE-XBPM:P1ds:y:StdDev64sM            / S03IDFE-XBPM:P1ds:y:StdDev64sM S03IDFE-XBPM:P1ds:y1:LowPass1sM           / S03IDFE-XBPM:P1ds:y1:LowPass1sM S03IDFE-XBPM:P1ds:y1:LowPass8sM           / S03IDFE-XBPM:P1ds:y1:LowPass8sM S03IDFE-XBPM:P1ds:y1:LowPass64sM          / S03IDFE-XBPM:P1ds:y1:LowPass64sM S03IDFE-XBPM:P1ds:y2:LowPass1sM           / S03IDFE-XBPM:P1ds:y2:LowPass1sM S03IDFE-XBPM:P1ds:y2:LowPass8sM           / S03IDFE-XBPM:P1ds:y2:LowPass8sM S03IDFE-XBPM:P1ds:y2:LowPass64sM          / S03IDFE-XBPM:P1ds:y2:LowPass64sM S03IDFE-XBPM:P2ds:GapUsedC                / S03IDFE-XBPM:P2ds:GapUsedC S03IDFE-XBPM:P2ds:XCalM                   / S03IDFE-XBPM:P2ds:XCalM S03IDFE-XBPM:P2ds:YCalM                   / S03IDFE-XBPM:P2ds:YCalM S03IDFE-XBPM:P2ds:x:CalFactorM            / S03IDFE-XBPM:P2ds:x:CalFactorM S03IDFE-XBPM:P2ds:x:OffsetM               / S03IDFE-XBPM:P2ds:x:OffsetM S03IDFE-XBPM:P2ds:y:CalFactorM            / S03IDFE-XBPM:P2ds:y:CalFactorM S03IDFE-XBPM:P2ds:y:OffsetM               / S03IDFE-XBPM:P2ds:y:OffsetM S04IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S04IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S04IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S04IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S04IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S04IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S04IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S04IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S04IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S04IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S04IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S04IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S04IDFE-XBPM:CM1ds:PositionOffsetX        / S04IDFE-XBPM:CM1ds:PositionOffsetX S04IDFE-XBPM:CM1ds:PositionOffsetY        / S04IDFE-XBPM:CM1ds:PositionOffsetY S04IDFE-XBPM:CM1ds:PositionScaleX         / S04IDFE-XBPM:CM1ds:PositionScaleX S04IDFE-XBPM:CM1ds:PositionScaleY         / S04IDFE-XBPM:CM1ds:PositionScaleY S04IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S04IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S04IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S04IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S04IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S04IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S04IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S04IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S04IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S04IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S04IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S04IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S04IDFE-XBPM:CM2ds:PositionOffsetX        / S04IDFE-XBPM:CM2ds:PositionOffsetX S04IDFE-XBPM:CM2ds:PositionOffsetY        / S04IDFE-XBPM:CM2ds:PositionOffsetY S04IDFE-XBPM:CM2ds:PositionScaleX         / S04IDFE-XBPM:CM2ds:PositionScaleX S04IDFE-XBPM:CM2ds:PositionScaleY         / S04IDFE-XBPM:CM2ds:PositionScaleY S04IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S04IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S04IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S04IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S04IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S04IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S04IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S04IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S04IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S04IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S04IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S04IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S04IDFE-XBPM:CM3ds:PositionOffsetX        / S04IDFE-XBPM:CM3ds:PositionOffsetX S04IDFE-XBPM:CM3ds:PositionOffsetY        / S04IDFE-XBPM:CM3ds:PositionOffsetY S04IDFE-XBPM:CM3ds:PositionScaleX         / S04IDFE-XBPM:CM3ds:PositionScaleX S04IDFE-XBPM:CM3ds:PositionScaleY         / S04IDFE-XBPM:CM3ds:PositionScaleY S04IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S04IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S04IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S04IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S04IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S04IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S04IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S04IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S04IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S04IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S04IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S04IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S04IDFE-XBPM:CM4ds:PositionOffsetX        / S04IDFE-XBPM:CM4ds:PositionOffsetX S04IDFE-XBPM:CM4ds:PositionOffsetY        / S04IDFE-XBPM:CM4ds:PositionOffsetY S04IDFE-XBPM:CM4ds:PositionScaleX         / S04IDFE-XBPM:CM4ds:PositionScaleX S04IDFE-XBPM:CM4ds:PositionScaleY         / S04IDFE-XBPM:CM4ds:PositionScaleY S04IDFE-XBPM:P1ds:BMcUsedM                / S04IDFE-XBPM:P1ds:BMcUsedM S04IDFE-XBPM:P1ds:GapUsedC                / S04IDFE-XBPM:P1ds:GapUsedC S04IDFE-XBPM:P1ds:Wx1UsedM                / S04IDFE-XBPM:P1ds:Wx1UsedM S04IDFE-XBPM:P1ds:Wx2UsedM                / S04IDFE-XBPM:P1ds:Wx2UsedM S04IDFE-XBPM:P1ds:Wx3UsedM                / S04IDFE-XBPM:P1ds:Wx3UsedM S04IDFE-XBPM:P1ds:Wy1UsedM                / S04IDFE-XBPM:P1ds:Wy1UsedM S04IDFE-XBPM:P1ds:Wy2UsedM                / S04IDFE-XBPM:P1ds:Wy2UsedM S04IDFE-XBPM:P1ds:Wy3UsedM                / S04IDFE-XBPM:P1ds:Wy3UsedM S04IDFE-XBPM:P1ds:x                       / S04IDFE-XBPM:P1ds:x S04IDFE-XBPM:P1ds:x:CalFactor1M           / S04IDFE-XBPM:P1ds:x:CalFactor1M S04IDFE-XBPM:P1ds:x:CalFactor2M           / S04IDFE-XBPM:P1ds:x:CalFactor2M S04IDFE-XBPM:P1ds:x:LowPass1sM            / S04IDFE-XBPM:P1ds:x:LowPass1sM S04IDFE-XBPM:P1ds:x:LowPass8sM            / S04IDFE-XBPM:P1ds:x:LowPass8sM S04IDFE-XBPM:P1ds:x:LowPass64sM           / S04IDFE-XBPM:P1ds:x:LowPass64sM S04IDFE-XBPM:P1ds:x:Offset1M              / S04IDFE-XBPM:P1ds:x:Offset1M S04IDFE-XBPM:P1ds:x:Offset2M              / S04IDFE-XBPM:P1ds:x:Offset2M S04IDFE-XBPM:P1ds:x:ResolutionM           / S04IDFE-XBPM:P1ds:x:ResolutionM S04IDFE-XBPM:P1ds:x:Resolution1sM         / S04IDFE-XBPM:P1ds:x:Resolution1sM S04IDFE-XBPM:P1ds:x:Resolution8sM         / S04IDFE-XBPM:P1ds:x:Resolution8sM S04IDFE-XBPM:P1ds:x:Resolution64sM        / S04IDFE-XBPM:P1ds:x:Resolution64sM S04IDFE-XBPM:P1ds:x:StdDevM               / S04IDFE-XBPM:P1ds:x:StdDevM S04IDFE-XBPM:P1ds:x:StdDev1sM             / S04IDFE-XBPM:P1ds:x:StdDev1sM S04IDFE-XBPM:P1ds:x:StdDev8sM             / S04IDFE-XBPM:P1ds:x:StdDev8sM S04IDFE-XBPM:P1ds:x:StdDev64sM            / S04IDFE-XBPM:P1ds:x:StdDev64sM S04IDFE-XBPM:P1ds:x1:LowPass1sM           / S04IDFE-XBPM:P1ds:x1:LowPass1sM S04IDFE-XBPM:P1ds:x1:LowPass8sM           / S04IDFE-XBPM:P1ds:x1:LowPass8sM S04IDFE-XBPM:P1ds:x1:LowPass64sM          / S04IDFE-XBPM:P1ds:x1:LowPass64sM S04IDFE-XBPM:P1ds:x2:LowPass1sM           / S04IDFE-XBPM:P1ds:x2:LowPass1sM S04IDFE-XBPM:P1ds:x2:LowPass8sM           / S04IDFE-XBPM:P1ds:x2:LowPass8sM S04IDFE-XBPM:P1ds:x2:LowPass64sM          / S04IDFE-XBPM:P1ds:x2:LowPass64sM S04IDFE-XBPM:P1ds:y                       / S04IDFE-XBPM:P1ds:y S04IDFE-XBPM:P1ds:y:CalFactor1M           / S04IDFE-XBPM:P1ds:y:CalFactor1M S04IDFE-XBPM:P1ds:y:CalFactor2M           / S04IDFE-XBPM:P1ds:y:CalFactor2M S04IDFE-XBPM:P1ds:y:LowPass1sM            / S04IDFE-XBPM:P1ds:y:LowPass1sM S04IDFE-XBPM:P1ds:y:LowPass8sM            / S04IDFE-XBPM:P1ds:y:LowPass8sM S04IDFE-XBPM:P1ds:y:LowPass64sM           / S04IDFE-XBPM:P1ds:y:LowPass64sM S04IDFE-XBPM:P1ds:y:Offset1M              / S04IDFE-XBPM:P1ds:y:Offset1M S04IDFE-XBPM:P1ds:y:Offset2M              / S04IDFE-XBPM:P1ds:y:Offset2M S04IDFE-XBPM:P1ds:y:ResolutionM           / S04IDFE-XBPM:P1ds:y:ResolutionM S04IDFE-XBPM:P1ds:y:Resolution1sM         / S04IDFE-XBPM:P1ds:y:Resolution1sM S04IDFE-XBPM:P1ds:y:Resolution8sM         / S04IDFE-XBPM:P1ds:y:Resolution8sM S04IDFE-XBPM:P1ds:y:Resolution64sM        / S04IDFE-XBPM:P1ds:y:Resolution64sM S04IDFE-XBPM:P1ds:y:StdDevM               / S04IDFE-XBPM:P1ds:y:StdDevM S04IDFE-XBPM:P1ds:y:StdDev1sM             / S04IDFE-XBPM:P1ds:y:StdDev1sM S04IDFE-XBPM:P1ds:y:StdDev8sM             / S04IDFE-XBPM:P1ds:y:StdDev8sM S04IDFE-XBPM:P1ds:y:StdDev64sM            / S04IDFE-XBPM:P1ds:y:StdDev64sM S04IDFE-XBPM:P1ds:y1:LowPass1sM           / S04IDFE-XBPM:P1ds:y1:LowPass1sM S04IDFE-XBPM:P1ds:y1:LowPass8sM           / S04IDFE-XBPM:P1ds:y1:LowPass8sM S04IDFE-XBPM:P1ds:y1:LowPass64sM          / S04IDFE-XBPM:P1ds:y1:LowPass64sM S04IDFE-XBPM:P1ds:y2:LowPass1sM           / S04IDFE-XBPM:P1ds:y2:LowPass1sM S04IDFE-XBPM:P1ds:y2:LowPass8sM           / S04IDFE-XBPM:P1ds:y2:LowPass8sM S04IDFE-XBPM:P1ds:y2:LowPass64sM          / S04IDFE-XBPM:P1ds:y2:LowPass64sM S04IDFE-XBPM:P2ds:GapUsedC                / S04IDFE-XBPM:P2ds:GapUsedC S04IDFE-XBPM:P2ds:XCalM                   / S04IDFE-XBPM:P2ds:XCalM S04IDFE-XBPM:P2ds:YCalM                   / S04IDFE-XBPM:P2ds:YCalM S04IDFE-XBPM:P2ds:x:CalFactorM            / S04IDFE-XBPM:P2ds:x:CalFactorM S04IDFE-XBPM:P2ds:x:OffsetM               / S04IDFE-XBPM:P2ds:x:OffsetM S04IDFE-XBPM:P2ds:y:CalFactorM            / S04IDFE-XBPM:P2ds:y:CalFactorM S04IDFE-XBPM:P2ds:y:OffsetM               / S04IDFE-XBPM:P2ds:y:OffsetM S05BMFE-XBPM:P1:AM                        / S05BMFE-XBPM:P1:AM S05BMFE-XBPM:P1:BM                        / S05BMFE-XBPM:P1:BM S05BMFE-XBPM:P1:y                         / S05BMFE-XBPM:P1:y S05BMFE-XBPM:P1:y:LowPass1sM              / S05BMFE-XBPM:P1:y:LowPass1sM S05BMFE-XBPM:P1:y:LowPass8sM              / S05BMFE-XBPM:P1:y:LowPass8sM S05BMFE-XBPM:P1:y:LowPass64sM             / S05BMFE-XBPM:P1:y:LowPass64sM S05BMFE-XBPM:P1:y:StdDevM                 / S05BMFE-XBPM:P1:y:StdDevM S05BMFE-XBPM:P1:y:StdDev1sM               / S05BMFE-XBPM:P1:y:StdDev1sM S05BMFE-XBPM:P1:y:StdDev8sM               / S05BMFE-XBPM:P1:y:StdDev8sM S05BMFE-XBPM:P1:y:StdDev64sM              / S05BMFE-XBPM:P1:y:StdDev64sM S05BMFE-XBPM:P2:AM                        / S05BMFE-XBPM:P2:AM S05BMFE-XBPM:P2:BM                        / S05BMFE-XBPM:P2:BM S05BMFE-XBPM:P2:y                         / S05BMFE-XBPM:P2:y S05BMFE-XBPM:P2:y:LowPass1sM              / S05BMFE-XBPM:P2:y:LowPass1sM S05BMFE-XBPM:P2:y:LowPass8sM              / S05BMFE-XBPM:P2:y:LowPass8sM S05BMFE-XBPM:P2:y:LowPass64sM             / S05BMFE-XBPM:P2:y:LowPass64sM S05BMFE-XBPM:P2:y:StdDevM                 / S05BMFE-XBPM:P2:y:StdDevM S05BMFE-XBPM:P2:y:StdDev1sM               / S05BMFE-XBPM:P2:y:StdDev1sM S05BMFE-XBPM:P2:y:StdDev8sM               / S05BMFE-XBPM:P2:y:StdDev8sM S05BMFE-XBPM:P2:y:StdDev64sM              / S05BMFE-XBPM:P2:y:StdDev64sM S05IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S05IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S05IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S05IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S05IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S05IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S05IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S05IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S05IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S05IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S05IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S05IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S05IDFE-XBPM:CM1ds:PositionOffsetX        / S05IDFE-XBPM:CM1ds:PositionOffsetX S05IDFE-XBPM:CM1ds:PositionOffsetY        / S05IDFE-XBPM:CM1ds:PositionOffsetY S05IDFE-XBPM:CM1ds:PositionScaleX         / S05IDFE-XBPM:CM1ds:PositionScaleX S05IDFE-XBPM:CM1ds:PositionScaleY         / S05IDFE-XBPM:CM1ds:PositionScaleY S05IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S05IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S05IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S05IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S05IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S05IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S05IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S05IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S05IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S05IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S05IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S05IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S05IDFE-XBPM:CM2ds:PositionOffsetX        / S05IDFE-XBPM:CM2ds:PositionOffsetX S05IDFE-XBPM:CM2ds:PositionOffsetY        / S05IDFE-XBPM:CM2ds:PositionOffsetY S05IDFE-XBPM:CM2ds:PositionScaleX         / S05IDFE-XBPM:CM2ds:PositionScaleX S05IDFE-XBPM:CM2ds:PositionScaleY         / S05IDFE-XBPM:CM2ds:PositionScaleY S05IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S05IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S05IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S05IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S05IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S05IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S05IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S05IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S05IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S05IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S05IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S05IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S05IDFE-XBPM:CM3ds:PositionOffsetX        / S05IDFE-XBPM:CM3ds:PositionOffsetX S05IDFE-XBPM:CM3ds:PositionOffsetY        / S05IDFE-XBPM:CM3ds:PositionOffsetY S05IDFE-XBPM:CM3ds:PositionScaleX         / S05IDFE-XBPM:CM3ds:PositionScaleX S05IDFE-XBPM:CM3ds:PositionScaleY         / S05IDFE-XBPM:CM3ds:PositionScaleY S05IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S05IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S05IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S05IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S05IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S05IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S05IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S05IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S05IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S05IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S05IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S05IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S05IDFE-XBPM:CM4ds:PositionOffsetX        / S05IDFE-XBPM:CM4ds:PositionOffsetX S05IDFE-XBPM:CM4ds:PositionOffsetY        / S05IDFE-XBPM:CM4ds:PositionOffsetY S05IDFE-XBPM:CM4ds:PositionScaleX         / S05IDFE-XBPM:CM4ds:PositionScaleX S05IDFE-XBPM:CM4ds:PositionScaleY         / S05IDFE-XBPM:CM4ds:PositionScaleY S05IDFE-XBPM:P1ds:BMcUsedM                / S05IDFE-XBPM:P1ds:BMcUsedM S05IDFE-XBPM:P1ds:GapUsedC                / S05IDFE-XBPM:P1ds:GapUsedC S05IDFE-XBPM:P1ds:Wx1UsedM                / S05IDFE-XBPM:P1ds:Wx1UsedM S05IDFE-XBPM:P1ds:Wx2UsedM                / S05IDFE-XBPM:P1ds:Wx2UsedM S05IDFE-XBPM:P1ds:Wx3UsedM                / S05IDFE-XBPM:P1ds:Wx3UsedM S05IDFE-XBPM:P1ds:Wy1UsedM                / S05IDFE-XBPM:P1ds:Wy1UsedM S05IDFE-XBPM:P1ds:Wy2UsedM                / S05IDFE-XBPM:P1ds:Wy2UsedM S05IDFE-XBPM:P1ds:Wy3UsedM                / S05IDFE-XBPM:P1ds:Wy3UsedM S05IDFE-XBPM:P1ds:x                       / S05IDFE-XBPM:P1ds:x S05IDFE-XBPM:P1ds:x:CalFactor1M           / S05IDFE-XBPM:P1ds:x:CalFactor1M S05IDFE-XBPM:P1ds:x:CalFactor2M           / S05IDFE-XBPM:P1ds:x:CalFactor2M S05IDFE-XBPM:P1ds:x:LowPass1sM            / S05IDFE-XBPM:P1ds:x:LowPass1sM S05IDFE-XBPM:P1ds:x:LowPass8sM            / S05IDFE-XBPM:P1ds:x:LowPass8sM S05IDFE-XBPM:P1ds:x:LowPass64sM           / S05IDFE-XBPM:P1ds:x:LowPass64sM S05IDFE-XBPM:P1ds:x:Offset1M              / S05IDFE-XBPM:P1ds:x:Offset1M S05IDFE-XBPM:P1ds:x:Offset2M              / S05IDFE-XBPM:P1ds:x:Offset2M S05IDFE-XBPM:P1ds:x:ResolutionM           / S05IDFE-XBPM:P1ds:x:ResolutionM S05IDFE-XBPM:P1ds:x:Resolution1sM         / S05IDFE-XBPM:P1ds:x:Resolution1sM S05IDFE-XBPM:P1ds:x:Resolution8sM         / S05IDFE-XBPM:P1ds:x:Resolution8sM S05IDFE-XBPM:P1ds:x:Resolution64sM        / S05IDFE-XBPM:P1ds:x:Resolution64sM S05IDFE-XBPM:P1ds:x:StdDevM               / S05IDFE-XBPM:P1ds:x:StdDevM S05IDFE-XBPM:P1ds:x:StdDev1sM             / S05IDFE-XBPM:P1ds:x:StdDev1sM S05IDFE-XBPM:P1ds:x:StdDev8sM             / S05IDFE-XBPM:P1ds:x:StdDev8sM S05IDFE-XBPM:P1ds:x:StdDev64sM            / S05IDFE-XBPM:P1ds:x:StdDev64sM S05IDFE-XBPM:P1ds:x1:LowPass1sM           / S05IDFE-XBPM:P1ds:x1:LowPass1sM S05IDFE-XBPM:P1ds:x1:LowPass8sM           / S05IDFE-XBPM:P1ds:x1:LowPass8sM S05IDFE-XBPM:P1ds:x1:LowPass64sM          / S05IDFE-XBPM:P1ds:x1:LowPass64sM S05IDFE-XBPM:P1ds:x2:LowPass1sM           / S05IDFE-XBPM:P1ds:x2:LowPass1sM S05IDFE-XBPM:P1ds:x2:LowPass8sM           / S05IDFE-XBPM:P1ds:x2:LowPass8sM S05IDFE-XBPM:P1ds:x2:LowPass64sM          / S05IDFE-XBPM:P1ds:x2:LowPass64sM S05IDFE-XBPM:P1ds:y                       / S05IDFE-XBPM:P1ds:y S05IDFE-XBPM:P1ds:y:CalFactor1M           / S05IDFE-XBPM:P1ds:y:CalFactor1M S05IDFE-XBPM:P1ds:y:CalFactor2M           / S05IDFE-XBPM:P1ds:y:CalFactor2M S05IDFE-XBPM:P1ds:y:LowPass1sM            / S05IDFE-XBPM:P1ds:y:LowPass1sM S05IDFE-XBPM:P1ds:y:LowPass8sM            / S05IDFE-XBPM:P1ds:y:LowPass8sM S05IDFE-XBPM:P1ds:y:LowPass64sM           / S05IDFE-XBPM:P1ds:y:LowPass64sM S05IDFE-XBPM:P1ds:y:Offset1M              / S05IDFE-XBPM:P1ds:y:Offset1M S05IDFE-XBPM:P1ds:y:Offset2M              / S05IDFE-XBPM:P1ds:y:Offset2M S05IDFE-XBPM:P1ds:y:ResolutionM           / S05IDFE-XBPM:P1ds:y:ResolutionM S05IDFE-XBPM:P1ds:y:Resolution1sM         / S05IDFE-XBPM:P1ds:y:Resolution1sM S05IDFE-XBPM:P1ds:y:Resolution8sM         / S05IDFE-XBPM:P1ds:y:Resolution8sM S05IDFE-XBPM:P1ds:y:Resolution64sM        / S05IDFE-XBPM:P1ds:y:Resolution64sM S05IDFE-XBPM:P1ds:y:StdDevM               / S05IDFE-XBPM:P1ds:y:StdDevM S05IDFE-XBPM:P1ds:y:StdDev1sM             / S05IDFE-XBPM:P1ds:y:StdDev1sM S05IDFE-XBPM:P1ds:y:StdDev8sM             / S05IDFE-XBPM:P1ds:y:StdDev8sM S05IDFE-XBPM:P1ds:y:StdDev64sM            / S05IDFE-XBPM:P1ds:y:StdDev64sM S05IDFE-XBPM:P1ds:y1:LowPass1sM           / S05IDFE-XBPM:P1ds:y1:LowPass1sM S05IDFE-XBPM:P1ds:y1:LowPass8sM           / S05IDFE-XBPM:P1ds:y1:LowPass8sM S05IDFE-XBPM:P1ds:y1:LowPass64sM          / S05IDFE-XBPM:P1ds:y1:LowPass64sM S05IDFE-XBPM:P1ds:y2:LowPass1sM           / S05IDFE-XBPM:P1ds:y2:LowPass1sM S05IDFE-XBPM:P1ds:y2:LowPass8sM           / S05IDFE-XBPM:P1ds:y2:LowPass8sM S05IDFE-XBPM:P1ds:y2:LowPass64sM          / S05IDFE-XBPM:P1ds:y2:LowPass64sM S05IDFE-XBPM:P2ds:GapUsedC                / S05IDFE-XBPM:P2ds:GapUsedC S05IDFE-XBPM:P2ds:XCalM                   / S05IDFE-XBPM:P2ds:XCalM S05IDFE-XBPM:P2ds:YCalM                   / S05IDFE-XBPM:P2ds:YCalM S05IDFE-XBPM:P2ds:x:CalFactorM            / S05IDFE-XBPM:P2ds:x:CalFactorM S05IDFE-XBPM:P2ds:x:OffsetM               / S05IDFE-XBPM:P2ds:x:OffsetM S05IDFE-XBPM:P2ds:y:CalFactorM            / S05IDFE-XBPM:P2ds:y:CalFactorM S05IDFE-XBPM:P2ds:y:OffsetM               / S05IDFE-XBPM:P2ds:y:OffsetM S06BMFE-XBPM:P1:AM                        / S06BMFE-XBPM:P1:AM S06BMFE-XBPM:P1:BM                        / S06BMFE-XBPM:P1:BM S06BMFE-XBPM:P1:y                         / S06BMFE-XBPM:P1:y S06BMFE-XBPM:P1:y:LowPass1sM              / S06BMFE-XBPM:P1:y:LowPass1sM S06BMFE-XBPM:P1:y:LowPass8sM              / S06BMFE-XBPM:P1:y:LowPass8sM S06BMFE-XBPM:P1:y:LowPass64sM             / S06BMFE-XBPM:P1:y:LowPass64sM S06BMFE-XBPM:P1:y:StdDevM                 / S06BMFE-XBPM:P1:y:StdDevM S06BMFE-XBPM:P1:y:StdDev1sM               / S06BMFE-XBPM:P1:y:StdDev1sM S06BMFE-XBPM:P1:y:StdDev8sM               / S06BMFE-XBPM:P1:y:StdDev8sM S06BMFE-XBPM:P1:y:StdDev64sM              / S06BMFE-XBPM:P1:y:StdDev64sM S06BMFE-XBPM:P2:AM                        / S06BMFE-XBPM:P2:AM S06BMFE-XBPM:P2:BM                        / S06BMFE-XBPM:P2:BM S06BMFE-XBPM:P2:y                         / S06BMFE-XBPM:P2:y S06BMFE-XBPM:P2:y:LowPass1sM              / S06BMFE-XBPM:P2:y:LowPass1sM S06BMFE-XBPM:P2:y:LowPass8sM              / S06BMFE-XBPM:P2:y:LowPass8sM S06BMFE-XBPM:P2:y:LowPass64sM             / S06BMFE-XBPM:P2:y:LowPass64sM S06BMFE-XBPM:P2:y:StdDevM                 / S06BMFE-XBPM:P2:y:StdDevM S06BMFE-XBPM:P2:y:StdDev1sM               / S06BMFE-XBPM:P2:y:StdDev1sM S06BMFE-XBPM:P2:y:StdDev8sM               / S06BMFE-XBPM:P2:y:StdDev8sM S06BMFE-XBPM:P2:y:StdDev64sM              / S06BMFE-XBPM:P2:y:StdDev64sM S06IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S06IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S06IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S06IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S06IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S06IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S06IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S06IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S06IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S06IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S06IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S06IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S06IDFE-XBPM:CM1ds:PositionOffsetX        / S06IDFE-XBPM:CM1ds:PositionOffsetX S06IDFE-XBPM:CM1ds:PositionOffsetY        / S06IDFE-XBPM:CM1ds:PositionOffsetY S06IDFE-XBPM:CM1ds:PositionScaleX         / S06IDFE-XBPM:CM1ds:PositionScaleX S06IDFE-XBPM:CM1ds:PositionScaleY         / S06IDFE-XBPM:CM1ds:PositionScaleY S06IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S06IDFE-XBPM:CM1us:Current1:MeanValue_RBV S06IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S06IDFE-XBPM:CM1us:Current2:MeanValue_RBV S06IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S06IDFE-XBPM:CM1us:Current3:MeanValue_RBV S06IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S06IDFE-XBPM:CM1us:Current4:MeanValue_RBV S06IDFE-XBPM:CM1us:PosX:MeanValue_RBV     / S06IDFE-XBPM:CM1us:PosX:MeanValue_RBV S06IDFE-XBPM:CM1us:PosY:MeanValue_RBV     / S06IDFE-XBPM:CM1us:PosY:MeanValue_RBV S06IDFE-XBPM:CM1us:PositionOffsetX        / S06IDFE-XBPM:CM1us:PositionOffsetX S06IDFE-XBPM:CM1us:PositionOffsetY        / S06IDFE-XBPM:CM1us:PositionOffsetY S06IDFE-XBPM:CM1us:PositionScaleX         / S06IDFE-XBPM:CM1us:PositionScaleX S06IDFE-XBPM:CM1us:PositionScaleY         / S06IDFE-XBPM:CM1us:PositionScaleY S06IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S06IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S06IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S06IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S06IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S06IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S06IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S06IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S06IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S06IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S06IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S06IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S06IDFE-XBPM:CM2ds:PositionOffsetX        / S06IDFE-XBPM:CM2ds:PositionOffsetX S06IDFE-XBPM:CM2ds:PositionOffsetY        / S06IDFE-XBPM:CM2ds:PositionOffsetY S06IDFE-XBPM:CM2ds:PositionScaleX         / S06IDFE-XBPM:CM2ds:PositionScaleX S06IDFE-XBPM:CM2ds:PositionScaleY         / S06IDFE-XBPM:CM2ds:PositionScaleY S06IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S06IDFE-XBPM:CM2us:Current1:MeanValue_RBV S06IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S06IDFE-XBPM:CM2us:Current2:MeanValue_RBV S06IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S06IDFE-XBPM:CM2us:Current3:MeanValue_RBV S06IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S06IDFE-XBPM:CM2us:Current4:MeanValue_RBV S06IDFE-XBPM:CM2us:PosX:MeanValue_RBV     / S06IDFE-XBPM:CM2us:PosX:MeanValue_RBV S06IDFE-XBPM:CM2us:PosY:MeanValue_RBV     / S06IDFE-XBPM:CM2us:PosY:MeanValue_RBV S06IDFE-XBPM:CM2us:PositionOffsetX        / S06IDFE-XBPM:CM2us:PositionOffsetX S06IDFE-XBPM:CM2us:PositionOffsetY        / S06IDFE-XBPM:CM2us:PositionOffsetY S06IDFE-XBPM:CM2us:PositionScaleX         / S06IDFE-XBPM:CM2us:PositionScaleX S06IDFE-XBPM:CM2us:PositionScaleY         / S06IDFE-XBPM:CM2us:PositionScaleY S06IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S06IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S06IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S06IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S06IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S06IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S06IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S06IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S06IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S06IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S06IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S06IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S06IDFE-XBPM:CM3ds:PositionOffsetX        / S06IDFE-XBPM:CM3ds:PositionOffsetX S06IDFE-XBPM:CM3ds:PositionOffsetY        / S06IDFE-XBPM:CM3ds:PositionOffsetY S06IDFE-XBPM:CM3ds:PositionScaleX         / S06IDFE-XBPM:CM3ds:PositionScaleX S06IDFE-XBPM:CM3ds:PositionScaleY         / S06IDFE-XBPM:CM3ds:PositionScaleY S06IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S06IDFE-XBPM:CM3us:Current1:MeanValue_RBV S06IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S06IDFE-XBPM:CM3us:Current2:MeanValue_RBV S06IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S06IDFE-XBPM:CM3us:Current3:MeanValue_RBV S06IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S06IDFE-XBPM:CM3us:Current4:MeanValue_RBV S06IDFE-XBPM:CM3us:PosX:MeanValue_RBV     / S06IDFE-XBPM:CM3us:PosX:MeanValue_RBV S06IDFE-XBPM:CM3us:PosY:MeanValue_RBV     / S06IDFE-XBPM:CM3us:PosY:MeanValue_RBV S06IDFE-XBPM:CM3us:PositionOffsetX        / S06IDFE-XBPM:CM3us:PositionOffsetX S06IDFE-XBPM:CM3us:PositionOffsetY        / S06IDFE-XBPM:CM3us:PositionOffsetY S06IDFE-XBPM:CM3us:PositionScaleX         / S06IDFE-XBPM:CM3us:PositionScaleX S06IDFE-XBPM:CM3us:PositionScaleY         / S06IDFE-XBPM:CM3us:PositionScaleY S06IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S06IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S06IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S06IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S06IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S06IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S06IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S06IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S06IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S06IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S06IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S06IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S06IDFE-XBPM:CM4ds:PositionOffsetX        / S06IDFE-XBPM:CM4ds:PositionOffsetX S06IDFE-XBPM:CM4ds:PositionOffsetY        / S06IDFE-XBPM:CM4ds:PositionOffsetY S06IDFE-XBPM:CM4ds:PositionScaleX         / S06IDFE-XBPM:CM4ds:PositionScaleX S06IDFE-XBPM:CM4ds:PositionScaleY         / S06IDFE-XBPM:CM4ds:PositionScaleY S06IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S06IDFE-XBPM:CM4us:Current1:MeanValue_RBV S06IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S06IDFE-XBPM:CM4us:Current2:MeanValue_RBV S06IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S06IDFE-XBPM:CM4us:Current3:MeanValue_RBV S06IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S06IDFE-XBPM:CM4us:Current4:MeanValue_RBV S06IDFE-XBPM:CM4us:PosX:MeanValue_RBV     / S06IDFE-XBPM:CM4us:PosX:MeanValue_RBV S06IDFE-XBPM:CM4us:PosY:MeanValue_RBV     / S06IDFE-XBPM:CM4us:PosY:MeanValue_RBV S06IDFE-XBPM:CM4us:PositionOffsetX        / S06IDFE-XBPM:CM4us:PositionOffsetX S06IDFE-XBPM:CM4us:PositionOffsetY        / S06IDFE-XBPM:CM4us:PositionOffsetY S06IDFE-XBPM:CM4us:PositionScaleX         / S06IDFE-XBPM:CM4us:PositionScaleX S06IDFE-XBPM:CM4us:PositionScaleY         / S06IDFE-XBPM:CM4us:PositionScaleY S06IDFE-XBPM:P1ds:BMcUsedM                / S06IDFE-XBPM:P1ds:BMcUsedM S06IDFE-XBPM:P1ds:GapUsedC                / S06IDFE-XBPM:P1ds:GapUsedC S06IDFE-XBPM:P1ds:Wx1UsedM                / S06IDFE-XBPM:P1ds:Wx1UsedM S06IDFE-XBPM:P1ds:Wx2UsedM                / S06IDFE-XBPM:P1ds:Wx2UsedM S06IDFE-XBPM:P1ds:Wx3UsedM                / S06IDFE-XBPM:P1ds:Wx3UsedM S06IDFE-XBPM:P1ds:Wy1UsedM                / S06IDFE-XBPM:P1ds:Wy1UsedM S06IDFE-XBPM:P1ds:Wy2UsedM                / S06IDFE-XBPM:P1ds:Wy2UsedM S06IDFE-XBPM:P1ds:Wy3UsedM                / S06IDFE-XBPM:P1ds:Wy3UsedM S06IDFE-XBPM:P1ds:x                       / S06IDFE-XBPM:P1ds:x S06IDFE-XBPM:P1ds:x:CalFactor1M           / S06IDFE-XBPM:P1ds:x:CalFactor1M S06IDFE-XBPM:P1ds:x:CalFactor2M           / S06IDFE-XBPM:P1ds:x:CalFactor2M S06IDFE-XBPM:P1ds:x:LowPass1sM            / S06IDFE-XBPM:P1ds:x:LowPass1sM S06IDFE-XBPM:P1ds:x:LowPass8sM            / S06IDFE-XBPM:P1ds:x:LowPass8sM S06IDFE-XBPM:P1ds:x:LowPass64sM           / S06IDFE-XBPM:P1ds:x:LowPass64sM S06IDFE-XBPM:P1ds:x:Offset1M              / S06IDFE-XBPM:P1ds:x:Offset1M S06IDFE-XBPM:P1ds:x:Offset2M              / S06IDFE-XBPM:P1ds:x:Offset2M S06IDFE-XBPM:P1ds:x:ResolutionM           / S06IDFE-XBPM:P1ds:x:ResolutionM S06IDFE-XBPM:P1ds:x:Resolution1sM         / S06IDFE-XBPM:P1ds:x:Resolution1sM S06IDFE-XBPM:P1ds:x:Resolution8sM         / S06IDFE-XBPM:P1ds:x:Resolution8sM S06IDFE-XBPM:P1ds:x:Resolution64sM        / S06IDFE-XBPM:P1ds:x:Resolution64sM S06IDFE-XBPM:P1ds:x:StdDevM               / S06IDFE-XBPM:P1ds:x:StdDevM S06IDFE-XBPM:P1ds:x:StdDev1sM             / S06IDFE-XBPM:P1ds:x:StdDev1sM S06IDFE-XBPM:P1ds:x:StdDev8sM             / S06IDFE-XBPM:P1ds:x:StdDev8sM S06IDFE-XBPM:P1ds:x:StdDev64sM            / S06IDFE-XBPM:P1ds:x:StdDev64sM S06IDFE-XBPM:P1ds:x1:LowPass1sM           / S06IDFE-XBPM:P1ds:x1:LowPass1sM S06IDFE-XBPM:P1ds:x1:LowPass8sM           / S06IDFE-XBPM:P1ds:x1:LowPass8sM S06IDFE-XBPM:P1ds:x1:LowPass64sM          / S06IDFE-XBPM:P1ds:x1:LowPass64sM S06IDFE-XBPM:P1ds:x2:LowPass1sM           / S06IDFE-XBPM:P1ds:x2:LowPass1sM S06IDFE-XBPM:P1ds:x2:LowPass8sM           / S06IDFE-XBPM:P1ds:x2:LowPass8sM S06IDFE-XBPM:P1ds:x2:LowPass64sM          / S06IDFE-XBPM:P1ds:x2:LowPass64sM S06IDFE-XBPM:P1ds:y                       / S06IDFE-XBPM:P1ds:y S06IDFE-XBPM:P1ds:y:CalFactor1M           / S06IDFE-XBPM:P1ds:y:CalFactor1M S06IDFE-XBPM:P1ds:y:CalFactor2M           / S06IDFE-XBPM:P1ds:y:CalFactor2M S06IDFE-XBPM:P1ds:y:LowPass1sM            / S06IDFE-XBPM:P1ds:y:LowPass1sM S06IDFE-XBPM:P1ds:y:LowPass8sM            / S06IDFE-XBPM:P1ds:y:LowPass8sM S06IDFE-XBPM:P1ds:y:LowPass64sM           / S06IDFE-XBPM:P1ds:y:LowPass64sM S06IDFE-XBPM:P1ds:y:Offset1M              / S06IDFE-XBPM:P1ds:y:Offset1M S06IDFE-XBPM:P1ds:y:Offset2M              / S06IDFE-XBPM:P1ds:y:Offset2M S06IDFE-XBPM:P1ds:y:ResolutionM           / S06IDFE-XBPM:P1ds:y:ResolutionM S06IDFE-XBPM:P1ds:y:Resolution1sM         / S06IDFE-XBPM:P1ds:y:Resolution1sM S06IDFE-XBPM:P1ds:y:Resolution8sM         / S06IDFE-XBPM:P1ds:y:Resolution8sM S06IDFE-XBPM:P1ds:y:Resolution64sM        / S06IDFE-XBPM:P1ds:y:Resolution64sM S06IDFE-XBPM:P1ds:y:StdDevM               / S06IDFE-XBPM:P1ds:y:StdDevM S06IDFE-XBPM:P1ds:y:StdDev1sM             / S06IDFE-XBPM:P1ds:y:StdDev1sM S06IDFE-XBPM:P1ds:y:StdDev8sM             / S06IDFE-XBPM:P1ds:y:StdDev8sM S06IDFE-XBPM:P1ds:y:StdDev64sM            / S06IDFE-XBPM:P1ds:y:StdDev64sM S06IDFE-XBPM:P1ds:y1:LowPass1sM           / S06IDFE-XBPM:P1ds:y1:LowPass1sM S06IDFE-XBPM:P1ds:y1:LowPass8sM           / S06IDFE-XBPM:P1ds:y1:LowPass8sM S06IDFE-XBPM:P1ds:y1:LowPass64sM          / S06IDFE-XBPM:P1ds:y1:LowPass64sM S06IDFE-XBPM:P1ds:y2:LowPass1sM           / S06IDFE-XBPM:P1ds:y2:LowPass1sM S06IDFE-XBPM:P1ds:y2:LowPass8sM           / S06IDFE-XBPM:P1ds:y2:LowPass8sM S06IDFE-XBPM:P1ds:y2:LowPass64sM          / S06IDFE-XBPM:P1ds:y2:LowPass64sM S06IDFE-XBPM:P1us:BMcUsedM                / S06IDFE-XBPM:P1us:BMcUsedM S06IDFE-XBPM:P1us:GapUsedC                / S06IDFE-XBPM:P1us:GapUsedC S06IDFE-XBPM:P1us:Wx1UsedM                / S06IDFE-XBPM:P1us:Wx1UsedM S06IDFE-XBPM:P1us:Wx2UsedM                / S06IDFE-XBPM:P1us:Wx2UsedM S06IDFE-XBPM:P1us:Wx3UsedM                / S06IDFE-XBPM:P1us:Wx3UsedM S06IDFE-XBPM:P1us:Wy1UsedM                / S06IDFE-XBPM:P1us:Wy1UsedM S06IDFE-XBPM:P1us:Wy2UsedM                / S06IDFE-XBPM:P1us:Wy2UsedM S06IDFE-XBPM:P1us:Wy3UsedM                / S06IDFE-XBPM:P1us:Wy3UsedM S06IDFE-XBPM:P1us:x                       / S06IDFE-XBPM:P1us:x S06IDFE-XBPM:P1us:x:CalFactor1M           / S06IDFE-XBPM:P1us:x:CalFactor1M S06IDFE-XBPM:P1us:x:CalFactor2M           / S06IDFE-XBPM:P1us:x:CalFactor2M S06IDFE-XBPM:P1us:x:LowPass1sM            / S06IDFE-XBPM:P1us:x:LowPass1sM S06IDFE-XBPM:P1us:x:LowPass8sM            / S06IDFE-XBPM:P1us:x:LowPass8sM S06IDFE-XBPM:P1us:x:LowPass64sM           / S06IDFE-XBPM:P1us:x:LowPass64sM S06IDFE-XBPM:P1us:x:Offset1M              / S06IDFE-XBPM:P1us:x:Offset1M S06IDFE-XBPM:P1us:x:Offset2M              / S06IDFE-XBPM:P1us:x:Offset2M S06IDFE-XBPM:P1us:x:ResolutionM           / S06IDFE-XBPM:P1us:x:ResolutionM S06IDFE-XBPM:P1us:x:Resolution1sM         / S06IDFE-XBPM:P1us:x:Resolution1sM S06IDFE-XBPM:P1us:x:Resolution8sM         / S06IDFE-XBPM:P1us:x:Resolution8sM S06IDFE-XBPM:P1us:x:Resolution64sM        / S06IDFE-XBPM:P1us:x:Resolution64sM S06IDFE-XBPM:P1us:x:StdDevM               / S06IDFE-XBPM:P1us:x:StdDevM S06IDFE-XBPM:P1us:x:StdDev1sM             / S06IDFE-XBPM:P1us:x:StdDev1sM S06IDFE-XBPM:P1us:x:StdDev8sM             / S06IDFE-XBPM:P1us:x:StdDev8sM S06IDFE-XBPM:P1us:x:StdDev64sM            / S06IDFE-XBPM:P1us:x:StdDev64sM S06IDFE-XBPM:P1us:x1:LowPass1sM           / S06IDFE-XBPM:P1us:x1:LowPass1sM S06IDFE-XBPM:P1us:x1:LowPass8sM           / S06IDFE-XBPM:P1us:x1:LowPass8sM S06IDFE-XBPM:P1us:x1:LowPass64sM          / S06IDFE-XBPM:P1us:x1:LowPass64sM S06IDFE-XBPM:P1us:x2:LowPass1sM           / S06IDFE-XBPM:P1us:x2:LowPass1sM S06IDFE-XBPM:P1us:x2:LowPass8sM           / S06IDFE-XBPM:P1us:x2:LowPass8sM S06IDFE-XBPM:P1us:x2:LowPass64sM          / S06IDFE-XBPM:P1us:x2:LowPass64sM S06IDFE-XBPM:P1us:y                       / S06IDFE-XBPM:P1us:y S06IDFE-XBPM:P1us:y:CalFactor1M           / S06IDFE-XBPM:P1us:y:CalFactor1M S06IDFE-XBPM:P1us:y:CalFactor2M           / S06IDFE-XBPM:P1us:y:CalFactor2M S06IDFE-XBPM:P1us:y:LowPass1sM            / S06IDFE-XBPM:P1us:y:LowPass1sM S06IDFE-XBPM:P1us:y:LowPass8sM            / S06IDFE-XBPM:P1us:y:LowPass8sM S06IDFE-XBPM:P1us:y:LowPass64sM           / S06IDFE-XBPM:P1us:y:LowPass64sM S06IDFE-XBPM:P1us:y:Offset1M              / S06IDFE-XBPM:P1us:y:Offset1M S06IDFE-XBPM:P1us:y:Offset2M              / S06IDFE-XBPM:P1us:y:Offset2M S06IDFE-XBPM:P1us:y:ResolutionM           / S06IDFE-XBPM:P1us:y:ResolutionM S06IDFE-XBPM:P1us:y:Resolution1sM         / S06IDFE-XBPM:P1us:y:Resolution1sM S06IDFE-XBPM:P1us:y:Resolution8sM         / S06IDFE-XBPM:P1us:y:Resolution8sM S06IDFE-XBPM:P1us:y:Resolution64sM        / S06IDFE-XBPM:P1us:y:Resolution64sM S06IDFE-XBPM:P1us:y:StdDevM               / S06IDFE-XBPM:P1us:y:StdDevM S06IDFE-XBPM:P1us:y:StdDev1sM             / S06IDFE-XBPM:P1us:y:StdDev1sM S06IDFE-XBPM:P1us:y:StdDev8sM             / S06IDFE-XBPM:P1us:y:StdDev8sM S06IDFE-XBPM:P1us:y:StdDev64sM            / S06IDFE-XBPM:P1us:y:StdDev64sM S06IDFE-XBPM:P1us:y1:LowPass1sM           / S06IDFE-XBPM:P1us:y1:LowPass1sM S06IDFE-XBPM:P1us:y1:LowPass8sM           / S06IDFE-XBPM:P1us:y1:LowPass8sM S06IDFE-XBPM:P1us:y1:LowPass64sM          / S06IDFE-XBPM:P1us:y1:LowPass64sM S06IDFE-XBPM:P1us:y2:LowPass1sM           / S06IDFE-XBPM:P1us:y2:LowPass1sM S06IDFE-XBPM:P1us:y2:LowPass8sM           / S06IDFE-XBPM:P1us:y2:LowPass8sM S06IDFE-XBPM:P1us:y2:LowPass64sM          / S06IDFE-XBPM:P1us:y2:LowPass64sM S06IDFE-XBPM:P2ds:GapUsedC                / S06IDFE-XBPM:P2ds:GapUsedC S06IDFE-XBPM:P2ds:XCalM                   / S06IDFE-XBPM:P2ds:XCalM S06IDFE-XBPM:P2ds:YCalM                   / S06IDFE-XBPM:P2ds:YCalM S06IDFE-XBPM:P2ds:x:CalFactorM            / S06IDFE-XBPM:P2ds:x:CalFactorM S06IDFE-XBPM:P2ds:x:OffsetM               / S06IDFE-XBPM:P2ds:x:OffsetM S06IDFE-XBPM:P2ds:y:CalFactorM            / S06IDFE-XBPM:P2ds:y:CalFactorM S06IDFE-XBPM:P2ds:y:OffsetM               / S06IDFE-XBPM:P2ds:y:OffsetM S06IDFE-XBPM:P2us:GapUsedC                / S06IDFE-XBPM:P2us:GapUsedC S06IDFE-XBPM:P2us:XCalM                   / S06IDFE-XBPM:P2us:XCalM S06IDFE-XBPM:P2us:YCalM                   / S06IDFE-XBPM:P2us:YCalM S06IDFE-XBPM:P2us:x:CalFactorM            / S06IDFE-XBPM:P2us:x:CalFactorM S06IDFE-XBPM:P2us:x:OffsetM               / S06IDFE-XBPM:P2us:x:OffsetM S06IDFE-XBPM:P2us:y:CalFactorM            / S06IDFE-XBPM:P2us:y:CalFactorM S06IDFE-XBPM:P2us:y:OffsetM               / S06IDFE-XBPM:P2us:y:OffsetM S07BMFE-XBPM:P1:AM                        / S07BMFE-XBPM:P1:AM S07BMFE-XBPM:P1:BM                        / S07BMFE-XBPM:P1:BM S07BMFE-XBPM:P1:y                         / S07BMFE-XBPM:P1:y S07BMFE-XBPM:P1:y:LowPass1sM              / S07BMFE-XBPM:P1:y:LowPass1sM S07BMFE-XBPM:P1:y:LowPass8sM              / S07BMFE-XBPM:P1:y:LowPass8sM S07BMFE-XBPM:P1:y:LowPass64sM             / S07BMFE-XBPM:P1:y:LowPass64sM S07BMFE-XBPM:P1:y:StdDevM                 / S07BMFE-XBPM:P1:y:StdDevM S07BMFE-XBPM:P1:y:StdDev1sM               / S07BMFE-XBPM:P1:y:StdDev1sM S07BMFE-XBPM:P1:y:StdDev8sM               / S07BMFE-XBPM:P1:y:StdDev8sM S07BMFE-XBPM:P1:y:StdDev64sM              / S07BMFE-XBPM:P1:y:StdDev64sM S07BMFE-XBPM:P2:AM                        / S07BMFE-XBPM:P2:AM S07BMFE-XBPM:P2:BM                        / S07BMFE-XBPM:P2:BM S07BMFE-XBPM:P2:y                         / S07BMFE-XBPM:P2:y S07BMFE-XBPM:P2:y:LowPass1sM              / S07BMFE-XBPM:P2:y:LowPass1sM S07BMFE-XBPM:P2:y:LowPass8sM              / S07BMFE-XBPM:P2:y:LowPass8sM S07BMFE-XBPM:P2:y:LowPass64sM             / S07BMFE-XBPM:P2:y:LowPass64sM S07BMFE-XBPM:P2:y:StdDevM                 / S07BMFE-XBPM:P2:y:StdDevM S07BMFE-XBPM:P2:y:StdDev1sM               / S07BMFE-XBPM:P2:y:StdDev1sM S07BMFE-XBPM:P2:y:StdDev8sM               / S07BMFE-XBPM:P2:y:StdDev8sM S07BMFE-XBPM:P2:y:StdDev64sM              / S07BMFE-XBPM:P2:y:StdDev64sM S07IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S07IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S07IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S07IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S07IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S07IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S07IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S07IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S07IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S07IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S07IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S07IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S07IDFE-XBPM:CM1ds:PositionOffsetX        / S07IDFE-XBPM:CM1ds:PositionOffsetX S07IDFE-XBPM:CM1ds:PositionOffsetY        / S07IDFE-XBPM:CM1ds:PositionOffsetY S07IDFE-XBPM:CM1ds:PositionScaleX         / S07IDFE-XBPM:CM1ds:PositionScaleX S07IDFE-XBPM:CM1ds:PositionScaleY         / S07IDFE-XBPM:CM1ds:PositionScaleY S07IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S07IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S07IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S07IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S07IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S07IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S07IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S07IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S07IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S07IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S07IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S07IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S07IDFE-XBPM:CM2ds:PositionOffsetX        / S07IDFE-XBPM:CM2ds:PositionOffsetX S07IDFE-XBPM:CM2ds:PositionOffsetY        / S07IDFE-XBPM:CM2ds:PositionOffsetY S07IDFE-XBPM:CM2ds:PositionScaleX         / S07IDFE-XBPM:CM2ds:PositionScaleX S07IDFE-XBPM:CM2ds:PositionScaleY         / S07IDFE-XBPM:CM2ds:PositionScaleY S07IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S07IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S07IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S07IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S07IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S07IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S07IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S07IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S07IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S07IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S07IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S07IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S07IDFE-XBPM:CM3ds:PositionOffsetX        / S07IDFE-XBPM:CM3ds:PositionOffsetX S07IDFE-XBPM:CM3ds:PositionOffsetY        / S07IDFE-XBPM:CM3ds:PositionOffsetY S07IDFE-XBPM:CM3ds:PositionScaleX         / S07IDFE-XBPM:CM3ds:PositionScaleX S07IDFE-XBPM:CM3ds:PositionScaleY         / S07IDFE-XBPM:CM3ds:PositionScaleY S07IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S07IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S07IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S07IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S07IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S07IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S07IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S07IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S07IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S07IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S07IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S07IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S07IDFE-XBPM:CM4ds:PositionOffsetX        / S07IDFE-XBPM:CM4ds:PositionOffsetX S07IDFE-XBPM:CM4ds:PositionOffsetY        / S07IDFE-XBPM:CM4ds:PositionOffsetY S07IDFE-XBPM:CM4ds:PositionScaleX         / S07IDFE-XBPM:CM4ds:PositionScaleX S07IDFE-XBPM:CM4ds:PositionScaleY         / S07IDFE-XBPM:CM4ds:PositionScaleY S07IDFE-XBPM:P1ds:BMcUsedM                / S07IDFE-XBPM:P1ds:BMcUsedM S07IDFE-XBPM:P1ds:GapUsedC                / S07IDFE-XBPM:P1ds:GapUsedC S07IDFE-XBPM:P1ds:Wx1UsedM                / S07IDFE-XBPM:P1ds:Wx1UsedM S07IDFE-XBPM:P1ds:Wx2UsedM                / S07IDFE-XBPM:P1ds:Wx2UsedM S07IDFE-XBPM:P1ds:Wx3UsedM                / S07IDFE-XBPM:P1ds:Wx3UsedM S07IDFE-XBPM:P1ds:Wy1UsedM                / S07IDFE-XBPM:P1ds:Wy1UsedM S07IDFE-XBPM:P1ds:Wy2UsedM                / S07IDFE-XBPM:P1ds:Wy2UsedM S07IDFE-XBPM:P1ds:Wy3UsedM                / S07IDFE-XBPM:P1ds:Wy3UsedM S07IDFE-XBPM:P1ds:x                       / S07IDFE-XBPM:P1ds:x S07IDFE-XBPM:P1ds:x:CalFactor1M           / S07IDFE-XBPM:P1ds:x:CalFactor1M S07IDFE-XBPM:P1ds:x:CalFactor2M           / S07IDFE-XBPM:P1ds:x:CalFactor2M S07IDFE-XBPM:P1ds:x:LowPass1sM            / S07IDFE-XBPM:P1ds:x:LowPass1sM S07IDFE-XBPM:P1ds:x:LowPass8sM            / S07IDFE-XBPM:P1ds:x:LowPass8sM S07IDFE-XBPM:P1ds:x:LowPass64sM           / S07IDFE-XBPM:P1ds:x:LowPass64sM S07IDFE-XBPM:P1ds:x:Offset1M              / S07IDFE-XBPM:P1ds:x:Offset1M S07IDFE-XBPM:P1ds:x:Offset2M              / S07IDFE-XBPM:P1ds:x:Offset2M S07IDFE-XBPM:P1ds:x:ResolutionM           / S07IDFE-XBPM:P1ds:x:ResolutionM S07IDFE-XBPM:P1ds:x:Resolution1sM         / S07IDFE-XBPM:P1ds:x:Resolution1sM S07IDFE-XBPM:P1ds:x:Resolution8sM         / S07IDFE-XBPM:P1ds:x:Resolution8sM S07IDFE-XBPM:P1ds:x:Resolution64sM        / S07IDFE-XBPM:P1ds:x:Resolution64sM S07IDFE-XBPM:P1ds:x:StdDevM               / S07IDFE-XBPM:P1ds:x:StdDevM S07IDFE-XBPM:P1ds:x:StdDev1sM             / S07IDFE-XBPM:P1ds:x:StdDev1sM S07IDFE-XBPM:P1ds:x:StdDev8sM             / S07IDFE-XBPM:P1ds:x:StdDev8sM S07IDFE-XBPM:P1ds:x:StdDev64sM            / S07IDFE-XBPM:P1ds:x:StdDev64sM S07IDFE-XBPM:P1ds:x1:LowPass1sM           / S07IDFE-XBPM:P1ds:x1:LowPass1sM S07IDFE-XBPM:P1ds:x1:LowPass8sM           / S07IDFE-XBPM:P1ds:x1:LowPass8sM S07IDFE-XBPM:P1ds:x1:LowPass64sM          / S07IDFE-XBPM:P1ds:x1:LowPass64sM S07IDFE-XBPM:P1ds:x2:LowPass1sM           / S07IDFE-XBPM:P1ds:x2:LowPass1sM S07IDFE-XBPM:P1ds:x2:LowPass8sM           / S07IDFE-XBPM:P1ds:x2:LowPass8sM S07IDFE-XBPM:P1ds:x2:LowPass64sM          / S07IDFE-XBPM:P1ds:x2:LowPass64sM S07IDFE-XBPM:P1ds:y                       / S07IDFE-XBPM:P1ds:y S07IDFE-XBPM:P1ds:y:CalFactor1M           / S07IDFE-XBPM:P1ds:y:CalFactor1M S07IDFE-XBPM:P1ds:y:CalFactor2M           / S07IDFE-XBPM:P1ds:y:CalFactor2M S07IDFE-XBPM:P1ds:y:LowPass1sM            / S07IDFE-XBPM:P1ds:y:LowPass1sM S07IDFE-XBPM:P1ds:y:LowPass8sM            / S07IDFE-XBPM:P1ds:y:LowPass8sM S07IDFE-XBPM:P1ds:y:LowPass64sM           / S07IDFE-XBPM:P1ds:y:LowPass64sM S07IDFE-XBPM:P1ds:y:Offset1M              / S07IDFE-XBPM:P1ds:y:Offset1M S07IDFE-XBPM:P1ds:y:Offset2M              / S07IDFE-XBPM:P1ds:y:Offset2M S07IDFE-XBPM:P1ds:y:ResolutionM           / S07IDFE-XBPM:P1ds:y:ResolutionM S07IDFE-XBPM:P1ds:y:Resolution1sM         / S07IDFE-XBPM:P1ds:y:Resolution1sM S07IDFE-XBPM:P1ds:y:Resolution8sM         / S07IDFE-XBPM:P1ds:y:Resolution8sM S07IDFE-XBPM:P1ds:y:Resolution64sM        / S07IDFE-XBPM:P1ds:y:Resolution64sM S07IDFE-XBPM:P1ds:y:StdDevM               / S07IDFE-XBPM:P1ds:y:StdDevM S07IDFE-XBPM:P1ds:y:StdDev1sM             / S07IDFE-XBPM:P1ds:y:StdDev1sM S07IDFE-XBPM:P1ds:y:StdDev8sM             / S07IDFE-XBPM:P1ds:y:StdDev8sM S07IDFE-XBPM:P1ds:y:StdDev64sM            / S07IDFE-XBPM:P1ds:y:StdDev64sM S07IDFE-XBPM:P1ds:y1:LowPass1sM           / S07IDFE-XBPM:P1ds:y1:LowPass1sM S07IDFE-XBPM:P1ds:y1:LowPass8sM           / S07IDFE-XBPM:P1ds:y1:LowPass8sM S07IDFE-XBPM:P1ds:y1:LowPass64sM          / S07IDFE-XBPM:P1ds:y1:LowPass64sM S07IDFE-XBPM:P1ds:y2:LowPass1sM           / S07IDFE-XBPM:P1ds:y2:LowPass1sM S07IDFE-XBPM:P1ds:y2:LowPass8sM           / S07IDFE-XBPM:P1ds:y2:LowPass8sM S07IDFE-XBPM:P1ds:y2:LowPass64sM          / S07IDFE-XBPM:P1ds:y2:LowPass64sM S07IDFE-XBPM:P2ds:GapUsedC                / S07IDFE-XBPM:P2ds:GapUsedC S07IDFE-XBPM:P2ds:XCalM                   / S07IDFE-XBPM:P2ds:XCalM S07IDFE-XBPM:P2ds:YCalM                   / S07IDFE-XBPM:P2ds:YCalM S07IDFE-XBPM:P2ds:x:CalFactorM            / S07IDFE-XBPM:P2ds:x:CalFactorM S07IDFE-XBPM:P2ds:x:OffsetM               / S07IDFE-XBPM:P2ds:x:OffsetM S07IDFE-XBPM:P2ds:y:CalFactorM            / S07IDFE-XBPM:P2ds:y:CalFactorM S07IDFE-XBPM:P2ds:y:OffsetM               / S07IDFE-XBPM:P2ds:y:OffsetM S08BMFE-XBPM:P1:AM                        / S08BMFE-XBPM:P1:AM S08BMFE-XBPM:P1:BM                        / S08BMFE-XBPM:P1:BM S08BMFE-XBPM:P1:y                         / S08BMFE-XBPM:P1:y S08BMFE-XBPM:P1:y:LowPass1sM              / S08BMFE-XBPM:P1:y:LowPass1sM S08BMFE-XBPM:P1:y:LowPass8sM              / S08BMFE-XBPM:P1:y:LowPass8sM S08BMFE-XBPM:P1:y:LowPass64sM             / S08BMFE-XBPM:P1:y:LowPass64sM S08BMFE-XBPM:P1:y:StdDevM                 / S08BMFE-XBPM:P1:y:StdDevM S08BMFE-XBPM:P1:y:StdDev1sM               / S08BMFE-XBPM:P1:y:StdDev1sM S08BMFE-XBPM:P1:y:StdDev8sM               / S08BMFE-XBPM:P1:y:StdDev8sM S08BMFE-XBPM:P1:y:StdDev64sM              / S08BMFE-XBPM:P1:y:StdDev64sM S08BMFE-XBPM:P2:AM                        / S08BMFE-XBPM:P2:AM S08BMFE-XBPM:P2:BM                        / S08BMFE-XBPM:P2:BM S08BMFE-XBPM:P2:y                         / S08BMFE-XBPM:P2:y S08BMFE-XBPM:P2:y:LowPass1sM              / S08BMFE-XBPM:P2:y:LowPass1sM S08BMFE-XBPM:P2:y:LowPass8sM              / S08BMFE-XBPM:P2:y:LowPass8sM S08BMFE-XBPM:P2:y:LowPass64sM             / S08BMFE-XBPM:P2:y:LowPass64sM S08BMFE-XBPM:P2:y:StdDevM                 / S08BMFE-XBPM:P2:y:StdDevM S08BMFE-XBPM:P2:y:StdDev1sM               / S08BMFE-XBPM:P2:y:StdDev1sM S08BMFE-XBPM:P2:y:StdDev8sM               / S08BMFE-XBPM:P2:y:StdDev8sM S08BMFE-XBPM:P2:y:StdDev64sM              / S08BMFE-XBPM:P2:y:StdDev64sM S08IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S08IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S08IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S08IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S08IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S08IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S08IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S08IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S08IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S08IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S08IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S08IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S08IDFE-XBPM:CM1ds:PositionOffsetX        / S08IDFE-XBPM:CM1ds:PositionOffsetX S08IDFE-XBPM:CM1ds:PositionOffsetY        / S08IDFE-XBPM:CM1ds:PositionOffsetY S08IDFE-XBPM:CM1ds:PositionScaleX         / S08IDFE-XBPM:CM1ds:PositionScaleX S08IDFE-XBPM:CM1ds:PositionScaleY         / S08IDFE-XBPM:CM1ds:PositionScaleY S08IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S08IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S08IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S08IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S08IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S08IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S08IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S08IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S08IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S08IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S08IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S08IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S08IDFE-XBPM:CM2ds:PositionOffsetX        / S08IDFE-XBPM:CM2ds:PositionOffsetX S08IDFE-XBPM:CM2ds:PositionOffsetY        / S08IDFE-XBPM:CM2ds:PositionOffsetY S08IDFE-XBPM:CM2ds:PositionScaleX         / S08IDFE-XBPM:CM2ds:PositionScaleX S08IDFE-XBPM:CM2ds:PositionScaleY         / S08IDFE-XBPM:CM2ds:PositionScaleY S08IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S08IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S08IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S08IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S08IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S08IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S08IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S08IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S08IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S08IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S08IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S08IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S08IDFE-XBPM:CM3ds:PositionOffsetX        / S08IDFE-XBPM:CM3ds:PositionOffsetX S08IDFE-XBPM:CM3ds:PositionOffsetY        / S08IDFE-XBPM:CM3ds:PositionOffsetY S08IDFE-XBPM:CM3ds:PositionScaleX         / S08IDFE-XBPM:CM3ds:PositionScaleX S08IDFE-XBPM:CM3ds:PositionScaleY         / S08IDFE-XBPM:CM3ds:PositionScaleY S08IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S08IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S08IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S08IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S08IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S08IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S08IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S08IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S08IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S08IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S08IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S08IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S08IDFE-XBPM:CM4ds:PositionOffsetX        / S08IDFE-XBPM:CM4ds:PositionOffsetX S08IDFE-XBPM:CM4ds:PositionOffsetY        / S08IDFE-XBPM:CM4ds:PositionOffsetY S08IDFE-XBPM:CM4ds:PositionScaleX         / S08IDFE-XBPM:CM4ds:PositionScaleX S08IDFE-XBPM:CM4ds:PositionScaleY         / S08IDFE-XBPM:CM4ds:PositionScaleY S08IDFE-XBPM:P1ds:BMcUsedM                / S08IDFE-XBPM:P1ds:BMcUsedM S08IDFE-XBPM:P1ds:GapUsedC                / S08IDFE-XBPM:P1ds:GapUsedC S08IDFE-XBPM:P1ds:Wx1UsedM                / S08IDFE-XBPM:P1ds:Wx1UsedM S08IDFE-XBPM:P1ds:Wx2UsedM                / S08IDFE-XBPM:P1ds:Wx2UsedM S08IDFE-XBPM:P1ds:Wx3UsedM                / S08IDFE-XBPM:P1ds:Wx3UsedM S08IDFE-XBPM:P1ds:Wy1UsedM                / S08IDFE-XBPM:P1ds:Wy1UsedM S08IDFE-XBPM:P1ds:Wy2UsedM                / S08IDFE-XBPM:P1ds:Wy2UsedM S08IDFE-XBPM:P1ds:Wy3UsedM                / S08IDFE-XBPM:P1ds:Wy3UsedM S08IDFE-XBPM:P1ds:x                       / S08IDFE-XBPM:P1ds:x S08IDFE-XBPM:P1ds:x:CalFactor1M           / S08IDFE-XBPM:P1ds:x:CalFactor1M S08IDFE-XBPM:P1ds:x:CalFactor2M           / S08IDFE-XBPM:P1ds:x:CalFactor2M S08IDFE-XBPM:P1ds:x:LowPass1sM            / S08IDFE-XBPM:P1ds:x:LowPass1sM S08IDFE-XBPM:P1ds:x:LowPass8sM            / S08IDFE-XBPM:P1ds:x:LowPass8sM S08IDFE-XBPM:P1ds:x:LowPass64sM           / S08IDFE-XBPM:P1ds:x:LowPass64sM S08IDFE-XBPM:P1ds:x:Offset1M              / S08IDFE-XBPM:P1ds:x:Offset1M S08IDFE-XBPM:P1ds:x:Offset2M              / S08IDFE-XBPM:P1ds:x:Offset2M S08IDFE-XBPM:P1ds:x:ResolutionM           / S08IDFE-XBPM:P1ds:x:ResolutionM S08IDFE-XBPM:P1ds:x:Resolution1sM         / S08IDFE-XBPM:P1ds:x:Resolution1sM S08IDFE-XBPM:P1ds:x:Resolution8sM         / S08IDFE-XBPM:P1ds:x:Resolution8sM S08IDFE-XBPM:P1ds:x:Resolution64sM        / S08IDFE-XBPM:P1ds:x:Resolution64sM S08IDFE-XBPM:P1ds:x:StdDevM               / S08IDFE-XBPM:P1ds:x:StdDevM S08IDFE-XBPM:P1ds:x:StdDev1sM             / S08IDFE-XBPM:P1ds:x:StdDev1sM S08IDFE-XBPM:P1ds:x:StdDev8sM             / S08IDFE-XBPM:P1ds:x:StdDev8sM S08IDFE-XBPM:P1ds:x:StdDev64sM            / S08IDFE-XBPM:P1ds:x:StdDev64sM S08IDFE-XBPM:P1ds:x1:LowPass1sM           / S08IDFE-XBPM:P1ds:x1:LowPass1sM S08IDFE-XBPM:P1ds:x1:LowPass8sM           / S08IDFE-XBPM:P1ds:x1:LowPass8sM S08IDFE-XBPM:P1ds:x1:LowPass64sM          / S08IDFE-XBPM:P1ds:x1:LowPass64sM S08IDFE-XBPM:P1ds:x2:LowPass1sM           / S08IDFE-XBPM:P1ds:x2:LowPass1sM S08IDFE-XBPM:P1ds:x2:LowPass8sM           / S08IDFE-XBPM:P1ds:x2:LowPass8sM S08IDFE-XBPM:P1ds:x2:LowPass64sM          / S08IDFE-XBPM:P1ds:x2:LowPass64sM S08IDFE-XBPM:P1ds:y                       / S08IDFE-XBPM:P1ds:y S08IDFE-XBPM:P1ds:y:CalFactor1M           / S08IDFE-XBPM:P1ds:y:CalFactor1M S08IDFE-XBPM:P1ds:y:CalFactor2M           / S08IDFE-XBPM:P1ds:y:CalFactor2M S08IDFE-XBPM:P1ds:y:LowPass1sM            / S08IDFE-XBPM:P1ds:y:LowPass1sM S08IDFE-XBPM:P1ds:y:LowPass8sM            / S08IDFE-XBPM:P1ds:y:LowPass8sM S08IDFE-XBPM:P1ds:y:LowPass64sM           / S08IDFE-XBPM:P1ds:y:LowPass64sM S08IDFE-XBPM:P1ds:y:Offset1M              / S08IDFE-XBPM:P1ds:y:Offset1M S08IDFE-XBPM:P1ds:y:Offset2M              / S08IDFE-XBPM:P1ds:y:Offset2M S08IDFE-XBPM:P1ds:y:ResolutionM           / S08IDFE-XBPM:P1ds:y:ResolutionM S08IDFE-XBPM:P1ds:y:Resolution1sM         / S08IDFE-XBPM:P1ds:y:Resolution1sM S08IDFE-XBPM:P1ds:y:Resolution8sM         / S08IDFE-XBPM:P1ds:y:Resolution8sM S08IDFE-XBPM:P1ds:y:Resolution64sM        / S08IDFE-XBPM:P1ds:y:Resolution64sM S08IDFE-XBPM:P1ds:y:StdDevM               / S08IDFE-XBPM:P1ds:y:StdDevM S08IDFE-XBPM:P1ds:y:StdDev1sM             / S08IDFE-XBPM:P1ds:y:StdDev1sM S08IDFE-XBPM:P1ds:y:StdDev8sM             / S08IDFE-XBPM:P1ds:y:StdDev8sM S08IDFE-XBPM:P1ds:y:StdDev64sM            / S08IDFE-XBPM:P1ds:y:StdDev64sM S08IDFE-XBPM:P1ds:y1:LowPass1sM           / S08IDFE-XBPM:P1ds:y1:LowPass1sM S08IDFE-XBPM:P1ds:y1:LowPass8sM           / S08IDFE-XBPM:P1ds:y1:LowPass8sM S08IDFE-XBPM:P1ds:y1:LowPass64sM          / S08IDFE-XBPM:P1ds:y1:LowPass64sM S08IDFE-XBPM:P1ds:y2:LowPass1sM           / S08IDFE-XBPM:P1ds:y2:LowPass1sM S08IDFE-XBPM:P1ds:y2:LowPass8sM           / S08IDFE-XBPM:P1ds:y2:LowPass8sM S08IDFE-XBPM:P1ds:y2:LowPass64sM          / S08IDFE-XBPM:P1ds:y2:LowPass64sM S08IDFE-XBPM:P2ds:GapUsedC                / S08IDFE-XBPM:P2ds:GapUsedC S08IDFE-XBPM:P2ds:XCalM                   / S08IDFE-XBPM:P2ds:XCalM S08IDFE-XBPM:P2ds:YCalM                   / S08IDFE-XBPM:P2ds:YCalM S08IDFE-XBPM:P2ds:x:CalFactorM            / S08IDFE-XBPM:P2ds:x:CalFactorM S08IDFE-XBPM:P2ds:x:OffsetM               / S08IDFE-XBPM:P2ds:x:OffsetM S08IDFE-XBPM:P2ds:y:CalFactorM            / S08IDFE-XBPM:P2ds:y:CalFactorM S08IDFE-XBPM:P2ds:y:OffsetM               / S08IDFE-XBPM:P2ds:y:OffsetM S09BMFE-XBPM:P1:AM                        / S09BMFE-XBPM:P1:AM S09BMFE-XBPM:P1:BM                        / S09BMFE-XBPM:P1:BM S09BMFE-XBPM:P1:y                         / S09BMFE-XBPM:P1:y S09BMFE-XBPM:P1:y:LowPass1sM              / S09BMFE-XBPM:P1:y:LowPass1sM S09BMFE-XBPM:P1:y:LowPass8sM              / S09BMFE-XBPM:P1:y:LowPass8sM S09BMFE-XBPM:P1:y:LowPass64sM             / S09BMFE-XBPM:P1:y:LowPass64sM S09BMFE-XBPM:P1:y:StdDevM                 / S09BMFE-XBPM:P1:y:StdDevM S09BMFE-XBPM:P1:y:StdDev1sM               / S09BMFE-XBPM:P1:y:StdDev1sM S09BMFE-XBPM:P1:y:StdDev8sM               / S09BMFE-XBPM:P1:y:StdDev8sM S09BMFE-XBPM:P1:y:StdDev64sM              / S09BMFE-XBPM:P1:y:StdDev64sM S09BMFE-XBPM:P2:AM                        / S09BMFE-XBPM:P2:AM S09BMFE-XBPM:P2:BM                        / S09BMFE-XBPM:P2:BM S09BMFE-XBPM:P2:y                         / S09BMFE-XBPM:P2:y S09BMFE-XBPM:P2:y:LowPass1sM              / S09BMFE-XBPM:P2:y:LowPass1sM S09BMFE-XBPM:P2:y:LowPass8sM              / S09BMFE-XBPM:P2:y:LowPass8sM S09BMFE-XBPM:P2:y:LowPass64sM             / S09BMFE-XBPM:P2:y:LowPass64sM S09BMFE-XBPM:P2:y:StdDevM                 / S09BMFE-XBPM:P2:y:StdDevM S09BMFE-XBPM:P2:y:StdDev1sM               / S09BMFE-XBPM:P2:y:StdDev1sM S09BMFE-XBPM:P2:y:StdDev8sM               / S09BMFE-XBPM:P2:y:StdDev8sM S09BMFE-XBPM:P2:y:StdDev64sM              / S09BMFE-XBPM:P2:y:StdDev64sM S09IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S09IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S09IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S09IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S09IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S09IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S09IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S09IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S09IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S09IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S09IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S09IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S09IDFE-XBPM:CM1ds:PositionOffsetX        / S09IDFE-XBPM:CM1ds:PositionOffsetX S09IDFE-XBPM:CM1ds:PositionOffsetY        / S09IDFE-XBPM:CM1ds:PositionOffsetY S09IDFE-XBPM:CM1ds:PositionScaleX         / S09IDFE-XBPM:CM1ds:PositionScaleX S09IDFE-XBPM:CM1ds:PositionScaleY         / S09IDFE-XBPM:CM1ds:PositionScaleY S09IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S09IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S09IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S09IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S09IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S09IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S09IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S09IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S09IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S09IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S09IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S09IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S09IDFE-XBPM:CM2ds:PositionOffsetX        / S09IDFE-XBPM:CM2ds:PositionOffsetX S09IDFE-XBPM:CM2ds:PositionOffsetY        / S09IDFE-XBPM:CM2ds:PositionOffsetY S09IDFE-XBPM:CM2ds:PositionScaleX         / S09IDFE-XBPM:CM2ds:PositionScaleX S09IDFE-XBPM:CM2ds:PositionScaleY         / S09IDFE-XBPM:CM2ds:PositionScaleY S09IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S09IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S09IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S09IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S09IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S09IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S09IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S09IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S09IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S09IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S09IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S09IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S09IDFE-XBPM:CM3ds:PositionOffsetX        / S09IDFE-XBPM:CM3ds:PositionOffsetX S09IDFE-XBPM:CM3ds:PositionOffsetY        / S09IDFE-XBPM:CM3ds:PositionOffsetY S09IDFE-XBPM:CM3ds:PositionScaleX         / S09IDFE-XBPM:CM3ds:PositionScaleX S09IDFE-XBPM:CM3ds:PositionScaleY         / S09IDFE-XBPM:CM3ds:PositionScaleY S09IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S09IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S09IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S09IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S09IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S09IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S09IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S09IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S09IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S09IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S09IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S09IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S09IDFE-XBPM:CM4ds:PositionOffsetX        / S09IDFE-XBPM:CM4ds:PositionOffsetX S09IDFE-XBPM:CM4ds:PositionOffsetY        / S09IDFE-XBPM:CM4ds:PositionOffsetY S09IDFE-XBPM:CM4ds:PositionScaleX         / S09IDFE-XBPM:CM4ds:PositionScaleX S09IDFE-XBPM:CM4ds:PositionScaleY         / S09IDFE-XBPM:CM4ds:PositionScaleY S09IDFE-XBPM:P1ds:BMcUsedM                / S09IDFE-XBPM:P1ds:BMcUsedM S09IDFE-XBPM:P1ds:GapUsedC                / S09IDFE-XBPM:P1ds:GapUsedC S09IDFE-XBPM:P1ds:Wx1UsedM                / S09IDFE-XBPM:P1ds:Wx1UsedM S09IDFE-XBPM:P1ds:Wx2UsedM                / S09IDFE-XBPM:P1ds:Wx2UsedM S09IDFE-XBPM:P1ds:Wx3UsedM                / S09IDFE-XBPM:P1ds:Wx3UsedM S09IDFE-XBPM:P1ds:Wy1UsedM                / S09IDFE-XBPM:P1ds:Wy1UsedM S09IDFE-XBPM:P1ds:Wy2UsedM                / S09IDFE-XBPM:P1ds:Wy2UsedM S09IDFE-XBPM:P1ds:Wy3UsedM                / S09IDFE-XBPM:P1ds:Wy3UsedM S09IDFE-XBPM:P1ds:x                       / S09IDFE-XBPM:P1ds:x S09IDFE-XBPM:P1ds:x:CalFactor1M           / S09IDFE-XBPM:P1ds:x:CalFactor1M S09IDFE-XBPM:P1ds:x:CalFactor2M           / S09IDFE-XBPM:P1ds:x:CalFactor2M S09IDFE-XBPM:P1ds:x:LowPass1sM            / S09IDFE-XBPM:P1ds:x:LowPass1sM S09IDFE-XBPM:P1ds:x:LowPass8sM            / S09IDFE-XBPM:P1ds:x:LowPass8sM S09IDFE-XBPM:P1ds:x:LowPass64sM           / S09IDFE-XBPM:P1ds:x:LowPass64sM S09IDFE-XBPM:P1ds:x:Offset1M              / S09IDFE-XBPM:P1ds:x:Offset1M S09IDFE-XBPM:P1ds:x:Offset2M              / S09IDFE-XBPM:P1ds:x:Offset2M S09IDFE-XBPM:P1ds:x:ResolutionM           / S09IDFE-XBPM:P1ds:x:ResolutionM S09IDFE-XBPM:P1ds:x:Resolution1sM         / S09IDFE-XBPM:P1ds:x:Resolution1sM S09IDFE-XBPM:P1ds:x:Resolution8sM         / S09IDFE-XBPM:P1ds:x:Resolution8sM S09IDFE-XBPM:P1ds:x:Resolution64sM        / S09IDFE-XBPM:P1ds:x:Resolution64sM S09IDFE-XBPM:P1ds:x:StdDevM               / S09IDFE-XBPM:P1ds:x:StdDevM S09IDFE-XBPM:P1ds:x:StdDev1sM             / S09IDFE-XBPM:P1ds:x:StdDev1sM S09IDFE-XBPM:P1ds:x:StdDev8sM             / S09IDFE-XBPM:P1ds:x:StdDev8sM S09IDFE-XBPM:P1ds:x:StdDev64sM            / S09IDFE-XBPM:P1ds:x:StdDev64sM S09IDFE-XBPM:P1ds:x1:LowPass1sM           / S09IDFE-XBPM:P1ds:x1:LowPass1sM S09IDFE-XBPM:P1ds:x1:LowPass8sM           / S09IDFE-XBPM:P1ds:x1:LowPass8sM S09IDFE-XBPM:P1ds:x1:LowPass64sM          / S09IDFE-XBPM:P1ds:x1:LowPass64sM S09IDFE-XBPM:P1ds:x2:LowPass1sM           / S09IDFE-XBPM:P1ds:x2:LowPass1sM S09IDFE-XBPM:P1ds:x2:LowPass8sM           / S09IDFE-XBPM:P1ds:x2:LowPass8sM S09IDFE-XBPM:P1ds:x2:LowPass64sM          / S09IDFE-XBPM:P1ds:x2:LowPass64sM S09IDFE-XBPM:P1ds:y                       / S09IDFE-XBPM:P1ds:y S09IDFE-XBPM:P1ds:y:CalFactor1M           / S09IDFE-XBPM:P1ds:y:CalFactor1M S09IDFE-XBPM:P1ds:y:CalFactor2M           / S09IDFE-XBPM:P1ds:y:CalFactor2M S09IDFE-XBPM:P1ds:y:LowPass1sM            / S09IDFE-XBPM:P1ds:y:LowPass1sM S09IDFE-XBPM:P1ds:y:LowPass8sM            / S09IDFE-XBPM:P1ds:y:LowPass8sM S09IDFE-XBPM:P1ds:y:LowPass64sM           / S09IDFE-XBPM:P1ds:y:LowPass64sM S09IDFE-XBPM:P1ds:y:Offset1M              / S09IDFE-XBPM:P1ds:y:Offset1M S09IDFE-XBPM:P1ds:y:Offset2M              / S09IDFE-XBPM:P1ds:y:Offset2M S09IDFE-XBPM:P1ds:y:ResolutionM           / S09IDFE-XBPM:P1ds:y:ResolutionM S09IDFE-XBPM:P1ds:y:Resolution1sM         / S09IDFE-XBPM:P1ds:y:Resolution1sM S09IDFE-XBPM:P1ds:y:Resolution8sM         / S09IDFE-XBPM:P1ds:y:Resolution8sM S09IDFE-XBPM:P1ds:y:Resolution64sM        / S09IDFE-XBPM:P1ds:y:Resolution64sM S09IDFE-XBPM:P1ds:y:StdDevM               / S09IDFE-XBPM:P1ds:y:StdDevM S09IDFE-XBPM:P1ds:y:StdDev1sM             / S09IDFE-XBPM:P1ds:y:StdDev1sM S09IDFE-XBPM:P1ds:y:StdDev8sM             / S09IDFE-XBPM:P1ds:y:StdDev8sM S09IDFE-XBPM:P1ds:y:StdDev64sM            / S09IDFE-XBPM:P1ds:y:StdDev64sM S09IDFE-XBPM:P1ds:y1:LowPass1sM           / S09IDFE-XBPM:P1ds:y1:LowPass1sM S09IDFE-XBPM:P1ds:y1:LowPass8sM           / S09IDFE-XBPM:P1ds:y1:LowPass8sM S09IDFE-XBPM:P1ds:y1:LowPass64sM          / S09IDFE-XBPM:P1ds:y1:LowPass64sM S09IDFE-XBPM:P1ds:y2:LowPass1sM           / S09IDFE-XBPM:P1ds:y2:LowPass1sM S09IDFE-XBPM:P1ds:y2:LowPass8sM           / S09IDFE-XBPM:P1ds:y2:LowPass8sM S09IDFE-XBPM:P1ds:y2:LowPass64sM          / S09IDFE-XBPM:P1ds:y2:LowPass64sM S09IDFE-XBPM:P2ds:GapUsedC                / S09IDFE-XBPM:P2ds:GapUsedC S09IDFE-XBPM:P2ds:XCalM                   / S09IDFE-XBPM:P2ds:XCalM S09IDFE-XBPM:P2ds:YCalM                   / S09IDFE-XBPM:P2ds:YCalM S09IDFE-XBPM:P2ds:x:CalFactorM            / S09IDFE-XBPM:P2ds:x:CalFactorM S09IDFE-XBPM:P2ds:x:OffsetM               / S09IDFE-XBPM:P2ds:x:OffsetM S09IDFE-XBPM:P2ds:y:CalFactorM            / S09IDFE-XBPM:P2ds:y:CalFactorM S09IDFE-XBPM:P2ds:y:OffsetM               / S09IDFE-XBPM:P2ds:y:OffsetM S10BMFE-XBPM:P1:AM                        / S10BMFE-XBPM:P1:AM S10BMFE-XBPM:P1:BM                        / S10BMFE-XBPM:P1:BM S10BMFE-XBPM:P1:y                         / S10BMFE-XBPM:P1:y S10BMFE-XBPM:P1:y:LowPass1sM              / S10BMFE-XBPM:P1:y:LowPass1sM S10BMFE-XBPM:P1:y:LowPass8sM              / S10BMFE-XBPM:P1:y:LowPass8sM S10BMFE-XBPM:P1:y:LowPass64sM             / S10BMFE-XBPM:P1:y:LowPass64sM S10BMFE-XBPM:P1:y:StdDevM                 / S10BMFE-XBPM:P1:y:StdDevM S10BMFE-XBPM:P1:y:StdDev1sM               / S10BMFE-XBPM:P1:y:StdDev1sM S10BMFE-XBPM:P1:y:StdDev8sM               / S10BMFE-XBPM:P1:y:StdDev8sM S10BMFE-XBPM:P1:y:StdDev64sM              / S10BMFE-XBPM:P1:y:StdDev64sM S10BMFE-XBPM:P2:AM                        / S10BMFE-XBPM:P2:AM S10BMFE-XBPM:P2:BM                        / S10BMFE-XBPM:P2:BM S10BMFE-XBPM:P2:y                         / S10BMFE-XBPM:P2:y S10BMFE-XBPM:P2:y:LowPass1sM              / S10BMFE-XBPM:P2:y:LowPass1sM S10BMFE-XBPM:P2:y:LowPass8sM              / S10BMFE-XBPM:P2:y:LowPass8sM S10BMFE-XBPM:P2:y:LowPass64sM             / S10BMFE-XBPM:P2:y:LowPass64sM S10BMFE-XBPM:P2:y:StdDevM                 / S10BMFE-XBPM:P2:y:StdDevM S10BMFE-XBPM:P2:y:StdDev1sM               / S10BMFE-XBPM:P2:y:StdDev1sM S10BMFE-XBPM:P2:y:StdDev8sM               / S10BMFE-XBPM:P2:y:StdDev8sM S10BMFE-XBPM:P2:y:StdDev64sM              / S10BMFE-XBPM:P2:y:StdDev64sM S10IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S10IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S10IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S10IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S10IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S10IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S10IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S10IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S10IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S10IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S10IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S10IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S10IDFE-XBPM:CM1ds:PositionOffsetX        / S10IDFE-XBPM:CM1ds:PositionOffsetX S10IDFE-XBPM:CM1ds:PositionOffsetY        / S10IDFE-XBPM:CM1ds:PositionOffsetY S10IDFE-XBPM:CM1ds:PositionScaleX         / S10IDFE-XBPM:CM1ds:PositionScaleX S10IDFE-XBPM:CM1ds:PositionScaleY         / S10IDFE-XBPM:CM1ds:PositionScaleY S10IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S10IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S10IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S10IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S10IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S10IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S10IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S10IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S10IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S10IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S10IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S10IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S10IDFE-XBPM:CM2ds:PositionOffsetX        / S10IDFE-XBPM:CM2ds:PositionOffsetX S10IDFE-XBPM:CM2ds:PositionOffsetY        / S10IDFE-XBPM:CM2ds:PositionOffsetY S10IDFE-XBPM:CM2ds:PositionScaleX         / S10IDFE-XBPM:CM2ds:PositionScaleX S10IDFE-XBPM:CM2ds:PositionScaleY         / S10IDFE-XBPM:CM2ds:PositionScaleY S10IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S10IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S10IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S10IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S10IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S10IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S10IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S10IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S10IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S10IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S10IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S10IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S10IDFE-XBPM:CM3ds:PositionOffsetX        / S10IDFE-XBPM:CM3ds:PositionOffsetX S10IDFE-XBPM:CM3ds:PositionOffsetY        / S10IDFE-XBPM:CM3ds:PositionOffsetY S10IDFE-XBPM:CM3ds:PositionScaleX         / S10IDFE-XBPM:CM3ds:PositionScaleX S10IDFE-XBPM:CM3ds:PositionScaleY         / S10IDFE-XBPM:CM3ds:PositionScaleY S10IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S10IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S10IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S10IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S10IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S10IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S10IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S10IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S10IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S10IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S10IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S10IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S10IDFE-XBPM:CM4ds:PositionOffsetX        / S10IDFE-XBPM:CM4ds:PositionOffsetX S10IDFE-XBPM:CM4ds:PositionOffsetY        / S10IDFE-XBPM:CM4ds:PositionOffsetY S10IDFE-XBPM:CM4ds:PositionScaleX         / S10IDFE-XBPM:CM4ds:PositionScaleX S10IDFE-XBPM:CM4ds:PositionScaleY         / S10IDFE-XBPM:CM4ds:PositionScaleY S10IDFE-XBPM:P1ds:BMcUsedM                / S10IDFE-XBPM:P1ds:BMcUsedM S10IDFE-XBPM:P1ds:GapUsedC                / S10IDFE-XBPM:P1ds:GapUsedC S10IDFE-XBPM:P1ds:Wx1UsedM                / S10IDFE-XBPM:P1ds:Wx1UsedM S10IDFE-XBPM:P1ds:Wx2UsedM                / S10IDFE-XBPM:P1ds:Wx2UsedM S10IDFE-XBPM:P1ds:Wx3UsedM                / S10IDFE-XBPM:P1ds:Wx3UsedM S10IDFE-XBPM:P1ds:Wy1UsedM                / S10IDFE-XBPM:P1ds:Wy1UsedM S10IDFE-XBPM:P1ds:Wy2UsedM                / S10IDFE-XBPM:P1ds:Wy2UsedM S10IDFE-XBPM:P1ds:Wy3UsedM                / S10IDFE-XBPM:P1ds:Wy3UsedM S10IDFE-XBPM:P1ds:x                       / S10IDFE-XBPM:P1ds:x S10IDFE-XBPM:P1ds:x:CalFactor1M           / S10IDFE-XBPM:P1ds:x:CalFactor1M S10IDFE-XBPM:P1ds:x:CalFactor2M           / S10IDFE-XBPM:P1ds:x:CalFactor2M S10IDFE-XBPM:P1ds:x:LowPass1sM            / S10IDFE-XBPM:P1ds:x:LowPass1sM S10IDFE-XBPM:P1ds:x:LowPass8sM            / S10IDFE-XBPM:P1ds:x:LowPass8sM S10IDFE-XBPM:P1ds:x:LowPass64sM           / S10IDFE-XBPM:P1ds:x:LowPass64sM S10IDFE-XBPM:P1ds:x:Offset1M              / S10IDFE-XBPM:P1ds:x:Offset1M S10IDFE-XBPM:P1ds:x:Offset2M              / S10IDFE-XBPM:P1ds:x:Offset2M S10IDFE-XBPM:P1ds:x:ResolutionM           / S10IDFE-XBPM:P1ds:x:ResolutionM S10IDFE-XBPM:P1ds:x:Resolution1sM         / S10IDFE-XBPM:P1ds:x:Resolution1sM S10IDFE-XBPM:P1ds:x:Resolution8sM         / S10IDFE-XBPM:P1ds:x:Resolution8sM S10IDFE-XBPM:P1ds:x:Resolution64sM        / S10IDFE-XBPM:P1ds:x:Resolution64sM S10IDFE-XBPM:P1ds:x:StdDevM               / S10IDFE-XBPM:P1ds:x:StdDevM S10IDFE-XBPM:P1ds:x:StdDev1sM             / S10IDFE-XBPM:P1ds:x:StdDev1sM S10IDFE-XBPM:P1ds:x:StdDev8sM             / S10IDFE-XBPM:P1ds:x:StdDev8sM S10IDFE-XBPM:P1ds:x:StdDev64sM            / S10IDFE-XBPM:P1ds:x:StdDev64sM S10IDFE-XBPM:P1ds:x1:LowPass1sM           / S10IDFE-XBPM:P1ds:x1:LowPass1sM S10IDFE-XBPM:P1ds:x1:LowPass8sM           / S10IDFE-XBPM:P1ds:x1:LowPass8sM S10IDFE-XBPM:P1ds:x1:LowPass64sM          / S10IDFE-XBPM:P1ds:x1:LowPass64sM S10IDFE-XBPM:P1ds:x2:LowPass1sM           / S10IDFE-XBPM:P1ds:x2:LowPass1sM S10IDFE-XBPM:P1ds:x2:LowPass8sM           / S10IDFE-XBPM:P1ds:x2:LowPass8sM S10IDFE-XBPM:P1ds:x2:LowPass64sM          / S10IDFE-XBPM:P1ds:x2:LowPass64sM S10IDFE-XBPM:P1ds:y                       / S10IDFE-XBPM:P1ds:y S10IDFE-XBPM:P1ds:y:CalFactor1M           / S10IDFE-XBPM:P1ds:y:CalFactor1M S10IDFE-XBPM:P1ds:y:CalFactor2M           / S10IDFE-XBPM:P1ds:y:CalFactor2M S10IDFE-XBPM:P1ds:y:LowPass1sM            / S10IDFE-XBPM:P1ds:y:LowPass1sM S10IDFE-XBPM:P1ds:y:LowPass8sM            / S10IDFE-XBPM:P1ds:y:LowPass8sM S10IDFE-XBPM:P1ds:y:LowPass64sM           / S10IDFE-XBPM:P1ds:y:LowPass64sM S10IDFE-XBPM:P1ds:y:Offset1M              / S10IDFE-XBPM:P1ds:y:Offset1M S10IDFE-XBPM:P1ds:y:Offset2M              / S10IDFE-XBPM:P1ds:y:Offset2M S10IDFE-XBPM:P1ds:y:ResolutionM           / S10IDFE-XBPM:P1ds:y:ResolutionM S10IDFE-XBPM:P1ds:y:Resolution1sM         / S10IDFE-XBPM:P1ds:y:Resolution1sM S10IDFE-XBPM:P1ds:y:Resolution8sM         / S10IDFE-XBPM:P1ds:y:Resolution8sM S10IDFE-XBPM:P1ds:y:Resolution64sM        / S10IDFE-XBPM:P1ds:y:Resolution64sM S10IDFE-XBPM:P1ds:y:StdDevM               / S10IDFE-XBPM:P1ds:y:StdDevM S10IDFE-XBPM:P1ds:y:StdDev1sM             / S10IDFE-XBPM:P1ds:y:StdDev1sM S10IDFE-XBPM:P1ds:y:StdDev8sM             / S10IDFE-XBPM:P1ds:y:StdDev8sM S10IDFE-XBPM:P1ds:y:StdDev64sM            / S10IDFE-XBPM:P1ds:y:StdDev64sM S10IDFE-XBPM:P1ds:y1:LowPass1sM           / S10IDFE-XBPM:P1ds:y1:LowPass1sM S10IDFE-XBPM:P1ds:y1:LowPass8sM           / S10IDFE-XBPM:P1ds:y1:LowPass8sM S10IDFE-XBPM:P1ds:y1:LowPass64sM          / S10IDFE-XBPM:P1ds:y1:LowPass64sM S10IDFE-XBPM:P1ds:y2:LowPass1sM           / S10IDFE-XBPM:P1ds:y2:LowPass1sM S10IDFE-XBPM:P1ds:y2:LowPass8sM           / S10IDFE-XBPM:P1ds:y2:LowPass8sM S10IDFE-XBPM:P1ds:y2:LowPass64sM          / S10IDFE-XBPM:P1ds:y2:LowPass64sM S10IDFE-XBPM:P2ds:GapUsedC                / S10IDFE-XBPM:P2ds:GapUsedC S10IDFE-XBPM:P2ds:XCalM                   / S10IDFE-XBPM:P2ds:XCalM S10IDFE-XBPM:P2ds:YCalM                   / S10IDFE-XBPM:P2ds:YCalM S10IDFE-XBPM:P2ds:x:CalFactorM            / S10IDFE-XBPM:P2ds:x:CalFactorM S10IDFE-XBPM:P2ds:x:OffsetM               / S10IDFE-XBPM:P2ds:x:OffsetM S10IDFE-XBPM:P2ds:y:CalFactorM            / S10IDFE-XBPM:P2ds:y:CalFactorM S10IDFE-XBPM:P2ds:y:OffsetM               / S10IDFE-XBPM:P2ds:y:OffsetM S11BMFE-XBPM:P1:AM                        / S11BMFE-XBPM:P1:AM S11BMFE-XBPM:P1:BM                        / S11BMFE-XBPM:P1:BM S11BMFE-XBPM:P1:y                         / S11BMFE-XBPM:P1:y S11BMFE-XBPM:P1:y:LowPass1sM              / S11BMFE-XBPM:P1:y:LowPass1sM S11BMFE-XBPM:P1:y:LowPass8sM              / S11BMFE-XBPM:P1:y:LowPass8sM S11BMFE-XBPM:P1:y:LowPass64sM             / S11BMFE-XBPM:P1:y:LowPass64sM S11BMFE-XBPM:P1:y:StdDevM                 / S11BMFE-XBPM:P1:y:StdDevM S11BMFE-XBPM:P1:y:StdDev1sM               / S11BMFE-XBPM:P1:y:StdDev1sM S11BMFE-XBPM:P1:y:StdDev8sM               / S11BMFE-XBPM:P1:y:StdDev8sM S11BMFE-XBPM:P1:y:StdDev64sM              / S11BMFE-XBPM:P1:y:StdDev64sM S11BMFE-XBPM:P2:AM                        / S11BMFE-XBPM:P2:AM S11BMFE-XBPM:P2:BM                        / S11BMFE-XBPM:P2:BM S11BMFE-XBPM:P2:y                         / S11BMFE-XBPM:P2:y S11BMFE-XBPM:P2:y:LowPass1sM              / S11BMFE-XBPM:P2:y:LowPass1sM S11BMFE-XBPM:P2:y:LowPass8sM              / S11BMFE-XBPM:P2:y:LowPass8sM S11BMFE-XBPM:P2:y:LowPass64sM             / S11BMFE-XBPM:P2:y:LowPass64sM S11BMFE-XBPM:P2:y:StdDevM                 / S11BMFE-XBPM:P2:y:StdDevM S11BMFE-XBPM:P2:y:StdDev1sM               / S11BMFE-XBPM:P2:y:StdDev1sM S11BMFE-XBPM:P2:y:StdDev8sM               / S11BMFE-XBPM:P2:y:StdDev8sM S11BMFE-XBPM:P2:y:StdDev64sM              / S11BMFE-XBPM:P2:y:StdDev64sM S11IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S11IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S11IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S11IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S11IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S11IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S11IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S11IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S11IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S11IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S11IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S11IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S11IDFE-XBPM:CM1ds:PositionOffsetX        / S11IDFE-XBPM:CM1ds:PositionOffsetX S11IDFE-XBPM:CM1ds:PositionOffsetY        / S11IDFE-XBPM:CM1ds:PositionOffsetY S11IDFE-XBPM:CM1ds:PositionScaleX         / S11IDFE-XBPM:CM1ds:PositionScaleX S11IDFE-XBPM:CM1ds:PositionScaleY         / S11IDFE-XBPM:CM1ds:PositionScaleY S11IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S11IDFE-XBPM:CM1us:Current1:MeanValue_RBV S11IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S11IDFE-XBPM:CM1us:Current2:MeanValue_RBV S11IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S11IDFE-XBPM:CM1us:Current3:MeanValue_RBV S11IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S11IDFE-XBPM:CM1us:Current4:MeanValue_RBV S11IDFE-XBPM:CM1us:PosX:MeanValue_RBV     / S11IDFE-XBPM:CM1us:PosX:MeanValue_RBV S11IDFE-XBPM:CM1us:PosY:MeanValue_RBV     / S11IDFE-XBPM:CM1us:PosY:MeanValue_RBV S11IDFE-XBPM:CM1us:PositionOffsetX        / S11IDFE-XBPM:CM1us:PositionOffsetX S11IDFE-XBPM:CM1us:PositionOffsetY        / S11IDFE-XBPM:CM1us:PositionOffsetY S11IDFE-XBPM:CM1us:PositionScaleX         / S11IDFE-XBPM:CM1us:PositionScaleX S11IDFE-XBPM:CM1us:PositionScaleY         / S11IDFE-XBPM:CM1us:PositionScaleY S11IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S11IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S11IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S11IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S11IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S11IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S11IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S11IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S11IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S11IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S11IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S11IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S11IDFE-XBPM:CM2ds:PositionOffsetX        / S11IDFE-XBPM:CM2ds:PositionOffsetX S11IDFE-XBPM:CM2ds:PositionOffsetY        / S11IDFE-XBPM:CM2ds:PositionOffsetY S11IDFE-XBPM:CM2ds:PositionScaleX         / S11IDFE-XBPM:CM2ds:PositionScaleX S11IDFE-XBPM:CM2ds:PositionScaleY         / S11IDFE-XBPM:CM2ds:PositionScaleY S11IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S11IDFE-XBPM:CM2us:Current1:MeanValue_RBV S11IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S11IDFE-XBPM:CM2us:Current2:MeanValue_RBV S11IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S11IDFE-XBPM:CM2us:Current3:MeanValue_RBV S11IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S11IDFE-XBPM:CM2us:Current4:MeanValue_RBV S11IDFE-XBPM:CM2us:PosX:MeanValue_RBV     / S11IDFE-XBPM:CM2us:PosX:MeanValue_RBV S11IDFE-XBPM:CM2us:PosY:MeanValue_RBV     / S11IDFE-XBPM:CM2us:PosY:MeanValue_RBV S11IDFE-XBPM:CM2us:PositionOffsetX        / S11IDFE-XBPM:CM2us:PositionOffsetX S11IDFE-XBPM:CM2us:PositionOffsetY        / S11IDFE-XBPM:CM2us:PositionOffsetY S11IDFE-XBPM:CM2us:PositionScaleX         / S11IDFE-XBPM:CM2us:PositionScaleX S11IDFE-XBPM:CM2us:PositionScaleY         / S11IDFE-XBPM:CM2us:PositionScaleY S11IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S11IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S11IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S11IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S11IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S11IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S11IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S11IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S11IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S11IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S11IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S11IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S11IDFE-XBPM:CM3ds:PositionOffsetX        / S11IDFE-XBPM:CM3ds:PositionOffsetX S11IDFE-XBPM:CM3ds:PositionOffsetY        / S11IDFE-XBPM:CM3ds:PositionOffsetY S11IDFE-XBPM:CM3ds:PositionScaleX         / S11IDFE-XBPM:CM3ds:PositionScaleX S11IDFE-XBPM:CM3ds:PositionScaleY         / S11IDFE-XBPM:CM3ds:PositionScaleY S11IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S11IDFE-XBPM:CM3us:Current1:MeanValue_RBV S11IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S11IDFE-XBPM:CM3us:Current2:MeanValue_RBV S11IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S11IDFE-XBPM:CM3us:Current3:MeanValue_RBV S11IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S11IDFE-XBPM:CM3us:Current4:MeanValue_RBV S11IDFE-XBPM:CM3us:PosX:MeanValue_RBV     / S11IDFE-XBPM:CM3us:PosX:MeanValue_RBV S11IDFE-XBPM:CM3us:PosY:MeanValue_RBV     / S11IDFE-XBPM:CM3us:PosY:MeanValue_RBV S11IDFE-XBPM:CM3us:PositionOffsetX        / S11IDFE-XBPM:CM3us:PositionOffsetX S11IDFE-XBPM:CM3us:PositionOffsetY        / S11IDFE-XBPM:CM3us:PositionOffsetY S11IDFE-XBPM:CM3us:PositionScaleX         / S11IDFE-XBPM:CM3us:PositionScaleX S11IDFE-XBPM:CM3us:PositionScaleY         / S11IDFE-XBPM:CM3us:PositionScaleY S11IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S11IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S11IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S11IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S11IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S11IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S11IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S11IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S11IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S11IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S11IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S11IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S11IDFE-XBPM:CM4ds:PositionOffsetX        / S11IDFE-XBPM:CM4ds:PositionOffsetX S11IDFE-XBPM:CM4ds:PositionOffsetY        / S11IDFE-XBPM:CM4ds:PositionOffsetY S11IDFE-XBPM:CM4ds:PositionScaleX         / S11IDFE-XBPM:CM4ds:PositionScaleX S11IDFE-XBPM:CM4ds:PositionScaleY         / S11IDFE-XBPM:CM4ds:PositionScaleY S11IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S11IDFE-XBPM:CM4us:Current1:MeanValue_RBV S11IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S11IDFE-XBPM:CM4us:Current2:MeanValue_RBV S11IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S11IDFE-XBPM:CM4us:Current3:MeanValue_RBV S11IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S11IDFE-XBPM:CM4us:Current4:MeanValue_RBV S11IDFE-XBPM:CM4us:PosX:MeanValue_RBV     / S11IDFE-XBPM:CM4us:PosX:MeanValue_RBV S11IDFE-XBPM:CM4us:PosY:MeanValue_RBV     / S11IDFE-XBPM:CM4us:PosY:MeanValue_RBV S11IDFE-XBPM:CM4us:PositionOffsetX        / S11IDFE-XBPM:CM4us:PositionOffsetX S11IDFE-XBPM:CM4us:PositionOffsetY        / S11IDFE-XBPM:CM4us:PositionOffsetY S11IDFE-XBPM:CM4us:PositionScaleX         / S11IDFE-XBPM:CM4us:PositionScaleX S11IDFE-XBPM:CM4us:PositionScaleY         / S11IDFE-XBPM:CM4us:PositionScaleY S11IDFE-XBPM:P1ds:BMcUsedM                / S11IDFE-XBPM:P1ds:BMcUsedM S11IDFE-XBPM:P1ds:GapUsedC                / S11IDFE-XBPM:P1ds:GapUsedC S11IDFE-XBPM:P1ds:Wx1UsedM                / S11IDFE-XBPM:P1ds:Wx1UsedM S11IDFE-XBPM:P1ds:Wx2UsedM                / S11IDFE-XBPM:P1ds:Wx2UsedM S11IDFE-XBPM:P1ds:Wx3UsedM                / S11IDFE-XBPM:P1ds:Wx3UsedM S11IDFE-XBPM:P1ds:Wy1UsedM                / S11IDFE-XBPM:P1ds:Wy1UsedM S11IDFE-XBPM:P1ds:Wy2UsedM                / S11IDFE-XBPM:P1ds:Wy2UsedM S11IDFE-XBPM:P1ds:Wy3UsedM                / S11IDFE-XBPM:P1ds:Wy3UsedM S11IDFE-XBPM:P1ds:x                       / S11IDFE-XBPM:P1ds:x S11IDFE-XBPM:P1ds:x:CalFactor1M           / S11IDFE-XBPM:P1ds:x:CalFactor1M S11IDFE-XBPM:P1ds:x:CalFactor2M           / S11IDFE-XBPM:P1ds:x:CalFactor2M S11IDFE-XBPM:P1ds:x:LowPass1sM            / S11IDFE-XBPM:P1ds:x:LowPass1sM S11IDFE-XBPM:P1ds:x:LowPass8sM            / S11IDFE-XBPM:P1ds:x:LowPass8sM S11IDFE-XBPM:P1ds:x:LowPass64sM           / S11IDFE-XBPM:P1ds:x:LowPass64sM S11IDFE-XBPM:P1ds:x:Offset1M              / S11IDFE-XBPM:P1ds:x:Offset1M S11IDFE-XBPM:P1ds:x:Offset2M              / S11IDFE-XBPM:P1ds:x:Offset2M S11IDFE-XBPM:P1ds:x:ResolutionM           / S11IDFE-XBPM:P1ds:x:ResolutionM S11IDFE-XBPM:P1ds:x:Resolution1sM         / S11IDFE-XBPM:P1ds:x:Resolution1sM S11IDFE-XBPM:P1ds:x:Resolution8sM         / S11IDFE-XBPM:P1ds:x:Resolution8sM S11IDFE-XBPM:P1ds:x:Resolution64sM        / S11IDFE-XBPM:P1ds:x:Resolution64sM S11IDFE-XBPM:P1ds:x:StdDevM               / S11IDFE-XBPM:P1ds:x:StdDevM S11IDFE-XBPM:P1ds:x:StdDev1sM             / S11IDFE-XBPM:P1ds:x:StdDev1sM S11IDFE-XBPM:P1ds:x:StdDev8sM             / S11IDFE-XBPM:P1ds:x:StdDev8sM S11IDFE-XBPM:P1ds:x:StdDev64sM            / S11IDFE-XBPM:P1ds:x:StdDev64sM S11IDFE-XBPM:P1ds:x1:LowPass1sM           / S11IDFE-XBPM:P1ds:x1:LowPass1sM S11IDFE-XBPM:P1ds:x1:LowPass8sM           / S11IDFE-XBPM:P1ds:x1:LowPass8sM S11IDFE-XBPM:P1ds:x1:LowPass64sM          / S11IDFE-XBPM:P1ds:x1:LowPass64sM S11IDFE-XBPM:P1ds:x2:LowPass1sM           / S11IDFE-XBPM:P1ds:x2:LowPass1sM S11IDFE-XBPM:P1ds:x2:LowPass8sM           / S11IDFE-XBPM:P1ds:x2:LowPass8sM S11IDFE-XBPM:P1ds:x2:LowPass64sM          / S11IDFE-XBPM:P1ds:x2:LowPass64sM S11IDFE-XBPM:P1ds:y                       / S11IDFE-XBPM:P1ds:y S11IDFE-XBPM:P1ds:y:CalFactor1M           / S11IDFE-XBPM:P1ds:y:CalFactor1M S11IDFE-XBPM:P1ds:y:CalFactor2M           / S11IDFE-XBPM:P1ds:y:CalFactor2M S11IDFE-XBPM:P1ds:y:LowPass1sM            / S11IDFE-XBPM:P1ds:y:LowPass1sM S11IDFE-XBPM:P1ds:y:LowPass8sM            / S11IDFE-XBPM:P1ds:y:LowPass8sM S11IDFE-XBPM:P1ds:y:LowPass64sM           / S11IDFE-XBPM:P1ds:y:LowPass64sM S11IDFE-XBPM:P1ds:y:Offset1M              / S11IDFE-XBPM:P1ds:y:Offset1M S11IDFE-XBPM:P1ds:y:Offset2M              / S11IDFE-XBPM:P1ds:y:Offset2M S11IDFE-XBPM:P1ds:y:ResolutionM           / S11IDFE-XBPM:P1ds:y:ResolutionM S11IDFE-XBPM:P1ds:y:Resolution1sM         / S11IDFE-XBPM:P1ds:y:Resolution1sM S11IDFE-XBPM:P1ds:y:Resolution8sM         / S11IDFE-XBPM:P1ds:y:Resolution8sM S11IDFE-XBPM:P1ds:y:Resolution64sM        / S11IDFE-XBPM:P1ds:y:Resolution64sM S11IDFE-XBPM:P1ds:y:StdDevM               / S11IDFE-XBPM:P1ds:y:StdDevM S11IDFE-XBPM:P1ds:y:StdDev1sM             / S11IDFE-XBPM:P1ds:y:StdDev1sM S11IDFE-XBPM:P1ds:y:StdDev8sM             / S11IDFE-XBPM:P1ds:y:StdDev8sM S11IDFE-XBPM:P1ds:y:StdDev64sM            / S11IDFE-XBPM:P1ds:y:StdDev64sM S11IDFE-XBPM:P1ds:y1:LowPass1sM           / S11IDFE-XBPM:P1ds:y1:LowPass1sM S11IDFE-XBPM:P1ds:y1:LowPass8sM           / S11IDFE-XBPM:P1ds:y1:LowPass8sM S11IDFE-XBPM:P1ds:y1:LowPass64sM          / S11IDFE-XBPM:P1ds:y1:LowPass64sM S11IDFE-XBPM:P1ds:y2:LowPass1sM           / S11IDFE-XBPM:P1ds:y2:LowPass1sM S11IDFE-XBPM:P1ds:y2:LowPass8sM           / S11IDFE-XBPM:P1ds:y2:LowPass8sM S11IDFE-XBPM:P1ds:y2:LowPass64sM          / S11IDFE-XBPM:P1ds:y2:LowPass64sM S11IDFE-XBPM:P1us:BMcUsedM                / S11IDFE-XBPM:P1us:BMcUsedM S11IDFE-XBPM:P1us:GapUsedC                / S11IDFE-XBPM:P1us:GapUsedC S11IDFE-XBPM:P1us:Wx1UsedM                / S11IDFE-XBPM:P1us:Wx1UsedM S11IDFE-XBPM:P1us:Wx2UsedM                / S11IDFE-XBPM:P1us:Wx2UsedM S11IDFE-XBPM:P1us:Wx3UsedM                / S11IDFE-XBPM:P1us:Wx3UsedM S11IDFE-XBPM:P1us:Wy1UsedM                / S11IDFE-XBPM:P1us:Wy1UsedM S11IDFE-XBPM:P1us:Wy2UsedM                / S11IDFE-XBPM:P1us:Wy2UsedM S11IDFE-XBPM:P1us:Wy3UsedM                / S11IDFE-XBPM:P1us:Wy3UsedM S11IDFE-XBPM:P1us:x                       / S11IDFE-XBPM:P1us:x S11IDFE-XBPM:P1us:x:CalFactor1M           / S11IDFE-XBPM:P1us:x:CalFactor1M S11IDFE-XBPM:P1us:x:CalFactor2M           / S11IDFE-XBPM:P1us:x:CalFactor2M S11IDFE-XBPM:P1us:x:LowPass1sM            / S11IDFE-XBPM:P1us:x:LowPass1sM S11IDFE-XBPM:P1us:x:LowPass8sM            / S11IDFE-XBPM:P1us:x:LowPass8sM S11IDFE-XBPM:P1us:x:LowPass64sM           / S11IDFE-XBPM:P1us:x:LowPass64sM S11IDFE-XBPM:P1us:x:Offset1M              / S11IDFE-XBPM:P1us:x:Offset1M S11IDFE-XBPM:P1us:x:Offset2M              / S11IDFE-XBPM:P1us:x:Offset2M S11IDFE-XBPM:P1us:x:ResolutionM           / S11IDFE-XBPM:P1us:x:ResolutionM S11IDFE-XBPM:P1us:x:Resolution1sM         / S11IDFE-XBPM:P1us:x:Resolution1sM S11IDFE-XBPM:P1us:x:Resolution8sM         / S11IDFE-XBPM:P1us:x:Resolution8sM S11IDFE-XBPM:P1us:x:Resolution64sM        / S11IDFE-XBPM:P1us:x:Resolution64sM S11IDFE-XBPM:P1us:x:StdDevM               / S11IDFE-XBPM:P1us:x:StdDevM S11IDFE-XBPM:P1us:x:StdDev1sM             / S11IDFE-XBPM:P1us:x:StdDev1sM S11IDFE-XBPM:P1us:x:StdDev8sM             / S11IDFE-XBPM:P1us:x:StdDev8sM S11IDFE-XBPM:P1us:x:StdDev64sM            / S11IDFE-XBPM:P1us:x:StdDev64sM S11IDFE-XBPM:P1us:x1:LowPass1sM           / S11IDFE-XBPM:P1us:x1:LowPass1sM S11IDFE-XBPM:P1us:x1:LowPass8sM           / S11IDFE-XBPM:P1us:x1:LowPass8sM S11IDFE-XBPM:P1us:x1:LowPass64sM          / S11IDFE-XBPM:P1us:x1:LowPass64sM S11IDFE-XBPM:P1us:x2:LowPass1sM           / S11IDFE-XBPM:P1us:x2:LowPass1sM S11IDFE-XBPM:P1us:x2:LowPass8sM           / S11IDFE-XBPM:P1us:x2:LowPass8sM S11IDFE-XBPM:P1us:x2:LowPass64sM          / S11IDFE-XBPM:P1us:x2:LowPass64sM S11IDFE-XBPM:P1us:y                       / S11IDFE-XBPM:P1us:y S11IDFE-XBPM:P1us:y:CalFactor1M           / S11IDFE-XBPM:P1us:y:CalFactor1M S11IDFE-XBPM:P1us:y:CalFactor2M           / S11IDFE-XBPM:P1us:y:CalFactor2M S11IDFE-XBPM:P1us:y:LowPass1sM            / S11IDFE-XBPM:P1us:y:LowPass1sM S11IDFE-XBPM:P1us:y:LowPass8sM            / S11IDFE-XBPM:P1us:y:LowPass8sM S11IDFE-XBPM:P1us:y:LowPass64sM           / S11IDFE-XBPM:P1us:y:LowPass64sM S11IDFE-XBPM:P1us:y:Offset1M              / S11IDFE-XBPM:P1us:y:Offset1M S11IDFE-XBPM:P1us:y:Offset2M              / S11IDFE-XBPM:P1us:y:Offset2M S11IDFE-XBPM:P1us:y:ResolutionM           / S11IDFE-XBPM:P1us:y:ResolutionM S11IDFE-XBPM:P1us:y:Resolution1sM         / S11IDFE-XBPM:P1us:y:Resolution1sM S11IDFE-XBPM:P1us:y:Resolution8sM         / S11IDFE-XBPM:P1us:y:Resolution8sM S11IDFE-XBPM:P1us:y:Resolution64sM        / S11IDFE-XBPM:P1us:y:Resolution64sM S11IDFE-XBPM:P1us:y:StdDevM               / S11IDFE-XBPM:P1us:y:StdDevM S11IDFE-XBPM:P1us:y:StdDev1sM             / S11IDFE-XBPM:P1us:y:StdDev1sM S11IDFE-XBPM:P1us:y:StdDev8sM             / S11IDFE-XBPM:P1us:y:StdDev8sM S11IDFE-XBPM:P1us:y:StdDev64sM            / S11IDFE-XBPM:P1us:y:StdDev64sM S11IDFE-XBPM:P1us:y1:LowPass1sM           / S11IDFE-XBPM:P1us:y1:LowPass1sM S11IDFE-XBPM:P1us:y1:LowPass8sM           / S11IDFE-XBPM:P1us:y1:LowPass8sM S11IDFE-XBPM:P1us:y1:LowPass64sM          / S11IDFE-XBPM:P1us:y1:LowPass64sM S11IDFE-XBPM:P1us:y2:LowPass1sM           / S11IDFE-XBPM:P1us:y2:LowPass1sM S11IDFE-XBPM:P1us:y2:LowPass8sM           / S11IDFE-XBPM:P1us:y2:LowPass8sM S11IDFE-XBPM:P1us:y2:LowPass64sM          / S11IDFE-XBPM:P1us:y2:LowPass64sM S11IDFE-XBPM:P2ds:GapUsedC                / S11IDFE-XBPM:P2ds:GapUsedC S11IDFE-XBPM:P2ds:XCalM                   / S11IDFE-XBPM:P2ds:XCalM S11IDFE-XBPM:P2ds:YCalM                   / S11IDFE-XBPM:P2ds:YCalM S11IDFE-XBPM:P2ds:x:CalFactorM            / S11IDFE-XBPM:P2ds:x:CalFactorM S11IDFE-XBPM:P2ds:x:OffsetM               / S11IDFE-XBPM:P2ds:x:OffsetM S11IDFE-XBPM:P2ds:y:CalFactorM            / S11IDFE-XBPM:P2ds:y:CalFactorM S11IDFE-XBPM:P2ds:y:OffsetM               / S11IDFE-XBPM:P2ds:y:OffsetM S11IDFE-XBPM:P2us:GapUsedC                / S11IDFE-XBPM:P2us:GapUsedC S11IDFE-XBPM:P2us:XCalM                   / S11IDFE-XBPM:P2us:XCalM S11IDFE-XBPM:P2us:YCalM                   / S11IDFE-XBPM:P2us:YCalM S11IDFE-XBPM:P2us:x:CalFactorM            / S11IDFE-XBPM:P2us:x:CalFactorM S11IDFE-XBPM:P2us:x:OffsetM               / S11IDFE-XBPM:P2us:x:OffsetM S11IDFE-XBPM:P2us:y:CalFactorM            / S11IDFE-XBPM:P2us:y:CalFactorM S11IDFE-XBPM:P2us:y:OffsetM               / S11IDFE-XBPM:P2us:y:OffsetM S12BMFE-XBPM:P1:AM                        / S12BMFE-XBPM:P1:AM S12BMFE-XBPM:P1:BM                        / S12BMFE-XBPM:P1:BM S12BMFE-XBPM:P1:y                         / S12BMFE-XBPM:P1:y S12BMFE-XBPM:P1:y:LowPass1sM              / S12BMFE-XBPM:P1:y:LowPass1sM S12BMFE-XBPM:P1:y:LowPass8sM              / S12BMFE-XBPM:P1:y:LowPass8sM S12BMFE-XBPM:P1:y:LowPass64sM             / S12BMFE-XBPM:P1:y:LowPass64sM S12BMFE-XBPM:P1:y:StdDevM                 / S12BMFE-XBPM:P1:y:StdDevM S12BMFE-XBPM:P1:y:StdDev1sM               / S12BMFE-XBPM:P1:y:StdDev1sM S12BMFE-XBPM:P1:y:StdDev8sM               / S12BMFE-XBPM:P1:y:StdDev8sM S12BMFE-XBPM:P1:y:StdDev64sM              / S12BMFE-XBPM:P1:y:StdDev64sM S12BMFE-XBPM:P2:AM                        / S12BMFE-XBPM:P2:AM S12BMFE-XBPM:P2:BM                        / S12BMFE-XBPM:P2:BM S12BMFE-XBPM:P2:y                         / S12BMFE-XBPM:P2:y S12BMFE-XBPM:P2:y:LowPass1sM              / S12BMFE-XBPM:P2:y:LowPass1sM S12BMFE-XBPM:P2:y:LowPass8sM              / S12BMFE-XBPM:P2:y:LowPass8sM S12BMFE-XBPM:P2:y:LowPass64sM             / S12BMFE-XBPM:P2:y:LowPass64sM S12BMFE-XBPM:P2:y:StdDevM                 / S12BMFE-XBPM:P2:y:StdDevM S12BMFE-XBPM:P2:y:StdDev1sM               / S12BMFE-XBPM:P2:y:StdDev1sM S12BMFE-XBPM:P2:y:StdDev8sM               / S12BMFE-XBPM:P2:y:StdDev8sM S12BMFE-XBPM:P2:y:StdDev64sM              / S12BMFE-XBPM:P2:y:StdDev64sM S12IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S12IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S12IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S12IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S12IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S12IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S12IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S12IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S12IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S12IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S12IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S12IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S12IDFE-XBPM:CM1ds:PositionOffsetX        / S12IDFE-XBPM:CM1ds:PositionOffsetX S12IDFE-XBPM:CM1ds:PositionOffsetY        / S12IDFE-XBPM:CM1ds:PositionOffsetY S12IDFE-XBPM:CM1ds:PositionScaleX         / S12IDFE-XBPM:CM1ds:PositionScaleX S12IDFE-XBPM:CM1ds:PositionScaleY         / S12IDFE-XBPM:CM1ds:PositionScaleY S12IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S12IDFE-XBPM:CM1us:Current1:MeanValue_RBV S12IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S12IDFE-XBPM:CM1us:Current2:MeanValue_RBV S12IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S12IDFE-XBPM:CM1us:Current3:MeanValue_RBV S12IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S12IDFE-XBPM:CM1us:Current4:MeanValue_RBV S12IDFE-XBPM:CM1us:PosX:MeanValue_RBV     / S12IDFE-XBPM:CM1us:PosX:MeanValue_RBV S12IDFE-XBPM:CM1us:PosY:MeanValue_RBV     / S12IDFE-XBPM:CM1us:PosY:MeanValue_RBV S12IDFE-XBPM:CM1us:PositionOffsetX        / S12IDFE-XBPM:CM1us:PositionOffsetX S12IDFE-XBPM:CM1us:PositionOffsetY        / S12IDFE-XBPM:CM1us:PositionOffsetY S12IDFE-XBPM:CM1us:PositionScaleX         / S12IDFE-XBPM:CM1us:PositionScaleX S12IDFE-XBPM:CM1us:PositionScaleY         / S12IDFE-XBPM:CM1us:PositionScaleY S12IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S12IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S12IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S12IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S12IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S12IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S12IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S12IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S12IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S12IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S12IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S12IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S12IDFE-XBPM:CM2ds:PositionOffsetX        / S12IDFE-XBPM:CM2ds:PositionOffsetX S12IDFE-XBPM:CM2ds:PositionOffsetY        / S12IDFE-XBPM:CM2ds:PositionOffsetY S12IDFE-XBPM:CM2ds:PositionScaleX         / S12IDFE-XBPM:CM2ds:PositionScaleX S12IDFE-XBPM:CM2ds:PositionScaleY         / S12IDFE-XBPM:CM2ds:PositionScaleY S12IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S12IDFE-XBPM:CM2us:Current1:MeanValue_RBV S12IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S12IDFE-XBPM:CM2us:Current2:MeanValue_RBV S12IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S12IDFE-XBPM:CM2us:Current3:MeanValue_RBV S12IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S12IDFE-XBPM:CM2us:Current4:MeanValue_RBV S12IDFE-XBPM:CM2us:PosX:MeanValue_RBV     / S12IDFE-XBPM:CM2us:PosX:MeanValue_RBV S12IDFE-XBPM:CM2us:PosY:MeanValue_RBV     / S12IDFE-XBPM:CM2us:PosY:MeanValue_RBV S12IDFE-XBPM:CM2us:PositionOffsetX        / S12IDFE-XBPM:CM2us:PositionOffsetX S12IDFE-XBPM:CM2us:PositionOffsetY        / S12IDFE-XBPM:CM2us:PositionOffsetY S12IDFE-XBPM:CM2us:PositionScaleX         / S12IDFE-XBPM:CM2us:PositionScaleX S12IDFE-XBPM:CM2us:PositionScaleY         / S12IDFE-XBPM:CM2us:PositionScaleY S12IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S12IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S12IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S12IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S12IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S12IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S12IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S12IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S12IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S12IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S12IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S12IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S12IDFE-XBPM:CM3ds:PositionOffsetX        / S12IDFE-XBPM:CM3ds:PositionOffsetX S12IDFE-XBPM:CM3ds:PositionOffsetY        / S12IDFE-XBPM:CM3ds:PositionOffsetY S12IDFE-XBPM:CM3ds:PositionScaleX         / S12IDFE-XBPM:CM3ds:PositionScaleX S12IDFE-XBPM:CM3ds:PositionScaleY         / S12IDFE-XBPM:CM3ds:PositionScaleY S12IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S12IDFE-XBPM:CM3us:Current1:MeanValue_RBV S12IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S12IDFE-XBPM:CM3us:Current2:MeanValue_RBV S12IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S12IDFE-XBPM:CM3us:Current3:MeanValue_RBV S12IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S12IDFE-XBPM:CM3us:Current4:MeanValue_RBV S12IDFE-XBPM:CM3us:PosX:MeanValue_RBV     / S12IDFE-XBPM:CM3us:PosX:MeanValue_RBV S12IDFE-XBPM:CM3us:PosY:MeanValue_RBV     / S12IDFE-XBPM:CM3us:PosY:MeanValue_RBV S12IDFE-XBPM:CM3us:PositionOffsetX        / S12IDFE-XBPM:CM3us:PositionOffsetX S12IDFE-XBPM:CM3us:PositionOffsetY        / S12IDFE-XBPM:CM3us:PositionOffsetY S12IDFE-XBPM:CM3us:PositionScaleX         / S12IDFE-XBPM:CM3us:PositionScaleX S12IDFE-XBPM:CM3us:PositionScaleY         / S12IDFE-XBPM:CM3us:PositionScaleY S12IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S12IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S12IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S12IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S12IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S12IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S12IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S12IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S12IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S12IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S12IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S12IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S12IDFE-XBPM:CM4ds:PositionOffsetX        / S12IDFE-XBPM:CM4ds:PositionOffsetX S12IDFE-XBPM:CM4ds:PositionOffsetY        / S12IDFE-XBPM:CM4ds:PositionOffsetY S12IDFE-XBPM:CM4ds:PositionScaleX         / S12IDFE-XBPM:CM4ds:PositionScaleX S12IDFE-XBPM:CM4ds:PositionScaleY         / S12IDFE-XBPM:CM4ds:PositionScaleY S12IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S12IDFE-XBPM:CM4us:Current1:MeanValue_RBV S12IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S12IDFE-XBPM:CM4us:Current2:MeanValue_RBV S12IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S12IDFE-XBPM:CM4us:Current3:MeanValue_RBV S12IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S12IDFE-XBPM:CM4us:Current4:MeanValue_RBV S12IDFE-XBPM:CM4us:PosX:MeanValue_RBV     / S12IDFE-XBPM:CM4us:PosX:MeanValue_RBV S12IDFE-XBPM:CM4us:PosY:MeanValue_RBV     / S12IDFE-XBPM:CM4us:PosY:MeanValue_RBV S12IDFE-XBPM:CM4us:PositionOffsetX        / S12IDFE-XBPM:CM4us:PositionOffsetX S12IDFE-XBPM:CM4us:PositionOffsetY        / S12IDFE-XBPM:CM4us:PositionOffsetY S12IDFE-XBPM:CM4us:PositionScaleX         / S12IDFE-XBPM:CM4us:PositionScaleX S12IDFE-XBPM:CM4us:PositionScaleY         / S12IDFE-XBPM:CM4us:PositionScaleY S12IDFE-XBPM:P1ds:BMcUsedM                / S12IDFE-XBPM:P1ds:BMcUsedM S12IDFE-XBPM:P1ds:GapUsedC                / S12IDFE-XBPM:P1ds:GapUsedC S12IDFE-XBPM:P1ds:Wx1UsedM                / S12IDFE-XBPM:P1ds:Wx1UsedM S12IDFE-XBPM:P1ds:Wx2UsedM                / S12IDFE-XBPM:P1ds:Wx2UsedM S12IDFE-XBPM:P1ds:Wx3UsedM                / S12IDFE-XBPM:P1ds:Wx3UsedM S12IDFE-XBPM:P1ds:Wy1UsedM                / S12IDFE-XBPM:P1ds:Wy1UsedM