Data Group
Control Name / Readback Name
FE XBPMs
S01BMFE-XBPM:P1:AM / S01BMFE-XBPM:P1:AM
S01BMFE-XBPM:P1:BM / S01BMFE-XBPM:P1:BM
S01BMFE-XBPM:P1:y / S01BMFE-XBPM:P1:y
S01BMFE-XBPM:P1:y:LowPass1sM / S01BMFE-XBPM:P1:y:LowPass1sM
S01BMFE-XBPM:P1:y:LowPass8sM / S01BMFE-XBPM:P1:y:LowPass8sM
S01BMFE-XBPM:P1:y:LowPass64sM / S01BMFE-XBPM:P1:y:LowPass64sM
S01BMFE-XBPM:P1:y:StdDevM / S01BMFE-XBPM:P1:y:StdDevM
S01BMFE-XBPM:P1:y:StdDev1sM / S01BMFE-XBPM:P1:y:StdDev1sM
S01BMFE-XBPM:P1:y:StdDev8sM / S01BMFE-XBPM:P1:y:StdDev8sM
S01BMFE-XBPM:P1:y:StdDev64sM / S01BMFE-XBPM:P1:y:StdDev64sM
S01BMFE-XBPM:P2:AM / S01BMFE-XBPM:P2:AM
S01BMFE-XBPM:P2:BM / S01BMFE-XBPM:P2:BM
S01BMFE-XBPM:P2:y / S01BMFE-XBPM:P2:y
S01BMFE-XBPM:P2:y:LowPass1sM / S01BMFE-XBPM:P2:y:LowPass1sM
S01BMFE-XBPM:P2:y:LowPass8sM / S01BMFE-XBPM:P2:y:LowPass8sM
S01BMFE-XBPM:P2:y:LowPass64sM / S01BMFE-XBPM:P2:y:LowPass64sM
S01BMFE-XBPM:P2:y:StdDevM / S01BMFE-XBPM:P2:y:StdDevM
S01BMFE-XBPM:P2:y:StdDev1sM / S01BMFE-XBPM:P2:y:StdDev1sM
S01BMFE-XBPM:P2:y:StdDev8sM / S01BMFE-XBPM:P2:y:StdDev8sM
S01BMFE-XBPM:P2:y:StdDev64sM / S01BMFE-XBPM:P2:y:StdDev64sM
S01IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S01IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S01IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S01IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S01IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S01IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S01IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S01IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S01IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S01IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S01IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S01IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S01IDFE-XBPM:CM1ds:PositionOffsetX / S01IDFE-XBPM:CM1ds:PositionOffsetX
S01IDFE-XBPM:CM1ds:PositionOffsetY / S01IDFE-XBPM:CM1ds:PositionOffsetY
S01IDFE-XBPM:CM1ds:PositionScaleX / S01IDFE-XBPM:CM1ds:PositionScaleX
S01IDFE-XBPM:CM1ds:PositionScaleY / S01IDFE-XBPM:CM1ds:PositionScaleY
S01IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S01IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S01IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S01IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S01IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S01IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S01IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S01IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S01IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S01IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S01IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S01IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S01IDFE-XBPM:CM2ds:PositionOffsetX / S01IDFE-XBPM:CM2ds:PositionOffsetX
S01IDFE-XBPM:CM2ds:PositionOffsetY / S01IDFE-XBPM:CM2ds:PositionOffsetY
S01IDFE-XBPM:CM2ds:PositionScaleX / S01IDFE-XBPM:CM2ds:PositionScaleX
S01IDFE-XBPM:CM2ds:PositionScaleY / S01IDFE-XBPM:CM2ds:PositionScaleY
S01IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S01IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S01IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S01IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S01IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S01IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S01IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S01IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S01IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S01IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S01IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S01IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S01IDFE-XBPM:CM3ds:PositionOffsetX / S01IDFE-XBPM:CM3ds:PositionOffsetX
S01IDFE-XBPM:CM3ds:PositionOffsetY / S01IDFE-XBPM:CM3ds:PositionOffsetY
S01IDFE-XBPM:CM3ds:PositionScaleX / S01IDFE-XBPM:CM3ds:PositionScaleX
S01IDFE-XBPM:CM3ds:PositionScaleY / S01IDFE-XBPM:CM3ds:PositionScaleY
S01IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S01IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S01IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S01IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S01IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S01IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S01IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S01IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S01IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S01IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S01IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S01IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S01IDFE-XBPM:CM4ds:PositionOffsetX / S01IDFE-XBPM:CM4ds:PositionOffsetX
S01IDFE-XBPM:CM4ds:PositionOffsetY / S01IDFE-XBPM:CM4ds:PositionOffsetY
S01IDFE-XBPM:CM4ds:PositionScaleX / S01IDFE-XBPM:CM4ds:PositionScaleX
S01IDFE-XBPM:CM4ds:PositionScaleY / S01IDFE-XBPM:CM4ds:PositionScaleY
S01IDFE-XBPM:P1ds:BMcUsedM / S01IDFE-XBPM:P1ds:BMcUsedM
S01IDFE-XBPM:P1ds:GapUsedC / S01IDFE-XBPM:P1ds:GapUsedC
S01IDFE-XBPM:P1ds:Wx1UsedM / S01IDFE-XBPM:P1ds:Wx1UsedM
S01IDFE-XBPM:P1ds:Wx2UsedM / S01IDFE-XBPM:P1ds:Wx2UsedM
S01IDFE-XBPM:P1ds:Wx3UsedM / S01IDFE-XBPM:P1ds:Wx3UsedM
S01IDFE-XBPM:P1ds:Wy1UsedM / S01IDFE-XBPM:P1ds:Wy1UsedM
S01IDFE-XBPM:P1ds:Wy2UsedM / S01IDFE-XBPM:P1ds:Wy2UsedM
S01IDFE-XBPM:P1ds:Wy3UsedM / S01IDFE-XBPM:P1ds:Wy3UsedM
S01IDFE-XBPM:P1ds:x / S01IDFE-XBPM:P1ds:x
S01IDFE-XBPM:P1ds:x:CalFactor1M / S01IDFE-XBPM:P1ds:x:CalFactor1M
S01IDFE-XBPM:P1ds:x:CalFactor2M / S01IDFE-XBPM:P1ds:x:CalFactor2M
S01IDFE-XBPM:P1ds:x:LowPass1sM / S01IDFE-XBPM:P1ds:x:LowPass1sM
S01IDFE-XBPM:P1ds:x:LowPass8sM / S01IDFE-XBPM:P1ds:x:LowPass8sM
S01IDFE-XBPM:P1ds:x:LowPass64sM / S01IDFE-XBPM:P1ds:x:LowPass64sM
S01IDFE-XBPM:P1ds:x:Offset1M / S01IDFE-XBPM:P1ds:x:Offset1M
S01IDFE-XBPM:P1ds:x:Offset2M / S01IDFE-XBPM:P1ds:x:Offset2M
S01IDFE-XBPM:P1ds:x:ResolutionM / S01IDFE-XBPM:P1ds:x:ResolutionM
S01IDFE-XBPM:P1ds:x:Resolution1sM / S01IDFE-XBPM:P1ds:x:Resolution1sM
S01IDFE-XBPM:P1ds:x:Resolution8sM / S01IDFE-XBPM:P1ds:x:Resolution8sM
S01IDFE-XBPM:P1ds:x:Resolution64sM / S01IDFE-XBPM:P1ds:x:Resolution64sM
S01IDFE-XBPM:P1ds:x:StdDevM / S01IDFE-XBPM:P1ds:x:StdDevM
S01IDFE-XBPM:P1ds:x:StdDev1sM / S01IDFE-XBPM:P1ds:x:StdDev1sM
S01IDFE-XBPM:P1ds:x:StdDev8sM / S01IDFE-XBPM:P1ds:x:StdDev8sM
S01IDFE-XBPM:P1ds:x:StdDev64sM / S01IDFE-XBPM:P1ds:x:StdDev64sM
S01IDFE-XBPM:P1ds:x1:LowPass1sM / S01IDFE-XBPM:P1ds:x1:LowPass1sM
S01IDFE-XBPM:P1ds:x1:LowPass8sM / S01IDFE-XBPM:P1ds:x1:LowPass8sM
S01IDFE-XBPM:P1ds:x1:LowPass64sM / S01IDFE-XBPM:P1ds:x1:LowPass64sM
S01IDFE-XBPM:P1ds:x2:LowPass1sM / S01IDFE-XBPM:P1ds:x2:LowPass1sM
S01IDFE-XBPM:P1ds:x2:LowPass8sM / S01IDFE-XBPM:P1ds:x2:LowPass8sM
S01IDFE-XBPM:P1ds:x2:LowPass64sM / S01IDFE-XBPM:P1ds:x2:LowPass64sM
S01IDFE-XBPM:P1ds:y / S01IDFE-XBPM:P1ds:y
S01IDFE-XBPM:P1ds:y:CalFactor1M / S01IDFE-XBPM:P1ds:y:CalFactor1M
S01IDFE-XBPM:P1ds:y:CalFactor2M / S01IDFE-XBPM:P1ds:y:CalFactor2M
S01IDFE-XBPM:P1ds:y:LowPass1sM / S01IDFE-XBPM:P1ds:y:LowPass1sM
S01IDFE-XBPM:P1ds:y:LowPass8sM / S01IDFE-XBPM:P1ds:y:LowPass8sM
S01IDFE-XBPM:P1ds:y:LowPass64sM / S01IDFE-XBPM:P1ds:y:LowPass64sM
S01IDFE-XBPM:P1ds:y:Offset1M / S01IDFE-XBPM:P1ds:y:Offset1M
S01IDFE-XBPM:P1ds:y:Offset2M / S01IDFE-XBPM:P1ds:y:Offset2M
S01IDFE-XBPM:P1ds:y:ResolutionM / S01IDFE-XBPM:P1ds:y:ResolutionM
S01IDFE-XBPM:P1ds:y:Resolution1sM / S01IDFE-XBPM:P1ds:y:Resolution1sM
S01IDFE-XBPM:P1ds:y:Resolution8sM / S01IDFE-XBPM:P1ds:y:Resolution8sM
S01IDFE-XBPM:P1ds:y:Resolution64sM / S01IDFE-XBPM:P1ds:y:Resolution64sM
S01IDFE-XBPM:P1ds:y:StdDevM / S01IDFE-XBPM:P1ds:y:StdDevM
S01IDFE-XBPM:P1ds:y:StdDev1sM / S01IDFE-XBPM:P1ds:y:StdDev1sM
S01IDFE-XBPM:P1ds:y:StdDev8sM / S01IDFE-XBPM:P1ds:y:StdDev8sM
S01IDFE-XBPM:P1ds:y:StdDev64sM / S01IDFE-XBPM:P1ds:y:StdDev64sM
S01IDFE-XBPM:P1ds:y1:LowPass1sM / S01IDFE-XBPM:P1ds:y1:LowPass1sM
S01IDFE-XBPM:P1ds:y1:LowPass8sM / S01IDFE-XBPM:P1ds:y1:LowPass8sM
S01IDFE-XBPM:P1ds:y1:LowPass64sM / S01IDFE-XBPM:P1ds:y1:LowPass64sM
S01IDFE-XBPM:P1ds:y2:LowPass1sM / S01IDFE-XBPM:P1ds:y2:LowPass1sM
S01IDFE-XBPM:P1ds:y2:LowPass8sM / S01IDFE-XBPM:P1ds:y2:LowPass8sM
S01IDFE-XBPM:P1ds:y2:LowPass64sM / S01IDFE-XBPM:P1ds:y2:LowPass64sM
S01IDFE-XBPM:P2ds:GapUsedC / S01IDFE-XBPM:P2ds:GapUsedC
S01IDFE-XBPM:P2ds:XCalM / S01IDFE-XBPM:P2ds:XCalM
S01IDFE-XBPM:P2ds:YCalM / S01IDFE-XBPM:P2ds:YCalM
S01IDFE-XBPM:P2ds:x:CalFactorM / S01IDFE-XBPM:P2ds:x:CalFactorM
S01IDFE-XBPM:P2ds:x:OffsetM / S01IDFE-XBPM:P2ds:x:OffsetM
S01IDFE-XBPM:P2ds:y:CalFactorM / S01IDFE-XBPM:P2ds:y:CalFactorM
S01IDFE-XBPM:P2ds:y:OffsetM / S01IDFE-XBPM:P2ds:y:OffsetM
S02BMFE-XBPM:P1:AM / S02BMFE-XBPM:P1:AM
S02BMFE-XBPM:P1:BM / S02BMFE-XBPM:P1:BM
S02BMFE-XBPM:P1:y / S02BMFE-XBPM:P1:y
S02BMFE-XBPM:P1:y:LowPass1sM / S02BMFE-XBPM:P1:y:LowPass1sM
S02BMFE-XBPM:P1:y:LowPass8sM / S02BMFE-XBPM:P1:y:LowPass8sM
S02BMFE-XBPM:P1:y:LowPass64sM / S02BMFE-XBPM:P1:y:LowPass64sM
S02BMFE-XBPM:P1:y:StdDevM / S02BMFE-XBPM:P1:y:StdDevM
S02BMFE-XBPM:P1:y:StdDev1sM / S02BMFE-XBPM:P1:y:StdDev1sM
S02BMFE-XBPM:P1:y:StdDev8sM / S02BMFE-XBPM:P1:y:StdDev8sM
S02BMFE-XBPM:P1:y:StdDev64sM / S02BMFE-XBPM:P1:y:StdDev64sM
S02BMFE-XBPM:P2:AM / S02BMFE-XBPM:P2:AM
S02BMFE-XBPM:P2:BM / S02BMFE-XBPM:P2:BM
S02BMFE-XBPM:P2:y / S02BMFE-XBPM:P2:y
S02BMFE-XBPM:P2:y:LowPass1sM / S02BMFE-XBPM:P2:y:LowPass1sM
S02BMFE-XBPM:P2:y:LowPass8sM / S02BMFE-XBPM:P2:y:LowPass8sM
S02BMFE-XBPM:P2:y:LowPass64sM / S02BMFE-XBPM:P2:y:LowPass64sM
S02BMFE-XBPM:P2:y:StdDevM / S02BMFE-XBPM:P2:y:StdDevM
S02BMFE-XBPM:P2:y:StdDev1sM / S02BMFE-XBPM:P2:y:StdDev1sM
S02BMFE-XBPM:P2:y:StdDev8sM / S02BMFE-XBPM:P2:y:StdDev8sM
S02BMFE-XBPM:P2:y:StdDev64sM / S02BMFE-XBPM:P2:y:StdDev64sM
S02IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S02IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S02IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S02IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S02IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S02IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S02IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S02IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S02IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S02IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S02IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S02IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S02IDFE-XBPM:CM1ds:PositionOffsetX / S02IDFE-XBPM:CM1ds:PositionOffsetX
S02IDFE-XBPM:CM1ds:PositionOffsetY / S02IDFE-XBPM:CM1ds:PositionOffsetY
S02IDFE-XBPM:CM1ds:PositionScaleX / S02IDFE-XBPM:CM1ds:PositionScaleX
S02IDFE-XBPM:CM1ds:PositionScaleY / S02IDFE-XBPM:CM1ds:PositionScaleY
S02IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S02IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S02IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S02IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S02IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S02IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S02IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S02IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S02IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S02IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S02IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S02IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S02IDFE-XBPM:CM1us:PositionOffsetX / S02IDFE-XBPM:CM1us:PositionOffsetX
S02IDFE-XBPM:CM1us:PositionOffsetY / S02IDFE-XBPM:CM1us:PositionOffsetY
S02IDFE-XBPM:CM1us:PositionScaleX / S02IDFE-XBPM:CM1us:PositionScaleX
S02IDFE-XBPM:CM1us:PositionScaleY / S02IDFE-XBPM:CM1us:PositionScaleY
S02IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S02IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S02IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S02IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S02IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S02IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S02IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S02IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S02IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S02IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S02IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S02IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S02IDFE-XBPM:CM2ds:PositionOffsetX / S02IDFE-XBPM:CM2ds:PositionOffsetX
S02IDFE-XBPM:CM2ds:PositionOffsetY / S02IDFE-XBPM:CM2ds:PositionOffsetY
S02IDFE-XBPM:CM2ds:PositionScaleX / S02IDFE-XBPM:CM2ds:PositionScaleX
S02IDFE-XBPM:CM2ds:PositionScaleY / S02IDFE-XBPM:CM2ds:PositionScaleY
S02IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S02IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S02IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S02IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S02IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S02IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S02IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S02IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S02IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S02IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S02IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S02IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S02IDFE-XBPM:CM2us:PositionOffsetX / S02IDFE-XBPM:CM2us:PositionOffsetX
S02IDFE-XBPM:CM2us:PositionOffsetY / S02IDFE-XBPM:CM2us:PositionOffsetY
S02IDFE-XBPM:CM2us:PositionScaleX / S02IDFE-XBPM:CM2us:PositionScaleX
S02IDFE-XBPM:CM2us:PositionScaleY / S02IDFE-XBPM:CM2us:PositionScaleY
S02IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S02IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S02IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S02IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S02IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S02IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S02IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S02IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S02IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S02IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S02IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S02IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S02IDFE-XBPM:CM3ds:PositionOffsetX / S02IDFE-XBPM:CM3ds:PositionOffsetX
S02IDFE-XBPM:CM3ds:PositionOffsetY / S02IDFE-XBPM:CM3ds:PositionOffsetY
S02IDFE-XBPM:CM3ds:PositionScaleX / S02IDFE-XBPM:CM3ds:PositionScaleX
S02IDFE-XBPM:CM3ds:PositionScaleY / S02IDFE-XBPM:CM3ds:PositionScaleY
S02IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S02IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S02IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S02IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S02IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S02IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S02IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S02IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S02IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S02IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S02IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S02IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S02IDFE-XBPM:CM3us:PositionOffsetX / S02IDFE-XBPM:CM3us:PositionOffsetX
S02IDFE-XBPM:CM3us:PositionOffsetY / S02IDFE-XBPM:CM3us:PositionOffsetY
S02IDFE-XBPM:CM3us:PositionScaleX / S02IDFE-XBPM:CM3us:PositionScaleX
S02IDFE-XBPM:CM3us:PositionScaleY / S02IDFE-XBPM:CM3us:PositionScaleY
S02IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S02IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S02IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S02IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S02IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S02IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S02IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S02IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S02IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S02IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S02IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S02IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S02IDFE-XBPM:CM4ds:PositionOffsetX / S02IDFE-XBPM:CM4ds:PositionOffsetX
S02IDFE-XBPM:CM4ds:PositionOffsetY / S02IDFE-XBPM:CM4ds:PositionOffsetY
S02IDFE-XBPM:CM4ds:PositionScaleX / S02IDFE-XBPM:CM4ds:PositionScaleX
S02IDFE-XBPM:CM4ds:PositionScaleY / S02IDFE-XBPM:CM4ds:PositionScaleY
S02IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S02IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S02IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S02IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S02IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S02IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S02IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S02IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S02IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S02IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S02IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S02IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S02IDFE-XBPM:CM4us:PositionOffsetX / S02IDFE-XBPM:CM4us:PositionOffsetX
S02IDFE-XBPM:CM4us:PositionOffsetY / S02IDFE-XBPM:CM4us:PositionOffsetY
S02IDFE-XBPM:CM4us:PositionScaleX / S02IDFE-XBPM:CM4us:PositionScaleX
S02IDFE-XBPM:CM4us:PositionScaleY / S02IDFE-XBPM:CM4us:PositionScaleY
S02IDFE-XBPM:P1ds:BMcUsedM / S02IDFE-XBPM:P1ds:BMcUsedM
S02IDFE-XBPM:P1ds:GapUsedC / S02IDFE-XBPM:P1ds:GapUsedC
S02IDFE-XBPM:P1ds:Wx1UsedM / S02IDFE-XBPM:P1ds:Wx1UsedM
S02IDFE-XBPM:P1ds:Wx2UsedM / S02IDFE-XBPM:P1ds:Wx2UsedM
S02IDFE-XBPM:P1ds:Wx3UsedM / S02IDFE-XBPM:P1ds:Wx3UsedM
S02IDFE-XBPM:P1ds:Wy1UsedM / S02IDFE-XBPM:P1ds:Wy1UsedM
S02IDFE-XBPM:P1ds:Wy2UsedM / S02IDFE-XBPM:P1ds:Wy2UsedM
S02IDFE-XBPM:P1ds:Wy3UsedM / S02IDFE-XBPM:P1ds:Wy3UsedM
S02IDFE-XBPM:P1ds:x / S02IDFE-XBPM:P1ds:x
S02IDFE-XBPM:P1ds:x:CalFactor1M / S02IDFE-XBPM:P1ds:x:CalFactor1M
S02IDFE-XBPM:P1ds:x:CalFactor2M / S02IDFE-XBPM:P1ds:x:CalFactor2M
S02IDFE-XBPM:P1ds:x:LowPass1sM / S02IDFE-XBPM:P1ds:x:LowPass1sM
S02IDFE-XBPM:P1ds:x:LowPass8sM / S02IDFE-XBPM:P1ds:x:LowPass8sM
S02IDFE-XBPM:P1ds:x:LowPass64sM / S02IDFE-XBPM:P1ds:x:LowPass64sM
S02IDFE-XBPM:P1ds:x:Offset1M / S02IDFE-XBPM:P1ds:x:Offset1M
S02IDFE-XBPM:P1ds:x:Offset2M / S02IDFE-XBPM:P1ds:x:Offset2M
S02IDFE-XBPM:P1ds:x:ResolutionM / S02IDFE-XBPM:P1ds:x:ResolutionM
S02IDFE-XBPM:P1ds:x:Resolution1sM / S02IDFE-XBPM:P1ds:x:Resolution1sM
S02IDFE-XBPM:P1ds:x:Resolution8sM / S02IDFE-XBPM:P1ds:x:Resolution8sM
S02IDFE-XBPM:P1ds:x:Resolution64sM / S02IDFE-XBPM:P1ds:x:Resolution64sM
S02IDFE-XBPM:P1ds:x:StdDevM / S02IDFE-XBPM:P1ds:x:StdDevM
S02IDFE-XBPM:P1ds:x:StdDev1sM / S02IDFE-XBPM:P1ds:x:StdDev1sM
S02IDFE-XBPM:P1ds:x:StdDev8sM / S02IDFE-XBPM:P1ds:x:StdDev8sM
S02IDFE-XBPM:P1ds:x:StdDev64sM / S02IDFE-XBPM:P1ds:x:StdDev64sM
S02IDFE-XBPM:P1ds:x1:LowPass1sM / S02IDFE-XBPM:P1ds:x1:LowPass1sM
S02IDFE-XBPM:P1ds:x1:LowPass8sM / S02IDFE-XBPM:P1ds:x1:LowPass8sM
S02IDFE-XBPM:P1ds:x1:LowPass64sM / S02IDFE-XBPM:P1ds:x1:LowPass64sM
S02IDFE-XBPM:P1ds:x2:LowPass1sM / S02IDFE-XBPM:P1ds:x2:LowPass1sM
S02IDFE-XBPM:P1ds:x2:LowPass8sM / S02IDFE-XBPM:P1ds:x2:LowPass8sM
S02IDFE-XBPM:P1ds:x2:LowPass64sM / S02IDFE-XBPM:P1ds:x2:LowPass64sM
S02IDFE-XBPM:P1ds:y / S02IDFE-XBPM:P1ds:y
S02IDFE-XBPM:P1ds:y:CalFactor1M / S02IDFE-XBPM:P1ds:y:CalFactor1M
S02IDFE-XBPM:P1ds:y:CalFactor2M / S02IDFE-XBPM:P1ds:y:CalFactor2M
S02IDFE-XBPM:P1ds:y:LowPass1sM / S02IDFE-XBPM:P1ds:y:LowPass1sM
S02IDFE-XBPM:P1ds:y:LowPass8sM / S02IDFE-XBPM:P1ds:y:LowPass8sM
S02IDFE-XBPM:P1ds:y:LowPass64sM / S02IDFE-XBPM:P1ds:y:LowPass64sM
S02IDFE-XBPM:P1ds:y:Offset1M / S02IDFE-XBPM:P1ds:y:Offset1M
S02IDFE-XBPM:P1ds:y:Offset2M / S02IDFE-XBPM:P1ds:y:Offset2M
S02IDFE-XBPM:P1ds:y:ResolutionM / S02IDFE-XBPM:P1ds:y:ResolutionM
S02IDFE-XBPM:P1ds:y:Resolution1sM / S02IDFE-XBPM:P1ds:y:Resolution1sM
S02IDFE-XBPM:P1ds:y:Resolution8sM / S02IDFE-XBPM:P1ds:y:Resolution8sM
S02IDFE-XBPM:P1ds:y:Resolution64sM / S02IDFE-XBPM:P1ds:y:Resolution64sM
S02IDFE-XBPM:P1ds:y:StdDevM / S02IDFE-XBPM:P1ds:y:StdDevM
S02IDFE-XBPM:P1ds:y:StdDev1sM / S02IDFE-XBPM:P1ds:y:StdDev1sM
S02IDFE-XBPM:P1ds:y:StdDev8sM / S02IDFE-XBPM:P1ds:y:StdDev8sM
S02IDFE-XBPM:P1ds:y:StdDev64sM / S02IDFE-XBPM:P1ds:y:StdDev64sM
S02IDFE-XBPM:P1ds:y1:LowPass1sM / S02IDFE-XBPM:P1ds:y1:LowPass1sM
S02IDFE-XBPM:P1ds:y1:LowPass8sM / S02IDFE-XBPM:P1ds:y1:LowPass8sM