S12IDFE-XBPM:P1ds:Wy2UsedM                / S12IDFE-XBPM:P1ds:Wy2UsedM S12IDFE-XBPM:P1ds:Wy3UsedM                / S12IDFE-XBPM:P1ds:Wy3UsedM S12IDFE-XBPM:P1ds:x                       / S12IDFE-XBPM:P1ds:x S12IDFE-XBPM:P1ds:x:CalFactor1M           / S12IDFE-XBPM:P1ds:x:CalFactor1M S12IDFE-XBPM:P1ds:x:CalFactor2M           / S12IDFE-XBPM:P1ds:x:CalFactor2M S12IDFE-XBPM:P1ds:x:LowPass1sM            / S12IDFE-XBPM:P1ds:x:LowPass1sM S12IDFE-XBPM:P1ds:x:LowPass8sM            / S12IDFE-XBPM:P1ds:x:LowPass8sM S12IDFE-XBPM:P1ds:x:LowPass64sM           / S12IDFE-XBPM:P1ds:x:LowPass64sM S12IDFE-XBPM:P1ds:x:Offset1M              / S12IDFE-XBPM:P1ds:x:Offset1M S12IDFE-XBPM:P1ds:x:Offset2M              / S12IDFE-XBPM:P1ds:x:Offset2M S12IDFE-XBPM:P1ds:x:ResolutionM           / S12IDFE-XBPM:P1ds:x:ResolutionM S12IDFE-XBPM:P1ds:x:Resolution1sM         / S12IDFE-XBPM:P1ds:x:Resolution1sM S12IDFE-XBPM:P1ds:x:Resolution8sM         / S12IDFE-XBPM:P1ds:x:Resolution8sM S12IDFE-XBPM:P1ds:x:Resolution64sM        / S12IDFE-XBPM:P1ds:x:Resolution64sM S12IDFE-XBPM:P1ds:x:StdDevM               / S12IDFE-XBPM:P1ds:x:StdDevM S12IDFE-XBPM:P1ds:x:StdDev1sM             / S12IDFE-XBPM:P1ds:x:StdDev1sM S12IDFE-XBPM:P1ds:x:StdDev8sM             / S12IDFE-XBPM:P1ds:x:StdDev8sM S12IDFE-XBPM:P1ds:x:StdDev64sM            / S12IDFE-XBPM:P1ds:x:StdDev64sM S12IDFE-XBPM:P1ds:x1:LowPass1sM           / S12IDFE-XBPM:P1ds:x1:LowPass1sM S12IDFE-XBPM:P1ds:x1:LowPass8sM           / S12IDFE-XBPM:P1ds:x1:LowPass8sM S12IDFE-XBPM:P1ds:x1:LowPass64sM          / S12IDFE-XBPM:P1ds:x1:LowPass64sM S12IDFE-XBPM:P1ds:x2:LowPass1sM           / S12IDFE-XBPM:P1ds:x2:LowPass1sM S12IDFE-XBPM:P1ds:x2:LowPass8sM           / S12IDFE-XBPM:P1ds:x2:LowPass8sM S12IDFE-XBPM:P1ds:x2:LowPass64sM          / S12IDFE-XBPM:P1ds:x2:LowPass64sM S12IDFE-XBPM:P1ds:y                       / S12IDFE-XBPM:P1ds:y S12IDFE-XBPM:P1ds:y:CalFactor1M           / S12IDFE-XBPM:P1ds:y:CalFactor1M S12IDFE-XBPM:P1ds:y:CalFactor2M           / S12IDFE-XBPM:P1ds:y:CalFactor2M S12IDFE-XBPM:P1ds:y:LowPass1sM            / S12IDFE-XBPM:P1ds:y:LowPass1sM S12IDFE-XBPM:P1ds:y:LowPass8sM            / S12IDFE-XBPM:P1ds:y:LowPass8sM S12IDFE-XBPM:P1ds:y:LowPass64sM           / S12IDFE-XBPM:P1ds:y:LowPass64sM S12IDFE-XBPM:P1ds:y:Offset1M              / S12IDFE-XBPM:P1ds:y:Offset1M S12IDFE-XBPM:P1ds:y:Offset2M              / S12IDFE-XBPM:P1ds:y:Offset2M S12IDFE-XBPM:P1ds:y:ResolutionM           / S12IDFE-XBPM:P1ds:y:ResolutionM S12IDFE-XBPM:P1ds:y:Resolution1sM         / S12IDFE-XBPM:P1ds:y:Resolution1sM S12IDFE-XBPM:P1ds:y:Resolution8sM         / S12IDFE-XBPM:P1ds:y:Resolution8sM S12IDFE-XBPM:P1ds:y:Resolution64sM        / S12IDFE-XBPM:P1ds:y:Resolution64sM S12IDFE-XBPM:P1ds:y:StdDevM               / S12IDFE-XBPM:P1ds:y:StdDevM S12IDFE-XBPM:P1ds:y:StdDev1sM             / S12IDFE-XBPM:P1ds:y:StdDev1sM S12IDFE-XBPM:P1ds:y:StdDev8sM             / S12IDFE-XBPM:P1ds:y:StdDev8sM S12IDFE-XBPM:P1ds:y:StdDev64sM            / S12IDFE-XBPM:P1ds:y:StdDev64sM S12IDFE-XBPM:P1ds:y1:LowPass1sM           / S12IDFE-XBPM:P1ds:y1:LowPass1sM S12IDFE-XBPM:P1ds:y1:LowPass8sM           / S12IDFE-XBPM:P1ds:y1:LowPass8sM S12IDFE-XBPM:P1ds:y1:LowPass64sM          / S12IDFE-XBPM:P1ds:y1:LowPass64sM S12IDFE-XBPM:P1ds:y2:LowPass1sM           / S12IDFE-XBPM:P1ds:y2:LowPass1sM S12IDFE-XBPM:P1ds:y2:LowPass8sM           / S12IDFE-XBPM:P1ds:y2:LowPass8sM S12IDFE-XBPM:P1ds:y2:LowPass64sM          / S12IDFE-XBPM:P1ds:y2:LowPass64sM S12IDFE-XBPM:P1us:BMcUsedM                / S12IDFE-XBPM:P1us:BMcUsedM S12IDFE-XBPM:P1us:GapUsedC                / S12IDFE-XBPM:P1us:GapUsedC S12IDFE-XBPM:P1us:Wx1UsedM                / S12IDFE-XBPM:P1us:Wx1UsedM S12IDFE-XBPM:P1us:Wx2UsedM                / S12IDFE-XBPM:P1us:Wx2UsedM S12IDFE-XBPM:P1us:Wx3UsedM                / S12IDFE-XBPM:P1us:Wx3UsedM S12IDFE-XBPM:P1us:Wy1UsedM                / S12IDFE-XBPM:P1us:Wy1UsedM S12IDFE-XBPM:P1us:Wy2UsedM                / S12IDFE-XBPM:P1us:Wy2UsedM S12IDFE-XBPM:P1us:Wy3UsedM                / S12IDFE-XBPM:P1us:Wy3UsedM S12IDFE-XBPM:P1us:x                       / S12IDFE-XBPM:P1us:x S12IDFE-XBPM:P1us:x:CalFactor1M           / S12IDFE-XBPM:P1us:x:CalFactor1M S12IDFE-XBPM:P1us:x:CalFactor2M           / S12IDFE-XBPM:P1us:x:CalFactor2M S12IDFE-XBPM:P1us:x:LowPass1sM            / S12IDFE-XBPM:P1us:x:LowPass1sM S12IDFE-XBPM:P1us:x:LowPass8sM            / S12IDFE-XBPM:P1us:x:LowPass8sM S12IDFE-XBPM:P1us:x:LowPass64sM           / S12IDFE-XBPM:P1us:x:LowPass64sM S12IDFE-XBPM:P1us:x:Offset1M              / S12IDFE-XBPM:P1us:x:Offset1M S12IDFE-XBPM:P1us:x:Offset2M              / S12IDFE-XBPM:P1us:x:Offset2M S12IDFE-XBPM:P1us:x:ResolutionM           / S12IDFE-XBPM:P1us:x:ResolutionM S12IDFE-XBPM:P1us:x:Resolution1sM         / S12IDFE-XBPM:P1us:x:Resolution1sM S12IDFE-XBPM:P1us:x:Resolution8sM         / S12IDFE-XBPM:P1us:x:Resolution8sM S12IDFE-XBPM:P1us:x:Resolution64sM        / S12IDFE-XBPM:P1us:x:Resolution64sM S12IDFE-XBPM:P1us:x:StdDevM               / S12IDFE-XBPM:P1us:x:StdDevM S12IDFE-XBPM:P1us:x:StdDev1sM             / S12IDFE-XBPM:P1us:x:StdDev1sM S12IDFE-XBPM:P1us:x:StdDev8sM             / S12IDFE-XBPM:P1us:x:StdDev8sM S12IDFE-XBPM:P1us:x:StdDev64sM            / S12IDFE-XBPM:P1us:x:StdDev64sM S12IDFE-XBPM:P1us:x1:LowPass1sM           / S12IDFE-XBPM:P1us:x1:LowPass1sM S12IDFE-XBPM:P1us:x1:LowPass8sM           / S12IDFE-XBPM:P1us:x1:LowPass8sM S12IDFE-XBPM:P1us:x1:LowPass64sM          / S12IDFE-XBPM:P1us:x1:LowPass64sM S12IDFE-XBPM:P1us:x2:LowPass1sM           / S12IDFE-XBPM:P1us:x2:LowPass1sM S12IDFE-XBPM:P1us:x2:LowPass8sM           / S12IDFE-XBPM:P1us:x2:LowPass8sM S12IDFE-XBPM:P1us:x2:LowPass64sM          / S12IDFE-XBPM:P1us:x2:LowPass64sM S12IDFE-XBPM:P1us:y                       / S12IDFE-XBPM:P1us:y S12IDFE-XBPM:P1us:y:CalFactor1M           / S12IDFE-XBPM:P1us:y:CalFactor1M S12IDFE-XBPM:P1us:y:CalFactor2M           / S12IDFE-XBPM:P1us:y:CalFactor2M S12IDFE-XBPM:P1us:y:LowPass1sM            / S12IDFE-XBPM:P1us:y:LowPass1sM S12IDFE-XBPM:P1us:y:LowPass8sM            / S12IDFE-XBPM:P1us:y:LowPass8sM S12IDFE-XBPM:P1us:y:LowPass64sM           / S12IDFE-XBPM:P1us:y:LowPass64sM S12IDFE-XBPM:P1us:y:Offset1M              / S12IDFE-XBPM:P1us:y:Offset1M S12IDFE-XBPM:P1us:y:Offset2M              / S12IDFE-XBPM:P1us:y:Offset2M S12IDFE-XBPM:P1us:y:ResolutionM           / S12IDFE-XBPM:P1us:y:ResolutionM S12IDFE-XBPM:P1us:y:Resolution1sM         / S12IDFE-XBPM:P1us:y:Resolution1sM S12IDFE-XBPM:P1us:y:Resolution8sM         / S12IDFE-XBPM:P1us:y:Resolution8sM S12IDFE-XBPM:P1us:y:Resolution64sM        / S12IDFE-XBPM:P1us:y:Resolution64sM S12IDFE-XBPM:P1us:y:StdDevM               / S12IDFE-XBPM:P1us:y:StdDevM S12IDFE-XBPM:P1us:y:StdDev1sM             / S12IDFE-XBPM:P1us:y:StdDev1sM S12IDFE-XBPM:P1us:y:StdDev8sM             / S12IDFE-XBPM:P1us:y:StdDev8sM S12IDFE-XBPM:P1us:y:StdDev64sM            / S12IDFE-XBPM:P1us:y:StdDev64sM S12IDFE-XBPM:P1us:y1:LowPass1sM           / S12IDFE-XBPM:P1us:y1:LowPass1sM S12IDFE-XBPM:P1us:y1:LowPass8sM           / S12IDFE-XBPM:P1us:y1:LowPass8sM S12IDFE-XBPM:P1us:y1:LowPass64sM          / S12IDFE-XBPM:P1us:y1:LowPass64sM S12IDFE-XBPM:P1us:y2:LowPass1sM           / S12IDFE-XBPM:P1us:y2:LowPass1sM S12IDFE-XBPM:P1us:y2:LowPass8sM           / S12IDFE-XBPM:P1us:y2:LowPass8sM S12IDFE-XBPM:P1us:y2:LowPass64sM          / S12IDFE-XBPM:P1us:y2:LowPass64sM S12IDFE-XBPM:P2ds:GapUsedC                / S12IDFE-XBPM:P2ds:GapUsedC S12IDFE-XBPM:P2ds:XCalM                   / S12IDFE-XBPM:P2ds:XCalM S12IDFE-XBPM:P2ds:YCalM                   / S12IDFE-XBPM:P2ds:YCalM S12IDFE-XBPM:P2ds:x:CalFactorM            / S12IDFE-XBPM:P2ds:x:CalFactorM S12IDFE-XBPM:P2ds:x:OffsetM               / S12IDFE-XBPM:P2ds:x:OffsetM S12IDFE-XBPM:P2ds:y:CalFactorM            / S12IDFE-XBPM:P2ds:y:CalFactorM S12IDFE-XBPM:P2ds:y:OffsetM               / S12IDFE-XBPM:P2ds:y:OffsetM S12IDFE-XBPM:P2us:GapUsedC                / S12IDFE-XBPM:P2us:GapUsedC S12IDFE-XBPM:P2us:XCalM                   / S12IDFE-XBPM:P2us:XCalM S12IDFE-XBPM:P2us:YCalM                   / S12IDFE-XBPM:P2us:YCalM S12IDFE-XBPM:P2us:x:CalFactorM            / S12IDFE-XBPM:P2us:x:CalFactorM S12IDFE-XBPM:P2us:x:OffsetM               / S12IDFE-XBPM:P2us:x:OffsetM S12IDFE-XBPM:P2us:y:CalFactorM            / S12IDFE-XBPM:P2us:y:CalFactorM S12IDFE-XBPM:P2us:y:OffsetM               / S12IDFE-XBPM:P2us:y:OffsetM S13BMFE-XBPM:P1:AM                        / S13BMFE-XBPM:P1:AM S13BMFE-XBPM:P1:BM                        / S13BMFE-XBPM:P1:BM S13BMFE-XBPM:P1:y                         / S13BMFE-XBPM:P1:y S13BMFE-XBPM:P1:y:LowPass1sM              / S13BMFE-XBPM:P1:y:LowPass1sM S13BMFE-XBPM:P1:y:LowPass8sM              / S13BMFE-XBPM:P1:y:LowPass8sM S13BMFE-XBPM:P1:y:LowPass64sM             / S13BMFE-XBPM:P1:y:LowPass64sM S13BMFE-XBPM:P1:y:StdDevM                 / S13BMFE-XBPM:P1:y:StdDevM S13BMFE-XBPM:P1:y:StdDev1sM               / S13BMFE-XBPM:P1:y:StdDev1sM S13BMFE-XBPM:P1:y:StdDev8sM               / S13BMFE-XBPM:P1:y:StdDev8sM S13BMFE-XBPM:P1:y:StdDev64sM              / S13BMFE-XBPM:P1:y:StdDev64sM S13BMFE-XBPM:P2:AM                        / S13BMFE-XBPM:P2:AM S13BMFE-XBPM:P2:BM                        / S13BMFE-XBPM:P2:BM S13BMFE-XBPM:P2:y                         / S13BMFE-XBPM:P2:y S13BMFE-XBPM:P2:y:LowPass1sM              / S13BMFE-XBPM:P2:y:LowPass1sM S13BMFE-XBPM:P2:y:LowPass8sM              / S13BMFE-XBPM:P2:y:LowPass8sM S13BMFE-XBPM:P2:y:LowPass64sM             / S13BMFE-XBPM:P2:y:LowPass64sM S13BMFE-XBPM:P2:y:StdDevM                 / S13BMFE-XBPM:P2:y:StdDevM S13BMFE-XBPM:P2:y:StdDev1sM               / S13BMFE-XBPM:P2:y:StdDev1sM S13BMFE-XBPM:P2:y:StdDev8sM               / S13BMFE-XBPM:P2:y:StdDev8sM S13BMFE-XBPM:P2:y:StdDev64sM              / S13BMFE-XBPM:P2:y:StdDev64sM S13IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S13IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S13IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S13IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S13IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S13IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S13IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S13IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S13IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S13IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S13IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S13IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S13IDFE-XBPM:CM1ds:PositionOffsetX        / S13IDFE-XBPM:CM1ds:PositionOffsetX S13IDFE-XBPM:CM1ds:PositionOffsetY        / S13IDFE-XBPM:CM1ds:PositionOffsetY S13IDFE-XBPM:CM1ds:PositionScaleX         / S13IDFE-XBPM:CM1ds:PositionScaleX S13IDFE-XBPM:CM1ds:PositionScaleY         / S13IDFE-XBPM:CM1ds:PositionScaleY S13IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S13IDFE-XBPM:CM1us:Current1:MeanValue_RBV S13IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S13IDFE-XBPM:CM1us:Current2:MeanValue_RBV S13IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S13IDFE-XBPM:CM1us:Current3:MeanValue_RBV S13IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S13IDFE-XBPM:CM1us:Current4:MeanValue_RBV S13IDFE-XBPM:CM1us:PosX:MeanValue_RBV     / S13IDFE-XBPM:CM1us:PosX:MeanValue_RBV S13IDFE-XBPM:CM1us:PosY:MeanValue_RBV     / S13IDFE-XBPM:CM1us:PosY:MeanValue_RBV S13IDFE-XBPM:CM1us:PositionOffsetX        / S13IDFE-XBPM:CM1us:PositionOffsetX S13IDFE-XBPM:CM1us:PositionOffsetY        / S13IDFE-XBPM:CM1us:PositionOffsetY S13IDFE-XBPM:CM1us:PositionScaleX         / S13IDFE-XBPM:CM1us:PositionScaleX S13IDFE-XBPM:CM1us:PositionScaleY         / S13IDFE-XBPM:CM1us:PositionScaleY S13IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S13IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S13IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S13IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S13IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S13IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S13IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S13IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S13IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S13IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S13IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S13IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S13IDFE-XBPM:CM2ds:PositionOffsetX        / S13IDFE-XBPM:CM2ds:PositionOffsetX S13IDFE-XBPM:CM2ds:PositionOffsetY        / S13IDFE-XBPM:CM2ds:PositionOffsetY S13IDFE-XBPM:CM2ds:PositionScaleX         / S13IDFE-XBPM:CM2ds:PositionScaleX S13IDFE-XBPM:CM2ds:PositionScaleY         / S13IDFE-XBPM:CM2ds:PositionScaleY S13IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S13IDFE-XBPM:CM2us:Current1:MeanValue_RBV S13IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S13IDFE-XBPM:CM2us:Current2:MeanValue_RBV S13IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S13IDFE-XBPM:CM2us:Current3:MeanValue_RBV S13IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S13IDFE-XBPM:CM2us:Current4:MeanValue_RBV S13IDFE-XBPM:CM2us:PosX:MeanValue_RBV     / S13IDFE-XBPM:CM2us:PosX:MeanValue_RBV S13IDFE-XBPM:CM2us:PosY:MeanValue_RBV     / S13IDFE-XBPM:CM2us:PosY:MeanValue_RBV S13IDFE-XBPM:CM2us:PositionOffsetX        / S13IDFE-XBPM:CM2us:PositionOffsetX S13IDFE-XBPM:CM2us:PositionOffsetY        / S13IDFE-XBPM:CM2us:PositionOffsetY S13IDFE-XBPM:CM2us:PositionScaleX         / S13IDFE-XBPM:CM2us:PositionScaleX S13IDFE-XBPM:CM2us:PositionScaleY         / S13IDFE-XBPM:CM2us:PositionScaleY S13IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S13IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S13IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S13IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S13IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S13IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S13IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S13IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S13IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S13IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S13IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S13IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S13IDFE-XBPM:CM3ds:PositionOffsetX        / S13IDFE-XBPM:CM3ds:PositionOffsetX S13IDFE-XBPM:CM3ds:PositionOffsetY        / S13IDFE-XBPM:CM3ds:PositionOffsetY S13IDFE-XBPM:CM3ds:PositionScaleX         / S13IDFE-XBPM:CM3ds:PositionScaleX S13IDFE-XBPM:CM3ds:PositionScaleY         / S13IDFE-XBPM:CM3ds:PositionScaleY S13IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S13IDFE-XBPM:CM3us:Current1:MeanValue_RBV S13IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S13IDFE-XBPM:CM3us:Current2:MeanValue_RBV S13IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S13IDFE-XBPM:CM3us:Current3:MeanValue_RBV S13IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S13IDFE-XBPM:CM3us:Current4:MeanValue_RBV S13IDFE-XBPM:CM3us:PosX:MeanValue_RBV     / S13IDFE-XBPM:CM3us:PosX:MeanValue_RBV S13IDFE-XBPM:CM3us:PosY:MeanValue_RBV     / S13IDFE-XBPM:CM3us:PosY:MeanValue_RBV S13IDFE-XBPM:CM3us:PositionOffsetX        / S13IDFE-XBPM:CM3us:PositionOffsetX S13IDFE-XBPM:CM3us:PositionOffsetY        / S13IDFE-XBPM:CM3us:PositionOffsetY S13IDFE-XBPM:CM3us:PositionScaleX         / S13IDFE-XBPM:CM3us:PositionScaleX S13IDFE-XBPM:CM3us:PositionScaleY         / S13IDFE-XBPM:CM3us:PositionScaleY S13IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S13IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S13IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S13IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S13IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S13IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S13IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S13IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S13IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S13IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S13IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S13IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S13IDFE-XBPM:CM4ds:PositionOffsetX        / S13IDFE-XBPM:CM4ds:PositionOffsetX S13IDFE-XBPM:CM4ds:PositionOffsetY        / S13IDFE-XBPM:CM4ds:PositionOffsetY S13IDFE-XBPM:CM4ds:PositionScaleX         / S13IDFE-XBPM:CM4ds:PositionScaleX S13IDFE-XBPM:CM4ds:PositionScaleY         / S13IDFE-XBPM:CM4ds:PositionScaleY S13IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S13IDFE-XBPM:CM4us:Current1:MeanValue_RBV S13IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S13IDFE-XBPM:CM4us:Current2:MeanValue_RBV S13IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S13IDFE-XBPM:CM4us:Current3:MeanValue_RBV S13IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S13IDFE-XBPM:CM4us:Current4:MeanValue_RBV S13IDFE-XBPM:CM4us:PosX:MeanValue_RBV     / S13IDFE-XBPM:CM4us:PosX:MeanValue_RBV S13IDFE-XBPM:CM4us:PosY:MeanValue_RBV     / S13IDFE-XBPM:CM4us:PosY:MeanValue_RBV S13IDFE-XBPM:CM4us:PositionOffsetX        / S13IDFE-XBPM:CM4us:PositionOffsetX S13IDFE-XBPM:CM4us:PositionOffsetY        / S13IDFE-XBPM:CM4us:PositionOffsetY S13IDFE-XBPM:CM4us:PositionScaleX         / S13IDFE-XBPM:CM4us:PositionScaleX S13IDFE-XBPM:CM4us:PositionScaleY         / S13IDFE-XBPM:CM4us:PositionScaleY S13IDFE-XBPM:P1ds:BMcUsedM                / S13IDFE-XBPM:P1ds:BMcUsedM S13IDFE-XBPM:P1ds:GapUsedC                / S13IDFE-XBPM:P1ds:GapUsedC S13IDFE-XBPM:P1ds:Wx1UsedM                / S13IDFE-XBPM:P1ds:Wx1UsedM S13IDFE-XBPM:P1ds:Wx2UsedM                / S13IDFE-XBPM:P1ds:Wx2UsedM S13IDFE-XBPM:P1ds:Wx3UsedM                / S13IDFE-XBPM:P1ds:Wx3UsedM S13IDFE-XBPM:P1ds:Wy1UsedM                / S13IDFE-XBPM:P1ds:Wy1UsedM S13IDFE-XBPM:P1ds:Wy2UsedM                / S13IDFE-XBPM:P1ds:Wy2UsedM S13IDFE-XBPM:P1ds:Wy3UsedM                / S13IDFE-XBPM:P1ds:Wy3UsedM S13IDFE-XBPM:P1ds:x                       / S13IDFE-XBPM:P1ds:x S13IDFE-XBPM:P1ds:x:CalFactor1M           / S13IDFE-XBPM:P1ds:x:CalFactor1M S13IDFE-XBPM:P1ds:x:CalFactor2M           / S13IDFE-XBPM:P1ds:x:CalFactor2M S13IDFE-XBPM:P1ds:x:LowPass1sM            / S13IDFE-XBPM:P1ds:x:LowPass1sM S13IDFE-XBPM:P1ds:x:LowPass8sM            / S13IDFE-XBPM:P1ds:x:LowPass8sM S13IDFE-XBPM:P1ds:x:LowPass64sM           / S13IDFE-XBPM:P1ds:x:LowPass64sM S13IDFE-XBPM:P1ds:x:Offset1M              / S13IDFE-XBPM:P1ds:x:Offset1M S13IDFE-XBPM:P1ds:x:Offset2M              / S13IDFE-XBPM:P1ds:x:Offset2M S13IDFE-XBPM:P1ds:x:ResolutionM           / S13IDFE-XBPM:P1ds:x:ResolutionM S13IDFE-XBPM:P1ds:x:Resolution1sM         / S13IDFE-XBPM:P1ds:x:Resolution1sM S13IDFE-XBPM:P1ds:x:Resolution8sM         / S13IDFE-XBPM:P1ds:x:Resolution8sM S13IDFE-XBPM:P1ds:x:Resolution64sM        / S13IDFE-XBPM:P1ds:x:Resolution64sM S13IDFE-XBPM:P1ds:x:StdDevM               / S13IDFE-XBPM:P1ds:x:StdDevM S13IDFE-XBPM:P1ds:x:StdDev1sM             / S13IDFE-XBPM:P1ds:x:StdDev1sM S13IDFE-XBPM:P1ds:x:StdDev8sM             / S13IDFE-XBPM:P1ds:x:StdDev8sM S13IDFE-XBPM:P1ds:x:StdDev64sM            / S13IDFE-XBPM:P1ds:x:StdDev64sM S13IDFE-XBPM:P1ds:x1:LowPass1sM           / S13IDFE-XBPM:P1ds:x1:LowPass1sM S13IDFE-XBPM:P1ds:x1:LowPass8sM           / S13IDFE-XBPM:P1ds:x1:LowPass8sM S13IDFE-XBPM:P1ds:x1:LowPass64sM          / S13IDFE-XBPM:P1ds:x1:LowPass64sM S13IDFE-XBPM:P1ds:x2:LowPass1sM           / S13IDFE-XBPM:P1ds:x2:LowPass1sM S13IDFE-XBPM:P1ds:x2:LowPass8sM           / S13IDFE-XBPM:P1ds:x2:LowPass8sM S13IDFE-XBPM:P1ds:x2:LowPass64sM          / S13IDFE-XBPM:P1ds:x2:LowPass64sM S13IDFE-XBPM:P1ds:y                       / S13IDFE-XBPM:P1ds:y S13IDFE-XBPM:P1ds:y:CalFactor1M           / S13IDFE-XBPM:P1ds:y:CalFactor1M S13IDFE-XBPM:P1ds:y:CalFactor2M           / S13IDFE-XBPM:P1ds:y:CalFactor2M S13IDFE-XBPM:P1ds:y:LowPass1sM            / S13IDFE-XBPM:P1ds:y:LowPass1sM S13IDFE-XBPM:P1ds:y:LowPass8sM            / S13IDFE-XBPM:P1ds:y:LowPass8sM S13IDFE-XBPM:P1ds:y:LowPass64sM           / S13IDFE-XBPM:P1ds:y:LowPass64sM S13IDFE-XBPM:P1ds:y:Offset1M              / S13IDFE-XBPM:P1ds:y:Offset1M S13IDFE-XBPM:P1ds:y:Offset2M              / S13IDFE-XBPM:P1ds:y:Offset2M S13IDFE-XBPM:P1ds:y:ResolutionM           / S13IDFE-XBPM:P1ds:y:ResolutionM S13IDFE-XBPM:P1ds:y:Resolution1sM         / S13IDFE-XBPM:P1ds:y:Resolution1sM S13IDFE-XBPM:P1ds:y:Resolution8sM         / S13IDFE-XBPM:P1ds:y:Resolution8sM S13IDFE-XBPM:P1ds:y:Resolution64sM        / S13IDFE-XBPM:P1ds:y:Resolution64sM S13IDFE-XBPM:P1ds:y:StdDevM               / S13IDFE-XBPM:P1ds:y:StdDevM S13IDFE-XBPM:P1ds:y:StdDev1sM             / S13IDFE-XBPM:P1ds:y:StdDev1sM S13IDFE-XBPM:P1ds:y:StdDev8sM             / S13IDFE-XBPM:P1ds:y:StdDev8sM S13IDFE-XBPM:P1ds:y:StdDev64sM            / S13IDFE-XBPM:P1ds:y:StdDev64sM S13IDFE-XBPM:P1ds:y1:LowPass1sM           / S13IDFE-XBPM:P1ds:y1:LowPass1sM S13IDFE-XBPM:P1ds:y1:LowPass8sM           / S13IDFE-XBPM:P1ds:y1:LowPass8sM S13IDFE-XBPM:P1ds:y1:LowPass64sM          / S13IDFE-XBPM:P1ds:y1:LowPass64sM S13IDFE-XBPM:P1ds:y2:LowPass1sM           / S13IDFE-XBPM:P1ds:y2:LowPass1sM S13IDFE-XBPM:P1ds:y2:LowPass8sM           / S13IDFE-XBPM:P1ds:y2:LowPass8sM S13IDFE-XBPM:P1ds:y2:LowPass64sM          / S13IDFE-XBPM:P1ds:y2:LowPass64sM S13IDFE-XBPM:P1us:BMcUsedM                / S13IDFE-XBPM:P1us:BMcUsedM S13IDFE-XBPM:P1us:GapUsedC                / S13IDFE-XBPM:P1us:GapUsedC S13IDFE-XBPM:P1us:Wx1UsedM                / S13IDFE-XBPM:P1us:Wx1UsedM S13IDFE-XBPM:P1us:Wx2UsedM                / S13IDFE-XBPM:P1us:Wx2UsedM S13IDFE-XBPM:P1us:Wx3UsedM                / S13IDFE-XBPM:P1us:Wx3UsedM S13IDFE-XBPM:P1us:Wy1UsedM                / S13IDFE-XBPM:P1us:Wy1UsedM S13IDFE-XBPM:P1us:Wy2UsedM                / S13IDFE-XBPM:P1us:Wy2UsedM S13IDFE-XBPM:P1us:Wy3UsedM                / S13IDFE-XBPM:P1us:Wy3UsedM S13IDFE-XBPM:P1us:x                       / S13IDFE-XBPM:P1us:x S13IDFE-XBPM:P1us:x:CalFactor1M           / S13IDFE-XBPM:P1us:x:CalFactor1M S13IDFE-XBPM:P1us:x:CalFactor2M           / S13IDFE-XBPM:P1us:x:CalFactor2M S13IDFE-XBPM:P1us:x:LowPass1sM            / S13IDFE-XBPM:P1us:x:LowPass1sM S13IDFE-XBPM:P1us:x:LowPass8sM            / S13IDFE-XBPM:P1us:x:LowPass8sM S13IDFE-XBPM:P1us:x:LowPass64sM           / S13IDFE-XBPM:P1us:x:LowPass64sM S13IDFE-XBPM:P1us:x:Offset1M              / S13IDFE-XBPM:P1us:x:Offset1M S13IDFE-XBPM:P1us:x:Offset2M              / S13IDFE-XBPM:P1us:x:Offset2M S13IDFE-XBPM:P1us:x:ResolutionM           / S13IDFE-XBPM:P1us:x:ResolutionM S13IDFE-XBPM:P1us:x:Resolution1sM         / S13IDFE-XBPM:P1us:x:Resolution1sM S13IDFE-XBPM:P1us:x:Resolution8sM         / S13IDFE-XBPM:P1us:x:Resolution8sM S13IDFE-XBPM:P1us:x:Resolution64sM        / S13IDFE-XBPM:P1us:x:Resolution64sM S13IDFE-XBPM:P1us:x:StdDevM               / S13IDFE-XBPM:P1us:x:StdDevM S13IDFE-XBPM:P1us:x:StdDev1sM             / S13IDFE-XBPM:P1us:x:StdDev1sM S13IDFE-XBPM:P1us:x:StdDev8sM             / S13IDFE-XBPM:P1us:x:StdDev8sM S13IDFE-XBPM:P1us:x:StdDev64sM            / S13IDFE-XBPM:P1us:x:StdDev64sM S13IDFE-XBPM:P1us:x1:LowPass1sM           / S13IDFE-XBPM:P1us:x1:LowPass1sM S13IDFE-XBPM:P1us:x1:LowPass8sM           / S13IDFE-XBPM:P1us:x1:LowPass8sM S13IDFE-XBPM:P1us:x1:LowPass64sM          / S13IDFE-XBPM:P1us:x1:LowPass64sM S13IDFE-XBPM:P1us:x2:LowPass1sM           / S13IDFE-XBPM:P1us:x2:LowPass1sM S13IDFE-XBPM:P1us:x2:LowPass8sM           / S13IDFE-XBPM:P1us:x2:LowPass8sM S13IDFE-XBPM:P1us:x2:LowPass64sM          / S13IDFE-XBPM:P1us:x2:LowPass64sM S13IDFE-XBPM:P1us:y                       / S13IDFE-XBPM:P1us:y S13IDFE-XBPM:P1us:y:CalFactor1M           / S13IDFE-XBPM:P1us:y:CalFactor1M S13IDFE-XBPM:P1us:y:CalFactor2M           / S13IDFE-XBPM:P1us:y:CalFactor2M S13IDFE-XBPM:P1us:y:LowPass1sM            / S13IDFE-XBPM:P1us:y:LowPass1sM S13IDFE-XBPM:P1us:y:LowPass8sM            / S13IDFE-XBPM:P1us:y:LowPass8sM S13IDFE-XBPM:P1us:y:LowPass64sM           / S13IDFE-XBPM:P1us:y:LowPass64sM S13IDFE-XBPM:P1us:y:Offset1M              / S13IDFE-XBPM:P1us:y:Offset1M S13IDFE-XBPM:P1us:y:Offset2M              / S13IDFE-XBPM:P1us:y:Offset2M S13IDFE-XBPM:P1us:y:ResolutionM           / S13IDFE-XBPM:P1us:y:ResolutionM S13IDFE-XBPM:P1us:y:Resolution1sM         / S13IDFE-XBPM:P1us:y:Resolution1sM S13IDFE-XBPM:P1us:y:Resolution8sM         / S13IDFE-XBPM:P1us:y:Resolution8sM S13IDFE-XBPM:P1us:y:Resolution64sM        / S13IDFE-XBPM:P1us:y:Resolution64sM S13IDFE-XBPM:P1us:y:StdDevM               / S13IDFE-XBPM:P1us:y:StdDevM S13IDFE-XBPM:P1us:y:StdDev1sM             / S13IDFE-XBPM:P1us:y:StdDev1sM S13IDFE-XBPM:P1us:y:StdDev8sM             / S13IDFE-XBPM:P1us:y:StdDev8sM S13IDFE-XBPM:P1us:y:StdDev64sM            / S13IDFE-XBPM:P1us:y:StdDev64sM S13IDFE-XBPM:P1us:y1:LowPass1sM           / S13IDFE-XBPM:P1us:y1:LowPass1sM S13IDFE-XBPM:P1us:y1:LowPass8sM           / S13IDFE-XBPM:P1us:y1:LowPass8sM S13IDFE-XBPM:P1us:y1:LowPass64sM          / S13IDFE-XBPM:P1us:y1:LowPass64sM S13IDFE-XBPM:P1us:y2:LowPass1sM           / S13IDFE-XBPM:P1us:y2:LowPass1sM S13IDFE-XBPM:P1us:y2:LowPass8sM           / S13IDFE-XBPM:P1us:y2:LowPass8sM S13IDFE-XBPM:P1us:y2:LowPass64sM          / S13IDFE-XBPM:P1us:y2:LowPass64sM S13IDFE-XBPM:P2ds:GapUsedC                / S13IDFE-XBPM:P2ds:GapUsedC S13IDFE-XBPM:P2ds:XCalM                   / S13IDFE-XBPM:P2ds:XCalM S13IDFE-XBPM:P2ds:YCalM                   / S13IDFE-XBPM:P2ds:YCalM S13IDFE-XBPM:P2ds:x:CalFactorM            / S13IDFE-XBPM:P2ds:x:CalFactorM S13IDFE-XBPM:P2ds:x:OffsetM               / S13IDFE-XBPM:P2ds:x:OffsetM S13IDFE-XBPM:P2ds:y:CalFactorM            / S13IDFE-XBPM:P2ds:y:CalFactorM S13IDFE-XBPM:P2ds:y:OffsetM               / S13IDFE-XBPM:P2ds:y:OffsetM S13IDFE-XBPM:P2us:GapUsedC                / S13IDFE-XBPM:P2us:GapUsedC S13IDFE-XBPM:P2us:XCalM                   / S13IDFE-XBPM:P2us:XCalM S13IDFE-XBPM:P2us:YCalM                   / S13IDFE-XBPM:P2us:YCalM S13IDFE-XBPM:P2us:x:CalFactorM            / S13IDFE-XBPM:P2us:x:CalFactorM S13IDFE-XBPM:P2us:x:OffsetM               / S13IDFE-XBPM:P2us:x:OffsetM S13IDFE-XBPM:P2us:y:CalFactorM            / S13IDFE-XBPM:P2us:y:CalFactorM S13IDFE-XBPM:P2us:y:OffsetM               / S13IDFE-XBPM:P2us:y:OffsetM S14BMFE-XBPM:P1:AM                        / S14BMFE-XBPM:P1:AM S14BMFE-XBPM:P1:BM                        / S14BMFE-XBPM:P1:BM S14BMFE-XBPM:P1:y                         / S14BMFE-XBPM:P1:y S14BMFE-XBPM:P1:y:LowPass1sM              / S14BMFE-XBPM:P1:y:LowPass1sM S14BMFE-XBPM:P1:y:LowPass8sM              / S14BMFE-XBPM:P1:y:LowPass8sM S14BMFE-XBPM:P1:y:LowPass64sM             / S14BMFE-XBPM:P1:y:LowPass64sM S14BMFE-XBPM:P1:y:StdDevM                 / S14BMFE-XBPM:P1:y:StdDevM S14BMFE-XBPM:P1:y:StdDev1sM               / S14BMFE-XBPM:P1:y:StdDev1sM S14BMFE-XBPM:P1:y:StdDev8sM               / S14BMFE-XBPM:P1:y:StdDev8sM S14BMFE-XBPM:P1:y:StdDev64sM              / S14BMFE-XBPM:P1:y:StdDev64sM S14BMFE-XBPM:P2:AM                        / S14BMFE-XBPM:P2:AM S14BMFE-XBPM:P2:BM                        / S14BMFE-XBPM:P2:BM S14BMFE-XBPM:P2:y                         / S14BMFE-XBPM:P2:y S14BMFE-XBPM:P2:y:LowPass1sM              / S14BMFE-XBPM:P2:y:LowPass1sM S14BMFE-XBPM:P2:y:LowPass8sM              / S14BMFE-XBPM:P2:y:LowPass8sM S14BMFE-XBPM:P2:y:LowPass64sM             / S14BMFE-XBPM:P2:y:LowPass64sM S14BMFE-XBPM:P2:y:StdDevM                 / S14BMFE-XBPM:P2:y:StdDevM S14BMFE-XBPM:P2:y:StdDev1sM               / S14BMFE-XBPM:P2:y:StdDev1sM S14BMFE-XBPM:P2:y:StdDev8sM               / S14BMFE-XBPM:P2:y:StdDev8sM S14BMFE-XBPM:P2:y:StdDev64sM              / S14BMFE-XBPM:P2:y:StdDev64sM S14IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S14IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S14IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S14IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S14IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S14IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S14IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S14IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S14IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S14IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S14IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S14IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S14IDFE-XBPM:CM1ds:PositionOffsetX        / S14IDFE-XBPM:CM1ds:PositionOffsetX S14IDFE-XBPM:CM1ds:PositionOffsetY        / S14IDFE-XBPM:CM1ds:PositionOffsetY S14IDFE-XBPM:CM1ds:PositionScaleX         / S14IDFE-XBPM:CM1ds:PositionScaleX S14IDFE-XBPM:CM1ds:PositionScaleY         / S14IDFE-XBPM:CM1ds:PositionScaleY S14IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S14IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S14IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S14IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S14IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S14IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S14IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S14IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S14IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S14IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S14IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S14IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S14IDFE-XBPM:CM2ds:PositionOffsetX        / S14IDFE-XBPM:CM2ds:PositionOffsetX S14IDFE-XBPM:CM2ds:PositionOffsetY        / S14IDFE-XBPM:CM2ds:PositionOffsetY S14IDFE-XBPM:CM2ds:PositionScaleX         / S14IDFE-XBPM:CM2ds:PositionScaleX S14IDFE-XBPM:CM2ds:PositionScaleY         / S14IDFE-XBPM:CM2ds:PositionScaleY S14IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S14IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S14IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S14IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S14IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S14IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S14IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S14IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S14IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S14IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S14IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S14IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S14IDFE-XBPM:CM3ds:PositionOffsetX        / S14IDFE-XBPM:CM3ds:PositionOffsetX S14IDFE-XBPM:CM3ds:PositionOffsetY        / S14IDFE-XBPM:CM3ds:PositionOffsetY S14IDFE-XBPM:CM3ds:PositionScaleX         / S14IDFE-XBPM:CM3ds:PositionScaleX S14IDFE-XBPM:CM3ds:PositionScaleY         / S14IDFE-XBPM:CM3ds:PositionScaleY S14IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S14IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S14IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S14IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S14IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S14IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S14IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S14IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S14IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S14IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S14IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S14IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S14IDFE-XBPM:CM4ds:PositionOffsetX        / S14IDFE-XBPM:CM4ds:PositionOffsetX S14IDFE-XBPM:CM4ds:PositionOffsetY        / S14IDFE-XBPM:CM4ds:PositionOffsetY S14IDFE-XBPM:CM4ds:PositionScaleX         / S14IDFE-XBPM:CM4ds:PositionScaleX S14IDFE-XBPM:CM4ds:PositionScaleY         / S14IDFE-XBPM:CM4ds:PositionScaleY S14IDFE-XBPM:P1ds:BMcUsedM                / S14IDFE-XBPM:P1ds:BMcUsedM S14IDFE-XBPM:P1ds:GapUsedC                / S14IDFE-XBPM:P1ds:GapUsedC S14IDFE-XBPM:P1ds:Wx1UsedM                / S14IDFE-XBPM:P1ds:Wx1UsedM S14IDFE-XBPM:P1ds:Wx2UsedM                / S14IDFE-XBPM:P1ds:Wx2UsedM S14IDFE-XBPM:P1ds:Wx3UsedM                / S14IDFE-XBPM:P1ds:Wx3UsedM S14IDFE-XBPM:P1ds:Wy1UsedM                / S14IDFE-XBPM:P1ds:Wy1UsedM S14IDFE-XBPM:P1ds:Wy2UsedM                / S14IDFE-XBPM:P1ds:Wy2UsedM S14IDFE-XBPM:P1ds:Wy3UsedM                / S14IDFE-XBPM:P1ds:Wy3UsedM S14IDFE-XBPM:P1ds:x                       / S14IDFE-XBPM:P1ds:x S14IDFE-XBPM:P1ds:x:CalFactor1M           / S14IDFE-XBPM:P1ds:x:CalFactor1M S14IDFE-XBPM:P1ds:x:CalFactor2M           / S14IDFE-XBPM:P1ds:x:CalFactor2M S14IDFE-XBPM:P1ds:x:LowPass1sM            / S14IDFE-XBPM:P1ds:x:LowPass1sM S14IDFE-XBPM:P1ds:x:LowPass8sM            / S14IDFE-XBPM:P1ds:x:LowPass8sM S14IDFE-XBPM:P1ds:x:LowPass64sM           / S14IDFE-XBPM:P1ds:x:LowPass64sM S14IDFE-XBPM:P1ds:x:Offset1M              / S14IDFE-XBPM:P1ds:x:Offset1M S14IDFE-XBPM:P1ds:x:Offset2M              / S14IDFE-XBPM:P1ds:x:Offset2M S14IDFE-XBPM:P1ds:x:ResolutionM           / S14IDFE-XBPM:P1ds:x:ResolutionM S14IDFE-XBPM:P1ds:x:Resolution1sM         / S14IDFE-XBPM:P1ds:x:Resolution1sM S14IDFE-XBPM:P1ds:x:Resolution8sM         / S14IDFE-XBPM:P1ds:x:Resolution8sM S14IDFE-XBPM:P1ds:x:Resolution64sM        / S14IDFE-XBPM:P1ds:x:Resolution64sM S14IDFE-XBPM:P1ds:x:StdDevM               / S14IDFE-XBPM:P1ds:x:StdDevM S14IDFE-XBPM:P1ds:x:StdDev1sM             / S14IDFE-XBPM:P1ds:x:StdDev1sM S14IDFE-XBPM:P1ds:x:StdDev8sM             / S14IDFE-XBPM:P1ds:x:StdDev8sM S14IDFE-XBPM:P1ds:x:StdDev64sM            / S14IDFE-XBPM:P1ds:x:StdDev64sM S14IDFE-XBPM:P1ds:x1:LowPass1sM           / S14IDFE-XBPM:P1ds:x1:LowPass1sM S14IDFE-XBPM:P1ds:x1:LowPass8sM           / S14IDFE-XBPM:P1ds:x1:LowPass8sM S14IDFE-XBPM:P1ds:x1:LowPass64sM          / S14IDFE-XBPM:P1ds:x1:LowPass64sM S14IDFE-XBPM:P1ds:x2:LowPass1sM           / S14IDFE-XBPM:P1ds:x2:LowPass1sM S14IDFE-XBPM:P1ds:x2:LowPass8sM           / S14IDFE-XBPM:P1ds:x2:LowPass8sM S14IDFE-XBPM:P1ds:x2:LowPass64sM          / S14IDFE-XBPM:P1ds:x2:LowPass64sM S14IDFE-XBPM:P1ds:y                       / S14IDFE-XBPM:P1ds:y S14IDFE-XBPM:P1ds:y:CalFactor1M           / S14IDFE-XBPM:P1ds:y:CalFactor1M S14IDFE-XBPM:P1ds:y:CalFactor2M           / S14IDFE-XBPM:P1ds:y:CalFactor2M S14IDFE-XBPM:P1ds:y:LowPass1sM            / S14IDFE-XBPM:P1ds:y:LowPass1sM S14IDFE-XBPM:P1ds:y:LowPass8sM            / S14IDFE-XBPM:P1ds:y:LowPass8sM S14IDFE-XBPM:P1ds:y:LowPass64sM           / S14IDFE-XBPM:P1ds:y:LowPass64sM S14IDFE-XBPM:P1ds:y:Offset1M              / S14IDFE-XBPM:P1ds:y:Offset1M S14IDFE-XBPM:P1ds:y:Offset2M              / S14IDFE-XBPM:P1ds:y:Offset2M S14IDFE-XBPM:P1ds:y:ResolutionM           / S14IDFE-XBPM:P1ds:y:ResolutionM S14IDFE-XBPM:P1ds:y:Resolution1sM         / S14IDFE-XBPM:P1ds:y:Resolution1sM S14IDFE-XBPM:P1ds:y:Resolution8sM         / S14IDFE-XBPM:P1ds:y:Resolution8sM S14IDFE-XBPM:P1ds:y:Resolution64sM        / S14IDFE-XBPM:P1ds:y:Resolution64sM S14IDFE-XBPM:P1ds:y:StdDevM               / S14IDFE-XBPM:P1ds:y:StdDevM S14IDFE-XBPM:P1ds:y:StdDev1sM             / S14IDFE-XBPM:P1ds:y:StdDev1sM S14IDFE-XBPM:P1ds:y:StdDev8sM             / S14IDFE-XBPM:P1ds:y:StdDev8sM S14IDFE-XBPM:P1ds:y:StdDev64sM            / S14IDFE-XBPM:P1ds:y:StdDev64sM S14IDFE-XBPM:P1ds:y1:LowPass1sM           / S14IDFE-XBPM:P1ds:y1:LowPass1sM S14IDFE-XBPM:P1ds:y1:LowPass8sM           / S14IDFE-XBPM:P1ds:y1:LowPass8sM S14IDFE-XBPM:P1ds:y1:LowPass64sM          / S14IDFE-XBPM:P1ds:y1:LowPass64sM S14IDFE-XBPM:P1ds:y2:LowPass1sM           / S14IDFE-XBPM:P1ds:y2:LowPass1sM S14IDFE-XBPM:P1ds:y2:LowPass8sM           / S14IDFE-XBPM:P1ds:y2:LowPass8sM S14IDFE-XBPM:P1ds:y2:LowPass64sM          / S14IDFE-XBPM:P1ds:y2:LowPass64sM S14IDFE-XBPM:P2ds:GapUsedC                / S14IDFE-XBPM:P2ds:GapUsedC S14IDFE-XBPM:P2ds:XCalM                   / S14IDFE-XBPM:P2ds:XCalM S14IDFE-XBPM:P2ds:YCalM                   / S14IDFE-XBPM:P2ds:YCalM S14IDFE-XBPM:P2ds:x:CalFactorM            / S14IDFE-XBPM:P2ds:x:CalFactorM S14IDFE-XBPM:P2ds:x:OffsetM               / S14IDFE-XBPM:P2ds:x:OffsetM S14IDFE-XBPM:P2ds:y:CalFactorM            / S14IDFE-XBPM:P2ds:y:CalFactorM S14IDFE-XBPM:P2ds:y:OffsetM               / S14IDFE-XBPM:P2ds:y:OffsetM S15IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S15IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S15IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S15IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S15IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S15IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S15IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S15IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S15IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S15IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S15IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S15IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S15IDFE-XBPM:CM1ds:PositionOffsetX        / S15IDFE-XBPM:CM1ds:PositionOffsetX S15IDFE-XBPM:CM1ds:PositionOffsetY        / S15IDFE-XBPM:CM1ds:PositionOffsetY S15IDFE-XBPM:CM1ds:PositionScaleX         / S15IDFE-XBPM:CM1ds:PositionScaleX S15IDFE-XBPM:CM1ds:PositionScaleY         / S15IDFE-XBPM:CM1ds:PositionScaleY S15IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S15IDFE-XBPM:CM1us:Current1:MeanValue_RBV S15IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S15IDFE-XBPM:CM1us:Current2:MeanValue_RBV S15IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S15IDFE-XBPM:CM1us:Current3:MeanValue_RBV S15IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S15IDFE-XBPM:CM1us:Current4:MeanValue_RBV S15IDFE-XBPM:CM1us:PosX:MeanValue_RBV     / S15IDFE-XBPM:CM1us:PosX:MeanValue_RBV S15IDFE-XBPM:CM1us:PosY:MeanValue_RBV     / S15IDFE-XBPM:CM1us:PosY:MeanValue_RBV S15IDFE-XBPM:CM1us:PositionOffsetX        / S15IDFE-XBPM:CM1us:PositionOffsetX S15IDFE-XBPM:CM1us:PositionOffsetY        / S15IDFE-XBPM:CM1us:PositionOffsetY S15IDFE-XBPM:CM1us:PositionScaleX         / S15IDFE-XBPM:CM1us:PositionScaleX S15IDFE-XBPM:CM1us:PositionScaleY         / S15IDFE-XBPM:CM1us:PositionScaleY S15IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S15IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S15IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S15IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S15IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S15IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S15IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S15IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S15IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S15IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S15IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S15IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S15IDFE-XBPM:CM2ds:PositionOffsetX        / S15IDFE-XBPM:CM2ds:PositionOffsetX S15IDFE-XBPM:CM2ds:PositionOffsetY        / S15IDFE-XBPM:CM2ds:PositionOffsetY S15IDFE-XBPM:CM2ds:PositionScaleX         / S15IDFE-XBPM:CM2ds:PositionScaleX S15IDFE-XBPM:CM2ds:PositionScaleY         / S15IDFE-XBPM:CM2ds:PositionScaleY S15IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S15IDFE-XBPM:CM2us:Current1:MeanValue_RBV S15IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S15IDFE-XBPM:CM2us:Current2:MeanValue_RBV S15IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S15IDFE-XBPM:CM2us:Current3:MeanValue_RBV S15IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S15IDFE-XBPM:CM2us:Current4:MeanValue_RBV S15IDFE-XBPM:CM2us:PosX:MeanValue_RBV     / S15IDFE-XBPM:CM2us:PosX:MeanValue_RBV S15IDFE-XBPM:CM2us:PosY:MeanValue_RBV     / S15IDFE-XBPM:CM2us:PosY:MeanValue_RBV S15IDFE-XBPM:CM2us:PositionOffsetX        / S15IDFE-XBPM:CM2us:PositionOffsetX S15IDFE-XBPM:CM2us:PositionOffsetY        / S15IDFE-XBPM:CM2us:PositionOffsetY S15IDFE-XBPM:CM2us:PositionScaleX         / S15IDFE-XBPM:CM2us:PositionScaleX S15IDFE-XBPM:CM2us:PositionScaleY         / S15IDFE-XBPM:CM2us:PositionScaleY S15IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S15IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S15IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S15IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S15IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S15IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S15IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S15IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S15IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S15IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S15IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S15IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S15IDFE-XBPM:CM3ds:PositionOffsetX        / S15IDFE-XBPM:CM3ds:PositionOffsetX S15IDFE-XBPM:CM3ds:PositionOffsetY        / S15IDFE-XBPM:CM3ds:PositionOffsetY S15IDFE-XBPM:CM3ds:PositionScaleX         / S15IDFE-XBPM:CM3ds:PositionScaleX S15IDFE-XBPM:CM3ds:PositionScaleY         / S15IDFE-XBPM:CM3ds:PositionScaleY S15IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S15IDFE-XBPM:CM3us:Current1:MeanValue_RBV S15IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S15IDFE-XBPM:CM3us:Current2:MeanValue_RBV S15IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S15IDFE-XBPM:CM3us:Current3:MeanValue_RBV S15IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S15IDFE-XBPM:CM3us:Current4:MeanValue_RBV S15IDFE-XBPM:CM3us:PosX:MeanValue_RBV     / S15IDFE-XBPM:CM3us:PosX:MeanValue_RBV S15IDFE-XBPM:CM3us:PosY:MeanValue_RBV     / S15IDFE-XBPM:CM3us:PosY:MeanValue_RBV S15IDFE-XBPM:CM3us:PositionOffsetX        / S15IDFE-XBPM:CM3us:PositionOffsetX S15IDFE-XBPM:CM3us:PositionOffsetY        / S15IDFE-XBPM:CM3us:PositionOffsetY S15IDFE-XBPM:CM3us:PositionScaleX         / S15IDFE-XBPM:CM3us:PositionScaleX S15IDFE-XBPM:CM3us:PositionScaleY         / S15IDFE-XBPM:CM3us:PositionScaleY S15IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S15IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S15IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S15IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S15IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S15IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S15IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S15IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S15IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S15IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S15IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S15IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S15IDFE-XBPM:CM4ds:PositionOffsetX        / S15IDFE-XBPM:CM4ds:PositionOffsetX S15IDFE-XBPM:CM4ds:PositionOffsetY        / S15IDFE-XBPM:CM4ds:PositionOffsetY S15IDFE-XBPM:CM4ds:PositionScaleX         / S15IDFE-XBPM:CM4ds:PositionScaleX S15IDFE-XBPM:CM4ds:PositionScaleY         / S15IDFE-XBPM:CM4ds:PositionScaleY S15IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S15IDFE-XBPM:CM4us:Current1:MeanValue_RBV S15IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S15IDFE-XBPM:CM4us:Current2:MeanValue_RBV S15IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S15IDFE-XBPM:CM4us:Current3:MeanValue_RBV S15IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S15IDFE-XBPM:CM4us:Current4:MeanValue_RBV S15IDFE-XBPM:CM4us:PosX:MeanValue_RBV     / S15IDFE-XBPM:CM4us:PosX:MeanValue_RBV S15IDFE-XBPM:CM4us:PosY:MeanValue_RBV     / S15IDFE-XBPM:CM4us:PosY:MeanValue_RBV S15IDFE-XBPM:CM4us:PositionOffsetX        / S15IDFE-XBPM:CM4us:PositionOffsetX S15IDFE-XBPM:CM4us:PositionOffsetY        / S15IDFE-XBPM:CM4us:PositionOffsetY S15IDFE-XBPM:CM4us:PositionScaleX         / S15IDFE-XBPM:CM4us:PositionScaleX S15IDFE-XBPM:CM4us:PositionScaleY         / S15IDFE-XBPM:CM4us:PositionScaleY S15IDFE-XBPM:P1ds:BMcUsedM                / S15IDFE-XBPM:P1ds:BMcUsedM S15IDFE-XBPM:P1ds:GapUsedC                / S15IDFE-XBPM:P1ds:GapUsedC S15IDFE-XBPM:P1ds:Wx1UsedM                / S15IDFE-XBPM:P1ds:Wx1UsedM S15IDFE-XBPM:P1ds:Wx2UsedM                / S15IDFE-XBPM:P1ds:Wx2UsedM S15IDFE-XBPM:P1ds:Wx3UsedM                / S15IDFE-XBPM:P1ds:Wx3UsedM S15IDFE-XBPM:P1ds:Wy1UsedM                / S15IDFE-XBPM:P1ds:Wy1UsedM S15IDFE-XBPM:P1ds:Wy2UsedM                / S15IDFE-XBPM:P1ds:Wy2UsedM S15IDFE-XBPM:P1ds:Wy3UsedM                / S15IDFE-XBPM:P1ds:Wy3UsedM S15IDFE-XBPM:P1ds:x                       / S15IDFE-XBPM:P1ds:x S15IDFE-XBPM:P1ds:x:CalFactor1M           / S15IDFE-XBPM:P1ds:x:CalFactor1M S15IDFE-XBPM:P1ds:x:CalFactor2M           / S15IDFE-XBPM:P1ds:x:CalFactor2M S15IDFE-XBPM:P1ds:x:LowPass1sM            / S15IDFE-XBPM:P1ds:x:LowPass1sM S15IDFE-XBPM:P1ds:x:LowPass8sM            / S15IDFE-XBPM:P1ds:x:LowPass8sM S15IDFE-XBPM:P1ds:x:LowPass64sM           / S15IDFE-XBPM:P1ds:x:LowPass64sM S15IDFE-XBPM:P1ds:x:Offset1M              / S15IDFE-XBPM:P1ds:x:Offset1M S15IDFE-XBPM:P1ds:x:Offset2M              / S15IDFE-XBPM:P1ds:x:Offset2M S15IDFE-XBPM:P1ds:x:ResolutionM           / S15IDFE-XBPM:P1ds:x:ResolutionM S15IDFE-XBPM:P1ds:x:Resolution1sM         / S15IDFE-XBPM:P1ds:x:Resolution1sM S15IDFE-XBPM:P1ds:x:Resolution8sM         / S15IDFE-XBPM:P1ds:x:Resolution8sM S15IDFE-XBPM:P1ds:x:Resolution64sM        / S15IDFE-XBPM:P1ds:x:Resolution64sM S15IDFE-XBPM:P1ds:x:StdDevM               / S15IDFE-XBPM:P1ds:x:StdDevM S15IDFE-XBPM:P1ds:x:StdDev1sM             / S15IDFE-XBPM:P1ds:x:StdDev1sM S15IDFE-XBPM:P1ds:x:StdDev8sM             / S15IDFE-XBPM:P1ds:x:StdDev8sM S15IDFE-XBPM:P1ds:x:StdDev64sM            / S15IDFE-XBPM:P1ds:x:StdDev64sM S15IDFE-XBPM:P1ds:x1:LowPass1sM           / S15IDFE-XBPM:P1ds:x1:LowPass1sM S15IDFE-XBPM:P1ds:x1:LowPass8sM           / S15IDFE-XBPM:P1ds:x1:LowPass8sM S15IDFE-XBPM:P1ds:x1:LowPass64sM          / S15IDFE-XBPM:P1ds:x1:LowPass64sM S15IDFE-XBPM:P1ds:x2:LowPass1sM           / S15IDFE-XBPM:P1ds:x2:LowPass1sM S15IDFE-XBPM:P1ds:x2:LowPass8sM           / S15IDFE-XBPM:P1ds:x2:LowPass8sM S15IDFE-XBPM:P1ds:x2:LowPass64sM          / S15IDFE-XBPM:P1ds:x2:LowPass64sM S15IDFE-XBPM:P1ds:y                       / S15IDFE-XBPM:P1ds:y S15IDFE-XBPM:P1ds:y:CalFactor1M           / S15IDFE-XBPM:P1ds:y:CalFactor1M S15IDFE-XBPM:P1ds:y:CalFactor2M           / S15IDFE-XBPM:P1ds:y:CalFactor2M S15IDFE-XBPM:P1ds:y:LowPass1sM            / S15IDFE-XBPM:P1ds:y:LowPass1sM S15IDFE-XBPM:P1ds:y:LowPass8sM            / S15IDFE-XBPM:P1ds:y:LowPass8sM S15IDFE-XBPM:P1ds:y:LowPass64sM           / S15IDFE-XBPM:P1ds:y:LowPass64sM S15IDFE-XBPM:P1ds:y:Offset1M              / S15IDFE-XBPM:P1ds:y:Offset1M S15IDFE-XBPM:P1ds:y:Offset2M              / S15IDFE-XBPM:P1ds:y:Offset2M S15IDFE-XBPM:P1ds:y:ResolutionM           / S15IDFE-XBPM:P1ds:y:ResolutionM S15IDFE-XBPM:P1ds:y:Resolution1sM         / S15IDFE-XBPM:P1ds:y:Resolution1sM S15IDFE-XBPM:P1ds:y:Resolution8sM         / S15IDFE-XBPM:P1ds:y:Resolution8sM S15IDFE-XBPM:P1ds:y:Resolution64sM        / S15IDFE-XBPM:P1ds:y:Resolution64sM S15IDFE-XBPM:P1ds:y:StdDevM               / S15IDFE-XBPM:P1ds:y:StdDevM S15IDFE-XBPM:P1ds:y:StdDev1sM             / S15IDFE-XBPM:P1ds:y:StdDev1sM S15IDFE-XBPM:P1ds:y:StdDev8sM             / S15IDFE-XBPM:P1ds:y:StdDev8sM S15IDFE-XBPM:P1ds:y:StdDev64sM            / S15IDFE-XBPM:P1ds:y:StdDev64sM S15IDFE-XBPM:P1ds:y1:LowPass1sM           / S15IDFE-XBPM:P1ds:y1:LowPass1sM S15IDFE-XBPM:P1ds:y1:LowPass8sM           / S15IDFE-XBPM:P1ds:y1:LowPass8sM S15IDFE-XBPM:P1ds:y1:LowPass64sM          / S15IDFE-XBPM:P1ds:y1:LowPass64sM S15IDFE-XBPM:P1ds:y2:LowPass1sM           / S15IDFE-XBPM:P1ds:y2:LowPass1sM S15IDFE-XBPM:P1ds:y2:LowPass8sM           / S15IDFE-XBPM:P1ds:y2:LowPass8sM S15IDFE-XBPM:P1ds:y2:LowPass64sM          / S15IDFE-XBPM:P1ds:y2:LowPass64sM S15IDFE-XBPM:P1us:BMcUsedM                / S15IDFE-XBPM:P1us:BMcUsedM S15IDFE-XBPM:P1us:GapUsedC                / S15IDFE-XBPM:P1us:GapUsedC S15IDFE-XBPM:P1us:Wx1UsedM                / S15IDFE-XBPM:P1us:Wx1UsedM S15IDFE-XBPM:P1us:Wx2UsedM                / S15IDFE-XBPM:P1us:Wx2UsedM S15IDFE-XBPM:P1us:Wx3UsedM                / S15IDFE-XBPM:P1us:Wx3UsedM S15IDFE-XBPM:P1us:Wy1UsedM                / S15IDFE-XBPM:P1us:Wy1UsedM S15IDFE-XBPM:P1us:Wy2UsedM                / S15IDFE-XBPM:P1us:Wy2UsedM S15IDFE-XBPM:P1us:Wy3UsedM                / S15IDFE-XBPM:P1us:Wy3UsedM S15IDFE-XBPM:P1us:x                       / S15IDFE-XBPM:P1us:x S15IDFE-XBPM:P1us:x:CalFactor1M           / S15IDFE-XBPM:P1us:x:CalFactor1M S15IDFE-XBPM:P1us:x:CalFactor2M           / S15IDFE-XBPM:P1us:x:CalFactor2M S15IDFE-XBPM:P1us:x:LowPass1sM            / S15IDFE-XBPM:P1us:x:LowPass1sM S15IDFE-XBPM:P1us:x:LowPass8sM            / S15IDFE-XBPM:P1us:x:LowPass8sM S15IDFE-XBPM:P1us:x:LowPass64sM           / S15IDFE-XBPM:P1us:x:LowPass64sM S15IDFE-XBPM:P1us:x:Offset1M              / S15IDFE-XBPM:P1us:x:Offset1M S15IDFE-XBPM:P1us:x:Offset2M              / S15IDFE-XBPM:P1us:x:Offset2M S15IDFE-XBPM:P1us:x:ResolutionM           / S15IDFE-XBPM:P1us:x:ResolutionM S15IDFE-XBPM:P1us:x:Resolution1sM         / S15IDFE-XBPM:P1us:x:Resolution1sM S15IDFE-XBPM:P1us:x:Resolution8sM         / S15IDFE-XBPM:P1us:x:Resolution8sM S15IDFE-XBPM:P1us:x:Resolution64sM        / S15IDFE-XBPM:P1us:x:Resolution64sM S15IDFE-XBPM:P1us:x:StdDevM               / S15IDFE-XBPM:P1us:x:StdDevM S15IDFE-XBPM:P1us:x:StdDev1sM             / S15IDFE-XBPM:P1us:x:StdDev1sM S15IDFE-XBPM:P1us:x:StdDev8sM             / S15IDFE-XBPM:P1us:x:StdDev8sM S15IDFE-XBPM:P1us:x:StdDev64sM            / S15IDFE-XBPM:P1us:x:StdDev64sM S15IDFE-XBPM:P1us:x1:LowPass1sM           / S15IDFE-XBPM:P1us:x1:LowPass1sM S15IDFE-XBPM:P1us:x1:LowPass8sM           / S15IDFE-XBPM:P1us:x1:LowPass8sM S15IDFE-XBPM:P1us:x1:LowPass64sM          / S15IDFE-XBPM:P1us:x1:LowPass64sM S15IDFE-XBPM:P1us:x2:LowPass1sM           / S15IDFE-XBPM:P1us:x2:LowPass1sM S15IDFE-XBPM:P1us:x2:LowPass8sM           / S15IDFE-XBPM:P1us:x2:LowPass8sM S15IDFE-XBPM:P1us:x2:LowPass64sM          / S15IDFE-XBPM:P1us:x2:LowPass64sM S15IDFE-XBPM:P1us:y                       / S15IDFE-XBPM:P1us:y S15IDFE-XBPM:P1us:y:CalFactor1M           / S15IDFE-XBPM:P1us:y:CalFactor1M S15IDFE-XBPM:P1us:y:CalFactor2M           / S15IDFE-XBPM:P1us:y:CalFactor2M S15IDFE-XBPM:P1us:y:LowPass1sM            / S15IDFE-XBPM:P1us:y:LowPass1sM S15IDFE-XBPM:P1us:y:LowPass8sM            / S15IDFE-XBPM:P1us:y:LowPass8sM S15IDFE-XBPM:P1us:y:LowPass64sM           / S15IDFE-XBPM:P1us:y:LowPass64sM S15IDFE-XBPM:P1us:y:Offset1M              / S15IDFE-XBPM:P1us:y:Offset1M S15IDFE-XBPM:P1us:y:Offset2M              / S15IDFE-XBPM:P1us:y:Offset2M S15IDFE-XBPM:P1us:y:ResolutionM           / S15IDFE-XBPM:P1us:y:ResolutionM S15IDFE-XBPM:P1us:y:Resolution1sM         / S15IDFE-XBPM:P1us:y:Resolution1sM S15IDFE-XBPM:P1us:y:Resolution8sM         / S15IDFE-XBPM:P1us:y:Resolution8sM S15IDFE-XBPM:P1us:y:Resolution64sM        / S15IDFE-XBPM:P1us:y:Resolution64sM S15IDFE-XBPM:P1us:y:StdDevM               / S15IDFE-XBPM:P1us:y:StdDevM S15IDFE-XBPM:P1us:y:StdDev1sM             / S15IDFE-XBPM:P1us:y:StdDev1sM S15IDFE-XBPM:P1us:y:StdDev8sM             / S15IDFE-XBPM:P1us:y:StdDev8sM S15IDFE-XBPM:P1us:y:StdDev64sM            / S15IDFE-XBPM:P1us:y:StdDev64sM S15IDFE-XBPM:P1us:y1:LowPass1sM           / S15IDFE-XBPM:P1us:y1:LowPass1sM S15IDFE-XBPM:P1us:y1:LowPass8sM           / S15IDFE-XBPM:P1us:y1:LowPass8sM S15IDFE-XBPM:P1us:y1:LowPass64sM          / S15IDFE-XBPM:P1us:y1:LowPass64sM S15IDFE-XBPM:P1us:y2:LowPass1sM           / S15IDFE-XBPM:P1us:y2:LowPass1sM S15IDFE-XBPM:P1us:y2:LowPass8sM           / S15IDFE-XBPM:P1us:y2:LowPass8sM S15IDFE-XBPM:P1us:y2:LowPass64sM          / S15IDFE-XBPM:P1us:y2:LowPass64sM S15IDFE-XBPM:P2ds:GapUsedC                / S15IDFE-XBPM:P2ds:GapUsedC S15IDFE-XBPM:P2ds:XCalM                   / S15IDFE-XBPM:P2ds:XCalM S15IDFE-XBPM:P2ds:YCalM                   / S15IDFE-XBPM:P2ds:YCalM S15IDFE-XBPM:P2ds:x:CalFactorM            / S15IDFE-XBPM:P2ds:x:CalFactorM S15IDFE-XBPM:P2ds:x:OffsetM               / S15IDFE-XBPM:P2ds:x:OffsetM S15IDFE-XBPM:P2ds:y:CalFactorM            / S15IDFE-XBPM:P2ds:y:CalFactorM