S02IDFE-XBPM:P1ds:y1:LowPass64sM / S02IDFE-XBPM:P1ds:y1:LowPass64sM
S02IDFE-XBPM:P1ds:y2:LowPass1sM / S02IDFE-XBPM:P1ds:y2:LowPass1sM
S02IDFE-XBPM:P1ds:y2:LowPass8sM / S02IDFE-XBPM:P1ds:y2:LowPass8sM
S02IDFE-XBPM:P1ds:y2:LowPass64sM / S02IDFE-XBPM:P1ds:y2:LowPass64sM
S02IDFE-XBPM:P1us:BMcUsedM / S02IDFE-XBPM:P1us:BMcUsedM
S02IDFE-XBPM:P1us:GapUsedC / S02IDFE-XBPM:P1us:GapUsedC
S02IDFE-XBPM:P1us:Wx1UsedM / S02IDFE-XBPM:P1us:Wx1UsedM
S02IDFE-XBPM:P1us:Wx2UsedM / S02IDFE-XBPM:P1us:Wx2UsedM
S02IDFE-XBPM:P1us:Wx3UsedM / S02IDFE-XBPM:P1us:Wx3UsedM
S02IDFE-XBPM:P1us:Wy1UsedM / S02IDFE-XBPM:P1us:Wy1UsedM
S02IDFE-XBPM:P1us:Wy2UsedM / S02IDFE-XBPM:P1us:Wy2UsedM
S02IDFE-XBPM:P1us:Wy3UsedM / S02IDFE-XBPM:P1us:Wy3UsedM
S02IDFE-XBPM:P1us:x / S02IDFE-XBPM:P1us:x
S02IDFE-XBPM:P1us:x:CalFactor1M / S02IDFE-XBPM:P1us:x:CalFactor1M
S02IDFE-XBPM:P1us:x:CalFactor2M / S02IDFE-XBPM:P1us:x:CalFactor2M
S02IDFE-XBPM:P1us:x:LowPass1sM / S02IDFE-XBPM:P1us:x:LowPass1sM
S02IDFE-XBPM:P1us:x:LowPass8sM / S02IDFE-XBPM:P1us:x:LowPass8sM
S02IDFE-XBPM:P1us:x:LowPass64sM / S02IDFE-XBPM:P1us:x:LowPass64sM
S02IDFE-XBPM:P1us:x:Offset1M / S02IDFE-XBPM:P1us:x:Offset1M
S02IDFE-XBPM:P1us:x:Offset2M / S02IDFE-XBPM:P1us:x:Offset2M
S02IDFE-XBPM:P1us:x:ResolutionM / S02IDFE-XBPM:P1us:x:ResolutionM
S02IDFE-XBPM:P1us:x:Resolution1sM / S02IDFE-XBPM:P1us:x:Resolution1sM
S02IDFE-XBPM:P1us:x:Resolution8sM / S02IDFE-XBPM:P1us:x:Resolution8sM
S02IDFE-XBPM:P1us:x:Resolution64sM / S02IDFE-XBPM:P1us:x:Resolution64sM
S02IDFE-XBPM:P1us:x:StdDevM / S02IDFE-XBPM:P1us:x:StdDevM
S02IDFE-XBPM:P1us:x:StdDev1sM / S02IDFE-XBPM:P1us:x:StdDev1sM
S02IDFE-XBPM:P1us:x:StdDev8sM / S02IDFE-XBPM:P1us:x:StdDev8sM
S02IDFE-XBPM:P1us:x:StdDev64sM / S02IDFE-XBPM:P1us:x:StdDev64sM
S02IDFE-XBPM:P1us:x1:LowPass1sM / S02IDFE-XBPM:P1us:x1:LowPass1sM
S02IDFE-XBPM:P1us:x1:LowPass8sM / S02IDFE-XBPM:P1us:x1:LowPass8sM
S02IDFE-XBPM:P1us:x1:LowPass64sM / S02IDFE-XBPM:P1us:x1:LowPass64sM
S02IDFE-XBPM:P1us:x2:LowPass1sM / S02IDFE-XBPM:P1us:x2:LowPass1sM
S02IDFE-XBPM:P1us:x2:LowPass8sM / S02IDFE-XBPM:P1us:x2:LowPass8sM
S02IDFE-XBPM:P1us:x2:LowPass64sM / S02IDFE-XBPM:P1us:x2:LowPass64sM
S02IDFE-XBPM:P1us:y / S02IDFE-XBPM:P1us:y
S02IDFE-XBPM:P1us:y:CalFactor1M / S02IDFE-XBPM:P1us:y:CalFactor1M
S02IDFE-XBPM:P1us:y:CalFactor2M / S02IDFE-XBPM:P1us:y:CalFactor2M
S02IDFE-XBPM:P1us:y:LowPass1sM / S02IDFE-XBPM:P1us:y:LowPass1sM
S02IDFE-XBPM:P1us:y:LowPass8sM / S02IDFE-XBPM:P1us:y:LowPass8sM
S02IDFE-XBPM:P1us:y:LowPass64sM / S02IDFE-XBPM:P1us:y:LowPass64sM
S02IDFE-XBPM:P1us:y:Offset1M / S02IDFE-XBPM:P1us:y:Offset1M
S02IDFE-XBPM:P1us:y:Offset2M / S02IDFE-XBPM:P1us:y:Offset2M
S02IDFE-XBPM:P1us:y:ResolutionM / S02IDFE-XBPM:P1us:y:ResolutionM
S02IDFE-XBPM:P1us:y:Resolution1sM / S02IDFE-XBPM:P1us:y:Resolution1sM
S02IDFE-XBPM:P1us:y:Resolution8sM / S02IDFE-XBPM:P1us:y:Resolution8sM
S02IDFE-XBPM:P1us:y:Resolution64sM / S02IDFE-XBPM:P1us:y:Resolution64sM
S02IDFE-XBPM:P1us:y:StdDevM / S02IDFE-XBPM:P1us:y:StdDevM
S02IDFE-XBPM:P1us:y:StdDev1sM / S02IDFE-XBPM:P1us:y:StdDev1sM
S02IDFE-XBPM:P1us:y:StdDev8sM / S02IDFE-XBPM:P1us:y:StdDev8sM
S02IDFE-XBPM:P1us:y:StdDev64sM / S02IDFE-XBPM:P1us:y:StdDev64sM
S02IDFE-XBPM:P1us:y1:LowPass1sM / S02IDFE-XBPM:P1us:y1:LowPass1sM
S02IDFE-XBPM:P1us:y1:LowPass8sM / S02IDFE-XBPM:P1us:y1:LowPass8sM
S02IDFE-XBPM:P1us:y1:LowPass64sM / S02IDFE-XBPM:P1us:y1:LowPass64sM
S02IDFE-XBPM:P1us:y2:LowPass1sM / S02IDFE-XBPM:P1us:y2:LowPass1sM
S02IDFE-XBPM:P1us:y2:LowPass8sM / S02IDFE-XBPM:P1us:y2:LowPass8sM
S02IDFE-XBPM:P1us:y2:LowPass64sM / S02IDFE-XBPM:P1us:y2:LowPass64sM
S02IDFE-XBPM:P2ds:GapUsedC / S02IDFE-XBPM:P2ds:GapUsedC
S02IDFE-XBPM:P2ds:XCalM / S02IDFE-XBPM:P2ds:XCalM
S02IDFE-XBPM:P2ds:YCalM / S02IDFE-XBPM:P2ds:YCalM
S02IDFE-XBPM:P2ds:x:CalFactorM / S02IDFE-XBPM:P2ds:x:CalFactorM
S02IDFE-XBPM:P2ds:x:OffsetM / S02IDFE-XBPM:P2ds:x:OffsetM
S02IDFE-XBPM:P2ds:y:CalFactorM / S02IDFE-XBPM:P2ds:y:CalFactorM
S02IDFE-XBPM:P2ds:y:OffsetM / S02IDFE-XBPM:P2ds:y:OffsetM
S02IDFE-XBPM:P2us:GapUsedC / S02IDFE-XBPM:P2us:GapUsedC
S02IDFE-XBPM:P2us:XCalM / S02IDFE-XBPM:P2us:XCalM
S02IDFE-XBPM:P2us:YCalM / S02IDFE-XBPM:P2us:YCalM
S02IDFE-XBPM:P2us:x:CalFactorM / S02IDFE-XBPM:P2us:x:CalFactorM
S02IDFE-XBPM:P2us:x:OffsetM / S02IDFE-XBPM:P2us:x:OffsetM
S02IDFE-XBPM:P2us:y:CalFactorM / S02IDFE-XBPM:P2us:y:CalFactorM
S02IDFE-XBPM:P2us:y:OffsetM / S02IDFE-XBPM:P2us:y:OffsetM
S03IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S03IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S03IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S03IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S03IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S03IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S03IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S03IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S03IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S03IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S03IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S03IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S03IDFE-XBPM:CM1ds:PositionOffsetX / S03IDFE-XBPM:CM1ds:PositionOffsetX
S03IDFE-XBPM:CM1ds:PositionOffsetY / S03IDFE-XBPM:CM1ds:PositionOffsetY
S03IDFE-XBPM:CM1ds:PositionScaleX / S03IDFE-XBPM:CM1ds:PositionScaleX
S03IDFE-XBPM:CM1ds:PositionScaleY / S03IDFE-XBPM:CM1ds:PositionScaleY
S03IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S03IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S03IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S03IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S03IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S03IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S03IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S03IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S03IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S03IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S03IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S03IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S03IDFE-XBPM:CM2ds:PositionOffsetX / S03IDFE-XBPM:CM2ds:PositionOffsetX
S03IDFE-XBPM:CM2ds:PositionOffsetY / S03IDFE-XBPM:CM2ds:PositionOffsetY
S03IDFE-XBPM:CM2ds:PositionScaleX / S03IDFE-XBPM:CM2ds:PositionScaleX
S03IDFE-XBPM:CM2ds:PositionScaleY / S03IDFE-XBPM:CM2ds:PositionScaleY
S03IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S03IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S03IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S03IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S03IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S03IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S03IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S03IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S03IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S03IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S03IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S03IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S03IDFE-XBPM:CM3ds:PositionOffsetX / S03IDFE-XBPM:CM3ds:PositionOffsetX
S03IDFE-XBPM:CM3ds:PositionOffsetY / S03IDFE-XBPM:CM3ds:PositionOffsetY
S03IDFE-XBPM:CM3ds:PositionScaleX / S03IDFE-XBPM:CM3ds:PositionScaleX
S03IDFE-XBPM:CM3ds:PositionScaleY / S03IDFE-XBPM:CM3ds:PositionScaleY
S03IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S03IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S03IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S03IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S03IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S03IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S03IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S03IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S03IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S03IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S03IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S03IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S03IDFE-XBPM:CM4ds:PositionOffsetX / S03IDFE-XBPM:CM4ds:PositionOffsetX
S03IDFE-XBPM:CM4ds:PositionOffsetY / S03IDFE-XBPM:CM4ds:PositionOffsetY
S03IDFE-XBPM:CM4ds:PositionScaleX / S03IDFE-XBPM:CM4ds:PositionScaleX
S03IDFE-XBPM:CM4ds:PositionScaleY / S03IDFE-XBPM:CM4ds:PositionScaleY
S03IDFE-XBPM:P1ds:BMcUsedM / S03IDFE-XBPM:P1ds:BMcUsedM
S03IDFE-XBPM:P1ds:GapUsedC / S03IDFE-XBPM:P1ds:GapUsedC
S03IDFE-XBPM:P1ds:Wx1UsedM / S03IDFE-XBPM:P1ds:Wx1UsedM
S03IDFE-XBPM:P1ds:Wx2UsedM / S03IDFE-XBPM:P1ds:Wx2UsedM
S03IDFE-XBPM:P1ds:Wx3UsedM / S03IDFE-XBPM:P1ds:Wx3UsedM
S03IDFE-XBPM:P1ds:Wy1UsedM / S03IDFE-XBPM:P1ds:Wy1UsedM
S03IDFE-XBPM:P1ds:Wy2UsedM / S03IDFE-XBPM:P1ds:Wy2UsedM
S03IDFE-XBPM:P1ds:Wy3UsedM / S03IDFE-XBPM:P1ds:Wy3UsedM
S03IDFE-XBPM:P1ds:x / S03IDFE-XBPM:P1ds:x
S03IDFE-XBPM:P1ds:x:CalFactor1M / S03IDFE-XBPM:P1ds:x:CalFactor1M
S03IDFE-XBPM:P1ds:x:CalFactor2M / S03IDFE-XBPM:P1ds:x:CalFactor2M
S03IDFE-XBPM:P1ds:x:LowPass1sM / S03IDFE-XBPM:P1ds:x:LowPass1sM
S03IDFE-XBPM:P1ds:x:LowPass8sM / S03IDFE-XBPM:P1ds:x:LowPass8sM
S03IDFE-XBPM:P1ds:x:LowPass64sM / S03IDFE-XBPM:P1ds:x:LowPass64sM
S03IDFE-XBPM:P1ds:x:Offset1M / S03IDFE-XBPM:P1ds:x:Offset1M
S03IDFE-XBPM:P1ds:x:Offset2M / S03IDFE-XBPM:P1ds:x:Offset2M
S03IDFE-XBPM:P1ds:x:ResolutionM / S03IDFE-XBPM:P1ds:x:ResolutionM
S03IDFE-XBPM:P1ds:x:Resolution1sM / S03IDFE-XBPM:P1ds:x:Resolution1sM
S03IDFE-XBPM:P1ds:x:Resolution8sM / S03IDFE-XBPM:P1ds:x:Resolution8sM
S03IDFE-XBPM:P1ds:x:Resolution64sM / S03IDFE-XBPM:P1ds:x:Resolution64sM
S03IDFE-XBPM:P1ds:x:StdDevM / S03IDFE-XBPM:P1ds:x:StdDevM
S03IDFE-XBPM:P1ds:x:StdDev1sM / S03IDFE-XBPM:P1ds:x:StdDev1sM
S03IDFE-XBPM:P1ds:x:StdDev8sM / S03IDFE-XBPM:P1ds:x:StdDev8sM
S03IDFE-XBPM:P1ds:x:StdDev64sM / S03IDFE-XBPM:P1ds:x:StdDev64sM
S03IDFE-XBPM:P1ds:x1:LowPass1sM / S03IDFE-XBPM:P1ds:x1:LowPass1sM
S03IDFE-XBPM:P1ds:x1:LowPass8sM / S03IDFE-XBPM:P1ds:x1:LowPass8sM
S03IDFE-XBPM:P1ds:x1:LowPass64sM / S03IDFE-XBPM:P1ds:x1:LowPass64sM
S03IDFE-XBPM:P1ds:x2:LowPass1sM / S03IDFE-XBPM:P1ds:x2:LowPass1sM
S03IDFE-XBPM:P1ds:x2:LowPass8sM / S03IDFE-XBPM:P1ds:x2:LowPass8sM
S03IDFE-XBPM:P1ds:x2:LowPass64sM / S03IDFE-XBPM:P1ds:x2:LowPass64sM
S03IDFE-XBPM:P1ds:y / S03IDFE-XBPM:P1ds:y
S03IDFE-XBPM:P1ds:y:CalFactor1M / S03IDFE-XBPM:P1ds:y:CalFactor1M
S03IDFE-XBPM:P1ds:y:CalFactor2M / S03IDFE-XBPM:P1ds:y:CalFactor2M
S03IDFE-XBPM:P1ds:y:LowPass1sM / S03IDFE-XBPM:P1ds:y:LowPass1sM
S03IDFE-XBPM:P1ds:y:LowPass8sM / S03IDFE-XBPM:P1ds:y:LowPass8sM
S03IDFE-XBPM:P1ds:y:LowPass64sM / S03IDFE-XBPM:P1ds:y:LowPass64sM
S03IDFE-XBPM:P1ds:y:Offset1M / S03IDFE-XBPM:P1ds:y:Offset1M
S03IDFE-XBPM:P1ds:y:Offset2M / S03IDFE-XBPM:P1ds:y:Offset2M
S03IDFE-XBPM:P1ds:y:ResolutionM / S03IDFE-XBPM:P1ds:y:ResolutionM
S03IDFE-XBPM:P1ds:y:Resolution1sM / S03IDFE-XBPM:P1ds:y:Resolution1sM
S03IDFE-XBPM:P1ds:y:Resolution8sM / S03IDFE-XBPM:P1ds:y:Resolution8sM
S03IDFE-XBPM:P1ds:y:Resolution64sM / S03IDFE-XBPM:P1ds:y:Resolution64sM
S03IDFE-XBPM:P1ds:y:StdDevM / S03IDFE-XBPM:P1ds:y:StdDevM
S03IDFE-XBPM:P1ds:y:StdDev1sM / S03IDFE-XBPM:P1ds:y:StdDev1sM
S03IDFE-XBPM:P1ds:y:StdDev8sM / S03IDFE-XBPM:P1ds:y:StdDev8sM
S03IDFE-XBPM:P1ds:y:StdDev64sM / S03IDFE-XBPM:P1ds:y:StdDev64sM
S03IDFE-XBPM:P1ds:y1:LowPass1sM / S03IDFE-XBPM:P1ds:y1:LowPass1sM
S03IDFE-XBPM:P1ds:y1:LowPass8sM / S03IDFE-XBPM:P1ds:y1:LowPass8sM
S03IDFE-XBPM:P1ds:y1:LowPass64sM / S03IDFE-XBPM:P1ds:y1:LowPass64sM
S03IDFE-XBPM:P1ds:y2:LowPass1sM / S03IDFE-XBPM:P1ds:y2:LowPass1sM
S03IDFE-XBPM:P1ds:y2:LowPass8sM / S03IDFE-XBPM:P1ds:y2:LowPass8sM
S03IDFE-XBPM:P1ds:y2:LowPass64sM / S03IDFE-XBPM:P1ds:y2:LowPass64sM
S03IDFE-XBPM:P2ds:GapUsedC / S03IDFE-XBPM:P2ds:GapUsedC
S03IDFE-XBPM:P2ds:XCalM / S03IDFE-XBPM:P2ds:XCalM
S03IDFE-XBPM:P2ds:YCalM / S03IDFE-XBPM:P2ds:YCalM
S03IDFE-XBPM:P2ds:x:CalFactorM / S03IDFE-XBPM:P2ds:x:CalFactorM
S03IDFE-XBPM:P2ds:x:OffsetM / S03IDFE-XBPM:P2ds:x:OffsetM
S03IDFE-XBPM:P2ds:y:CalFactorM / S03IDFE-XBPM:P2ds:y:CalFactorM
S03IDFE-XBPM:P2ds:y:OffsetM / S03IDFE-XBPM:P2ds:y:OffsetM
S04IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S04IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S04IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S04IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S04IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S04IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S04IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S04IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S04IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S04IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S04IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S04IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S04IDFE-XBPM:CM1ds:PositionOffsetX / S04IDFE-XBPM:CM1ds:PositionOffsetX
S04IDFE-XBPM:CM1ds:PositionOffsetY / S04IDFE-XBPM:CM1ds:PositionOffsetY
S04IDFE-XBPM:CM1ds:PositionScaleX / S04IDFE-XBPM:CM1ds:PositionScaleX
S04IDFE-XBPM:CM1ds:PositionScaleY / S04IDFE-XBPM:CM1ds:PositionScaleY
S04IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S04IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S04IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S04IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S04IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S04IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S04IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S04IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S04IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S04IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S04IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S04IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S04IDFE-XBPM:CM2ds:PositionOffsetX / S04IDFE-XBPM:CM2ds:PositionOffsetX
S04IDFE-XBPM:CM2ds:PositionOffsetY / S04IDFE-XBPM:CM2ds:PositionOffsetY
S04IDFE-XBPM:CM2ds:PositionScaleX / S04IDFE-XBPM:CM2ds:PositionScaleX
S04IDFE-XBPM:CM2ds:PositionScaleY / S04IDFE-XBPM:CM2ds:PositionScaleY
S04IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S04IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S04IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S04IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S04IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S04IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S04IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S04IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S04IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S04IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S04IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S04IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S04IDFE-XBPM:CM3ds:PositionOffsetX / S04IDFE-XBPM:CM3ds:PositionOffsetX
S04IDFE-XBPM:CM3ds:PositionOffsetY / S04IDFE-XBPM:CM3ds:PositionOffsetY
S04IDFE-XBPM:CM3ds:PositionScaleX / S04IDFE-XBPM:CM3ds:PositionScaleX
S04IDFE-XBPM:CM3ds:PositionScaleY / S04IDFE-XBPM:CM3ds:PositionScaleY
S04IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S04IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S04IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S04IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S04IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S04IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S04IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S04IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S04IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S04IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S04IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S04IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S04IDFE-XBPM:CM4ds:PositionOffsetX / S04IDFE-XBPM:CM4ds:PositionOffsetX
S04IDFE-XBPM:CM4ds:PositionOffsetY / S04IDFE-XBPM:CM4ds:PositionOffsetY
S04IDFE-XBPM:CM4ds:PositionScaleX / S04IDFE-XBPM:CM4ds:PositionScaleX
S04IDFE-XBPM:CM4ds:PositionScaleY / S04IDFE-XBPM:CM4ds:PositionScaleY
S04IDFE-XBPM:P1ds:BMcUsedM / S04IDFE-XBPM:P1ds:BMcUsedM
S04IDFE-XBPM:P1ds:GapUsedC / S04IDFE-XBPM:P1ds:GapUsedC
S04IDFE-XBPM:P1ds:Wx1UsedM / S04IDFE-XBPM:P1ds:Wx1UsedM
S04IDFE-XBPM:P1ds:Wx2UsedM / S04IDFE-XBPM:P1ds:Wx2UsedM
S04IDFE-XBPM:P1ds:Wx3UsedM / S04IDFE-XBPM:P1ds:Wx3UsedM
S04IDFE-XBPM:P1ds:Wy1UsedM / S04IDFE-XBPM:P1ds:Wy1UsedM
S04IDFE-XBPM:P1ds:Wy2UsedM / S04IDFE-XBPM:P1ds:Wy2UsedM
S04IDFE-XBPM:P1ds:Wy3UsedM / S04IDFE-XBPM:P1ds:Wy3UsedM
S04IDFE-XBPM:P1ds:x / S04IDFE-XBPM:P1ds:x
S04IDFE-XBPM:P1ds:x:CalFactor1M / S04IDFE-XBPM:P1ds:x:CalFactor1M
S04IDFE-XBPM:P1ds:x:CalFactor2M / S04IDFE-XBPM:P1ds:x:CalFactor2M
S04IDFE-XBPM:P1ds:x:LowPass1sM / S04IDFE-XBPM:P1ds:x:LowPass1sM
S04IDFE-XBPM:P1ds:x:LowPass8sM / S04IDFE-XBPM:P1ds:x:LowPass8sM
S04IDFE-XBPM:P1ds:x:LowPass64sM / S04IDFE-XBPM:P1ds:x:LowPass64sM
S04IDFE-XBPM:P1ds:x:Offset1M / S04IDFE-XBPM:P1ds:x:Offset1M
S04IDFE-XBPM:P1ds:x:Offset2M / S04IDFE-XBPM:P1ds:x:Offset2M
S04IDFE-XBPM:P1ds:x:ResolutionM / S04IDFE-XBPM:P1ds:x:ResolutionM
S04IDFE-XBPM:P1ds:x:Resolution1sM / S04IDFE-XBPM:P1ds:x:Resolution1sM
S04IDFE-XBPM:P1ds:x:Resolution8sM / S04IDFE-XBPM:P1ds:x:Resolution8sM
S04IDFE-XBPM:P1ds:x:Resolution64sM / S04IDFE-XBPM:P1ds:x:Resolution64sM
S04IDFE-XBPM:P1ds:x:StdDevM / S04IDFE-XBPM:P1ds:x:StdDevM
S04IDFE-XBPM:P1ds:x:StdDev1sM / S04IDFE-XBPM:P1ds:x:StdDev1sM
S04IDFE-XBPM:P1ds:x:StdDev8sM / S04IDFE-XBPM:P1ds:x:StdDev8sM
S04IDFE-XBPM:P1ds:x:StdDev64sM / S04IDFE-XBPM:P1ds:x:StdDev64sM
S04IDFE-XBPM:P1ds:x1:LowPass1sM / S04IDFE-XBPM:P1ds:x1:LowPass1sM
S04IDFE-XBPM:P1ds:x1:LowPass8sM / S04IDFE-XBPM:P1ds:x1:LowPass8sM
S04IDFE-XBPM:P1ds:x1:LowPass64sM / S04IDFE-XBPM:P1ds:x1:LowPass64sM
S04IDFE-XBPM:P1ds:x2:LowPass1sM / S04IDFE-XBPM:P1ds:x2:LowPass1sM
S04IDFE-XBPM:P1ds:x2:LowPass8sM / S04IDFE-XBPM:P1ds:x2:LowPass8sM
S04IDFE-XBPM:P1ds:x2:LowPass64sM / S04IDFE-XBPM:P1ds:x2:LowPass64sM
S04IDFE-XBPM:P1ds:y / S04IDFE-XBPM:P1ds:y
S04IDFE-XBPM:P1ds:y:CalFactor1M / S04IDFE-XBPM:P1ds:y:CalFactor1M
S04IDFE-XBPM:P1ds:y:CalFactor2M / S04IDFE-XBPM:P1ds:y:CalFactor2M
S04IDFE-XBPM:P1ds:y:LowPass1sM / S04IDFE-XBPM:P1ds:y:LowPass1sM
S04IDFE-XBPM:P1ds:y:LowPass8sM / S04IDFE-XBPM:P1ds:y:LowPass8sM
S04IDFE-XBPM:P1ds:y:LowPass64sM / S04IDFE-XBPM:P1ds:y:LowPass64sM
S04IDFE-XBPM:P1ds:y:Offset1M / S04IDFE-XBPM:P1ds:y:Offset1M
S04IDFE-XBPM:P1ds:y:Offset2M / S04IDFE-XBPM:P1ds:y:Offset2M
S04IDFE-XBPM:P1ds:y:ResolutionM / S04IDFE-XBPM:P1ds:y:ResolutionM
S04IDFE-XBPM:P1ds:y:Resolution1sM / S04IDFE-XBPM:P1ds:y:Resolution1sM
S04IDFE-XBPM:P1ds:y:Resolution8sM / S04IDFE-XBPM:P1ds:y:Resolution8sM
S04IDFE-XBPM:P1ds:y:Resolution64sM / S04IDFE-XBPM:P1ds:y:Resolution64sM
S04IDFE-XBPM:P1ds:y:StdDevM / S04IDFE-XBPM:P1ds:y:StdDevM
S04IDFE-XBPM:P1ds:y:StdDev1sM / S04IDFE-XBPM:P1ds:y:StdDev1sM
S04IDFE-XBPM:P1ds:y:StdDev8sM / S04IDFE-XBPM:P1ds:y:StdDev8sM
S04IDFE-XBPM:P1ds:y:StdDev64sM / S04IDFE-XBPM:P1ds:y:StdDev64sM
S04IDFE-XBPM:P1ds:y1:LowPass1sM / S04IDFE-XBPM:P1ds:y1:LowPass1sM
S04IDFE-XBPM:P1ds:y1:LowPass8sM / S04IDFE-XBPM:P1ds:y1:LowPass8sM
S04IDFE-XBPM:P1ds:y1:LowPass64sM / S04IDFE-XBPM:P1ds:y1:LowPass64sM
S04IDFE-XBPM:P1ds:y2:LowPass1sM / S04IDFE-XBPM:P1ds:y2:LowPass1sM
S04IDFE-XBPM:P1ds:y2:LowPass8sM / S04IDFE-XBPM:P1ds:y2:LowPass8sM
S04IDFE-XBPM:P1ds:y2:LowPass64sM / S04IDFE-XBPM:P1ds:y2:LowPass64sM
S04IDFE-XBPM:P2ds:GapUsedC / S04IDFE-XBPM:P2ds:GapUsedC
S04IDFE-XBPM:P2ds:XCalM / S04IDFE-XBPM:P2ds:XCalM
S04IDFE-XBPM:P2ds:YCalM / S04IDFE-XBPM:P2ds:YCalM
S04IDFE-XBPM:P2ds:x:CalFactorM / S04IDFE-XBPM:P2ds:x:CalFactorM
S04IDFE-XBPM:P2ds:x:OffsetM / S04IDFE-XBPM:P2ds:x:OffsetM
S04IDFE-XBPM:P2ds:y:CalFactorM / S04IDFE-XBPM:P2ds:y:CalFactorM
S04IDFE-XBPM:P2ds:y:OffsetM / S04IDFE-XBPM:P2ds:y:OffsetM
S05BMFE-XBPM:P1:AM / S05BMFE-XBPM:P1:AM
S05BMFE-XBPM:P1:BM / S05BMFE-XBPM:P1:BM
S05BMFE-XBPM:P1:y / S05BMFE-XBPM:P1:y
S05BMFE-XBPM:P1:y:LowPass1sM / S05BMFE-XBPM:P1:y:LowPass1sM
S05BMFE-XBPM:P1:y:LowPass8sM / S05BMFE-XBPM:P1:y:LowPass8sM
S05BMFE-XBPM:P1:y:LowPass64sM / S05BMFE-XBPM:P1:y:LowPass64sM
S05BMFE-XBPM:P1:y:StdDevM / S05BMFE-XBPM:P1:y:StdDevM
S05BMFE-XBPM:P1:y:StdDev1sM / S05BMFE-XBPM:P1:y:StdDev1sM
S05BMFE-XBPM:P1:y:StdDev8sM / S05BMFE-XBPM:P1:y:StdDev8sM
S05BMFE-XBPM:P1:y:StdDev64sM / S05BMFE-XBPM:P1:y:StdDev64sM
S05BMFE-XBPM:P2:AM / S05BMFE-XBPM:P2:AM
S05BMFE-XBPM:P2:BM / S05BMFE-XBPM:P2:BM
S05BMFE-XBPM:P2:y / S05BMFE-XBPM:P2:y
S05BMFE-XBPM:P2:y:LowPass1sM / S05BMFE-XBPM:P2:y:LowPass1sM
S05BMFE-XBPM:P2:y:LowPass8sM / S05BMFE-XBPM:P2:y:LowPass8sM
S05BMFE-XBPM:P2:y:LowPass64sM / S05BMFE-XBPM:P2:y:LowPass64sM
S05BMFE-XBPM:P2:y:StdDevM / S05BMFE-XBPM:P2:y:StdDevM
S05BMFE-XBPM:P2:y:StdDev1sM / S05BMFE-XBPM:P2:y:StdDev1sM
S05BMFE-XBPM:P2:y:StdDev8sM / S05BMFE-XBPM:P2:y:StdDev8sM
S05BMFE-XBPM:P2:y:StdDev64sM / S05BMFE-XBPM:P2:y:StdDev64sM