S15IDFE-XBPM:P2ds:y:OffsetM               / S15IDFE-XBPM:P2ds:y:OffsetM S15IDFE-XBPM:P2us:GapUsedC                / S15IDFE-XBPM:P2us:GapUsedC S15IDFE-XBPM:P2us:XCalM                   / S15IDFE-XBPM:P2us:XCalM S15IDFE-XBPM:P2us:YCalM                   / S15IDFE-XBPM:P2us:YCalM S15IDFE-XBPM:P2us:x:CalFactorM            / S15IDFE-XBPM:P2us:x:CalFactorM S15IDFE-XBPM:P2us:x:OffsetM               / S15IDFE-XBPM:P2us:x:OffsetM S15IDFE-XBPM:P2us:y:CalFactorM            / S15IDFE-XBPM:P2us:y:CalFactorM S15IDFE-XBPM:P2us:y:OffsetM               / S15IDFE-XBPM:P2us:y:OffsetM S16BMFE-XBPM:P1:AM                        / S16BMFE-XBPM:P1:AM S16BMFE-XBPM:P1:BM                        / S16BMFE-XBPM:P1:BM S16BMFE-XBPM:P1:y                         / S16BMFE-XBPM:P1:y S16BMFE-XBPM:P1:y:LowPass1sM              / S16BMFE-XBPM:P1:y:LowPass1sM S16BMFE-XBPM:P1:y:LowPass8sM              / S16BMFE-XBPM:P1:y:LowPass8sM S16BMFE-XBPM:P1:y:LowPass64sM             / S16BMFE-XBPM:P1:y:LowPass64sM S16BMFE-XBPM:P1:y:StdDevM                 / S16BMFE-XBPM:P1:y:StdDevM S16BMFE-XBPM:P1:y:StdDev1sM               / S16BMFE-XBPM:P1:y:StdDev1sM S16BMFE-XBPM:P1:y:StdDev8sM               / S16BMFE-XBPM:P1:y:StdDev8sM S16BMFE-XBPM:P1:y:StdDev64sM              / S16BMFE-XBPM:P1:y:StdDev64sM S16BMFE-XBPM:P2:AM                        / S16BMFE-XBPM:P2:AM S16BMFE-XBPM:P2:BM                        / S16BMFE-XBPM:P2:BM S16BMFE-XBPM:P2:y                         / S16BMFE-XBPM:P2:y S16BMFE-XBPM:P2:y:LowPass1sM              / S16BMFE-XBPM:P2:y:LowPass1sM S16BMFE-XBPM:P2:y:LowPass8sM              / S16BMFE-XBPM:P2:y:LowPass8sM S16BMFE-XBPM:P2:y:LowPass64sM             / S16BMFE-XBPM:P2:y:LowPass64sM S16BMFE-XBPM:P2:y:StdDevM                 / S16BMFE-XBPM:P2:y:StdDevM S16BMFE-XBPM:P2:y:StdDev1sM               / S16BMFE-XBPM:P2:y:StdDev1sM S16BMFE-XBPM:P2:y:StdDev8sM               / S16BMFE-XBPM:P2:y:StdDev8sM S16BMFE-XBPM:P2:y:StdDev64sM              / S16BMFE-XBPM:P2:y:StdDev64sM S16IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S16IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S16IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S16IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S16IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S16IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S16IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S16IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S16IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S16IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S16IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S16IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S16IDFE-XBPM:CM1ds:PositionOffsetX        / S16IDFE-XBPM:CM1ds:PositionOffsetX S16IDFE-XBPM:CM1ds:PositionOffsetY        / S16IDFE-XBPM:CM1ds:PositionOffsetY S16IDFE-XBPM:CM1ds:PositionScaleX         / S16IDFE-XBPM:CM1ds:PositionScaleX S16IDFE-XBPM:CM1ds:PositionScaleY         / S16IDFE-XBPM:CM1ds:PositionScaleY S16IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S16IDFE-XBPM:CM1us:Current1:MeanValue_RBV S16IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S16IDFE-XBPM:CM1us:Current2:MeanValue_RBV S16IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S16IDFE-XBPM:CM1us:Current3:MeanValue_RBV S16IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S16IDFE-XBPM:CM1us:Current4:MeanValue_RBV S16IDFE-XBPM:CM1us:PosX:MeanValue_RBV     / S16IDFE-XBPM:CM1us:PosX:MeanValue_RBV S16IDFE-XBPM:CM1us:PosY:MeanValue_RBV     / S16IDFE-XBPM:CM1us:PosY:MeanValue_RBV S16IDFE-XBPM:CM1us:PositionOffsetX        / S16IDFE-XBPM:CM1us:PositionOffsetX S16IDFE-XBPM:CM1us:PositionOffsetY        / S16IDFE-XBPM:CM1us:PositionOffsetY S16IDFE-XBPM:CM1us:PositionScaleX         / S16IDFE-XBPM:CM1us:PositionScaleX S16IDFE-XBPM:CM1us:PositionScaleY         / S16IDFE-XBPM:CM1us:PositionScaleY S16IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S16IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S16IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S16IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S16IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S16IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S16IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S16IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S16IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S16IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S16IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S16IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S16IDFE-XBPM:CM2ds:PositionOffsetX        / S16IDFE-XBPM:CM2ds:PositionOffsetX S16IDFE-XBPM:CM2ds:PositionOffsetY        / S16IDFE-XBPM:CM2ds:PositionOffsetY S16IDFE-XBPM:CM2ds:PositionScaleX         / S16IDFE-XBPM:CM2ds:PositionScaleX S16IDFE-XBPM:CM2ds:PositionScaleY         / S16IDFE-XBPM:CM2ds:PositionScaleY S16IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S16IDFE-XBPM:CM2us:Current1:MeanValue_RBV S16IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S16IDFE-XBPM:CM2us:Current2:MeanValue_RBV S16IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S16IDFE-XBPM:CM2us:Current3:MeanValue_RBV S16IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S16IDFE-XBPM:CM2us:Current4:MeanValue_RBV S16IDFE-XBPM:CM2us:PosX:MeanValue_RBV     / S16IDFE-XBPM:CM2us:PosX:MeanValue_RBV S16IDFE-XBPM:CM2us:PosY:MeanValue_RBV     / S16IDFE-XBPM:CM2us:PosY:MeanValue_RBV S16IDFE-XBPM:CM2us:PositionOffsetX        / S16IDFE-XBPM:CM2us:PositionOffsetX S16IDFE-XBPM:CM2us:PositionOffsetY        / S16IDFE-XBPM:CM2us:PositionOffsetY S16IDFE-XBPM:CM2us:PositionScaleX         / S16IDFE-XBPM:CM2us:PositionScaleX S16IDFE-XBPM:CM2us:PositionScaleY         / S16IDFE-XBPM:CM2us:PositionScaleY S16IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S16IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S16IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S16IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S16IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S16IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S16IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S16IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S16IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S16IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S16IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S16IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S16IDFE-XBPM:CM3ds:PositionOffsetX        / S16IDFE-XBPM:CM3ds:PositionOffsetX S16IDFE-XBPM:CM3ds:PositionOffsetY        / S16IDFE-XBPM:CM3ds:PositionOffsetY S16IDFE-XBPM:CM3ds:PositionScaleX         / S16IDFE-XBPM:CM3ds:PositionScaleX S16IDFE-XBPM:CM3ds:PositionScaleY         / S16IDFE-XBPM:CM3ds:PositionScaleY S16IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S16IDFE-XBPM:CM3us:Current1:MeanValue_RBV S16IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S16IDFE-XBPM:CM3us:Current2:MeanValue_RBV S16IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S16IDFE-XBPM:CM3us:Current3:MeanValue_RBV S16IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S16IDFE-XBPM:CM3us:Current4:MeanValue_RBV S16IDFE-XBPM:CM3us:PosX:MeanValue_RBV     / S16IDFE-XBPM:CM3us:PosX:MeanValue_RBV S16IDFE-XBPM:CM3us:PosY:MeanValue_RBV     / S16IDFE-XBPM:CM3us:PosY:MeanValue_RBV S16IDFE-XBPM:CM3us:PositionOffsetX        / S16IDFE-XBPM:CM3us:PositionOffsetX S16IDFE-XBPM:CM3us:PositionOffsetY        / S16IDFE-XBPM:CM3us:PositionOffsetY S16IDFE-XBPM:CM3us:PositionScaleX         / S16IDFE-XBPM:CM3us:PositionScaleX S16IDFE-XBPM:CM3us:PositionScaleY         / S16IDFE-XBPM:CM3us:PositionScaleY S16IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S16IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S16IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S16IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S16IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S16IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S16IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S16IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S16IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S16IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S16IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S16IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S16IDFE-XBPM:CM4ds:PositionOffsetX        / S16IDFE-XBPM:CM4ds:PositionOffsetX S16IDFE-XBPM:CM4ds:PositionOffsetY        / S16IDFE-XBPM:CM4ds:PositionOffsetY S16IDFE-XBPM:CM4ds:PositionScaleX         / S16IDFE-XBPM:CM4ds:PositionScaleX S16IDFE-XBPM:CM4ds:PositionScaleY         / S16IDFE-XBPM:CM4ds:PositionScaleY S16IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S16IDFE-XBPM:CM4us:Current1:MeanValue_RBV S16IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S16IDFE-XBPM:CM4us:Current2:MeanValue_RBV S16IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S16IDFE-XBPM:CM4us:Current3:MeanValue_RBV S16IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S16IDFE-XBPM:CM4us:Current4:MeanValue_RBV S16IDFE-XBPM:CM4us:PosX:MeanValue_RBV     / S16IDFE-XBPM:CM4us:PosX:MeanValue_RBV S16IDFE-XBPM:CM4us:PosY:MeanValue_RBV     / S16IDFE-XBPM:CM4us:PosY:MeanValue_RBV S16IDFE-XBPM:CM4us:PositionOffsetX        / S16IDFE-XBPM:CM4us:PositionOffsetX S16IDFE-XBPM:CM4us:PositionOffsetY        / S16IDFE-XBPM:CM4us:PositionOffsetY S16IDFE-XBPM:CM4us:PositionScaleX         / S16IDFE-XBPM:CM4us:PositionScaleX S16IDFE-XBPM:CM4us:PositionScaleY         / S16IDFE-XBPM:CM4us:PositionScaleY S16IDFE-XBPM:P1ds:BMcUsedM                / S16IDFE-XBPM:P1ds:BMcUsedM S16IDFE-XBPM:P1ds:GapUsedC                / S16IDFE-XBPM:P1ds:GapUsedC S16IDFE-XBPM:P1ds:Wx1UsedM                / S16IDFE-XBPM:P1ds:Wx1UsedM S16IDFE-XBPM:P1ds:Wx2UsedM                / S16IDFE-XBPM:P1ds:Wx2UsedM S16IDFE-XBPM:P1ds:Wx3UsedM                / S16IDFE-XBPM:P1ds:Wx3UsedM S16IDFE-XBPM:P1ds:Wy1UsedM                / S16IDFE-XBPM:P1ds:Wy1UsedM S16IDFE-XBPM:P1ds:Wy2UsedM                / S16IDFE-XBPM:P1ds:Wy2UsedM S16IDFE-XBPM:P1ds:Wy3UsedM                / S16IDFE-XBPM:P1ds:Wy3UsedM S16IDFE-XBPM:P1ds:x                       / S16IDFE-XBPM:P1ds:x S16IDFE-XBPM:P1ds:x:CalFactor1M           / S16IDFE-XBPM:P1ds:x:CalFactor1M S16IDFE-XBPM:P1ds:x:CalFactor2M           / S16IDFE-XBPM:P1ds:x:CalFactor2M S16IDFE-XBPM:P1ds:x:LowPass1sM            / S16IDFE-XBPM:P1ds:x:LowPass1sM S16IDFE-XBPM:P1ds:x:LowPass8sM            / S16IDFE-XBPM:P1ds:x:LowPass8sM S16IDFE-XBPM:P1ds:x:LowPass64sM           / S16IDFE-XBPM:P1ds:x:LowPass64sM S16IDFE-XBPM:P1ds:x:Offset1M              / S16IDFE-XBPM:P1ds:x:Offset1M S16IDFE-XBPM:P1ds:x:Offset2M              / S16IDFE-XBPM:P1ds:x:Offset2M S16IDFE-XBPM:P1ds:x:ResolutionM           / S16IDFE-XBPM:P1ds:x:ResolutionM S16IDFE-XBPM:P1ds:x:Resolution1sM         / S16IDFE-XBPM:P1ds:x:Resolution1sM S16IDFE-XBPM:P1ds:x:Resolution8sM         / S16IDFE-XBPM:P1ds:x:Resolution8sM S16IDFE-XBPM:P1ds:x:Resolution64sM        / S16IDFE-XBPM:P1ds:x:Resolution64sM S16IDFE-XBPM:P1ds:x:StdDevM               / S16IDFE-XBPM:P1ds:x:StdDevM S16IDFE-XBPM:P1ds:x:StdDev1sM             / S16IDFE-XBPM:P1ds:x:StdDev1sM S16IDFE-XBPM:P1ds:x:StdDev8sM             / S16IDFE-XBPM:P1ds:x:StdDev8sM S16IDFE-XBPM:P1ds:x:StdDev64sM            / S16IDFE-XBPM:P1ds:x:StdDev64sM S16IDFE-XBPM:P1ds:x1:LowPass1sM           / S16IDFE-XBPM:P1ds:x1:LowPass1sM S16IDFE-XBPM:P1ds:x1:LowPass8sM           / S16IDFE-XBPM:P1ds:x1:LowPass8sM S16IDFE-XBPM:P1ds:x1:LowPass64sM          / S16IDFE-XBPM:P1ds:x1:LowPass64sM S16IDFE-XBPM:P1ds:x2:LowPass1sM           / S16IDFE-XBPM:P1ds:x2:LowPass1sM S16IDFE-XBPM:P1ds:x2:LowPass8sM           / S16IDFE-XBPM:P1ds:x2:LowPass8sM S16IDFE-XBPM:P1ds:x2:LowPass64sM          / S16IDFE-XBPM:P1ds:x2:LowPass64sM S16IDFE-XBPM:P1ds:y                       / S16IDFE-XBPM:P1ds:y S16IDFE-XBPM:P1ds:y:CalFactor1M           / S16IDFE-XBPM:P1ds:y:CalFactor1M S16IDFE-XBPM:P1ds:y:CalFactor2M           / S16IDFE-XBPM:P1ds:y:CalFactor2M S16IDFE-XBPM:P1ds:y:LowPass1sM            / S16IDFE-XBPM:P1ds:y:LowPass1sM S16IDFE-XBPM:P1ds:y:LowPass8sM            / S16IDFE-XBPM:P1ds:y:LowPass8sM S16IDFE-XBPM:P1ds:y:LowPass64sM           / S16IDFE-XBPM:P1ds:y:LowPass64sM S16IDFE-XBPM:P1ds:y:Offset1M              / S16IDFE-XBPM:P1ds:y:Offset1M S16IDFE-XBPM:P1ds:y:Offset2M              / S16IDFE-XBPM:P1ds:y:Offset2M S16IDFE-XBPM:P1ds:y:ResolutionM           / S16IDFE-XBPM:P1ds:y:ResolutionM S16IDFE-XBPM:P1ds:y:Resolution1sM         / S16IDFE-XBPM:P1ds:y:Resolution1sM S16IDFE-XBPM:P1ds:y:Resolution8sM         / S16IDFE-XBPM:P1ds:y:Resolution8sM S16IDFE-XBPM:P1ds:y:Resolution64sM        / S16IDFE-XBPM:P1ds:y:Resolution64sM S16IDFE-XBPM:P1ds:y:StdDevM               / S16IDFE-XBPM:P1ds:y:StdDevM S16IDFE-XBPM:P1ds:y:StdDev1sM             / S16IDFE-XBPM:P1ds:y:StdDev1sM S16IDFE-XBPM:P1ds:y:StdDev8sM             / S16IDFE-XBPM:P1ds:y:StdDev8sM S16IDFE-XBPM:P1ds:y:StdDev64sM            / S16IDFE-XBPM:P1ds:y:StdDev64sM S16IDFE-XBPM:P1ds:y1:LowPass1sM           / S16IDFE-XBPM:P1ds:y1:LowPass1sM S16IDFE-XBPM:P1ds:y1:LowPass8sM           / S16IDFE-XBPM:P1ds:y1:LowPass8sM S16IDFE-XBPM:P1ds:y1:LowPass64sM          / S16IDFE-XBPM:P1ds:y1:LowPass64sM S16IDFE-XBPM:P1ds:y2:LowPass1sM           / S16IDFE-XBPM:P1ds:y2:LowPass1sM S16IDFE-XBPM:P1ds:y2:LowPass8sM           / S16IDFE-XBPM:P1ds:y2:LowPass8sM S16IDFE-XBPM:P1ds:y2:LowPass64sM          / S16IDFE-XBPM:P1ds:y2:LowPass64sM S16IDFE-XBPM:P1us:BMcUsedM                / S16IDFE-XBPM:P1us:BMcUsedM S16IDFE-XBPM:P1us:GapUsedC                / S16IDFE-XBPM:P1us:GapUsedC S16IDFE-XBPM:P1us:Wx1UsedM                / S16IDFE-XBPM:P1us:Wx1UsedM S16IDFE-XBPM:P1us:Wx2UsedM                / S16IDFE-XBPM:P1us:Wx2UsedM S16IDFE-XBPM:P1us:Wx3UsedM                / S16IDFE-XBPM:P1us:Wx3UsedM S16IDFE-XBPM:P1us:Wy1UsedM                / S16IDFE-XBPM:P1us:Wy1UsedM S16IDFE-XBPM:P1us:Wy2UsedM                / S16IDFE-XBPM:P1us:Wy2UsedM S16IDFE-XBPM:P1us:Wy3UsedM                / S16IDFE-XBPM:P1us:Wy3UsedM S16IDFE-XBPM:P1us:x                       / S16IDFE-XBPM:P1us:x S16IDFE-XBPM:P1us:x:CalFactor1M           / S16IDFE-XBPM:P1us:x:CalFactor1M S16IDFE-XBPM:P1us:x:CalFactor2M           / S16IDFE-XBPM:P1us:x:CalFactor2M S16IDFE-XBPM:P1us:x:LowPass1sM            / S16IDFE-XBPM:P1us:x:LowPass1sM S16IDFE-XBPM:P1us:x:LowPass8sM            / S16IDFE-XBPM:P1us:x:LowPass8sM S16IDFE-XBPM:P1us:x:LowPass64sM           / S16IDFE-XBPM:P1us:x:LowPass64sM S16IDFE-XBPM:P1us:x:Offset1M              / S16IDFE-XBPM:P1us:x:Offset1M S16IDFE-XBPM:P1us:x:Offset2M              / S16IDFE-XBPM:P1us:x:Offset2M S16IDFE-XBPM:P1us:x:ResolutionM           / S16IDFE-XBPM:P1us:x:ResolutionM S16IDFE-XBPM:P1us:x:Resolution1sM         / S16IDFE-XBPM:P1us:x:Resolution1sM S16IDFE-XBPM:P1us:x:Resolution8sM         / S16IDFE-XBPM:P1us:x:Resolution8sM S16IDFE-XBPM:P1us:x:Resolution64sM        / S16IDFE-XBPM:P1us:x:Resolution64sM S16IDFE-XBPM:P1us:x:StdDevM               / S16IDFE-XBPM:P1us:x:StdDevM S16IDFE-XBPM:P1us:x:StdDev1sM             / S16IDFE-XBPM:P1us:x:StdDev1sM S16IDFE-XBPM:P1us:x:StdDev8sM             / S16IDFE-XBPM:P1us:x:StdDev8sM S16IDFE-XBPM:P1us:x:StdDev64sM            / S16IDFE-XBPM:P1us:x:StdDev64sM S16IDFE-XBPM:P1us:x1:LowPass1sM           / S16IDFE-XBPM:P1us:x1:LowPass1sM S16IDFE-XBPM:P1us:x1:LowPass8sM           / S16IDFE-XBPM:P1us:x1:LowPass8sM S16IDFE-XBPM:P1us:x1:LowPass64sM          / S16IDFE-XBPM:P1us:x1:LowPass64sM S16IDFE-XBPM:P1us:x2:LowPass1sM           / S16IDFE-XBPM:P1us:x2:LowPass1sM S16IDFE-XBPM:P1us:x2:LowPass8sM           / S16IDFE-XBPM:P1us:x2:LowPass8sM S16IDFE-XBPM:P1us:x2:LowPass64sM          / S16IDFE-XBPM:P1us:x2:LowPass64sM S16IDFE-XBPM:P1us:y                       / S16IDFE-XBPM:P1us:y S16IDFE-XBPM:P1us:y:CalFactor1M           / S16IDFE-XBPM:P1us:y:CalFactor1M S16IDFE-XBPM:P1us:y:CalFactor2M           / S16IDFE-XBPM:P1us:y:CalFactor2M S16IDFE-XBPM:P1us:y:LowPass1sM            / S16IDFE-XBPM:P1us:y:LowPass1sM S16IDFE-XBPM:P1us:y:LowPass8sM            / S16IDFE-XBPM:P1us:y:LowPass8sM S16IDFE-XBPM:P1us:y:LowPass64sM           / S16IDFE-XBPM:P1us:y:LowPass64sM S16IDFE-XBPM:P1us:y:Offset1M              / S16IDFE-XBPM:P1us:y:Offset1M S16IDFE-XBPM:P1us:y:Offset2M              / S16IDFE-XBPM:P1us:y:Offset2M S16IDFE-XBPM:P1us:y:ResolutionM           / S16IDFE-XBPM:P1us:y:ResolutionM S16IDFE-XBPM:P1us:y:Resolution1sM         / S16IDFE-XBPM:P1us:y:Resolution1sM S16IDFE-XBPM:P1us:y:Resolution8sM         / S16IDFE-XBPM:P1us:y:Resolution8sM S16IDFE-XBPM:P1us:y:Resolution64sM        / S16IDFE-XBPM:P1us:y:Resolution64sM S16IDFE-XBPM:P1us:y:StdDevM               / S16IDFE-XBPM:P1us:y:StdDevM S16IDFE-XBPM:P1us:y:StdDev1sM             / S16IDFE-XBPM:P1us:y:StdDev1sM S16IDFE-XBPM:P1us:y:StdDev8sM             / S16IDFE-XBPM:P1us:y:StdDev8sM S16IDFE-XBPM:P1us:y:StdDev64sM            / S16IDFE-XBPM:P1us:y:StdDev64sM S16IDFE-XBPM:P1us:y1:LowPass1sM           / S16IDFE-XBPM:P1us:y1:LowPass1sM S16IDFE-XBPM:P1us:y1:LowPass8sM           / S16IDFE-XBPM:P1us:y1:LowPass8sM S16IDFE-XBPM:P1us:y1:LowPass64sM          / S16IDFE-XBPM:P1us:y1:LowPass64sM S16IDFE-XBPM:P1us:y2:LowPass1sM           / S16IDFE-XBPM:P1us:y2:LowPass1sM S16IDFE-XBPM:P1us:y2:LowPass8sM           / S16IDFE-XBPM:P1us:y2:LowPass8sM S16IDFE-XBPM:P1us:y2:LowPass64sM          / S16IDFE-XBPM:P1us:y2:LowPass64sM S16IDFE-XBPM:P2ds:GapUsedC                / S16IDFE-XBPM:P2ds:GapUsedC S16IDFE-XBPM:P2ds:XCalM                   / S16IDFE-XBPM:P2ds:XCalM S16IDFE-XBPM:P2ds:YCalM                   / S16IDFE-XBPM:P2ds:YCalM S16IDFE-XBPM:P2ds:x:CalFactorM            / S16IDFE-XBPM:P2ds:x:CalFactorM S16IDFE-XBPM:P2ds:x:OffsetM               / S16IDFE-XBPM:P2ds:x:OffsetM S16IDFE-XBPM:P2ds:y:CalFactorM            / S16IDFE-XBPM:P2ds:y:CalFactorM S16IDFE-XBPM:P2ds:y:OffsetM               / S16IDFE-XBPM:P2ds:y:OffsetM S16IDFE-XBPM:P2us:GapUsedC                / S16IDFE-XBPM:P2us:GapUsedC S16IDFE-XBPM:P2us:XCalM                   / S16IDFE-XBPM:P2us:XCalM S16IDFE-XBPM:P2us:YCalM                   / S16IDFE-XBPM:P2us:YCalM S16IDFE-XBPM:P2us:x:CalFactorM            / S16IDFE-XBPM:P2us:x:CalFactorM S16IDFE-XBPM:P2us:x:OffsetM               / S16IDFE-XBPM:P2us:x:OffsetM S16IDFE-XBPM:P2us:y:CalFactorM            / S16IDFE-XBPM:P2us:y:CalFactorM S16IDFE-XBPM:P2us:y:OffsetM               / S16IDFE-XBPM:P2us:y:OffsetM S17BMFE-XBPM:P1:AM                        / S17BMFE-XBPM:P1:AM S17BMFE-XBPM:P1:BM                        / S17BMFE-XBPM:P1:BM S17BMFE-XBPM:P1:y                         / S17BMFE-XBPM:P1:y S17BMFE-XBPM:P1:y:LowPass1sM              / S17BMFE-XBPM:P1:y:LowPass1sM S17BMFE-XBPM:P1:y:LowPass8sM              / S17BMFE-XBPM:P1:y:LowPass8sM S17BMFE-XBPM:P1:y:LowPass64sM             / S17BMFE-XBPM:P1:y:LowPass64sM S17BMFE-XBPM:P1:y:StdDevM                 / S17BMFE-XBPM:P1:y:StdDevM S17BMFE-XBPM:P1:y:StdDev1sM               / S17BMFE-XBPM:P1:y:StdDev1sM S17BMFE-XBPM:P1:y:StdDev8sM               / S17BMFE-XBPM:P1:y:StdDev8sM S17BMFE-XBPM:P1:y:StdDev64sM              / S17BMFE-XBPM:P1:y:StdDev64sM S17BMFE-XBPM:P2:AM                        / S17BMFE-XBPM:P2:AM S17BMFE-XBPM:P2:BM                        / S17BMFE-XBPM:P2:BM S17BMFE-XBPM:P2:y                         / S17BMFE-XBPM:P2:y S17BMFE-XBPM:P2:y:LowPass1sM              / S17BMFE-XBPM:P2:y:LowPass1sM S17BMFE-XBPM:P2:y:LowPass8sM              / S17BMFE-XBPM:P2:y:LowPass8sM S17BMFE-XBPM:P2:y:LowPass64sM             / S17BMFE-XBPM:P2:y:LowPass64sM S17BMFE-XBPM:P2:y:StdDevM                 / S17BMFE-XBPM:P2:y:StdDevM S17BMFE-XBPM:P2:y:StdDev1sM               / S17BMFE-XBPM:P2:y:StdDev1sM S17BMFE-XBPM:P2:y:StdDev8sM               / S17BMFE-XBPM:P2:y:StdDev8sM S17BMFE-XBPM:P2:y:StdDev64sM              / S17BMFE-XBPM:P2:y:StdDev64sM S17IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S17IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S17IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S17IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S17IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S17IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S17IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S17IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S17IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S17IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S17IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S17IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S17IDFE-XBPM:CM1ds:PositionOffsetX        / S17IDFE-XBPM:CM1ds:PositionOffsetX S17IDFE-XBPM:CM1ds:PositionOffsetY        / S17IDFE-XBPM:CM1ds:PositionOffsetY S17IDFE-XBPM:CM1ds:PositionScaleX         / S17IDFE-XBPM:CM1ds:PositionScaleX S17IDFE-XBPM:CM1ds:PositionScaleY         / S17IDFE-XBPM:CM1ds:PositionScaleY S17IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S17IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S17IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S17IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S17IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S17IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S17IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S17IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S17IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S17IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S17IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S17IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S17IDFE-XBPM:CM2ds:PositionOffsetX        / S17IDFE-XBPM:CM2ds:PositionOffsetX S17IDFE-XBPM:CM2ds:PositionOffsetY        / S17IDFE-XBPM:CM2ds:PositionOffsetY S17IDFE-XBPM:CM2ds:PositionScaleX         / S17IDFE-XBPM:CM2ds:PositionScaleX S17IDFE-XBPM:CM2ds:PositionScaleY         / S17IDFE-XBPM:CM2ds:PositionScaleY S17IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S17IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S17IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S17IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S17IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S17IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S17IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S17IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S17IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S17IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S17IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S17IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S17IDFE-XBPM:CM3ds:PositionOffsetX        / S17IDFE-XBPM:CM3ds:PositionOffsetX S17IDFE-XBPM:CM3ds:PositionOffsetY        / S17IDFE-XBPM:CM3ds:PositionOffsetY S17IDFE-XBPM:CM3ds:PositionScaleX         / S17IDFE-XBPM:CM3ds:PositionScaleX S17IDFE-XBPM:CM3ds:PositionScaleY         / S17IDFE-XBPM:CM3ds:PositionScaleY S17IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S17IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S17IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S17IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S17IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S17IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S17IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S17IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S17IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S17IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S17IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S17IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S17IDFE-XBPM:CM4ds:PositionOffsetX        / S17IDFE-XBPM:CM4ds:PositionOffsetX S17IDFE-XBPM:CM4ds:PositionOffsetY        / S17IDFE-XBPM:CM4ds:PositionOffsetY S17IDFE-XBPM:CM4ds:PositionScaleX         / S17IDFE-XBPM:CM4ds:PositionScaleX S17IDFE-XBPM:CM4ds:PositionScaleY         / S17IDFE-XBPM:CM4ds:PositionScaleY S17IDFE-XBPM:P1ds:BMcUsedM                / S17IDFE-XBPM:P1ds:BMcUsedM S17IDFE-XBPM:P1ds:GapUsedC                / S17IDFE-XBPM:P1ds:GapUsedC S17IDFE-XBPM:P1ds:Wx1UsedM                / S17IDFE-XBPM:P1ds:Wx1UsedM S17IDFE-XBPM:P1ds:Wx2UsedM                / S17IDFE-XBPM:P1ds:Wx2UsedM S17IDFE-XBPM:P1ds:Wx3UsedM                / S17IDFE-XBPM:P1ds:Wx3UsedM S17IDFE-XBPM:P1ds:Wy1UsedM                / S17IDFE-XBPM:P1ds:Wy1UsedM S17IDFE-XBPM:P1ds:Wy2UsedM                / S17IDFE-XBPM:P1ds:Wy2UsedM S17IDFE-XBPM:P1ds:Wy3UsedM                / S17IDFE-XBPM:P1ds:Wy3UsedM S17IDFE-XBPM:P1ds:x                       / S17IDFE-XBPM:P1ds:x S17IDFE-XBPM:P1ds:x:CalFactor1M           / S17IDFE-XBPM:P1ds:x:CalFactor1M S17IDFE-XBPM:P1ds:x:CalFactor2M           / S17IDFE-XBPM:P1ds:x:CalFactor2M S17IDFE-XBPM:P1ds:x:LowPass1sM            / S17IDFE-XBPM:P1ds:x:LowPass1sM S17IDFE-XBPM:P1ds:x:LowPass8sM            / S17IDFE-XBPM:P1ds:x:LowPass8sM S17IDFE-XBPM:P1ds:x:LowPass64sM           / S17IDFE-XBPM:P1ds:x:LowPass64sM S17IDFE-XBPM:P1ds:x:Offset1M              / S17IDFE-XBPM:P1ds:x:Offset1M S17IDFE-XBPM:P1ds:x:Offset2M              / S17IDFE-XBPM:P1ds:x:Offset2M S17IDFE-XBPM:P1ds:x:ResolutionM           / S17IDFE-XBPM:P1ds:x:ResolutionM S17IDFE-XBPM:P1ds:x:Resolution1sM         / S17IDFE-XBPM:P1ds:x:Resolution1sM S17IDFE-XBPM:P1ds:x:Resolution8sM         / S17IDFE-XBPM:P1ds:x:Resolution8sM S17IDFE-XBPM:P1ds:x:Resolution64sM        / S17IDFE-XBPM:P1ds:x:Resolution64sM S17IDFE-XBPM:P1ds:x:StdDevM               / S17IDFE-XBPM:P1ds:x:StdDevM S17IDFE-XBPM:P1ds:x:StdDev1sM             / S17IDFE-XBPM:P1ds:x:StdDev1sM S17IDFE-XBPM:P1ds:x:StdDev8sM             / S17IDFE-XBPM:P1ds:x:StdDev8sM S17IDFE-XBPM:P1ds:x:StdDev64sM            / S17IDFE-XBPM:P1ds:x:StdDev64sM S17IDFE-XBPM:P1ds:x1:LowPass1sM           / S17IDFE-XBPM:P1ds:x1:LowPass1sM S17IDFE-XBPM:P1ds:x1:LowPass8sM           / S17IDFE-XBPM:P1ds:x1:LowPass8sM S17IDFE-XBPM:P1ds:x1:LowPass64sM          / S17IDFE-XBPM:P1ds:x1:LowPass64sM S17IDFE-XBPM:P1ds:x2:LowPass1sM           / S17IDFE-XBPM:P1ds:x2:LowPass1sM S17IDFE-XBPM:P1ds:x2:LowPass8sM           / S17IDFE-XBPM:P1ds:x2:LowPass8sM S17IDFE-XBPM:P1ds:x2:LowPass64sM          / S17IDFE-XBPM:P1ds:x2:LowPass64sM S17IDFE-XBPM:P1ds:y                       / S17IDFE-XBPM:P1ds:y S17IDFE-XBPM:P1ds:y:CalFactor1M           / S17IDFE-XBPM:P1ds:y:CalFactor1M S17IDFE-XBPM:P1ds:y:CalFactor2M           / S17IDFE-XBPM:P1ds:y:CalFactor2M S17IDFE-XBPM:P1ds:y:LowPass1sM            / S17IDFE-XBPM:P1ds:y:LowPass1sM S17IDFE-XBPM:P1ds:y:LowPass8sM            / S17IDFE-XBPM:P1ds:y:LowPass8sM S17IDFE-XBPM:P1ds:y:LowPass64sM           / S17IDFE-XBPM:P1ds:y:LowPass64sM S17IDFE-XBPM:P1ds:y:Offset1M              / S17IDFE-XBPM:P1ds:y:Offset1M S17IDFE-XBPM:P1ds:y:Offset2M              / S17IDFE-XBPM:P1ds:y:Offset2M S17IDFE-XBPM:P1ds:y:ResolutionM           / S17IDFE-XBPM:P1ds:y:ResolutionM S17IDFE-XBPM:P1ds:y:Resolution1sM         / S17IDFE-XBPM:P1ds:y:Resolution1sM S17IDFE-XBPM:P1ds:y:Resolution8sM         / S17IDFE-XBPM:P1ds:y:Resolution8sM S17IDFE-XBPM:P1ds:y:Resolution64sM        / S17IDFE-XBPM:P1ds:y:Resolution64sM S17IDFE-XBPM:P1ds:y:StdDevM               / S17IDFE-XBPM:P1ds:y:StdDevM S17IDFE-XBPM:P1ds:y:StdDev1sM             / S17IDFE-XBPM:P1ds:y:StdDev1sM S17IDFE-XBPM:P1ds:y:StdDev8sM             / S17IDFE-XBPM:P1ds:y:StdDev8sM S17IDFE-XBPM:P1ds:y:StdDev64sM            / S17IDFE-XBPM:P1ds:y:StdDev64sM S17IDFE-XBPM:P1ds:y1:LowPass1sM           / S17IDFE-XBPM:P1ds:y1:LowPass1sM S17IDFE-XBPM:P1ds:y1:LowPass8sM           / S17IDFE-XBPM:P1ds:y1:LowPass8sM S17IDFE-XBPM:P1ds:y1:LowPass64sM          / S17IDFE-XBPM:P1ds:y1:LowPass64sM S17IDFE-XBPM:P1ds:y2:LowPass1sM           / S17IDFE-XBPM:P1ds:y2:LowPass1sM S17IDFE-XBPM:P1ds:y2:LowPass8sM           / S17IDFE-XBPM:P1ds:y2:LowPass8sM S17IDFE-XBPM:P1ds:y2:LowPass64sM          / S17IDFE-XBPM:P1ds:y2:LowPass64sM S17IDFE-XBPM:P2ds:GapUsedC                / S17IDFE-XBPM:P2ds:GapUsedC S17IDFE-XBPM:P2ds:XCalM                   / S17IDFE-XBPM:P2ds:XCalM S17IDFE-XBPM:P2ds:YCalM                   / S17IDFE-XBPM:P2ds:YCalM S17IDFE-XBPM:P2ds:x:CalFactorM            / S17IDFE-XBPM:P2ds:x:CalFactorM S17IDFE-XBPM:P2ds:x:OffsetM               / S17IDFE-XBPM:P2ds:x:OffsetM S17IDFE-XBPM:P2ds:y:CalFactorM            / S17IDFE-XBPM:P2ds:y:CalFactorM S17IDFE-XBPM:P2ds:y:OffsetM               / S17IDFE-XBPM:P2ds:y:OffsetM S18IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S18IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S18IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S18IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S18IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S18IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S18IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S18IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S18IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S18IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S18IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S18IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S18IDFE-XBPM:CM1ds:PositionOffsetX        / S18IDFE-XBPM:CM1ds:PositionOffsetX S18IDFE-XBPM:CM1ds:PositionOffsetY        / S18IDFE-XBPM:CM1ds:PositionOffsetY S18IDFE-XBPM:CM1ds:PositionScaleX         / S18IDFE-XBPM:CM1ds:PositionScaleX S18IDFE-XBPM:CM1ds:PositionScaleY         / S18IDFE-XBPM:CM1ds:PositionScaleY S18IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S18IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S18IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S18IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S18IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S18IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S18IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S18IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S18IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S18IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S18IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S18IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S18IDFE-XBPM:CM2ds:PositionOffsetX        / S18IDFE-XBPM:CM2ds:PositionOffsetX S18IDFE-XBPM:CM2ds:PositionOffsetY        / S18IDFE-XBPM:CM2ds:PositionOffsetY S18IDFE-XBPM:CM2ds:PositionScaleX         / S18IDFE-XBPM:CM2ds:PositionScaleX S18IDFE-XBPM:CM2ds:PositionScaleY         / S18IDFE-XBPM:CM2ds:PositionScaleY S18IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S18IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S18IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S18IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S18IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S18IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S18IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S18IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S18IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S18IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S18IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S18IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S18IDFE-XBPM:CM3ds:PositionOffsetX        / S18IDFE-XBPM:CM3ds:PositionOffsetX S18IDFE-XBPM:CM3ds:PositionOffsetY        / S18IDFE-XBPM:CM3ds:PositionOffsetY S18IDFE-XBPM:CM3ds:PositionScaleX         / S18IDFE-XBPM:CM3ds:PositionScaleX S18IDFE-XBPM:CM3ds:PositionScaleY         / S18IDFE-XBPM:CM3ds:PositionScaleY S18IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S18IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S18IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S18IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S18IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S18IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S18IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S18IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S18IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S18IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S18IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S18IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S18IDFE-XBPM:CM4ds:PositionOffsetX        / S18IDFE-XBPM:CM4ds:PositionOffsetX S18IDFE-XBPM:CM4ds:PositionOffsetY        / S18IDFE-XBPM:CM4ds:PositionOffsetY S18IDFE-XBPM:CM4ds:PositionScaleX         / S18IDFE-XBPM:CM4ds:PositionScaleX S18IDFE-XBPM:CM4ds:PositionScaleY         / S18IDFE-XBPM:CM4ds:PositionScaleY S18IDFE-XBPM:P1ds:BMcUsedM                / S18IDFE-XBPM:P1ds:BMcUsedM S18IDFE-XBPM:P1ds:GapUsedC                / S18IDFE-XBPM:P1ds:GapUsedC S18IDFE-XBPM:P1ds:Wx1UsedM                / S18IDFE-XBPM:P1ds:Wx1UsedM S18IDFE-XBPM:P1ds:Wx2UsedM                / S18IDFE-XBPM:P1ds:Wx2UsedM S18IDFE-XBPM:P1ds:Wx3UsedM                / S18IDFE-XBPM:P1ds:Wx3UsedM S18IDFE-XBPM:P1ds:Wy1UsedM                / S18IDFE-XBPM:P1ds:Wy1UsedM S18IDFE-XBPM:P1ds:Wy2UsedM                / S18IDFE-XBPM:P1ds:Wy2UsedM S18IDFE-XBPM:P1ds:Wy3UsedM                / S18IDFE-XBPM:P1ds:Wy3UsedM S18IDFE-XBPM:P1ds:x                       / S18IDFE-XBPM:P1ds:x S18IDFE-XBPM:P1ds:x:CalFactor1M           / S18IDFE-XBPM:P1ds:x:CalFactor1M S18IDFE-XBPM:P1ds:x:CalFactor2M           / S18IDFE-XBPM:P1ds:x:CalFactor2M S18IDFE-XBPM:P1ds:x:LowPass1sM            / S18IDFE-XBPM:P1ds:x:LowPass1sM S18IDFE-XBPM:P1ds:x:LowPass8sM            / S18IDFE-XBPM:P1ds:x:LowPass8sM S18IDFE-XBPM:P1ds:x:LowPass64sM           / S18IDFE-XBPM:P1ds:x:LowPass64sM S18IDFE-XBPM:P1ds:x:Offset1M              / S18IDFE-XBPM:P1ds:x:Offset1M S18IDFE-XBPM:P1ds:x:Offset2M              / S18IDFE-XBPM:P1ds:x:Offset2M S18IDFE-XBPM:P1ds:x:ResolutionM           / S18IDFE-XBPM:P1ds:x:ResolutionM S18IDFE-XBPM:P1ds:x:Resolution1sM         / S18IDFE-XBPM:P1ds:x:Resolution1sM S18IDFE-XBPM:P1ds:x:Resolution8sM         / S18IDFE-XBPM:P1ds:x:Resolution8sM S18IDFE-XBPM:P1ds:x:Resolution64sM        / S18IDFE-XBPM:P1ds:x:Resolution64sM S18IDFE-XBPM:P1ds:x:StdDevM               / S18IDFE-XBPM:P1ds:x:StdDevM S18IDFE-XBPM:P1ds:x:StdDev1sM             / S18IDFE-XBPM:P1ds:x:StdDev1sM S18IDFE-XBPM:P1ds:x:StdDev8sM             / S18IDFE-XBPM:P1ds:x:StdDev8sM S18IDFE-XBPM:P1ds:x:StdDev64sM            / S18IDFE-XBPM:P1ds:x:StdDev64sM S18IDFE-XBPM:P1ds:x1:LowPass1sM           / S18IDFE-XBPM:P1ds:x1:LowPass1sM S18IDFE-XBPM:P1ds:x1:LowPass8sM           / S18IDFE-XBPM:P1ds:x1:LowPass8sM S18IDFE-XBPM:P1ds:x1:LowPass64sM          / S18IDFE-XBPM:P1ds:x1:LowPass64sM S18IDFE-XBPM:P1ds:x2:LowPass1sM           / S18IDFE-XBPM:P1ds:x2:LowPass1sM S18IDFE-XBPM:P1ds:x2:LowPass8sM           / S18IDFE-XBPM:P1ds:x2:LowPass8sM S18IDFE-XBPM:P1ds:x2:LowPass64sM          / S18IDFE-XBPM:P1ds:x2:LowPass64sM S18IDFE-XBPM:P1ds:y                       / S18IDFE-XBPM:P1ds:y S18IDFE-XBPM:P1ds:y:CalFactor1M           / S18IDFE-XBPM:P1ds:y:CalFactor1M S18IDFE-XBPM:P1ds:y:CalFactor2M           / S18IDFE-XBPM:P1ds:y:CalFactor2M S18IDFE-XBPM:P1ds:y:LowPass1sM            / S18IDFE-XBPM:P1ds:y:LowPass1sM S18IDFE-XBPM:P1ds:y:LowPass8sM            / S18IDFE-XBPM:P1ds:y:LowPass8sM S18IDFE-XBPM:P1ds:y:LowPass64sM           / S18IDFE-XBPM:P1ds:y:LowPass64sM S18IDFE-XBPM:P1ds:y:Offset1M              / S18IDFE-XBPM:P1ds:y:Offset1M S18IDFE-XBPM:P1ds:y:Offset2M              / S18IDFE-XBPM:P1ds:y:Offset2M S18IDFE-XBPM:P1ds:y:ResolutionM           / S18IDFE-XBPM:P1ds:y:ResolutionM S18IDFE-XBPM:P1ds:y:Resolution1sM         / S18IDFE-XBPM:P1ds:y:Resolution1sM S18IDFE-XBPM:P1ds:y:Resolution8sM         / S18IDFE-XBPM:P1ds:y:Resolution8sM S18IDFE-XBPM:P1ds:y:Resolution64sM        / S18IDFE-XBPM:P1ds:y:Resolution64sM S18IDFE-XBPM:P1ds:y:StdDevM               / S18IDFE-XBPM:P1ds:y:StdDevM S18IDFE-XBPM:P1ds:y:StdDev1sM             / S18IDFE-XBPM:P1ds:y:StdDev1sM S18IDFE-XBPM:P1ds:y:StdDev8sM             / S18IDFE-XBPM:P1ds:y:StdDev8sM S18IDFE-XBPM:P1ds:y:StdDev64sM            / S18IDFE-XBPM:P1ds:y:StdDev64sM S18IDFE-XBPM:P1ds:y1:LowPass1sM           / S18IDFE-XBPM:P1ds:y1:LowPass1sM S18IDFE-XBPM:P1ds:y1:LowPass8sM           / S18IDFE-XBPM:P1ds:y1:LowPass8sM S18IDFE-XBPM:P1ds:y1:LowPass64sM          / S18IDFE-XBPM:P1ds:y1:LowPass64sM S18IDFE-XBPM:P1ds:y2:LowPass1sM           / S18IDFE-XBPM:P1ds:y2:LowPass1sM S18IDFE-XBPM:P1ds:y2:LowPass8sM           / S18IDFE-XBPM:P1ds:y2:LowPass8sM S18IDFE-XBPM:P1ds:y2:LowPass64sM          / S18IDFE-XBPM:P1ds:y2:LowPass64sM S18IDFE-XBPM:P2ds:GapUsedC                / S18IDFE-XBPM:P2ds:GapUsedC S18IDFE-XBPM:P2ds:XCalM                   / S18IDFE-XBPM:P2ds:XCalM S18IDFE-XBPM:P2ds:YCalM                   / S18IDFE-XBPM:P2ds:YCalM S18IDFE-XBPM:P2ds:x:CalFactorM            / S18IDFE-XBPM:P2ds:x:CalFactorM S18IDFE-XBPM:P2ds:x:OffsetM               / S18IDFE-XBPM:P2ds:x:OffsetM S18IDFE-XBPM:P2ds:y:CalFactorM            / S18IDFE-XBPM:P2ds:y:CalFactorM S18IDFE-XBPM:P2ds:y:OffsetM               / S18IDFE-XBPM:P2ds:y:OffsetM S19BMFE-XBPM:P1:AM                        / S19BMFE-XBPM:P1:AM S19BMFE-XBPM:P1:BM                        / S19BMFE-XBPM:P1:BM S19BMFE-XBPM:P1:y                         / S19BMFE-XBPM:P1:y S19BMFE-XBPM:P1:y:LowPass1sM              / S19BMFE-XBPM:P1:y:LowPass1sM S19BMFE-XBPM:P1:y:LowPass8sM              / S19BMFE-XBPM:P1:y:LowPass8sM S19BMFE-XBPM:P1:y:LowPass64sM             / S19BMFE-XBPM:P1:y:LowPass64sM S19BMFE-XBPM:P1:y:StdDevM                 / S19BMFE-XBPM:P1:y:StdDevM S19BMFE-XBPM:P1:y:StdDev1sM               / S19BMFE-XBPM:P1:y:StdDev1sM S19BMFE-XBPM:P1:y:StdDev8sM               / S19BMFE-XBPM:P1:y:StdDev8sM S19BMFE-XBPM:P1:y:StdDev64sM              / S19BMFE-XBPM:P1:y:StdDev64sM S19BMFE-XBPM:P2:AM                        / S19BMFE-XBPM:P2:AM S19BMFE-XBPM:P2:BM                        / S19BMFE-XBPM:P2:BM S19BMFE-XBPM:P2:y                         / S19BMFE-XBPM:P2:y S19BMFE-XBPM:P2:y:LowPass1sM              / S19BMFE-XBPM:P2:y:LowPass1sM S19BMFE-XBPM:P2:y:LowPass8sM              / S19BMFE-XBPM:P2:y:LowPass8sM S19BMFE-XBPM:P2:y:LowPass64sM             / S19BMFE-XBPM:P2:y:LowPass64sM S19BMFE-XBPM:P2:y:StdDevM                 / S19BMFE-XBPM:P2:y:StdDevM S19BMFE-XBPM:P2:y:StdDev1sM               / S19BMFE-XBPM:P2:y:StdDev1sM S19BMFE-XBPM:P2:y:StdDev8sM               / S19BMFE-XBPM:P2:y:StdDev8sM S19BMFE-XBPM:P2:y:StdDev64sM              / S19BMFE-XBPM:P2:y:StdDev64sM S19IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S19IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S19IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S19IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S19IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S19IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S19IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S19IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S19IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S19IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S19IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S19IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S19IDFE-XBPM:CM1ds:PositionOffsetX        / S19IDFE-XBPM:CM1ds:PositionOffsetX S19IDFE-XBPM:CM1ds:PositionOffsetY        / S19IDFE-XBPM:CM1ds:PositionOffsetY S19IDFE-XBPM:CM1ds:PositionScaleX         / S19IDFE-XBPM:CM1ds:PositionScaleX S19IDFE-XBPM:CM1ds:PositionScaleY         / S19IDFE-XBPM:CM1ds:PositionScaleY S19IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S19IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S19IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S19IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S19IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S19IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S19IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S19IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S19IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S19IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S19IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S19IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S19IDFE-XBPM:CM2ds:PositionOffsetX        / S19IDFE-XBPM:CM2ds:PositionOffsetX S19IDFE-XBPM:CM2ds:PositionOffsetY        / S19IDFE-XBPM:CM2ds:PositionOffsetY S19IDFE-XBPM:CM2ds:PositionScaleX         / S19IDFE-XBPM:CM2ds:PositionScaleX S19IDFE-XBPM:CM2ds:PositionScaleY         / S19IDFE-XBPM:CM2ds:PositionScaleY S19IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S19IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S19IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S19IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S19IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S19IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S19IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S19IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S19IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S19IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S19IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S19IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S19IDFE-XBPM:CM3ds:PositionOffsetX        / S19IDFE-XBPM:CM3ds:PositionOffsetX S19IDFE-XBPM:CM3ds:PositionOffsetY        / S19IDFE-XBPM:CM3ds:PositionOffsetY S19IDFE-XBPM:CM3ds:PositionScaleX         / S19IDFE-XBPM:CM3ds:PositionScaleX S19IDFE-XBPM:CM3ds:PositionScaleY         / S19IDFE-XBPM:CM3ds:PositionScaleY S19IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S19IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S19IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S19IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S19IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S19IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S19IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S19IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S19IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S19IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S19IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S19IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S19IDFE-XBPM:CM4ds:PositionOffsetX        / S19IDFE-XBPM:CM4ds:PositionOffsetX S19IDFE-XBPM:CM4ds:PositionOffsetY        / S19IDFE-XBPM:CM4ds:PositionOffsetY S19IDFE-XBPM:CM4ds:PositionScaleX         / S19IDFE-XBPM:CM4ds:PositionScaleX S19IDFE-XBPM:CM4ds:PositionScaleY         / S19IDFE-XBPM:CM4ds:PositionScaleY S19IDFE-XBPM:P1ds:BMcUsedM                / S19IDFE-XBPM:P1ds:BMcUsedM S19IDFE-XBPM:P1ds:GapUsedC                / S19IDFE-XBPM:P1ds:GapUsedC S19IDFE-XBPM:P1ds:Wx1UsedM                / S19IDFE-XBPM:P1ds:Wx1UsedM S19IDFE-XBPM:P1ds:Wx2UsedM                / S19IDFE-XBPM:P1ds:Wx2UsedM S19IDFE-XBPM:P1ds:Wx3UsedM                / S19IDFE-XBPM:P1ds:Wx3UsedM S19IDFE-XBPM:P1ds:Wy1UsedM                / S19IDFE-XBPM:P1ds:Wy1UsedM S19IDFE-XBPM:P1ds:Wy2UsedM                / S19IDFE-XBPM:P1ds:Wy2UsedM S19IDFE-XBPM:P1ds:Wy3UsedM                / S19IDFE-XBPM:P1ds:Wy3UsedM S19IDFE-XBPM:P1ds:x                       / S19IDFE-XBPM:P1ds:x S19IDFE-XBPM:P1ds:x:CalFactor1M           / S19IDFE-XBPM:P1ds:x:CalFactor1M S19IDFE-XBPM:P1ds:x:CalFactor2M           / S19IDFE-XBPM:P1ds:x:CalFactor2M S19IDFE-XBPM:P1ds:x:LowPass1sM            / S19IDFE-XBPM:P1ds:x:LowPass1sM S19IDFE-XBPM:P1ds:x:LowPass8sM            / S19IDFE-XBPM:P1ds:x:LowPass8sM S19IDFE-XBPM:P1ds:x:LowPass64sM           / S19IDFE-XBPM:P1ds:x:LowPass64sM S19IDFE-XBPM:P1ds:x:Offset1M              / S19IDFE-XBPM:P1ds:x:Offset1M S19IDFE-XBPM:P1ds:x:Offset2M              / S19IDFE-XBPM:P1ds:x:Offset2M S19IDFE-XBPM:P1ds:x:ResolutionM           / S19IDFE-XBPM:P1ds:x:ResolutionM S19IDFE-XBPM:P1ds:x:Resolution1sM         / S19IDFE-XBPM:P1ds:x:Resolution1sM S19IDFE-XBPM:P1ds:x:Resolution8sM         / S19IDFE-XBPM:P1ds:x:Resolution8sM S19IDFE-XBPM:P1ds:x:Resolution64sM        / S19IDFE-XBPM:P1ds:x:Resolution64sM S19IDFE-XBPM:P1ds:x:StdDevM               / S19IDFE-XBPM:P1ds:x:StdDevM S19IDFE-XBPM:P1ds:x:StdDev1sM             / S19IDFE-XBPM:P1ds:x:StdDev1sM S19IDFE-XBPM:P1ds:x:StdDev8sM             / S19IDFE-XBPM:P1ds:x:StdDev8sM S19IDFE-XBPM:P1ds:x:StdDev64sM            / S19IDFE-XBPM:P1ds:x:StdDev64sM S19IDFE-XBPM:P1ds:x1:LowPass1sM           / S19IDFE-XBPM:P1ds:x1:LowPass1sM S19IDFE-XBPM:P1ds:x1:LowPass8sM           / S19IDFE-XBPM:P1ds:x1:LowPass8sM S19IDFE-XBPM:P1ds:x1:LowPass64sM          / S19IDFE-XBPM:P1ds:x1:LowPass64sM S19IDFE-XBPM:P1ds:x2:LowPass1sM           / S19IDFE-XBPM:P1ds:x2:LowPass1sM S19IDFE-XBPM:P1ds:x2:LowPass8sM           / S19IDFE-XBPM:P1ds:x2:LowPass8sM S19IDFE-XBPM:P1ds:x2:LowPass64sM          / S19IDFE-XBPM:P1ds:x2:LowPass64sM S19IDFE-XBPM:P1ds:y                       / S19IDFE-XBPM:P1ds:y S19IDFE-XBPM:P1ds:y:CalFactor1M           / S19IDFE-XBPM:P1ds:y:CalFactor1M S19IDFE-XBPM:P1ds:y:CalFactor2M           / S19IDFE-XBPM:P1ds:y:CalFactor2M S19IDFE-XBPM:P1ds:y:LowPass1sM            / S19IDFE-XBPM:P1ds:y:LowPass1sM S19IDFE-XBPM:P1ds:y:LowPass8sM            / S19IDFE-XBPM:P1ds:y:LowPass8sM S19IDFE-XBPM:P1ds:y:LowPass64sM           / S19IDFE-XBPM:P1ds:y:LowPass64sM S19IDFE-XBPM:P1ds:y:Offset1M              / S19IDFE-XBPM:P1ds:y:Offset1M S19IDFE-XBPM:P1ds:y:Offset2M              / S19IDFE-XBPM:P1ds:y:Offset2M S19IDFE-XBPM:P1ds:y:ResolutionM           / S19IDFE-XBPM:P1ds:y:ResolutionM S19IDFE-XBPM:P1ds:y:Resolution1sM         / S19IDFE-XBPM:P1ds:y:Resolution1sM S19IDFE-XBPM:P1ds:y:Resolution8sM         / S19IDFE-XBPM:P1ds:y:Resolution8sM S19IDFE-XBPM:P1ds:y:Resolution64sM        / S19IDFE-XBPM:P1ds:y:Resolution64sM S19IDFE-XBPM:P1ds:y:StdDevM               / S19IDFE-XBPM:P1ds:y:StdDevM S19IDFE-XBPM:P1ds:y:StdDev1sM             / S19IDFE-XBPM:P1ds:y:StdDev1sM S19IDFE-XBPM:P1ds:y:StdDev8sM             / S19IDFE-XBPM:P1ds:y:StdDev8sM S19IDFE-XBPM:P1ds:y:StdDev64sM            / S19IDFE-XBPM:P1ds:y:StdDev64sM S19IDFE-XBPM:P1ds:y1:LowPass1sM           / S19IDFE-XBPM:P1ds:y1:LowPass1sM S19IDFE-XBPM:P1ds:y1:LowPass8sM           / S19IDFE-XBPM:P1ds:y1:LowPass8sM S19IDFE-XBPM:P1ds:y1:LowPass64sM          / S19IDFE-XBPM:P1ds:y1:LowPass64sM S19IDFE-XBPM:P1ds:y2:LowPass1sM           / S19IDFE-XBPM:P1ds:y2:LowPass1sM S19IDFE-XBPM:P1ds:y2:LowPass8sM           / S19IDFE-XBPM:P1ds:y2:LowPass8sM S19IDFE-XBPM:P1ds:y2:LowPass64sM          / S19IDFE-XBPM:P1ds:y2:LowPass64sM S19IDFE-XBPM:P2ds:GapUsedC                / S19IDFE-XBPM:P2ds:GapUsedC S19IDFE-XBPM:P2ds:XCalM                   / S19IDFE-XBPM:P2ds:XCalM S19IDFE-XBPM:P2ds:YCalM                   / S19IDFE-XBPM:P2ds:YCalM S19IDFE-XBPM:P2ds:x:CalFactorM            / S19IDFE-XBPM:P2ds:x:CalFactorM S19IDFE-XBPM:P2ds:x:OffsetM               / S19IDFE-XBPM:P2ds:x:OffsetM S19IDFE-XBPM:P2ds:y:CalFactorM            / S19IDFE-XBPM:P2ds:y:CalFactorM S19IDFE-XBPM:P2ds:y:OffsetM               / S19IDFE-XBPM:P2ds:y:OffsetM S20BMFE-XBPM:P1:AM                        / S20BMFE-XBPM:P1:AM S20BMFE-XBPM:P1:BM                        / S20BMFE-XBPM:P1:BM S20BMFE-XBPM:P1:y                         / S20BMFE-XBPM:P1:y S20BMFE-XBPM:P1:y:LowPass1sM              / S20BMFE-XBPM:P1:y:LowPass1sM S20BMFE-XBPM:P1:y:LowPass8sM              / S20BMFE-XBPM:P1:y:LowPass8sM S20BMFE-XBPM:P1:y:LowPass64sM             / S20BMFE-XBPM:P1:y:LowPass64sM S20BMFE-XBPM:P1:y:StdDevM                 / S20BMFE-XBPM:P1:y:StdDevM S20BMFE-XBPM:P1:y:StdDev1sM               / S20BMFE-XBPM:P1:y:StdDev1sM S20BMFE-XBPM:P1:y:StdDev8sM               / S20BMFE-XBPM:P1:y:StdDev8sM S20BMFE-XBPM:P1:y:StdDev64sM              / S20BMFE-XBPM:P1:y:StdDev64sM S20BMFE-XBPM:P2:AM                        / S20BMFE-XBPM:P2:AM S20BMFE-XBPM:P2:BM                        / S20BMFE-XBPM:P2:BM S20BMFE-XBPM:P2:y                         / S20BMFE-XBPM:P2:y S20BMFE-XBPM:P2:y:LowPass1sM              / S20BMFE-XBPM:P2:y:LowPass1sM S20BMFE-XBPM:P2:y:LowPass8sM              / S20BMFE-XBPM:P2:y:LowPass8sM S20BMFE-XBPM:P2:y:LowPass64sM             / S20BMFE-XBPM:P2:y:LowPass64sM S20BMFE-XBPM:P2:y:StdDevM                 / S20BMFE-XBPM:P2:y:StdDevM S20BMFE-XBPM:P2:y:StdDev1sM               / S20BMFE-XBPM:P2:y:StdDev1sM S20BMFE-XBPM:P2:y:StdDev8sM               / S20BMFE-XBPM:P2:y:StdDev8sM S20BMFE-XBPM:P2:y:StdDev64sM              / S20BMFE-XBPM:P2:y:StdDev64sM S20IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S20IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S20IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S20IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S20IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S20IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S20IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S20IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S20IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S20IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S20IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S20IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S20IDFE-XBPM:CM1ds:PositionOffsetX        / S20IDFE-XBPM:CM1ds:PositionOffsetX S20IDFE-XBPM:CM1ds:PositionOffsetY        / S20IDFE-XBPM:CM1ds:PositionOffsetY S20IDFE-XBPM:CM1ds:PositionScaleX         / S20IDFE-XBPM:CM1ds:PositionScaleX S20IDFE-XBPM:CM1ds:PositionScaleY         / S20IDFE-XBPM:CM1ds:PositionScaleY S20IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S20IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S20IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S20IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S20IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S20IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S20IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S20IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S20IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S20IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S20IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S20IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S20IDFE-XBPM:CM2ds:PositionOffsetX        / S20IDFE-XBPM:CM2ds:PositionOffsetX S20IDFE-XBPM:CM2ds:PositionOffsetY        / S20IDFE-XBPM:CM2ds:PositionOffsetY S20IDFE-XBPM:CM2ds:PositionScaleX         / S20IDFE-XBPM:CM2ds:PositionScaleX S20IDFE-XBPM:CM2ds:PositionScaleY         / S20IDFE-XBPM:CM2ds:PositionScaleY S20IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S20IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S20IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S20IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S20IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S20IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S20IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S20IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S20IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S20IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S20IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S20IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S20IDFE-XBPM:CM3ds:PositionOffsetX        / S20IDFE-XBPM:CM3ds:PositionOffsetX S20IDFE-XBPM:CM3ds:PositionOffsetY        / S20IDFE-XBPM:CM3ds:PositionOffsetY S20IDFE-XBPM:CM3ds:PositionScaleX         / S20IDFE-XBPM:CM3ds:PositionScaleX S20IDFE-XBPM:CM3ds:PositionScaleY         / S20IDFE-XBPM:CM3ds:PositionScaleY S20IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S20IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S20IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S20IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S20IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S20IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S20IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S20IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S20IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S20IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S20IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S20IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S20IDFE-XBPM:CM4ds:PositionOffsetX        / S20IDFE-XBPM:CM4ds:PositionOffsetX S20IDFE-XBPM:CM4ds:PositionOffsetY        / S20IDFE-XBPM:CM4ds:PositionOffsetY S20IDFE-XBPM:CM4ds:PositionScaleX         / S20IDFE-XBPM:CM4ds:PositionScaleX S20IDFE-XBPM:CM4ds:PositionScaleY         / S20IDFE-XBPM:CM4ds:PositionScaleY S20IDFE-XBPM:P1ds:BMcUsedM                / S20IDFE-XBPM:P1ds:BMcUsedM S20IDFE-XBPM:P1ds:GapUsedC                / S20IDFE-XBPM:P1ds:GapUsedC S20IDFE-XBPM:P1ds:Wx1UsedM                / S20IDFE-XBPM:P1ds:Wx1UsedM S20IDFE-XBPM:P1ds:Wx2UsedM                / S20IDFE-XBPM:P1ds:Wx2UsedM S20IDFE-XBPM:P1ds:Wx3UsedM                / S20IDFE-XBPM:P1ds:Wx3UsedM S20IDFE-XBPM:P1ds:Wy1UsedM                / S20IDFE-XBPM:P1ds:Wy1UsedM S20IDFE-XBPM:P1ds:Wy2UsedM                / S20IDFE-XBPM:P1ds:Wy2UsedM S20IDFE-XBPM:P1ds:Wy3UsedM                / S20IDFE-XBPM:P1ds:Wy3UsedM S20IDFE-XBPM:P1ds:x                       / S20IDFE-XBPM:P1ds:x S20IDFE-XBPM:P1ds:x:CalFactor1M           / S20IDFE-XBPM:P1ds:x:CalFactor1M S20IDFE-XBPM:P1ds:x:CalFactor2M           / S20IDFE-XBPM:P1ds:x:CalFactor2M S20IDFE-XBPM:P1ds:x:LowPass1sM            / S20IDFE-XBPM:P1ds:x:LowPass1sM S20IDFE-XBPM:P1ds:x:LowPass8sM            / S20IDFE-XBPM:P1ds:x:LowPass8sM S20IDFE-XBPM:P1ds:x:LowPass64sM           / S20IDFE-XBPM:P1ds:x:LowPass64sM S20IDFE-XBPM:P1ds:x:Offset1M              / S20IDFE-XBPM:P1ds:x:Offset1M S20IDFE-XBPM:P1ds:x:Offset2M              / S20IDFE-XBPM:P1ds:x:Offset2M S20IDFE-XBPM:P1ds:x:ResolutionM           / S20IDFE-XBPM:P1ds:x:ResolutionM S20IDFE-XBPM:P1ds:x:Resolution1sM         / S20IDFE-XBPM:P1ds:x:Resolution1sM S20IDFE-XBPM:P1ds:x:Resolution8sM         / S20IDFE-XBPM:P1ds:x:Resolution8sM S20IDFE-XBPM:P1ds:x:Resolution64sM        / S20IDFE-XBPM:P1ds:x:Resolution64sM S20IDFE-XBPM:P1ds:x:StdDevM               / S20IDFE-XBPM:P1ds:x:StdDevM S20IDFE-XBPM:P1ds:x:StdDev1sM             / S20IDFE-XBPM:P1ds:x:StdDev1sM S20IDFE-XBPM:P1ds:x:StdDev8sM             / S20IDFE-XBPM:P1ds:x:StdDev8sM S20IDFE-XBPM:P1ds:x:StdDev64sM            / S20IDFE-XBPM:P1ds:x:StdDev64sM S20IDFE-XBPM:P1ds:x1:LowPass1sM           / S20IDFE-XBPM:P1ds:x1:LowPass1sM S20IDFE-XBPM:P1ds:x1:LowPass8sM           / S20IDFE-XBPM:P1ds:x1:LowPass8sM S20IDFE-XBPM:P1ds:x1:LowPass64sM          / S20IDFE-XBPM:P1ds:x1:LowPass64sM S20IDFE-XBPM:P1ds:x2:LowPass1sM           / S20IDFE-XBPM:P1ds:x2:LowPass1sM S20IDFE-XBPM:P1ds:x2:LowPass8sM           / S20IDFE-XBPM:P1ds:x2:LowPass8sM S20IDFE-XBPM:P1ds:x2:LowPass64sM          / S20IDFE-XBPM:P1ds:x2:LowPass64sM S20IDFE-XBPM:P1ds:y                       / S20IDFE-XBPM:P1ds:y S20IDFE-XBPM:P1ds:y:CalFactor1M           / S20IDFE-XBPM:P1ds:y:CalFactor1M S20IDFE-XBPM:P1ds:y:CalFactor2M           / S20IDFE-XBPM:P1ds:y:CalFactor2M S20IDFE-XBPM:P1ds:y:LowPass1sM            / S20IDFE-XBPM:P1ds:y:LowPass1sM S20IDFE-XBPM:P1ds:y:LowPass8sM            / S20IDFE-XBPM:P1ds:y:LowPass8sM S20IDFE-XBPM:P1ds:y:LowPass64sM           / S20IDFE-XBPM:P1ds:y:LowPass64sM S20IDFE-XBPM:P1ds:y:Offset1M              / S20IDFE-XBPM:P1ds:y:Offset1M S20IDFE-XBPM:P1ds:y:Offset2M              / S20IDFE-XBPM:P1ds:y:Offset2M S20IDFE-XBPM:P1ds:y:ResolutionM           / S20IDFE-XBPM:P1ds:y:ResolutionM S20IDFE-XBPM:P1ds:y:Resolution1sM         / S20IDFE-XBPM:P1ds:y:Resolution1sM S20IDFE-XBPM:P1ds:y:Resolution8sM         / S20IDFE-XBPM:P1ds:y:Resolution8sM S20IDFE-XBPM:P1ds:y:Resolution64sM        / S20IDFE-XBPM:P1ds:y:Resolution64sM S20IDFE-XBPM:P1ds:y:StdDevM               / S20IDFE-XBPM:P1ds:y:StdDevM S20IDFE-XBPM:P1ds:y:StdDev1sM             / S20IDFE-XBPM:P1ds:y:StdDev1sM S20IDFE-XBPM:P1ds:y:StdDev8sM             / S20IDFE-XBPM:P1ds:y:StdDev8sM S20IDFE-XBPM:P1ds:y:StdDev64sM            / S20IDFE-XBPM:P1ds:y:StdDev64sM S20IDFE-XBPM:P1ds:y1:LowPass1sM           / S20IDFE-XBPM:P1ds:y1:LowPass1sM S20IDFE-XBPM:P1ds:y1:LowPass8sM           / S20IDFE-XBPM:P1ds:y1:LowPass8sM S20IDFE-XBPM:P1ds:y1:LowPass64sM          / S20IDFE-XBPM:P1ds:y1:LowPass64sM S20IDFE-XBPM:P1ds:y2:LowPass1sM           / S20IDFE-XBPM:P1ds:y2:LowPass1sM S20IDFE-XBPM:P1ds:y2:LowPass8sM           / S20IDFE-XBPM:P1ds:y2:LowPass8sM S20IDFE-XBPM:P1ds:y2:LowPass64sM          / S20IDFE-XBPM:P1ds:y2:LowPass64sM S20IDFE-XBPM:P2ds:GapUsedC                / S20IDFE-XBPM:P2ds:GapUsedC S20IDFE-XBPM:P2ds:XCalM                   / S20IDFE-XBPM:P2ds:XCalM S20IDFE-XBPM:P2ds:YCalM                   / S20IDFE-XBPM:P2ds:YCalM S20IDFE-XBPM:P2ds:x:CalFactorM            / S20IDFE-XBPM:P2ds:x:CalFactorM S20IDFE-XBPM:P2ds:x:OffsetM               / S20IDFE-XBPM:P2ds:x:OffsetM S20IDFE-XBPM:P2ds:y:CalFactorM            / S20IDFE-XBPM:P2ds:y:CalFactorM S20IDFE-XBPM:P2ds:y:OffsetM               / S20IDFE-XBPM:P2ds:y:OffsetM S21IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S21IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S21IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S21IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S21IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S21IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S21IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S21IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S21IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S21IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S21IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S21IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S21IDFE-XBPM:CM1ds:PositionOffsetX        / S21IDFE-XBPM:CM1ds:PositionOffsetX S21IDFE-XBPM:CM1ds:PositionOffsetY        / S21IDFE-XBPM:CM1ds:PositionOffsetY S21IDFE-XBPM:CM1ds:PositionScaleX         / S21IDFE-XBPM:CM1ds:PositionScaleX S21IDFE-XBPM:CM1ds:PositionScaleY         / S21IDFE-XBPM:CM1ds:PositionScaleY S21IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S21IDFE-XBPM:CM1us:Current1:MeanValue_RBV S21IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S21IDFE-XBPM:CM1us:Current2:MeanValue_RBV S21IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S21IDFE-XBPM:CM1us:Current3:MeanValue_RBV S21IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S21IDFE-XBPM:CM1us:Current4:MeanValue_RBV S21IDFE-XBPM:CM1us:PosX:MeanValue_RBV     / S21IDFE-XBPM:CM1us:PosX:MeanValue_RBV S21IDFE-XBPM:CM1us:PosY:MeanValue_RBV     / S21IDFE-XBPM:CM1us:PosY:MeanValue_RBV S21IDFE-XBPM:CM1us:PositionOffsetX        / S21IDFE-XBPM:CM1us:PositionOffsetX S21IDFE-XBPM:CM1us:PositionOffsetY        / S21IDFE-XBPM:CM1us:PositionOffsetY S21IDFE-XBPM:CM1us:PositionScaleX         / S21IDFE-XBPM:CM1us:PositionScaleX S21IDFE-XBPM:CM1us:PositionScaleY         / S21IDFE-XBPM:CM1us:PositionScaleY S21IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S21IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S21IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S21IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S21IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S21IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S21IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S21IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S21IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S21IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S21IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S21IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S21IDFE-XBPM:CM2ds:PositionOffsetX        / S21IDFE-XBPM:CM2ds:PositionOffsetX S21IDFE-XBPM:CM2ds:PositionOffsetY        / S21IDFE-XBPM:CM2ds:PositionOffsetY S21IDFE-XBPM:CM2ds:PositionScaleX         / S21IDFE-XBPM:CM2ds:PositionScaleX S21IDFE-XBPM:CM2ds:PositionScaleY         / S21IDFE-XBPM:CM2ds:PositionScaleY S21IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S21IDFE-XBPM:CM2us:Current1:MeanValue_RBV S21IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S21IDFE-XBPM:CM2us:Current2:MeanValue_RBV S21IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S21IDFE-XBPM:CM2us:Current3:MeanValue_RBV S21IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S21IDFE-XBPM:CM2us:Current4:MeanValue_RBV S21IDFE-XBPM:CM2us:PosX:MeanValue_RBV     / S21IDFE-XBPM:CM2us:PosX:MeanValue_RBV S21IDFE-XBPM:CM2us:PosY:MeanValue_RBV     / S21IDFE-XBPM:CM2us:PosY:MeanValue_RBV S21IDFE-XBPM:CM2us:PositionOffsetX        / S21IDFE-XBPM:CM2us:PositionOffsetX S21IDFE-XBPM:CM2us:PositionOffsetY        / S21IDFE-XBPM:CM2us:PositionOffsetY S21IDFE-XBPM:CM2us:PositionScaleX         / S21IDFE-XBPM:CM2us:PositionScaleX S21IDFE-XBPM:CM2us:PositionScaleY         / S21IDFE-XBPM:CM2us:PositionScaleY S21IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S21IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S21IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S21IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S21IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S21IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S21IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S21IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S21IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S21IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S21IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S21IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S21IDFE-XBPM:CM3ds:PositionOffsetX        / S21IDFE-XBPM:CM3ds:PositionOffsetX S21IDFE-XBPM:CM3ds:PositionOffsetY        / S21IDFE-XBPM:CM3ds:PositionOffsetY S21IDFE-XBPM:CM3ds:PositionScaleX         / S21IDFE-XBPM:CM3ds:PositionScaleX S21IDFE-XBPM:CM3ds:PositionScaleY         / S21IDFE-XBPM:CM3ds:PositionScaleY S21IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S21IDFE-XBPM:CM3us:Current1:MeanValue_RBV S21IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S21IDFE-XBPM:CM3us:Current2:MeanValue_RBV S21IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S21IDFE-XBPM:CM3us:Current3:MeanValue_RBV S21IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S21IDFE-XBPM:CM3us:Current4:MeanValue_RBV S21IDFE-XBPM:CM3us:PosX:MeanValue_RBV     / S21IDFE-XBPM:CM3us:PosX:MeanValue_RBV S21IDFE-XBPM:CM3us:PosY:MeanValue_RBV     / S21IDFE-XBPM:CM3us:PosY:MeanValue_RBV S21IDFE-XBPM:CM3us:PositionOffsetX        / S21IDFE-XBPM:CM3us:PositionOffsetX S21IDFE-XBPM:CM3us:PositionOffsetY        / S21IDFE-XBPM:CM3us:PositionOffsetY S21IDFE-XBPM:CM3us:PositionScaleX         / S21IDFE-XBPM:CM3us:PositionScaleX S21IDFE-XBPM:CM3us:PositionScaleY         / S21IDFE-XBPM:CM3us:PositionScaleY S21IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S21IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S21IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S21IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S21IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S21IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S21IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S21IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S21IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S21IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S21IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S21IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S21IDFE-XBPM:CM4ds:PositionOffsetX        / S21IDFE-XBPM:CM4ds:PositionOffsetX S21IDFE-XBPM:CM4ds:PositionOffsetY        / S21IDFE-XBPM:CM4ds:PositionOffsetY S21IDFE-XBPM:CM4ds:PositionScaleX         / S21IDFE-XBPM:CM4ds:PositionScaleX S21IDFE-XBPM:CM4ds:PositionScaleY         / S21IDFE-XBPM:CM4ds:PositionScaleY S21IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S21IDFE-XBPM:CM4us:Current1:MeanValue_RBV S21IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S21IDFE-XBPM:CM4us:Current2:MeanValue_RBV S21IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S21IDFE-XBPM:CM4us:Current3:MeanValue_RBV S21IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S21IDFE-XBPM:CM4us:Current4:MeanValue_RBV S21IDFE-XBPM:CM4us:PosX:MeanValue_RBV     / S21IDFE-XBPM:CM4us:PosX:MeanValue_RBV S21IDFE-XBPM:CM4us:PosY:MeanValue_RBV     / S21IDFE-XBPM:CM4us:PosY:MeanValue_RBV S21IDFE-XBPM:CM4us:PositionOffsetX        / S21IDFE-XBPM:CM4us:PositionOffsetX S21IDFE-XBPM:CM4us:PositionOffsetY        / S21IDFE-XBPM:CM4us:PositionOffsetY S21IDFE-XBPM:CM4us:PositionScaleX         / S21IDFE-XBPM:CM4us:PositionScaleX S21IDFE-XBPM:CM4us:PositionScaleY         / S21IDFE-XBPM:CM4us:PositionScaleY S21IDFE-XBPM:P1ds:BMcUsedM                / S21IDFE-XBPM:P1ds:BMcUsedM S21IDFE-XBPM:P1ds:GapUsedC                / S21IDFE-XBPM:P1ds:GapUsedC S21IDFE-XBPM:P1ds:Wx1UsedM                / S21IDFE-XBPM:P1ds:Wx1UsedM S21IDFE-XBPM:P1ds:Wx2UsedM                / S21IDFE-XBPM:P1ds:Wx2UsedM S21IDFE-XBPM:P1ds:Wx3UsedM                / S21IDFE-XBPM:P1ds:Wx3UsedM S21IDFE-XBPM:P1ds:Wy1UsedM                / S21IDFE-XBPM:P1ds:Wy1UsedM S21IDFE-XBPM:P1ds:Wy2UsedM                / S21IDFE-XBPM:P1ds:Wy2UsedM S21IDFE-XBPM:P1ds:Wy3UsedM                / S21IDFE-XBPM:P1ds:Wy3UsedM S21IDFE-XBPM:P1ds:x                       / S21IDFE-XBPM:P1ds:x S21IDFE-XBPM:P1ds:x:CalFactor1M           / S21IDFE-XBPM:P1ds:x:CalFactor1M S21IDFE-XBPM:P1ds:x:CalFactor2M           / S21IDFE-XBPM:P1ds:x:CalFactor2M S21IDFE-XBPM:P1ds:x:LowPass1sM            / S21IDFE-XBPM:P1ds:x:LowPass1sM S21IDFE-XBPM:P1ds:x:LowPass8sM            / S21IDFE-XBPM:P1ds:x:LowPass8sM S21IDFE-XBPM:P1ds:x:LowPass64sM           / S21IDFE-XBPM:P1ds:x:LowPass64sM S21IDFE-XBPM:P1ds:x:Offset1M              / S21IDFE-XBPM:P1ds:x:Offset1M S21IDFE-XBPM:P1ds:x:Offset2M              / S21IDFE-XBPM:P1ds:x:Offset2M S21IDFE-XBPM:P1ds:x:ResolutionM           / S21IDFE-XBPM:P1ds:x:ResolutionM S21IDFE-XBPM:P1ds:x:Resolution1sM         / S21IDFE-XBPM:P1ds:x:Resolution1sM S21IDFE-XBPM:P1ds:x:Resolution8sM         / S21IDFE-XBPM:P1ds:x:Resolution8sM S21IDFE-XBPM:P1ds:x:Resolution64sM        / S21IDFE-XBPM:P1ds:x:Resolution64sM S21IDFE-XBPM:P1ds:x:StdDevM               / S21IDFE-XBPM:P1ds:x:StdDevM S21IDFE-XBPM:P1ds:x:StdDev1sM             / S21IDFE-XBPM:P1ds:x:StdDev1sM S21IDFE-XBPM:P1ds:x:StdDev8sM             / S21IDFE-XBPM:P1ds:x:StdDev8sM S21IDFE-XBPM:P1ds:x:StdDev64sM            / S21IDFE-XBPM:P1ds:x:StdDev64sM S21IDFE-XBPM:P1ds:x1:LowPass1sM           / S21IDFE-XBPM:P1ds:x1:LowPass1sM S21IDFE-XBPM:P1ds:x1:LowPass8sM           / S21IDFE-XBPM:P1ds:x1:LowPass8sM S21IDFE-XBPM:P1ds:x1:LowPass64sM          / S21IDFE-XBPM:P1ds:x1:LowPass64sM S21IDFE-XBPM:P1ds:x2:LowPass1sM           / S21IDFE-XBPM:P1ds:x2:LowPass1sM S21IDFE-XBPM:P1ds:x2:LowPass8sM           / S21IDFE-XBPM:P1ds:x2:LowPass8sM S21IDFE-XBPM:P1ds:x2:LowPass64sM          / S21IDFE-XBPM:P1ds:x2:LowPass64sM S21IDFE-XBPM:P1ds:y                       / S21IDFE-XBPM:P1ds:y S21IDFE-XBPM:P1ds:y:CalFactor1M           / S21IDFE-XBPM:P1ds:y:CalFactor1M S21IDFE-XBPM:P1ds:y:CalFactor2M           / S21IDFE-XBPM:P1ds:y:CalFactor2M S21IDFE-XBPM:P1ds:y:LowPass1sM            / S21IDFE-XBPM:P1ds:y:LowPass1sM S21IDFE-XBPM:P1ds:y:LowPass8sM            / S21IDFE-XBPM:P1ds:y:LowPass8sM S21IDFE-XBPM:P1ds:y:LowPass64sM           / S21IDFE-XBPM:P1ds:y:LowPass64sM S21IDFE-XBPM:P1ds:y:Offset1M              / S21IDFE-XBPM:P1ds:y:Offset1M S21IDFE-XBPM:P1ds:y:Offset2M              / S21IDFE-XBPM:P1ds:y:Offset2M S21IDFE-XBPM:P1ds:y:ResolutionM           / S21IDFE-XBPM:P1ds:y:ResolutionM S21IDFE-XBPM:P1ds:y:Resolution1sM         / S21IDFE-XBPM:P1ds:y:Resolution1sM S21IDFE-XBPM:P1ds:y:Resolution8sM         / S21IDFE-XBPM:P1ds:y:Resolution8sM S21IDFE-XBPM:P1ds:y:Resolution64sM        / S21IDFE-XBPM:P1ds:y:Resolution64sM S21IDFE-XBPM:P1ds:y:StdDevM               / S21IDFE-XBPM:P1ds:y:StdDevM S21IDFE-XBPM:P1ds:y:StdDev1sM             / S21IDFE-XBPM:P1ds:y:StdDev1sM S21IDFE-XBPM:P1ds:y:StdDev8sM             / S21IDFE-XBPM:P1ds:y:StdDev8sM S21IDFE-XBPM:P1ds:y:StdDev64sM            / S21IDFE-XBPM:P1ds:y:StdDev64sM S21IDFE-XBPM:P1ds:y1:LowPass1sM           / S21IDFE-XBPM:P1ds:y1:LowPass1sM S21IDFE-XBPM:P1ds:y1:LowPass8sM           / S21IDFE-XBPM:P1ds:y1:LowPass8sM S21IDFE-XBPM:P1ds:y1:LowPass64sM          / S21IDFE-XBPM:P1ds:y1:LowPass64sM S21IDFE-XBPM:P1ds:y2:LowPass1sM           / S21IDFE-XBPM:P1ds:y2:LowPass1sM S21IDFE-XBPM:P1ds:y2:LowPass8sM           / S21IDFE-XBPM:P1ds:y2:LowPass8sM S21IDFE-XBPM:P1ds:y2:LowPass64sM          / S21IDFE-XBPM:P1ds:y2:LowPass64sM S21IDFE-XBPM:P1us:BMcUsedM                / S21IDFE-XBPM:P1us:BMcUsedM S21IDFE-XBPM:P1us:GapUsedC                / S21IDFE-XBPM:P1us:GapUsedC S21IDFE-XBPM:P1us:Wx1UsedM                / S21IDFE-XBPM:P1us:Wx1UsedM S21IDFE-XBPM:P1us:Wx2UsedM                / S21IDFE-XBPM:P1us:Wx2UsedM S21IDFE-XBPM:P1us:Wx3UsedM                / S21IDFE-XBPM:P1us:Wx3UsedM S21IDFE-XBPM:P1us:Wy1UsedM                / S21IDFE-XBPM:P1us:Wy1UsedM S21IDFE-XBPM:P1us:Wy2UsedM                / S21IDFE-XBPM:P1us:Wy2UsedM S21IDFE-XBPM:P1us:Wy3UsedM                / S21IDFE-XBPM:P1us:Wy3UsedM S21IDFE-XBPM:P1us:x                       / S21IDFE-XBPM:P1us:x S21IDFE-XBPM:P1us:x:CalFactor1M           / S21IDFE-XBPM:P1us:x:CalFactor1M S21IDFE-XBPM:P1us:x:CalFactor2M           / S21IDFE-XBPM:P1us:x:CalFactor2M S21IDFE-XBPM:P1us:x:LowPass1sM            / S21IDFE-XBPM:P1us:x:LowPass1sM S21IDFE-XBPM:P1us:x:LowPass8sM            / S21IDFE-XBPM:P1us:x:LowPass8sM S21IDFE-XBPM:P1us:x:LowPass64sM           / S21IDFE-XBPM:P1us:x:LowPass64sM S21IDFE-XBPM:P1us:x:Offset1M              / S21IDFE-XBPM:P1us:x:Offset1M S21IDFE-XBPM:P1us:x:Offset2M              / S21IDFE-XBPM:P1us:x:Offset2M S21IDFE-XBPM:P1us:x:ResolutionM           / S21IDFE-XBPM:P1us:x:ResolutionM S21IDFE-XBPM:P1us:x:Resolution1sM         / S21IDFE-XBPM:P1us:x:Resolution1sM S21IDFE-XBPM:P1us:x:Resolution8sM         / S21IDFE-XBPM:P1us:x:Resolution8sM S21IDFE-XBPM:P1us:x:Resolution64sM        / S21IDFE-XBPM:P1us:x:Resolution64sM S21IDFE-XBPM:P1us:x:StdDevM               / S21IDFE-XBPM:P1us:x:StdDevM S21IDFE-XBPM:P1us:x:StdDev1sM             / S21IDFE-XBPM:P1us:x:StdDev1sM S21IDFE-XBPM:P1us:x:StdDev8sM             / S21IDFE-XBPM:P1us:x:StdDev8sM S21IDFE-XBPM:P1us:x:StdDev64sM            / S21IDFE-XBPM:P1us:x:StdDev64sM S21IDFE-XBPM:P1us:x1:LowPass1sM           / S21IDFE-XBPM:P1us:x1:LowPass1sM S21IDFE-XBPM:P1us:x1:LowPass8sM           / S21IDFE-XBPM:P1us:x1:LowPass8sM S21IDFE-XBPM:P1us:x1:LowPass64sM          / S21IDFE-XBPM:P1us:x1:LowPass64sM S21IDFE-XBPM:P1us:x2:LowPass1sM           / S21IDFE-XBPM:P1us:x2:LowPass1sM S21IDFE-XBPM:P1us:x2:LowPass8sM           / S21IDFE-XBPM:P1us:x2:LowPass8sM S21IDFE-XBPM:P1us:x2:LowPass64sM          / S21IDFE-XBPM:P1us:x2:LowPass64sM S21IDFE-XBPM:P1us:y                       / S21IDFE-XBPM:P1us:y S21IDFE-XBPM:P1us:y:CalFactor1M           / S21IDFE-XBPM:P1us:y:CalFactor1M S21IDFE-XBPM:P1us:y:CalFactor2M           / S21IDFE-XBPM:P1us:y:CalFactor2M S21IDFE-XBPM:P1us:y:LowPass1sM            / S21IDFE-XBPM:P1us:y:LowPass1sM S21IDFE-XBPM:P1us:y:LowPass8sM            / S21IDFE-XBPM:P1us:y:LowPass8sM S21IDFE-XBPM:P1us:y:LowPass64sM           / S21IDFE-XBPM:P1us:y:LowPass64sM S21IDFE-XBPM:P1us:y:Offset1M              / S21IDFE-XBPM:P1us:y:Offset1M S21IDFE-XBPM:P1us:y:Offset2M              / S21IDFE-XBPM:P1us:y:Offset2M S21IDFE-XBPM:P1us:y:ResolutionM           / S21IDFE-XBPM:P1us:y:ResolutionM S21IDFE-XBPM:P1us:y:Resolution1sM         / S21IDFE-XBPM:P1us:y:Resolution1sM S21IDFE-XBPM:P1us:y:Resolution8sM         / S21IDFE-XBPM:P1us:y:Resolution8sM S21IDFE-XBPM:P1us:y:Resolution64sM        / S21IDFE-XBPM:P1us:y:Resolution64sM S21IDFE-XBPM:P1us:y:StdDevM               / S21IDFE-XBPM:P1us:y:StdDevM S21IDFE-XBPM:P1us:y:StdDev1sM             / S21IDFE-XBPM:P1us:y:StdDev1sM S21IDFE-XBPM:P1us:y:StdDev8sM             / S21IDFE-XBPM:P1us:y:StdDev8sM S21IDFE-XBPM:P1us:y:StdDev64sM            / S21IDFE-XBPM:P1us:y:StdDev64sM S21IDFE-XBPM:P1us:y1:LowPass1sM           / S21IDFE-XBPM:P1us:y1:LowPass1sM S21IDFE-XBPM:P1us:y1:LowPass8sM           / S21IDFE-XBPM:P1us:y1:LowPass8sM S21IDFE-XBPM:P1us:y1:LowPass64sM          / S21IDFE-XBPM:P1us:y1:LowPass64sM S21IDFE-XBPM:P1us:y2:LowPass1sM           / S21IDFE-XBPM:P1us:y2:LowPass1sM S21IDFE-XBPM:P1us:y2:LowPass8sM           / S21IDFE-XBPM:P1us:y2:LowPass8sM S21IDFE-XBPM:P1us:y2:LowPass64sM          / S21IDFE-XBPM:P1us:y2:LowPass64sM S21IDFE-XBPM:P2ds:GapUsedC                / S21IDFE-XBPM:P2ds:GapUsedC S21IDFE-XBPM:P2ds:XCalM                   / S21IDFE-XBPM:P2ds:XCalM S21IDFE-XBPM:P2ds:YCalM                   / S21IDFE-XBPM:P2ds:YCalM S21IDFE-XBPM:P2ds:x:CalFactorM            / S21IDFE-XBPM:P2ds:x:CalFactorM S21IDFE-XBPM:P2ds:x:OffsetM               / S21IDFE-XBPM:P2ds:x:OffsetM S21IDFE-XBPM:P2ds:y:CalFactorM            / S21IDFE-XBPM:P2ds:y:CalFactorM S21IDFE-XBPM:P2ds:y:OffsetM               / S21IDFE-XBPM:P2ds:y:OffsetM S21IDFE-XBPM:P2us:GapUsedC                / S21IDFE-XBPM:P2us:GapUsedC S21IDFE-XBPM:P2us:XCalM                   / S21IDFE-XBPM:P2us:XCalM S21IDFE-XBPM:P2us:YCalM                   / S21IDFE-XBPM:P2us:YCalM S21IDFE-XBPM:P2us:x:CalFactorM            / S21IDFE-XBPM:P2us:x:CalFactorM S21IDFE-XBPM:P2us:x:OffsetM               / S21IDFE-XBPM:P2us:x:OffsetM S21IDFE-XBPM:P2us:y:CalFactorM            / S21IDFE-XBPM:P2us:y:CalFactorM S21IDFE-XBPM:P2us:y:OffsetM               / S21IDFE-XBPM:P2us:y:OffsetM S22IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S22IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S22IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S22IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S22IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S22IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S22IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S22IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S22IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S22IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S22IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S22IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S22IDFE-XBPM:CM1ds:PositionOffsetX        / S22IDFE-XBPM:CM1ds:PositionOffsetX S22IDFE-XBPM:CM1ds:PositionOffsetY        / S22IDFE-XBPM:CM1ds:PositionOffsetY S22IDFE-XBPM:CM1ds:PositionScaleX         / S22IDFE-XBPM:CM1ds:PositionScaleX S22IDFE-XBPM:CM1ds:PositionScaleY         / S22IDFE-XBPM:CM1ds:PositionScaleY S22IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S22IDFE-XBPM:CM1us:Current1:MeanValue_RBV S22IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S22IDFE-XBPM:CM1us:Current2:MeanValue_RBV S22IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S22IDFE-XBPM:CM1us:Current3:MeanValue_RBV S22IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S22IDFE-XBPM:CM1us:Current4:MeanValue_RBV S22IDFE-XBPM:CM1us:PosX:MeanValue_RBV     / S22IDFE-XBPM:CM1us:PosX:MeanValue_RBV S22IDFE-XBPM:CM1us:PosY:MeanValue_RBV     / S22IDFE-XBPM:CM1us:PosY:MeanValue_RBV S22IDFE-XBPM:CM1us:PositionOffsetX        / S22IDFE-XBPM:CM1us:PositionOffsetX S22IDFE-XBPM:CM1us:PositionOffsetY        / S22IDFE-XBPM:CM1us:PositionOffsetY S22IDFE-XBPM:CM1us:PositionScaleX         / S22IDFE-XBPM:CM1us:PositionScaleX S22IDFE-XBPM:CM1us:PositionScaleY         / S22IDFE-XBPM:CM1us:PositionScaleY S22IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S22IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S22IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S22IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S22IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S22IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S22IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S22IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S22IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S22IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S22IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S22IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S22IDFE-XBPM:CM2ds:PositionOffsetX        / S22IDFE-XBPM:CM2ds:PositionOffsetX S22IDFE-XBPM:CM2ds:PositionOffsetY        / S22IDFE-XBPM:CM2ds:PositionOffsetY S22IDFE-XBPM:CM2ds:PositionScaleX         / S22IDFE-XBPM:CM2ds:PositionScaleX S22IDFE-XBPM:CM2ds:PositionScaleY         / S22IDFE-XBPM:CM2ds:PositionScaleY S22IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S22IDFE-XBPM:CM2us:Current1:MeanValue_RBV S22IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S22IDFE-XBPM:CM2us:Current2:MeanValue_RBV S22IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S22IDFE-XBPM:CM2us:Current3:MeanValue_RBV S22IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S22IDFE-XBPM:CM2us:Current4:MeanValue_RBV S22IDFE-XBPM:CM2us:PosX:MeanValue_RBV     / S22IDFE-XBPM:CM2us:PosX:MeanValue_RBV S22IDFE-XBPM:CM2us:PosY:MeanValue_RBV     / S22IDFE-XBPM:CM2us:PosY:MeanValue_RBV S22IDFE-XBPM:CM2us:PositionOffsetX        / S22IDFE-XBPM:CM2us:PositionOffsetX S22IDFE-XBPM:CM2us:PositionOffsetY        / S22IDFE-XBPM:CM2us:PositionOffsetY S22IDFE-XBPM:CM2us:PositionScaleX         / S22IDFE-XBPM:CM2us:PositionScaleX S22IDFE-XBPM:CM2us:PositionScaleY         / S22IDFE-XBPM:CM2us:PositionScaleY S22IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S22IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S22IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S22IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S22IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S22IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S22IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S22IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S22IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S22IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S22IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S22IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S22IDFE-XBPM:CM3ds:PositionOffsetX        / S22IDFE-XBPM:CM3ds:PositionOffsetX S22IDFE-XBPM:CM3ds:PositionOffsetY        / S22IDFE-XBPM:CM3ds:PositionOffsetY S22IDFE-XBPM:CM3ds:PositionScaleX         / S22IDFE-XBPM:CM3ds:PositionScaleX S22IDFE-XBPM:CM3ds:PositionScaleY         / S22IDFE-XBPM:CM3ds:PositionScaleY S22IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S22IDFE-XBPM:CM3us:Current1:MeanValue_RBV S22IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S22IDFE-XBPM:CM3us:Current2:MeanValue_RBV S22IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S22IDFE-XBPM:CM3us:Current3:MeanValue_RBV S22IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S22IDFE-XBPM:CM3us:Current4:MeanValue_RBV S22IDFE-XBPM:CM3us:PosX:MeanValue_RBV     / S22IDFE-XBPM:CM3us:PosX:MeanValue_RBV S22IDFE-XBPM:CM3us:PosY:MeanValue_RBV     / S22IDFE-XBPM:CM3us:PosY:MeanValue_RBV S22IDFE-XBPM:CM3us:PositionOffsetX        / S22IDFE-XBPM:CM3us:PositionOffsetX S22IDFE-XBPM:CM3us:PositionOffsetY        / S22IDFE-XBPM:CM3us:PositionOffsetY S22IDFE-XBPM:CM3us:PositionScaleX         / S22IDFE-XBPM:CM3us:PositionScaleX S22IDFE-XBPM:CM3us:PositionScaleY         / S22IDFE-XBPM:CM3us:PositionScaleY S22IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S22IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S22IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S22IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S22IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S22IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S22IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S22IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S22IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S22IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S22IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S22IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S22IDFE-XBPM:CM4ds:PositionOffsetX        / S22IDFE-XBPM:CM4ds:PositionOffsetX S22IDFE-XBPM:CM4ds:PositionOffsetY        / S22IDFE-XBPM:CM4ds:PositionOffsetY S22IDFE-XBPM:CM4ds:PositionScaleX         / S22IDFE-XBPM:CM4ds:PositionScaleX S22IDFE-XBPM:CM4ds:PositionScaleY         / S22IDFE-XBPM:CM4ds:PositionScaleY S22IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S22IDFE-XBPM:CM4us:Current1:MeanValue_RBV S22IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S22IDFE-XBPM:CM4us:Current2:MeanValue_RBV S22IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S22IDFE-XBPM:CM4us:Current3:MeanValue_RBV S22IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S22IDFE-XBPM:CM4us:Current4:MeanValue_RBV S22IDFE-XBPM:CM4us:PosX:MeanValue_RBV     / S22IDFE-XBPM:CM4us:PosX:MeanValue_RBV S22IDFE-XBPM:CM4us:PosY:MeanValue_RBV     / S22IDFE-XBPM:CM4us:PosY:MeanValue_RBV S22IDFE-XBPM:CM4us:PositionOffsetX        / S22IDFE-XBPM:CM4us:PositionOffsetX S22IDFE-XBPM:CM4us:PositionOffsetY        / S22IDFE-XBPM:CM4us:PositionOffsetY S22IDFE-XBPM:CM4us:PositionScaleX         / S22IDFE-XBPM:CM4us:PositionScaleX S22IDFE-XBPM:CM4us:PositionScaleY         / S22IDFE-XBPM:CM4us:PositionScaleY S22IDFE-XBPM:P1ds:BMcUsedM                / S22IDFE-XBPM:P1ds:BMcUsedM S22IDFE-XBPM:P1ds:GapUsedC                / S22IDFE-XBPM:P1ds:GapUsedC S22IDFE-XBPM:P1ds:Wx1UsedM                / S22IDFE-XBPM:P1ds:Wx1UsedM S22IDFE-XBPM:P1ds:Wx2UsedM                / S22IDFE-XBPM:P1ds:Wx2UsedM S22IDFE-XBPM:P1ds:Wx3UsedM                / S22IDFE-XBPM:P1ds:Wx3UsedM S22IDFE-XBPM:P1ds:Wy1UsedM                / S22IDFE-XBPM:P1ds:Wy1UsedM S22IDFE-XBPM:P1ds:Wy2UsedM                / S22IDFE-XBPM:P1ds:Wy2UsedM S22IDFE-XBPM:P1ds:Wy3UsedM                / S22IDFE-XBPM:P1ds:Wy3UsedM S22IDFE-XBPM:P1ds:x                       / S22IDFE-XBPM:P1ds:x S22IDFE-XBPM:P1ds:x:CalFactor1M           / S22IDFE-XBPM:P1ds:x:CalFactor1M S22IDFE-XBPM:P1ds:x:CalFactor2M           / S22IDFE-XBPM:P1ds:x:CalFactor2M S22IDFE-XBPM:P1ds:x:LowPass1sM            / S22IDFE-XBPM:P1ds:x:LowPass1sM S22IDFE-XBPM:P1ds:x:LowPass8sM            / S22IDFE-XBPM:P1ds:x:LowPass8sM S22IDFE-XBPM:P1ds:x:LowPass64sM           / S22IDFE-XBPM:P1ds:x:LowPass64sM S22IDFE-XBPM:P1ds:x:Offset1M              / S22IDFE-XBPM:P1ds:x:Offset1M S22IDFE-XBPM:P1ds:x:Offset2M              / S22IDFE-XBPM:P1ds:x:Offset2M S22IDFE-XBPM:P1ds:x:ResolutionM           / S22IDFE-XBPM:P1ds:x:ResolutionM S22IDFE-XBPM:P1ds:x:Resolution1sM         / S22IDFE-XBPM:P1ds:x:Resolution1sM S22IDFE-XBPM:P1ds:x:Resolution8sM         / S22IDFE-XBPM:P1ds:x:Resolution8sM S22IDFE-XBPM:P1ds:x:Resolution64sM        / S22IDFE-XBPM:P1ds:x:Resolution64sM S22IDFE-XBPM:P1ds:x:StdDevM               / S22IDFE-XBPM:P1ds:x:StdDevM S22IDFE-XBPM:P1ds:x:StdDev1sM             / S22IDFE-XBPM:P1ds:x:StdDev1sM S22IDFE-XBPM:P1ds:x:StdDev8sM             / S22IDFE-XBPM:P1ds:x:StdDev8sM S22IDFE-XBPM:P1ds:x:StdDev64sM            / S22IDFE-XBPM:P1ds:x:StdDev64sM S22IDFE-XBPM:P1ds:x1:LowPass1sM           / S22IDFE-XBPM:P1ds:x1:LowPass1sM S22IDFE-XBPM:P1ds:x1:LowPass8sM           / S22IDFE-XBPM:P1ds:x1:LowPass8sM S22IDFE-XBPM:P1ds:x1:LowPass64sM          / S22IDFE-XBPM:P1ds:x1:LowPass64sM S22IDFE-XBPM:P1ds:x2:LowPass1sM           / S22IDFE-XBPM:P1ds:x2:LowPass1sM S22IDFE-XBPM:P1ds:x2:LowPass8sM           / S22IDFE-XBPM:P1ds:x2:LowPass8sM S22IDFE-XBPM:P1ds:x2:LowPass64sM          / S22IDFE-XBPM:P1ds:x2:LowPass64sM S22IDFE-XBPM:P1ds:y                       / S22IDFE-XBPM:P1ds:y S22IDFE-XBPM:P1ds:y:CalFactor1M           / S22IDFE-XBPM:P1ds:y:CalFactor1M S22IDFE-XBPM:P1ds:y:CalFactor2M           / S22IDFE-XBPM:P1ds:y:CalFactor2M S22IDFE-XBPM:P1ds:y:LowPass1sM            / S22IDFE-XBPM:P1ds:y:LowPass1sM S22IDFE-XBPM:P1ds:y:LowPass8sM            / S22IDFE-XBPM:P1ds:y:LowPass8sM S22IDFE-XBPM:P1ds:y:LowPass64sM           / S22IDFE-XBPM:P1ds:y:LowPass64sM S22IDFE-XBPM:P1ds:y:Offset1M              / S22IDFE-XBPM:P1ds:y:Offset1M S22IDFE-XBPM:P1ds:y:Offset2M              / S22IDFE-XBPM:P1ds:y:Offset2M S22IDFE-XBPM:P1ds:y:ResolutionM           / S22IDFE-XBPM:P1ds:y:ResolutionM S22IDFE-XBPM:P1ds:y:Resolution1sM         / S22IDFE-XBPM:P1ds:y:Resolution1sM S22IDFE-XBPM:P1ds:y:Resolution8sM         / S22IDFE-XBPM:P1ds:y:Resolution8sM S22IDFE-XBPM:P1ds:y:Resolution64sM        / S22IDFE-XBPM:P1ds:y:Resolution64sM S22IDFE-XBPM:P1ds:y:StdDevM               / S22IDFE-XBPM:P1ds:y:StdDevM S22IDFE-XBPM:P1ds:y:StdDev1sM             / S22IDFE-XBPM:P1ds:y:StdDev1sM S22IDFE-XBPM:P1ds:y:StdDev8sM             / S22IDFE-XBPM:P1ds:y:StdDev8sM S22IDFE-XBPM:P1ds:y:StdDev64sM            / S22IDFE-XBPM:P1ds:y:StdDev64sM S22IDFE-XBPM:P1ds:y1:LowPass1sM           / S22IDFE-XBPM:P1ds:y1:LowPass1sM S22IDFE-XBPM:P1ds:y1:LowPass8sM           / S22IDFE-XBPM:P1ds:y1:LowPass8sM S22IDFE-XBPM:P1ds:y1:LowPass64sM          / S22IDFE-XBPM:P1ds:y1:LowPass64sM S22IDFE-XBPM:P1ds:y2:LowPass1sM           / S22IDFE-XBPM:P1ds:y2:LowPass1sM S22IDFE-XBPM:P1ds:y2:LowPass8sM           / S22IDFE-XBPM:P1ds:y2:LowPass8sM S22IDFE-XBPM:P1ds:y2:LowPass64sM          / S22IDFE-XBPM:P1ds:y2:LowPass64sM S22IDFE-XBPM:P1us:BMcUsedM                / S22IDFE-XBPM:P1us:BMcUsedM S22IDFE-XBPM:P1us:GapUsedC                / S22IDFE-XBPM:P1us:GapUsedC S22IDFE-XBPM:P1us:Wx1UsedM                / S22IDFE-XBPM:P1us:Wx1UsedM S22IDFE-XBPM:P1us:Wx2UsedM                / S22IDFE-XBPM:P1us:Wx2UsedM S22IDFE-XBPM:P1us:Wx3UsedM                / S22IDFE-XBPM:P1us:Wx3UsedM S22IDFE-XBPM:P1us:Wy1UsedM                / S22IDFE-XBPM:P1us:Wy1UsedM S22IDFE-XBPM:P1us:Wy2UsedM                / S22IDFE-XBPM:P1us:Wy2UsedM S22IDFE-XBPM:P1us:Wy3UsedM                / S22IDFE-XBPM:P1us:Wy3UsedM S22IDFE-XBPM:P1us:x                       / S22IDFE-XBPM:P1us:x S22IDFE-XBPM:P1us:x:CalFactor1M           / S22IDFE-XBPM:P1us:x:CalFactor1M S22IDFE-XBPM:P1us:x:CalFactor2M           / S22IDFE-XBPM:P1us:x:CalFactor2M S22IDFE-XBPM:P1us:x:LowPass1sM            / S22IDFE-XBPM:P1us:x:LowPass1sM S22IDFE-XBPM:P1us:x:LowPass8sM            / S22IDFE-XBPM:P1us:x:LowPass8sM S22IDFE-XBPM:P1us:x:LowPass64sM           / S22IDFE-XBPM:P1us:x:LowPass64sM S22IDFE-XBPM:P1us:x:Offset1M              / S22IDFE-XBPM:P1us:x:Offset1M S22IDFE-XBPM:P1us:x:Offset2M              / S22IDFE-XBPM:P1us:x:Offset2M S22IDFE-XBPM:P1us:x:ResolutionM           / S22IDFE-XBPM:P1us:x:ResolutionM S22IDFE-XBPM:P1us:x:Resolution1sM         / S22IDFE-XBPM:P1us:x:Resolution1sM S22IDFE-XBPM:P1us:x:Resolution8sM         / S22IDFE-XBPM:P1us:x:Resolution8sM S22IDFE-XBPM:P1us:x:Resolution64sM        / S22IDFE-XBPM:P1us:x:Resolution64sM S22IDFE-XBPM:P1us:x:StdDevM               / S22IDFE-XBPM:P1us:x:StdDevM S22IDFE-XBPM:P1us:x:StdDev1sM             / S22IDFE-XBPM:P1us:x:StdDev1sM S22IDFE-XBPM:P1us:x:StdDev8sM             / S22IDFE-XBPM:P1us:x:StdDev8sM S22IDFE-XBPM:P1us:x:StdDev64sM            / S22IDFE-XBPM:P1us:x:StdDev64sM S22IDFE-XBPM:P1us:x1:LowPass1sM           / S22IDFE-XBPM:P1us:x1:LowPass1sM S22IDFE-XBPM:P1us:x1:LowPass8sM           / S22IDFE-XBPM:P1us:x1:LowPass8sM S22IDFE-XBPM:P1us:x1:LowPass64sM          / S22IDFE-XBPM:P1us:x1:LowPass64sM S22IDFE-XBPM:P1us:x2:LowPass1sM           / S22IDFE-XBPM:P1us:x2:LowPass1sM S22IDFE-XBPM:P1us:x2:LowPass8sM           / S22IDFE-XBPM:P1us:x2:LowPass8sM S22IDFE-XBPM:P1us:x2:LowPass64sM          / S22IDFE-XBPM:P1us:x2:LowPass64sM S22IDFE-XBPM:P1us:y                       / S22IDFE-XBPM:P1us:y S22IDFE-XBPM:P1us:y:CalFactor1M           / S22IDFE-XBPM:P1us:y:CalFactor1M S22IDFE-XBPM:P1us:y:CalFactor2M           / S22IDFE-XBPM:P1us:y:CalFactor2M S22IDFE-XBPM:P1us:y:LowPass1sM            / S22IDFE-XBPM:P1us:y:LowPass1sM S22IDFE-XBPM:P1us:y:LowPass8sM            / S22IDFE-XBPM:P1us:y:LowPass8sM S22IDFE-XBPM:P1us:y:LowPass64sM           / S22IDFE-XBPM:P1us:y:LowPass64sM S22IDFE-XBPM:P1us:y:Offset1M              / S22IDFE-XBPM:P1us:y:Offset1M S22IDFE-XBPM:P1us:y:Offset2M              / S22IDFE-XBPM:P1us:y:Offset2M S22IDFE-XBPM:P1us:y:ResolutionM           / S22IDFE-XBPM:P1us:y:ResolutionM S22IDFE-XBPM:P1us:y:Resolution1sM         / S22IDFE-XBPM:P1us:y:Resolution1sM S22IDFE-XBPM:P1us:y:Resolution8sM         / S22IDFE-XBPM:P1us:y:Resolution8sM S22IDFE-XBPM:P1us:y:Resolution64sM        / S22IDFE-XBPM:P1us:y:Resolution64sM S22IDFE-XBPM:P1us:y:StdDevM               / S22IDFE-XBPM:P1us:y:StdDevM S22IDFE-XBPM:P1us:y:StdDev1sM             / S22IDFE-XBPM:P1us:y:StdDev1sM S22IDFE-XBPM:P1us:y:StdDev8sM             / S22IDFE-XBPM:P1us:y:StdDev8sM S22IDFE-XBPM:P1us:y:StdDev64sM            / S22IDFE-XBPM:P1us:y:StdDev64sM S22IDFE-XBPM:P1us:y1:LowPass1sM           / S22IDFE-XBPM:P1us:y1:LowPass1sM S22IDFE-XBPM:P1us:y1:LowPass8sM           / S22IDFE-XBPM:P1us:y1:LowPass8sM S22IDFE-XBPM:P1us:y1:LowPass64sM          / S22IDFE-XBPM:P1us:y1:LowPass64sM S22IDFE-XBPM:P1us:y2:LowPass1sM           / S22IDFE-XBPM:P1us:y2:LowPass1sM S22IDFE-XBPM:P1us:y2:LowPass8sM           / S22IDFE-XBPM:P1us:y2:LowPass8sM S22IDFE-XBPM:P1us:y2:LowPass64sM          / S22IDFE-XBPM:P1us:y2:LowPass64sM S22IDFE-XBPM:P2ds:GapUsedC                / S22IDFE-XBPM:P2ds:GapUsedC S22IDFE-XBPM:P2ds:XCalM                   / S22IDFE-XBPM:P2ds:XCalM S22IDFE-XBPM:P2ds:YCalM                   / S22IDFE-XBPM:P2ds:YCalM S22IDFE-XBPM:P2ds:x:CalFactorM            / S22IDFE-XBPM:P2ds:x:CalFactorM S22IDFE-XBPM:P2ds:x:OffsetM               / S22IDFE-XBPM:P2ds:x:OffsetM S22IDFE-XBPM:P2ds:y:CalFactorM            / S22IDFE-XBPM:P2ds:y:CalFactorM S22IDFE-XBPM:P2ds:y:OffsetM               / S22IDFE-XBPM:P2ds:y:OffsetM S22IDFE-XBPM:P2us:GapUsedC                / S22IDFE-XBPM:P2us:GapUsedC S22IDFE-XBPM:P2us:XCalM                   / S22IDFE-XBPM:P2us:XCalM S22IDFE-XBPM:P2us:YCalM                   / S22IDFE-XBPM:P2us:YCalM S22IDFE-XBPM:P2us:x:CalFactorM            / S22IDFE-XBPM:P2us:x:CalFactorM S22IDFE-XBPM:P2us:x:OffsetM               / S22IDFE-XBPM:P2us:x:OffsetM S22IDFE-XBPM:P2us:y:CalFactorM            / S22IDFE-XBPM:P2us:y:CalFactorM S22IDFE-XBPM:P2us:y:OffsetM               / S22IDFE-XBPM:P2us:y:OffsetM S23BMFE-XBPM:P1:AM                        / S23BMFE-XBPM:P1:AM S23BMFE-XBPM:P1:BM                        / S23BMFE-XBPM:P1:BM S23BMFE-XBPM:P1:y                         / S23BMFE-XBPM:P1:y S23BMFE-XBPM:P1:y:LowPass1sM              / S23BMFE-XBPM:P1:y:LowPass1sM S23BMFE-XBPM:P1:y:LowPass8sM              / S23BMFE-XBPM:P1:y:LowPass8sM S23BMFE-XBPM:P1:y:LowPass64sM             / S23BMFE-XBPM:P1:y:LowPass64sM S23BMFE-XBPM:P1:y:StdDevM                 / S23BMFE-XBPM:P1:y:StdDevM S23BMFE-XBPM:P1:y:StdDev1sM               / S23BMFE-XBPM:P1:y:StdDev1sM S23BMFE-XBPM:P1:y:StdDev8sM               / S23BMFE-XBPM:P1:y:StdDev8sM S23BMFE-XBPM:P1:y:StdDev64sM              / S23BMFE-XBPM:P1:y:StdDev64sM S23BMFE-XBPM:P2:AM                        / S23BMFE-XBPM:P2:AM S23BMFE-XBPM:P2:BM                        / S23BMFE-XBPM:P2:BM S23BMFE-XBPM:P2:y                         / S23BMFE-XBPM:P2:y S23BMFE-XBPM:P2:y:LowPass1sM              / S23BMFE-XBPM:P2:y:LowPass1sM S23BMFE-XBPM:P2:y:LowPass8sM              / S23BMFE-XBPM:P2:y:LowPass8sM S23BMFE-XBPM:P2:y:LowPass64sM             / S23BMFE-XBPM:P2:y:LowPass64sM S23BMFE-XBPM:P2:y:StdDevM                 / S23BMFE-XBPM:P2:y:StdDevM S23BMFE-XBPM:P2:y:StdDev1sM               / S23BMFE-XBPM:P2:y:StdDev1sM S23BMFE-XBPM:P2:y:StdDev8sM               / S23BMFE-XBPM:P2:y:StdDev8sM S23BMFE-XBPM:P2:y:StdDev64sM              / S23BMFE-XBPM:P2:y:StdDev64sM S23IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S23IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S23IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S23IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S23IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S23IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S23IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S23IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S23IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S23IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S23IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S23IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S23IDFE-XBPM:CM1ds:PositionOffsetX        / S23IDFE-XBPM:CM1ds:PositionOffsetX S23IDFE-XBPM:CM1ds:PositionOffsetY        / S23IDFE-XBPM:CM1ds:PositionOffsetY S23IDFE-XBPM:CM1ds:PositionScaleX         / S23IDFE-XBPM:CM1ds:PositionScaleX S23IDFE-XBPM:CM1ds:PositionScaleY         / S23IDFE-XBPM:CM1ds:PositionScaleY S23IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S23IDFE-XBPM:CM1us:Current1:MeanValue_RBV S23IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S23IDFE-XBPM:CM1us:Current2:MeanValue_RBV S23IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S23IDFE-XBPM:CM1us:Current3:MeanValue_RBV S23IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S23IDFE-XBPM:CM1us:Current4:MeanValue_RBV S23IDFE-XBPM:CM1us:PosX:MeanValue_RBV     / S23IDFE-XBPM:CM1us:PosX:MeanValue_RBV S23IDFE-XBPM:CM1us:PosY:MeanValue_RBV     / S23IDFE-XBPM:CM1us:PosY:MeanValue_RBV S23IDFE-XBPM:CM1us:PositionOffsetX        / S23IDFE-XBPM:CM1us:PositionOffsetX S23IDFE-XBPM:CM1us:PositionOffsetY        / S23IDFE-XBPM:CM1us:PositionOffsetY S23IDFE-XBPM:CM1us:PositionScaleX         / S23IDFE-XBPM:CM1us:PositionScaleX S23IDFE-XBPM:CM1us:PositionScaleY         / S23IDFE-XBPM:CM1us:PositionScaleY S23IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S23IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S23IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S23IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S23IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S23IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S23IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S23IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S23IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S23IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S23IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S23IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S23IDFE-XBPM:CM2ds:PositionOffsetX        / S23IDFE-XBPM:CM2ds:PositionOffsetX S23IDFE-XBPM:CM2ds:PositionOffsetY        / S23IDFE-XBPM:CM2ds:PositionOffsetY S23IDFE-XBPM:CM2ds:PositionScaleX         / S23IDFE-XBPM:CM2ds:PositionScaleX S23IDFE-XBPM:CM2ds:PositionScaleY         / S23IDFE-XBPM:CM2ds:PositionScaleY S23IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S23IDFE-XBPM:CM2us:Current1:MeanValue_RBV S23IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S23IDFE-XBPM:CM2us:Current2:MeanValue_RBV S23IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S23IDFE-XBPM:CM2us:Current3:MeanValue_RBV S23IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S23IDFE-XBPM:CM2us:Current4:MeanValue_RBV S23IDFE-XBPM:CM2us:PosX:MeanValue_RBV     / S23IDFE-XBPM:CM2us:PosX:MeanValue_RBV S23IDFE-XBPM:CM2us:PosY:MeanValue_RBV     / S23IDFE-XBPM:CM2us:PosY:MeanValue_RBV S23IDFE-XBPM:CM2us:PositionOffsetX        / S23IDFE-XBPM:CM2us:PositionOffsetX S23IDFE-XBPM:CM2us:PositionOffsetY        / S23IDFE-XBPM:CM2us:PositionOffsetY S23IDFE-XBPM:CM2us:PositionScaleX         / S23IDFE-XBPM:CM2us:PositionScaleX S23IDFE-XBPM:CM2us:PositionScaleY         / S23IDFE-XBPM:CM2us:PositionScaleY S23IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S23IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S23IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S23IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S23IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S23IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S23IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S23IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S23IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S23IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S23IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S23IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S23IDFE-XBPM:CM3ds:PositionOffsetX        / S23IDFE-XBPM:CM3ds:PositionOffsetX S23IDFE-XBPM:CM3ds:PositionOffsetY        / S23IDFE-XBPM:CM3ds:PositionOffsetY S23IDFE-XBPM:CM3ds:PositionScaleX         / S23IDFE-XBPM:CM3ds:PositionScaleX S23IDFE-XBPM:CM3ds:PositionScaleY         / S23IDFE-XBPM:CM3ds:PositionScaleY S23IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S23IDFE-XBPM:CM3us:Current1:MeanValue_RBV S23IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S23IDFE-XBPM:CM3us:Current2:MeanValue_RBV S23IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S23IDFE-XBPM:CM3us:Current3:MeanValue_RBV S23IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S23IDFE-XBPM:CM3us:Current4:MeanValue_RBV S23IDFE-XBPM:CM3us:PosX:MeanValue_RBV     / S23IDFE-XBPM:CM3us:PosX:MeanValue_RBV S23IDFE-XBPM:CM3us:PosY:MeanValue_RBV     / S23IDFE-XBPM:CM3us:PosY:MeanValue_RBV S23IDFE-XBPM:CM3us:PositionOffsetX        / S23IDFE-XBPM:CM3us:PositionOffsetX S23IDFE-XBPM:CM3us:PositionOffsetY        / S23IDFE-XBPM:CM3us:PositionOffsetY S23IDFE-XBPM:CM3us:PositionScaleX         / S23IDFE-XBPM:CM3us:PositionScaleX S23IDFE-XBPM:CM3us:PositionScaleY         / S23IDFE-XBPM:CM3us:PositionScaleY S23IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S23IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S23IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S23IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S23IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S23IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S23IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S23IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S23IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S23IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S23IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S23IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S23IDFE-XBPM:CM4ds:PositionOffsetX        / S23IDFE-XBPM:CM4ds:PositionOffsetX S23IDFE-XBPM:CM4ds:PositionOffsetY        / S23IDFE-XBPM:CM4ds:PositionOffsetY S23IDFE-XBPM:CM4ds:PositionScaleX         / S23IDFE-XBPM:CM4ds:PositionScaleX S23IDFE-XBPM:CM4ds:PositionScaleY         / S23IDFE-XBPM:CM4ds:PositionScaleY S23IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S23IDFE-XBPM:CM4us:Current1:MeanValue_RBV S23IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S23IDFE-XBPM:CM4us:Current2:MeanValue_RBV S23IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S23IDFE-XBPM:CM4us:Current3:MeanValue_RBV S23IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S23IDFE-XBPM:CM4us:Current4:MeanValue_RBV S23IDFE-XBPM:CM4us:PosX:MeanValue_RBV     / S23IDFE-XBPM:CM4us:PosX:MeanValue_RBV S23IDFE-XBPM:CM4us:PosY:MeanValue_RBV     / S23IDFE-XBPM:CM4us:PosY:MeanValue_RBV S23IDFE-XBPM:CM4us:PositionOffsetX        / S23IDFE-XBPM:CM4us:PositionOffsetX S23IDFE-XBPM:CM4us:PositionOffsetY        / S23IDFE-XBPM:CM4us:PositionOffsetY S23IDFE-XBPM:CM4us:PositionScaleX         / S23IDFE-XBPM:CM4us:PositionScaleX S23IDFE-XBPM:CM4us:PositionScaleY         / S23IDFE-XBPM:CM4us:PositionScaleY S23IDFE-XBPM:P1ds:BMcUsedM                / S23IDFE-XBPM:P1ds:BMcUsedM S23IDFE-XBPM:P1ds:GapUsedC                / S23IDFE-XBPM:P1ds:GapUsedC S23IDFE-XBPM:P1ds:Wx1UsedM                / S23IDFE-XBPM:P1ds:Wx1UsedM S23IDFE-XBPM:P1ds:Wx2UsedM                / S23IDFE-XBPM:P1ds:Wx2UsedM S23IDFE-XBPM:P1ds:Wx3UsedM                / S23IDFE-XBPM:P1ds:Wx3UsedM S23IDFE-XBPM:P1ds:Wy1UsedM                / S23IDFE-XBPM:P1ds:Wy1UsedM S23IDFE-XBPM:P1ds:Wy2UsedM                / S23IDFE-XBPM:P1ds:Wy2UsedM S23IDFE-XBPM:P1ds:Wy3UsedM                / S23IDFE-XBPM:P1ds:Wy3UsedM S23IDFE-XBPM:P1ds:x                       / S23IDFE-XBPM:P1ds:x S23IDFE-XBPM:P1ds:x:CalFactor1M           / S23IDFE-XBPM:P1ds:x:CalFactor1M S23IDFE-XBPM:P1ds:x:CalFactor2M           / S23IDFE-XBPM:P1ds:x:CalFactor2M S23IDFE-XBPM:P1ds:x:LowPass1sM            / S23IDFE-XBPM:P1ds:x:LowPass1sM S23IDFE-XBPM:P1ds:x:LowPass8sM            / S23IDFE-XBPM:P1ds:x:LowPass8sM S23IDFE-XBPM:P1ds:x:LowPass64sM           / S23IDFE-XBPM:P1ds:x:LowPass64sM S23IDFE-XBPM:P1ds:x:Offset1M              / S23IDFE-XBPM:P1ds:x:Offset1M S23IDFE-XBPM:P1ds:x:Offset2M              / S23IDFE-XBPM:P1ds:x:Offset2M S23IDFE-XBPM:P1ds:x:ResolutionM           / S23IDFE-XBPM:P1ds:x:ResolutionM S23IDFE-XBPM:P1ds:x:Resolution1sM         / S23IDFE-XBPM:P1ds:x:Resolution1sM S23IDFE-XBPM:P1ds:x:Resolution8sM         / S23IDFE-XBPM:P1ds:x:Resolution8sM S23IDFE-XBPM:P1ds:x:Resolution64sM        / S23IDFE-XBPM:P1ds:x:Resolution64sM S23IDFE-XBPM:P1ds:x:StdDevM               / S23IDFE-XBPM:P1ds:x:StdDevM S23IDFE-XBPM:P1ds:x:StdDev1sM             / S23IDFE-XBPM:P1ds:x:StdDev1sM S23IDFE-XBPM:P1ds:x:StdDev8sM             / S23IDFE-XBPM:P1ds:x:StdDev8sM S23IDFE-XBPM:P1ds:x:StdDev64sM            / S23IDFE-XBPM:P1ds:x:StdDev64sM S23IDFE-XBPM:P1ds:x1:LowPass1sM           / S23IDFE-XBPM:P1ds:x1:LowPass1sM S23IDFE-XBPM:P1ds:x1:LowPass8sM           / S23IDFE-XBPM:P1ds:x1:LowPass8sM S23IDFE-XBPM:P1ds:x1:LowPass64sM          / S23IDFE-XBPM:P1ds:x1:LowPass64sM S23IDFE-XBPM:P1ds:x2:LowPass1sM           / S23IDFE-XBPM:P1ds:x2:LowPass1sM S23IDFE-XBPM:P1ds:x2:LowPass8sM           / S23IDFE-XBPM:P1ds:x2:LowPass8sM S23IDFE-XBPM:P1ds:x2:LowPass64sM          / S23IDFE-XBPM:P1ds:x2:LowPass64sM S23IDFE-XBPM:P1ds:y                       / S23IDFE-XBPM:P1ds:y S23IDFE-XBPM:P1ds:y:CalFactor1M           / S23IDFE-XBPM:P1ds:y:CalFactor1M S23IDFE-XBPM:P1ds:y:CalFactor2M           / S23IDFE-XBPM:P1ds:y:CalFactor2M S23IDFE-XBPM:P1ds:y:LowPass1sM            / S23IDFE-XBPM:P1ds:y:LowPass1sM S23IDFE-XBPM:P1ds:y:LowPass8sM            / S23IDFE-XBPM:P1ds:y:LowPass8sM S23IDFE-XBPM:P1ds:y:LowPass64sM           / S23IDFE-XBPM:P1ds:y:LowPass64sM S23IDFE-XBPM:P1ds:y:Offset1M              / S23IDFE-XBPM:P1ds:y:Offset1M S23IDFE-XBPM:P1ds:y:Offset2M              / S23IDFE-XBPM:P1ds:y:Offset2M S23IDFE-XBPM:P1ds:y:ResolutionM           / S23IDFE-XBPM:P1ds:y:ResolutionM S23IDFE-XBPM:P1ds:y:Resolution1sM         / S23IDFE-XBPM:P1ds:y:Resolution1sM S23IDFE-XBPM:P1ds:y:Resolution8sM         / S23IDFE-XBPM:P1ds:y:Resolution8sM S23IDFE-XBPM:P1ds:y:Resolution64sM        / S23IDFE-XBPM:P1ds:y:Resolution64sM S23IDFE-XBPM:P1ds:y:StdDevM               / S23IDFE-XBPM:P1ds:y:StdDevM S23IDFE-XBPM:P1ds:y:StdDev1sM             / S23IDFE-XBPM:P1ds:y:StdDev1sM S23IDFE-XBPM:P1ds:y:StdDev8sM             / S23IDFE-XBPM:P1ds:y:StdDev8sM S23IDFE-XBPM:P1ds:y:StdDev64sM            / S23IDFE-XBPM:P1ds:y:StdDev64sM S23IDFE-XBPM:P1ds:y1:LowPass1sM           / S23IDFE-XBPM:P1ds:y1:LowPass1sM S23IDFE-XBPM:P1ds:y1:LowPass8sM           / S23IDFE-XBPM:P1ds:y1:LowPass8sM S23IDFE-XBPM:P1ds:y1:LowPass64sM          / S23IDFE-XBPM:P1ds:y1:LowPass64sM S23IDFE-XBPM:P1ds:y2:LowPass1sM           / S23IDFE-XBPM:P1ds:y2:LowPass1sM S23IDFE-XBPM:P1ds:y2:LowPass8sM           / S23IDFE-XBPM:P1ds:y2:LowPass8sM S23IDFE-XBPM:P1ds:y2:LowPass64sM          / S23IDFE-XBPM:P1ds:y2:LowPass64sM S23IDFE-XBPM:P1us:BMcUsedM                / S23IDFE-XBPM:P1us:BMcUsedM S23IDFE-XBPM:P1us:GapUsedC                / S23IDFE-XBPM:P1us:GapUsedC S23IDFE-XBPM:P1us:Wx1UsedM                / S23IDFE-XBPM:P1us:Wx1UsedM S23IDFE-XBPM:P1us:Wx2UsedM                / S23IDFE-XBPM:P1us:Wx2UsedM S23IDFE-XBPM:P1us:Wx3UsedM                / S23IDFE-XBPM:P1us:Wx3UsedM S23IDFE-XBPM:P1us:Wy1UsedM                / S23IDFE-XBPM:P1us:Wy1UsedM S23IDFE-XBPM:P1us:Wy2UsedM                / S23IDFE-XBPM:P1us:Wy2UsedM S23IDFE-XBPM:P1us:Wy3UsedM                / S23IDFE-XBPM:P1us:Wy3UsedM S23IDFE-XBPM:P1us:x                       / S23IDFE-XBPM:P1us:x S23IDFE-XBPM:P1us:x:CalFactor1M           / S23IDFE-XBPM:P1us:x:CalFactor1M S23IDFE-XBPM:P1us:x:CalFactor2M           / S23IDFE-XBPM:P1us:x:CalFactor2M S23IDFE-XBPM:P1us:x:LowPass1sM            / S23IDFE-XBPM:P1us:x:LowPass1sM S23IDFE-XBPM:P1us:x:LowPass8sM            / S23IDFE-XBPM:P1us:x:LowPass8sM S23IDFE-XBPM:P1us:x:LowPass64sM           / S23IDFE-XBPM:P1us:x:LowPass64sM S23IDFE-XBPM:P1us:x:Offset1M              / S23IDFE-XBPM:P1us:x:Offset1M S23IDFE-XBPM:P1us:x:Offset2M              / S23IDFE-XBPM:P1us:x:Offset2M S23IDFE-XBPM:P1us:x:ResolutionM           / S23IDFE-XBPM:P1us:x:ResolutionM S23IDFE-XBPM:P1us:x:Resolution1sM         / S23IDFE-XBPM:P1us:x:Resolution1sM S23IDFE-XBPM:P1us:x:Resolution8sM         / S23IDFE-XBPM:P1us:x:Resolution8sM S23IDFE-XBPM:P1us:x:Resolution64sM        / S23IDFE-XBPM:P1us:x:Resolution64sM S23IDFE-XBPM:P1us:x:StdDevM               / S23IDFE-XBPM:P1us:x:StdDevM S23IDFE-XBPM:P1us:x:StdDev1sM             / S23IDFE-XBPM:P1us:x:StdDev1sM S23IDFE-XBPM:P1us:x:StdDev8sM             / S23IDFE-XBPM:P1us:x:StdDev8sM S23IDFE-XBPM:P1us:x:StdDev64sM            / S23IDFE-XBPM:P1us:x:StdDev64sM S23IDFE-XBPM:P1us:x1:LowPass1sM           / S23IDFE-XBPM:P1us:x1:LowPass1sM S23IDFE-XBPM:P1us:x1:LowPass8sM           / S23IDFE-XBPM:P1us:x1:LowPass8sM S23IDFE-XBPM:P1us:x1:LowPass64sM          / S23IDFE-XBPM:P1us:x1:LowPass64sM S23IDFE-XBPM:P1us:x2:LowPass1sM           / S23IDFE-XBPM:P1us:x2:LowPass1sM S23IDFE-XBPM:P1us:x2:LowPass8sM           / S23IDFE-XBPM:P1us:x2:LowPass8sM S23IDFE-XBPM:P1us:x2:LowPass64sM          / S23IDFE-XBPM:P1us:x2:LowPass64sM S23IDFE-XBPM:P1us:y                       / S23IDFE-XBPM:P1us:y S23IDFE-XBPM:P1us:y:CalFactor1M           / S23IDFE-XBPM:P1us:y:CalFactor1M S23IDFE-XBPM:P1us:y:CalFactor2M           / S23IDFE-XBPM:P1us:y:CalFactor2M S23IDFE-XBPM:P1us:y:LowPass1sM            / S23IDFE-XBPM:P1us:y:LowPass1sM S23IDFE-XBPM:P1us:y:LowPass8sM            / S23IDFE-XBPM:P1us:y:LowPass8sM S23IDFE-XBPM:P1us:y:LowPass64sM           / S23IDFE-XBPM:P1us:y:LowPass64sM S23IDFE-XBPM:P1us:y:Offset1M              / S23IDFE-XBPM:P1us:y:Offset1M S23IDFE-XBPM:P1us:y:Offset2M              / S23IDFE-XBPM:P1us:y:Offset2M S23IDFE-XBPM:P1us:y:ResolutionM           / S23IDFE-XBPM:P1us:y:ResolutionM S23IDFE-XBPM:P1us:y:Resolution1sM         / S23IDFE-XBPM:P1us:y:Resolution1sM S23IDFE-XBPM:P1us:y:Resolution8sM         / S23IDFE-XBPM:P1us:y:Resolution8sM S23IDFE-XBPM:P1us:y:Resolution64sM        / S23IDFE-XBPM:P1us:y:Resolution64sM S23IDFE-XBPM:P1us:y:StdDevM               / S23IDFE-XBPM:P1us:y:StdDevM S23IDFE-XBPM:P1us:y:StdDev1sM             / S23IDFE-XBPM:P1us:y:StdDev1sM S23IDFE-XBPM:P1us:y:StdDev8sM             / S23IDFE-XBPM:P1us:y:StdDev8sM S23IDFE-XBPM:P1us:y:StdDev64sM            / S23IDFE-XBPM:P1us:y:StdDev64sM S23IDFE-XBPM:P1us:y1:LowPass1sM           / S23IDFE-XBPM:P1us:y1:LowPass1sM S23IDFE-XBPM:P1us:y1:LowPass8sM           / S23IDFE-XBPM:P1us:y1:LowPass8sM S23IDFE-XBPM:P1us:y1:LowPass64sM          / S23IDFE-XBPM:P1us:y1:LowPass64sM S23IDFE-XBPM:P1us:y2:LowPass1sM           / S23IDFE-XBPM:P1us:y2:LowPass1sM S23IDFE-XBPM:P1us:y2:LowPass8sM           / S23IDFE-XBPM:P1us:y2:LowPass8sM S23IDFE-XBPM:P1us:y2:LowPass64sM          / S23IDFE-XBPM:P1us:y2:LowPass64sM S23IDFE-XBPM:P2ds:GapUsedC                / S23IDFE-XBPM:P2ds:GapUsedC S23IDFE-XBPM:P2ds:XCalM                   / S23IDFE-XBPM:P2ds:XCalM S23IDFE-XBPM:P2ds:YCalM                   / S23IDFE-XBPM:P2ds:YCalM S23IDFE-XBPM:P2ds:x:CalFactorM            / S23IDFE-XBPM:P2ds:x:CalFactorM S23IDFE-XBPM:P2ds:x:OffsetM               / S23IDFE-XBPM:P2ds:x:OffsetM S23IDFE-XBPM:P2ds:y:CalFactorM            / S23IDFE-XBPM:P2ds:y:CalFactorM S23IDFE-XBPM:P2ds:y:OffsetM               / S23IDFE-XBPM:P2ds:y:OffsetM S23IDFE-XBPM:P2us:GapUsedC                / S23IDFE-XBPM:P2us:GapUsedC S23IDFE-XBPM:P2us:XCalM                   / S23IDFE-XBPM:P2us:XCalM S23IDFE-XBPM:P2us:YCalM                   / S23IDFE-XBPM:P2us:YCalM S23IDFE-XBPM:P2us:x:CalFactorM            / S23IDFE-XBPM:P2us:x:CalFactorM S23IDFE-XBPM:P2us:x:OffsetM               / S23IDFE-XBPM:P2us:x:OffsetM S23IDFE-XBPM:P2us:y:CalFactorM            / S23IDFE-XBPM:P2us:y:CalFactorM S23IDFE-XBPM:P2us:y:OffsetM               / S23IDFE-XBPM:P2us:y:OffsetM S24IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S24IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S24IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S24IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S24IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S24IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S24IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S24IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S24IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S24IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S24IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S24IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S24IDFE-XBPM:CM1ds:PositionOffsetX        / S24IDFE-XBPM:CM1ds:PositionOffsetX S24IDFE-XBPM:CM1ds:PositionOffsetY        / S24IDFE-XBPM:CM1ds:PositionOffsetY S24IDFE-XBPM:CM1ds:PositionScaleX         / S24IDFE-XBPM:CM1ds:PositionScaleX S24IDFE-XBPM:CM1ds:PositionScaleY         / S24IDFE-XBPM:CM1ds:PositionScaleY S24IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S24IDFE-XBPM:CM1us:Current1:MeanValue_RBV S24IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S24IDFE-XBPM:CM1us:Current2:MeanValue_RBV S24IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S24IDFE-XBPM:CM1us:Current3:MeanValue_RBV S24IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S24IDFE-XBPM:CM1us:Current4:MeanValue_RBV S24IDFE-XBPM:CM1us:PosX:MeanValue_RBV     / S24IDFE-XBPM:CM1us:PosX:MeanValue_RBV S24IDFE-XBPM:CM1us:PosY:MeanValue_RBV     / S24IDFE-XBPM:CM1us:PosY:MeanValue_RBV S24IDFE-XBPM:CM1us:PositionOffsetX        / S24IDFE-XBPM:CM1us:PositionOffsetX S24IDFE-XBPM:CM1us:PositionOffsetY        / S24IDFE-XBPM:CM1us:PositionOffsetY S24IDFE-XBPM:CM1us:PositionScaleX         / S24IDFE-XBPM:CM1us:PositionScaleX S24IDFE-XBPM:CM1us:PositionScaleY         / S24IDFE-XBPM:CM1us:PositionScaleY S24IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S24IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S24IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S24IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S24IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S24IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S24IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S24IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S24IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S24IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S24IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S24IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S24IDFE-XBPM:CM2ds:PositionOffsetX        / S24IDFE-XBPM:CM2ds:PositionOffsetX S24IDFE-XBPM:CM2ds:PositionOffsetY        / S24IDFE-XBPM:CM2ds:PositionOffsetY S24IDFE-XBPM:CM2ds:PositionScaleX         / S24IDFE-XBPM:CM2ds:PositionScaleX S24IDFE-XBPM:CM2ds:PositionScaleY         / S24IDFE-XBPM:CM2ds:PositionScaleY S24IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S24IDFE-XBPM:CM2us:Current1:MeanValue_RBV S24IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S24IDFE-XBPM:CM2us:Current2:MeanValue_RBV S24IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S24IDFE-XBPM:CM2us:Current3:MeanValue_RBV S24IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S24IDFE-XBPM:CM2us:Current4:MeanValue_RBV S24IDFE-XBPM:CM2us:PosX:MeanValue_RBV     / S24IDFE-XBPM:CM2us:PosX:MeanValue_RBV S24IDFE-XBPM:CM2us:PosY:MeanValue_RBV     / S24IDFE-XBPM:CM2us:PosY:MeanValue_RBV S24IDFE-XBPM:CM2us:PositionOffsetX        / S24IDFE-XBPM:CM2us:PositionOffsetX S24IDFE-XBPM:CM2us:PositionOffsetY        / S24IDFE-XBPM:CM2us:PositionOffsetY S24IDFE-XBPM:CM2us:PositionScaleX         / S24IDFE-XBPM:CM2us:PositionScaleX S24IDFE-XBPM:CM2us:PositionScaleY         / S24IDFE-XBPM:CM2us:PositionScaleY S24IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S24IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S24IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S24IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S24IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S24IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S24IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S24IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S24IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S24IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S24IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S24IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S24IDFE-XBPM:CM3ds:PositionOffsetX        / S24IDFE-XBPM:CM3ds:PositionOffsetX S24IDFE-XBPM:CM3ds:PositionOffsetY        / S24IDFE-XBPM:CM3ds:PositionOffsetY S24IDFE-XBPM:CM3ds:PositionScaleX         / S24IDFE-XBPM:CM3ds:PositionScaleX S24IDFE-XBPM:CM3ds:PositionScaleY         / S24IDFE-XBPM:CM3ds:PositionScaleY S24IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S24IDFE-XBPM:CM3us:Current1:MeanValue_RBV S24IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S24IDFE-XBPM:CM3us:Current2:MeanValue_RBV S24IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S24IDFE-XBPM:CM3us:Current3:MeanValue_RBV S24IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S24IDFE-XBPM:CM3us:Current4:MeanValue_RBV S24IDFE-XBPM:CM3us:PosX:MeanValue_RBV     / S24IDFE-XBPM:CM3us:PosX:MeanValue_RBV S24IDFE-XBPM:CM3us:PosY:MeanValue_RBV     / S24IDFE-XBPM:CM3us:PosY:MeanValue_RBV S24IDFE-XBPM:CM3us:PositionOffsetX        / S24IDFE-XBPM:CM3us:PositionOffsetX S24IDFE-XBPM:CM3us:PositionOffsetY        / S24IDFE-XBPM:CM3us:PositionOffsetY S24IDFE-XBPM:CM3us:PositionScaleX         / S24IDFE-XBPM:CM3us:PositionScaleX S24IDFE-XBPM:CM3us:PositionScaleY         / S24IDFE-XBPM:CM3us:PositionScaleY S24IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S24IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S24IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S24IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S24IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S24IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S24IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S24IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S24IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S24IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S24IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S24IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S24IDFE-XBPM:CM4ds:PositionOffsetX        / S24IDFE-XBPM:CM4ds:PositionOffsetX S24IDFE-XBPM:CM4ds:PositionOffsetY        / S24IDFE-XBPM:CM4ds:PositionOffsetY S24IDFE-XBPM:CM4ds:PositionScaleX         / S24IDFE-XBPM:CM4ds:PositionScaleX S24IDFE-XBPM:CM4ds:PositionScaleY         / S24IDFE-XBPM:CM4ds:PositionScaleY S24IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S24IDFE-XBPM:CM4us:Current1:MeanValue_RBV S24IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S24IDFE-XBPM:CM4us:Current2:MeanValue_RBV S24IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S24IDFE-XBPM:CM4us:Current3:MeanValue_RBV S24IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S24IDFE-XBPM:CM4us:Current4:MeanValue_RBV S24IDFE-XBPM:CM4us:PosX:MeanValue_RBV     / S24IDFE-XBPM:CM4us:PosX:MeanValue_RBV S24IDFE-XBPM:CM4us:PosY:MeanValue_RBV     / S24IDFE-XBPM:CM4us:PosY:MeanValue_RBV S24IDFE-XBPM:CM4us:PositionOffsetX        / S24IDFE-XBPM:CM4us:PositionOffsetX S24IDFE-XBPM:CM4us:PositionOffsetY        / S24IDFE-XBPM:CM4us:PositionOffsetY S24IDFE-XBPM:CM4us:PositionScaleX         / S24IDFE-XBPM:CM4us:PositionScaleX S24IDFE-XBPM:CM4us:PositionScaleY         / S24IDFE-XBPM:CM4us:PositionScaleY S24IDFE-XBPM:P1ds:BMcUsedM                / S24IDFE-XBPM:P1ds:BMcUsedM S24IDFE-XBPM:P1ds:GapUsedC                / S24IDFE-XBPM:P1ds:GapUsedC S24IDFE-XBPM:P1ds:Wx1UsedM                / S24IDFE-XBPM:P1ds:Wx1UsedM S24IDFE-XBPM:P1ds:Wx2UsedM                / S24IDFE-XBPM:P1ds:Wx2UsedM S24IDFE-XBPM:P1ds:Wx3UsedM                / S24IDFE-XBPM:P1ds:Wx3UsedM S24IDFE-XBPM:P1ds:Wy1UsedM                / S24IDFE-XBPM:P1ds:Wy1UsedM S24IDFE-XBPM:P1ds:Wy2UsedM                / S24IDFE-XBPM:P1ds:Wy2UsedM S24IDFE-XBPM:P1ds:Wy3UsedM                / S24IDFE-XBPM:P1ds:Wy3UsedM S24IDFE-XBPM:P1ds:x                       / S24IDFE-XBPM:P1ds:x S24IDFE-XBPM:P1ds:x:CalFactor1M           / S24IDFE-XBPM:P1ds:x:CalFactor1M S24IDFE-XBPM:P1ds:x:CalFactor2M           / S24IDFE-XBPM:P1ds:x:CalFactor2M S24IDFE-XBPM:P1ds:x:LowPass1sM            / S24IDFE-XBPM:P1ds:x:LowPass1sM S24IDFE-XBPM:P1ds:x:LowPass8sM            / S24IDFE-XBPM:P1ds:x:LowPass8sM S24IDFE-XBPM:P1ds:x:LowPass64sM           / S24IDFE-XBPM:P1ds:x:LowPass64sM S24IDFE-XBPM:P1ds:x:Offset1M              / S24IDFE-XBPM:P1ds:x:Offset1M S24IDFE-XBPM:P1ds:x:Offset2M              / S24IDFE-XBPM:P1ds:x:Offset2M S24IDFE-XBPM:P1ds:x:ResolutionM           / S24IDFE-XBPM:P1ds:x:ResolutionM S24IDFE-XBPM:P1ds:x:Resolution1sM         / S24IDFE-XBPM:P1ds:x:Resolution1sM S24IDFE-XBPM:P1ds:x:Resolution8sM         / S24IDFE-XBPM:P1ds:x:Resolution8sM S24IDFE-XBPM:P1ds:x:Resolution64sM        / S24IDFE-XBPM:P1ds:x:Resolution64sM S24IDFE-XBPM:P1ds:x:StdDevM               / S24IDFE-XBPM:P1ds:x:StdDevM S24IDFE-XBPM:P1ds:x:StdDev1sM             / S24IDFE-XBPM:P1ds:x:StdDev1sM S24IDFE-XBPM:P1ds:x:StdDev8sM             / S24IDFE-XBPM:P1ds:x:StdDev8sM S24IDFE-XBPM:P1ds:x:StdDev64sM            / S24IDFE-XBPM:P1ds:x:StdDev64sM S24IDFE-XBPM:P1ds:x1:LowPass1sM           / S24IDFE-XBPM:P1ds:x1:LowPass1sM S24IDFE-XBPM:P1ds:x1:LowPass8sM           / S24IDFE-XBPM:P1ds:x1:LowPass8sM S24IDFE-XBPM:P1ds:x1:LowPass64sM          / S24IDFE-XBPM:P1ds:x1:LowPass64sM S24IDFE-XBPM:P1ds:x2:LowPass1sM           / S24IDFE-XBPM:P1ds:x2:LowPass1sM S24IDFE-XBPM:P1ds:x2:LowPass8sM           / S24IDFE-XBPM:P1ds:x2:LowPass8sM S24IDFE-XBPM:P1ds:x2:LowPass64sM          / S24IDFE-XBPM:P1ds:x2:LowPass64sM S24IDFE-XBPM:P1ds:y                       / S24IDFE-XBPM:P1ds:y S24IDFE-XBPM:P1ds:y:CalFactor1M           / S24IDFE-XBPM:P1ds:y:CalFactor1M S24IDFE-XBPM:P1ds:y:CalFactor2M           / S24IDFE-XBPM:P1ds:y:CalFactor2M S24IDFE-XBPM:P1ds:y:LowPass1sM            / S24IDFE-XBPM:P1ds:y:LowPass1sM S24IDFE-XBPM:P1ds:y:LowPass8sM            / S24IDFE-XBPM:P1ds:y:LowPass8sM S24IDFE-XBPM:P1ds:y:LowPass64sM           / S24IDFE-XBPM:P1ds:y:LowPass64sM S24IDFE-XBPM:P1ds:y:Offset1M              / S24IDFE-XBPM:P1ds:y:Offset1M S24IDFE-XBPM:P1ds:y:Offset2M              / S24IDFE-XBPM:P1ds:y:Offset2M S24IDFE-XBPM:P1ds:y:ResolutionM           / S24IDFE-XBPM:P1ds:y:ResolutionM S24IDFE-XBPM:P1ds:y:Resolution1sM         / S24IDFE-XBPM:P1ds:y:Resolution1sM S24IDFE-XBPM:P1ds:y:Resolution8sM         / S24IDFE-XBPM:P1ds:y:Resolution8sM S24IDFE-XBPM:P1ds:y:Resolution64sM        / S24IDFE-XBPM:P1ds:y:Resolution64sM S24IDFE-XBPM:P1ds:y:StdDevM               / S24IDFE-XBPM:P1ds:y:StdDevM S24IDFE-XBPM:P1ds:y:StdDev1sM             / S24IDFE-XBPM:P1ds:y:StdDev1sM S24IDFE-XBPM:P1ds:y:StdDev8sM             / S24IDFE-XBPM:P1ds:y:StdDev8sM S24IDFE-XBPM:P1ds:y:StdDev64sM            / S24IDFE-XBPM:P1ds:y:StdDev64sM S24IDFE-XBPM:P1ds:y1:LowPass1sM           / S24IDFE-XBPM:P1ds:y1:LowPass1sM S24IDFE-XBPM:P1ds:y1:LowPass8sM           / S24IDFE-XBPM:P1ds:y1:LowPass8sM S24IDFE-XBPM:P1ds:y1:LowPass64sM          / S24IDFE-XBPM:P1ds:y1:LowPass64sM S24IDFE-XBPM:P1ds:y2:LowPass1sM           / S24IDFE-XBPM:P1ds:y2:LowPass1sM S24IDFE-XBPM:P1ds:y2:LowPass8sM           / S24IDFE-XBPM:P1ds:y2:LowPass8sM S24IDFE-XBPM:P1ds:y2:LowPass64sM          / S24IDFE-XBPM:P1ds:y2:LowPass64sM S24IDFE-XBPM:P1us:BMcUsedM                / S24IDFE-XBPM:P1us:BMcUsedM S24IDFE-XBPM:P1us:GapUsedC                / S24IDFE-XBPM:P1us:GapUsedC S24IDFE-XBPM:P1us:Wx1UsedM                / S24IDFE-XBPM:P1us:Wx1UsedM S24IDFE-XBPM:P1us:Wx2UsedM                / S24IDFE-XBPM:P1us:Wx2UsedM S24IDFE-XBPM:P1us:Wx3UsedM                / S24IDFE-XBPM:P1us:Wx3UsedM S24IDFE-XBPM:P1us:Wy1UsedM                / S24IDFE-XBPM:P1us:Wy1UsedM S24IDFE-XBPM:P1us:Wy2UsedM                / S24IDFE-XBPM:P1us:Wy2UsedM S24IDFE-XBPM:P1us:Wy3UsedM                / S24IDFE-XBPM:P1us:Wy3UsedM S24IDFE-XBPM:P1us:x                       / S24IDFE-XBPM:P1us:x S24IDFE-XBPM:P1us:x:CalFactor1M           / S24IDFE-XBPM:P1us:x:CalFactor1M S24IDFE-XBPM:P1us:x:CalFactor2M           / S24IDFE-XBPM:P1us:x:CalFactor2M S24IDFE-XBPM:P1us:x:LowPass1sM            / S24IDFE-XBPM:P1us:x:LowPass1sM S24IDFE-XBPM:P1us:x:LowPass8sM            / S24IDFE-XBPM:P1us:x:LowPass8sM S24IDFE-XBPM:P1us:x:LowPass64sM           / S24IDFE-XBPM:P1us:x:LowPass64sM S24IDFE-XBPM:P1us:x:Offset1M              / S24IDFE-XBPM:P1us:x:Offset1M S24IDFE-XBPM:P1us:x:Offset2M              / S24IDFE-XBPM:P1us:x:Offset2M S24IDFE-XBPM:P1us:x:ResolutionM           / S24IDFE-XBPM:P1us:x:ResolutionM S24IDFE-XBPM:P1us:x:Resolution1sM         / S24IDFE-XBPM:P1us:x:Resolution1sM S24IDFE-XBPM:P1us:x:Resolution8sM         / S24IDFE-XBPM:P1us:x:Resolution8sM S24IDFE-XBPM:P1us:x:Resolution64sM        / S24IDFE-XBPM:P1us:x:Resolution64sM S24IDFE-XBPM:P1us:x:StdDevM               / S24IDFE-XBPM:P1us:x:StdDevM S24IDFE-XBPM:P1us:x:StdDev1sM             / S24IDFE-XBPM:P1us:x:StdDev1sM S24IDFE-XBPM:P1us:x:StdDev8sM             / S24IDFE-XBPM:P1us:x:StdDev8sM S24IDFE-XBPM:P1us:x:StdDev64sM            / S24IDFE-XBPM:P1us:x:StdDev64sM S24IDFE-XBPM:P1us:x1:LowPass1sM           / S24IDFE-XBPM:P1us:x1:LowPass1sM S24IDFE-XBPM:P1us:x1:LowPass8sM           / S24IDFE-XBPM:P1us:x1:LowPass8sM S24IDFE-XBPM:P1us:x1:LowPass64sM          / S24IDFE-XBPM:P1us:x1:LowPass64sM S24IDFE-XBPM:P1us:x2:LowPass1sM           / S24IDFE-XBPM:P1us:x2:LowPass1sM S24IDFE-XBPM:P1us:x2:LowPass8sM           / S24IDFE-XBPM:P1us:x2:LowPass8sM S24IDFE-XBPM:P1us:x2:LowPass64sM          / S24IDFE-XBPM:P1us:x2:LowPass64sM S24IDFE-XBPM:P1us:y                       / S24IDFE-XBPM:P1us:y S24IDFE-XBPM:P1us:y:CalFactor1M           / S24IDFE-XBPM:P1us:y:CalFactor1M S24IDFE-XBPM:P1us:y:CalFactor2M           / S24IDFE-XBPM:P1us:y:CalFactor2M S24IDFE-XBPM:P1us:y:LowPass1sM            / S24IDFE-XBPM:P1us:y:LowPass1sM S24IDFE-XBPM:P1us:y:LowPass8sM            / S24IDFE-XBPM:P1us:y:LowPass8sM S24IDFE-XBPM:P1us:y:LowPass64sM           / S24IDFE-XBPM:P1us:y:LowPass64sM S24IDFE-XBPM:P1us:y:Offset1M              / S24IDFE-XBPM:P1us:y:Offset1M S24IDFE-XBPM:P1us:y:Offset2M              / S24IDFE-XBPM:P1us:y:Offset2M S24IDFE-XBPM:P1us:y:ResolutionM           / S24IDFE-XBPM:P1us:y:ResolutionM S24IDFE-XBPM:P1us:y:Resolution1sM         / S24IDFE-XBPM:P1us:y:Resolution1sM S24IDFE-XBPM:P1us:y:Resolution8sM         / S24IDFE-XBPM:P1us:y:Resolution8sM S24IDFE-XBPM:P1us:y:Resolution64sM        / S24IDFE-XBPM:P1us:y:Resolution64sM S24IDFE-XBPM:P1us:y:StdDevM               / S24IDFE-XBPM:P1us:y:StdDevM S24IDFE-XBPM:P1us:y:StdDev1sM             / S24IDFE-XBPM:P1us:y:StdDev1sM S24IDFE-XBPM:P1us:y:StdDev8sM             / S24IDFE-XBPM:P1us:y:StdDev8sM S24IDFE-XBPM:P1us:y:StdDev64sM            / S24IDFE-XBPM:P1us:y:StdDev64sM S24IDFE-XBPM:P1us:y1:LowPass1sM           / S24IDFE-XBPM:P1us:y1:LowPass1sM S24IDFE-XBPM:P1us:y1:LowPass8sM           / S24IDFE-XBPM:P1us:y1:LowPass8sM S24IDFE-XBPM:P1us:y1:LowPass64sM          / S24IDFE-XBPM:P1us:y1:LowPass64sM S24IDFE-XBPM:P1us:y2:LowPass1sM           / S24IDFE-XBPM:P1us:y2:LowPass1sM S24IDFE-XBPM:P1us:y2:LowPass8sM           / S24IDFE-XBPM:P1us:y2:LowPass8sM S24IDFE-XBPM:P1us:y2:LowPass64sM          / S24IDFE-XBPM:P1us:y2:LowPass64sM S24IDFE-XBPM:P2ds:GapUsedC                / S24IDFE-XBPM:P2ds:GapUsedC S24IDFE-XBPM:P2ds:XCalM                   / S24IDFE-XBPM:P2ds:XCalM S24IDFE-XBPM:P2ds:YCalM                   / S24IDFE-XBPM:P2ds:YCalM S24IDFE-XBPM:P2ds:x:CalFactorM            / S24IDFE-XBPM:P2ds:x:CalFactorM S24IDFE-XBPM:P2ds:x:OffsetM               / S24IDFE-XBPM:P2ds:x:OffsetM S24IDFE-XBPM:P2ds:y:CalFactorM            / S24IDFE-XBPM:P2ds:y:CalFactorM S24IDFE-XBPM:P2ds:y:OffsetM               / S24IDFE-XBPM:P2ds:y:OffsetM S24IDFE-XBPM:P2us:GapUsedC                / S24IDFE-XBPM:P2us:GapUsedC S24IDFE-XBPM:P2us:XCalM                   / S24IDFE-XBPM:P2us:XCalM S24IDFE-XBPM:P2us:YCalM                   / S24IDFE-XBPM:P2us:YCalM S24IDFE-XBPM:P2us:x:CalFactorM            / S24IDFE-XBPM:P2us:x:CalFactorM S24IDFE-XBPM:P2us:x:OffsetM               / S24IDFE-XBPM:P2us:x:OffsetM S24IDFE-XBPM:P2us:y:CalFactorM            / S24IDFE-XBPM:P2us:y:CalFactorM S24IDFE-XBPM:P2us:y:OffsetM               / S24IDFE-XBPM:P2us:y:OffsetM S25IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S25IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S25IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S25IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S25IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S25IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S25IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S25IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S25IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S25IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S25IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S25IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S25IDFE-XBPM:CM1ds:PositionOffsetX        / S25IDFE-XBPM:CM1ds:PositionOffsetX S25IDFE-XBPM:CM1ds:PositionOffsetY        / S25IDFE-XBPM:CM1ds:PositionOffsetY S25IDFE-XBPM:CM1ds:PositionScaleX         / S25IDFE-XBPM:CM1ds:PositionScaleX S25IDFE-XBPM:CM1ds:PositionScaleY         / S25IDFE-XBPM:CM1ds:PositionScaleY S25IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S25IDFE-XBPM:CM1us:Current1:MeanValue_RBV S25IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S25IDFE-XBPM:CM1us:Current2:MeanValue_RBV S25IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S25IDFE-XBPM:CM1us:Current3:MeanValue_RBV S25IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S25IDFE-XBPM:CM1us:Current4:MeanValue_RBV S25IDFE-XBPM:CM1us:PosX:MeanValue_RBV     / S25IDFE-XBPM:CM1us:PosX:MeanValue_RBV S25IDFE-XBPM:CM1us:PosY:MeanValue_RBV     / S25IDFE-XBPM:CM1us:PosY:MeanValue_RBV S25IDFE-XBPM:CM1us:PositionOffsetX        / S25IDFE-XBPM:CM1us:PositionOffsetX S25IDFE-XBPM:CM1us:PositionOffsetY        / S25IDFE-XBPM:CM1us:PositionOffsetY S25IDFE-XBPM:CM1us:PositionScaleX         / S25IDFE-XBPM:CM1us:PositionScaleX S25IDFE-XBPM:CM1us:PositionScaleY         / S25IDFE-XBPM:CM1us:PositionScaleY S25IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S25IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S25IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S25IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S25IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S25IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S25IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S25IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S25IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S25IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S25IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S25IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S25IDFE-XBPM:CM2ds:PositionOffsetX        / S25IDFE-XBPM:CM2ds:PositionOffsetX S25IDFE-XBPM:CM2ds:PositionOffsetY        / S25IDFE-XBPM:CM2ds:PositionOffsetY S25IDFE-XBPM:CM2ds:PositionScaleX         / S25IDFE-XBPM:CM2ds:PositionScaleX S25IDFE-XBPM:CM2ds:PositionScaleY         / S25IDFE-XBPM:CM2ds:PositionScaleY S25IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S25IDFE-XBPM:CM2us:Current1:MeanValue_RBV S25IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S25IDFE-XBPM:CM2us:Current2:MeanValue_RBV S25IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S25IDFE-XBPM:CM2us:Current3:MeanValue_RBV S25IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S25IDFE-XBPM:CM2us:Current4:MeanValue_RBV S25IDFE-XBPM:CM2us:PosX:MeanValue_RBV     / S25IDFE-XBPM:CM2us:PosX:MeanValue_RBV S25IDFE-XBPM:CM2us:PosY:MeanValue_RBV     / S25IDFE-XBPM:CM2us:PosY:MeanValue_RBV S25IDFE-XBPM:CM2us:PositionOffsetX        / S25IDFE-XBPM:CM2us:PositionOffsetX S25IDFE-XBPM:CM2us:PositionOffsetY        / S25IDFE-XBPM:CM2us:PositionOffsetY S25IDFE-XBPM:CM2us:PositionScaleX         / S25IDFE-XBPM:CM2us:PositionScaleX S25IDFE-XBPM:CM2us:PositionScaleY         / S25IDFE-XBPM:CM2us:PositionScaleY S25IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S25IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S25IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S25IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S25IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S25IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S25IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S25IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S25IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S25IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S25IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S25IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S25IDFE-XBPM:CM3ds:PositionOffsetX        / S25IDFE-XBPM:CM3ds:PositionOffsetX S25IDFE-XBPM:CM3ds:PositionOffsetY        / S25IDFE-XBPM:CM3ds:PositionOffsetY S25IDFE-XBPM:CM3ds:PositionScaleX         / S25IDFE-XBPM:CM3ds:PositionScaleX S25IDFE-XBPM:CM3ds:PositionScaleY         / S25IDFE-XBPM:CM3ds:PositionScaleY S25IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S25IDFE-XBPM:CM3us:Current1:MeanValue_RBV S25IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S25IDFE-XBPM:CM3us:Current2:MeanValue_RBV S25IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S25IDFE-XBPM:CM3us:Current3:MeanValue_RBV S25IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S25IDFE-XBPM:CM3us:Current4:MeanValue_RBV S25IDFE-XBPM:CM3us:PosX:MeanValue_RBV     / S25IDFE-XBPM:CM3us:PosX:MeanValue_RBV S25IDFE-XBPM:CM3us:PosY:MeanValue_RBV     / S25IDFE-XBPM:CM3us:PosY:MeanValue_RBV S25IDFE-XBPM:CM3us:PositionOffsetX        / S25IDFE-XBPM:CM3us:PositionOffsetX S25IDFE-XBPM:CM3us:PositionOffsetY        / S25IDFE-XBPM:CM3us:PositionOffsetY S25IDFE-XBPM:CM3us:PositionScaleX         / S25IDFE-XBPM:CM3us:PositionScaleX S25IDFE-XBPM:CM3us:PositionScaleY         / S25IDFE-XBPM:CM3us:PositionScaleY S25IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S25IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S25IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S25IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S25IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S25IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S25IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S25IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S25IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S25IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S25IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S25IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S25IDFE-XBPM:CM4ds:PositionOffsetX        / S25IDFE-XBPM:CM4ds:PositionOffsetX S25IDFE-XBPM:CM4ds:PositionOffsetY        / S25IDFE-XBPM:CM4ds:PositionOffsetY S25IDFE-XBPM:CM4ds:PositionScaleX         / S25IDFE-XBPM:CM4ds:PositionScaleX S25IDFE-XBPM:CM4ds:PositionScaleY         / S25IDFE-XBPM:CM4ds:PositionScaleY S25IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S25IDFE-XBPM:CM4us:Current1:MeanValue_RBV S25IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S25IDFE-XBPM:CM4us:Current2:MeanValue_RBV S25IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S25IDFE-XBPM:CM4us:Current3:MeanValue_RBV S25IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S25IDFE-XBPM:CM4us:Current4:MeanValue_RBV S25IDFE-XBPM:CM4us:PosX:MeanValue_RBV     / S25IDFE-XBPM:CM4us:PosX:MeanValue_RBV S25IDFE-XBPM:CM4us:PosY:MeanValue_RBV     / S25IDFE-XBPM:CM4us:PosY:MeanValue_RBV S25IDFE-XBPM:CM4us:PositionOffsetX        / S25IDFE-XBPM:CM4us:PositionOffsetX S25IDFE-XBPM:CM4us:PositionOffsetY        / S25IDFE-XBPM:CM4us:PositionOffsetY S25IDFE-XBPM:CM4us:PositionScaleX         / S25IDFE-XBPM:CM4us:PositionScaleX S25IDFE-XBPM:CM4us:PositionScaleY         / S25IDFE-XBPM:CM4us:PositionScaleY S25IDFE-XBPM:P1ds:BMcUsedM                / S25IDFE-XBPM:P1ds:BMcUsedM S25IDFE-XBPM:P1ds:GapUsedC                / S25IDFE-XBPM:P1ds:GapUsedC S25IDFE-XBPM:P1ds:Wx1UsedM                / S25IDFE-XBPM:P1ds:Wx1UsedM S25IDFE-XBPM:P1ds:Wx2UsedM                / S25IDFE-XBPM:P1ds:Wx2UsedM S25IDFE-XBPM:P1ds:Wx3UsedM                / S25IDFE-XBPM:P1ds:Wx3UsedM S25IDFE-XBPM:P1ds:Wy1UsedM                / S25IDFE-XBPM:P1ds:Wy1UsedM S25IDFE-XBPM:P1ds:Wy2UsedM                / S25IDFE-XBPM:P1ds:Wy2UsedM S25IDFE-XBPM:P1ds:Wy3UsedM                / S25IDFE-XBPM:P1ds:Wy3UsedM S25IDFE-XBPM:P1ds:x                       / S25IDFE-XBPM:P1ds:x S25IDFE-XBPM:P1ds:x:CalFactor1M           / S25IDFE-XBPM:P1ds:x:CalFactor1M S25IDFE-XBPM:P1ds:x:CalFactor2M           / S25IDFE-XBPM:P1ds:x:CalFactor2M S25IDFE-XBPM:P1ds:x:LowPass1sM            / S25IDFE-XBPM:P1ds:x:LowPass1sM S25IDFE-XBPM:P1ds:x:LowPass8sM            / S25IDFE-XBPM:P1ds:x:LowPass8sM S25IDFE-XBPM:P1ds:x:LowPass64sM           / S25IDFE-XBPM:P1ds:x:LowPass64sM S25IDFE-XBPM:P1ds:x:Offset1M              / S25IDFE-XBPM:P1ds:x:Offset1M S25IDFE-XBPM:P1ds:x:Offset2M              / S25IDFE-XBPM:P1ds:x:Offset2M S25IDFE-XBPM:P1ds:x:ResolutionM           / S25IDFE-XBPM:P1ds:x:ResolutionM S25IDFE-XBPM:P1ds:x:Resolution1sM         / S25IDFE-XBPM:P1ds:x:Resolution1sM S25IDFE-XBPM:P1ds:x:Resolution8sM         / S25IDFE-XBPM:P1ds:x:Resolution8sM S25IDFE-XBPM:P1ds:x:Resolution64sM        / S25IDFE-XBPM:P1ds:x:Resolution64sM S25IDFE-XBPM:P1ds:x:StdDevM               / S25IDFE-XBPM:P1ds:x:StdDevM S25IDFE-XBPM:P1ds:x:StdDev1sM             / S25IDFE-XBPM:P1ds:x:StdDev1sM S25IDFE-XBPM:P1ds:x:StdDev8sM             / S25IDFE-XBPM:P1ds:x:StdDev8sM S25IDFE-XBPM:P1ds:x:StdDev64sM            / S25IDFE-XBPM:P1ds:x:StdDev64sM S25IDFE-XBPM:P1ds:x1:LowPass1sM           / S25IDFE-XBPM:P1ds:x1:LowPass1sM S25IDFE-XBPM:P1ds:x1:LowPass8sM           / S25IDFE-XBPM:P1ds:x1:LowPass8sM S25IDFE-XBPM:P1ds:x1:LowPass64sM          / S25IDFE-XBPM:P1ds:x1:LowPass64sM S25IDFE-XBPM:P1ds:x2:LowPass1sM           / S25IDFE-XBPM:P1ds:x2:LowPass1sM S25IDFE-XBPM:P1ds:x2:LowPass8sM           / S25IDFE-XBPM:P1ds:x2:LowPass8sM S25IDFE-XBPM:P1ds:x2:LowPass64sM          / S25IDFE-XBPM:P1ds:x2:LowPass64sM S25IDFE-XBPM:P1ds:y                       / S25IDFE-XBPM:P1ds:y S25IDFE-XBPM:P1ds:y:CalFactor1M           / S25IDFE-XBPM:P1ds:y:CalFactor1M S25IDFE-XBPM:P1ds:y:CalFactor2M           / S25IDFE-XBPM:P1ds:y:CalFactor2M S25IDFE-XBPM:P1ds:y:LowPass1sM            / S25IDFE-XBPM:P1ds:y:LowPass1sM S25IDFE-XBPM:P1ds:y:LowPass8sM            / S25IDFE-XBPM:P1ds:y:LowPass8sM S25IDFE-XBPM:P1ds:y:LowPass64sM           / S25IDFE-XBPM:P1ds:y:LowPass64sM S25IDFE-XBPM:P1ds:y:Offset1M              / S25IDFE-XBPM:P1ds:y:Offset1M S25IDFE-XBPM:P1ds:y:Offset2M              / S25IDFE-XBPM:P1ds:y:Offset2M S25IDFE-XBPM:P1ds:y:ResolutionM           / S25IDFE-XBPM:P1ds:y:ResolutionM S25IDFE-XBPM:P1ds:y:Resolution1sM         / S25IDFE-XBPM:P1ds:y:Resolution1sM S25IDFE-XBPM:P1ds:y:Resolution8sM         / S25IDFE-XBPM:P1ds:y:Resolution8sM S25IDFE-XBPM:P1ds:y:Resolution64sM        / S25IDFE-XBPM:P1ds:y:Resolution64sM S25IDFE-XBPM:P1ds:y:StdDevM               / S25IDFE-XBPM:P1ds:y:StdDevM S25IDFE-XBPM:P1ds:y:StdDev1sM             / S25IDFE-XBPM:P1ds:y:StdDev1sM S25IDFE-XBPM:P1ds:y:StdDev8sM             / S25IDFE-XBPM:P1ds:y:StdDev8sM S25IDFE-XBPM:P1ds:y:StdDev64sM            / S25IDFE-XBPM:P1ds:y:StdDev64sM S25IDFE-XBPM:P1ds:y1:LowPass1sM           / S25IDFE-XBPM:P1ds:y1:LowPass1sM S25IDFE-XBPM:P1ds:y1:LowPass8sM           / S25IDFE-XBPM:P1ds:y1:LowPass8sM S25IDFE-XBPM:P1ds:y1:LowPass64sM          / S25IDFE-XBPM:P1ds:y1:LowPass64sM S25IDFE-XBPM:P1ds:y2:LowPass1sM           / S25IDFE-XBPM:P1ds:y2:LowPass1sM S25IDFE-XBPM:P1ds:y2:LowPass8sM           / S25IDFE-XBPM:P1ds:y2:LowPass8sM S25IDFE-XBPM:P1ds:y2:LowPass64sM          / S25IDFE-XBPM:P1ds:y2:LowPass64sM S25IDFE-XBPM:P1us:BMcUsedM                / S25IDFE-XBPM:P1us:BMcUsedM S25IDFE-XBPM:P1us:GapUsedC                / S25IDFE-XBPM:P1us:GapUsedC S25IDFE-XBPM:P1us:Wx1UsedM                / S25IDFE-XBPM:P1us:Wx1UsedM S25IDFE-XBPM:P1us:Wx2UsedM                / S25IDFE-XBPM:P1us:Wx2UsedM S25IDFE-XBPM:P1us:Wx3UsedM                / S25IDFE-XBPM:P1us:Wx3UsedM S25IDFE-XBPM:P1us:Wy1UsedM                / S25IDFE-XBPM:P1us:Wy1UsedM S25IDFE-XBPM:P1us:Wy2UsedM                / S25IDFE-XBPM:P1us:Wy2UsedM S25IDFE-XBPM:P1us:Wy3UsedM                / S25IDFE-XBPM:P1us:Wy3UsedM S25IDFE-XBPM:P1us:x                       / S25IDFE-XBPM:P1us:x S25IDFE-XBPM:P1us:x:CalFactor1M           / S25IDFE-XBPM:P1us:x:CalFactor1M S25IDFE-XBPM:P1us:x:CalFactor2M           / S25IDFE-XBPM:P1us:x:CalFactor2M S25IDFE-XBPM:P1us:x:LowPass1sM            / S25IDFE-XBPM:P1us:x:LowPass1sM S25IDFE-XBPM:P1us:x:LowPass8sM            / S25IDFE-XBPM:P1us:x:LowPass8sM S25IDFE-XBPM:P1us:x:LowPass64sM           / S25IDFE-XBPM:P1us:x:LowPass64sM S25IDFE-XBPM:P1us:x:Offset1M              / S25IDFE-XBPM:P1us:x:Offset1M S25IDFE-XBPM:P1us:x:Offset2M              / S25IDFE-XBPM:P1us:x:Offset2M S25IDFE-XBPM:P1us:x:ResolutionM           / S25IDFE-XBPM:P1us:x:ResolutionM S25IDFE-XBPM:P1us:x:Resolution1sM         / S25IDFE-XBPM:P1us:x:Resolution1sM S25IDFE-XBPM:P1us:x:Resolution8sM         / S25IDFE-XBPM:P1us:x:Resolution8sM S25IDFE-XBPM:P1us:x:Resolution64sM        / S25IDFE-XBPM:P1us:x:Resolution64sM S25IDFE-XBPM:P1us:x:StdDevM               / S25IDFE-XBPM:P1us:x:StdDevM S25IDFE-XBPM:P1us:x:StdDev1sM             / S25IDFE-XBPM:P1us:x:StdDev1sM S25IDFE-XBPM:P1us:x:StdDev8sM             / S25IDFE-XBPM:P1us:x:StdDev8sM S25IDFE-XBPM:P1us:x:StdDev64sM            / S25IDFE-XBPM:P1us:x:StdDev64sM S25IDFE-XBPM:P1us:x1:LowPass1sM           / S25IDFE-XBPM:P1us:x1:LowPass1sM S25IDFE-XBPM:P1us:x1:LowPass8sM           / S25IDFE-XBPM:P1us:x1:LowPass8sM S25IDFE-XBPM:P1us:x1:LowPass64sM          / S25IDFE-XBPM:P1us:x1:LowPass64sM S25IDFE-XBPM:P1us:x2:LowPass1sM           / S25IDFE-XBPM:P1us:x2:LowPass1sM S25IDFE-XBPM:P1us:x2:LowPass8sM           / S25IDFE-XBPM:P1us:x2:LowPass8sM S25IDFE-XBPM:P1us:x2:LowPass64sM          / S25IDFE-XBPM:P1us:x2:LowPass64sM S25IDFE-XBPM:P1us:y                       / S25IDFE-XBPM:P1us:y S25IDFE-XBPM:P1us:y:CalFactor1M           / S25IDFE-XBPM:P1us:y:CalFactor1M S25IDFE-XBPM:P1us:y:CalFactor2M           / S25IDFE-XBPM:P1us:y:CalFactor2M S25IDFE-XBPM:P1us:y:LowPass1sM            / S25IDFE-XBPM:P1us:y:LowPass1sM S25IDFE-XBPM:P1us:y:LowPass8sM            / S25IDFE-XBPM:P1us:y:LowPass8sM S25IDFE-XBPM:P1us:y:LowPass64sM           / S25IDFE-XBPM:P1us:y:LowPass64sM S25IDFE-XBPM:P1us:y:Offset1M              / S25IDFE-XBPM:P1us:y:Offset1M S25IDFE-XBPM:P1us:y:Offset2M              / S25IDFE-XBPM:P1us:y:Offset2M S25IDFE-XBPM:P1us:y:ResolutionM           / S25IDFE-XBPM:P1us:y:ResolutionM S25IDFE-XBPM:P1us:y:Resolution1sM         / S25IDFE-XBPM:P1us:y:Resolution1sM S25IDFE-XBPM:P1us:y:Resolution8sM         / S25IDFE-XBPM:P1us:y:Resolution8sM S25IDFE-XBPM:P1us:y:Resolution64sM        / S25IDFE-XBPM:P1us:y:Resolution64sM S25IDFE-XBPM:P1us:y:StdDevM               / S25IDFE-XBPM:P1us:y:StdDevM S25IDFE-XBPM:P1us:y:StdDev1sM             / S25IDFE-XBPM:P1us:y:StdDev1sM S25IDFE-XBPM:P1us:y:StdDev8sM             / S25IDFE-XBPM:P1us:y:StdDev8sM S25IDFE-XBPM:P1us:y:StdDev64sM            / S25IDFE-XBPM:P1us:y:StdDev64sM S25IDFE-XBPM:P1us:y1:LowPass1sM           / S25IDFE-XBPM:P1us:y1:LowPass1sM S25IDFE-XBPM:P1us:y1:LowPass8sM           / S25IDFE-XBPM:P1us:y1:LowPass8sM S25IDFE-XBPM:P1us:y1:LowPass64sM          / S25IDFE-XBPM:P1us:y1:LowPass64sM S25IDFE-XBPM:P1us:y2:LowPass1sM           / S25IDFE-XBPM:P1us:y2:LowPass1sM S25IDFE-XBPM:P1us:y2:LowPass8sM           / S25IDFE-XBPM:P1us:y2:LowPass8sM S25IDFE-XBPM:P1us:y2:LowPass64sM          / S25IDFE-XBPM:P1us:y2:LowPass64sM S25IDFE-XBPM:P2ds:GapUsedC                / S25IDFE-XBPM:P2ds:GapUsedC S25IDFE-XBPM:P2ds:XCalM                   / S25IDFE-XBPM:P2ds:XCalM S25IDFE-XBPM:P2ds:YCalM                   / S25IDFE-XBPM:P2ds:YCalM S25IDFE-XBPM:P2ds:x:CalFactorM            / S25IDFE-XBPM:P2ds:x:CalFactorM S25IDFE-XBPM:P2ds:x:OffsetM               / S25IDFE-XBPM:P2ds:x:OffsetM S25IDFE-XBPM:P2ds:y:CalFactorM            / S25IDFE-XBPM:P2ds:y:CalFactorM S25IDFE-XBPM:P2ds:y:OffsetM               / S25IDFE-XBPM:P2ds:y:OffsetM S25IDFE-XBPM:P2us:GapUsedC                / S25IDFE-XBPM:P2us:GapUsedC S25IDFE-XBPM:P2us:XCalM                   / S25IDFE-XBPM:P2us:XCalM S25IDFE-XBPM:P2us:YCalM                   / S25IDFE-XBPM:P2us:YCalM S25IDFE-XBPM:P2us:x:CalFactorM            / S25IDFE-XBPM:P2us:x:CalFactorM S25IDFE-XBPM:P2us:x:OffsetM               / S25IDFE-XBPM:P2us:x:OffsetM S25IDFE-XBPM:P2us:y:CalFactorM            / S25IDFE-XBPM:P2us:y:CalFactorM S25IDFE-XBPM:P2us:y:OffsetM               / S25IDFE-XBPM:P2us:y:OffsetM S26IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S26IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S26IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S26IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S26IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S26IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S26IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S26IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S26IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S26IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S26IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S26IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S26IDFE-XBPM:CM1ds:PositionOffsetX        / S26IDFE-XBPM:CM1ds:PositionOffsetX S26IDFE-XBPM:CM1ds:PositionOffsetY        / S26IDFE-XBPM:CM1ds:PositionOffsetY S26IDFE-XBPM:CM1ds:PositionScaleX         / S26IDFE-XBPM:CM1ds:PositionScaleX S26IDFE-XBPM:CM1ds:PositionScaleY         / S26IDFE-XBPM:CM1ds:PositionScaleY S26IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S26IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S26IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S26IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S26IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S26IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S26IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S26IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S26IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S26IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S26IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S26IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S26IDFE-XBPM:CM2ds:PositionOffsetX        / S26IDFE-XBPM:CM2ds:PositionOffsetX S26IDFE-XBPM:CM2ds:PositionOffsetY        / S26IDFE-XBPM:CM2ds:PositionOffsetY S26IDFE-XBPM:CM2ds:PositionScaleX         / S26IDFE-XBPM:CM2ds:PositionScaleX S26IDFE-XBPM:CM2ds:PositionScaleY         / S26IDFE-XBPM:CM2ds:PositionScaleY S26IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S26IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S26IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S26IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S26IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S26IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S26IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S26IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S26IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S26IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S26IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S26IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S26IDFE-XBPM:CM3ds:PositionOffsetX        / S26IDFE-XBPM:CM3ds:PositionOffsetX S26IDFE-XBPM:CM3ds:PositionOffsetY        / S26IDFE-XBPM:CM3ds:PositionOffsetY S26IDFE-XBPM:CM3ds:PositionScaleX         / S26IDFE-XBPM:CM3ds:PositionScaleX S26IDFE-XBPM:CM3ds:PositionScaleY         / S26IDFE-XBPM:CM3ds:PositionScaleY S26IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S26IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S26IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S26IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S26IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S26IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S26IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S26IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S26IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S26IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S26IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S26IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S26IDFE-XBPM:CM4ds:PositionOffsetX        / S26IDFE-XBPM:CM4ds:PositionOffsetX S26IDFE-XBPM:CM4ds:PositionOffsetY        / S26IDFE-XBPM:CM4ds:PositionOffsetY S26IDFE-XBPM:CM4ds:PositionScaleX         / S26IDFE-XBPM:CM4ds:PositionScaleX S26IDFE-XBPM:CM4ds:PositionScaleY         / S26IDFE-XBPM:CM4ds:PositionScaleY S26IDFE-XBPM:P1ds:BMcUsedM                / S26IDFE-XBPM:P1ds:BMcUsedM S26IDFE-XBPM:P1ds:GapUsedC                / S26IDFE-XBPM:P1ds:GapUsedC S26IDFE-XBPM:P1ds:Wx1UsedM                / S26IDFE-XBPM:P1ds:Wx1UsedM S26IDFE-XBPM:P1ds:Wx2UsedM                / S26IDFE-XBPM:P1ds:Wx2UsedM S26IDFE-XBPM:P1ds:Wx3UsedM                / S26IDFE-XBPM:P1ds:Wx3UsedM S26IDFE-XBPM:P1ds:Wy1UsedM                / S26IDFE-XBPM:P1ds:Wy1UsedM S26IDFE-XBPM:P1ds:Wy2UsedM                / S26IDFE-XBPM:P1ds:Wy2UsedM S26IDFE-XBPM:P1ds:Wy3UsedM                / S26IDFE-XBPM:P1ds:Wy3UsedM S26IDFE-XBPM:P1ds:x                       / S26IDFE-XBPM:P1ds:x S26IDFE-XBPM:P1ds:x:CalFactor1M           / S26IDFE-XBPM:P1ds:x:CalFactor1M S26IDFE-XBPM:P1ds:x:CalFactor2M           / S26IDFE-XBPM:P1ds:x:CalFactor2M S26IDFE-XBPM:P1ds:x:LowPass1sM            / S26IDFE-XBPM:P1ds:x:LowPass1sM S26IDFE-XBPM:P1ds:x:LowPass8sM            / S26IDFE-XBPM:P1ds:x:LowPass8sM S26IDFE-XBPM:P1ds:x:LowPass64sM           / S26IDFE-XBPM:P1ds:x:LowPass64sM S26IDFE-XBPM:P1ds:x:Offset1M              / S26IDFE-XBPM:P1ds:x:Offset1M S26IDFE-XBPM:P1ds:x:Offset2M              / S26IDFE-XBPM:P1ds:x:Offset2M S26IDFE-XBPM:P1ds:x:ResolutionM           / S26IDFE-XBPM:P1ds:x:ResolutionM S26IDFE-XBPM:P1ds:x:Resolution1sM         / S26IDFE-XBPM:P1ds:x:Resolution1sM S26IDFE-XBPM:P1ds:x:Resolution8sM         / S26IDFE-XBPM:P1ds:x:Resolution8sM S26IDFE-XBPM:P1ds:x:Resolution64sM        / S26IDFE-XBPM:P1ds:x:Resolution64sM S26IDFE-XBPM:P1ds:x:StdDevM               / S26IDFE-XBPM:P1ds:x:StdDevM S26IDFE-XBPM:P1ds:x:StdDev1sM             / S26IDFE-XBPM:P1ds:x:StdDev1sM S26IDFE-XBPM:P1ds:x:StdDev8sM             / S26IDFE-XBPM:P1ds:x:StdDev8sM S26IDFE-XBPM:P1ds:x:StdDev64sM            / S26IDFE-XBPM:P1ds:x:StdDev64sM S26IDFE-XBPM:P1ds:x1:LowPass1sM           / S26IDFE-XBPM:P1ds:x1:LowPass1sM S26IDFE-XBPM:P1ds:x1:LowPass8sM           / S26IDFE-XBPM:P1ds:x1:LowPass8sM S26IDFE-XBPM:P1ds:x1:LowPass64sM          / S26IDFE-XBPM:P1ds:x1:LowPass64sM S26IDFE-XBPM:P1ds:x2:LowPass1sM           / S26IDFE-XBPM:P1ds:x2:LowPass1sM S26IDFE-XBPM:P1ds:x2:LowPass8sM           / S26IDFE-XBPM:P1ds:x2:LowPass8sM S26IDFE-XBPM:P1ds:x2:LowPass64sM          / S26IDFE-XBPM:P1ds:x2:LowPass64sM S26IDFE-XBPM:P1ds:y                       / S26IDFE-XBPM:P1ds:y S26IDFE-XBPM:P1ds:y:CalFactor1M           / S26IDFE-XBPM:P1ds:y:CalFactor1M S26IDFE-XBPM:P1ds:y:CalFactor2M           / S26IDFE-XBPM:P1ds:y:CalFactor2M S26IDFE-XBPM:P1ds:y:LowPass1sM            / S26IDFE-XBPM:P1ds:y:LowPass1sM S26IDFE-XBPM:P1ds:y:LowPass8sM            / S26IDFE-XBPM:P1ds:y:LowPass8sM S26IDFE-XBPM:P1ds:y:LowPass64sM           / S26IDFE-XBPM:P1ds:y:LowPass64sM S26IDFE-XBPM:P1ds:y:Offset1M              / S26IDFE-XBPM:P1ds:y:Offset1M S26IDFE-XBPM:P1ds:y:Offset2M              / S26IDFE-XBPM:P1ds:y:Offset2M S26IDFE-XBPM:P1ds:y:ResolutionM           / S26IDFE-XBPM:P1ds:y:ResolutionM S26IDFE-XBPM:P1ds:y:Resolution1sM         / S26IDFE-XBPM:P1ds:y:Resolution1sM S26IDFE-XBPM:P1ds:y:Resolution8sM         / S26IDFE-XBPM:P1ds:y:Resolution8sM S26IDFE-XBPM:P1ds:y:Resolution64sM        / S26IDFE-XBPM:P1ds:y:Resolution64sM S26IDFE-XBPM:P1ds:y:StdDevM               / S26IDFE-XBPM:P1ds:y:StdDevM S26IDFE-XBPM:P1ds:y:StdDev1sM             / S26IDFE-XBPM:P1ds:y:StdDev1sM S26IDFE-XBPM:P1ds:y:StdDev8sM             / S26IDFE-XBPM:P1ds:y:StdDev8sM S26IDFE-XBPM:P1ds:y:StdDev64sM            / S26IDFE-XBPM:P1ds:y:StdDev64sM S26IDFE-XBPM:P1ds:y1:LowPass1sM           / S26IDFE-XBPM:P1ds:y1:LowPass1sM S26IDFE-XBPM:P1ds:y1:LowPass8sM           / S26IDFE-XBPM:P1ds:y1:LowPass8sM S26IDFE-XBPM:P1ds:y1:LowPass64sM          / S26IDFE-XBPM:P1ds:y1:LowPass64sM S26IDFE-XBPM:P1ds:y2:LowPass1sM           / S26IDFE-XBPM:P1ds:y2:LowPass1sM S26IDFE-XBPM:P1ds:y2:LowPass8sM           / S26IDFE-XBPM:P1ds:y2:LowPass8sM S26IDFE-XBPM:P1ds:y2:LowPass64sM          / S26IDFE-XBPM:P1ds:y2:LowPass64sM S26IDFE-XBPM:P2ds:GapUsedC                / S26IDFE-XBPM:P2ds:GapUsedC S26IDFE-XBPM:P2ds:XCalM                   / S26IDFE-XBPM:P2ds:XCalM S26IDFE-XBPM:P2ds:YCalM                   / S26IDFE-XBPM:P2ds:YCalM S26IDFE-XBPM:P2ds:x:CalFactorM            / S26IDFE-XBPM:P2ds:x:CalFactorM S26IDFE-XBPM:P2ds:x:OffsetM               / S26IDFE-XBPM:P2ds:x:OffsetM S26IDFE-XBPM:P2ds:y:CalFactorM            / S26IDFE-XBPM:P2ds:y:CalFactorM S26IDFE-XBPM:P2ds:y:OffsetM               / S26IDFE-XBPM:P2ds:y:OffsetM S27IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S27IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S27IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S27IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S27IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S27IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S27IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S27IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S27IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S27IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S27IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S27IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S27IDFE-XBPM:CM1ds:PositionOffsetX        / S27IDFE-XBPM:CM1ds:PositionOffsetX S27IDFE-XBPM:CM1ds:PositionOffsetY        / S27IDFE-XBPM:CM1ds:PositionOffsetY S27IDFE-XBPM:CM1ds:PositionScaleX         / S27IDFE-XBPM:CM1ds:PositionScaleX S27IDFE-XBPM:CM1ds:PositionScaleY         / S27IDFE-XBPM:CM1ds:PositionScaleY S27IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S27IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S27IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S27IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S27IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S27IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S27IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S27IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S27IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S27IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S27IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S27IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S27IDFE-XBPM:CM2ds:PositionOffsetX        / S27IDFE-XBPM:CM2ds:PositionOffsetX S27IDFE-XBPM:CM2ds:PositionOffsetY        / S27IDFE-XBPM:CM2ds:PositionOffsetY S27IDFE-XBPM:CM2ds:PositionScaleX         / S27IDFE-XBPM:CM2ds:PositionScaleX S27IDFE-XBPM:CM2ds:PositionScaleY         / S27IDFE-XBPM:CM2ds:PositionScaleY S27IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S27IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S27IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S27IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S27IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S27IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S27IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S27IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S27IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S27IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S27IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S27IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S27IDFE-XBPM:CM3ds:PositionOffsetX        / S27IDFE-XBPM:CM3ds:PositionOffsetX S27IDFE-XBPM:CM3ds:PositionOffsetY        / S27IDFE-XBPM:CM3ds:PositionOffsetY S27IDFE-XBPM:CM3ds:PositionScaleX         / S27IDFE-XBPM:CM3ds:PositionScaleX S27IDFE-XBPM:CM3ds:PositionScaleY         / S27IDFE-XBPM:CM3ds:PositionScaleY S27IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S27IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S27IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S27IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S27IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S27IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S27IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S27IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S27IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S27IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S27IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S27IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S27IDFE-XBPM:CM4ds:PositionOffsetX        / S27IDFE-XBPM:CM4ds:PositionOffsetX S27IDFE-XBPM:CM4ds:PositionOffsetY        / S27IDFE-XBPM:CM4ds:PositionOffsetY S27IDFE-XBPM:CM4ds:PositionScaleX         / S27IDFE-XBPM:CM4ds:PositionScaleX S27IDFE-XBPM:CM4ds:PositionScaleY         / S27IDFE-XBPM:CM4ds:PositionScaleY S27IDFE-XBPM:P1ds:BMcUsedM                / S27IDFE-XBPM:P1ds:BMcUsedM S27IDFE-XBPM:P1ds:GapUsedC                / S27IDFE-XBPM:P1ds:GapUsedC S27IDFE-XBPM:P1ds:Wx1UsedM                / S27IDFE-XBPM:P1ds:Wx1UsedM S27IDFE-XBPM:P1ds:Wx2UsedM                / S27IDFE-XBPM:P1ds:Wx2UsedM S27IDFE-XBPM:P1ds:Wx3UsedM                / S27IDFE-XBPM:P1ds:Wx3UsedM S27IDFE-XBPM:P1ds:Wy1UsedM                / S27IDFE-XBPM:P1ds:Wy1UsedM S27IDFE-XBPM:P1ds:Wy2UsedM                / S27IDFE-XBPM:P1ds:Wy2UsedM S27IDFE-XBPM:P1ds:Wy3UsedM                / S27IDFE-XBPM:P1ds:Wy3UsedM S27IDFE-XBPM:P1ds:x                       / S27IDFE-XBPM:P1ds:x S27IDFE-XBPM:P1ds:x:CalFactor1M           / S27IDFE-XBPM:P1ds:x:CalFactor1M S27IDFE-XBPM:P1ds:x:CalFactor2M           / S27IDFE-XBPM:P1ds:x:CalFactor2M S27IDFE-XBPM:P1ds:x:LowPass1sM            / S27IDFE-XBPM:P1ds:x:LowPass1sM S27IDFE-XBPM:P1ds:x:LowPass8sM            / S27IDFE-XBPM:P1ds:x:LowPass8sM S27IDFE-XBPM:P1ds:x:LowPass64sM           / S27IDFE-XBPM:P1ds:x:LowPass64sM S27IDFE-XBPM:P1ds:x:Offset1M              / S27IDFE-XBPM:P1ds:x:Offset1M S27IDFE-XBPM:P1ds:x:Offset2M              / S27IDFE-XBPM:P1ds:x:Offset2M S27IDFE-XBPM:P1ds:x:ResolutionM           / S27IDFE-XBPM:P1ds:x:ResolutionM S27IDFE-XBPM:P1ds:x:Resolution1sM         / S27IDFE-XBPM:P1ds:x:Resolution1sM S27IDFE-XBPM:P1ds:x:Resolution8sM         / S27IDFE-XBPM:P1ds:x:Resolution8sM S27IDFE-XBPM:P1ds:x:Resolution64sM        / S27IDFE-XBPM:P1ds:x:Resolution64sM S27IDFE-XBPM:P1ds:x:StdDevM               / S27IDFE-XBPM:P1ds:x:StdDevM S27IDFE-XBPM:P1ds:x:StdDev1sM             / S27IDFE-XBPM:P1ds:x:StdDev1sM S27IDFE-XBPM:P1ds:x:StdDev8sM             / S27IDFE-XBPM:P1ds:x:StdDev8sM S27IDFE-XBPM:P1ds:x:StdDev64sM            / S27IDFE-XBPM:P1ds:x:StdDev64sM S27IDFE-XBPM:P1ds:x1:LowPass1sM           / S27IDFE-XBPM:P1ds:x1:LowPass1sM S27IDFE-XBPM:P1ds:x1:LowPass8sM           / S27IDFE-XBPM:P1ds:x1:LowPass8sM S27IDFE-XBPM:P1ds:x1:LowPass64sM          / S27IDFE-XBPM:P1ds:x1:LowPass64sM S27IDFE-XBPM:P1ds:x2:LowPass1sM           / S27IDFE-XBPM:P1ds:x2:LowPass1sM S27IDFE-XBPM:P1ds:x2:LowPass8sM           / S27IDFE-XBPM:P1ds:x2:LowPass8sM S27IDFE-XBPM:P1ds:x2:LowPass64sM          / S27IDFE-XBPM:P1ds:x2:LowPass64sM S27IDFE-XBPM:P1ds:y                       / S27IDFE-XBPM:P1ds:y S27IDFE-XBPM:P1ds:y:CalFactor1M           / S27IDFE-XBPM:P1ds:y:CalFactor1M S27IDFE-XBPM:P1ds:y:CalFactor2M           / S27IDFE-XBPM:P1ds:y:CalFactor2M S27IDFE-XBPM:P1ds:y:LowPass1sM            / S27IDFE-XBPM:P1ds:y:LowPass1sM S27IDFE-XBPM:P1ds:y:LowPass8sM            / S27IDFE-XBPM:P1ds:y:LowPass8sM S27IDFE-XBPM:P1ds:y:LowPass64sM           / S27IDFE-XBPM:P1ds:y:LowPass64sM S27IDFE-XBPM:P1ds:y:Offset1M              / S27IDFE-XBPM:P1ds:y:Offset1M S27IDFE-XBPM:P1ds:y:Offset2M              / S27IDFE-XBPM:P1ds:y:Offset2M S27IDFE-XBPM:P1ds:y:ResolutionM           / S27IDFE-XBPM:P1ds:y:ResolutionM S27IDFE-XBPM:P1ds:y:Resolution1sM         / S27IDFE-XBPM:P1ds:y:Resolution1sM S27IDFE-XBPM:P1ds:y:Resolution8sM         / S27IDFE-XBPM:P1ds:y:Resolution8sM S27IDFE-XBPM:P1ds:y:Resolution64sM        / S27IDFE-XBPM:P1ds:y:Resolution64sM S27IDFE-XBPM:P1ds:y:StdDevM               / S27IDFE-XBPM:P1ds:y:StdDevM S27IDFE-XBPM:P1ds:y:StdDev1sM             / S27IDFE-XBPM:P1ds:y:StdDev1sM S27IDFE-XBPM:P1ds:y:StdDev8sM             / S27IDFE-XBPM:P1ds:y:StdDev8sM S27IDFE-XBPM:P1ds:y:StdDev64sM            / S27IDFE-XBPM:P1ds:y:StdDev64sM S27IDFE-XBPM:P1ds:y1:LowPass1sM           / S27IDFE-XBPM:P1ds:y1:LowPass1sM S27IDFE-XBPM:P1ds:y1:LowPass8sM           / S27IDFE-XBPM:P1ds:y1:LowPass8sM S27IDFE-XBPM:P1ds:y1:LowPass64sM          / S27IDFE-XBPM:P1ds:y1:LowPass64sM S27IDFE-XBPM:P1ds:y2:LowPass1sM           / S27IDFE-XBPM:P1ds:y2:LowPass1sM S27IDFE-XBPM:P1ds:y2:LowPass8sM           / S27IDFE-XBPM:P1ds:y2:LowPass8sM S27IDFE-XBPM:P1ds:y2:LowPass64sM          / S27IDFE-XBPM:P1ds:y2:LowPass64sM S27IDFE-XBPM:P2ds:GapUsedC                / S27IDFE-XBPM:P2ds:GapUsedC S27IDFE-XBPM:P2ds:XCalM                   / S27IDFE-XBPM:P2ds:XCalM S27IDFE-XBPM:P2ds:YCalM                   / S27IDFE-XBPM:P2ds:YCalM S27IDFE-XBPM:P2ds:x:CalFactorM            / S27IDFE-XBPM:P2ds:x:CalFactorM S27IDFE-XBPM:P2ds:x:OffsetM               / S27IDFE-XBPM:P2ds:x:OffsetM S27IDFE-XBPM:P2ds:y:CalFactorM            / S27IDFE-XBPM:P2ds:y:CalFactorM S27IDFE-XBPM:P2ds:y:OffsetM               / S27IDFE-XBPM:P2ds:y:OffsetM S28IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S28IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S28IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S28IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S28IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S28IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S28IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S28IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S28IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S28IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S28IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S28IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S28IDFE-XBPM:CM1ds:PositionOffsetX        / S28IDFE-XBPM:CM1ds:PositionOffsetX S28IDFE-XBPM:CM1ds:PositionOffsetY        / S28IDFE-XBPM:CM1ds:PositionOffsetY S28IDFE-XBPM:CM1ds:PositionScaleX         / S28IDFE-XBPM:CM1ds:PositionScaleX S28IDFE-XBPM:CM1ds:PositionScaleY         / S28IDFE-XBPM:CM1ds:PositionScaleY S28IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S28IDFE-XBPM:CM1us:Current1:MeanValue_RBV S28IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S28IDFE-XBPM:CM1us:Current2:MeanValue_RBV S28IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S28IDFE-XBPM:CM1us:Current3:MeanValue_RBV S28IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S28IDFE-XBPM:CM1us:Current4:MeanValue_RBV S28IDFE-XBPM:CM1us:PosX:MeanValue_RBV     / S28IDFE-XBPM:CM1us:PosX:MeanValue_RBV S28IDFE-XBPM:CM1us:PosY:MeanValue_RBV     / S28IDFE-XBPM:CM1us:PosY:MeanValue_RBV S28IDFE-XBPM:CM1us:PositionOffsetX        / S28IDFE-XBPM:CM1us:PositionOffsetX S28IDFE-XBPM:CM1us:PositionOffsetY        / S28IDFE-XBPM:CM1us:PositionOffsetY S28IDFE-XBPM:CM1us:PositionScaleX         / S28IDFE-XBPM:CM1us:PositionScaleX S28IDFE-XBPM:CM1us:PositionScaleY         / S28IDFE-XBPM:CM1us:PositionScaleY S28IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S28IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S28IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S28IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S28IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S28IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S28IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S28IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S28IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S28IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S28IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S28IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S28IDFE-XBPM:CM2ds:PositionOffsetX        / S28IDFE-XBPM:CM2ds:PositionOffsetX S28IDFE-XBPM:CM2ds:PositionOffsetY        / S28IDFE-XBPM:CM2ds:PositionOffsetY S28IDFE-XBPM:CM2ds:PositionScaleX         / S28IDFE-XBPM:CM2ds:PositionScaleX S28IDFE-XBPM:CM2ds:PositionScaleY         / S28IDFE-XBPM:CM2ds:PositionScaleY S28IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S28IDFE-XBPM:CM2us:Current1:MeanValue_RBV S28IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S28IDFE-XBPM:CM2us:Current2:MeanValue_RBV S28IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S28IDFE-XBPM:CM2us:Current3:MeanValue_RBV S28IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S28IDFE-XBPM:CM2us:Current4:MeanValue_RBV S28IDFE-XBPM:CM2us:PosX:MeanValue_RBV     / S28IDFE-XBPM:CM2us:PosX:MeanValue_RBV S28IDFE-XBPM:CM2us:PosY:MeanValue_RBV     / S28IDFE-XBPM:CM2us:PosY:MeanValue_RBV S28IDFE-XBPM:CM2us:PositionOffsetX        / S28IDFE-XBPM:CM2us:PositionOffsetX S28IDFE-XBPM:CM2us:PositionOffsetY        / S28IDFE-XBPM:CM2us:PositionOffsetY S28IDFE-XBPM:CM2us:PositionScaleX         / S28IDFE-XBPM:CM2us:PositionScaleX S28IDFE-XBPM:CM2us:PositionScaleY         / S28IDFE-XBPM:CM2us:PositionScaleY S28IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S28IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S28IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S28IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S28IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S28IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S28IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S28IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S28IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S28IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S28IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S28IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S28IDFE-XBPM:CM3ds:PositionOffsetX        / S28IDFE-XBPM:CM3ds:PositionOffsetX S28IDFE-XBPM:CM3ds:PositionOffsetY        / S28IDFE-XBPM:CM3ds:PositionOffsetY S28IDFE-XBPM:CM3ds:PositionScaleX         / S28IDFE-XBPM:CM3ds:PositionScaleX S28IDFE-XBPM:CM3ds:PositionScaleY         / S28IDFE-XBPM:CM3ds:PositionScaleY S28IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S28IDFE-XBPM:CM3us:Current1:MeanValue_RBV S28IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S28IDFE-XBPM:CM3us:Current2:MeanValue_RBV S28IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S28IDFE-XBPM:CM3us:Current3:MeanValue_RBV S28IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S28IDFE-XBPM:CM3us:Current4:MeanValue_RBV S28IDFE-XBPM:CM3us:PosX:MeanValue_RBV     / S28IDFE-XBPM:CM3us:PosX:MeanValue_RBV S28IDFE-XBPM:CM3us:PosY:MeanValue_RBV     / S28IDFE-XBPM:CM3us:PosY:MeanValue_RBV S28IDFE-XBPM:CM3us:PositionOffsetX        / S28IDFE-XBPM:CM3us:PositionOffsetX S28IDFE-XBPM:CM3us:PositionOffsetY        / S28IDFE-XBPM:CM3us:PositionOffsetY S28IDFE-XBPM:CM3us:PositionScaleX         / S28IDFE-XBPM:CM3us:PositionScaleX S28IDFE-XBPM:CM3us:PositionScaleY         / S28IDFE-XBPM:CM3us:PositionScaleY S28IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S28IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S28IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S28IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S28IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S28IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S28IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S28IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S28IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S28IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S28IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S28IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S28IDFE-XBPM:CM4ds:PositionOffsetX        / S28IDFE-XBPM:CM4ds:PositionOffsetX S28IDFE-XBPM:CM4ds:PositionOffsetY        / S28IDFE-XBPM:CM4ds:PositionOffsetY S28IDFE-XBPM:CM4ds:PositionScaleX         / S28IDFE-XBPM:CM4ds:PositionScaleX S28IDFE-XBPM:CM4ds:PositionScaleY         / S28IDFE-XBPM:CM4ds:PositionScaleY S28IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S28IDFE-XBPM:CM4us:Current1:MeanValue_RBV S28IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S28IDFE-XBPM:CM4us:Current2:MeanValue_RBV S28IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S28IDFE-XBPM:CM4us:Current3:MeanValue_RBV S28IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S28IDFE-XBPM:CM4us:Current4:MeanValue_RBV S28IDFE-XBPM:CM4us:PosX:MeanValue_RBV     / S28IDFE-XBPM:CM4us:PosX:MeanValue_RBV S28IDFE-XBPM:CM4us:PosY:MeanValue_RBV     / S28IDFE-XBPM:CM4us:PosY:MeanValue_RBV S28IDFE-XBPM:CM4us:PositionOffsetX        / S28IDFE-XBPM:CM4us:PositionOffsetX S28IDFE-XBPM:CM4us:PositionOffsetY        / S28IDFE-XBPM:CM4us:PositionOffsetY S28IDFE-XBPM:CM4us:PositionScaleX         / S28IDFE-XBPM:CM4us:PositionScaleX S28IDFE-XBPM:CM4us:PositionScaleY         / S28IDFE-XBPM:CM4us:PositionScaleY S28IDFE-XBPM:P1ds:BMcUsedM                / S28IDFE-XBPM:P1ds:BMcUsedM S28IDFE-XBPM:P1ds:GapUsedC                / S28IDFE-XBPM:P1ds:GapUsedC S28IDFE-XBPM:P1ds:Wx1UsedM                / S28IDFE-XBPM:P1ds:Wx1UsedM S28IDFE-XBPM:P1ds:Wx2UsedM                / S28IDFE-XBPM:P1ds:Wx2UsedM S28IDFE-XBPM:P1ds:Wx3UsedM                / S28IDFE-XBPM:P1ds:Wx3UsedM S28IDFE-XBPM:P1ds:Wy1UsedM                / S28IDFE-XBPM:P1ds:Wy1UsedM S28IDFE-XBPM:P1ds:Wy2UsedM                / S28IDFE-XBPM:P1ds:Wy2UsedM S28IDFE-XBPM:P1ds:Wy3UsedM                / S28IDFE-XBPM:P1ds:Wy3UsedM S28IDFE-XBPM:P1ds:x                       / S28IDFE-XBPM:P1ds:x S28IDFE-XBPM:P1ds:x:CalFactor1M           / S28IDFE-XBPM:P1ds:x:CalFactor1M S28IDFE-XBPM:P1ds:x:CalFactor2M           / S28IDFE-XBPM:P1ds:x:CalFactor2M S28IDFE-XBPM:P1ds:x:LowPass1sM            / S28IDFE-XBPM:P1ds:x:LowPass1sM S28IDFE-XBPM:P1ds:x:LowPass8sM            / S28IDFE-XBPM:P1ds:x:LowPass8sM S28IDFE-XBPM:P1ds:x:LowPass64sM           / S28IDFE-XBPM:P1ds:x:LowPass64sM S28IDFE-XBPM:P1ds:x:Offset1M              / S28IDFE-XBPM:P1ds:x:Offset1M S28IDFE-XBPM:P1ds:x:Offset2M              / S28IDFE-XBPM:P1ds:x:Offset2M S28IDFE-XBPM:P1ds:x:ResolutionM           / S28IDFE-XBPM:P1ds:x:ResolutionM S28IDFE-XBPM:P1ds:x:Resolution1sM         / S28IDFE-XBPM:P1ds:x:Resolution1sM S28IDFE-XBPM:P1ds:x:Resolution8sM         / S28IDFE-XBPM:P1ds:x:Resolution8sM S28IDFE-XBPM:P1ds:x:Resolution64sM        / S28IDFE-XBPM:P1ds:x:Resolution64sM S28IDFE-XBPM:P1ds:x:StdDevM               / S28IDFE-XBPM:P1ds:x:StdDevM S28IDFE-XBPM:P1ds:x:StdDev1sM             / S28IDFE-XBPM:P1ds:x:StdDev1sM S28IDFE-XBPM:P1ds:x:StdDev8sM             / S28IDFE-XBPM:P1ds:x:StdDev8sM S28IDFE-XBPM:P1ds:x:StdDev64sM            / S28IDFE-XBPM:P1ds:x:StdDev64sM S28IDFE-XBPM:P1ds:x1:LowPass1sM           / S28IDFE-XBPM:P1ds:x1:LowPass1sM S28IDFE-XBPM:P1ds:x1:LowPass8sM           / S28IDFE-XBPM:P1ds:x1:LowPass8sM S28IDFE-XBPM:P1ds:x1:LowPass64sM          / S28IDFE-XBPM:P1ds:x1:LowPass64sM S28IDFE-XBPM:P1ds:x2:LowPass1sM           / S28IDFE-XBPM:P1ds:x2:LowPass1sM S28IDFE-XBPM:P1ds:x2:LowPass8sM           / S28IDFE-XBPM:P1ds:x2:LowPass8sM S28IDFE-XBPM:P1ds:x2:LowPass64sM          / S28IDFE-XBPM:P1ds:x2:LowPass64sM S28IDFE-XBPM:P1ds:y                       / S28IDFE-XBPM:P1ds:y S28IDFE-XBPM:P1ds:y:CalFactor1M           / S28IDFE-XBPM:P1ds:y:CalFactor1M S28IDFE-XBPM:P1ds:y:CalFactor2M           / S28IDFE-XBPM:P1ds:y:CalFactor2M S28IDFE-XBPM:P1ds:y:LowPass1sM            / S28IDFE-XBPM:P1ds:y:LowPass1sM S28IDFE-XBPM:P1ds:y:LowPass8sM            / S28IDFE-XBPM:P1ds:y:LowPass8sM S28IDFE-XBPM:P1ds:y:LowPass64sM           / S28IDFE-XBPM:P1ds:y:LowPass64sM S28IDFE-XBPM:P1ds:y:Offset1M              / S28IDFE-XBPM:P1ds:y:Offset1M S28IDFE-XBPM:P1ds:y:Offset2M              / S28IDFE-XBPM:P1ds:y:Offset2M S28IDFE-XBPM:P1ds:y:ResolutionM           / S28IDFE-XBPM:P1ds:y:ResolutionM S28IDFE-XBPM:P1ds:y:Resolution1sM         / S28IDFE-XBPM:P1ds:y:Resolution1sM S28IDFE-XBPM:P1ds:y:Resolution8sM         / S28IDFE-XBPM:P1ds:y:Resolution8sM S28IDFE-XBPM:P1ds:y:Resolution64sM        / S28IDFE-XBPM:P1ds:y:Resolution64sM S28IDFE-XBPM:P1ds:y:StdDevM               / S28IDFE-XBPM:P1ds:y:StdDevM S28IDFE-XBPM:P1ds:y:StdDev1sM             / S28IDFE-XBPM:P1ds:y:StdDev1sM S28IDFE-XBPM:P1ds:y:StdDev8sM             / S28IDFE-XBPM:P1ds:y:StdDev8sM S28IDFE-XBPM:P1ds:y:StdDev64sM            / S28IDFE-XBPM:P1ds:y:StdDev64sM S28IDFE-XBPM:P1ds:y1:LowPass1sM           / S28IDFE-XBPM:P1ds:y1:LowPass1sM S28IDFE-XBPM:P1ds:y1:LowPass8sM           / S28IDFE-XBPM:P1ds:y1:LowPass8sM S28IDFE-XBPM:P1ds:y1:LowPass64sM          / S28IDFE-XBPM:P1ds:y1:LowPass64sM S28IDFE-XBPM:P1ds:y2:LowPass1sM           / S28IDFE-XBPM:P1ds:y2:LowPass1sM S28IDFE-XBPM:P1ds:y2:LowPass8sM           / S28IDFE-XBPM:P1ds:y2:LowPass8sM S28IDFE-XBPM:P1ds:y2:LowPass64sM          / S28IDFE-XBPM:P1ds:y2:LowPass64sM S28IDFE-XBPM:P1us:BMcUsedM                / S28IDFE-XBPM:P1us:BMcUsedM S28IDFE-XBPM:P1us:GapUsedC                / S28IDFE-XBPM:P1us:GapUsedC S28IDFE-XBPM:P1us:Wx1UsedM                / S28IDFE-XBPM:P1us:Wx1UsedM S28IDFE-XBPM:P1us:Wx2UsedM                / S28IDFE-XBPM:P1us:Wx2UsedM S28IDFE-XBPM:P1us:Wx3UsedM                / S28IDFE-XBPM:P1us:Wx3UsedM S28IDFE-XBPM:P1us:Wy1UsedM                / S28IDFE-XBPM:P1us:Wy1UsedM S28IDFE-XBPM:P1us:Wy2UsedM                / S28IDFE-XBPM:P1us:Wy2UsedM S28IDFE-XBPM:P1us:Wy3UsedM                / S28IDFE-XBPM:P1us:Wy3UsedM S28IDFE-XBPM:P1us:x                       / S28IDFE-XBPM:P1us:x S28IDFE-XBPM:P1us:x:CalFactor1M           / S28IDFE-XBPM:P1us:x:CalFactor1M S28IDFE-XBPM:P1us:x:CalFactor2M           / S28IDFE-XBPM:P1us:x:CalFactor2M S28IDFE-XBPM:P1us:x:LowPass1sM            / S28IDFE-XBPM:P1us:x:LowPass1sM S28IDFE-XBPM:P1us:x:LowPass8sM            / S28IDFE-XBPM:P1us:x:LowPass8sM S28IDFE-XBPM:P1us:x:LowPass64sM           / S28IDFE-XBPM:P1us:x:LowPass64sM S28IDFE-XBPM:P1us:x:Offset1M              / S28IDFE-XBPM:P1us:x:Offset1M S28IDFE-XBPM:P1us:x:Offset2M              / S28IDFE-XBPM:P1us:x:Offset2M S28IDFE-XBPM:P1us:x:ResolutionM           / S28IDFE-XBPM:P1us:x:ResolutionM S28IDFE-XBPM:P1us:x:Resolution1sM         / S28IDFE-XBPM:P1us:x:Resolution1sM S28IDFE-XBPM:P1us:x:Resolution8sM         / S28IDFE-XBPM:P1us:x:Resolution8sM S28IDFE-XBPM:P1us:x:Resolution64sM        / S28IDFE-XBPM:P1us:x:Resolution64sM S28IDFE-XBPM:P1us:x:StdDevM               / S28IDFE-XBPM:P1us:x:StdDevM S28IDFE-XBPM:P1us:x:StdDev1sM             / S28IDFE-XBPM:P1us:x:StdDev1sM S28IDFE-XBPM:P1us:x:StdDev8sM             / S28IDFE-XBPM:P1us:x:StdDev8sM S28IDFE-XBPM:P1us:x:StdDev64sM            / S28IDFE-XBPM:P1us:x:StdDev64sM S28IDFE-XBPM:P1us:x1:LowPass1sM           / S28IDFE-XBPM:P1us:x1:LowPass1sM S28IDFE-XBPM:P1us:x1:LowPass8sM           / S28IDFE-XBPM:P1us:x1:LowPass8sM S28IDFE-XBPM:P1us:x1:LowPass64sM          / S28IDFE-XBPM:P1us:x1:LowPass64sM S28IDFE-XBPM:P1us:x2:LowPass1sM           / S28IDFE-XBPM:P1us:x2:LowPass1sM S28IDFE-XBPM:P1us:x2:LowPass8sM           / S28IDFE-XBPM:P1us:x2:LowPass8sM S28IDFE-XBPM:P1us:x2:LowPass64sM          / S28IDFE-XBPM:P1us:x2:LowPass64sM S28IDFE-XBPM:P1us:y                       / S28IDFE-XBPM:P1us:y S28IDFE-XBPM:P1us:y:CalFactor1M           / S28IDFE-XBPM:P1us:y:CalFactor1M S28IDFE-XBPM:P1us:y:CalFactor2M           / S28IDFE-XBPM:P1us:y:CalFactor2M S28IDFE-XBPM:P1us:y:LowPass1sM            / S28IDFE-XBPM:P1us:y:LowPass1sM S28IDFE-XBPM:P1us:y:LowPass8sM            / S28IDFE-XBPM:P1us:y:LowPass8sM S28IDFE-XBPM:P1us:y:LowPass64sM           / S28IDFE-XBPM:P1us:y:LowPass64sM S28IDFE-XBPM:P1us:y:Offset1M              / S28IDFE-XBPM:P1us:y:Offset1M S28IDFE-XBPM:P1us:y:Offset2M              / S28IDFE-XBPM:P1us:y:Offset2M S28IDFE-XBPM:P1us:y:ResolutionM           / S28IDFE-XBPM:P1us:y:ResolutionM S28IDFE-XBPM:P1us:y:Resolution1sM         / S28IDFE-XBPM:P1us:y:Resolution1sM S28IDFE-XBPM:P1us:y:Resolution8sM         / S28IDFE-XBPM:P1us:y:Resolution8sM S28IDFE-XBPM:P1us:y:Resolution64sM        / S28IDFE-XBPM:P1us:y:Resolution64sM S28IDFE-XBPM:P1us:y:StdDevM               / S28IDFE-XBPM:P1us:y:StdDevM S28IDFE-XBPM:P1us:y:StdDev1sM             / S28IDFE-XBPM:P1us:y:StdDev1sM S28IDFE-XBPM:P1us:y:StdDev8sM             / S28IDFE-XBPM:P1us:y:StdDev8sM S28IDFE-XBPM:P1us:y:StdDev64sM            / S28IDFE-XBPM:P1us:y:StdDev64sM S28IDFE-XBPM:P1us:y1:LowPass1sM           / S28IDFE-XBPM:P1us:y1:LowPass1sM S28IDFE-XBPM:P1us:y1:LowPass8sM           / S28IDFE-XBPM:P1us:y1:LowPass8sM S28IDFE-XBPM:P1us:y1:LowPass64sM          / S28IDFE-XBPM:P1us:y1:LowPass64sM S28IDFE-XBPM:P1us:y2:LowPass1sM           / S28IDFE-XBPM:P1us:y2:LowPass1sM S28IDFE-XBPM:P1us:y2:LowPass8sM           / S28IDFE-XBPM:P1us:y2:LowPass8sM S28IDFE-XBPM:P1us:y2:LowPass64sM          / S28IDFE-XBPM:P1us:y2:LowPass64sM S28IDFE-XBPM:P2ds:GapUsedC                / S28IDFE-XBPM:P2ds:GapUsedC S28IDFE-XBPM:P2ds:XCalM                   / S28IDFE-XBPM:P2ds:XCalM S28IDFE-XBPM:P2ds:YCalM                   / S28IDFE-XBPM:P2ds:YCalM S28IDFE-XBPM:P2ds:x:CalFactorM            / S28IDFE-XBPM:P2ds:x:CalFactorM S28IDFE-XBPM:P2ds:x:OffsetM               / S28IDFE-XBPM:P2ds:x:OffsetM S28IDFE-XBPM:P2ds:y:CalFactorM            / S28IDFE-XBPM:P2ds:y:CalFactorM S28IDFE-XBPM:P2ds:y:OffsetM               / S28IDFE-XBPM:P2ds:y:OffsetM S28IDFE-XBPM:P2us:GapUsedC                / S28IDFE-XBPM:P2us:GapUsedC S28IDFE-XBPM:P2us:XCalM                   / S28IDFE-XBPM:P2us:XCalM S28IDFE-XBPM:P2us:YCalM                   / S28IDFE-XBPM:P2us:YCalM S28IDFE-XBPM:P2us:x:CalFactorM            / S28IDFE-XBPM:P2us:x:CalFactorM S28IDFE-XBPM:P2us:x:OffsetM               / S28IDFE-XBPM:P2us:x:OffsetM S28IDFE-XBPM:P2us:y:CalFactorM            / S28IDFE-XBPM:P2us:y:CalFactorM S28IDFE-XBPM:P2us:y:OffsetM               / S28IDFE-XBPM:P2us:y:OffsetM S29IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S29IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S29IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S29IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S29IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S29IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S29IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S29IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S29IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S29IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S29IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S29IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S29IDFE-XBPM:CM1ds:PositionOffsetX        / S29IDFE-XBPM:CM1ds:PositionOffsetX S29IDFE-XBPM:CM1ds:PositionOffsetY        / S29IDFE-XBPM:CM1ds:PositionOffsetY S29IDFE-XBPM:CM1ds:PositionScaleX         / S29IDFE-XBPM:CM1ds:PositionScaleX S29IDFE-XBPM:CM1ds:PositionScaleY         / S29IDFE-XBPM:CM1ds:PositionScaleY S29IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S29IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S29IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S29IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S29IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S29IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S29IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S29IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S29IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S29IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S29IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S29IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S29IDFE-XBPM:CM2ds:PositionOffsetX        / S29IDFE-XBPM:CM2ds:PositionOffsetX S29IDFE-XBPM:CM2ds:PositionOffsetY        / S29IDFE-XBPM:CM2ds:PositionOffsetY S29IDFE-XBPM:CM2ds:PositionScaleX         / S29IDFE-XBPM:CM2ds:PositionScaleX S29IDFE-XBPM:CM2ds:PositionScaleY         / S29IDFE-XBPM:CM2ds:PositionScaleY S29IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S29IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S29IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S29IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S29IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S29IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S29IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S29IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S29IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S29IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S29IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S29IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S29IDFE-XBPM:CM3ds:PositionOffsetX        / S29IDFE-XBPM:CM3ds:PositionOffsetX S29IDFE-XBPM:CM3ds:PositionOffsetY        / S29IDFE-XBPM:CM3ds:PositionOffsetY S29IDFE-XBPM:CM3ds:PositionScaleX         / S29IDFE-XBPM:CM3ds:PositionScaleX S29IDFE-XBPM:CM3ds:PositionScaleY         / S29IDFE-XBPM:CM3ds:PositionScaleY S29IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S29IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S29IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S29IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S29IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S29IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S29IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S29IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S29IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S29IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S29IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S29IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S29IDFE-XBPM:CM4ds:PositionOffsetX        / S29IDFE-XBPM:CM4ds:PositionOffsetX S29IDFE-XBPM:CM4ds:PositionOffsetY        / S29IDFE-XBPM:CM4ds:PositionOffsetY S29IDFE-XBPM:CM4ds:PositionScaleX         / S29IDFE-XBPM:CM4ds:PositionScaleX S29IDFE-XBPM:CM4ds:PositionScaleY         / S29IDFE-XBPM:CM4ds:PositionScaleY S29IDFE-XBPM:P1ds:BMcUsedM                / S29IDFE-XBPM:P1ds:BMcUsedM S29IDFE-XBPM:P1ds:GapUsedC                / S29IDFE-XBPM:P1ds:GapUsedC S29IDFE-XBPM:P1ds:Wx1UsedM                / S29IDFE-XBPM:P1ds:Wx1UsedM S29IDFE-XBPM:P1ds:Wx2UsedM                / S29IDFE-XBPM:P1ds:Wx2UsedM S29IDFE-XBPM:P1ds:Wx3UsedM                / S29IDFE-XBPM:P1ds:Wx3UsedM S29IDFE-XBPM:P1ds:Wy1UsedM                / S29IDFE-XBPM:P1ds:Wy1UsedM S29IDFE-XBPM:P1ds:Wy2UsedM                / S29IDFE-XBPM:P1ds:Wy2UsedM S29IDFE-XBPM:P1ds:Wy3UsedM                / S29IDFE-XBPM:P1ds:Wy3UsedM S29IDFE-XBPM:P1ds:x                       / S29IDFE-XBPM:P1ds:x S29IDFE-XBPM:P1ds:x:CalFactor1M           / S29IDFE-XBPM:P1ds:x:CalFactor1M S29IDFE-XBPM:P1ds:x:CalFactor2M           / S29IDFE-XBPM:P1ds:x:CalFactor2M S29IDFE-XBPM:P1ds:x:LowPass1sM            / S29IDFE-XBPM:P1ds:x:LowPass1sM S29IDFE-XBPM:P1ds:x:LowPass8sM            / S29IDFE-XBPM:P1ds:x:LowPass8sM S29IDFE-XBPM:P1ds:x:LowPass64sM           / S29IDFE-XBPM:P1ds:x:LowPass64sM S29IDFE-XBPM:P1ds:x:Offset1M              / S29IDFE-XBPM:P1ds:x:Offset1M S29IDFE-XBPM:P1ds:x:Offset2M              / S29IDFE-XBPM:P1ds:x:Offset2M S29IDFE-XBPM:P1ds:x:ResolutionM           / S29IDFE-XBPM:P1ds:x:ResolutionM S29IDFE-XBPM:P1ds:x:Resolution1sM         / S29IDFE-XBPM:P1ds:x:Resolution1sM S29IDFE-XBPM:P1ds:x:Resolution8sM         / S29IDFE-XBPM:P1ds:x:Resolution8sM S29IDFE-XBPM:P1ds:x:Resolution64sM        / S29IDFE-XBPM:P1ds:x:Resolution64sM S29IDFE-XBPM:P1ds:x:StdDevM               / S29IDFE-XBPM:P1ds:x:StdDevM S29IDFE-XBPM:P1ds:x:StdDev1sM             / S29IDFE-XBPM:P1ds:x:StdDev1sM S29IDFE-XBPM:P1ds:x:StdDev8sM             / S29IDFE-XBPM:P1ds:x:StdDev8sM S29IDFE-XBPM:P1ds:x:StdDev64sM            / S29IDFE-XBPM:P1ds:x:StdDev64sM S29IDFE-XBPM:P1ds:x1:LowPass1sM           / S29IDFE-XBPM:P1ds:x1:LowPass1sM S29IDFE-XBPM:P1ds:x1:LowPass8sM           / S29IDFE-XBPM:P1ds:x1:LowPass8sM S29IDFE-XBPM:P1ds:x1:LowPass64sM          / S29IDFE-XBPM:P1ds:x1:LowPass64sM S29IDFE-XBPM:P1ds:x2:LowPass1sM           / S29IDFE-XBPM:P1ds:x2:LowPass1sM S29IDFE-XBPM:P1ds:x2:LowPass8sM           / S29IDFE-XBPM:P1ds:x2:LowPass8sM S29IDFE-XBPM:P1ds:x2:LowPass64sM          / S29IDFE-XBPM:P1ds:x2:LowPass64sM S29IDFE-XBPM:P1ds:y                       / S29IDFE-XBPM:P1ds:y S29IDFE-XBPM:P1ds:y:CalFactor1M           / S29IDFE-XBPM:P1ds:y:CalFactor1M S29IDFE-XBPM:P1ds:y:CalFactor2M           / S29IDFE-XBPM:P1ds:y:CalFactor2M S29IDFE-XBPM:P1ds:y:LowPass1sM            / S29IDFE-XBPM:P1ds:y:LowPass1sM S29IDFE-XBPM:P1ds:y:LowPass8sM            / S29IDFE-XBPM:P1ds:y:LowPass8sM S29IDFE-XBPM:P1ds:y:LowPass64sM           / S29IDFE-XBPM:P1ds:y:LowPass64sM S29IDFE-XBPM:P1ds:y:Offset1M              / S29IDFE-XBPM:P1ds:y:Offset1M S29IDFE-XBPM:P1ds:y:Offset2M              / S29IDFE-XBPM:P1ds:y:Offset2M S29IDFE-XBPM:P1ds:y:ResolutionM           / S29IDFE-XBPM:P1ds:y:ResolutionM S29IDFE-XBPM:P1ds:y:Resolution1sM         / S29IDFE-XBPM:P1ds:y:Resolution1sM S29IDFE-XBPM:P1ds:y:Resolution8sM         / S29IDFE-XBPM:P1ds:y:Resolution8sM S29IDFE-XBPM:P1ds:y:Resolution64sM        / S29IDFE-XBPM:P1ds:y:Resolution64sM S29IDFE-XBPM:P1ds:y:StdDevM               / S29IDFE-XBPM:P1ds:y:StdDevM S29IDFE-XBPM:P1ds:y:StdDev1sM             / S29IDFE-XBPM:P1ds:y:StdDev1sM S29IDFE-XBPM:P1ds:y:StdDev8sM             / S29IDFE-XBPM:P1ds:y:StdDev8sM S29IDFE-XBPM:P1ds:y:StdDev64sM            / S29IDFE-XBPM:P1ds:y:StdDev64sM S29IDFE-XBPM:P1ds:y1:LowPass1sM           / S29IDFE-XBPM:P1ds:y1:LowPass1sM S29IDFE-XBPM:P1ds:y1:LowPass8sM           / S29IDFE-XBPM:P1ds:y1:LowPass8sM S29IDFE-XBPM:P1ds:y1:LowPass64sM          / S29IDFE-XBPM:P1ds:y1:LowPass64sM S29IDFE-XBPM:P1ds:y2:LowPass1sM           / S29IDFE-XBPM:P1ds:y2:LowPass1sM S29IDFE-XBPM:P1ds:y2:LowPass8sM           / S29IDFE-XBPM:P1ds:y2:LowPass8sM S29IDFE-XBPM:P1ds:y2:LowPass64sM          / S29IDFE-XBPM:P1ds:y2:LowPass64sM S29IDFE-XBPM:P2ds:GapUsedC                / S29IDFE-XBPM:P2ds:GapUsedC S29IDFE-XBPM:P2ds:XCalM                   / S29IDFE-XBPM:P2ds:XCalM S29IDFE-XBPM:P2ds:YCalM                   / S29IDFE-XBPM:P2ds:YCalM S29IDFE-XBPM:P2ds:x:CalFactorM            / S29IDFE-XBPM:P2ds:x:CalFactorM S29IDFE-XBPM:P2ds:x:OffsetM               / S29IDFE-XBPM:P2ds:x:OffsetM S29IDFE-XBPM:P2ds:y:CalFactorM            / S29IDFE-XBPM:P2ds:y:CalFactorM S29IDFE-XBPM:P2ds:y:OffsetM               / S29IDFE-XBPM:P2ds:y:OffsetM S30IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S30IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S30IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S30IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S30IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S30IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S30IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S30IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S30IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S30IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S30IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S30IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S30IDFE-XBPM:CM1ds:PositionOffsetX        / S30IDFE-XBPM:CM1ds:PositionOffsetX S30IDFE-XBPM:CM1ds:PositionOffsetY        / S30IDFE-XBPM:CM1ds:PositionOffsetY S30IDFE-XBPM:CM1ds:PositionScaleX         / S30IDFE-XBPM:CM1ds:PositionScaleX S30IDFE-XBPM:CM1ds:PositionScaleY         / S30IDFE-XBPM:CM1ds:PositionScaleY S30IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S30IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S30IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S30IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S30IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S30IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S30IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S30IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S30IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S30IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S30IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S30IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S30IDFE-XBPM:CM2ds:PositionOffsetX        / S30IDFE-XBPM:CM2ds:PositionOffsetX S30IDFE-XBPM:CM2ds:PositionOffsetY        / S30IDFE-XBPM:CM2ds:PositionOffsetY S30IDFE-XBPM:CM2ds:PositionScaleX         / S30IDFE-XBPM:CM2ds:PositionScaleX S30IDFE-XBPM:CM2ds:PositionScaleY         / S30IDFE-XBPM:CM2ds:PositionScaleY S30IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S30IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S30IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S30IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S30IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S30IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S30IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S30IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S30IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S30IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S30IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S30IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S30IDFE-XBPM:CM3ds:PositionOffsetX        / S30IDFE-XBPM:CM3ds:PositionOffsetX S30IDFE-XBPM:CM3ds:PositionOffsetY        / S30IDFE-XBPM:CM3ds:PositionOffsetY S30IDFE-XBPM:CM3ds:PositionScaleX         / S30IDFE-XBPM:CM3ds:PositionScaleX S30IDFE-XBPM:CM3ds:PositionScaleY         / S30IDFE-XBPM:CM3ds:PositionScaleY S30IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S30IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S30IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S30IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S30IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S30IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S30IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S30IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S30IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S30IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S30IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S30IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S30IDFE-XBPM:CM4ds:PositionOffsetX        / S30IDFE-XBPM:CM4ds:PositionOffsetX S30IDFE-XBPM:CM4ds:PositionOffsetY        / S30IDFE-XBPM:CM4ds:PositionOffsetY S30IDFE-XBPM:CM4ds:PositionScaleX         / S30IDFE-XBPM:CM4ds:PositionScaleX S30IDFE-XBPM:CM4ds:PositionScaleY         / S30IDFE-XBPM:CM4ds:PositionScaleY S30IDFE-XBPM:P1ds:BMcUsedM                / S30IDFE-XBPM:P1ds:BMcUsedM S30IDFE-XBPM:P1ds:GapUsedC                / S30IDFE-XBPM:P1ds:GapUsedC S30IDFE-XBPM:P1ds:Wx1UsedM                / S30IDFE-XBPM:P1ds:Wx1UsedM S30IDFE-XBPM:P1ds:Wx2UsedM                / S30IDFE-XBPM:P1ds:Wx2UsedM S30IDFE-XBPM:P1ds:Wx3UsedM                / S30IDFE-XBPM:P1ds:Wx3UsedM S30IDFE-XBPM:P1ds:Wy1UsedM                / S30IDFE-XBPM:P1ds:Wy1UsedM S30IDFE-XBPM:P1ds:Wy2UsedM                / S30IDFE-XBPM:P1ds:Wy2UsedM S30IDFE-XBPM:P1ds:Wy3UsedM                / S30IDFE-XBPM:P1ds:Wy3UsedM S30IDFE-XBPM:P1ds:x                       / S30IDFE-XBPM:P1ds:x S30IDFE-XBPM:P1ds:x:CalFactor1M           / S30IDFE-XBPM:P1ds:x:CalFactor1M S30IDFE-XBPM:P1ds:x:CalFactor2M           / S30IDFE-XBPM:P1ds:x:CalFactor2M S30IDFE-XBPM:P1ds:x:LowPass1sM            / S30IDFE-XBPM:P1ds:x:LowPass1sM S30IDFE-XBPM:P1ds:x:LowPass8sM            / S30IDFE-XBPM:P1ds:x:LowPass8sM S30IDFE-XBPM:P1ds:x:LowPass64sM           / S30IDFE-XBPM:P1ds:x:LowPass64sM S30IDFE-XBPM:P1ds:x:Offset1M              / S30IDFE-XBPM:P1ds:x:Offset1M S30IDFE-XBPM:P1ds:x:Offset2M              / S30IDFE-XBPM:P1ds:x:Offset2M S30IDFE-XBPM:P1ds:x:ResolutionM           / S30IDFE-XBPM:P1ds:x:ResolutionM S30IDFE-XBPM:P1ds:x:Resolution1sM         / S30IDFE-XBPM:P1ds:x:Resolution1sM S30IDFE-XBPM:P1ds:x:Resolution8sM         / S30IDFE-XBPM:P1ds:x:Resolution8sM S30IDFE-XBPM:P1ds:x:Resolution64sM        / S30IDFE-XBPM:P1ds:x:Resolution64sM S30IDFE-XBPM:P1ds:x:StdDevM               / S30IDFE-XBPM:P1ds:x:StdDevM S30IDFE-XBPM:P1ds:x:StdDev1sM             / S30IDFE-XBPM:P1ds:x:StdDev1sM S30IDFE-XBPM:P1ds:x:StdDev8sM             / S30IDFE-XBPM:P1ds:x:StdDev8sM S30IDFE-XBPM:P1ds:x:StdDev64sM            / S30IDFE-XBPM:P1ds:x:StdDev64sM S30IDFE-XBPM:P1ds:x1:LowPass1sM           / S30IDFE-XBPM:P1ds:x1:LowPass1sM S30IDFE-XBPM:P1ds:x1:LowPass8sM           / S30IDFE-XBPM:P1ds:x1:LowPass8sM S30IDFE-XBPM:P1ds:x1:LowPass64sM          / S30IDFE-XBPM:P1ds:x1:LowPass64sM S30IDFE-XBPM:P1ds:x2:LowPass1sM           / S30IDFE-XBPM:P1ds:x2:LowPass1sM S30IDFE-XBPM:P1ds:x2:LowPass8sM           / S30IDFE-XBPM:P1ds:x2:LowPass8sM S30IDFE-XBPM:P1ds:x2:LowPass64sM          / S30IDFE-XBPM:P1ds:x2:LowPass64sM S30IDFE-XBPM:P1ds:y                       / S30IDFE-XBPM:P1ds:y S30IDFE-XBPM:P1ds:y:CalFactor1M           / S30IDFE-XBPM:P1ds:y:CalFactor1M S30IDFE-XBPM:P1ds:y:CalFactor2M           / S30IDFE-XBPM:P1ds:y:CalFactor2M S30IDFE-XBPM:P1ds:y:LowPass1sM            / S30IDFE-XBPM:P1ds:y:LowPass1sM S30IDFE-XBPM:P1ds:y:LowPass8sM            / S30IDFE-XBPM:P1ds:y:LowPass8sM S30IDFE-XBPM:P1ds:y:LowPass64sM           / S30IDFE-XBPM:P1ds:y:LowPass64sM S30IDFE-XBPM:P1ds:y:Offset1M              / S30IDFE-XBPM:P1ds:y:Offset1M S30IDFE-XBPM:P1ds:y:Offset2M              / S30IDFE-XBPM:P1ds:y:Offset2M S30IDFE-XBPM:P1ds:y:ResolutionM           / S30IDFE-XBPM:P1ds:y:ResolutionM S30IDFE-XBPM:P1ds:y:Resolution1sM         / S30IDFE-XBPM:P1ds:y:Resolution1sM S30IDFE-XBPM:P1ds:y:Resolution8sM         / S30IDFE-XBPM:P1ds:y:Resolution8sM S30IDFE-XBPM:P1ds:y:Resolution64sM        / S30IDFE-XBPM:P1ds:y:Resolution64sM S30IDFE-XBPM:P1ds:y:StdDevM               / S30IDFE-XBPM:P1ds:y:StdDevM S30IDFE-XBPM:P1ds:y:StdDev1sM             / S30IDFE-XBPM:P1ds:y:StdDev1sM S30IDFE-XBPM:P1ds:y:StdDev8sM             / S30IDFE-XBPM:P1ds:y:StdDev8sM S30IDFE-XBPM:P1ds:y:StdDev64sM            / S30IDFE-XBPM:P1ds:y:StdDev64sM S30IDFE-XBPM:P1ds:y1:LowPass1sM           / S30IDFE-XBPM:P1ds:y1:LowPass1sM S30IDFE-XBPM:P1ds:y1:LowPass8sM           / S30IDFE-XBPM:P1ds:y1:LowPass8sM S30IDFE-XBPM:P1ds:y1:LowPass64sM          / S30IDFE-XBPM:P1ds:y1:LowPass64sM S30IDFE-XBPM:P1ds:y2:LowPass1sM           / S30IDFE-XBPM:P1ds:y2:LowPass1sM S30IDFE-XBPM:P1ds:y2:LowPass8sM           / S30IDFE-XBPM:P1ds:y2:LowPass8sM S30IDFE-XBPM:P1ds:y2:LowPass64sM          / S30IDFE-XBPM:P1ds:y2:LowPass64sM S30IDFE-XBPM:P2ds:GapUsedC                / S30IDFE-XBPM:P2ds:GapUsedC S30IDFE-XBPM:P2ds:XCalM                   / S30IDFE-XBPM:P2ds:XCalM S30IDFE-XBPM:P2ds:YCalM                   / S30IDFE-XBPM:P2ds:YCalM S30IDFE-XBPM:P2ds:x:CalFactorM            / S30IDFE-XBPM:P2ds:x:CalFactorM S30IDFE-XBPM:P2ds:x:OffsetM               / S30IDFE-XBPM:P2ds:x:OffsetM S30IDFE-XBPM:P2ds:y:CalFactorM            / S30IDFE-XBPM:P2ds:y:CalFactorM S30IDFE-XBPM:P2ds:y:OffsetM               / S30IDFE-XBPM:P2ds:y:OffsetM S31IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S31IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S31IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S31IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S31IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S31IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S31IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S31IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S31IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S31IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S31IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S31IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S31IDFE-XBPM:CM1ds:PositionOffsetX        / S31IDFE-XBPM:CM1ds:PositionOffsetX S31IDFE-XBPM:CM1ds:PositionOffsetY        / S31IDFE-XBPM:CM1ds:PositionOffsetY S31IDFE-XBPM:CM1ds:PositionScaleX         / S31IDFE-XBPM:CM1ds:PositionScaleX S31IDFE-XBPM:CM1ds:PositionScaleY         / S31IDFE-XBPM:CM1ds:PositionScaleY S31IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S31IDFE-XBPM:CM1us:Current1:MeanValue_RBV S31IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S31IDFE-XBPM:CM1us:Current2:MeanValue_RBV S31IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S31IDFE-XBPM:CM1us:Current3:MeanValue_RBV S31IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S31IDFE-XBPM:CM1us:Current4:MeanValue_RBV S31IDFE-XBPM:CM1us:PosX:MeanValue_RBV     / S31IDFE-XBPM:CM1us:PosX:MeanValue_RBV S31IDFE-XBPM:CM1us:PosY:MeanValue_RBV     / S31IDFE-XBPM:CM1us:PosY:MeanValue_RBV S31IDFE-XBPM:CM1us:PositionOffsetX        / S31IDFE-XBPM:CM1us:PositionOffsetX S31IDFE-XBPM:CM1us:PositionOffsetY        / S31IDFE-XBPM:CM1us:PositionOffsetY S31IDFE-XBPM:CM1us:PositionScaleX         / S31IDFE-XBPM:CM1us:PositionScaleX S31IDFE-XBPM:CM1us:PositionScaleY         / S31IDFE-XBPM:CM1us:PositionScaleY S31IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S31IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S31IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S31IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S31IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S31IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S31IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S31IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S31IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S31IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S31IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S31IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S31IDFE-XBPM:CM2ds:PositionOffsetX        / S31IDFE-XBPM:CM2ds:PositionOffsetX S31IDFE-XBPM:CM2ds:PositionOffsetY        / S31IDFE-XBPM:CM2ds:PositionOffsetY S31IDFE-XBPM:CM2ds:PositionScaleX         / S31IDFE-XBPM:CM2ds:PositionScaleX S31IDFE-XBPM:CM2ds:PositionScaleY         / S31IDFE-XBPM:CM2ds:PositionScaleY S31IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S31IDFE-XBPM:CM2us:Current1:MeanValue_RBV S31IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S31IDFE-XBPM:CM2us:Current2:MeanValue_RBV S31IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S31IDFE-XBPM:CM2us:Current3:MeanValue_RBV S31IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S31IDFE-XBPM:CM2us:Current4:MeanValue_RBV S31IDFE-XBPM:CM2us:PosX:MeanValue_RBV     / S31IDFE-XBPM:CM2us:PosX:MeanValue_RBV S31IDFE-XBPM:CM2us:PosY:MeanValue_RBV     / S31IDFE-XBPM:CM2us:PosY:MeanValue_RBV S31IDFE-XBPM:CM2us:PositionOffsetX        / S31IDFE-XBPM:CM2us:PositionOffsetX S31IDFE-XBPM:CM2us:PositionOffsetY        / S31IDFE-XBPM:CM2us:PositionOffsetY S31IDFE-XBPM:CM2us:PositionScaleX         / S31IDFE-XBPM:CM2us:PositionScaleX S31IDFE-XBPM:CM2us:PositionScaleY         / S31IDFE-XBPM:CM2us:PositionScaleY S31IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S31IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S31IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S31IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S31IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S31IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S31IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S31IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S31IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S31IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S31IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S31IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S31IDFE-XBPM:CM3ds:PositionOffsetX        / S31IDFE-XBPM:CM3ds:PositionOffsetX S31IDFE-XBPM:CM3ds:PositionOffsetY        / S31IDFE-XBPM:CM3ds:PositionOffsetY S31IDFE-XBPM:CM3ds:PositionScaleX         / S31IDFE-XBPM:CM3ds:PositionScaleX S31IDFE-XBPM:CM3ds:PositionScaleY         / S31IDFE-XBPM:CM3ds:PositionScaleY S31IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S31IDFE-XBPM:CM3us:Current1:MeanValue_RBV S31IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S31IDFE-XBPM:CM3us:Current2:MeanValue_RBV S31IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S31IDFE-XBPM:CM3us:Current3:MeanValue_RBV S31IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S31IDFE-XBPM:CM3us:Current4:MeanValue_RBV S31IDFE-XBPM:CM3us:PosX:MeanValue_RBV     / S31IDFE-XBPM:CM3us:PosX:MeanValue_RBV S31IDFE-XBPM:CM3us:PosY:MeanValue_RBV     / S31IDFE-XBPM:CM3us:PosY:MeanValue_RBV S31IDFE-XBPM:CM3us:PositionOffsetX        / S31IDFE-XBPM:CM3us:PositionOffsetX S31IDFE-XBPM:CM3us:PositionOffsetY        / S31IDFE-XBPM:CM3us:PositionOffsetY S31IDFE-XBPM:CM3us:PositionScaleX         / S31IDFE-XBPM:CM3us:PositionScaleX S31IDFE-XBPM:CM3us:PositionScaleY         / S31IDFE-XBPM:CM3us:PositionScaleY S31IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S31IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S31IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S31IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S31IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S31IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S31IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S31IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S31IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S31IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S31IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S31IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S31IDFE-XBPM:CM4ds:PositionOffsetX        / S31IDFE-XBPM:CM4ds:PositionOffsetX S31IDFE-XBPM:CM4ds:PositionOffsetY        / S31IDFE-XBPM:CM4ds:PositionOffsetY S31IDFE-XBPM:CM4ds:PositionScaleX         / S31IDFE-XBPM:CM4ds:PositionScaleX S31IDFE-XBPM:CM4ds:PositionScaleY         / S31IDFE-XBPM:CM4ds:PositionScaleY S31IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S31IDFE-XBPM:CM4us:Current1:MeanValue_RBV S31IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S31IDFE-XBPM:CM4us:Current2:MeanValue_RBV S31IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S31IDFE-XBPM:CM4us:Current3:MeanValue_RBV S31IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S31IDFE-XBPM:CM4us:Current4:MeanValue_RBV S31IDFE-XBPM:CM4us:PosX:MeanValue_RBV     / S31IDFE-XBPM:CM4us:PosX:MeanValue_RBV S31IDFE-XBPM:CM4us:PosY:MeanValue_RBV     / S31IDFE-XBPM:CM4us:PosY:MeanValue_RBV S31IDFE-XBPM:CM4us:PositionOffsetX        / S31IDFE-XBPM:CM4us:PositionOffsetX S31IDFE-XBPM:CM4us:PositionOffsetY        / S31IDFE-XBPM:CM4us:PositionOffsetY S31IDFE-XBPM:CM4us:PositionScaleX         / S31IDFE-XBPM:CM4us:PositionScaleX S31IDFE-XBPM:CM4us:PositionScaleY         / S31IDFE-XBPM:CM4us:PositionScaleY S31IDFE-XBPM:P1ds:BMcUsedM                / S31IDFE-XBPM:P1ds:BMcUsedM S31IDFE-XBPM:P1ds:GapUsedC                / S31IDFE-XBPM:P1ds:GapUsedC S31IDFE-XBPM:P1ds:Wx1UsedM                / S31IDFE-XBPM:P1ds:Wx1UsedM S31IDFE-XBPM:P1ds:Wx2UsedM                / S31IDFE-XBPM:P1ds:Wx2UsedM S31IDFE-XBPM:P1ds:Wx3UsedM                / S31IDFE-XBPM:P1ds:Wx3UsedM S31IDFE-XBPM:P1ds:Wy1UsedM                / S31IDFE-XBPM:P1ds:Wy1UsedM S31IDFE-XBPM:P1ds:Wy2UsedM                / S31IDFE-XBPM:P1ds:Wy2UsedM S31IDFE-XBPM:P1ds:Wy3UsedM                / S31IDFE-XBPM:P1ds:Wy3UsedM S31IDFE-XBPM:P1ds:x                       / S31IDFE-XBPM:P1ds:x S31IDFE-XBPM:P1ds:x:CalFactor1M           / S31IDFE-XBPM:P1ds:x:CalFactor1M S31IDFE-XBPM:P1ds:x:CalFactor2M           / S31IDFE-XBPM:P1ds:x:CalFactor2M S31IDFE-XBPM:P1ds:x:LowPass1sM            / S31IDFE-XBPM:P1ds:x:LowPass1sM S31IDFE-XBPM:P1ds:x:LowPass8sM            / S31IDFE-XBPM:P1ds:x:LowPass8sM S31IDFE-XBPM:P1ds:x:LowPass64sM           / S31IDFE-XBPM:P1ds:x:LowPass64sM S31IDFE-XBPM:P1ds:x:Offset1M              / S31IDFE-XBPM:P1ds:x:Offset1M S31IDFE-XBPM:P1ds:x:Offset2M              / S31IDFE-XBPM:P1ds:x:Offset2M S31IDFE-XBPM:P1ds:x:ResolutionM           / S31IDFE-XBPM:P1ds:x:ResolutionM S31IDFE-XBPM:P1ds:x:Resolution1sM         / S31IDFE-XBPM:P1ds:x:Resolution1sM S31IDFE-XBPM:P1ds:x:Resolution8sM         / S31IDFE-XBPM:P1ds:x:Resolution8sM S31IDFE-XBPM:P1ds:x:Resolution64sM        / S31IDFE-XBPM:P1ds:x:Resolution64sM S31IDFE-XBPM:P1ds:x:StdDevM               / S31IDFE-XBPM:P1ds:x:StdDevM S31IDFE-XBPM:P1ds:x:StdDev1sM             / S31IDFE-XBPM:P1ds:x:StdDev1sM S31IDFE-XBPM:P1ds:x:StdDev8sM             / S31IDFE-XBPM:P1ds:x:StdDev8sM S31IDFE-XBPM:P1ds:x:StdDev64sM            / S31IDFE-XBPM:P1ds:x:StdDev64sM S31IDFE-XBPM:P1ds:x1:LowPass1sM           / S31IDFE-XBPM:P1ds:x1:LowPass1sM S31IDFE-XBPM:P1ds:x1:LowPass8sM           / S31IDFE-XBPM:P1ds:x1:LowPass8sM S31IDFE-XBPM:P1ds:x1:LowPass64sM          / S31IDFE-XBPM:P1ds:x1:LowPass64sM S31IDFE-XBPM:P1ds:x2:LowPass1sM           / S31IDFE-XBPM:P1ds:x2:LowPass1sM S31IDFE-XBPM:P1ds:x2:LowPass8sM           / S31IDFE-XBPM:P1ds:x2:LowPass8sM S31IDFE-XBPM:P1ds:x2:LowPass64sM          / S31IDFE-XBPM:P1ds:x2:LowPass64sM S31IDFE-XBPM:P1ds:y                       / S31IDFE-XBPM:P1ds:y S31IDFE-XBPM:P1ds:y:CalFactor1M           / S31IDFE-XBPM:P1ds:y:CalFactor1M S31IDFE-XBPM:P1ds:y:CalFactor2M           / S31IDFE-XBPM:P1ds:y:CalFactor2M S31IDFE-XBPM:P1ds:y:LowPass1sM            / S31IDFE-XBPM:P1ds:y:LowPass1sM S31IDFE-XBPM:P1ds:y:LowPass8sM            / S31IDFE-XBPM:P1ds:y:LowPass8sM S31IDFE-XBPM:P1ds:y:LowPass64sM           / S31IDFE-XBPM:P1ds:y:LowPass64sM S31IDFE-XBPM:P1ds:y:Offset1M              / S31IDFE-XBPM:P1ds:y:Offset1M S31IDFE-XBPM:P1ds:y:Offset2M              / S31IDFE-XBPM:P1ds:y:Offset2M S31IDFE-XBPM:P1ds:y:ResolutionM           / S31IDFE-XBPM:P1ds:y:ResolutionM S31IDFE-XBPM:P1ds:y:Resolution1sM         / S31IDFE-XBPM:P1ds:y:Resolution1sM S31IDFE-XBPM:P1ds:y:Resolution8sM         / S31IDFE-XBPM:P1ds:y:Resolution8sM S31IDFE-XBPM:P1ds:y:Resolution64sM        / S31IDFE-XBPM:P1ds:y:Resolution64sM S31IDFE-XBPM:P1ds:y:StdDevM               / S31IDFE-XBPM:P1ds:y:StdDevM S31IDFE-XBPM:P1ds:y:StdDev1sM             / S31IDFE-XBPM:P1ds:y:StdDev1sM S31IDFE-XBPM:P1ds:y:StdDev8sM             / S31IDFE-XBPM:P1ds:y:StdDev8sM S31IDFE-XBPM:P1ds:y:StdDev64sM            / S31IDFE-XBPM:P1ds:y:StdDev64sM S31IDFE-XBPM:P1ds:y1:LowPass1sM           / S31IDFE-XBPM:P1ds:y1:LowPass1sM S31IDFE-XBPM:P1ds:y1:LowPass8sM           / S31IDFE-XBPM:P1ds:y1:LowPass8sM S31IDFE-XBPM:P1ds:y1:LowPass64sM          / S31IDFE-XBPM:P1ds:y1:LowPass64sM S31IDFE-XBPM:P1ds:y2:LowPass1sM           / S31IDFE-XBPM:P1ds:y2:LowPass1sM S31IDFE-XBPM:P1ds:y2:LowPass8sM           / S31IDFE-XBPM:P1ds:y2:LowPass8sM S31IDFE-XBPM:P1ds:y2:LowPass64sM          / S31IDFE-XBPM:P1ds:y2:LowPass64sM S31IDFE-XBPM:P1us:BMcUsedM                / S31IDFE-XBPM:P1us:BMcUsedM S31IDFE-XBPM:P1us:GapUsedC                / S31IDFE-XBPM:P1us:GapUsedC S31IDFE-XBPM:P1us:Wx1UsedM                / S31IDFE-XBPM:P1us:Wx1UsedM S31IDFE-XBPM:P1us:Wx2UsedM                / S31IDFE-XBPM:P1us:Wx2UsedM S31IDFE-XBPM:P1us:Wx3UsedM                / S31IDFE-XBPM:P1us:Wx3UsedM S31IDFE-XBPM:P1us:Wy1UsedM                / S31IDFE-XBPM:P1us:Wy1UsedM S31IDFE-XBPM:P1us:Wy2UsedM                / S31IDFE-XBPM:P1us:Wy2UsedM S31IDFE-XBPM:P1us:Wy3UsedM                / S31IDFE-XBPM:P1us:Wy3UsedM S31IDFE-XBPM:P1us:x                       / S31IDFE-XBPM:P1us:x S31IDFE-XBPM:P1us:x:CalFactor1M           / S31IDFE-XBPM:P1us:x:CalFactor1M S31IDFE-XBPM:P1us:x:CalFactor2M           / S31IDFE-XBPM:P1us:x:CalFactor2M S31IDFE-XBPM:P1us:x:LowPass1sM            / S31IDFE-XBPM:P1us:x:LowPass1sM S31IDFE-XBPM:P1us:x:LowPass8sM            / S31IDFE-XBPM:P1us:x:LowPass8sM S31IDFE-XBPM:P1us:x:LowPass64sM           / S31IDFE-XBPM:P1us:x:LowPass64sM S31IDFE-XBPM:P1us:x:Offset1M              / S31IDFE-XBPM:P1us:x:Offset1M S31IDFE-XBPM:P1us:x:Offset2M              / S31IDFE-XBPM:P1us:x:Offset2M S31IDFE-XBPM:P1us:x:ResolutionM           / S31IDFE-XBPM:P1us:x:ResolutionM S31IDFE-XBPM:P1us:x:Resolution1sM         / S31IDFE-XBPM:P1us:x:Resolution1sM S31IDFE-XBPM:P1us:x:Resolution8sM         / S31IDFE-XBPM:P1us:x:Resolution8sM S31IDFE-XBPM:P1us:x:Resolution64sM        / S31IDFE-XBPM:P1us:x:Resolution64sM S31IDFE-XBPM:P1us:x:StdDevM               / S31IDFE-XBPM:P1us:x:StdDevM S31IDFE-XBPM:P1us:x:StdDev1sM             / S31IDFE-XBPM:P1us:x:StdDev1sM S31IDFE-XBPM:P1us:x:StdDev8sM             / S31IDFE-XBPM:P1us:x:StdDev8sM S31IDFE-XBPM:P1us:x:StdDev64sM            / S31IDFE-XBPM:P1us:x:StdDev64sM S31IDFE-XBPM:P1us:x1:LowPass1sM           / S31IDFE-XBPM:P1us:x1:LowPass1sM S31IDFE-XBPM:P1us:x1:LowPass8sM           / S31IDFE-XBPM:P1us:x1:LowPass8sM S31IDFE-XBPM:P1us:x1:LowPass64sM          / S31IDFE-XBPM:P1us:x1:LowPass64sM S31IDFE-XBPM:P1us:x2:LowPass1sM           / S31IDFE-XBPM:P1us:x2:LowPass1sM S31IDFE-XBPM:P1us:x2:LowPass8sM           / S31IDFE-XBPM:P1us:x2:LowPass8sM S31IDFE-XBPM:P1us:x2:LowPass64sM          / S31IDFE-XBPM:P1us:x2:LowPass64sM S31IDFE-XBPM:P1us:y                       / S31IDFE-XBPM:P1us:y S31IDFE-XBPM:P1us:y:CalFactor1M           / S31IDFE-XBPM:P1us:y:CalFactor1M S31IDFE-XBPM:P1us:y:CalFactor2M           / S31IDFE-XBPM:P1us:y:CalFactor2M S31IDFE-XBPM:P1us:y:LowPass1sM            / S31IDFE-XBPM:P1us:y:LowPass1sM S31IDFE-XBPM:P1us:y:LowPass8sM            / S31IDFE-XBPM:P1us:y:LowPass8sM S31IDFE-XBPM:P1us:y:LowPass64sM           / S31IDFE-XBPM:P1us:y:LowPass64sM S31IDFE-XBPM:P1us:y:Offset1M              / S31IDFE-XBPM:P1us:y:Offset1M S31IDFE-XBPM:P1us:y:Offset2M              / S31IDFE-XBPM:P1us:y:Offset2M S31IDFE-XBPM:P1us:y:ResolutionM           / S31IDFE-XBPM:P1us:y:ResolutionM S31IDFE-XBPM:P1us:y:Resolution1sM         / S31IDFE-XBPM:P1us:y:Resolution1sM S31IDFE-XBPM:P1us:y:Resolution8sM         / S31IDFE-XBPM:P1us:y:Resolution8sM S31IDFE-XBPM:P1us:y:Resolution64sM        / S31IDFE-XBPM:P1us:y:Resolution64sM S31IDFE-XBPM:P1us:y:StdDevM               / S31IDFE-XBPM:P1us:y:StdDevM S31IDFE-XBPM:P1us:y:StdDev1sM             / S31IDFE-XBPM:P1us:y:StdDev1sM S31IDFE-XBPM:P1us:y:StdDev8sM             / S31IDFE-XBPM:P1us:y:StdDev8sM S31IDFE-XBPM:P1us:y:StdDev64sM            / S31IDFE-XBPM:P1us:y:StdDev64sM S31IDFE-XBPM:P1us:y1:LowPass1sM           / S31IDFE-XBPM:P1us:y1:LowPass1sM S31IDFE-XBPM:P1us:y1:LowPass8sM           / S31IDFE-XBPM:P1us:y1:LowPass8sM S31IDFE-XBPM:P1us:y1:LowPass64sM          / S31IDFE-XBPM:P1us:y1:LowPass64sM S31IDFE-XBPM:P1us:y2:LowPass1sM           / S31IDFE-XBPM:P1us:y2:LowPass1sM S31IDFE-XBPM:P1us:y2:LowPass8sM           / S31IDFE-XBPM:P1us:y2:LowPass8sM S31IDFE-XBPM:P1us:y2:LowPass64sM          / S31IDFE-XBPM:P1us:y2:LowPass64sM S31IDFE-XBPM:P2ds:GapUsedC                / S31IDFE-XBPM:P2ds:GapUsedC S31IDFE-XBPM:P2ds:XCalM                   / S31IDFE-XBPM:P2ds:XCalM S31IDFE-XBPM:P2ds:YCalM                   / S31IDFE-XBPM:P2ds:YCalM S31IDFE-XBPM:P2ds:x:CalFactorM            / S31IDFE-XBPM:P2ds:x:CalFactorM S31IDFE-XBPM:P2ds:x:OffsetM               / S31IDFE-XBPM:P2ds:x:OffsetM S31IDFE-XBPM:P2ds:y:CalFactorM            / S31IDFE-XBPM:P2ds:y:CalFactorM S31IDFE-XBPM:P2ds:y:OffsetM               / S31IDFE-XBPM:P2ds:y:OffsetM S31IDFE-XBPM:P2us:GapUsedC                / S31IDFE-XBPM:P2us:GapUsedC S31IDFE-XBPM:P2us:XCalM                   / S31IDFE-XBPM:P2us:XCalM S31IDFE-XBPM:P2us:YCalM                   / S31IDFE-XBPM:P2us:YCalM S31IDFE-XBPM:P2us:x:CalFactorM            / S31IDFE-XBPM:P2us:x:CalFactorM S31IDFE-XBPM:P2us:x:OffsetM               / S31IDFE-XBPM:P2us:x:OffsetM S31IDFE-XBPM:P2us:y:CalFactorM            / S31IDFE-XBPM:P2us:y:CalFactorM S31IDFE-XBPM:P2us:y:OffsetM               / S31IDFE-XBPM:P2us:y:OffsetM S32IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S32IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S32IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S32IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S32IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S32IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S32IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S32IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S32IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S32IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S32IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S32IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S32IDFE-XBPM:CM1ds:PositionOffsetX        / S32IDFE-XBPM:CM1ds:PositionOffsetX S32IDFE-XBPM:CM1ds:PositionOffsetY        / S32IDFE-XBPM:CM1ds:PositionOffsetY S32IDFE-XBPM:CM1ds:PositionScaleX         / S32IDFE-XBPM:CM1ds:PositionScaleX S32IDFE-XBPM:CM1ds:PositionScaleY         / S32IDFE-XBPM:CM1ds:PositionScaleY S32IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S32IDFE-XBPM:CM1us:Current1:MeanValue_RBV