S05IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S05IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S05IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S05IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S05IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S05IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S05IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S05IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S05IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S05IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S05IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S05IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S05IDFE-XBPM:CM1ds:PositionOffsetX / S05IDFE-XBPM:CM1ds:PositionOffsetX
S05IDFE-XBPM:CM1ds:PositionOffsetY / S05IDFE-XBPM:CM1ds:PositionOffsetY
S05IDFE-XBPM:CM1ds:PositionScaleX / S05IDFE-XBPM:CM1ds:PositionScaleX
S05IDFE-XBPM:CM1ds:PositionScaleY / S05IDFE-XBPM:CM1ds:PositionScaleY
S05IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S05IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S05IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S05IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S05IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S05IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S05IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S05IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S05IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S05IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S05IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S05IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S05IDFE-XBPM:CM2ds:PositionOffsetX / S05IDFE-XBPM:CM2ds:PositionOffsetX
S05IDFE-XBPM:CM2ds:PositionOffsetY / S05IDFE-XBPM:CM2ds:PositionOffsetY
S05IDFE-XBPM:CM2ds:PositionScaleX / S05IDFE-XBPM:CM2ds:PositionScaleX
S05IDFE-XBPM:CM2ds:PositionScaleY / S05IDFE-XBPM:CM2ds:PositionScaleY
S05IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S05IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S05IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S05IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S05IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S05IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S05IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S05IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S05IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S05IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S05IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S05IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S05IDFE-XBPM:CM3ds:PositionOffsetX / S05IDFE-XBPM:CM3ds:PositionOffsetX
S05IDFE-XBPM:CM3ds:PositionOffsetY / S05IDFE-XBPM:CM3ds:PositionOffsetY
S05IDFE-XBPM:CM3ds:PositionScaleX / S05IDFE-XBPM:CM3ds:PositionScaleX
S05IDFE-XBPM:CM3ds:PositionScaleY / S05IDFE-XBPM:CM3ds:PositionScaleY
S05IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S05IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S05IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S05IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S05IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S05IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S05IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S05IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S05IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S05IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S05IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S05IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S05IDFE-XBPM:CM4ds:PositionOffsetX / S05IDFE-XBPM:CM4ds:PositionOffsetX
S05IDFE-XBPM:CM4ds:PositionOffsetY / S05IDFE-XBPM:CM4ds:PositionOffsetY
S05IDFE-XBPM:CM4ds:PositionScaleX / S05IDFE-XBPM:CM4ds:PositionScaleX
S05IDFE-XBPM:CM4ds:PositionScaleY / S05IDFE-XBPM:CM4ds:PositionScaleY
S05IDFE-XBPM:P1ds:BMcUsedM / S05IDFE-XBPM:P1ds:BMcUsedM
S05IDFE-XBPM:P1ds:GapUsedC / S05IDFE-XBPM:P1ds:GapUsedC
S05IDFE-XBPM:P1ds:Wx1UsedM / S05IDFE-XBPM:P1ds:Wx1UsedM
S05IDFE-XBPM:P1ds:Wx2UsedM / S05IDFE-XBPM:P1ds:Wx2UsedM
S05IDFE-XBPM:P1ds:Wx3UsedM / S05IDFE-XBPM:P1ds:Wx3UsedM
S05IDFE-XBPM:P1ds:Wy1UsedM / S05IDFE-XBPM:P1ds:Wy1UsedM
S05IDFE-XBPM:P1ds:Wy2UsedM / S05IDFE-XBPM:P1ds:Wy2UsedM
S05IDFE-XBPM:P1ds:Wy3UsedM / S05IDFE-XBPM:P1ds:Wy3UsedM
S05IDFE-XBPM:P1ds:x / S05IDFE-XBPM:P1ds:x
S05IDFE-XBPM:P1ds:x:CalFactor1M / S05IDFE-XBPM:P1ds:x:CalFactor1M
S05IDFE-XBPM:P1ds:x:CalFactor2M / S05IDFE-XBPM:P1ds:x:CalFactor2M
S05IDFE-XBPM:P1ds:x:LowPass1sM / S05IDFE-XBPM:P1ds:x:LowPass1sM
S05IDFE-XBPM:P1ds:x:LowPass8sM / S05IDFE-XBPM:P1ds:x:LowPass8sM
S05IDFE-XBPM:P1ds:x:LowPass64sM / S05IDFE-XBPM:P1ds:x:LowPass64sM
S05IDFE-XBPM:P1ds:x:Offset1M / S05IDFE-XBPM:P1ds:x:Offset1M
S05IDFE-XBPM:P1ds:x:Offset2M / S05IDFE-XBPM:P1ds:x:Offset2M
S05IDFE-XBPM:P1ds:x:ResolutionM / S05IDFE-XBPM:P1ds:x:ResolutionM
S05IDFE-XBPM:P1ds:x:Resolution1sM / S05IDFE-XBPM:P1ds:x:Resolution1sM
S05IDFE-XBPM:P1ds:x:Resolution8sM / S05IDFE-XBPM:P1ds:x:Resolution8sM
S05IDFE-XBPM:P1ds:x:Resolution64sM / S05IDFE-XBPM:P1ds:x:Resolution64sM
S05IDFE-XBPM:P1ds:x:StdDevM / S05IDFE-XBPM:P1ds:x:StdDevM
S05IDFE-XBPM:P1ds:x:StdDev1sM / S05IDFE-XBPM:P1ds:x:StdDev1sM
S05IDFE-XBPM:P1ds:x:StdDev8sM / S05IDFE-XBPM:P1ds:x:StdDev8sM
S05IDFE-XBPM:P1ds:x:StdDev64sM / S05IDFE-XBPM:P1ds:x:StdDev64sM
S05IDFE-XBPM:P1ds:x1:LowPass1sM / S05IDFE-XBPM:P1ds:x1:LowPass1sM
S05IDFE-XBPM:P1ds:x1:LowPass8sM / S05IDFE-XBPM:P1ds:x1:LowPass8sM
S05IDFE-XBPM:P1ds:x1:LowPass64sM / S05IDFE-XBPM:P1ds:x1:LowPass64sM
S05IDFE-XBPM:P1ds:x2:LowPass1sM / S05IDFE-XBPM:P1ds:x2:LowPass1sM
S05IDFE-XBPM:P1ds:x2:LowPass8sM / S05IDFE-XBPM:P1ds:x2:LowPass8sM
S05IDFE-XBPM:P1ds:x2:LowPass64sM / S05IDFE-XBPM:P1ds:x2:LowPass64sM
S05IDFE-XBPM:P1ds:y / S05IDFE-XBPM:P1ds:y
S05IDFE-XBPM:P1ds:y:CalFactor1M / S05IDFE-XBPM:P1ds:y:CalFactor1M
S05IDFE-XBPM:P1ds:y:CalFactor2M / S05IDFE-XBPM:P1ds:y:CalFactor2M
S05IDFE-XBPM:P1ds:y:LowPass1sM / S05IDFE-XBPM:P1ds:y:LowPass1sM
S05IDFE-XBPM:P1ds:y:LowPass8sM / S05IDFE-XBPM:P1ds:y:LowPass8sM
S05IDFE-XBPM:P1ds:y:LowPass64sM / S05IDFE-XBPM:P1ds:y:LowPass64sM
S05IDFE-XBPM:P1ds:y:Offset1M / S05IDFE-XBPM:P1ds:y:Offset1M
S05IDFE-XBPM:P1ds:y:Offset2M / S05IDFE-XBPM:P1ds:y:Offset2M
S05IDFE-XBPM:P1ds:y:ResolutionM / S05IDFE-XBPM:P1ds:y:ResolutionM
S05IDFE-XBPM:P1ds:y:Resolution1sM / S05IDFE-XBPM:P1ds:y:Resolution1sM
S05IDFE-XBPM:P1ds:y:Resolution8sM / S05IDFE-XBPM:P1ds:y:Resolution8sM
S05IDFE-XBPM:P1ds:y:Resolution64sM / S05IDFE-XBPM:P1ds:y:Resolution64sM
S05IDFE-XBPM:P1ds:y:StdDevM / S05IDFE-XBPM:P1ds:y:StdDevM
S05IDFE-XBPM:P1ds:y:StdDev1sM / S05IDFE-XBPM:P1ds:y:StdDev1sM
S05IDFE-XBPM:P1ds:y:StdDev8sM / S05IDFE-XBPM:P1ds:y:StdDev8sM
S05IDFE-XBPM:P1ds:y:StdDev64sM / S05IDFE-XBPM:P1ds:y:StdDev64sM
S05IDFE-XBPM:P1ds:y1:LowPass1sM / S05IDFE-XBPM:P1ds:y1:LowPass1sM
S05IDFE-XBPM:P1ds:y1:LowPass8sM / S05IDFE-XBPM:P1ds:y1:LowPass8sM
S05IDFE-XBPM:P1ds:y1:LowPass64sM / S05IDFE-XBPM:P1ds:y1:LowPass64sM
S05IDFE-XBPM:P1ds:y2:LowPass1sM / S05IDFE-XBPM:P1ds:y2:LowPass1sM
S05IDFE-XBPM:P1ds:y2:LowPass8sM / S05IDFE-XBPM:P1ds:y2:LowPass8sM
S05IDFE-XBPM:P1ds:y2:LowPass64sM / S05IDFE-XBPM:P1ds:y2:LowPass64sM
S05IDFE-XBPM:P2ds:GapUsedC / S05IDFE-XBPM:P2ds:GapUsedC
S05IDFE-XBPM:P2ds:XCalM / S05IDFE-XBPM:P2ds:XCalM
S05IDFE-XBPM:P2ds:YCalM / S05IDFE-XBPM:P2ds:YCalM
S05IDFE-XBPM:P2ds:x:CalFactorM / S05IDFE-XBPM:P2ds:x:CalFactorM
S05IDFE-XBPM:P2ds:x:OffsetM / S05IDFE-XBPM:P2ds:x:OffsetM
S05IDFE-XBPM:P2ds:y:CalFactorM / S05IDFE-XBPM:P2ds:y:CalFactorM
S05IDFE-XBPM:P2ds:y:OffsetM / S05IDFE-XBPM:P2ds:y:OffsetM
S06BMFE-XBPM:P1:AM / S06BMFE-XBPM:P1:AM
S06BMFE-XBPM:P1:BM / S06BMFE-XBPM:P1:BM
S06BMFE-XBPM:P1:y / S06BMFE-XBPM:P1:y
S06BMFE-XBPM:P1:y:LowPass1sM / S06BMFE-XBPM:P1:y:LowPass1sM
S06BMFE-XBPM:P1:y:LowPass8sM / S06BMFE-XBPM:P1:y:LowPass8sM
S06BMFE-XBPM:P1:y:LowPass64sM / S06BMFE-XBPM:P1:y:LowPass64sM
S06BMFE-XBPM:P1:y:StdDevM / S06BMFE-XBPM:P1:y:StdDevM
S06BMFE-XBPM:P1:y:StdDev1sM / S06BMFE-XBPM:P1:y:StdDev1sM
S06BMFE-XBPM:P1:y:StdDev8sM / S06BMFE-XBPM:P1:y:StdDev8sM
S06BMFE-XBPM:P1:y:StdDev64sM / S06BMFE-XBPM:P1:y:StdDev64sM
S06BMFE-XBPM:P2:AM / S06BMFE-XBPM:P2:AM
S06BMFE-XBPM:P2:BM / S06BMFE-XBPM:P2:BM
S06BMFE-XBPM:P2:y / S06BMFE-XBPM:P2:y
S06BMFE-XBPM:P2:y:LowPass1sM / S06BMFE-XBPM:P2:y:LowPass1sM
S06BMFE-XBPM:P2:y:LowPass8sM / S06BMFE-XBPM:P2:y:LowPass8sM
S06BMFE-XBPM:P2:y:LowPass64sM / S06BMFE-XBPM:P2:y:LowPass64sM
S06BMFE-XBPM:P2:y:StdDevM / S06BMFE-XBPM:P2:y:StdDevM
S06BMFE-XBPM:P2:y:StdDev1sM / S06BMFE-XBPM:P2:y:StdDev1sM
S06BMFE-XBPM:P2:y:StdDev8sM / S06BMFE-XBPM:P2:y:StdDev8sM
S06BMFE-XBPM:P2:y:StdDev64sM / S06BMFE-XBPM:P2:y:StdDev64sM
S06IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S06IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S06IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S06IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S06IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S06IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S06IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S06IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S06IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S06IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S06IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S06IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S06IDFE-XBPM:CM1ds:PositionOffsetX / S06IDFE-XBPM:CM1ds:PositionOffsetX
S06IDFE-XBPM:CM1ds:PositionOffsetY / S06IDFE-XBPM:CM1ds:PositionOffsetY
S06IDFE-XBPM:CM1ds:PositionScaleX / S06IDFE-XBPM:CM1ds:PositionScaleX
S06IDFE-XBPM:CM1ds:PositionScaleY / S06IDFE-XBPM:CM1ds:PositionScaleY
S06IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S06IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S06IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S06IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S06IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S06IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S06IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S06IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S06IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S06IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S06IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S06IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S06IDFE-XBPM:CM1us:PositionOffsetX / S06IDFE-XBPM:CM1us:PositionOffsetX
S06IDFE-XBPM:CM1us:PositionOffsetY / S06IDFE-XBPM:CM1us:PositionOffsetY
S06IDFE-XBPM:CM1us:PositionScaleX / S06IDFE-XBPM:CM1us:PositionScaleX
S06IDFE-XBPM:CM1us:PositionScaleY / S06IDFE-XBPM:CM1us:PositionScaleY
S06IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S06IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S06IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S06IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S06IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S06IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S06IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S06IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S06IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S06IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S06IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S06IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S06IDFE-XBPM:CM2ds:PositionOffsetX / S06IDFE-XBPM:CM2ds:PositionOffsetX
S06IDFE-XBPM:CM2ds:PositionOffsetY / S06IDFE-XBPM:CM2ds:PositionOffsetY
S06IDFE-XBPM:CM2ds:PositionScaleX / S06IDFE-XBPM:CM2ds:PositionScaleX
S06IDFE-XBPM:CM2ds:PositionScaleY / S06IDFE-XBPM:CM2ds:PositionScaleY
S06IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S06IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S06IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S06IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S06IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S06IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S06IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S06IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S06IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S06IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S06IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S06IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S06IDFE-XBPM:CM2us:PositionOffsetX / S06IDFE-XBPM:CM2us:PositionOffsetX
S06IDFE-XBPM:CM2us:PositionOffsetY / S06IDFE-XBPM:CM2us:PositionOffsetY
S06IDFE-XBPM:CM2us:PositionScaleX / S06IDFE-XBPM:CM2us:PositionScaleX
S06IDFE-XBPM:CM2us:PositionScaleY / S06IDFE-XBPM:CM2us:PositionScaleY
S06IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S06IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S06IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S06IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S06IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S06IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S06IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S06IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S06IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S06IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S06IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S06IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S06IDFE-XBPM:CM3ds:PositionOffsetX / S06IDFE-XBPM:CM3ds:PositionOffsetX
S06IDFE-XBPM:CM3ds:PositionOffsetY / S06IDFE-XBPM:CM3ds:PositionOffsetY
S06IDFE-XBPM:CM3ds:PositionScaleX / S06IDFE-XBPM:CM3ds:PositionScaleX
S06IDFE-XBPM:CM3ds:PositionScaleY / S06IDFE-XBPM:CM3ds:PositionScaleY
S06IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S06IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S06IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S06IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S06IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S06IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S06IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S06IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S06IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S06IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S06IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S06IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S06IDFE-XBPM:CM3us:PositionOffsetX / S06IDFE-XBPM:CM3us:PositionOffsetX
S06IDFE-XBPM:CM3us:PositionOffsetY / S06IDFE-XBPM:CM3us:PositionOffsetY
S06IDFE-XBPM:CM3us:PositionScaleX / S06IDFE-XBPM:CM3us:PositionScaleX
S06IDFE-XBPM:CM3us:PositionScaleY / S06IDFE-XBPM:CM3us:PositionScaleY
S06IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S06IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S06IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S06IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S06IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S06IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S06IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S06IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S06IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S06IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S06IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S06IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S06IDFE-XBPM:CM4ds:PositionOffsetX / S06IDFE-XBPM:CM4ds:PositionOffsetX
S06IDFE-XBPM:CM4ds:PositionOffsetY / S06IDFE-XBPM:CM4ds:PositionOffsetY
S06IDFE-XBPM:CM4ds:PositionScaleX / S06IDFE-XBPM:CM4ds:PositionScaleX
S06IDFE-XBPM:CM4ds:PositionScaleY / S06IDFE-XBPM:CM4ds:PositionScaleY
S06IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S06IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S06IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S06IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S06IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S06IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S06IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S06IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S06IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S06IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S06IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S06IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S06IDFE-XBPM:CM4us:PositionOffsetX / S06IDFE-XBPM:CM4us:PositionOffsetX
S06IDFE-XBPM:CM4us:PositionOffsetY / S06IDFE-XBPM:CM4us:PositionOffsetY
S06IDFE-XBPM:CM4us:PositionScaleX / S06IDFE-XBPM:CM4us:PositionScaleX
S06IDFE-XBPM:CM4us:PositionScaleY / S06IDFE-XBPM:CM4us:PositionScaleY
S06IDFE-XBPM:P1ds:BMcUsedM / S06IDFE-XBPM:P1ds:BMcUsedM
S06IDFE-XBPM:P1ds:GapUsedC / S06IDFE-XBPM:P1ds:GapUsedC
S06IDFE-XBPM:P1ds:Wx1UsedM / S06IDFE-XBPM:P1ds:Wx1UsedM
S06IDFE-XBPM:P1ds:Wx2UsedM / S06IDFE-XBPM:P1ds:Wx2UsedM
S06IDFE-XBPM:P1ds:Wx3UsedM / S06IDFE-XBPM:P1ds:Wx3UsedM
S06IDFE-XBPM:P1ds:Wy1UsedM / S06IDFE-XBPM:P1ds:Wy1UsedM
S06IDFE-XBPM:P1ds:Wy2UsedM / S06IDFE-XBPM:P1ds:Wy2UsedM
S06IDFE-XBPM:P1ds:Wy3UsedM / S06IDFE-XBPM:P1ds:Wy3UsedM
S06IDFE-XBPM:P1ds:x / S06IDFE-XBPM:P1ds:x
S06IDFE-XBPM:P1ds:x:CalFactor1M / S06IDFE-XBPM:P1ds:x:CalFactor1M
S06IDFE-XBPM:P1ds:x:CalFactor2M / S06IDFE-XBPM:P1ds:x:CalFactor2M
S06IDFE-XBPM:P1ds:x:LowPass1sM / S06IDFE-XBPM:P1ds:x:LowPass1sM
S06IDFE-XBPM:P1ds:x:LowPass8sM / S06IDFE-XBPM:P1ds:x:LowPass8sM
S06IDFE-XBPM:P1ds:x:LowPass64sM / S06IDFE-XBPM:P1ds:x:LowPass64sM
S06IDFE-XBPM:P1ds:x:Offset1M / S06IDFE-XBPM:P1ds:x:Offset1M
S06IDFE-XBPM:P1ds:x:Offset2M / S06IDFE-XBPM:P1ds:x:Offset2M
S06IDFE-XBPM:P1ds:x:ResolutionM / S06IDFE-XBPM:P1ds:x:ResolutionM
S06IDFE-XBPM:P1ds:x:Resolution1sM / S06IDFE-XBPM:P1ds:x:Resolution1sM
S06IDFE-XBPM:P1ds:x:Resolution8sM / S06IDFE-XBPM:P1ds:x:Resolution8sM
S06IDFE-XBPM:P1ds:x:Resolution64sM / S06IDFE-XBPM:P1ds:x:Resolution64sM
S06IDFE-XBPM:P1ds:x:StdDevM / S06IDFE-XBPM:P1ds:x:StdDevM
S06IDFE-XBPM:P1ds:x:StdDev1sM / S06IDFE-XBPM:P1ds:x:StdDev1sM
S06IDFE-XBPM:P1ds:x:StdDev8sM / S06IDFE-XBPM:P1ds:x:StdDev8sM
S06IDFE-XBPM:P1ds:x:StdDev64sM / S06IDFE-XBPM:P1ds:x:StdDev64sM
S06IDFE-XBPM:P1ds:x1:LowPass1sM / S06IDFE-XBPM:P1ds:x1:LowPass1sM
S06IDFE-XBPM:P1ds:x1:LowPass8sM / S06IDFE-XBPM:P1ds:x1:LowPass8sM
S06IDFE-XBPM:P1ds:x1:LowPass64sM / S06IDFE-XBPM:P1ds:x1:LowPass64sM
S06IDFE-XBPM:P1ds:x2:LowPass1sM / S06IDFE-XBPM:P1ds:x2:LowPass1sM
S06IDFE-XBPM:P1ds:x2:LowPass8sM / S06IDFE-XBPM:P1ds:x2:LowPass8sM
S06IDFE-XBPM:P1ds:x2:LowPass64sM / S06IDFE-XBPM:P1ds:x2:LowPass64sM
S06IDFE-XBPM:P1ds:y / S06IDFE-XBPM:P1ds:y
S06IDFE-XBPM:P1ds:y:CalFactor1M / S06IDFE-XBPM:P1ds:y:CalFactor1M
S06IDFE-XBPM:P1ds:y:CalFactor2M / S06IDFE-XBPM:P1ds:y:CalFactor2M
S06IDFE-XBPM:P1ds:y:LowPass1sM / S06IDFE-XBPM:P1ds:y:LowPass1sM
S06IDFE-XBPM:P1ds:y:LowPass8sM / S06IDFE-XBPM:P1ds:y:LowPass8sM
S06IDFE-XBPM:P1ds:y:LowPass64sM / S06IDFE-XBPM:P1ds:y:LowPass64sM
S06IDFE-XBPM:P1ds:y:Offset1M / S06IDFE-XBPM:P1ds:y:Offset1M
S06IDFE-XBPM:P1ds:y:Offset2M / S06IDFE-XBPM:P1ds:y:Offset2M
S06IDFE-XBPM:P1ds:y:ResolutionM / S06IDFE-XBPM:P1ds:y:ResolutionM
S06IDFE-XBPM:P1ds:y:Resolution1sM / S06IDFE-XBPM:P1ds:y:Resolution1sM
S06IDFE-XBPM:P1ds:y:Resolution8sM / S06IDFE-XBPM:P1ds:y:Resolution8sM
S06IDFE-XBPM:P1ds:y:Resolution64sM / S06IDFE-XBPM:P1ds:y:Resolution64sM
S06IDFE-XBPM:P1ds:y:StdDevM / S06IDFE-XBPM:P1ds:y:StdDevM
S06IDFE-XBPM:P1ds:y:StdDev1sM / S06IDFE-XBPM:P1ds:y:StdDev1sM
S06IDFE-XBPM:P1ds:y:StdDev8sM / S06IDFE-XBPM:P1ds:y:StdDev8sM
S06IDFE-XBPM:P1ds:y:StdDev64sM / S06IDFE-XBPM:P1ds:y:StdDev64sM
S06IDFE-XBPM:P1ds:y1:LowPass1sM / S06IDFE-XBPM:P1ds:y1:LowPass1sM
S06IDFE-XBPM:P1ds:y1:LowPass8sM / S06IDFE-XBPM:P1ds:y1:LowPass8sM
S06IDFE-XBPM:P1ds:y1:LowPass64sM / S06IDFE-XBPM:P1ds:y1:LowPass64sM
S06IDFE-XBPM:P1ds:y2:LowPass1sM / S06IDFE-XBPM:P1ds:y2:LowPass1sM
S06IDFE-XBPM:P1ds:y2:LowPass8sM / S06IDFE-XBPM:P1ds:y2:LowPass8sM
S06IDFE-XBPM:P1ds:y2:LowPass64sM / S06IDFE-XBPM:P1ds:y2:LowPass64sM
S06IDFE-XBPM:P1us:BMcUsedM / S06IDFE-XBPM:P1us:BMcUsedM
S06IDFE-XBPM:P1us:GapUsedC / S06IDFE-XBPM:P1us:GapUsedC
S06IDFE-XBPM:P1us:Wx1UsedM / S06IDFE-XBPM:P1us:Wx1UsedM
S06IDFE-XBPM:P1us:Wx2UsedM / S06IDFE-XBPM:P1us:Wx2UsedM
S06IDFE-XBPM:P1us:Wx3UsedM / S06IDFE-XBPM:P1us:Wx3UsedM
S06IDFE-XBPM:P1us:Wy1UsedM / S06IDFE-XBPM:P1us:Wy1UsedM
S06IDFE-XBPM:P1us:Wy2UsedM / S06IDFE-XBPM:P1us:Wy2UsedM
S06IDFE-XBPM:P1us:Wy3UsedM / S06IDFE-XBPM:P1us:Wy3UsedM
S06IDFE-XBPM:P1us:x / S06IDFE-XBPM:P1us:x
S06IDFE-XBPM:P1us:x:CalFactor1M / S06IDFE-XBPM:P1us:x:CalFactor1M
S06IDFE-XBPM:P1us:x:CalFactor2M / S06IDFE-XBPM:P1us:x:CalFactor2M
S06IDFE-XBPM:P1us:x:LowPass1sM / S06IDFE-XBPM:P1us:x:LowPass1sM
S06IDFE-XBPM:P1us:x:LowPass8sM / S06IDFE-XBPM:P1us:x:LowPass8sM
S06IDFE-XBPM:P1us:x:LowPass64sM / S06IDFE-XBPM:P1us:x:LowPass64sM
S06IDFE-XBPM:P1us:x:Offset1M / S06IDFE-XBPM:P1us:x:Offset1M
S06IDFE-XBPM:P1us:x:Offset2M / S06IDFE-XBPM:P1us:x:Offset2M
S06IDFE-XBPM:P1us:x:ResolutionM / S06IDFE-XBPM:P1us:x:ResolutionM
S06IDFE-XBPM:P1us:x:Resolution1sM / S06IDFE-XBPM:P1us:x:Resolution1sM
S06IDFE-XBPM:P1us:x:Resolution8sM / S06IDFE-XBPM:P1us:x:Resolution8sM
S06IDFE-XBPM:P1us:x:Resolution64sM / S06IDFE-XBPM:P1us:x:Resolution64sM
S06IDFE-XBPM:P1us:x:StdDevM / S06IDFE-XBPM:P1us:x:StdDevM
S06IDFE-XBPM:P1us:x:StdDev1sM / S06IDFE-XBPM:P1us:x:StdDev1sM
S06IDFE-XBPM:P1us:x:StdDev8sM / S06IDFE-XBPM:P1us:x:StdDev8sM
S06IDFE-XBPM:P1us:x:StdDev64sM / S06IDFE-XBPM:P1us:x:StdDev64sM
S06IDFE-XBPM:P1us:x1:LowPass1sM / S06IDFE-XBPM:P1us:x1:LowPass1sM
S06IDFE-XBPM:P1us:x1:LowPass8sM / S06IDFE-XBPM:P1us:x1:LowPass8sM
S06IDFE-XBPM:P1us:x1:LowPass64sM / S06IDFE-XBPM:P1us:x1:LowPass64sM
S06IDFE-XBPM:P1us:x2:LowPass1sM / S06IDFE-XBPM:P1us:x2:LowPass1sM
S06IDFE-XBPM:P1us:x2:LowPass8sM / S06IDFE-XBPM:P1us:x2:LowPass8sM
S06IDFE-XBPM:P1us:x2:LowPass64sM / S06IDFE-XBPM:P1us:x2:LowPass64sM
S06IDFE-XBPM:P1us:y / S06IDFE-XBPM:P1us:y
S06IDFE-XBPM:P1us:y:CalFactor1M / S06IDFE-XBPM:P1us:y:CalFactor1M
S06IDFE-XBPM:P1us:y:CalFactor2M / S06IDFE-XBPM:P1us:y:CalFactor2M
S06IDFE-XBPM:P1us:y:LowPass1sM / S06IDFE-XBPM:P1us:y:LowPass1sM
S06IDFE-XBPM:P1us:y:LowPass8sM / S06IDFE-XBPM:P1us:y:LowPass8sM
S06IDFE-XBPM:P1us:y:LowPass64sM / S06IDFE-XBPM:P1us:y:LowPass64sM
S06IDFE-XBPM:P1us:y:Offset1M / S06IDFE-XBPM:P1us:y:Offset1M
S06IDFE-XBPM:P1us:y:Offset2M / S06IDFE-XBPM:P1us:y:Offset2M
S06IDFE-XBPM:P1us:y:ResolutionM / S06IDFE-XBPM:P1us:y:ResolutionM
S06IDFE-XBPM:P1us:y:Resolution1sM / S06IDFE-XBPM:P1us:y:Resolution1sM
S06IDFE-XBPM:P1us:y:Resolution8sM / S06IDFE-XBPM:P1us:y:Resolution8sM
S06IDFE-XBPM:P1us:y:Resolution64sM / S06IDFE-XBPM:P1us:y:Resolution64sM
S06IDFE-XBPM:P1us:y:StdDevM / S06IDFE-XBPM:P1us:y:StdDevM
S06IDFE-XBPM:P1us:y:StdDev1sM / S06IDFE-XBPM:P1us:y:StdDev1sM
S06IDFE-XBPM:P1us:y:StdDev8sM / S06IDFE-XBPM:P1us:y:StdDev8sM
S06IDFE-XBPM:P1us:y:StdDev64sM / S06IDFE-XBPM:P1us:y:StdDev64sM
S06IDFE-XBPM:P1us:y1:LowPass1sM / S06IDFE-XBPM:P1us:y1:LowPass1sM
S06IDFE-XBPM:P1us:y1:LowPass8sM / S06IDFE-XBPM:P1us:y1:LowPass8sM
S06IDFE-XBPM:P1us:y1:LowPass64sM / S06IDFE-XBPM:P1us:y1:LowPass64sM
S06IDFE-XBPM:P1us:y2:LowPass1sM / S06IDFE-XBPM:P1us:y2:LowPass1sM
S06IDFE-XBPM:P1us:y2:LowPass8sM / S06IDFE-XBPM:P1us:y2:LowPass8sM
S06IDFE-XBPM:P1us:y2:LowPass64sM / S06IDFE-XBPM:P1us:y2:LowPass64sM
S06IDFE-XBPM:P2ds:GapUsedC / S06IDFE-XBPM:P2ds:GapUsedC
S06IDFE-XBPM:P2ds:XCalM / S06IDFE-XBPM:P2ds:XCalM
S06IDFE-XBPM:P2ds:YCalM / S06IDFE-XBPM:P2ds:YCalM
S06IDFE-XBPM:P2ds:x:CalFactorM / S06IDFE-XBPM:P2ds:x:CalFactorM
S06IDFE-XBPM:P2ds:x:OffsetM / S06IDFE-XBPM:P2ds:x:OffsetM
S06IDFE-XBPM:P2ds:y:CalFactorM / S06IDFE-XBPM:P2ds:y:CalFactorM
S06IDFE-XBPM:P2ds:y:OffsetM / S06IDFE-XBPM:P2ds:y:OffsetM
S06IDFE-XBPM:P2us:GapUsedC / S06IDFE-XBPM:P2us:GapUsedC
S06IDFE-XBPM:P2us:XCalM / S06IDFE-XBPM:P2us:XCalM
S06IDFE-XBPM:P2us:YCalM / S06IDFE-XBPM:P2us:YCalM
S06IDFE-XBPM:P2us:x:CalFactorM / S06IDFE-XBPM:P2us:x:CalFactorM
S06IDFE-XBPM:P2us:x:OffsetM / S06IDFE-XBPM:P2us:x:OffsetM
S06IDFE-XBPM:P2us:y:CalFactorM / S06IDFE-XBPM:P2us:y:CalFactorM
S06IDFE-XBPM:P2us:y:OffsetM / S06IDFE-XBPM:P2us:y:OffsetM
S07BMFE-XBPM:P1:AM / S07BMFE-XBPM:P1:AM
S07BMFE-XBPM:P1:BM / S07BMFE-XBPM:P1:BM
S07BMFE-XBPM:P1:y / S07BMFE-XBPM:P1:y
S07BMFE-XBPM:P1:y:LowPass1sM / S07BMFE-XBPM:P1:y:LowPass1sM
S07BMFE-XBPM:P1:y:LowPass8sM / S07BMFE-XBPM:P1:y:LowPass8sM
S07BMFE-XBPM:P1:y:LowPass64sM / S07BMFE-XBPM:P1:y:LowPass64sM
S07BMFE-XBPM:P1:y:StdDevM / S07BMFE-XBPM:P1:y:StdDevM
S07BMFE-XBPM:P1:y:StdDev1sM / S07BMFE-XBPM:P1:y:StdDev1sM
S07BMFE-XBPM:P1:y:StdDev8sM / S07BMFE-XBPM:P1:y:StdDev8sM
S07BMFE-XBPM:P1:y:StdDev64sM / S07BMFE-XBPM:P1:y:StdDev64sM
S07BMFE-XBPM:P2:AM / S07BMFE-XBPM:P2:AM
S07BMFE-XBPM:P2:BM / S07BMFE-XBPM:P2:BM
S07BMFE-XBPM:P2:y / S07BMFE-XBPM:P2:y
S07BMFE-XBPM:P2:y:LowPass1sM / S07BMFE-XBPM:P2:y:LowPass1sM
S07BMFE-XBPM:P2:y:LowPass8sM / S07BMFE-XBPM:P2:y:LowPass8sM
S07BMFE-XBPM:P2:y:LowPass64sM / S07BMFE-XBPM:P2:y:LowPass64sM
S07BMFE-XBPM:P2:y:StdDevM / S07BMFE-XBPM:P2:y:StdDevM
S07BMFE-XBPM:P2:y:StdDev1sM / S07BMFE-XBPM:P2:y:StdDev1sM
S07BMFE-XBPM:P2:y:StdDev8sM / S07BMFE-XBPM:P2:y:StdDev8sM
S07BMFE-XBPM:P2:y:StdDev64sM / S07BMFE-XBPM:P2:y:StdDev64sM
S07IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S07IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S07IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S07IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S07IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S07IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S07IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S07IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S07IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S07IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S07IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S07IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S07IDFE-XBPM:CM1ds:PositionOffsetX / S07IDFE-XBPM:CM1ds:PositionOffsetX
S07IDFE-XBPM:CM1ds:PositionOffsetY / S07IDFE-XBPM:CM1ds:PositionOffsetY
S07IDFE-XBPM:CM1ds:PositionScaleX / S07IDFE-XBPM:CM1ds:PositionScaleX
S07IDFE-XBPM:CM1ds:PositionScaleY / S07IDFE-XBPM:CM1ds:PositionScaleY
S07IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S07IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S07IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S07IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S07IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S07IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S07IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S07IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S07IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S07IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S07IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S07IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S07IDFE-XBPM:CM2ds:PositionOffsetX / S07IDFE-XBPM:CM2ds:PositionOffsetX
S07IDFE-XBPM:CM2ds:PositionOffsetY / S07IDFE-XBPM:CM2ds:PositionOffsetY
S07IDFE-XBPM:CM2ds:PositionScaleX / S07IDFE-XBPM:CM2ds:PositionScaleX
S07IDFE-XBPM:CM2ds:PositionScaleY / S07IDFE-XBPM:CM2ds:PositionScaleY
S07IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S07IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S07IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S07IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S07IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S07IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S07IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S07IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S07IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S07IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S07IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S07IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S07IDFE-XBPM:CM3ds:PositionOffsetX / S07IDFE-XBPM:CM3ds:PositionOffsetX
S07IDFE-XBPM:CM3ds:PositionOffsetY / S07IDFE-XBPM:CM3ds:PositionOffsetY
S07IDFE-XBPM:CM3ds:PositionScaleX / S07IDFE-XBPM:CM3ds:PositionScaleX
S07IDFE-XBPM:CM3ds:PositionScaleY / S07IDFE-XBPM:CM3ds:PositionScaleY
S07IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S07IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S07IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S07IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S07IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S07IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S07IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S07IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S07IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S07IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S07IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S07IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S07IDFE-XBPM:CM4ds:PositionOffsetX / S07IDFE-XBPM:CM4ds:PositionOffsetX
S07IDFE-XBPM:CM4ds:PositionOffsetY / S07IDFE-XBPM:CM4ds:PositionOffsetY
S07IDFE-XBPM:CM4ds:PositionScaleX / S07IDFE-XBPM:CM4ds:PositionScaleX
S07IDFE-XBPM:CM4ds:PositionScaleY / S07IDFE-XBPM:CM4ds:PositionScaleY
S07IDFE-XBPM:P1ds:BMcUsedM / S07IDFE-XBPM:P1ds:BMcUsedM
S07IDFE-XBPM:P1ds:GapUsedC / S07IDFE-XBPM:P1ds:GapUsedC
S07IDFE-XBPM:P1ds:Wx1UsedM / S07IDFE-XBPM:P1ds:Wx1UsedM
S07IDFE-XBPM:P1ds:Wx2UsedM / S07IDFE-XBPM:P1ds:Wx2UsedM
S07IDFE-XBPM:P1ds:Wx3UsedM / S07IDFE-XBPM:P1ds:Wx3UsedM
S07IDFE-XBPM:P1ds:Wy1UsedM / S07IDFE-XBPM:P1ds:Wy1UsedM
S07IDFE-XBPM:P1ds:Wy2UsedM / S07IDFE-XBPM:P1ds:Wy2UsedM
S07IDFE-XBPM:P1ds:Wy3UsedM / S07IDFE-XBPM:P1ds:Wy3UsedM
S07IDFE-XBPM:P1ds:x / S07IDFE-XBPM:P1ds:x
S07IDFE-XBPM:P1ds:x:CalFactor1M / S07IDFE-XBPM:P1ds:x:CalFactor1M
S07IDFE-XBPM:P1ds:x:CalFactor2M / S07IDFE-XBPM:P1ds:x:CalFactor2M
S07IDFE-XBPM:P1ds:x:LowPass1sM / S07IDFE-XBPM:P1ds:x:LowPass1sM
S07IDFE-XBPM:P1ds:x:LowPass8sM / S07IDFE-XBPM:P1ds:x:LowPass8sM
S07IDFE-XBPM:P1ds:x:LowPass64sM / S07IDFE-XBPM:P1ds:x:LowPass64sM
S07IDFE-XBPM:P1ds:x:Offset1M / S07IDFE-XBPM:P1ds:x:Offset1M
S07IDFE-XBPM:P1ds:x:Offset2M / S07IDFE-XBPM:P1ds:x:Offset2M
S07IDFE-XBPM:P1ds:x:ResolutionM / S07IDFE-XBPM:P1ds:x:ResolutionM
S07IDFE-XBPM:P1ds:x:Resolution1sM / S07IDFE-XBPM:P1ds:x:Resolution1sM
S07IDFE-XBPM:P1ds:x:Resolution8sM / S07IDFE-XBPM:P1ds:x:Resolution8sM
S07IDFE-XBPM:P1ds:x:Resolution64sM / S07IDFE-XBPM:P1ds:x:Resolution64sM
S07IDFE-XBPM:P1ds:x:StdDevM / S07IDFE-XBPM:P1ds:x:StdDevM
S07IDFE-XBPM:P1ds:x:StdDev1sM / S07IDFE-XBPM:P1ds:x:StdDev1sM
S07IDFE-XBPM:P1ds:x:StdDev8sM / S07IDFE-XBPM:P1ds:x:StdDev8sM
S07IDFE-XBPM:P1ds:x:StdDev64sM / S07IDFE-XBPM:P1ds:x:StdDev64sM
S07IDFE-XBPM:P1ds:x1:LowPass1sM / S07IDFE-XBPM:P1ds:x1:LowPass1sM
S07IDFE-XBPM:P1ds:x1:LowPass8sM / S07IDFE-XBPM:P1ds:x1:LowPass8sM
S07IDFE-XBPM:P1ds:x1:LowPass64sM / S07IDFE-XBPM:P1ds:x1:LowPass64sM
S07IDFE-XBPM:P1ds:x2:LowPass1sM / S07IDFE-XBPM:P1ds:x2:LowPass1sM
S07IDFE-XBPM:P1ds:x2:LowPass8sM / S07IDFE-XBPM:P1ds:x2:LowPass8sM
S07IDFE-XBPM:P1ds:x2:LowPass64sM / S07IDFE-XBPM:P1ds:x2:LowPass64sM
S07IDFE-XBPM:P1ds:y / S07IDFE-XBPM:P1ds:y
S07IDFE-XBPM:P1ds:y:CalFactor1M / S07IDFE-XBPM:P1ds:y:CalFactor1M
S07IDFE-XBPM:P1ds:y:CalFactor2M / S07IDFE-XBPM:P1ds:y:CalFactor2M
S07IDFE-XBPM:P1ds:y:LowPass1sM / S07IDFE-XBPM:P1ds:y:LowPass1sM
S07IDFE-XBPM:P1ds:y:LowPass8sM / S07IDFE-XBPM:P1ds:y:LowPass8sM
S07IDFE-XBPM:P1ds:y:LowPass64sM / S07IDFE-XBPM:P1ds:y:LowPass64sM
S07IDFE-XBPM:P1ds:y:Offset1M / S07IDFE-XBPM:P1ds:y:Offset1M
S07IDFE-XBPM:P1ds:y:Offset2M / S07IDFE-XBPM:P1ds:y:Offset2M
S07IDFE-XBPM:P1ds:y:ResolutionM / S07IDFE-XBPM:P1ds:y:ResolutionM
S07IDFE-XBPM:P1ds:y:Resolution1sM / S07IDFE-XBPM:P1ds:y:Resolution1sM
S07IDFE-XBPM:P1ds:y:Resolution8sM / S07IDFE-XBPM:P1ds:y:Resolution8sM
S07IDFE-XBPM:P1ds:y:Resolution64sM / S07IDFE-XBPM:P1ds:y:Resolution64sM
S07IDFE-XBPM:P1ds:y:StdDevM / S07IDFE-XBPM:P1ds:y:StdDevM
S07IDFE-XBPM:P1ds:y:StdDev1sM / S07IDFE-XBPM:P1ds:y:StdDev1sM
S07IDFE-XBPM:P1ds:y:StdDev8sM / S07IDFE-XBPM:P1ds:y:StdDev8sM
S07IDFE-XBPM:P1ds:y:StdDev64sM / S07IDFE-XBPM:P1ds:y:StdDev64sM
S07IDFE-XBPM:P1ds:y1:LowPass1sM / S07IDFE-XBPM:P1ds:y1:LowPass1sM
S07IDFE-XBPM:P1ds:y1:LowPass8sM / S07IDFE-XBPM:P1ds:y1:LowPass8sM
S07IDFE-XBPM:P1ds:y1:LowPass64sM / S07IDFE-XBPM:P1ds:y1:LowPass64sM
S07IDFE-XBPM:P1ds:y2:LowPass1sM / S07IDFE-XBPM:P1ds:y2:LowPass1sM
S07IDFE-XBPM:P1ds:y2:LowPass8sM / S07IDFE-XBPM:P1ds:y2:LowPass8sM
S07IDFE-XBPM:P1ds:y2:LowPass64sM / S07IDFE-XBPM:P1ds:y2:LowPass64sM
S07IDFE-XBPM:P2ds:GapUsedC / S07IDFE-XBPM:P2ds:GapUsedC
S07IDFE-XBPM:P2ds:XCalM / S07IDFE-XBPM:P2ds:XCalM
S07IDFE-XBPM:P2ds:YCalM / S07IDFE-XBPM:P2ds:YCalM
S07IDFE-XBPM:P2ds:x:CalFactorM / S07IDFE-XBPM:P2ds:x:CalFactorM
S07IDFE-XBPM:P2ds:x:OffsetM / S07IDFE-XBPM:P2ds:x:OffsetM
S07IDFE-XBPM:P2ds:y:CalFactorM / S07IDFE-XBPM:P2ds:y:CalFactorM
S07IDFE-XBPM:P2ds:y:OffsetM / S07IDFE-XBPM:P2ds:y:OffsetM
S08BMFE-XBPM:P1:AM / S08BMFE-XBPM:P1:AM
S08BMFE-XBPM:P1:BM / S08BMFE-XBPM:P1:BM
S08BMFE-XBPM:P1:y / S08BMFE-XBPM:P1:y
S08BMFE-XBPM:P1:y:LowPass1sM / S08BMFE-XBPM:P1:y:LowPass1sM
S08BMFE-XBPM:P1:y:LowPass8sM / S08BMFE-XBPM:P1:y:LowPass8sM
S08BMFE-XBPM:P1:y:LowPass64sM / S08BMFE-XBPM:P1:y:LowPass64sM
S08BMFE-XBPM:P1:y:StdDevM / S08BMFE-XBPM:P1:y:StdDevM
S08BMFE-XBPM:P1:y:StdDev1sM / S08BMFE-XBPM:P1:y:StdDev1sM
S08BMFE-XBPM:P1:y:StdDev8sM / S08BMFE-XBPM:P1:y:StdDev8sM
S08BMFE-XBPM:P1:y:StdDev64sM / S08BMFE-XBPM:P1:y:StdDev64sM
S08BMFE-XBPM:P2:AM / S08BMFE-XBPM:P2:AM
S08BMFE-XBPM:P2:BM / S08BMFE-XBPM:P2:BM
S08BMFE-XBPM:P2:y / S08BMFE-XBPM:P2:y
S08BMFE-XBPM:P2:y:LowPass1sM / S08BMFE-XBPM:P2:y:LowPass1sM
S08BMFE-XBPM:P2:y:LowPass8sM / S08BMFE-XBPM:P2:y:LowPass8sM
S08BMFE-XBPM:P2:y:LowPass64sM / S08BMFE-XBPM:P2:y:LowPass64sM
S08BMFE-XBPM:P2:y:StdDevM / S08BMFE-XBPM:P2:y:StdDevM
S08BMFE-XBPM:P2:y:StdDev1sM / S08BMFE-XBPM:P2:y:StdDev1sM
S08BMFE-XBPM:P2:y:StdDev8sM / S08BMFE-XBPM:P2:y:StdDev8sM
S08BMFE-XBPM:P2:y:StdDev64sM / S08BMFE-XBPM:P2:y:StdDev64sM
S08IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S08IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S08IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S08IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S08IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S08IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S08IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S08IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S08IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S08IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S08IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S08IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S08IDFE-XBPM:CM1ds:PositionOffsetX / S08IDFE-XBPM:CM1ds:PositionOffsetX
S08IDFE-XBPM:CM1ds:PositionOffsetY / S08IDFE-XBPM:CM1ds:PositionOffsetY
S08IDFE-XBPM:CM1ds:PositionScaleX / S08IDFE-XBPM:CM1ds:PositionScaleX
S08IDFE-XBPM:CM1ds:PositionScaleY / S08IDFE-XBPM:CM1ds:PositionScaleY
S08IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S08IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S08IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S08IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S08IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S08IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S08IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S08IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S08IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S08IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S08IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S08IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S08IDFE-XBPM:CM2ds:PositionOffsetX / S08IDFE-XBPM:CM2ds:PositionOffsetX
S08IDFE-XBPM:CM2ds:PositionOffsetY / S08IDFE-XBPM:CM2ds:PositionOffsetY
S08IDFE-XBPM:CM2ds:PositionScaleX / S08IDFE-XBPM:CM2ds:PositionScaleX
S08IDFE-XBPM:CM2ds:PositionScaleY / S08IDFE-XBPM:CM2ds:PositionScaleY
S08IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S08IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S08IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S08IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S08IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S08IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S08IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S08IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S08IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S08IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S08IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S08IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S08IDFE-XBPM:CM3ds:PositionOffsetX / S08IDFE-XBPM:CM3ds:PositionOffsetX
S08IDFE-XBPM:CM3ds:PositionOffsetY / S08IDFE-XBPM:CM3ds:PositionOffsetY
S08IDFE-XBPM:CM3ds:PositionScaleX / S08IDFE-XBPM:CM3ds:PositionScaleX
S08IDFE-XBPM:CM3ds:PositionScaleY / S08IDFE-XBPM:CM3ds:PositionScaleY
S08IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S08IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S08IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S08IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S08IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S08IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S08IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S08IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S08IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S08IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S08IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S08IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S08IDFE-XBPM:CM4ds:PositionOffsetX / S08IDFE-XBPM:CM4ds:PositionOffsetX
S08IDFE-XBPM:CM4ds:PositionOffsetY / S08IDFE-XBPM:CM4ds:PositionOffsetY
S08IDFE-XBPM:CM4ds:PositionScaleX / S08IDFE-XBPM:CM4ds:PositionScaleX
S08IDFE-XBPM:CM4ds:PositionScaleY / S08IDFE-XBPM:CM4ds:PositionScaleY
S08IDFE-XBPM:P1ds:BMcUsedM / S08IDFE-XBPM:P1ds:BMcUsedM
S08IDFE-XBPM:P1ds:GapUsedC / S08IDFE-XBPM:P1ds:GapUsedC
S08IDFE-XBPM:P1ds:Wx1UsedM / S08IDFE-XBPM:P1ds:Wx1UsedM
S08IDFE-XBPM:P1ds:Wx2UsedM / S08IDFE-XBPM:P1ds:Wx2UsedM
S08IDFE-XBPM:P1ds:Wx3UsedM / S08IDFE-XBPM:P1ds:Wx3UsedM
S08IDFE-XBPM:P1ds:Wy1UsedM / S08IDFE-XBPM:P1ds:Wy1UsedM
S08IDFE-XBPM:P1ds:Wy2UsedM / S08IDFE-XBPM:P1ds:Wy2UsedM
S08IDFE-XBPM:P1ds:Wy3UsedM / S08IDFE-XBPM:P1ds:Wy3UsedM
S08IDFE-XBPM:P1ds:x / S08IDFE-XBPM:P1ds:x
S08IDFE-XBPM:P1ds:x:CalFactor1M / S08IDFE-XBPM:P1ds:x:CalFactor1M
S08IDFE-XBPM:P1ds:x:CalFactor2M / S08IDFE-XBPM:P1ds:x:CalFactor2M
S08IDFE-XBPM:P1ds:x:LowPass1sM / S08IDFE-XBPM:P1ds:x:LowPass1sM
S08IDFE-XBPM:P1ds:x:LowPass8sM / S08IDFE-XBPM:P1ds:x:LowPass8sM
S08IDFE-XBPM:P1ds:x:LowPass64sM / S08IDFE-XBPM:P1ds:x:LowPass64sM
S08IDFE-XBPM:P1ds:x:Offset1M / S08IDFE-XBPM:P1ds:x:Offset1M
S08IDFE-XBPM:P1ds:x:Offset2M / S08IDFE-XBPM:P1ds:x:Offset2M
S08IDFE-XBPM:P1ds:x:ResolutionM / S08IDFE-XBPM:P1ds:x:ResolutionM
S08IDFE-XBPM:P1ds:x:Resolution1sM / S08IDFE-XBPM:P1ds:x:Resolution1sM
S08IDFE-XBPM:P1ds:x:Resolution8sM / S08IDFE-XBPM:P1ds:x:Resolution8sM
S08IDFE-XBPM:P1ds:x:Resolution64sM / S08IDFE-XBPM:P1ds:x:Resolution64sM
S08IDFE-XBPM:P1ds:x:StdDevM / S08IDFE-XBPM:P1ds:x:StdDevM
S08IDFE-XBPM:P1ds:x:StdDev1sM / S08IDFE-XBPM:P1ds:x:StdDev1sM
S08IDFE-XBPM:P1ds:x:StdDev8sM / S08IDFE-XBPM:P1ds:x:StdDev8sM
S08IDFE-XBPM:P1ds:x:StdDev64sM / S08IDFE-XBPM:P1ds:x:StdDev64sM
S08IDFE-XBPM:P1ds:x1:LowPass1sM / S08IDFE-XBPM:P1ds:x1:LowPass1sM
S08IDFE-XBPM:P1ds:x1:LowPass8sM / S08IDFE-XBPM:P1ds:x1:LowPass8sM
S08IDFE-XBPM:P1ds:x1:LowPass64sM / S08IDFE-XBPM:P1ds:x1:LowPass64sM
S08IDFE-XBPM:P1ds:x2:LowPass1sM / S08IDFE-XBPM:P1ds:x2:LowPass1sM
S08IDFE-XBPM:P1ds:x2:LowPass8sM / S08IDFE-XBPM:P1ds:x2:LowPass8sM
S08IDFE-XBPM:P1ds:x2:LowPass64sM / S08IDFE-XBPM:P1ds:x2:LowPass64sM
S08IDFE-XBPM:P1ds:y / S08IDFE-XBPM:P1ds:y
S08IDFE-XBPM:P1ds:y:CalFactor1M / S08IDFE-XBPM:P1ds:y:CalFactor1M
S08IDFE-XBPM:P1ds:y:CalFactor2M / S08IDFE-XBPM:P1ds:y:CalFactor2M
S08IDFE-XBPM:P1ds:y:LowPass1sM / S08IDFE-XBPM:P1ds:y:LowPass1sM
S08IDFE-XBPM:P1ds:y:LowPass8sM / S08IDFE-XBPM:P1ds:y:LowPass8sM
S08IDFE-XBPM:P1ds:y:LowPass64sM / S08IDFE-XBPM:P1ds:y:LowPass64sM
S08IDFE-XBPM:P1ds:y:Offset1M / S08IDFE-XBPM:P1ds:y:Offset1M
S08IDFE-XBPM:P1ds:y:Offset2M / S08IDFE-XBPM:P1ds:y:Offset2M
S08IDFE-XBPM:P1ds:y:ResolutionM / S08IDFE-XBPM:P1ds:y:ResolutionM
S08IDFE-XBPM:P1ds:y:Resolution1sM / S08IDFE-XBPM:P1ds:y:Resolution1sM
S08IDFE-XBPM:P1ds:y:Resolution8sM / S08IDFE-XBPM:P1ds:y:Resolution8sM
S08IDFE-XBPM:P1ds:y:Resolution64sM / S08IDFE-XBPM:P1ds:y:Resolution64sM
S08IDFE-XBPM:P1ds:y:StdDevM / S08IDFE-XBPM:P1ds:y:StdDevM
S08IDFE-XBPM:P1ds:y:StdDev1sM / S08IDFE-XBPM:P1ds:y:StdDev1sM
S08IDFE-XBPM:P1ds:y:StdDev8sM / S08IDFE-XBPM:P1ds:y:StdDev8sM
S08IDFE-XBPM:P1ds:y:StdDev64sM / S08IDFE-XBPM:P1ds:y:StdDev64sM
S08IDFE-XBPM:P1ds:y1:LowPass1sM / S08IDFE-XBPM:P1ds:y1:LowPass1sM
S08IDFE-XBPM:P1ds:y1:LowPass8sM / S08IDFE-XBPM:P1ds:y1:LowPass8sM
S08IDFE-XBPM:P1ds:y1:LowPass64sM / S08IDFE-XBPM:P1ds:y1:LowPass64sM
S08IDFE-XBPM:P1ds:y2:LowPass1sM / S08IDFE-XBPM:P1ds:y2:LowPass1sM
S08IDFE-XBPM:P1ds:y2:LowPass8sM / S08IDFE-XBPM:P1ds:y2:LowPass8sM
S08IDFE-XBPM:P1ds:y2:LowPass64sM / S08IDFE-XBPM:P1ds:y2:LowPass64sM
S08IDFE-XBPM:P2ds:GapUsedC / S08IDFE-XBPM:P2ds:GapUsedC
S08IDFE-XBPM:P2ds:XCalM / S08IDFE-XBPM:P2ds:XCalM
S08IDFE-XBPM:P2ds:YCalM / S08IDFE-XBPM:P2ds:YCalM
S08IDFE-XBPM:P2ds:x:CalFactorM / S08IDFE-XBPM:P2ds:x:CalFactorM
S08IDFE-XBPM:P2ds:x:OffsetM / S08IDFE-XBPM:P2ds:x:OffsetM
S08IDFE-XBPM:P2ds:y:CalFactorM / S08IDFE-XBPM:P2ds:y:CalFactorM
S08IDFE-XBPM:P2ds:y:OffsetM / S08IDFE-XBPM:P2ds:y:OffsetM
S09BMFE-XBPM:P1:AM / S09BMFE-XBPM:P1:AM