S32IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S32IDFE-XBPM:CM1us:Current2:MeanValue_RBV S32IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S32IDFE-XBPM:CM1us:Current3:MeanValue_RBV S32IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S32IDFE-XBPM:CM1us:Current4:MeanValue_RBV S32IDFE-XBPM:CM1us:PosX:MeanValue_RBV     / S32IDFE-XBPM:CM1us:PosX:MeanValue_RBV S32IDFE-XBPM:CM1us:PosY:MeanValue_RBV     / S32IDFE-XBPM:CM1us:PosY:MeanValue_RBV S32IDFE-XBPM:CM1us:PositionOffsetX        / S32IDFE-XBPM:CM1us:PositionOffsetX S32IDFE-XBPM:CM1us:PositionOffsetY        / S32IDFE-XBPM:CM1us:PositionOffsetY S32IDFE-XBPM:CM1us:PositionScaleX         / S32IDFE-XBPM:CM1us:PositionScaleX S32IDFE-XBPM:CM1us:PositionScaleY         / S32IDFE-XBPM:CM1us:PositionScaleY S32IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S32IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S32IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S32IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S32IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S32IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S32IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S32IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S32IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S32IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S32IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S32IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S32IDFE-XBPM:CM2ds:PositionOffsetX        / S32IDFE-XBPM:CM2ds:PositionOffsetX S32IDFE-XBPM:CM2ds:PositionOffsetY        / S32IDFE-XBPM:CM2ds:PositionOffsetY S32IDFE-XBPM:CM2ds:PositionScaleX         / S32IDFE-XBPM:CM2ds:PositionScaleX S32IDFE-XBPM:CM2ds:PositionScaleY         / S32IDFE-XBPM:CM2ds:PositionScaleY S32IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S32IDFE-XBPM:CM2us:Current1:MeanValue_RBV S32IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S32IDFE-XBPM:CM2us:Current2:MeanValue_RBV S32IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S32IDFE-XBPM:CM2us:Current3:MeanValue_RBV S32IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S32IDFE-XBPM:CM2us:Current4:MeanValue_RBV S32IDFE-XBPM:CM2us:PosX:MeanValue_RBV     / S32IDFE-XBPM:CM2us:PosX:MeanValue_RBV S32IDFE-XBPM:CM2us:PosY:MeanValue_RBV     / S32IDFE-XBPM:CM2us:PosY:MeanValue_RBV S32IDFE-XBPM:CM2us:PositionOffsetX        / S32IDFE-XBPM:CM2us:PositionOffsetX S32IDFE-XBPM:CM2us:PositionOffsetY        / S32IDFE-XBPM:CM2us:PositionOffsetY S32IDFE-XBPM:CM2us:PositionScaleX         / S32IDFE-XBPM:CM2us:PositionScaleX S32IDFE-XBPM:CM2us:PositionScaleY         / S32IDFE-XBPM:CM2us:PositionScaleY S32IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S32IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S32IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S32IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S32IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S32IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S32IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S32IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S32IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S32IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S32IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S32IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S32IDFE-XBPM:CM3ds:PositionOffsetX        / S32IDFE-XBPM:CM3ds:PositionOffsetX S32IDFE-XBPM:CM3ds:PositionOffsetY        / S32IDFE-XBPM:CM3ds:PositionOffsetY S32IDFE-XBPM:CM3ds:PositionScaleX         / S32IDFE-XBPM:CM3ds:PositionScaleX S32IDFE-XBPM:CM3ds:PositionScaleY         / S32IDFE-XBPM:CM3ds:PositionScaleY S32IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S32IDFE-XBPM:CM3us:Current1:MeanValue_RBV S32IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S32IDFE-XBPM:CM3us:Current2:MeanValue_RBV S32IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S32IDFE-XBPM:CM3us:Current3:MeanValue_RBV S32IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S32IDFE-XBPM:CM3us:Current4:MeanValue_RBV S32IDFE-XBPM:CM3us:PosX:MeanValue_RBV     / S32IDFE-XBPM:CM3us:PosX:MeanValue_RBV S32IDFE-XBPM:CM3us:PosY:MeanValue_RBV     / S32IDFE-XBPM:CM3us:PosY:MeanValue_RBV S32IDFE-XBPM:CM3us:PositionOffsetX        / S32IDFE-XBPM:CM3us:PositionOffsetX S32IDFE-XBPM:CM3us:PositionOffsetY        / S32IDFE-XBPM:CM3us:PositionOffsetY S32IDFE-XBPM:CM3us:PositionScaleX         / S32IDFE-XBPM:CM3us:PositionScaleX S32IDFE-XBPM:CM3us:PositionScaleY         / S32IDFE-XBPM:CM3us:PositionScaleY S32IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S32IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S32IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S32IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S32IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S32IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S32IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S32IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S32IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S32IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S32IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S32IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S32IDFE-XBPM:CM4ds:PositionOffsetX        / S32IDFE-XBPM:CM4ds:PositionOffsetX S32IDFE-XBPM:CM4ds:PositionOffsetY        / S32IDFE-XBPM:CM4ds:PositionOffsetY S32IDFE-XBPM:CM4ds:PositionScaleX         / S32IDFE-XBPM:CM4ds:PositionScaleX S32IDFE-XBPM:CM4ds:PositionScaleY         / S32IDFE-XBPM:CM4ds:PositionScaleY S32IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S32IDFE-XBPM:CM4us:Current1:MeanValue_RBV S32IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S32IDFE-XBPM:CM4us:Current2:MeanValue_RBV S32IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S32IDFE-XBPM:CM4us:Current3:MeanValue_RBV S32IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S32IDFE-XBPM:CM4us:Current4:MeanValue_RBV S32IDFE-XBPM:CM4us:PosX:MeanValue_RBV     / S32IDFE-XBPM:CM4us:PosX:MeanValue_RBV S32IDFE-XBPM:CM4us:PosY:MeanValue_RBV     / S32IDFE-XBPM:CM4us:PosY:MeanValue_RBV S32IDFE-XBPM:CM4us:PositionOffsetX        / S32IDFE-XBPM:CM4us:PositionOffsetX S32IDFE-XBPM:CM4us:PositionOffsetY        / S32IDFE-XBPM:CM4us:PositionOffsetY S32IDFE-XBPM:CM4us:PositionScaleX         / S32IDFE-XBPM:CM4us:PositionScaleX S32IDFE-XBPM:CM4us:PositionScaleY         / S32IDFE-XBPM:CM4us:PositionScaleY S32IDFE-XBPM:P1ds:BMcUsedM                / S32IDFE-XBPM:P1ds:BMcUsedM S32IDFE-XBPM:P1ds:GapUsedC                / S32IDFE-XBPM:P1ds:GapUsedC S32IDFE-XBPM:P1ds:Wx1UsedM                / S32IDFE-XBPM:P1ds:Wx1UsedM S32IDFE-XBPM:P1ds:Wx2UsedM                / S32IDFE-XBPM:P1ds:Wx2UsedM S32IDFE-XBPM:P1ds:Wx3UsedM                / S32IDFE-XBPM:P1ds:Wx3UsedM S32IDFE-XBPM:P1ds:Wy1UsedM                / S32IDFE-XBPM:P1ds:Wy1UsedM S32IDFE-XBPM:P1ds:Wy2UsedM                / S32IDFE-XBPM:P1ds:Wy2UsedM S32IDFE-XBPM:P1ds:Wy3UsedM                / S32IDFE-XBPM:P1ds:Wy3UsedM S32IDFE-XBPM:P1ds:x                       / S32IDFE-XBPM:P1ds:x S32IDFE-XBPM:P1ds:x:CalFactor1M           / S32IDFE-XBPM:P1ds:x:CalFactor1M S32IDFE-XBPM:P1ds:x:CalFactor2M           / S32IDFE-XBPM:P1ds:x:CalFactor2M S32IDFE-XBPM:P1ds:x:LowPass1sM            / S32IDFE-XBPM:P1ds:x:LowPass1sM S32IDFE-XBPM:P1ds:x:LowPass8sM            / S32IDFE-XBPM:P1ds:x:LowPass8sM S32IDFE-XBPM:P1ds:x:LowPass64sM           / S32IDFE-XBPM:P1ds:x:LowPass64sM S32IDFE-XBPM:P1ds:x:Offset1M              / S32IDFE-XBPM:P1ds:x:Offset1M S32IDFE-XBPM:P1ds:x:Offset2M              / S32IDFE-XBPM:P1ds:x:Offset2M S32IDFE-XBPM:P1ds:x:ResolutionM           / S32IDFE-XBPM:P1ds:x:ResolutionM S32IDFE-XBPM:P1ds:x:Resolution1sM         / S32IDFE-XBPM:P1ds:x:Resolution1sM S32IDFE-XBPM:P1ds:x:Resolution8sM         / S32IDFE-XBPM:P1ds:x:Resolution8sM S32IDFE-XBPM:P1ds:x:Resolution64sM        / S32IDFE-XBPM:P1ds:x:Resolution64sM S32IDFE-XBPM:P1ds:x:StdDevM               / S32IDFE-XBPM:P1ds:x:StdDevM S32IDFE-XBPM:P1ds:x:StdDev1sM             / S32IDFE-XBPM:P1ds:x:StdDev1sM S32IDFE-XBPM:P1ds:x:StdDev8sM             / S32IDFE-XBPM:P1ds:x:StdDev8sM S32IDFE-XBPM:P1ds:x:StdDev64sM            / S32IDFE-XBPM:P1ds:x:StdDev64sM S32IDFE-XBPM:P1ds:x1:LowPass1sM           / S32IDFE-XBPM:P1ds:x1:LowPass1sM S32IDFE-XBPM:P1ds:x1:LowPass8sM           / S32IDFE-XBPM:P1ds:x1:LowPass8sM S32IDFE-XBPM:P1ds:x1:LowPass64sM          / S32IDFE-XBPM:P1ds:x1:LowPass64sM S32IDFE-XBPM:P1ds:x2:LowPass1sM           / S32IDFE-XBPM:P1ds:x2:LowPass1sM S32IDFE-XBPM:P1ds:x2:LowPass8sM           / S32IDFE-XBPM:P1ds:x2:LowPass8sM S32IDFE-XBPM:P1ds:x2:LowPass64sM          / S32IDFE-XBPM:P1ds:x2:LowPass64sM S32IDFE-XBPM:P1ds:y                       / S32IDFE-XBPM:P1ds:y S32IDFE-XBPM:P1ds:y:CalFactor1M           / S32IDFE-XBPM:P1ds:y:CalFactor1M S32IDFE-XBPM:P1ds:y:CalFactor2M           / S32IDFE-XBPM:P1ds:y:CalFactor2M S32IDFE-XBPM:P1ds:y:LowPass1sM            / S32IDFE-XBPM:P1ds:y:LowPass1sM S32IDFE-XBPM:P1ds:y:LowPass8sM            / S32IDFE-XBPM:P1ds:y:LowPass8sM S32IDFE-XBPM:P1ds:y:LowPass64sM           / S32IDFE-XBPM:P1ds:y:LowPass64sM S32IDFE-XBPM:P1ds:y:Offset1M              / S32IDFE-XBPM:P1ds:y:Offset1M S32IDFE-XBPM:P1ds:y:Offset2M              / S32IDFE-XBPM:P1ds:y:Offset2M S32IDFE-XBPM:P1ds:y:ResolutionM           / S32IDFE-XBPM:P1ds:y:ResolutionM S32IDFE-XBPM:P1ds:y:Resolution1sM         / S32IDFE-XBPM:P1ds:y:Resolution1sM S32IDFE-XBPM:P1ds:y:Resolution8sM         / S32IDFE-XBPM:P1ds:y:Resolution8sM S32IDFE-XBPM:P1ds:y:Resolution64sM        / S32IDFE-XBPM:P1ds:y:Resolution64sM S32IDFE-XBPM:P1ds:y:StdDevM               / S32IDFE-XBPM:P1ds:y:StdDevM S32IDFE-XBPM:P1ds:y:StdDev1sM             / S32IDFE-XBPM:P1ds:y:StdDev1sM S32IDFE-XBPM:P1ds:y:StdDev8sM             / S32IDFE-XBPM:P1ds:y:StdDev8sM S32IDFE-XBPM:P1ds:y:StdDev64sM            / S32IDFE-XBPM:P1ds:y:StdDev64sM S32IDFE-XBPM:P1ds:y1:LowPass1sM           / S32IDFE-XBPM:P1ds:y1:LowPass1sM S32IDFE-XBPM:P1ds:y1:LowPass8sM           / S32IDFE-XBPM:P1ds:y1:LowPass8sM S32IDFE-XBPM:P1ds:y1:LowPass64sM          / S32IDFE-XBPM:P1ds:y1:LowPass64sM S32IDFE-XBPM:P1ds:y2:LowPass1sM           / S32IDFE-XBPM:P1ds:y2:LowPass1sM S32IDFE-XBPM:P1ds:y2:LowPass8sM           / S32IDFE-XBPM:P1ds:y2:LowPass8sM S32IDFE-XBPM:P1ds:y2:LowPass64sM          / S32IDFE-XBPM:P1ds:y2:LowPass64sM S32IDFE-XBPM:P1us:BMcUsedM                / S32IDFE-XBPM:P1us:BMcUsedM S32IDFE-XBPM:P1us:GapUsedC                / S32IDFE-XBPM:P1us:GapUsedC S32IDFE-XBPM:P1us:Wx1UsedM                / S32IDFE-XBPM:P1us:Wx1UsedM S32IDFE-XBPM:P1us:Wx2UsedM                / S32IDFE-XBPM:P1us:Wx2UsedM S32IDFE-XBPM:P1us:Wx3UsedM                / S32IDFE-XBPM:P1us:Wx3UsedM S32IDFE-XBPM:P1us:Wy1UsedM                / S32IDFE-XBPM:P1us:Wy1UsedM S32IDFE-XBPM:P1us:Wy2UsedM                / S32IDFE-XBPM:P1us:Wy2UsedM S32IDFE-XBPM:P1us:Wy3UsedM                / S32IDFE-XBPM:P1us:Wy3UsedM S32IDFE-XBPM:P1us:x                       / S32IDFE-XBPM:P1us:x S32IDFE-XBPM:P1us:x:CalFactor1M           / S32IDFE-XBPM:P1us:x:CalFactor1M S32IDFE-XBPM:P1us:x:CalFactor2M           / S32IDFE-XBPM:P1us:x:CalFactor2M S32IDFE-XBPM:P1us:x:LowPass1sM            / S32IDFE-XBPM:P1us:x:LowPass1sM S32IDFE-XBPM:P1us:x:LowPass8sM            / S32IDFE-XBPM:P1us:x:LowPass8sM S32IDFE-XBPM:P1us:x:LowPass64sM           / S32IDFE-XBPM:P1us:x:LowPass64sM S32IDFE-XBPM:P1us:x:Offset1M              / S32IDFE-XBPM:P1us:x:Offset1M S32IDFE-XBPM:P1us:x:Offset2M              / S32IDFE-XBPM:P1us:x:Offset2M S32IDFE-XBPM:P1us:x:ResolutionM           / S32IDFE-XBPM:P1us:x:ResolutionM S32IDFE-XBPM:P1us:x:Resolution1sM         / S32IDFE-XBPM:P1us:x:Resolution1sM S32IDFE-XBPM:P1us:x:Resolution8sM         / S32IDFE-XBPM:P1us:x:Resolution8sM S32IDFE-XBPM:P1us:x:Resolution64sM        / S32IDFE-XBPM:P1us:x:Resolution64sM S32IDFE-XBPM:P1us:x:StdDevM               / S32IDFE-XBPM:P1us:x:StdDevM S32IDFE-XBPM:P1us:x:StdDev1sM             / S32IDFE-XBPM:P1us:x:StdDev1sM S32IDFE-XBPM:P1us:x:StdDev8sM             / S32IDFE-XBPM:P1us:x:StdDev8sM S32IDFE-XBPM:P1us:x:StdDev64sM            / S32IDFE-XBPM:P1us:x:StdDev64sM S32IDFE-XBPM:P1us:x1:LowPass1sM           / S32IDFE-XBPM:P1us:x1:LowPass1sM S32IDFE-XBPM:P1us:x1:LowPass8sM           / S32IDFE-XBPM:P1us:x1:LowPass8sM S32IDFE-XBPM:P1us:x1:LowPass64sM          / S32IDFE-XBPM:P1us:x1:LowPass64sM S32IDFE-XBPM:P1us:x2:LowPass1sM           / S32IDFE-XBPM:P1us:x2:LowPass1sM S32IDFE-XBPM:P1us:x2:LowPass8sM           / S32IDFE-XBPM:P1us:x2:LowPass8sM S32IDFE-XBPM:P1us:x2:LowPass64sM          / S32IDFE-XBPM:P1us:x2:LowPass64sM S32IDFE-XBPM:P1us:y                       / S32IDFE-XBPM:P1us:y S32IDFE-XBPM:P1us:y:CalFactor1M           / S32IDFE-XBPM:P1us:y:CalFactor1M S32IDFE-XBPM:P1us:y:CalFactor2M           / S32IDFE-XBPM:P1us:y:CalFactor2M S32IDFE-XBPM:P1us:y:LowPass1sM            / S32IDFE-XBPM:P1us:y:LowPass1sM S32IDFE-XBPM:P1us:y:LowPass8sM            / S32IDFE-XBPM:P1us:y:LowPass8sM S32IDFE-XBPM:P1us:y:LowPass64sM           / S32IDFE-XBPM:P1us:y:LowPass64sM S32IDFE-XBPM:P1us:y:Offset1M              / S32IDFE-XBPM:P1us:y:Offset1M S32IDFE-XBPM:P1us:y:Offset2M              / S32IDFE-XBPM:P1us:y:Offset2M S32IDFE-XBPM:P1us:y:ResolutionM           / S32IDFE-XBPM:P1us:y:ResolutionM S32IDFE-XBPM:P1us:y:Resolution1sM         / S32IDFE-XBPM:P1us:y:Resolution1sM S32IDFE-XBPM:P1us:y:Resolution8sM         / S32IDFE-XBPM:P1us:y:Resolution8sM S32IDFE-XBPM:P1us:y:Resolution64sM        / S32IDFE-XBPM:P1us:y:Resolution64sM S32IDFE-XBPM:P1us:y:StdDevM               / S32IDFE-XBPM:P1us:y:StdDevM S32IDFE-XBPM:P1us:y:StdDev1sM             / S32IDFE-XBPM:P1us:y:StdDev1sM S32IDFE-XBPM:P1us:y:StdDev8sM             / S32IDFE-XBPM:P1us:y:StdDev8sM S32IDFE-XBPM:P1us:y:StdDev64sM            / S32IDFE-XBPM:P1us:y:StdDev64sM S32IDFE-XBPM:P1us:y1:LowPass1sM           / S32IDFE-XBPM:P1us:y1:LowPass1sM S32IDFE-XBPM:P1us:y1:LowPass8sM           / S32IDFE-XBPM:P1us:y1:LowPass8sM S32IDFE-XBPM:P1us:y1:LowPass64sM          / S32IDFE-XBPM:P1us:y1:LowPass64sM S32IDFE-XBPM:P1us:y2:LowPass1sM           / S32IDFE-XBPM:P1us:y2:LowPass1sM S32IDFE-XBPM:P1us:y2:LowPass8sM           / S32IDFE-XBPM:P1us:y2:LowPass8sM S32IDFE-XBPM:P1us:y2:LowPass64sM          / S32IDFE-XBPM:P1us:y2:LowPass64sM S32IDFE-XBPM:P2ds:GapUsedC                / S32IDFE-XBPM:P2ds:GapUsedC S32IDFE-XBPM:P2ds:XCalM                   / S32IDFE-XBPM:P2ds:XCalM S32IDFE-XBPM:P2ds:YCalM                   / S32IDFE-XBPM:P2ds:YCalM S32IDFE-XBPM:P2ds:x:CalFactorM            / S32IDFE-XBPM:P2ds:x:CalFactorM S32IDFE-XBPM:P2ds:x:OffsetM               / S32IDFE-XBPM:P2ds:x:OffsetM S32IDFE-XBPM:P2ds:y:CalFactorM            / S32IDFE-XBPM:P2ds:y:CalFactorM S32IDFE-XBPM:P2ds:y:OffsetM               / S32IDFE-XBPM:P2ds:y:OffsetM S32IDFE-XBPM:P2us:GapUsedC                / S32IDFE-XBPM:P2us:GapUsedC S32IDFE-XBPM:P2us:XCalM                   / S32IDFE-XBPM:P2us:XCalM S32IDFE-XBPM:P2us:YCalM                   / S32IDFE-XBPM:P2us:YCalM S32IDFE-XBPM:P2us:x:CalFactorM            / S32IDFE-XBPM:P2us:x:CalFactorM S32IDFE-XBPM:P2us:x:OffsetM               / S32IDFE-XBPM:P2us:x:OffsetM S32IDFE-XBPM:P2us:y:CalFactorM            / S32IDFE-XBPM:P2us:y:CalFactorM S32IDFE-XBPM:P2us:y:OffsetM               / S32IDFE-XBPM:P2us:y:OffsetM S33BMFE-XBPM:P1:AM                        / S33BMFE-XBPM:P1:AM S33BMFE-XBPM:P1:BM                        / S33BMFE-XBPM:P1:BM S33BMFE-XBPM:P1:y                         / S33BMFE-XBPM:P1:y S33BMFE-XBPM:P1:y:LowPass1sM              / S33BMFE-XBPM:P1:y:LowPass1sM S33BMFE-XBPM:P1:y:LowPass8sM              / S33BMFE-XBPM:P1:y:LowPass8sM S33BMFE-XBPM:P1:y:LowPass64sM             / S33BMFE-XBPM:P1:y:LowPass64sM S33BMFE-XBPM:P1:y:StdDevM                 / S33BMFE-XBPM:P1:y:StdDevM S33BMFE-XBPM:P1:y:StdDev1sM               / S33BMFE-XBPM:P1:y:StdDev1sM S33BMFE-XBPM:P1:y:StdDev8sM               / S33BMFE-XBPM:P1:y:StdDev8sM S33BMFE-XBPM:P1:y:StdDev64sM              / S33BMFE-XBPM:P1:y:StdDev64sM S33BMFE-XBPM:P2:AM                        / S33BMFE-XBPM:P2:AM S33BMFE-XBPM:P2:BM                        / S33BMFE-XBPM:P2:BM S33BMFE-XBPM:P2:y                         / S33BMFE-XBPM:P2:y S33BMFE-XBPM:P2:y:LowPass1sM              / S33BMFE-XBPM:P2:y:LowPass1sM S33BMFE-XBPM:P2:y:LowPass8sM              / S33BMFE-XBPM:P2:y:LowPass8sM S33BMFE-XBPM:P2:y:LowPass64sM             / S33BMFE-XBPM:P2:y:LowPass64sM S33BMFE-XBPM:P2:y:StdDevM                 / S33BMFE-XBPM:P2:y:StdDevM S33BMFE-XBPM:P2:y:StdDev1sM               / S33BMFE-XBPM:P2:y:StdDev1sM S33BMFE-XBPM:P2:y:StdDev8sM               / S33BMFE-XBPM:P2:y:StdDev8sM S33BMFE-XBPM:P2:y:StdDev64sM              / S33BMFE-XBPM:P2:y:StdDev64sM S33IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S33IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S33IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S33IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S33IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S33IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S33IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S33IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S33IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S33IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S33IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S33IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S33IDFE-XBPM:CM1ds:PositionOffsetX        / S33IDFE-XBPM:CM1ds:PositionOffsetX S33IDFE-XBPM:CM1ds:PositionOffsetY        / S33IDFE-XBPM:CM1ds:PositionOffsetY S33IDFE-XBPM:CM1ds:PositionScaleX         / S33IDFE-XBPM:CM1ds:PositionScaleX S33IDFE-XBPM:CM1ds:PositionScaleY         / S33IDFE-XBPM:CM1ds:PositionScaleY S33IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S33IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S33IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S33IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S33IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S33IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S33IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S33IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S33IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S33IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S33IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S33IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S33IDFE-XBPM:CM2ds:PositionOffsetX        / S33IDFE-XBPM:CM2ds:PositionOffsetX S33IDFE-XBPM:CM2ds:PositionOffsetY        / S33IDFE-XBPM:CM2ds:PositionOffsetY S33IDFE-XBPM:CM2ds:PositionScaleX         / S33IDFE-XBPM:CM2ds:PositionScaleX S33IDFE-XBPM:CM2ds:PositionScaleY         / S33IDFE-XBPM:CM2ds:PositionScaleY S33IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S33IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S33IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S33IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S33IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S33IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S33IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S33IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S33IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S33IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S33IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S33IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S33IDFE-XBPM:CM3ds:PositionOffsetX        / S33IDFE-XBPM:CM3ds:PositionOffsetX S33IDFE-XBPM:CM3ds:PositionOffsetY        / S33IDFE-XBPM:CM3ds:PositionOffsetY S33IDFE-XBPM:CM3ds:PositionScaleX         / S33IDFE-XBPM:CM3ds:PositionScaleX S33IDFE-XBPM:CM3ds:PositionScaleY         / S33IDFE-XBPM:CM3ds:PositionScaleY S33IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S33IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S33IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S33IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S33IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S33IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S33IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S33IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S33IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S33IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S33IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S33IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S33IDFE-XBPM:CM4ds:PositionOffsetX        / S33IDFE-XBPM:CM4ds:PositionOffsetX S33IDFE-XBPM:CM4ds:PositionOffsetY        / S33IDFE-XBPM:CM4ds:PositionOffsetY S33IDFE-XBPM:CM4ds:PositionScaleX         / S33IDFE-XBPM:CM4ds:PositionScaleX S33IDFE-XBPM:CM4ds:PositionScaleY         / S33IDFE-XBPM:CM4ds:PositionScaleY S33IDFE-XBPM:P1ds:BMcUsedM                / S33IDFE-XBPM:P1ds:BMcUsedM S33IDFE-XBPM:P1ds:GapUsedC                / S33IDFE-XBPM:P1ds:GapUsedC S33IDFE-XBPM:P1ds:Wx1UsedM                / S33IDFE-XBPM:P1ds:Wx1UsedM S33IDFE-XBPM:P1ds:Wx2UsedM                / S33IDFE-XBPM:P1ds:Wx2UsedM S33IDFE-XBPM:P1ds:Wx3UsedM                / S33IDFE-XBPM:P1ds:Wx3UsedM S33IDFE-XBPM:P1ds:Wy1UsedM                / S33IDFE-XBPM:P1ds:Wy1UsedM S33IDFE-XBPM:P1ds:Wy2UsedM                / S33IDFE-XBPM:P1ds:Wy2UsedM S33IDFE-XBPM:P1ds:Wy3UsedM                / S33IDFE-XBPM:P1ds:Wy3UsedM S33IDFE-XBPM:P1ds:x                       / S33IDFE-XBPM:P1ds:x S33IDFE-XBPM:P1ds:x:CalFactor1M           / S33IDFE-XBPM:P1ds:x:CalFactor1M S33IDFE-XBPM:P1ds:x:CalFactor2M           / S33IDFE-XBPM:P1ds:x:CalFactor2M S33IDFE-XBPM:P1ds:x:LowPass1sM            / S33IDFE-XBPM:P1ds:x:LowPass1sM S33IDFE-XBPM:P1ds:x:LowPass8sM            / S33IDFE-XBPM:P1ds:x:LowPass8sM S33IDFE-XBPM:P1ds:x:LowPass64sM           / S33IDFE-XBPM:P1ds:x:LowPass64sM S33IDFE-XBPM:P1ds:x:Offset1M              / S33IDFE-XBPM:P1ds:x:Offset1M S33IDFE-XBPM:P1ds:x:Offset2M              / S33IDFE-XBPM:P1ds:x:Offset2M S33IDFE-XBPM:P1ds:x:ResolutionM           / S33IDFE-XBPM:P1ds:x:ResolutionM S33IDFE-XBPM:P1ds:x:Resolution1sM         / S33IDFE-XBPM:P1ds:x:Resolution1sM S33IDFE-XBPM:P1ds:x:Resolution8sM         / S33IDFE-XBPM:P1ds:x:Resolution8sM S33IDFE-XBPM:P1ds:x:Resolution64sM        / S33IDFE-XBPM:P1ds:x:Resolution64sM S33IDFE-XBPM:P1ds:x:StdDevM               / S33IDFE-XBPM:P1ds:x:StdDevM S33IDFE-XBPM:P1ds:x:StdDev1sM             / S33IDFE-XBPM:P1ds:x:StdDev1sM S33IDFE-XBPM:P1ds:x:StdDev8sM             / S33IDFE-XBPM:P1ds:x:StdDev8sM S33IDFE-XBPM:P1ds:x:StdDev64sM            / S33IDFE-XBPM:P1ds:x:StdDev64sM S33IDFE-XBPM:P1ds:x1:LowPass1sM           / S33IDFE-XBPM:P1ds:x1:LowPass1sM S33IDFE-XBPM:P1ds:x1:LowPass8sM           / S33IDFE-XBPM:P1ds:x1:LowPass8sM S33IDFE-XBPM:P1ds:x1:LowPass64sM          / S33IDFE-XBPM:P1ds:x1:LowPass64sM S33IDFE-XBPM:P1ds:x2:LowPass1sM           / S33IDFE-XBPM:P1ds:x2:LowPass1sM S33IDFE-XBPM:P1ds:x2:LowPass8sM           / S33IDFE-XBPM:P1ds:x2:LowPass8sM S33IDFE-XBPM:P1ds:x2:LowPass64sM          / S33IDFE-XBPM:P1ds:x2:LowPass64sM S33IDFE-XBPM:P1ds:y                       / S33IDFE-XBPM:P1ds:y S33IDFE-XBPM:P1ds:y:CalFactor1M           / S33IDFE-XBPM:P1ds:y:CalFactor1M S33IDFE-XBPM:P1ds:y:CalFactor2M           / S33IDFE-XBPM:P1ds:y:CalFactor2M S33IDFE-XBPM:P1ds:y:LowPass1sM            / S33IDFE-XBPM:P1ds:y:LowPass1sM S33IDFE-XBPM:P1ds:y:LowPass8sM            / S33IDFE-XBPM:P1ds:y:LowPass8sM S33IDFE-XBPM:P1ds:y:LowPass64sM           / S33IDFE-XBPM:P1ds:y:LowPass64sM S33IDFE-XBPM:P1ds:y:Offset1M              / S33IDFE-XBPM:P1ds:y:Offset1M S33IDFE-XBPM:P1ds:y:Offset2M              / S33IDFE-XBPM:P1ds:y:Offset2M S33IDFE-XBPM:P1ds:y:ResolutionM           / S33IDFE-XBPM:P1ds:y:ResolutionM S33IDFE-XBPM:P1ds:y:Resolution1sM         / S33IDFE-XBPM:P1ds:y:Resolution1sM S33IDFE-XBPM:P1ds:y:Resolution8sM         / S33IDFE-XBPM:P1ds:y:Resolution8sM S33IDFE-XBPM:P1ds:y:Resolution64sM        / S33IDFE-XBPM:P1ds:y:Resolution64sM S33IDFE-XBPM:P1ds:y:StdDevM               / S33IDFE-XBPM:P1ds:y:StdDevM S33IDFE-XBPM:P1ds:y:StdDev1sM             / S33IDFE-XBPM:P1ds:y:StdDev1sM S33IDFE-XBPM:P1ds:y:StdDev8sM             / S33IDFE-XBPM:P1ds:y:StdDev8sM S33IDFE-XBPM:P1ds:y:StdDev64sM            / S33IDFE-XBPM:P1ds:y:StdDev64sM S33IDFE-XBPM:P1ds:y1:LowPass1sM           / S33IDFE-XBPM:P1ds:y1:LowPass1sM S33IDFE-XBPM:P1ds:y1:LowPass8sM           / S33IDFE-XBPM:P1ds:y1:LowPass8sM S33IDFE-XBPM:P1ds:y1:LowPass64sM          / S33IDFE-XBPM:P1ds:y1:LowPass64sM S33IDFE-XBPM:P1ds:y2:LowPass1sM           / S33IDFE-XBPM:P1ds:y2:LowPass1sM S33IDFE-XBPM:P1ds:y2:LowPass8sM           / S33IDFE-XBPM:P1ds:y2:LowPass8sM S33IDFE-XBPM:P1ds:y2:LowPass64sM          / S33IDFE-XBPM:P1ds:y2:LowPass64sM S33IDFE-XBPM:P2ds:GapUsedC                / S33IDFE-XBPM:P2ds:GapUsedC S33IDFE-XBPM:P2ds:XCalM                   / S33IDFE-XBPM:P2ds:XCalM S33IDFE-XBPM:P2ds:YCalM                   / S33IDFE-XBPM:P2ds:YCalM S33IDFE-XBPM:P2ds:x:CalFactorM            / S33IDFE-XBPM:P2ds:x:CalFactorM S33IDFE-XBPM:P2ds:x:OffsetM               / S33IDFE-XBPM:P2ds:x:OffsetM S33IDFE-XBPM:P2ds:y:CalFactorM            / S33IDFE-XBPM:P2ds:y:CalFactorM S33IDFE-XBPM:P2ds:y:OffsetM               / S33IDFE-XBPM:P2ds:y:OffsetM S34IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S34IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S34IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S34IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S34IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S34IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S34IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S34IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S34IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S34IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S34IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S34IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S34IDFE-XBPM:CM1ds:PositionOffsetX        / S34IDFE-XBPM:CM1ds:PositionOffsetX S34IDFE-XBPM:CM1ds:PositionOffsetY        / S34IDFE-XBPM:CM1ds:PositionOffsetY S34IDFE-XBPM:CM1ds:PositionScaleX         / S34IDFE-XBPM:CM1ds:PositionScaleX S34IDFE-XBPM:CM1ds:PositionScaleY         / S34IDFE-XBPM:CM1ds:PositionScaleY S34IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S34IDFE-XBPM:CM1us:Current1:MeanValue_RBV S34IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S34IDFE-XBPM:CM1us:Current2:MeanValue_RBV S34IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S34IDFE-XBPM:CM1us:Current3:MeanValue_RBV S34IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S34IDFE-XBPM:CM1us:Current4:MeanValue_RBV S34IDFE-XBPM:CM1us:PosX:MeanValue_RBV     / S34IDFE-XBPM:CM1us:PosX:MeanValue_RBV S34IDFE-XBPM:CM1us:PosY:MeanValue_RBV     / S34IDFE-XBPM:CM1us:PosY:MeanValue_RBV S34IDFE-XBPM:CM1us:PositionOffsetX        / S34IDFE-XBPM:CM1us:PositionOffsetX S34IDFE-XBPM:CM1us:PositionOffsetY        / S34IDFE-XBPM:CM1us:PositionOffsetY S34IDFE-XBPM:CM1us:PositionScaleX         / S34IDFE-XBPM:CM1us:PositionScaleX S34IDFE-XBPM:CM1us:PositionScaleY         / S34IDFE-XBPM:CM1us:PositionScaleY S34IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S34IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S34IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S34IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S34IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S34IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S34IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S34IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S34IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S34IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S34IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S34IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S34IDFE-XBPM:CM2ds:PositionOffsetX        / S34IDFE-XBPM:CM2ds:PositionOffsetX S34IDFE-XBPM:CM2ds:PositionOffsetY        / S34IDFE-XBPM:CM2ds:PositionOffsetY S34IDFE-XBPM:CM2ds:PositionScaleX         / S34IDFE-XBPM:CM2ds:PositionScaleX S34IDFE-XBPM:CM2ds:PositionScaleY         / S34IDFE-XBPM:CM2ds:PositionScaleY S34IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S34IDFE-XBPM:CM2us:Current1:MeanValue_RBV S34IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S34IDFE-XBPM:CM2us:Current2:MeanValue_RBV S34IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S34IDFE-XBPM:CM2us:Current3:MeanValue_RBV S34IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S34IDFE-XBPM:CM2us:Current4:MeanValue_RBV S34IDFE-XBPM:CM2us:PosX:MeanValue_RBV     / S34IDFE-XBPM:CM2us:PosX:MeanValue_RBV S34IDFE-XBPM:CM2us:PosY:MeanValue_RBV     / S34IDFE-XBPM:CM2us:PosY:MeanValue_RBV S34IDFE-XBPM:CM2us:PositionOffsetX        / S34IDFE-XBPM:CM2us:PositionOffsetX S34IDFE-XBPM:CM2us:PositionOffsetY        / S34IDFE-XBPM:CM2us:PositionOffsetY S34IDFE-XBPM:CM2us:PositionScaleX         / S34IDFE-XBPM:CM2us:PositionScaleX S34IDFE-XBPM:CM2us:PositionScaleY         / S34IDFE-XBPM:CM2us:PositionScaleY S34IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S34IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S34IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S34IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S34IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S34IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S34IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S34IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S34IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S34IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S34IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S34IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S34IDFE-XBPM:CM3ds:PositionOffsetX        / S34IDFE-XBPM:CM3ds:PositionOffsetX S34IDFE-XBPM:CM3ds:PositionOffsetY        / S34IDFE-XBPM:CM3ds:PositionOffsetY S34IDFE-XBPM:CM3ds:PositionScaleX         / S34IDFE-XBPM:CM3ds:PositionScaleX S34IDFE-XBPM:CM3ds:PositionScaleY         / S34IDFE-XBPM:CM3ds:PositionScaleY S34IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S34IDFE-XBPM:CM3us:Current1:MeanValue_RBV S34IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S34IDFE-XBPM:CM3us:Current2:MeanValue_RBV S34IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S34IDFE-XBPM:CM3us:Current3:MeanValue_RBV S34IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S34IDFE-XBPM:CM3us:Current4:MeanValue_RBV S34IDFE-XBPM:CM3us:PosX:MeanValue_RBV     / S34IDFE-XBPM:CM3us:PosX:MeanValue_RBV S34IDFE-XBPM:CM3us:PosY:MeanValue_RBV     / S34IDFE-XBPM:CM3us:PosY:MeanValue_RBV S34IDFE-XBPM:CM3us:PositionOffsetX        / S34IDFE-XBPM:CM3us:PositionOffsetX S34IDFE-XBPM:CM3us:PositionOffsetY        / S34IDFE-XBPM:CM3us:PositionOffsetY S34IDFE-XBPM:CM3us:PositionScaleX         / S34IDFE-XBPM:CM3us:PositionScaleX S34IDFE-XBPM:CM3us:PositionScaleY         / S34IDFE-XBPM:CM3us:PositionScaleY S34IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S34IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S34IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S34IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S34IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S34IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S34IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S34IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S34IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S34IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S34IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S34IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S34IDFE-XBPM:CM4ds:PositionOffsetX        / S34IDFE-XBPM:CM4ds:PositionOffsetX S34IDFE-XBPM:CM4ds:PositionOffsetY        / S34IDFE-XBPM:CM4ds:PositionOffsetY S34IDFE-XBPM:CM4ds:PositionScaleX         / S34IDFE-XBPM:CM4ds:PositionScaleX S34IDFE-XBPM:CM4ds:PositionScaleY         / S34IDFE-XBPM:CM4ds:PositionScaleY S34IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S34IDFE-XBPM:CM4us:Current1:MeanValue_RBV S34IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S34IDFE-XBPM:CM4us:Current2:MeanValue_RBV S34IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S34IDFE-XBPM:CM4us:Current3:MeanValue_RBV S34IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S34IDFE-XBPM:CM4us:Current4:MeanValue_RBV S34IDFE-XBPM:CM4us:PosX:MeanValue_RBV     / S34IDFE-XBPM:CM4us:PosX:MeanValue_RBV S34IDFE-XBPM:CM4us:PosY:MeanValue_RBV     / S34IDFE-XBPM:CM4us:PosY:MeanValue_RBV S34IDFE-XBPM:CM4us:PositionOffsetX        / S34IDFE-XBPM:CM4us:PositionOffsetX S34IDFE-XBPM:CM4us:PositionOffsetY        / S34IDFE-XBPM:CM4us:PositionOffsetY S34IDFE-XBPM:CM4us:PositionScaleX         / S34IDFE-XBPM:CM4us:PositionScaleX S34IDFE-XBPM:CM4us:PositionScaleY         / S34IDFE-XBPM:CM4us:PositionScaleY S34IDFE-XBPM:P1ds:BMcUsedM                / S34IDFE-XBPM:P1ds:BMcUsedM S34IDFE-XBPM:P1ds:GapUsedC                / S34IDFE-XBPM:P1ds:GapUsedC S34IDFE-XBPM:P1ds:Wx1UsedM                / S34IDFE-XBPM:P1ds:Wx1UsedM S34IDFE-XBPM:P1ds:Wx2UsedM                / S34IDFE-XBPM:P1ds:Wx2UsedM S34IDFE-XBPM:P1ds:Wx3UsedM                / S34IDFE-XBPM:P1ds:Wx3UsedM S34IDFE-XBPM:P1ds:Wy1UsedM                / S34IDFE-XBPM:P1ds:Wy1UsedM S34IDFE-XBPM:P1ds:Wy2UsedM                / S34IDFE-XBPM:P1ds:Wy2UsedM S34IDFE-XBPM:P1ds:Wy3UsedM                / S34IDFE-XBPM:P1ds:Wy3UsedM S34IDFE-XBPM:P1ds:x                       / S34IDFE-XBPM:P1ds:x S34IDFE-XBPM:P1ds:x:CalFactor1M           / S34IDFE-XBPM:P1ds:x:CalFactor1M S34IDFE-XBPM:P1ds:x:CalFactor2M           / S34IDFE-XBPM:P1ds:x:CalFactor2M S34IDFE-XBPM:P1ds:x:LowPass1sM            / S34IDFE-XBPM:P1ds:x:LowPass1sM S34IDFE-XBPM:P1ds:x:LowPass8sM            / S34IDFE-XBPM:P1ds:x:LowPass8sM S34IDFE-XBPM:P1ds:x:LowPass64sM           / S34IDFE-XBPM:P1ds:x:LowPass64sM S34IDFE-XBPM:P1ds:x:Offset1M              / S34IDFE-XBPM:P1ds:x:Offset1M S34IDFE-XBPM:P1ds:x:Offset2M              / S34IDFE-XBPM:P1ds:x:Offset2M S34IDFE-XBPM:P1ds:x:ResolutionM           / S34IDFE-XBPM:P1ds:x:ResolutionM S34IDFE-XBPM:P1ds:x:Resolution1sM         / S34IDFE-XBPM:P1ds:x:Resolution1sM S34IDFE-XBPM:P1ds:x:Resolution8sM         / S34IDFE-XBPM:P1ds:x:Resolution8sM S34IDFE-XBPM:P1ds:x:Resolution64sM        / S34IDFE-XBPM:P1ds:x:Resolution64sM S34IDFE-XBPM:P1ds:x:StdDevM               / S34IDFE-XBPM:P1ds:x:StdDevM S34IDFE-XBPM:P1ds:x:StdDev1sM             / S34IDFE-XBPM:P1ds:x:StdDev1sM S34IDFE-XBPM:P1ds:x:StdDev8sM             / S34IDFE-XBPM:P1ds:x:StdDev8sM S34IDFE-XBPM:P1ds:x:StdDev64sM            / S34IDFE-XBPM:P1ds:x:StdDev64sM S34IDFE-XBPM:P1ds:x1:LowPass1sM           / S34IDFE-XBPM:P1ds:x1:LowPass1sM S34IDFE-XBPM:P1ds:x1:LowPass8sM           / S34IDFE-XBPM:P1ds:x1:LowPass8sM S34IDFE-XBPM:P1ds:x1:LowPass64sM          / S34IDFE-XBPM:P1ds:x1:LowPass64sM S34IDFE-XBPM:P1ds:x2:LowPass1sM           / S34IDFE-XBPM:P1ds:x2:LowPass1sM S34IDFE-XBPM:P1ds:x2:LowPass8sM           / S34IDFE-XBPM:P1ds:x2:LowPass8sM S34IDFE-XBPM:P1ds:x2:LowPass64sM          / S34IDFE-XBPM:P1ds:x2:LowPass64sM S34IDFE-XBPM:P1ds:y                       / S34IDFE-XBPM:P1ds:y S34IDFE-XBPM:P1ds:y:CalFactor1M           / S34IDFE-XBPM:P1ds:y:CalFactor1M S34IDFE-XBPM:P1ds:y:CalFactor2M           / S34IDFE-XBPM:P1ds:y:CalFactor2M S34IDFE-XBPM:P1ds:y:LowPass1sM            / S34IDFE-XBPM:P1ds:y:LowPass1sM S34IDFE-XBPM:P1ds:y:LowPass8sM            / S34IDFE-XBPM:P1ds:y:LowPass8sM S34IDFE-XBPM:P1ds:y:LowPass64sM           / S34IDFE-XBPM:P1ds:y:LowPass64sM S34IDFE-XBPM:P1ds:y:Offset1M              / S34IDFE-XBPM:P1ds:y:Offset1M S34IDFE-XBPM:P1ds:y:Offset2M              / S34IDFE-XBPM:P1ds:y:Offset2M S34IDFE-XBPM:P1ds:y:ResolutionM           / S34IDFE-XBPM:P1ds:y:ResolutionM S34IDFE-XBPM:P1ds:y:Resolution1sM         / S34IDFE-XBPM:P1ds:y:Resolution1sM S34IDFE-XBPM:P1ds:y:Resolution8sM         / S34IDFE-XBPM:P1ds:y:Resolution8sM S34IDFE-XBPM:P1ds:y:Resolution64sM        / S34IDFE-XBPM:P1ds:y:Resolution64sM S34IDFE-XBPM:P1ds:y:StdDevM               / S34IDFE-XBPM:P1ds:y:StdDevM S34IDFE-XBPM:P1ds:y:StdDev1sM             / S34IDFE-XBPM:P1ds:y:StdDev1sM S34IDFE-XBPM:P1ds:y:StdDev8sM             / S34IDFE-XBPM:P1ds:y:StdDev8sM S34IDFE-XBPM:P1ds:y:StdDev64sM            / S34IDFE-XBPM:P1ds:y:StdDev64sM S34IDFE-XBPM:P1ds:y1:LowPass1sM           / S34IDFE-XBPM:P1ds:y1:LowPass1sM S34IDFE-XBPM:P1ds:y1:LowPass8sM           / S34IDFE-XBPM:P1ds:y1:LowPass8sM S34IDFE-XBPM:P1ds:y1:LowPass64sM          / S34IDFE-XBPM:P1ds:y1:LowPass64sM S34IDFE-XBPM:P1ds:y2:LowPass1sM           / S34IDFE-XBPM:P1ds:y2:LowPass1sM S34IDFE-XBPM:P1ds:y2:LowPass8sM           / S34IDFE-XBPM:P1ds:y2:LowPass8sM S34IDFE-XBPM:P1ds:y2:LowPass64sM          / S34IDFE-XBPM:P1ds:y2:LowPass64sM S34IDFE-XBPM:P1us:BMcUsedM                / S34IDFE-XBPM:P1us:BMcUsedM S34IDFE-XBPM:P1us:GapUsedC                / S34IDFE-XBPM:P1us:GapUsedC S34IDFE-XBPM:P1us:Wx1UsedM                / S34IDFE-XBPM:P1us:Wx1UsedM S34IDFE-XBPM:P1us:Wx2UsedM                / S34IDFE-XBPM:P1us:Wx2UsedM S34IDFE-XBPM:P1us:Wx3UsedM                / S34IDFE-XBPM:P1us:Wx3UsedM S34IDFE-XBPM:P1us:Wy1UsedM                / S34IDFE-XBPM:P1us:Wy1UsedM S34IDFE-XBPM:P1us:Wy2UsedM                / S34IDFE-XBPM:P1us:Wy2UsedM S34IDFE-XBPM:P1us:Wy3UsedM                / S34IDFE-XBPM:P1us:Wy3UsedM S34IDFE-XBPM:P1us:x                       / S34IDFE-XBPM:P1us:x S34IDFE-XBPM:P1us:x:CalFactor1M           / S34IDFE-XBPM:P1us:x:CalFactor1M S34IDFE-XBPM:P1us:x:CalFactor2M           / S34IDFE-XBPM:P1us:x:CalFactor2M S34IDFE-XBPM:P1us:x:LowPass1sM            / S34IDFE-XBPM:P1us:x:LowPass1sM S34IDFE-XBPM:P1us:x:LowPass8sM            / S34IDFE-XBPM:P1us:x:LowPass8sM S34IDFE-XBPM:P1us:x:LowPass64sM           / S34IDFE-XBPM:P1us:x:LowPass64sM S34IDFE-XBPM:P1us:x:Offset1M              / S34IDFE-XBPM:P1us:x:Offset1M S34IDFE-XBPM:P1us:x:Offset2M              / S34IDFE-XBPM:P1us:x:Offset2M S34IDFE-XBPM:P1us:x:ResolutionM           / S34IDFE-XBPM:P1us:x:ResolutionM S34IDFE-XBPM:P1us:x:Resolution1sM         / S34IDFE-XBPM:P1us:x:Resolution1sM S34IDFE-XBPM:P1us:x:Resolution8sM         / S34IDFE-XBPM:P1us:x:Resolution8sM S34IDFE-XBPM:P1us:x:Resolution64sM        / S34IDFE-XBPM:P1us:x:Resolution64sM S34IDFE-XBPM:P1us:x:StdDevM               / S34IDFE-XBPM:P1us:x:StdDevM S34IDFE-XBPM:P1us:x:StdDev1sM             / S34IDFE-XBPM:P1us:x:StdDev1sM S34IDFE-XBPM:P1us:x:StdDev8sM             / S34IDFE-XBPM:P1us:x:StdDev8sM S34IDFE-XBPM:P1us:x:StdDev64sM            / S34IDFE-XBPM:P1us:x:StdDev64sM S34IDFE-XBPM:P1us:x1:LowPass1sM           / S34IDFE-XBPM:P1us:x1:LowPass1sM S34IDFE-XBPM:P1us:x1:LowPass8sM           / S34IDFE-XBPM:P1us:x1:LowPass8sM S34IDFE-XBPM:P1us:x1:LowPass64sM          / S34IDFE-XBPM:P1us:x1:LowPass64sM S34IDFE-XBPM:P1us:x2:LowPass1sM           / S34IDFE-XBPM:P1us:x2:LowPass1sM S34IDFE-XBPM:P1us:x2:LowPass8sM           / S34IDFE-XBPM:P1us:x2:LowPass8sM S34IDFE-XBPM:P1us:x2:LowPass64sM          / S34IDFE-XBPM:P1us:x2:LowPass64sM S34IDFE-XBPM:P1us:y                       / S34IDFE-XBPM:P1us:y S34IDFE-XBPM:P1us:y:CalFactor1M           / S34IDFE-XBPM:P1us:y:CalFactor1M S34IDFE-XBPM:P1us:y:CalFactor2M           / S34IDFE-XBPM:P1us:y:CalFactor2M S34IDFE-XBPM:P1us:y:LowPass1sM            / S34IDFE-XBPM:P1us:y:LowPass1sM S34IDFE-XBPM:P1us:y:LowPass8sM            / S34IDFE-XBPM:P1us:y:LowPass8sM S34IDFE-XBPM:P1us:y:LowPass64sM           / S34IDFE-XBPM:P1us:y:LowPass64sM S34IDFE-XBPM:P1us:y:Offset1M              / S34IDFE-XBPM:P1us:y:Offset1M S34IDFE-XBPM:P1us:y:Offset2M              / S34IDFE-XBPM:P1us:y:Offset2M S34IDFE-XBPM:P1us:y:ResolutionM           / S34IDFE-XBPM:P1us:y:ResolutionM S34IDFE-XBPM:P1us:y:Resolution1sM         / S34IDFE-XBPM:P1us:y:Resolution1sM S34IDFE-XBPM:P1us:y:Resolution8sM         / S34IDFE-XBPM:P1us:y:Resolution8sM S34IDFE-XBPM:P1us:y:Resolution64sM        / S34IDFE-XBPM:P1us:y:Resolution64sM S34IDFE-XBPM:P1us:y:StdDevM               / S34IDFE-XBPM:P1us:y:StdDevM S34IDFE-XBPM:P1us:y:StdDev1sM             / S34IDFE-XBPM:P1us:y:StdDev1sM S34IDFE-XBPM:P1us:y:StdDev8sM             / S34IDFE-XBPM:P1us:y:StdDev8sM S34IDFE-XBPM:P1us:y:StdDev64sM            / S34IDFE-XBPM:P1us:y:StdDev64sM S34IDFE-XBPM:P1us:y1:LowPass1sM           / S34IDFE-XBPM:P1us:y1:LowPass1sM S34IDFE-XBPM:P1us:y1:LowPass8sM           / S34IDFE-XBPM:P1us:y1:LowPass8sM S34IDFE-XBPM:P1us:y1:LowPass64sM          / S34IDFE-XBPM:P1us:y1:LowPass64sM S34IDFE-XBPM:P1us:y2:LowPass1sM           / S34IDFE-XBPM:P1us:y2:LowPass1sM S34IDFE-XBPM:P1us:y2:LowPass8sM           / S34IDFE-XBPM:P1us:y2:LowPass8sM S34IDFE-XBPM:P1us:y2:LowPass64sM          / S34IDFE-XBPM:P1us:y2:LowPass64sM S34IDFE-XBPM:P2ds:GapUsedC                / S34IDFE-XBPM:P2ds:GapUsedC S34IDFE-XBPM:P2ds:XCalM                   / S34IDFE-XBPM:P2ds:XCalM S34IDFE-XBPM:P2ds:YCalM                   / S34IDFE-XBPM:P2ds:YCalM S34IDFE-XBPM:P2ds:x:CalFactorM            / S34IDFE-XBPM:P2ds:x:CalFactorM S34IDFE-XBPM:P2ds:x:OffsetM               / S34IDFE-XBPM:P2ds:x:OffsetM S34IDFE-XBPM:P2ds:y:CalFactorM            / S34IDFE-XBPM:P2ds:y:CalFactorM S34IDFE-XBPM:P2ds:y:OffsetM               / S34IDFE-XBPM:P2ds:y:OffsetM S34IDFE-XBPM:P2us:GapUsedC                / S34IDFE-XBPM:P2us:GapUsedC S34IDFE-XBPM:P2us:XCalM                   / S34IDFE-XBPM:P2us:XCalM S34IDFE-XBPM:P2us:YCalM                   / S34IDFE-XBPM:P2us:YCalM S34IDFE-XBPM:P2us:x:CalFactorM            / S34IDFE-XBPM:P2us:x:CalFactorM S34IDFE-XBPM:P2us:x:OffsetM               / S34IDFE-XBPM:P2us:x:OffsetM S34IDFE-XBPM:P2us:y:CalFactorM            / S34IDFE-XBPM:P2us:y:CalFactorM S34IDFE-XBPM:P2us:y:OffsetM               / S34IDFE-XBPM:P2us:y:OffsetM S35BMFE-XBPM:P1:AM                        / S35BMFE-XBPM:P1:AM S35BMFE-XBPM:P1:BM                        / S35BMFE-XBPM:P1:BM S35BMFE-XBPM:P1:y                         / S35BMFE-XBPM:P1:y S35BMFE-XBPM:P1:y:LowPass1sM              / S35BMFE-XBPM:P1:y:LowPass1sM S35BMFE-XBPM:P1:y:LowPass8sM              / S35BMFE-XBPM:P1:y:LowPass8sM S35BMFE-XBPM:P1:y:LowPass64sM             / S35BMFE-XBPM:P1:y:LowPass64sM S35BMFE-XBPM:P1:y:StdDevM                 / S35BMFE-XBPM:P1:y:StdDevM S35BMFE-XBPM:P1:y:StdDev1sM               / S35BMFE-XBPM:P1:y:StdDev1sM S35BMFE-XBPM:P1:y:StdDev8sM               / S35BMFE-XBPM:P1:y:StdDev8sM S35BMFE-XBPM:P1:y:StdDev64sM              / S35BMFE-XBPM:P1:y:StdDev64sM S35BMFE-XBPM:P2:AM                        / S35BMFE-XBPM:P2:AM S35BMFE-XBPM:P2:BM                        / S35BMFE-XBPM:P2:BM S35BMFE-XBPM:P2:y                         / S35BMFE-XBPM:P2:y S35BMFE-XBPM:P2:y:LowPass1sM              / S35BMFE-XBPM:P2:y:LowPass1sM S35BMFE-XBPM:P2:y:LowPass8sM              / S35BMFE-XBPM:P2:y:LowPass8sM S35BMFE-XBPM:P2:y:LowPass64sM             / S35BMFE-XBPM:P2:y:LowPass64sM S35BMFE-XBPM:P2:y:StdDevM                 / S35BMFE-XBPM:P2:y:StdDevM S35BMFE-XBPM:P2:y:StdDev1sM               / S35BMFE-XBPM:P2:y:StdDev1sM S35BMFE-XBPM:P2:y:StdDev8sM               / S35BMFE-XBPM:P2:y:StdDev8sM S35BMFE-XBPM:P2:y:StdDev64sM              / S35BMFE-XBPM:P2:y:StdDev64sM S35IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S35IDFE-XBPM:CM1ds:Current1:MeanValue_RBV S35IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S35IDFE-XBPM:CM1ds:Current2:MeanValue_RBV S35IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S35IDFE-XBPM:CM1ds:Current3:MeanValue_RBV S35IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S35IDFE-XBPM:CM1ds:Current4:MeanValue_RBV S35IDFE-XBPM:CM1ds:PosX:MeanValue_RBV     / S35IDFE-XBPM:CM1ds:PosX:MeanValue_RBV S35IDFE-XBPM:CM1ds:PosY:MeanValue_RBV     / S35IDFE-XBPM:CM1ds:PosY:MeanValue_RBV S35IDFE-XBPM:CM1ds:PositionOffsetX        / S35IDFE-XBPM:CM1ds:PositionOffsetX S35IDFE-XBPM:CM1ds:PositionOffsetY        / S35IDFE-XBPM:CM1ds:PositionOffsetY S35IDFE-XBPM:CM1ds:PositionScaleX         / S35IDFE-XBPM:CM1ds:PositionScaleX S35IDFE-XBPM:CM1ds:PositionScaleY         / S35IDFE-XBPM:CM1ds:PositionScaleY S35IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S35IDFE-XBPM:CM2ds:Current1:MeanValue_RBV S35IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S35IDFE-XBPM:CM2ds:Current2:MeanValue_RBV S35IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S35IDFE-XBPM:CM2ds:Current3:MeanValue_RBV S35IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S35IDFE-XBPM:CM2ds:Current4:MeanValue_RBV S35IDFE-XBPM:CM2ds:PosX:MeanValue_RBV     / S35IDFE-XBPM:CM2ds:PosX:MeanValue_RBV S35IDFE-XBPM:CM2ds:PosY:MeanValue_RBV     / S35IDFE-XBPM:CM2ds:PosY:MeanValue_RBV S35IDFE-XBPM:CM2ds:PositionOffsetX        / S35IDFE-XBPM:CM2ds:PositionOffsetX S35IDFE-XBPM:CM2ds:PositionOffsetY        / S35IDFE-XBPM:CM2ds:PositionOffsetY S35IDFE-XBPM:CM2ds:PositionScaleX         / S35IDFE-XBPM:CM2ds:PositionScaleX S35IDFE-XBPM:CM2ds:PositionScaleY         / S35IDFE-XBPM:CM2ds:PositionScaleY S35IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S35IDFE-XBPM:CM3ds:Current1:MeanValue_RBV S35IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S35IDFE-XBPM:CM3ds:Current2:MeanValue_RBV S35IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S35IDFE-XBPM:CM3ds:Current3:MeanValue_RBV S35IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S35IDFE-XBPM:CM3ds:Current4:MeanValue_RBV S35IDFE-XBPM:CM3ds:PosX:MeanValue_RBV     / S35IDFE-XBPM:CM3ds:PosX:MeanValue_RBV S35IDFE-XBPM:CM3ds:PosY:MeanValue_RBV     / S35IDFE-XBPM:CM3ds:PosY:MeanValue_RBV S35IDFE-XBPM:CM3ds:PositionOffsetX        / S35IDFE-XBPM:CM3ds:PositionOffsetX S35IDFE-XBPM:CM3ds:PositionOffsetY        / S35IDFE-XBPM:CM3ds:PositionOffsetY S35IDFE-XBPM:CM3ds:PositionScaleX         / S35IDFE-XBPM:CM3ds:PositionScaleX S35IDFE-XBPM:CM3ds:PositionScaleY         / S35IDFE-XBPM:CM3ds:PositionScaleY S35IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S35IDFE-XBPM:CM4ds:Current1:MeanValue_RBV S35IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S35IDFE-XBPM:CM4ds:Current2:MeanValue_RBV S35IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S35IDFE-XBPM:CM4ds:Current3:MeanValue_RBV S35IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S35IDFE-XBPM:CM4ds:Current4:MeanValue_RBV S35IDFE-XBPM:CM4ds:PosX:MeanValue_RBV     / S35IDFE-XBPM:CM4ds:PosX:MeanValue_RBV S35IDFE-XBPM:CM4ds:PosY:MeanValue_RBV     / S35IDFE-XBPM:CM4ds:PosY:MeanValue_RBV S35IDFE-XBPM:CM4ds:PositionOffsetX        / S35IDFE-XBPM:CM4ds:PositionOffsetX S35IDFE-XBPM:CM4ds:PositionOffsetY        / S35IDFE-XBPM:CM4ds:PositionOffsetY S35IDFE-XBPM:CM4ds:PositionScaleX         / S35IDFE-XBPM:CM4ds:PositionScaleX S35IDFE-XBPM:CM4ds:PositionScaleY         / S35IDFE-XBPM:CM4ds:PositionScaleY S35IDFE-XBPM:P1ds:BMcUsedM                / S35IDFE-XBPM:P1ds:BMcUsedM S35IDFE-XBPM:P1ds:GapUsedC                / S35IDFE-XBPM:P1ds:GapUsedC S35IDFE-XBPM:P1ds:Wx1UsedM                / S35IDFE-XBPM:P1ds:Wx1UsedM S35IDFE-XBPM:P1ds:Wx2UsedM                / S35IDFE-XBPM:P1ds:Wx2UsedM S35IDFE-XBPM:P1ds:Wx3UsedM                / S35IDFE-XBPM:P1ds:Wx3UsedM S35IDFE-XBPM:P1ds:Wy1UsedM                / S35IDFE-XBPM:P1ds:Wy1UsedM S35IDFE-XBPM:P1ds:Wy2UsedM                / S35IDFE-XBPM:P1ds:Wy2UsedM S35IDFE-XBPM:P1ds:Wy3UsedM                / S35IDFE-XBPM:P1ds:Wy3UsedM S35IDFE-XBPM:P1ds:x                       / S35IDFE-XBPM:P1ds:x S35IDFE-XBPM:P1ds:x:CalFactor1M           / S35IDFE-XBPM:P1ds:x:CalFactor1M S35IDFE-XBPM:P1ds:x:CalFactor2M           / S35IDFE-XBPM:P1ds:x:CalFactor2M S35IDFE-XBPM:P1ds:x:LowPass1sM            / S35IDFE-XBPM:P1ds:x:LowPass1sM S35IDFE-XBPM:P1ds:x:LowPass8sM            / S35IDFE-XBPM:P1ds:x:LowPass8sM S35IDFE-XBPM:P1ds:x:LowPass64sM           / S35IDFE-XBPM:P1ds:x:LowPass64sM S35IDFE-XBPM:P1ds:x:Offset1M              / S35IDFE-XBPM:P1ds:x:Offset1M S35IDFE-XBPM:P1ds:x:Offset2M              / S35IDFE-XBPM:P1ds:x:Offset2M S35IDFE-XBPM:P1ds:x:ResolutionM           / S35IDFE-XBPM:P1ds:x:ResolutionM S35IDFE-XBPM:P1ds:x:Resolution1sM         / S35IDFE-XBPM:P1ds:x:Resolution1sM S35IDFE-XBPM:P1ds:x:Resolution8sM         / S35IDFE-XBPM:P1ds:x:Resolution8sM S35IDFE-XBPM:P1ds:x:Resolution64sM        / S35IDFE-XBPM:P1ds:x:Resolution64sM S35IDFE-XBPM:P1ds:x:StdDevM               / S35IDFE-XBPM:P1ds:x:StdDevM S35IDFE-XBPM:P1ds:x:StdDev1sM             / S35IDFE-XBPM:P1ds:x:StdDev1sM S35IDFE-XBPM:P1ds:x:StdDev8sM             / S35IDFE-XBPM:P1ds:x:StdDev8sM S35IDFE-XBPM:P1ds:x:StdDev64sM            / S35IDFE-XBPM:P1ds:x:StdDev64sM S35IDFE-XBPM:P1ds:x1:LowPass1sM           / S35IDFE-XBPM:P1ds:x1:LowPass1sM S35IDFE-XBPM:P1ds:x1:LowPass8sM           / S35IDFE-XBPM:P1ds:x1:LowPass8sM S35IDFE-XBPM:P1ds:x1:LowPass64sM          / S35IDFE-XBPM:P1ds:x1:LowPass64sM S35IDFE-XBPM:P1ds:x2:LowPass1sM           / S35IDFE-XBPM:P1ds:x2:LowPass1sM S35IDFE-XBPM:P1ds:x2:LowPass8sM           / S35IDFE-XBPM:P1ds:x2:LowPass8sM S35IDFE-XBPM:P1ds:x2:LowPass64sM          / S35IDFE-XBPM:P1ds:x2:LowPass64sM S35IDFE-XBPM:P1ds:y                       / S35IDFE-XBPM:P1ds:y S35IDFE-XBPM:P1ds:y:CalFactor1M           / S35IDFE-XBPM:P1ds:y:CalFactor1M S35IDFE-XBPM:P1ds:y:CalFactor2M           / S35IDFE-XBPM:P1ds:y:CalFactor2M S35IDFE-XBPM:P1ds:y:LowPass1sM            / S35IDFE-XBPM:P1ds:y:LowPass1sM S35IDFE-XBPM:P1ds:y:LowPass8sM            / S35IDFE-XBPM:P1ds:y:LowPass8sM S35IDFE-XBPM:P1ds:y:LowPass64sM           / S35IDFE-XBPM:P1ds:y:LowPass64sM S35IDFE-XBPM:P1ds:y:Offset1M              / S35IDFE-XBPM:P1ds:y:Offset1M S35IDFE-XBPM:P1ds:y:Offset2M              / S35IDFE-XBPM:P1ds:y:Offset2M S35IDFE-XBPM:P1ds:y:ResolutionM           / S35IDFE-XBPM:P1ds:y:ResolutionM S35IDFE-XBPM:P1ds:y:Resolution1sM         / S35IDFE-XBPM:P1ds:y:Resolution1sM S35IDFE-XBPM:P1ds:y:Resolution8sM         / S35IDFE-XBPM:P1ds:y:Resolution8sM S35IDFE-XBPM:P1ds:y:Resolution64sM        / S35IDFE-XBPM:P1ds:y:Resolution64sM S35IDFE-XBPM:P1ds:y:StdDevM               / S35IDFE-XBPM:P1ds:y:StdDevM S35IDFE-XBPM:P1ds:y:StdDev1sM             / S35IDFE-XBPM:P1ds:y:StdDev1sM S35IDFE-XBPM:P1ds:y:StdDev8sM             / S35IDFE-XBPM:P1ds:y:StdDev8sM S35IDFE-XBPM:P1ds:y:StdDev64sM            / S35IDFE-XBPM:P1ds:y:StdDev64sM S35IDFE-XBPM:P1ds:y1:LowPass1sM           / S35IDFE-XBPM:P1ds:y1:LowPass1sM S35IDFE-XBPM:P1ds:y1:LowPass8sM           / S35IDFE-XBPM:P1ds:y1:LowPass8sM S35IDFE-XBPM:P1ds:y1:LowPass64sM          / S35IDFE-XBPM:P1ds:y1:LowPass64sM S35IDFE-XBPM:P1ds:y2:LowPass1sM           / S35IDFE-XBPM:P1ds:y2:LowPass1sM S35IDFE-XBPM:P1ds:y2:LowPass8sM           / S35IDFE-XBPM:P1ds:y2:LowPass8sM S35IDFE-XBPM:P1ds:y2:LowPass64sM          / S35IDFE-XBPM:P1ds:y2:LowPass64sM S35IDFE-XBPM:P2ds:GapUsedC                / S35IDFE-XBPM:P2ds:GapUsedC S35IDFE-XBPM:P2ds:XCalM                   / S35IDFE-XBPM:P2ds:XCalM S35IDFE-XBPM:P2ds:YCalM                   / S35IDFE-XBPM:P2ds:YCalM S35IDFE-XBPM:P2ds:x:CalFactorM            / S35IDFE-XBPM:P2ds:x:CalFactorM S35IDFE-XBPM:P2ds:x:OffsetM               / S35IDFE-XBPM:P2ds:x:OffsetM S35IDFE-XBPM:P2ds:y:CalFactorM            / S35IDFE-XBPM:P2ds:y:CalFactorM S35IDFE-XBPM:P2ds:y:OffsetM               / S35IDFE-XBPM:P2ds:y:OffsetM

Date/Time Range of Interest
	Year	Month	Day	Hour
Starting date/time:	2024 2023 2022 2021 2020 2019 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 2008 2007 2006 2005 2004 2003 2002 2001 2000	1 2 3 4 5 6 7 8 9 10 11 12	1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31	0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23
Ending date/time:	2024 2023 2022 2021 2020 2019 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 2008 2007 2006 2005 2004 2003 2002 2001 2000	1 2 3 4 5 6 7 8 9 10 11 12	1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31	1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24

Plot Options
Size:	Normal PDA Size Tiny Small Medium Large
Background Color:	White Black
Layout:	1x1 1x2 2x1 2x2 3x3 4x4 5x5
Label size:	Normal +15% +30% +45% +60%
Sparsing:	None 2 4 8 16 32 64 128
Miscellaneous:	With Beam Current Same Y scales Y offset mode Separate Option override
Extra Options:

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