S09BMFE-XBPM:P1:BM / S09BMFE-XBPM:P1:BM
S09BMFE-XBPM:P1:y / S09BMFE-XBPM:P1:y
S09BMFE-XBPM:P1:y:LowPass1sM / S09BMFE-XBPM:P1:y:LowPass1sM
S09BMFE-XBPM:P1:y:LowPass8sM / S09BMFE-XBPM:P1:y:LowPass8sM
S09BMFE-XBPM:P1:y:LowPass64sM / S09BMFE-XBPM:P1:y:LowPass64sM
S09BMFE-XBPM:P1:y:StdDevM / S09BMFE-XBPM:P1:y:StdDevM
S09BMFE-XBPM:P1:y:StdDev1sM / S09BMFE-XBPM:P1:y:StdDev1sM
S09BMFE-XBPM:P1:y:StdDev8sM / S09BMFE-XBPM:P1:y:StdDev8sM
S09BMFE-XBPM:P1:y:StdDev64sM / S09BMFE-XBPM:P1:y:StdDev64sM
S09BMFE-XBPM:P2:AM / S09BMFE-XBPM:P2:AM
S09BMFE-XBPM:P2:BM / S09BMFE-XBPM:P2:BM
S09BMFE-XBPM:P2:y / S09BMFE-XBPM:P2:y
S09BMFE-XBPM:P2:y:LowPass1sM / S09BMFE-XBPM:P2:y:LowPass1sM
S09BMFE-XBPM:P2:y:LowPass8sM / S09BMFE-XBPM:P2:y:LowPass8sM
S09BMFE-XBPM:P2:y:LowPass64sM / S09BMFE-XBPM:P2:y:LowPass64sM
S09BMFE-XBPM:P2:y:StdDevM / S09BMFE-XBPM:P2:y:StdDevM
S09BMFE-XBPM:P2:y:StdDev1sM / S09BMFE-XBPM:P2:y:StdDev1sM
S09BMFE-XBPM:P2:y:StdDev8sM / S09BMFE-XBPM:P2:y:StdDev8sM
S09BMFE-XBPM:P2:y:StdDev64sM / S09BMFE-XBPM:P2:y:StdDev64sM
S09IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S09IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S09IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S09IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S09IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S09IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S09IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S09IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S09IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S09IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S09IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S09IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S09IDFE-XBPM:CM1ds:PositionOffsetX / S09IDFE-XBPM:CM1ds:PositionOffsetX
S09IDFE-XBPM:CM1ds:PositionOffsetY / S09IDFE-XBPM:CM1ds:PositionOffsetY
S09IDFE-XBPM:CM1ds:PositionScaleX / S09IDFE-XBPM:CM1ds:PositionScaleX
S09IDFE-XBPM:CM1ds:PositionScaleY / S09IDFE-XBPM:CM1ds:PositionScaleY
S09IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S09IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S09IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S09IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S09IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S09IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S09IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S09IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S09IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S09IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S09IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S09IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S09IDFE-XBPM:CM2ds:PositionOffsetX / S09IDFE-XBPM:CM2ds:PositionOffsetX
S09IDFE-XBPM:CM2ds:PositionOffsetY / S09IDFE-XBPM:CM2ds:PositionOffsetY
S09IDFE-XBPM:CM2ds:PositionScaleX / S09IDFE-XBPM:CM2ds:PositionScaleX
S09IDFE-XBPM:CM2ds:PositionScaleY / S09IDFE-XBPM:CM2ds:PositionScaleY
S09IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S09IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S09IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S09IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S09IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S09IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S09IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S09IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S09IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S09IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S09IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S09IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S09IDFE-XBPM:CM3ds:PositionOffsetX / S09IDFE-XBPM:CM3ds:PositionOffsetX
S09IDFE-XBPM:CM3ds:PositionOffsetY / S09IDFE-XBPM:CM3ds:PositionOffsetY
S09IDFE-XBPM:CM3ds:PositionScaleX / S09IDFE-XBPM:CM3ds:PositionScaleX
S09IDFE-XBPM:CM3ds:PositionScaleY / S09IDFE-XBPM:CM3ds:PositionScaleY
S09IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S09IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S09IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S09IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S09IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S09IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S09IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S09IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S09IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S09IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S09IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S09IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S09IDFE-XBPM:CM4ds:PositionOffsetX / S09IDFE-XBPM:CM4ds:PositionOffsetX
S09IDFE-XBPM:CM4ds:PositionOffsetY / S09IDFE-XBPM:CM4ds:PositionOffsetY
S09IDFE-XBPM:CM4ds:PositionScaleX / S09IDFE-XBPM:CM4ds:PositionScaleX
S09IDFE-XBPM:CM4ds:PositionScaleY / S09IDFE-XBPM:CM4ds:PositionScaleY
S09IDFE-XBPM:P1ds:BMcUsedM / S09IDFE-XBPM:P1ds:BMcUsedM
S09IDFE-XBPM:P1ds:GapUsedC / S09IDFE-XBPM:P1ds:GapUsedC
S09IDFE-XBPM:P1ds:Wx1UsedM / S09IDFE-XBPM:P1ds:Wx1UsedM
S09IDFE-XBPM:P1ds:Wx2UsedM / S09IDFE-XBPM:P1ds:Wx2UsedM
S09IDFE-XBPM:P1ds:Wx3UsedM / S09IDFE-XBPM:P1ds:Wx3UsedM
S09IDFE-XBPM:P1ds:Wy1UsedM / S09IDFE-XBPM:P1ds:Wy1UsedM
S09IDFE-XBPM:P1ds:Wy2UsedM / S09IDFE-XBPM:P1ds:Wy2UsedM
S09IDFE-XBPM:P1ds:Wy3UsedM / S09IDFE-XBPM:P1ds:Wy3UsedM
S09IDFE-XBPM:P1ds:x / S09IDFE-XBPM:P1ds:x
S09IDFE-XBPM:P1ds:x:CalFactor1M / S09IDFE-XBPM:P1ds:x:CalFactor1M
S09IDFE-XBPM:P1ds:x:CalFactor2M / S09IDFE-XBPM:P1ds:x:CalFactor2M
S09IDFE-XBPM:P1ds:x:LowPass1sM / S09IDFE-XBPM:P1ds:x:LowPass1sM
S09IDFE-XBPM:P1ds:x:LowPass8sM / S09IDFE-XBPM:P1ds:x:LowPass8sM
S09IDFE-XBPM:P1ds:x:LowPass64sM / S09IDFE-XBPM:P1ds:x:LowPass64sM
S09IDFE-XBPM:P1ds:x:Offset1M / S09IDFE-XBPM:P1ds:x:Offset1M
S09IDFE-XBPM:P1ds:x:Offset2M / S09IDFE-XBPM:P1ds:x:Offset2M
S09IDFE-XBPM:P1ds:x:ResolutionM / S09IDFE-XBPM:P1ds:x:ResolutionM
S09IDFE-XBPM:P1ds:x:Resolution1sM / S09IDFE-XBPM:P1ds:x:Resolution1sM
S09IDFE-XBPM:P1ds:x:Resolution8sM / S09IDFE-XBPM:P1ds:x:Resolution8sM
S09IDFE-XBPM:P1ds:x:Resolution64sM / S09IDFE-XBPM:P1ds:x:Resolution64sM
S09IDFE-XBPM:P1ds:x:StdDevM / S09IDFE-XBPM:P1ds:x:StdDevM
S09IDFE-XBPM:P1ds:x:StdDev1sM / S09IDFE-XBPM:P1ds:x:StdDev1sM
S09IDFE-XBPM:P1ds:x:StdDev8sM / S09IDFE-XBPM:P1ds:x:StdDev8sM
S09IDFE-XBPM:P1ds:x:StdDev64sM / S09IDFE-XBPM:P1ds:x:StdDev64sM
S09IDFE-XBPM:P1ds:x1:LowPass1sM / S09IDFE-XBPM:P1ds:x1:LowPass1sM
S09IDFE-XBPM:P1ds:x1:LowPass8sM / S09IDFE-XBPM:P1ds:x1:LowPass8sM
S09IDFE-XBPM:P1ds:x1:LowPass64sM / S09IDFE-XBPM:P1ds:x1:LowPass64sM
S09IDFE-XBPM:P1ds:x2:LowPass1sM / S09IDFE-XBPM:P1ds:x2:LowPass1sM
S09IDFE-XBPM:P1ds:x2:LowPass8sM / S09IDFE-XBPM:P1ds:x2:LowPass8sM
S09IDFE-XBPM:P1ds:x2:LowPass64sM / S09IDFE-XBPM:P1ds:x2:LowPass64sM
S09IDFE-XBPM:P1ds:y / S09IDFE-XBPM:P1ds:y
S09IDFE-XBPM:P1ds:y:CalFactor1M / S09IDFE-XBPM:P1ds:y:CalFactor1M
S09IDFE-XBPM:P1ds:y:CalFactor2M / S09IDFE-XBPM:P1ds:y:CalFactor2M
S09IDFE-XBPM:P1ds:y:LowPass1sM / S09IDFE-XBPM:P1ds:y:LowPass1sM
S09IDFE-XBPM:P1ds:y:LowPass8sM / S09IDFE-XBPM:P1ds:y:LowPass8sM
S09IDFE-XBPM:P1ds:y:LowPass64sM / S09IDFE-XBPM:P1ds:y:LowPass64sM
S09IDFE-XBPM:P1ds:y:Offset1M / S09IDFE-XBPM:P1ds:y:Offset1M
S09IDFE-XBPM:P1ds:y:Offset2M / S09IDFE-XBPM:P1ds:y:Offset2M
S09IDFE-XBPM:P1ds:y:ResolutionM / S09IDFE-XBPM:P1ds:y:ResolutionM
S09IDFE-XBPM:P1ds:y:Resolution1sM / S09IDFE-XBPM:P1ds:y:Resolution1sM
S09IDFE-XBPM:P1ds:y:Resolution8sM / S09IDFE-XBPM:P1ds:y:Resolution8sM
S09IDFE-XBPM:P1ds:y:Resolution64sM / S09IDFE-XBPM:P1ds:y:Resolution64sM
S09IDFE-XBPM:P1ds:y:StdDevM / S09IDFE-XBPM:P1ds:y:StdDevM
S09IDFE-XBPM:P1ds:y:StdDev1sM / S09IDFE-XBPM:P1ds:y:StdDev1sM
S09IDFE-XBPM:P1ds:y:StdDev8sM / S09IDFE-XBPM:P1ds:y:StdDev8sM
S09IDFE-XBPM:P1ds:y:StdDev64sM / S09IDFE-XBPM:P1ds:y:StdDev64sM
S09IDFE-XBPM:P1ds:y1:LowPass1sM / S09IDFE-XBPM:P1ds:y1:LowPass1sM
S09IDFE-XBPM:P1ds:y1:LowPass8sM / S09IDFE-XBPM:P1ds:y1:LowPass8sM
S09IDFE-XBPM:P1ds:y1:LowPass64sM / S09IDFE-XBPM:P1ds:y1:LowPass64sM
S09IDFE-XBPM:P1ds:y2:LowPass1sM / S09IDFE-XBPM:P1ds:y2:LowPass1sM
S09IDFE-XBPM:P1ds:y2:LowPass8sM / S09IDFE-XBPM:P1ds:y2:LowPass8sM
S09IDFE-XBPM:P1ds:y2:LowPass64sM / S09IDFE-XBPM:P1ds:y2:LowPass64sM
S09IDFE-XBPM:P2ds:GapUsedC / S09IDFE-XBPM:P2ds:GapUsedC
S09IDFE-XBPM:P2ds:XCalM / S09IDFE-XBPM:P2ds:XCalM
S09IDFE-XBPM:P2ds:YCalM / S09IDFE-XBPM:P2ds:YCalM
S09IDFE-XBPM:P2ds:x:CalFactorM / S09IDFE-XBPM:P2ds:x:CalFactorM
S09IDFE-XBPM:P2ds:x:OffsetM / S09IDFE-XBPM:P2ds:x:OffsetM
S09IDFE-XBPM:P2ds:y:CalFactorM / S09IDFE-XBPM:P2ds:y:CalFactorM
S09IDFE-XBPM:P2ds:y:OffsetM / S09IDFE-XBPM:P2ds:y:OffsetM
S10BMFE-XBPM:P1:AM / S10BMFE-XBPM:P1:AM
S10BMFE-XBPM:P1:BM / S10BMFE-XBPM:P1:BM
S10BMFE-XBPM:P1:y / S10BMFE-XBPM:P1:y
S10BMFE-XBPM:P1:y:LowPass1sM / S10BMFE-XBPM:P1:y:LowPass1sM
S10BMFE-XBPM:P1:y:LowPass8sM / S10BMFE-XBPM:P1:y:LowPass8sM
S10BMFE-XBPM:P1:y:LowPass64sM / S10BMFE-XBPM:P1:y:LowPass64sM
S10BMFE-XBPM:P1:y:StdDevM / S10BMFE-XBPM:P1:y:StdDevM
S10BMFE-XBPM:P1:y:StdDev1sM / S10BMFE-XBPM:P1:y:StdDev1sM
S10BMFE-XBPM:P1:y:StdDev8sM / S10BMFE-XBPM:P1:y:StdDev8sM
S10BMFE-XBPM:P1:y:StdDev64sM / S10BMFE-XBPM:P1:y:StdDev64sM
S10BMFE-XBPM:P2:AM / S10BMFE-XBPM:P2:AM
S10BMFE-XBPM:P2:BM / S10BMFE-XBPM:P2:BM
S10BMFE-XBPM:P2:y / S10BMFE-XBPM:P2:y
S10BMFE-XBPM:P2:y:LowPass1sM / S10BMFE-XBPM:P2:y:LowPass1sM
S10BMFE-XBPM:P2:y:LowPass8sM / S10BMFE-XBPM:P2:y:LowPass8sM
S10BMFE-XBPM:P2:y:LowPass64sM / S10BMFE-XBPM:P2:y:LowPass64sM
S10BMFE-XBPM:P2:y:StdDevM / S10BMFE-XBPM:P2:y:StdDevM
S10BMFE-XBPM:P2:y:StdDev1sM / S10BMFE-XBPM:P2:y:StdDev1sM
S10BMFE-XBPM:P2:y:StdDev8sM / S10BMFE-XBPM:P2:y:StdDev8sM
S10BMFE-XBPM:P2:y:StdDev64sM / S10BMFE-XBPM:P2:y:StdDev64sM
S10IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S10IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S10IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S10IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S10IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S10IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S10IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S10IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S10IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S10IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S10IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S10IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S10IDFE-XBPM:CM1ds:PositionOffsetX / S10IDFE-XBPM:CM1ds:PositionOffsetX
S10IDFE-XBPM:CM1ds:PositionOffsetY / S10IDFE-XBPM:CM1ds:PositionOffsetY
S10IDFE-XBPM:CM1ds:PositionScaleX / S10IDFE-XBPM:CM1ds:PositionScaleX
S10IDFE-XBPM:CM1ds:PositionScaleY / S10IDFE-XBPM:CM1ds:PositionScaleY
S10IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S10IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S10IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S10IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S10IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S10IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S10IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S10IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S10IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S10IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S10IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S10IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S10IDFE-XBPM:CM2ds:PositionOffsetX / S10IDFE-XBPM:CM2ds:PositionOffsetX
S10IDFE-XBPM:CM2ds:PositionOffsetY / S10IDFE-XBPM:CM2ds:PositionOffsetY
S10IDFE-XBPM:CM2ds:PositionScaleX / S10IDFE-XBPM:CM2ds:PositionScaleX
S10IDFE-XBPM:CM2ds:PositionScaleY / S10IDFE-XBPM:CM2ds:PositionScaleY
S10IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S10IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S10IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S10IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S10IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S10IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S10IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S10IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S10IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S10IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S10IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S10IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S10IDFE-XBPM:CM3ds:PositionOffsetX / S10IDFE-XBPM:CM3ds:PositionOffsetX
S10IDFE-XBPM:CM3ds:PositionOffsetY / S10IDFE-XBPM:CM3ds:PositionOffsetY
S10IDFE-XBPM:CM3ds:PositionScaleX / S10IDFE-XBPM:CM3ds:PositionScaleX
S10IDFE-XBPM:CM3ds:PositionScaleY / S10IDFE-XBPM:CM3ds:PositionScaleY
S10IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S10IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S10IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S10IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S10IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S10IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S10IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S10IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S10IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S10IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S10IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S10IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S10IDFE-XBPM:CM4ds:PositionOffsetX / S10IDFE-XBPM:CM4ds:PositionOffsetX
S10IDFE-XBPM:CM4ds:PositionOffsetY / S10IDFE-XBPM:CM4ds:PositionOffsetY
S10IDFE-XBPM:CM4ds:PositionScaleX / S10IDFE-XBPM:CM4ds:PositionScaleX
S10IDFE-XBPM:CM4ds:PositionScaleY / S10IDFE-XBPM:CM4ds:PositionScaleY
S10IDFE-XBPM:P1ds:BMcUsedM / S10IDFE-XBPM:P1ds:BMcUsedM
S10IDFE-XBPM:P1ds:GapUsedC / S10IDFE-XBPM:P1ds:GapUsedC
S10IDFE-XBPM:P1ds:Wx1UsedM / S10IDFE-XBPM:P1ds:Wx1UsedM
S10IDFE-XBPM:P1ds:Wx2UsedM / S10IDFE-XBPM:P1ds:Wx2UsedM
S10IDFE-XBPM:P1ds:Wx3UsedM / S10IDFE-XBPM:P1ds:Wx3UsedM
S10IDFE-XBPM:P1ds:Wy1UsedM / S10IDFE-XBPM:P1ds:Wy1UsedM
S10IDFE-XBPM:P1ds:Wy2UsedM / S10IDFE-XBPM:P1ds:Wy2UsedM
S10IDFE-XBPM:P1ds:Wy3UsedM / S10IDFE-XBPM:P1ds:Wy3UsedM
S10IDFE-XBPM:P1ds:x / S10IDFE-XBPM:P1ds:x
S10IDFE-XBPM:P1ds:x:CalFactor1M / S10IDFE-XBPM:P1ds:x:CalFactor1M
S10IDFE-XBPM:P1ds:x:CalFactor2M / S10IDFE-XBPM:P1ds:x:CalFactor2M
S10IDFE-XBPM:P1ds:x:LowPass1sM / S10IDFE-XBPM:P1ds:x:LowPass1sM
S10IDFE-XBPM:P1ds:x:LowPass8sM / S10IDFE-XBPM:P1ds:x:LowPass8sM
S10IDFE-XBPM:P1ds:x:LowPass64sM / S10IDFE-XBPM:P1ds:x:LowPass64sM
S10IDFE-XBPM:P1ds:x:Offset1M / S10IDFE-XBPM:P1ds:x:Offset1M
S10IDFE-XBPM:P1ds:x:Offset2M / S10IDFE-XBPM:P1ds:x:Offset2M
S10IDFE-XBPM:P1ds:x:ResolutionM / S10IDFE-XBPM:P1ds:x:ResolutionM
S10IDFE-XBPM:P1ds:x:Resolution1sM / S10IDFE-XBPM:P1ds:x:Resolution1sM
S10IDFE-XBPM:P1ds:x:Resolution8sM / S10IDFE-XBPM:P1ds:x:Resolution8sM
S10IDFE-XBPM:P1ds:x:Resolution64sM / S10IDFE-XBPM:P1ds:x:Resolution64sM
S10IDFE-XBPM:P1ds:x:StdDevM / S10IDFE-XBPM:P1ds:x:StdDevM
S10IDFE-XBPM:P1ds:x:StdDev1sM / S10IDFE-XBPM:P1ds:x:StdDev1sM
S10IDFE-XBPM:P1ds:x:StdDev8sM / S10IDFE-XBPM:P1ds:x:StdDev8sM
S10IDFE-XBPM:P1ds:x:StdDev64sM / S10IDFE-XBPM:P1ds:x:StdDev64sM
S10IDFE-XBPM:P1ds:x1:LowPass1sM / S10IDFE-XBPM:P1ds:x1:LowPass1sM
S10IDFE-XBPM:P1ds:x1:LowPass8sM / S10IDFE-XBPM:P1ds:x1:LowPass8sM
S10IDFE-XBPM:P1ds:x1:LowPass64sM / S10IDFE-XBPM:P1ds:x1:LowPass64sM
S10IDFE-XBPM:P1ds:x2:LowPass1sM / S10IDFE-XBPM:P1ds:x2:LowPass1sM
S10IDFE-XBPM:P1ds:x2:LowPass8sM / S10IDFE-XBPM:P1ds:x2:LowPass8sM
S10IDFE-XBPM:P1ds:x2:LowPass64sM / S10IDFE-XBPM:P1ds:x2:LowPass64sM
S10IDFE-XBPM:P1ds:y / S10IDFE-XBPM:P1ds:y
S10IDFE-XBPM:P1ds:y:CalFactor1M / S10IDFE-XBPM:P1ds:y:CalFactor1M
S10IDFE-XBPM:P1ds:y:CalFactor2M / S10IDFE-XBPM:P1ds:y:CalFactor2M
S10IDFE-XBPM:P1ds:y:LowPass1sM / S10IDFE-XBPM:P1ds:y:LowPass1sM
S10IDFE-XBPM:P1ds:y:LowPass8sM / S10IDFE-XBPM:P1ds:y:LowPass8sM
S10IDFE-XBPM:P1ds:y:LowPass64sM / S10IDFE-XBPM:P1ds:y:LowPass64sM
S10IDFE-XBPM:P1ds:y:Offset1M / S10IDFE-XBPM:P1ds:y:Offset1M
S10IDFE-XBPM:P1ds:y:Offset2M / S10IDFE-XBPM:P1ds:y:Offset2M
S10IDFE-XBPM:P1ds:y:ResolutionM / S10IDFE-XBPM:P1ds:y:ResolutionM
S10IDFE-XBPM:P1ds:y:Resolution1sM / S10IDFE-XBPM:P1ds:y:Resolution1sM
S10IDFE-XBPM:P1ds:y:Resolution8sM / S10IDFE-XBPM:P1ds:y:Resolution8sM
S10IDFE-XBPM:P1ds:y:Resolution64sM / S10IDFE-XBPM:P1ds:y:Resolution64sM
S10IDFE-XBPM:P1ds:y:StdDevM / S10IDFE-XBPM:P1ds:y:StdDevM
S10IDFE-XBPM:P1ds:y:StdDev1sM / S10IDFE-XBPM:P1ds:y:StdDev1sM
S10IDFE-XBPM:P1ds:y:StdDev8sM / S10IDFE-XBPM:P1ds:y:StdDev8sM
S10IDFE-XBPM:P1ds:y:StdDev64sM / S10IDFE-XBPM:P1ds:y:StdDev64sM
S10IDFE-XBPM:P1ds:y1:LowPass1sM / S10IDFE-XBPM:P1ds:y1:LowPass1sM
S10IDFE-XBPM:P1ds:y1:LowPass8sM / S10IDFE-XBPM:P1ds:y1:LowPass8sM
S10IDFE-XBPM:P1ds:y1:LowPass64sM / S10IDFE-XBPM:P1ds:y1:LowPass64sM
S10IDFE-XBPM:P1ds:y2:LowPass1sM / S10IDFE-XBPM:P1ds:y2:LowPass1sM
S10IDFE-XBPM:P1ds:y2:LowPass8sM / S10IDFE-XBPM:P1ds:y2:LowPass8sM
S10IDFE-XBPM:P1ds:y2:LowPass64sM / S10IDFE-XBPM:P1ds:y2:LowPass64sM
S10IDFE-XBPM:P2ds:GapUsedC / S10IDFE-XBPM:P2ds:GapUsedC
S10IDFE-XBPM:P2ds:XCalM / S10IDFE-XBPM:P2ds:XCalM
S10IDFE-XBPM:P2ds:YCalM / S10IDFE-XBPM:P2ds:YCalM
S10IDFE-XBPM:P2ds:x:CalFactorM / S10IDFE-XBPM:P2ds:x:CalFactorM
S10IDFE-XBPM:P2ds:x:OffsetM / S10IDFE-XBPM:P2ds:x:OffsetM
S10IDFE-XBPM:P2ds:y:CalFactorM / S10IDFE-XBPM:P2ds:y:CalFactorM
S10IDFE-XBPM:P2ds:y:OffsetM / S10IDFE-XBPM:P2ds:y:OffsetM
S11BMFE-XBPM:P1:AM / S11BMFE-XBPM:P1:AM
S11BMFE-XBPM:P1:BM / S11BMFE-XBPM:P1:BM
S11BMFE-XBPM:P1:y / S11BMFE-XBPM:P1:y
S11BMFE-XBPM:P1:y:LowPass1sM / S11BMFE-XBPM:P1:y:LowPass1sM
S11BMFE-XBPM:P1:y:LowPass8sM / S11BMFE-XBPM:P1:y:LowPass8sM
S11BMFE-XBPM:P1:y:LowPass64sM / S11BMFE-XBPM:P1:y:LowPass64sM
S11BMFE-XBPM:P1:y:StdDevM / S11BMFE-XBPM:P1:y:StdDevM
S11BMFE-XBPM:P1:y:StdDev1sM / S11BMFE-XBPM:P1:y:StdDev1sM
S11BMFE-XBPM:P1:y:StdDev8sM / S11BMFE-XBPM:P1:y:StdDev8sM
S11BMFE-XBPM:P1:y:StdDev64sM / S11BMFE-XBPM:P1:y:StdDev64sM
S11BMFE-XBPM:P2:AM / S11BMFE-XBPM:P2:AM
S11BMFE-XBPM:P2:BM / S11BMFE-XBPM:P2:BM
S11BMFE-XBPM:P2:y / S11BMFE-XBPM:P2:y
S11BMFE-XBPM:P2:y:LowPass1sM / S11BMFE-XBPM:P2:y:LowPass1sM
S11BMFE-XBPM:P2:y:LowPass8sM / S11BMFE-XBPM:P2:y:LowPass8sM
S11BMFE-XBPM:P2:y:LowPass64sM / S11BMFE-XBPM:P2:y:LowPass64sM
S11BMFE-XBPM:P2:y:StdDevM / S11BMFE-XBPM:P2:y:StdDevM
S11BMFE-XBPM:P2:y:StdDev1sM / S11BMFE-XBPM:P2:y:StdDev1sM
S11BMFE-XBPM:P2:y:StdDev8sM / S11BMFE-XBPM:P2:y:StdDev8sM
S11BMFE-XBPM:P2:y:StdDev64sM / S11BMFE-XBPM:P2:y:StdDev64sM
S11IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S11IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S11IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S11IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S11IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S11IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S11IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S11IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S11IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S11IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S11IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S11IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S11IDFE-XBPM:CM1ds:PositionOffsetX / S11IDFE-XBPM:CM1ds:PositionOffsetX
S11IDFE-XBPM:CM1ds:PositionOffsetY / S11IDFE-XBPM:CM1ds:PositionOffsetY
S11IDFE-XBPM:CM1ds:PositionScaleX / S11IDFE-XBPM:CM1ds:PositionScaleX
S11IDFE-XBPM:CM1ds:PositionScaleY / S11IDFE-XBPM:CM1ds:PositionScaleY
S11IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S11IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S11IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S11IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S11IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S11IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S11IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S11IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S11IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S11IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S11IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S11IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S11IDFE-XBPM:CM1us:PositionOffsetX / S11IDFE-XBPM:CM1us:PositionOffsetX
S11IDFE-XBPM:CM1us:PositionOffsetY / S11IDFE-XBPM:CM1us:PositionOffsetY
S11IDFE-XBPM:CM1us:PositionScaleX / S11IDFE-XBPM:CM1us:PositionScaleX
S11IDFE-XBPM:CM1us:PositionScaleY / S11IDFE-XBPM:CM1us:PositionScaleY
S11IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S11IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S11IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S11IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S11IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S11IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S11IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S11IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S11IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S11IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S11IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S11IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S11IDFE-XBPM:CM2ds:PositionOffsetX / S11IDFE-XBPM:CM2ds:PositionOffsetX
S11IDFE-XBPM:CM2ds:PositionOffsetY / S11IDFE-XBPM:CM2ds:PositionOffsetY
S11IDFE-XBPM:CM2ds:PositionScaleX / S11IDFE-XBPM:CM2ds:PositionScaleX
S11IDFE-XBPM:CM2ds:PositionScaleY / S11IDFE-XBPM:CM2ds:PositionScaleY
S11IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S11IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S11IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S11IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S11IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S11IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S11IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S11IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S11IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S11IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S11IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S11IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S11IDFE-XBPM:CM2us:PositionOffsetX / S11IDFE-XBPM:CM2us:PositionOffsetX
S11IDFE-XBPM:CM2us:PositionOffsetY / S11IDFE-XBPM:CM2us:PositionOffsetY
S11IDFE-XBPM:CM2us:PositionScaleX / S11IDFE-XBPM:CM2us:PositionScaleX
S11IDFE-XBPM:CM2us:PositionScaleY / S11IDFE-XBPM:CM2us:PositionScaleY
S11IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S11IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S11IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S11IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S11IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S11IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S11IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S11IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S11IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S11IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S11IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S11IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S11IDFE-XBPM:CM3ds:PositionOffsetX / S11IDFE-XBPM:CM3ds:PositionOffsetX
S11IDFE-XBPM:CM3ds:PositionOffsetY / S11IDFE-XBPM:CM3ds:PositionOffsetY
S11IDFE-XBPM:CM3ds:PositionScaleX / S11IDFE-XBPM:CM3ds:PositionScaleX
S11IDFE-XBPM:CM3ds:PositionScaleY / S11IDFE-XBPM:CM3ds:PositionScaleY
S11IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S11IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S11IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S11IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S11IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S11IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S11IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S11IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S11IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S11IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S11IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S11IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S11IDFE-XBPM:CM3us:PositionOffsetX / S11IDFE-XBPM:CM3us:PositionOffsetX
S11IDFE-XBPM:CM3us:PositionOffsetY / S11IDFE-XBPM:CM3us:PositionOffsetY
S11IDFE-XBPM:CM3us:PositionScaleX / S11IDFE-XBPM:CM3us:PositionScaleX
S11IDFE-XBPM:CM3us:PositionScaleY / S11IDFE-XBPM:CM3us:PositionScaleY
S11IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S11IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S11IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S11IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S11IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S11IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S11IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S11IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S11IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S11IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S11IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S11IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S11IDFE-XBPM:CM4ds:PositionOffsetX / S11IDFE-XBPM:CM4ds:PositionOffsetX
S11IDFE-XBPM:CM4ds:PositionOffsetY / S11IDFE-XBPM:CM4ds:PositionOffsetY
S11IDFE-XBPM:CM4ds:PositionScaleX / S11IDFE-XBPM:CM4ds:PositionScaleX
S11IDFE-XBPM:CM4ds:PositionScaleY / S11IDFE-XBPM:CM4ds:PositionScaleY
S11IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S11IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S11IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S11IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S11IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S11IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S11IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S11IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S11IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S11IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S11IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S11IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S11IDFE-XBPM:CM4us:PositionOffsetX / S11IDFE-XBPM:CM4us:PositionOffsetX
S11IDFE-XBPM:CM4us:PositionOffsetY / S11IDFE-XBPM:CM4us:PositionOffsetY
S11IDFE-XBPM:CM4us:PositionScaleX / S11IDFE-XBPM:CM4us:PositionScaleX
S11IDFE-XBPM:CM4us:PositionScaleY / S11IDFE-XBPM:CM4us:PositionScaleY
S11IDFE-XBPM:P1ds:BMcUsedM / S11IDFE-XBPM:P1ds:BMcUsedM
S11IDFE-XBPM:P1ds:GapUsedC / S11IDFE-XBPM:P1ds:GapUsedC
S11IDFE-XBPM:P1ds:Wx1UsedM / S11IDFE-XBPM:P1ds:Wx1UsedM
S11IDFE-XBPM:P1ds:Wx2UsedM / S11IDFE-XBPM:P1ds:Wx2UsedM
S11IDFE-XBPM:P1ds:Wx3UsedM / S11IDFE-XBPM:P1ds:Wx3UsedM
S11IDFE-XBPM:P1ds:Wy1UsedM / S11IDFE-XBPM:P1ds:Wy1UsedM
S11IDFE-XBPM:P1ds:Wy2UsedM / S11IDFE-XBPM:P1ds:Wy2UsedM
S11IDFE-XBPM:P1ds:Wy3UsedM / S11IDFE-XBPM:P1ds:Wy3UsedM
S11IDFE-XBPM:P1ds:x / S11IDFE-XBPM:P1ds:x
S11IDFE-XBPM:P1ds:x:CalFactor1M / S11IDFE-XBPM:P1ds:x:CalFactor1M
S11IDFE-XBPM:P1ds:x:CalFactor2M / S11IDFE-XBPM:P1ds:x:CalFactor2M
S11IDFE-XBPM:P1ds:x:LowPass1sM / S11IDFE-XBPM:P1ds:x:LowPass1sM
S11IDFE-XBPM:P1ds:x:LowPass8sM / S11IDFE-XBPM:P1ds:x:LowPass8sM
S11IDFE-XBPM:P1ds:x:LowPass64sM / S11IDFE-XBPM:P1ds:x:LowPass64sM
S11IDFE-XBPM:P1ds:x:Offset1M / S11IDFE-XBPM:P1ds:x:Offset1M
S11IDFE-XBPM:P1ds:x:Offset2M / S11IDFE-XBPM:P1ds:x:Offset2M
S11IDFE-XBPM:P1ds:x:ResolutionM / S11IDFE-XBPM:P1ds:x:ResolutionM
S11IDFE-XBPM:P1ds:x:Resolution1sM / S11IDFE-XBPM:P1ds:x:Resolution1sM
S11IDFE-XBPM:P1ds:x:Resolution8sM / S11IDFE-XBPM:P1ds:x:Resolution8sM
S11IDFE-XBPM:P1ds:x:Resolution64sM / S11IDFE-XBPM:P1ds:x:Resolution64sM
S11IDFE-XBPM:P1ds:x:StdDevM / S11IDFE-XBPM:P1ds:x:StdDevM
S11IDFE-XBPM:P1ds:x:StdDev1sM / S11IDFE-XBPM:P1ds:x:StdDev1sM
S11IDFE-XBPM:P1ds:x:StdDev8sM / S11IDFE-XBPM:P1ds:x:StdDev8sM
S11IDFE-XBPM:P1ds:x:StdDev64sM / S11IDFE-XBPM:P1ds:x:StdDev64sM
S11IDFE-XBPM:P1ds:x1:LowPass1sM / S11IDFE-XBPM:P1ds:x1:LowPass1sM
S11IDFE-XBPM:P1ds:x1:LowPass8sM / S11IDFE-XBPM:P1ds:x1:LowPass8sM
S11IDFE-XBPM:P1ds:x1:LowPass64sM / S11IDFE-XBPM:P1ds:x1:LowPass64sM
S11IDFE-XBPM:P1ds:x2:LowPass1sM / S11IDFE-XBPM:P1ds:x2:LowPass1sM
S11IDFE-XBPM:P1ds:x2:LowPass8sM / S11IDFE-XBPM:P1ds:x2:LowPass8sM
S11IDFE-XBPM:P1ds:x2:LowPass64sM / S11IDFE-XBPM:P1ds:x2:LowPass64sM
S11IDFE-XBPM:P1ds:y / S11IDFE-XBPM:P1ds:y
S11IDFE-XBPM:P1ds:y:CalFactor1M / S11IDFE-XBPM:P1ds:y:CalFactor1M
S11IDFE-XBPM:P1ds:y:CalFactor2M / S11IDFE-XBPM:P1ds:y:CalFactor2M
S11IDFE-XBPM:P1ds:y:LowPass1sM / S11IDFE-XBPM:P1ds:y:LowPass1sM
S11IDFE-XBPM:P1ds:y:LowPass8sM / S11IDFE-XBPM:P1ds:y:LowPass8sM
S11IDFE-XBPM:P1ds:y:LowPass64sM / S11IDFE-XBPM:P1ds:y:LowPass64sM
S11IDFE-XBPM:P1ds:y:Offset1M / S11IDFE-XBPM:P1ds:y:Offset1M
S11IDFE-XBPM:P1ds:y:Offset2M / S11IDFE-XBPM:P1ds:y:Offset2M
S11IDFE-XBPM:P1ds:y:ResolutionM / S11IDFE-XBPM:P1ds:y:ResolutionM
S11IDFE-XBPM:P1ds:y:Resolution1sM / S11IDFE-XBPM:P1ds:y:Resolution1sM
S11IDFE-XBPM:P1ds:y:Resolution8sM / S11IDFE-XBPM:P1ds:y:Resolution8sM
S11IDFE-XBPM:P1ds:y:Resolution64sM / S11IDFE-XBPM:P1ds:y:Resolution64sM
S11IDFE-XBPM:P1ds:y:StdDevM / S11IDFE-XBPM:P1ds:y:StdDevM
S11IDFE-XBPM:P1ds:y:StdDev1sM / S11IDFE-XBPM:P1ds:y:StdDev1sM
S11IDFE-XBPM:P1ds:y:StdDev8sM / S11IDFE-XBPM:P1ds:y:StdDev8sM
S11IDFE-XBPM:P1ds:y:StdDev64sM / S11IDFE-XBPM:P1ds:y:StdDev64sM
S11IDFE-XBPM:P1ds:y1:LowPass1sM / S11IDFE-XBPM:P1ds:y1:LowPass1sM
S11IDFE-XBPM:P1ds:y1:LowPass8sM / S11IDFE-XBPM:P1ds:y1:LowPass8sM
S11IDFE-XBPM:P1ds:y1:LowPass64sM / S11IDFE-XBPM:P1ds:y1:LowPass64sM
S11IDFE-XBPM:P1ds:y2:LowPass1sM / S11IDFE-XBPM:P1ds:y2:LowPass1sM
S11IDFE-XBPM:P1ds:y2:LowPass8sM / S11IDFE-XBPM:P1ds:y2:LowPass8sM
S11IDFE-XBPM:P1ds:y2:LowPass64sM / S11IDFE-XBPM:P1ds:y2:LowPass64sM
S11IDFE-XBPM:P1us:BMcUsedM / S11IDFE-XBPM:P1us:BMcUsedM
S11IDFE-XBPM:P1us:GapUsedC / S11IDFE-XBPM:P1us:GapUsedC
S11IDFE-XBPM:P1us:Wx1UsedM / S11IDFE-XBPM:P1us:Wx1UsedM
S11IDFE-XBPM:P1us:Wx2UsedM / S11IDFE-XBPM:P1us:Wx2UsedM
S11IDFE-XBPM:P1us:Wx3UsedM / S11IDFE-XBPM:P1us:Wx3UsedM
S11IDFE-XBPM:P1us:Wy1UsedM / S11IDFE-XBPM:P1us:Wy1UsedM
S11IDFE-XBPM:P1us:Wy2UsedM / S11IDFE-XBPM:P1us:Wy2UsedM
S11IDFE-XBPM:P1us:Wy3UsedM / S11IDFE-XBPM:P1us:Wy3UsedM
S11IDFE-XBPM:P1us:x / S11IDFE-XBPM:P1us:x
S11IDFE-XBPM:P1us:x:CalFactor1M / S11IDFE-XBPM:P1us:x:CalFactor1M
S11IDFE-XBPM:P1us:x:CalFactor2M / S11IDFE-XBPM:P1us:x:CalFactor2M
S11IDFE-XBPM:P1us:x:LowPass1sM / S11IDFE-XBPM:P1us:x:LowPass1sM
S11IDFE-XBPM:P1us:x:LowPass8sM / S11IDFE-XBPM:P1us:x:LowPass8sM
S11IDFE-XBPM:P1us:x:LowPass64sM / S11IDFE-XBPM:P1us:x:LowPass64sM
S11IDFE-XBPM:P1us:x:Offset1M / S11IDFE-XBPM:P1us:x:Offset1M
S11IDFE-XBPM:P1us:x:Offset2M / S11IDFE-XBPM:P1us:x:Offset2M
S11IDFE-XBPM:P1us:x:ResolutionM / S11IDFE-XBPM:P1us:x:ResolutionM
S11IDFE-XBPM:P1us:x:Resolution1sM / S11IDFE-XBPM:P1us:x:Resolution1sM
S11IDFE-XBPM:P1us:x:Resolution8sM / S11IDFE-XBPM:P1us:x:Resolution8sM
S11IDFE-XBPM:P1us:x:Resolution64sM / S11IDFE-XBPM:P1us:x:Resolution64sM
S11IDFE-XBPM:P1us:x:StdDevM / S11IDFE-XBPM:P1us:x:StdDevM
S11IDFE-XBPM:P1us:x:StdDev1sM / S11IDFE-XBPM:P1us:x:StdDev1sM
S11IDFE-XBPM:P1us:x:StdDev8sM / S11IDFE-XBPM:P1us:x:StdDev8sM
S11IDFE-XBPM:P1us:x:StdDev64sM / S11IDFE-XBPM:P1us:x:StdDev64sM
S11IDFE-XBPM:P1us:x1:LowPass1sM / S11IDFE-XBPM:P1us:x1:LowPass1sM
S11IDFE-XBPM:P1us:x1:LowPass8sM / S11IDFE-XBPM:P1us:x1:LowPass8sM
S11IDFE-XBPM:P1us:x1:LowPass64sM / S11IDFE-XBPM:P1us:x1:LowPass64sM
S11IDFE-XBPM:P1us:x2:LowPass1sM / S11IDFE-XBPM:P1us:x2:LowPass1sM
S11IDFE-XBPM:P1us:x2:LowPass8sM / S11IDFE-XBPM:P1us:x2:LowPass8sM
S11IDFE-XBPM:P1us:x2:LowPass64sM / S11IDFE-XBPM:P1us:x2:LowPass64sM
S11IDFE-XBPM:P1us:y / S11IDFE-XBPM:P1us:y
S11IDFE-XBPM:P1us:y:CalFactor1M / S11IDFE-XBPM:P1us:y:CalFactor1M
S11IDFE-XBPM:P1us:y:CalFactor2M / S11IDFE-XBPM:P1us:y:CalFactor2M
S11IDFE-XBPM:P1us:y:LowPass1sM / S11IDFE-XBPM:P1us:y:LowPass1sM
S11IDFE-XBPM:P1us:y:LowPass8sM / S11IDFE-XBPM:P1us:y:LowPass8sM
S11IDFE-XBPM:P1us:y:LowPass64sM / S11IDFE-XBPM:P1us:y:LowPass64sM
S11IDFE-XBPM:P1us:y:Offset1M / S11IDFE-XBPM:P1us:y:Offset1M
S11IDFE-XBPM:P1us:y:Offset2M / S11IDFE-XBPM:P1us:y:Offset2M
S11IDFE-XBPM:P1us:y:ResolutionM / S11IDFE-XBPM:P1us:y:ResolutionM
S11IDFE-XBPM:P1us:y:Resolution1sM / S11IDFE-XBPM:P1us:y:Resolution1sM
S11IDFE-XBPM:P1us:y:Resolution8sM / S11IDFE-XBPM:P1us:y:Resolution8sM
S11IDFE-XBPM:P1us:y:Resolution64sM / S11IDFE-XBPM:P1us:y:Resolution64sM
S11IDFE-XBPM:P1us:y:StdDevM / S11IDFE-XBPM:P1us:y:StdDevM
S11IDFE-XBPM:P1us:y:StdDev1sM / S11IDFE-XBPM:P1us:y:StdDev1sM
S11IDFE-XBPM:P1us:y:StdDev8sM / S11IDFE-XBPM:P1us:y:StdDev8sM
S11IDFE-XBPM:P1us:y:StdDev64sM / S11IDFE-XBPM:P1us:y:StdDev64sM
S11IDFE-XBPM:P1us:y1:LowPass1sM / S11IDFE-XBPM:P1us:y1:LowPass1sM
S11IDFE-XBPM:P1us:y1:LowPass8sM / S11IDFE-XBPM:P1us:y1:LowPass8sM
S11IDFE-XBPM:P1us:y1:LowPass64sM / S11IDFE-XBPM:P1us:y1:LowPass64sM
S11IDFE-XBPM:P1us:y2:LowPass1sM / S11IDFE-XBPM:P1us:y2:LowPass1sM
S11IDFE-XBPM:P1us:y2:LowPass8sM / S11IDFE-XBPM:P1us:y2:LowPass8sM
S11IDFE-XBPM:P1us:y2:LowPass64sM / S11IDFE-XBPM:P1us:y2:LowPass64sM
S11IDFE-XBPM:P2ds:GapUsedC / S11IDFE-XBPM:P2ds:GapUsedC
S11IDFE-XBPM:P2ds:XCalM / S11IDFE-XBPM:P2ds:XCalM
S11IDFE-XBPM:P2ds:YCalM / S11IDFE-XBPM:P2ds:YCalM
S11IDFE-XBPM:P2ds:x:CalFactorM / S11IDFE-XBPM:P2ds:x:CalFactorM
S11IDFE-XBPM:P2ds:x:OffsetM / S11IDFE-XBPM:P2ds:x:OffsetM
S11IDFE-XBPM:P2ds:y:CalFactorM / S11IDFE-XBPM:P2ds:y:CalFactorM
S11IDFE-XBPM:P2ds:y:OffsetM / S11IDFE-XBPM:P2ds:y:OffsetM
S11IDFE-XBPM:P2us:GapUsedC / S11IDFE-XBPM:P2us:GapUsedC
S11IDFE-XBPM:P2us:XCalM / S11IDFE-XBPM:P2us:XCalM
S11IDFE-XBPM:P2us:YCalM / S11IDFE-XBPM:P2us:YCalM
S11IDFE-XBPM:P2us:x:CalFactorM / S11IDFE-XBPM:P2us:x:CalFactorM
S11IDFE-XBPM:P2us:x:OffsetM / S11IDFE-XBPM:P2us:x:OffsetM
S11IDFE-XBPM:P2us:y:CalFactorM / S11IDFE-XBPM:P2us:y:CalFactorM
S11IDFE-XBPM:P2us:y:OffsetM / S11IDFE-XBPM:P2us:y:OffsetM
S12BMFE-XBPM:P1:AM / S12BMFE-XBPM:P1:AM
S12BMFE-XBPM:P1:BM / S12BMFE-XBPM:P1:BM
S12BMFE-XBPM:P1:y / S12BMFE-XBPM:P1:y
S12BMFE-XBPM:P1:y:LowPass1sM / S12BMFE-XBPM:P1:y:LowPass1sM
S12BMFE-XBPM:P1:y:LowPass8sM / S12BMFE-XBPM:P1:y:LowPass8sM
S12BMFE-XBPM:P1:y:LowPass64sM / S12BMFE-XBPM:P1:y:LowPass64sM
S12BMFE-XBPM:P1:y:StdDevM / S12BMFE-XBPM:P1:y:StdDevM
S12BMFE-XBPM:P1:y:StdDev1sM / S12BMFE-XBPM:P1:y:StdDev1sM
S12BMFE-XBPM:P1:y:StdDev8sM / S12BMFE-XBPM:P1:y:StdDev8sM
S12BMFE-XBPM:P1:y:StdDev64sM / S12BMFE-XBPM:P1:y:StdDev64sM
S12BMFE-XBPM:P2:AM / S12BMFE-XBPM:P2:AM
S12BMFE-XBPM:P2:BM / S12BMFE-XBPM:P2:BM
S12BMFE-XBPM:P2:y / S12BMFE-XBPM:P2:y
S12BMFE-XBPM:P2:y:LowPass1sM / S12BMFE-XBPM:P2:y:LowPass1sM
S12BMFE-XBPM:P2:y:LowPass8sM / S12BMFE-XBPM:P2:y:LowPass8sM
S12BMFE-XBPM:P2:y:LowPass64sM / S12BMFE-XBPM:P2:y:LowPass64sM
S12BMFE-XBPM:P2:y:StdDevM / S12BMFE-XBPM:P2:y:StdDevM
S12BMFE-XBPM:P2:y:StdDev1sM / S12BMFE-XBPM:P2:y:StdDev1sM
S12BMFE-XBPM:P2:y:StdDev8sM / S12BMFE-XBPM:P2:y:StdDev8sM
S12BMFE-XBPM:P2:y:StdDev64sM / S12BMFE-XBPM:P2:y:StdDev64sM
S12IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S12IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S12IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S12IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S12IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S12IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S12IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S12IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S12IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S12IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S12IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S12IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S12IDFE-XBPM:CM1ds:PositionOffsetX / S12IDFE-XBPM:CM1ds:PositionOffsetX
S12IDFE-XBPM:CM1ds:PositionOffsetY / S12IDFE-XBPM:CM1ds:PositionOffsetY
S12IDFE-XBPM:CM1ds:PositionScaleX / S12IDFE-XBPM:CM1ds:PositionScaleX
S12IDFE-XBPM:CM1ds:PositionScaleY / S12IDFE-XBPM:CM1ds:PositionScaleY
S12IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S12IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S12IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S12IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S12IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S12IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S12IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S12IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S12IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S12IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S12IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S12IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S12IDFE-XBPM:CM1us:PositionOffsetX / S12IDFE-XBPM:CM1us:PositionOffsetX
S12IDFE-XBPM:CM1us:PositionOffsetY / S12IDFE-XBPM:CM1us:PositionOffsetY
S12IDFE-XBPM:CM1us:PositionScaleX / S12IDFE-XBPM:CM1us:PositionScaleX
S12IDFE-XBPM:CM1us:PositionScaleY / S12IDFE-XBPM:CM1us:PositionScaleY
S12IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S12IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S12IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S12IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S12IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S12IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S12IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S12IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S12IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S12IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S12IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S12IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S12IDFE-XBPM:CM2ds:PositionOffsetX / S12IDFE-XBPM:CM2ds:PositionOffsetX
S12IDFE-XBPM:CM2ds:PositionOffsetY / S12IDFE-XBPM:CM2ds:PositionOffsetY
S12IDFE-XBPM:CM2ds:PositionScaleX / S12IDFE-XBPM:CM2ds:PositionScaleX
S12IDFE-XBPM:CM2ds:PositionScaleY / S12IDFE-XBPM:CM2ds:PositionScaleY
S12IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S12IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S12IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S12IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S12IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S12IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S12IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S12IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S12IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S12IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S12IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S12IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S12IDFE-XBPM:CM2us:PositionOffsetX / S12IDFE-XBPM:CM2us:PositionOffsetX
S12IDFE-XBPM:CM2us:PositionOffsetY / S12IDFE-XBPM:CM2us:PositionOffsetY
S12IDFE-XBPM:CM2us:PositionScaleX / S12IDFE-XBPM:CM2us:PositionScaleX
S12IDFE-XBPM:CM2us:PositionScaleY / S12IDFE-XBPM:CM2us:PositionScaleY
S12IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S12IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S12IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S12IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S12IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S12IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S12IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S12IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S12IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S12IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S12IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S12IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S12IDFE-XBPM:CM3ds:PositionOffsetX / S12IDFE-XBPM:CM3ds:PositionOffsetX
S12IDFE-XBPM:CM3ds:PositionOffsetY / S12IDFE-XBPM:CM3ds:PositionOffsetY
S12IDFE-XBPM:CM3ds:PositionScaleX / S12IDFE-XBPM:CM3ds:PositionScaleX
S12IDFE-XBPM:CM3ds:PositionScaleY / S12IDFE-XBPM:CM3ds:PositionScaleY
S12IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S12IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S12IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S12IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S12IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S12IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S12IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S12IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S12IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S12IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S12IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S12IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S12IDFE-XBPM:CM3us:PositionOffsetX / S12IDFE-XBPM:CM3us:PositionOffsetX
S12IDFE-XBPM:CM3us:PositionOffsetY / S12IDFE-XBPM:CM3us:PositionOffsetY
S12IDFE-XBPM:CM3us:PositionScaleX / S12IDFE-XBPM:CM3us:PositionScaleX
S12IDFE-XBPM:CM3us:PositionScaleY / S12IDFE-XBPM:CM3us:PositionScaleY
S12IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S12IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S12IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S12IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S12IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S12IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S12IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S12IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S12IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S12IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S12IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S12IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S12IDFE-XBPM:CM4ds:PositionOffsetX / S12IDFE-XBPM:CM4ds:PositionOffsetX
S12IDFE-XBPM:CM4ds:PositionOffsetY / S12IDFE-XBPM:CM4ds:PositionOffsetY
S12IDFE-XBPM:CM4ds:PositionScaleX / S12IDFE-XBPM:CM4ds:PositionScaleX
S12IDFE-XBPM:CM4ds:PositionScaleY / S12IDFE-XBPM:CM4ds:PositionScaleY
S12IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S12IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S12IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S12IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S12IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S12IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S12IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S12IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S12IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S12IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S12IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S12IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S12IDFE-XBPM:CM4us:PositionOffsetX / S12IDFE-XBPM:CM4us:PositionOffsetX
S12IDFE-XBPM:CM4us:PositionOffsetY / S12IDFE-XBPM:CM4us:PositionOffsetY
S12IDFE-XBPM:CM4us:PositionScaleX / S12IDFE-XBPM:CM4us:PositionScaleX
S12IDFE-XBPM:CM4us:PositionScaleY / S12IDFE-XBPM:CM4us:PositionScaleY
S12IDFE-XBPM:P1ds:BMcUsedM / S12IDFE-XBPM:P1ds:BMcUsedM
S12IDFE-XBPM:P1ds:GapUsedC / S12IDFE-XBPM:P1ds:GapUsedC
S12IDFE-XBPM:P1ds:Wx1UsedM / S12IDFE-XBPM:P1ds:Wx1UsedM
S12IDFE-XBPM:P1ds:Wx2UsedM / S12IDFE-XBPM:P1ds:Wx2UsedM
S12IDFE-XBPM:P1ds:Wx3UsedM / S12IDFE-XBPM:P1ds:Wx3UsedM
S12IDFE-XBPM:P1ds:Wy1UsedM / S12IDFE-XBPM:P1ds:Wy1UsedM
S12IDFE-XBPM:P1ds:Wy2UsedM / S12IDFE-XBPM:P1ds:Wy2UsedM
S12IDFE-XBPM:P1ds:Wy3UsedM / S12IDFE-XBPM:P1ds:Wy3UsedM
S12IDFE-XBPM:P1ds:x / S12IDFE-XBPM:P1ds:x
S12IDFE-XBPM:P1ds:x:CalFactor1M / S12IDFE-XBPM:P1ds:x:CalFactor1M
S12IDFE-XBPM:P1ds:x:CalFactor2M / S12IDFE-XBPM:P1ds:x:CalFactor2M
S12IDFE-XBPM:P1ds:x:LowPass1sM / S12IDFE-XBPM:P1ds:x:LowPass1sM
S12IDFE-XBPM:P1ds:x:LowPass8sM / S12IDFE-XBPM:P1ds:x:LowPass8sM
S12IDFE-XBPM:P1ds:x:LowPass64sM / S12IDFE-XBPM:P1ds:x:LowPass64sM
S12IDFE-XBPM:P1ds:x:Offset1M / S12IDFE-XBPM:P1ds:x:Offset1M
S12IDFE-XBPM:P1ds:x:Offset2M / S12IDFE-XBPM:P1ds:x:Offset2M
S12IDFE-XBPM:P1ds:x:ResolutionM / S12IDFE-XBPM:P1ds:x:ResolutionM
S12IDFE-XBPM:P1ds:x:Resolution1sM / S12IDFE-XBPM:P1ds:x:Resolution1sM
S12IDFE-XBPM:P1ds:x:Resolution8sM / S12IDFE-XBPM:P1ds:x:Resolution8sM
S12IDFE-XBPM:P1ds:x:Resolution64sM / S12IDFE-XBPM:P1ds:x:Resolution64sM
S12IDFE-XBPM:P1ds:x:StdDevM / S12IDFE-XBPM:P1ds:x:StdDevM
S12IDFE-XBPM:P1ds:x:StdDev1sM / S12IDFE-XBPM:P1ds:x:StdDev1sM
S12IDFE-XBPM:P1ds:x:StdDev8sM / S12IDFE-XBPM:P1ds:x:StdDev8sM
S12IDFE-XBPM:P1ds:x:StdDev64sM / S12IDFE-XBPM:P1ds:x:StdDev64sM
S12IDFE-XBPM:P1ds:x1:LowPass1sM / S12IDFE-XBPM:P1ds:x1:LowPass1sM
S12IDFE-XBPM:P1ds:x1:LowPass8sM / S12IDFE-XBPM:P1ds:x1:LowPass8sM
S12IDFE-XBPM:P1ds:x1:LowPass64sM / S12IDFE-XBPM:P1ds:x1:LowPass64sM
S12IDFE-XBPM:P1ds:x2:LowPass1sM / S12IDFE-XBPM:P1ds:x2:LowPass1sM
S12IDFE-XBPM:P1ds:x2:LowPass8sM / S12IDFE-XBPM:P1ds:x2:LowPass8sM
S12IDFE-XBPM:P1ds:x2:LowPass64sM / S12IDFE-XBPM:P1ds:x2:LowPass64sM
S12IDFE-XBPM:P1ds:y / S12IDFE-XBPM:P1ds:y
S12IDFE-XBPM:P1ds:y:CalFactor1M / S12IDFE-XBPM:P1ds:y:CalFactor1M
S12IDFE-XBPM:P1ds:y:CalFactor2M / S12IDFE-XBPM:P1ds:y:CalFactor2M
S12IDFE-XBPM:P1ds:y:LowPass1sM / S12IDFE-XBPM:P1ds:y:LowPass1sM
S12IDFE-XBPM:P1ds:y:LowPass8sM / S12IDFE-XBPM:P1ds:y:LowPass8sM
S12IDFE-XBPM:P1ds:y:LowPass64sM / S12IDFE-XBPM:P1ds:y:LowPass64sM
S12IDFE-XBPM:P1ds:y:Offset1M / S12IDFE-XBPM:P1ds:y:Offset1M
S12IDFE-XBPM:P1ds:y:Offset2M / S12IDFE-XBPM:P1ds:y:Offset2M
S12IDFE-XBPM:P1ds:y:ResolutionM / S12IDFE-XBPM:P1ds:y:ResolutionM
S12IDFE-XBPM:P1ds:y:Resolution1sM / S12IDFE-XBPM:P1ds:y:Resolution1sM
S12IDFE-XBPM:P1ds:y:Resolution8sM / S12IDFE-XBPM:P1ds:y:Resolution8sM
S12IDFE-XBPM:P1ds:y:Resolution64sM / S12IDFE-XBPM:P1ds:y:Resolution64sM
S12IDFE-XBPM:P1ds:y:StdDevM / S12IDFE-XBPM:P1ds:y:StdDevM
S12IDFE-XBPM:P1ds:y:StdDev1sM / S12IDFE-XBPM:P1ds:y:StdDev1sM
S12IDFE-XBPM:P1ds:y:StdDev8sM / S12IDFE-XBPM:P1ds:y:StdDev8sM
S12IDFE-XBPM:P1ds:y:StdDev64sM / S12IDFE-XBPM:P1ds:y:StdDev64sM
S12IDFE-XBPM:P1ds:y1:LowPass1sM / S12IDFE-XBPM:P1ds:y1:LowPass1sM
S12IDFE-XBPM:P1ds:y1:LowPass8sM / S12IDFE-XBPM:P1ds:y1:LowPass8sM
S12IDFE-XBPM:P1ds:y1:LowPass64sM / S12IDFE-XBPM:P1ds:y1:LowPass64sM
S12IDFE-XBPM:P1ds:y2:LowPass1sM / S12IDFE-XBPM:P1ds:y2:LowPass1sM
S12IDFE-XBPM:P1ds:y2:LowPass8sM / S12IDFE-XBPM:P1ds:y2:LowPass8sM
S12IDFE-XBPM:P1ds:y2:LowPass64sM / S12IDFE-XBPM:P1ds:y2:LowPass64sM
S12IDFE-XBPM:P1us:BMcUsedM / S12IDFE-XBPM:P1us:BMcUsedM
S12IDFE-XBPM:P1us:GapUsedC / S12IDFE-XBPM:P1us:GapUsedC
S12IDFE-XBPM:P1us:Wx1UsedM / S12IDFE-XBPM:P1us:Wx1UsedM
S12IDFE-XBPM:P1us:Wx2UsedM / S12IDFE-XBPM:P1us:Wx2UsedM
S12IDFE-XBPM:P1us:Wx3UsedM / S12IDFE-XBPM:P1us:Wx3UsedM
S12IDFE-XBPM:P1us:Wy1UsedM / S12IDFE-XBPM:P1us:Wy1UsedM
S12IDFE-XBPM:P1us:Wy2UsedM / S12IDFE-XBPM:P1us:Wy2UsedM
S12IDFE-XBPM:P1us:Wy3UsedM / S12IDFE-XBPM:P1us:Wy3UsedM
S12IDFE-XBPM:P1us:x / S12IDFE-XBPM:P1us:x
S12IDFE-XBPM:P1us:x:CalFactor1M / S12IDFE-XBPM:P1us:x:CalFactor1M
S12IDFE-XBPM:P1us:x:CalFactor2M / S12IDFE-XBPM:P1us:x:CalFactor2M
S12IDFE-XBPM:P1us:x:LowPass1sM / S12IDFE-XBPM:P1us:x:LowPass1sM
S12IDFE-XBPM:P1us:x:LowPass8sM / S12IDFE-XBPM:P1us:x:LowPass8sM
S12IDFE-XBPM:P1us:x:LowPass64sM / S12IDFE-XBPM:P1us:x:LowPass64sM
S12IDFE-XBPM:P1us:x:Offset1M / S12IDFE-XBPM:P1us:x:Offset1M
S12IDFE-XBPM:P1us:x:Offset2M / S12IDFE-XBPM:P1us:x:Offset2M
S12IDFE-XBPM:P1us:x:ResolutionM / S12IDFE-XBPM:P1us:x:ResolutionM
S12IDFE-XBPM:P1us:x:Resolution1sM / S12IDFE-XBPM:P1us:x:Resolution1sM
S12IDFE-XBPM:P1us:x:Resolution8sM / S12IDFE-XBPM:P1us:x:Resolution8sM
S12IDFE-XBPM:P1us:x:Resolution64sM / S12IDFE-XBPM:P1us:x:Resolution64sM
S12IDFE-XBPM:P1us:x:StdDevM / S12IDFE-XBPM:P1us:x:StdDevM
S12IDFE-XBPM:P1us:x:StdDev1sM / S12IDFE-XBPM:P1us:x:StdDev1sM
S12IDFE-XBPM:P1us:x:StdDev8sM / S12IDFE-XBPM:P1us:x:StdDev8sM
S12IDFE-XBPM:P1us:x:StdDev64sM / S12IDFE-XBPM:P1us:x:StdDev64sM
S12IDFE-XBPM:P1us:x1:LowPass1sM / S12IDFE-XBPM:P1us:x1:LowPass1sM
S12IDFE-XBPM:P1us:x1:LowPass8sM / S12IDFE-XBPM:P1us:x1:LowPass8sM
S12IDFE-XBPM:P1us:x1:LowPass64sM / S12IDFE-XBPM:P1us:x1:LowPass64sM
S12IDFE-XBPM:P1us:x2:LowPass1sM / S12IDFE-XBPM:P1us:x2:LowPass1sM
S12IDFE-XBPM:P1us:x2:LowPass8sM / S12IDFE-XBPM:P1us:x2:LowPass8sM
S12IDFE-XBPM:P1us:x2:LowPass64sM / S12IDFE-XBPM:P1us:x2:LowPass64sM
S12IDFE-XBPM:P1us:y / S12IDFE-XBPM:P1us:y
S12IDFE-XBPM:P1us:y:CalFactor1M / S12IDFE-XBPM:P1us:y:CalFactor1M
S12IDFE-XBPM:P1us:y:CalFactor2M / S12IDFE-XBPM:P1us:y:CalFactor2M
S12IDFE-XBPM:P1us:y:LowPass1sM / S12IDFE-XBPM:P1us:y:LowPass1sM
S12IDFE-XBPM:P1us:y:LowPass8sM / S12IDFE-XBPM:P1us:y:LowPass8sM
S12IDFE-XBPM:P1us:y:LowPass64sM / S12IDFE-XBPM:P1us:y:LowPass64sM
S12IDFE-XBPM:P1us:y:Offset1M / S12IDFE-XBPM:P1us:y:Offset1M
S12IDFE-XBPM:P1us:y:Offset2M / S12IDFE-XBPM:P1us:y:Offset2M
S12IDFE-XBPM:P1us:y:ResolutionM / S12IDFE-XBPM:P1us:y:ResolutionM
S12IDFE-XBPM:P1us:y:Resolution1sM / S12IDFE-XBPM:P1us:y:Resolution1sM
S12IDFE-XBPM:P1us:y:Resolution8sM / S12IDFE-XBPM:P1us:y:Resolution8sM
S12IDFE-XBPM:P1us:y:Resolution64sM / S12IDFE-XBPM:P1us:y:Resolution64sM
S12IDFE-XBPM:P1us:y:StdDevM / S12IDFE-XBPM:P1us:y:StdDevM
S12IDFE-XBPM:P1us:y:StdDev1sM / S12IDFE-XBPM:P1us:y:StdDev1sM
S12IDFE-XBPM:P1us:y:StdDev8sM / S12IDFE-XBPM:P1us:y:StdDev8sM
S12IDFE-XBPM:P1us:y:StdDev64sM / S12IDFE-XBPM:P1us:y:StdDev64sM
S12IDFE-XBPM:P1us:y1:LowPass1sM / S12IDFE-XBPM:P1us:y1:LowPass1sM
S12IDFE-XBPM:P1us:y1:LowPass8sM / S12IDFE-XBPM:P1us:y1:LowPass8sM
S12IDFE-XBPM:P1us:y1:LowPass64sM / S12IDFE-XBPM:P1us:y1:LowPass64sM
S12IDFE-XBPM:P1us:y2:LowPass1sM / S12IDFE-XBPM:P1us:y2:LowPass1sM
S12IDFE-XBPM:P1us:y2:LowPass8sM / S12IDFE-XBPM:P1us:y2:LowPass8sM
S12IDFE-XBPM:P1us:y2:LowPass64sM / S12IDFE-XBPM:P1us:y2:LowPass64sM
S12IDFE-XBPM:P2ds:GapUsedC / S12IDFE-XBPM:P2ds:GapUsedC
S12IDFE-XBPM:P2ds:XCalM / S12IDFE-XBPM:P2ds:XCalM
S12IDFE-XBPM:P2ds:YCalM / S12IDFE-XBPM:P2ds:YCalM
S12IDFE-XBPM:P2ds:x:CalFactorM / S12IDFE-XBPM:P2ds:x:CalFactorM
S12IDFE-XBPM:P2ds:x:OffsetM / S12IDFE-XBPM:P2ds:x:OffsetM
S12IDFE-XBPM:P2ds:y:CalFactorM / S12IDFE-XBPM:P2ds:y:CalFactorM
S12IDFE-XBPM:P2ds:y:OffsetM / S12IDFE-XBPM:P2ds:y:OffsetM
S12IDFE-XBPM:P2us:GapUsedC / S12IDFE-XBPM:P2us:GapUsedC
S12IDFE-XBPM:P2us:XCalM / S12IDFE-XBPM:P2us:XCalM
S12IDFE-XBPM:P2us:YCalM / S12IDFE-XBPM:P2us:YCalM
S12IDFE-XBPM:P2us:x:CalFactorM / S12IDFE-XBPM:P2us:x:CalFactorM
S12IDFE-XBPM:P2us:x:OffsetM / S12IDFE-XBPM:P2us:x:OffsetM
S12IDFE-XBPM:P2us:y:CalFactorM / S12IDFE-XBPM:P2us:y:CalFactorM
S12IDFE-XBPM:P2us:y:OffsetM / S12IDFE-XBPM:P2us:y:OffsetM
S13BMFE-XBPM:P1:AM / S13BMFE-XBPM:P1:AM
S13BMFE-XBPM:P1:BM / S13BMFE-XBPM:P1:BM
S13BMFE-XBPM:P1:y / S13BMFE-XBPM:P1:y
S13BMFE-XBPM:P1:y:LowPass1sM / S13BMFE-XBPM:P1:y:LowPass1sM
S13BMFE-XBPM:P1:y:LowPass8sM / S13BMFE-XBPM:P1:y:LowPass8sM
S13BMFE-XBPM:P1:y:LowPass64sM / S13BMFE-XBPM:P1:y:LowPass64sM
S13BMFE-XBPM:P1:y:StdDevM / S13BMFE-XBPM:P1:y:StdDevM
S13BMFE-XBPM:P1:y:StdDev1sM / S13BMFE-XBPM:P1:y:StdDev1sM
S13BMFE-XBPM:P1:y:StdDev8sM / S13BMFE-XBPM:P1:y:StdDev8sM
S13BMFE-XBPM:P1:y:StdDev64sM / S13BMFE-XBPM:P1:y:StdDev64sM
S13BMFE-XBPM:P2:AM / S13BMFE-XBPM:P2:AM
S13BMFE-XBPM:P2:BM / S13BMFE-XBPM:P2:BM
S13BMFE-XBPM:P2:y / S13BMFE-XBPM:P2:y
S13BMFE-XBPM:P2:y:LowPass1sM / S13BMFE-XBPM:P2:y:LowPass1sM
S13BMFE-XBPM:P2:y:LowPass8sM / S13BMFE-XBPM:P2:y:LowPass8sM
S13BMFE-XBPM:P2:y:LowPass64sM / S13BMFE-XBPM:P2:y:LowPass64sM
S13BMFE-XBPM:P2:y:StdDevM / S13BMFE-XBPM:P2:y:StdDevM
S13BMFE-XBPM:P2:y:StdDev1sM / S13BMFE-XBPM:P2:y:StdDev1sM
S13BMFE-XBPM:P2:y:StdDev8sM / S13BMFE-XBPM:P2:y:StdDev8sM
S13BMFE-XBPM:P2:y:StdDev64sM / S13BMFE-XBPM:P2:y:StdDev64sM
S13IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S13IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S13IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S13IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S13IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S13IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S13IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S13IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S13IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S13IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S13IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S13IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S13IDFE-XBPM:CM1ds:PositionOffsetX / S13IDFE-XBPM:CM1ds:PositionOffsetX
S13IDFE-XBPM:CM1ds:PositionOffsetY / S13IDFE-XBPM:CM1ds:PositionOffsetY
S13IDFE-XBPM:CM1ds:PositionScaleX / S13IDFE-XBPM:CM1ds:PositionScaleX
S13IDFE-XBPM:CM1ds:PositionScaleY / S13IDFE-XBPM:CM1ds:PositionScaleY
S13IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S13IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S13IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S13IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S13IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S13IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S13IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S13IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S13IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S13IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S13IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S13IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S13IDFE-XBPM:CM1us:PositionOffsetX / S13IDFE-XBPM:CM1us:PositionOffsetX
S13IDFE-XBPM:CM1us:PositionOffsetY / S13IDFE-XBPM:CM1us:PositionOffsetY
S13IDFE-XBPM:CM1us:PositionScaleX / S13IDFE-XBPM:CM1us:PositionScaleX
S13IDFE-XBPM:CM1us:PositionScaleY / S13IDFE-XBPM:CM1us:PositionScaleY
S13IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S13IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S13IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S13IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S13IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S13IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S13IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S13IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S13IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S13IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S13IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S13IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S13IDFE-XBPM:CM2ds:PositionOffsetX / S13IDFE-XBPM:CM2ds:PositionOffsetX
S13IDFE-XBPM:CM2ds:PositionOffsetY / S13IDFE-XBPM:CM2ds:PositionOffsetY
S13IDFE-XBPM:CM2ds:PositionScaleX / S13IDFE-XBPM:CM2ds:PositionScaleX
S13IDFE-XBPM:CM2ds:PositionScaleY / S13IDFE-XBPM:CM2ds:PositionScaleY
S13IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S13IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S13IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S13IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S13IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S13IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S13IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S13IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S13IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S13IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S13IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S13IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S13IDFE-XBPM:CM2us:PositionOffsetX / S13IDFE-XBPM:CM2us:PositionOffsetX
S13IDFE-XBPM:CM2us:PositionOffsetY / S13IDFE-XBPM:CM2us:PositionOffsetY
S13IDFE-XBPM:CM2us:PositionScaleX / S13IDFE-XBPM:CM2us:PositionScaleX
S13IDFE-XBPM:CM2us:PositionScaleY / S13IDFE-XBPM:CM2us:PositionScaleY
S13IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S13IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S13IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S13IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S13IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S13IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S13IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S13IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S13IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S13IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S13IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S13IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S13IDFE-XBPM:CM3ds:PositionOffsetX / S13IDFE-XBPM:CM3ds:PositionOffsetX
S13IDFE-XBPM:CM3ds:PositionOffsetY / S13IDFE-XBPM:CM3ds:PositionOffsetY
S13IDFE-XBPM:CM3ds:PositionScaleX / S13IDFE-XBPM:CM3ds:PositionScaleX
S13IDFE-XBPM:CM3ds:PositionScaleY / S13IDFE-XBPM:CM3ds:PositionScaleY
S13IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S13IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S13IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S13IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S13IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S13IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S13IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S13IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S13IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S13IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S13IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S13IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S13IDFE-XBPM:CM3us:PositionOffsetX / S13IDFE-XBPM:CM3us:PositionOffsetX
S13IDFE-XBPM:CM3us:PositionOffsetY / S13IDFE-XBPM:CM3us:PositionOffsetY
S13IDFE-XBPM:CM3us:PositionScaleX / S13IDFE-XBPM:CM3us:PositionScaleX
S13IDFE-XBPM:CM3us:PositionScaleY / S13IDFE-XBPM:CM3us:PositionScaleY
S13IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S13IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S13IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S13IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S13IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S13IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S13IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S13IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S13IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S13IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S13IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S13IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S13IDFE-XBPM:CM4ds:PositionOffsetX / S13IDFE-XBPM:CM4ds:PositionOffsetX
S13IDFE-XBPM:CM4ds:PositionOffsetY / S13IDFE-XBPM:CM4ds:PositionOffsetY
S13IDFE-XBPM:CM4ds:PositionScaleX / S13IDFE-XBPM:CM4ds:PositionScaleX
S13IDFE-XBPM:CM4ds:PositionScaleY / S13IDFE-XBPM:CM4ds:PositionScaleY
S13IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S13IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S13IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S13IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S13IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S13IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S13IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S13IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S13IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S13IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S13IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S13IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S13IDFE-XBPM:CM4us:PositionOffsetX / S13IDFE-XBPM:CM4us:PositionOffsetX
S13IDFE-XBPM:CM4us:PositionOffsetY / S13IDFE-XBPM:CM4us:PositionOffsetY
S13IDFE-XBPM:CM4us:PositionScaleX / S13IDFE-XBPM:CM4us:PositionScaleX
S13IDFE-XBPM:CM4us:PositionScaleY / S13IDFE-XBPM:CM4us:PositionScaleY
S13IDFE-XBPM:P1ds:BMcUsedM / S13IDFE-XBPM:P1ds:BMcUsedM
S13IDFE-XBPM:P1ds:GapUsedC / S13IDFE-XBPM:P1ds:GapUsedC
S13IDFE-XBPM:P1ds:Wx1UsedM / S13IDFE-XBPM:P1ds:Wx1UsedM
S13IDFE-XBPM:P1ds:Wx2UsedM / S13IDFE-XBPM:P1ds:Wx2UsedM
S13IDFE-XBPM:P1ds:Wx3UsedM / S13IDFE-XBPM:P1ds:Wx3UsedM
S13IDFE-XBPM:P1ds:Wy1UsedM / S13IDFE-XBPM:P1ds:Wy1UsedM
S13IDFE-XBPM:P1ds:Wy2UsedM / S13IDFE-XBPM:P1ds:Wy2UsedM
S13IDFE-XBPM:P1ds:Wy3UsedM / S13IDFE-XBPM:P1ds:Wy3UsedM
S13IDFE-XBPM:P1ds:x / S13IDFE-XBPM:P1ds:x
S13IDFE-XBPM:P1ds:x:CalFactor1M / S13IDFE-XBPM:P1ds:x:CalFactor1M
S13IDFE-XBPM:P1ds:x:CalFactor2M / S13IDFE-XBPM:P1ds:x:CalFactor2M
S13IDFE-XBPM:P1ds:x:LowPass1sM / S13IDFE-XBPM:P1ds:x:LowPass1sM
S13IDFE-XBPM:P1ds:x:LowPass8sM / S13IDFE-XBPM:P1ds:x:LowPass8sM
S13IDFE-XBPM:P1ds:x:LowPass64sM / S13IDFE-XBPM:P1ds:x:LowPass64sM
S13IDFE-XBPM:P1ds:x:Offset1M / S13IDFE-XBPM:P1ds:x:Offset1M
S13IDFE-XBPM:P1ds:x:Offset2M / S13IDFE-XBPM:P1ds:x:Offset2M
S13IDFE-XBPM:P1ds:x:ResolutionM / S13IDFE-XBPM:P1ds:x:ResolutionM
S13IDFE-XBPM:P1ds:x:Resolution1sM / S13IDFE-XBPM:P1ds:x:Resolution1sM
S13IDFE-XBPM:P1ds:x:Resolution8sM / S13IDFE-XBPM:P1ds:x:Resolution8sM
S13IDFE-XBPM:P1ds:x:Resolution64sM / S13IDFE-XBPM:P1ds:x:Resolution64sM
S13IDFE-XBPM:P1ds:x:StdDevM / S13IDFE-XBPM:P1ds:x:StdDevM
S13IDFE-XBPM:P1ds:x:StdDev1sM / S13IDFE-XBPM:P1ds:x:StdDev1sM
S13IDFE-XBPM:P1ds:x:StdDev8sM / S13IDFE-XBPM:P1ds:x:StdDev8sM
S13IDFE-XBPM:P1ds:x:StdDev64sM / S13IDFE-XBPM:P1ds:x:StdDev64sM
S13IDFE-XBPM:P1ds:x1:LowPass1sM / S13IDFE-XBPM:P1ds:x1:LowPass1sM
S13IDFE-XBPM:P1ds:x1:LowPass8sM / S13IDFE-XBPM:P1ds:x1:LowPass8sM
S13IDFE-XBPM:P1ds:x1:LowPass64sM / S13IDFE-XBPM:P1ds:x1:LowPass64sM
S13IDFE-XBPM:P1ds:x2:LowPass1sM / S13IDFE-XBPM:P1ds:x2:LowPass1sM
S13IDFE-XBPM:P1ds:x2:LowPass8sM / S13IDFE-XBPM:P1ds:x2:LowPass8sM
S13IDFE-XBPM:P1ds:x2:LowPass64sM / S13IDFE-XBPM:P1ds:x2:LowPass64sM
S13IDFE-XBPM:P1ds:y / S13IDFE-XBPM:P1ds:y
S13IDFE-XBPM:P1ds:y:CalFactor1M / S13IDFE-XBPM:P1ds:y:CalFactor1M
S13IDFE-XBPM:P1ds:y:CalFactor2M / S13IDFE-XBPM:P1ds:y:CalFactor2M
S13IDFE-XBPM:P1ds:y:LowPass1sM / S13IDFE-XBPM:P1ds:y:LowPass1sM
S13IDFE-XBPM:P1ds:y:LowPass8sM / S13IDFE-XBPM:P1ds:y:LowPass8sM
S13IDFE-XBPM:P1ds:y:LowPass64sM / S13IDFE-XBPM:P1ds:y:LowPass64sM
S13IDFE-XBPM:P1ds:y:Offset1M / S13IDFE-XBPM:P1ds:y:Offset1M
S13IDFE-XBPM:P1ds:y:Offset2M / S13IDFE-XBPM:P1ds:y:Offset2M
S13IDFE-XBPM:P1ds:y:ResolutionM / S13IDFE-XBPM:P1ds:y:ResolutionM
S13IDFE-XBPM:P1ds:y:Resolution1sM / S13IDFE-XBPM:P1ds:y:Resolution1sM
S13IDFE-XBPM:P1ds:y:Resolution8sM / S13IDFE-XBPM:P1ds:y:Resolution8sM
S13IDFE-XBPM:P1ds:y:Resolution64sM / S13IDFE-XBPM:P1ds:y:Resolution64sM
S13IDFE-XBPM:P1ds:y:StdDevM / S13IDFE-XBPM:P1ds:y:StdDevM
S13IDFE-XBPM:P1ds:y:StdDev1sM / S13IDFE-XBPM:P1ds:y:StdDev1sM
S13IDFE-XBPM:P1ds:y:StdDev8sM / S13IDFE-XBPM:P1ds:y:StdDev8sM
S13IDFE-XBPM:P1ds:y:StdDev64sM / S13IDFE-XBPM:P1ds:y:StdDev64sM
S13IDFE-XBPM:P1ds:y1:LowPass1sM / S13IDFE-XBPM:P1ds:y1:LowPass1sM
S13IDFE-XBPM:P1ds:y1:LowPass8sM / S13IDFE-XBPM:P1ds:y1:LowPass8sM
S13IDFE-XBPM:P1ds:y1:LowPass64sM / S13IDFE-XBPM:P1ds:y1:LowPass64sM
S13IDFE-XBPM:P1ds:y2:LowPass1sM / S13IDFE-XBPM:P1ds:y2:LowPass1sM
S13IDFE-XBPM:P1ds:y2:LowPass8sM / S13IDFE-XBPM:P1ds:y2:LowPass8sM
S13IDFE-XBPM:P1ds:y2:LowPass64sM / S13IDFE-XBPM:P1ds:y2:LowPass64sM
S13IDFE-XBPM:P1us:BMcUsedM / S13IDFE-XBPM:P1us:BMcUsedM
S13IDFE-XBPM:P1us:GapUsedC / S13IDFE-XBPM:P1us:GapUsedC
S13IDFE-XBPM:P1us:Wx1UsedM / S13IDFE-XBPM:P1us:Wx1UsedM
S13IDFE-XBPM:P1us:Wx2UsedM / S13IDFE-XBPM:P1us:Wx2UsedM
S13IDFE-XBPM:P1us:Wx3UsedM / S13IDFE-XBPM:P1us:Wx3UsedM
S13IDFE-XBPM:P1us:Wy1UsedM / S13IDFE-XBPM:P1us:Wy1UsedM
S13IDFE-XBPM:P1us:Wy2UsedM / S13IDFE-XBPM:P1us:Wy2UsedM
S13IDFE-XBPM:P1us:Wy3UsedM / S13IDFE-XBPM:P1us:Wy3UsedM
S13IDFE-XBPM:P1us:x / S13IDFE-XBPM:P1us:x
S13IDFE-XBPM:P1us:x:CalFactor1M / S13IDFE-XBPM:P1us:x:CalFactor1M
S13IDFE-XBPM:P1us:x:CalFactor2M / S13IDFE-XBPM:P1us:x:CalFactor2M
S13IDFE-XBPM:P1us:x:LowPass1sM / S13IDFE-XBPM:P1us:x:LowPass1sM
S13IDFE-XBPM:P1us:x:LowPass8sM / S13IDFE-XBPM:P1us:x:LowPass8sM
S13IDFE-XBPM:P1us:x:LowPass64sM / S13IDFE-XBPM:P1us:x:LowPass64sM
S13IDFE-XBPM:P1us:x:Offset1M / S13IDFE-XBPM:P1us:x:Offset1M
S13IDFE-XBPM:P1us:x:Offset2M / S13IDFE-XBPM:P1us:x:Offset2M
S13IDFE-XBPM:P1us:x:ResolutionM / S13IDFE-XBPM:P1us:x:ResolutionM
S13IDFE-XBPM:P1us:x:Resolution1sM / S13IDFE-XBPM:P1us:x:Resolution1sM
S13IDFE-XBPM:P1us:x:Resolution8sM / S13IDFE-XBPM:P1us:x:Resolution8sM
S13IDFE-XBPM:P1us:x:Resolution64sM / S13IDFE-XBPM:P1us:x:Resolution64sM
S13IDFE-XBPM:P1us:x:StdDevM / S13IDFE-XBPM:P1us:x:StdDevM
S13IDFE-XBPM:P1us:x:StdDev1sM / S13IDFE-XBPM:P1us:x:StdDev1sM
S13IDFE-XBPM:P1us:x:StdDev8sM / S13IDFE-XBPM:P1us:x:StdDev8sM
S13IDFE-XBPM:P1us:x:StdDev64sM / S13IDFE-XBPM:P1us:x:StdDev64sM
S13IDFE-XBPM:P1us:x1:LowPass1sM / S13IDFE-XBPM:P1us:x1:LowPass1sM
S13IDFE-XBPM:P1us:x1:LowPass8sM / S13IDFE-XBPM:P1us:x1:LowPass8sM
S13IDFE-XBPM:P1us:x1:LowPass64sM / S13IDFE-XBPM:P1us:x1:LowPass64sM
S13IDFE-XBPM:P1us:x2:LowPass1sM / S13IDFE-XBPM:P1us:x2:LowPass1sM
S13IDFE-XBPM:P1us:x2:LowPass8sM / S13IDFE-XBPM:P1us:x2:LowPass8sM
S13IDFE-XBPM:P1us:x2:LowPass64sM / S13IDFE-XBPM:P1us:x2:LowPass64sM
S13IDFE-XBPM:P1us:y / S13IDFE-XBPM:P1us:y
S13IDFE-XBPM:P1us:y:CalFactor1M / S13IDFE-XBPM:P1us:y:CalFactor1M
S13IDFE-XBPM:P1us:y:CalFactor2M / S13IDFE-XBPM:P1us:y:CalFactor2M
S13IDFE-XBPM:P1us:y:LowPass1sM / S13IDFE-XBPM:P1us:y:LowPass1sM
S13IDFE-XBPM:P1us:y:LowPass8sM / S13IDFE-XBPM:P1us:y:LowPass8sM
S13IDFE-XBPM:P1us:y:LowPass64sM / S13IDFE-XBPM:P1us:y:LowPass64sM
S13IDFE-XBPM:P1us:y:Offset1M / S13IDFE-XBPM:P1us:y:Offset1M
S13IDFE-XBPM:P1us:y:Offset2M / S13IDFE-XBPM:P1us:y:Offset2M
S13IDFE-XBPM:P1us:y:ResolutionM / S13IDFE-XBPM:P1us:y:ResolutionM
S13IDFE-XBPM:P1us:y:Resolution1sM / S13IDFE-XBPM:P1us:y:Resolution1sM
S13IDFE-XBPM:P1us:y:Resolution8sM / S13IDFE-XBPM:P1us:y:Resolution8sM
S13IDFE-XBPM:P1us:y:Resolution64sM / S13IDFE-XBPM:P1us:y:Resolution64sM
S13IDFE-XBPM:P1us:y:StdDevM / S13IDFE-XBPM:P1us:y:StdDevM
S13IDFE-XBPM:P1us:y:StdDev1sM / S13IDFE-XBPM:P1us:y:StdDev1sM
S13IDFE-XBPM:P1us:y:StdDev8sM / S13IDFE-XBPM:P1us:y:StdDev8sM
S13IDFE-XBPM:P1us:y:StdDev64sM / S13IDFE-XBPM:P1us:y:StdDev64sM
S13IDFE-XBPM:P1us:y1:LowPass1sM / S13IDFE-XBPM:P1us:y1:LowPass1sM
S13IDFE-XBPM:P1us:y1:LowPass8sM / S13IDFE-XBPM:P1us:y1:LowPass8sM
S13IDFE-XBPM:P1us:y1:LowPass64sM / S13IDFE-XBPM:P1us:y1:LowPass64sM
S13IDFE-XBPM:P1us:y2:LowPass1sM / S13IDFE-XBPM:P1us:y2:LowPass1sM
S13IDFE-XBPM:P1us:y2:LowPass8sM / S13IDFE-XBPM:P1us:y2:LowPass8sM
S13IDFE-XBPM:P1us:y2:LowPass64sM / S13IDFE-XBPM:P1us:y2:LowPass64sM
S13IDFE-XBPM:P2ds:GapUsedC / S13IDFE-XBPM:P2ds:GapUsedC
S13IDFE-XBPM:P2ds:XCalM / S13IDFE-XBPM:P2ds:XCalM
S13IDFE-XBPM:P2ds:YCalM / S13IDFE-XBPM:P2ds:YCalM
S13IDFE-XBPM:P2ds:x:CalFactorM / S13IDFE-XBPM:P2ds:x:CalFactorM
S13IDFE-XBPM:P2ds:x:OffsetM / S13IDFE-XBPM:P2ds:x:OffsetM
S13IDFE-XBPM:P2ds:y:CalFactorM / S13IDFE-XBPM:P2ds:y:CalFactorM
S13IDFE-XBPM:P2ds:y:OffsetM / S13IDFE-XBPM:P2ds:y:OffsetM
S13IDFE-XBPM:P2us:GapUsedC / S13IDFE-XBPM:P2us:GapUsedC
S13IDFE-XBPM:P2us:XCalM / S13IDFE-XBPM:P2us:XCalM
S13IDFE-XBPM:P2us:YCalM / S13IDFE-XBPM:P2us:YCalM
S13IDFE-XBPM:P2us:x:CalFactorM / S13IDFE-XBPM:P2us:x:CalFactorM
S13IDFE-XBPM:P2us:x:OffsetM / S13IDFE-XBPM:P2us:x:OffsetM
S13IDFE-XBPM:P2us:y:CalFactorM / S13IDFE-XBPM:P2us:y:CalFactorM
S13IDFE-XBPM:P2us:y:OffsetM / S13IDFE-XBPM:P2us:y:OffsetM
S14BMFE-XBPM:P1:AM / S14BMFE-XBPM:P1:AM
S14BMFE-XBPM:P1:BM / S14BMFE-XBPM:P1:BM
S14BMFE-XBPM:P1:y / S14BMFE-XBPM:P1:y
S14BMFE-XBPM:P1:y:LowPass1sM / S14BMFE-XBPM:P1:y:LowPass1sM
S14BMFE-XBPM:P1:y:LowPass8sM / S14BMFE-XBPM:P1:y:LowPass8sM
S14BMFE-XBPM:P1:y:LowPass64sM / S14BMFE-XBPM:P1:y:LowPass64sM
S14BMFE-XBPM:P1:y:StdDevM / S14BMFE-XBPM:P1:y:StdDevM
S14BMFE-XBPM:P1:y:StdDev1sM / S14BMFE-XBPM:P1:y:StdDev1sM
S14BMFE-XBPM:P1:y:StdDev8sM / S14BMFE-XBPM:P1:y:StdDev8sM
S14BMFE-XBPM:P1:y:StdDev64sM / S14BMFE-XBPM:P1:y:StdDev64sM
S14BMFE-XBPM:P2:AM / S14BMFE-XBPM:P2:AM
S14BMFE-XBPM:P2:BM / S14BMFE-XBPM:P2:BM
S14BMFE-XBPM:P2:y / S14BMFE-XBPM:P2:y
S14BMFE-XBPM:P2:y:LowPass1sM / S14BMFE-XBPM:P2:y:LowPass1sM
S14BMFE-XBPM:P2:y:LowPass8sM / S14BMFE-XBPM:P2:y:LowPass8sM
S14BMFE-XBPM:P2:y:LowPass64sM / S14BMFE-XBPM:P2:y:LowPass64sM
S14BMFE-XBPM:P2:y:StdDevM / S14BMFE-XBPM:P2:y:StdDevM
S14BMFE-XBPM:P2:y:StdDev1sM / S14BMFE-XBPM:P2:y:StdDev1sM
S14BMFE-XBPM:P2:y:StdDev8sM / S14BMFE-XBPM:P2:y:StdDev8sM
S14BMFE-XBPM:P2:y:StdDev64sM / S14BMFE-XBPM:P2:y:StdDev64sM
S14IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S14IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S14IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S14IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S14IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S14IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S14IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S14IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S14IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S14IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S14IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S14IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S14IDFE-XBPM:CM1ds:PositionOffsetX / S14IDFE-XBPM:CM1ds:PositionOffsetX
S14IDFE-XBPM:CM1ds:PositionOffsetY / S14IDFE-XBPM:CM1ds:PositionOffsetY
S14IDFE-XBPM:CM1ds:PositionScaleX / S14IDFE-XBPM:CM1ds:PositionScaleX
S14IDFE-XBPM:CM1ds:PositionScaleY / S14IDFE-XBPM:CM1ds:PositionScaleY
S14IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S14IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S14IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S14IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S14IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S14IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S14IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S14IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S14IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S14IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S14IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S14IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S14IDFE-XBPM:CM2ds:PositionOffsetX / S14IDFE-XBPM:CM2ds:PositionOffsetX
S14IDFE-XBPM:CM2ds:PositionOffsetY / S14IDFE-XBPM:CM2ds:PositionOffsetY
S14IDFE-XBPM:CM2ds:PositionScaleX / S14IDFE-XBPM:CM2ds:PositionScaleX
S14IDFE-XBPM:CM2ds:PositionScaleY / S14IDFE-XBPM:CM2ds:PositionScaleY
S14IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S14IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S14IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S14IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S14IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S14IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S14IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S14IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S14IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S14IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S14IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S14IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S14IDFE-XBPM:CM3ds:PositionOffsetX / S14IDFE-XBPM:CM3ds:PositionOffsetX
S14IDFE-XBPM:CM3ds:PositionOffsetY / S14IDFE-XBPM:CM3ds:PositionOffsetY
S14IDFE-XBPM:CM3ds:PositionScaleX / S14IDFE-XBPM:CM3ds:PositionScaleX
S14IDFE-XBPM:CM3ds:PositionScaleY / S14IDFE-XBPM:CM3ds:PositionScaleY
S14IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S14IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S14IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S14IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S14IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S14IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S14IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S14IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S14IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S14IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S14IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S14IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S14IDFE-XBPM:CM4ds:PositionOffsetX / S14IDFE-XBPM:CM4ds:PositionOffsetX
S14IDFE-XBPM:CM4ds:PositionOffsetY / S14IDFE-XBPM:CM4ds:PositionOffsetY
S14IDFE-XBPM:CM4ds:PositionScaleX / S14IDFE-XBPM:CM4ds:PositionScaleX
S14IDFE-XBPM:CM4ds:PositionScaleY / S14IDFE-XBPM:CM4ds:PositionScaleY
S14IDFE-XBPM:P1ds:BMcUsedM / S14IDFE-XBPM:P1ds:BMcUsedM
S14IDFE-XBPM:P1ds:GapUsedC / S14IDFE-XBPM:P1ds:GapUsedC
S14IDFE-XBPM:P1ds:Wx1UsedM / S14IDFE-XBPM:P1ds:Wx1UsedM
S14IDFE-XBPM:P1ds:Wx2UsedM / S14IDFE-XBPM:P1ds:Wx2UsedM
S14IDFE-XBPM:P1ds:Wx3UsedM / S14IDFE-XBPM:P1ds:Wx3UsedM
S14IDFE-XBPM:P1ds:Wy1UsedM / S14IDFE-XBPM:P1ds:Wy1UsedM
S14IDFE-XBPM:P1ds:Wy2UsedM / S14IDFE-XBPM:P1ds:Wy2UsedM
S14IDFE-XBPM:P1ds:Wy3UsedM / S14IDFE-XBPM:P1ds:Wy3UsedM
S14IDFE-XBPM:P1ds:x / S14IDFE-XBPM:P1ds:x
S14IDFE-XBPM:P1ds:x:CalFactor1M / S14IDFE-XBPM:P1ds:x:CalFactor1M
S14IDFE-XBPM:P1ds:x:CalFactor2M / S14IDFE-XBPM:P1ds:x:CalFactor2M
S14IDFE-XBPM:P1ds:x:LowPass1sM / S14IDFE-XBPM:P1ds:x:LowPass1sM
S14IDFE-XBPM:P1ds:x:LowPass8sM / S14IDFE-XBPM:P1ds:x:LowPass8sM
S14IDFE-XBPM:P1ds:x:LowPass64sM / S14IDFE-XBPM:P1ds:x:LowPass64sM
S14IDFE-XBPM:P1ds:x:Offset1M / S14IDFE-XBPM:P1ds:x:Offset1M
S14IDFE-XBPM:P1ds:x:Offset2M / S14IDFE-XBPM:P1ds:x:Offset2M
S14IDFE-XBPM:P1ds:x:ResolutionM / S14IDFE-XBPM:P1ds:x:ResolutionM
S14IDFE-XBPM:P1ds:x:Resolution1sM / S14IDFE-XBPM:P1ds:x:Resolution1sM
S14IDFE-XBPM:P1ds:x:Resolution8sM / S14IDFE-XBPM:P1ds:x:Resolution8sM
S14IDFE-XBPM:P1ds:x:Resolution64sM / S14IDFE-XBPM:P1ds:x:Resolution64sM
S14IDFE-XBPM:P1ds:x:StdDevM / S14IDFE-XBPM:P1ds:x:StdDevM
S14IDFE-XBPM:P1ds:x:StdDev1sM / S14IDFE-XBPM:P1ds:x:StdDev1sM
S14IDFE-XBPM:P1ds:x:StdDev8sM / S14IDFE-XBPM:P1ds:x:StdDev8sM
S14IDFE-XBPM:P1ds:x:StdDev64sM / S14IDFE-XBPM:P1ds:x:StdDev64sM
S14IDFE-XBPM:P1ds:x1:LowPass1sM / S14IDFE-XBPM:P1ds:x1:LowPass1sM
S14IDFE-XBPM:P1ds:x1:LowPass8sM / S14IDFE-XBPM:P1ds:x1:LowPass8sM
S14IDFE-XBPM:P1ds:x1:LowPass64sM / S14IDFE-XBPM:P1ds:x1:LowPass64sM
S14IDFE-XBPM:P1ds:x2:LowPass1sM / S14IDFE-XBPM:P1ds:x2:LowPass1sM
S14IDFE-XBPM:P1ds:x2:LowPass8sM / S14IDFE-XBPM:P1ds:x2:LowPass8sM
S14IDFE-XBPM:P1ds:x2:LowPass64sM / S14IDFE-XBPM:P1ds:x2:LowPass64sM
S14IDFE-XBPM:P1ds:y / S14IDFE-XBPM:P1ds:y
S14IDFE-XBPM:P1ds:y:CalFactor1M / S14IDFE-XBPM:P1ds:y:CalFactor1M
S14IDFE-XBPM:P1ds:y:CalFactor2M / S14IDFE-XBPM:P1ds:y:CalFactor2M
S14IDFE-XBPM:P1ds:y:LowPass1sM / S14IDFE-XBPM:P1ds:y:LowPass1sM
S14IDFE-XBPM:P1ds:y:LowPass8sM / S14IDFE-XBPM:P1ds:y:LowPass8sM
S14IDFE-XBPM:P1ds:y:LowPass64sM / S14IDFE-XBPM:P1ds:y:LowPass64sM
S14IDFE-XBPM:P1ds:y:Offset1M / S14IDFE-XBPM:P1ds:y:Offset1M
S14IDFE-XBPM:P1ds:y:Offset2M / S14IDFE-XBPM:P1ds:y:Offset2M
S14IDFE-XBPM:P1ds:y:ResolutionM / S14IDFE-XBPM:P1ds:y:ResolutionM
S14IDFE-XBPM:P1ds:y:Resolution1sM / S14IDFE-XBPM:P1ds:y:Resolution1sM
S14IDFE-XBPM:P1ds:y:Resolution8sM / S14IDFE-XBPM:P1ds:y:Resolution8sM
S14IDFE-XBPM:P1ds:y:Resolution64sM / S14IDFE-XBPM:P1ds:y:Resolution64sM
S14IDFE-XBPM:P1ds:y:StdDevM / S14IDFE-XBPM:P1ds:y:StdDevM
S14IDFE-XBPM:P1ds:y:StdDev1sM / S14IDFE-XBPM:P1ds:y:StdDev1sM
S14IDFE-XBPM:P1ds:y:StdDev8sM / S14IDFE-XBPM:P1ds:y:StdDev8sM
S14IDFE-XBPM:P1ds:y:StdDev64sM / S14IDFE-XBPM:P1ds:y:StdDev64sM
S14IDFE-XBPM:P1ds:y1:LowPass1sM / S14IDFE-XBPM:P1ds:y1:LowPass1sM
S14IDFE-XBPM:P1ds:y1:LowPass8sM / S14IDFE-XBPM:P1ds:y1:LowPass8sM
S14IDFE-XBPM:P1ds:y1:LowPass64sM / S14IDFE-XBPM:P1ds:y1:LowPass64sM
S14IDFE-XBPM:P1ds:y2:LowPass1sM / S14IDFE-XBPM:P1ds:y2:LowPass1sM
S14IDFE-XBPM:P1ds:y2:LowPass8sM / S14IDFE-XBPM:P1ds:y2:LowPass8sM
S14IDFE-XBPM:P1ds:y2:LowPass64sM / S14IDFE-XBPM:P1ds:y2:LowPass64sM
S14IDFE-XBPM:P2ds:GapUsedC / S14IDFE-XBPM:P2ds:GapUsedC
S14IDFE-XBPM:P2ds:XCalM / S14IDFE-XBPM:P2ds:XCalM
S14IDFE-XBPM:P2ds:YCalM / S14IDFE-XBPM:P2ds:YCalM
S14IDFE-XBPM:P2ds:x:CalFactorM / S14IDFE-XBPM:P2ds:x:CalFactorM
S14IDFE-XBPM:P2ds:x:OffsetM / S14IDFE-XBPM:P2ds:x:OffsetM
S14IDFE-XBPM:P2ds:y:CalFactorM / S14IDFE-XBPM:P2ds:y:CalFactorM
S14IDFE-XBPM:P2ds:y:OffsetM / S14IDFE-XBPM:P2ds:y:OffsetM
S15IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S15IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S15IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S15IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S15IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S15IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S15IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S15IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S15IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S15IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S15IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S15IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S15IDFE-XBPM:CM1ds:PositionOffsetX / S15IDFE-XBPM:CM1ds:PositionOffsetX
S15IDFE-XBPM:CM1ds:PositionOffsetY / S15IDFE-XBPM:CM1ds:PositionOffsetY
S15IDFE-XBPM:CM1ds:PositionScaleX / S15IDFE-XBPM:CM1ds:PositionScaleX
S15IDFE-XBPM:CM1ds:PositionScaleY / S15IDFE-XBPM:CM1ds:PositionScaleY
S15IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S15IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S15IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S15IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S15IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S15IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S15IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S15IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S15IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S15IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S15IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S15IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S15IDFE-XBPM:CM1us:PositionOffsetX / S15IDFE-XBPM:CM1us:PositionOffsetX
S15IDFE-XBPM:CM1us:PositionOffsetY / S15IDFE-XBPM:CM1us:PositionOffsetY
S15IDFE-XBPM:CM1us:PositionScaleX / S15IDFE-XBPM:CM1us:PositionScaleX
S15IDFE-XBPM:CM1us:PositionScaleY / S15IDFE-XBPM:CM1us:PositionScaleY
S15IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S15IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S15IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S15IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S15IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S15IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S15IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S15IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S15IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S15IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S15IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S15IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S15IDFE-XBPM:CM2ds:PositionOffsetX / S15IDFE-XBPM:CM2ds:PositionOffsetX
S15IDFE-XBPM:CM2ds:PositionOffsetY / S15IDFE-XBPM:CM2ds:PositionOffsetY
S15IDFE-XBPM:CM2ds:PositionScaleX / S15IDFE-XBPM:CM2ds:PositionScaleX
S15IDFE-XBPM:CM2ds:PositionScaleY / S15IDFE-XBPM:CM2ds:PositionScaleY
S15IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S15IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S15IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S15IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S15IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S15IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S15IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S15IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S15IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S15IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S15IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S15IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S15IDFE-XBPM:CM2us:PositionOffsetX / S15IDFE-XBPM:CM2us:PositionOffsetX
S15IDFE-XBPM:CM2us:PositionOffsetY / S15IDFE-XBPM:CM2us:PositionOffsetY
S15IDFE-XBPM:CM2us:PositionScaleX / S15IDFE-XBPM:CM2us:PositionScaleX
S15IDFE-XBPM:CM2us:PositionScaleY / S15IDFE-XBPM:CM2us:PositionScaleY
S15IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S15IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S15IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S15IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S15IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S15IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S15IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S15IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S15IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S15IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S15IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S15IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S15IDFE-XBPM:CM3ds:PositionOffsetX / S15IDFE-XBPM:CM3ds:PositionOffsetX
S15IDFE-XBPM:CM3ds:PositionOffsetY / S15IDFE-XBPM:CM3ds:PositionOffsetY
S15IDFE-XBPM:CM3ds:PositionScaleX / S15IDFE-XBPM:CM3ds:PositionScaleX
S15IDFE-XBPM:CM3ds:PositionScaleY / S15IDFE-XBPM:CM3ds:PositionScaleY
S15IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S15IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S15IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S15IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S15IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S15IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S15IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S15IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S15IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S15IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S15IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S15IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S15IDFE-XBPM:CM3us:PositionOffsetX / S15IDFE-XBPM:CM3us:PositionOffsetX
S15IDFE-XBPM:CM3us:PositionOffsetY / S15IDFE-XBPM:CM3us:PositionOffsetY
S15IDFE-XBPM:CM3us:PositionScaleX / S15IDFE-XBPM:CM3us:PositionScaleX
S15IDFE-XBPM:CM3us:PositionScaleY / S15IDFE-XBPM:CM3us:PositionScaleY
S15IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S15IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S15IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S15IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S15IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S15IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S15IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S15IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S15IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S15IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S15IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S15IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S15IDFE-XBPM:CM4ds:PositionOffsetX / S15IDFE-XBPM:CM4ds:PositionOffsetX
S15IDFE-XBPM:CM4ds:PositionOffsetY / S15IDFE-XBPM:CM4ds:PositionOffsetY
S15IDFE-XBPM:CM4ds:PositionScaleX / S15IDFE-XBPM:CM4ds:PositionScaleX
S15IDFE-XBPM:CM4ds:PositionScaleY / S15IDFE-XBPM:CM4ds:PositionScaleY
S15IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S15IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S15IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S15IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S15IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S15IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S15IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S15IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S15IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S15IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S15IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S15IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S15IDFE-XBPM:CM4us:PositionOffsetX / S15IDFE-XBPM:CM4us:PositionOffsetX
S15IDFE-XBPM:CM4us:PositionOffsetY / S15IDFE-XBPM:CM4us:PositionOffsetY
S15IDFE-XBPM:CM4us:PositionScaleX / S15IDFE-XBPM:CM4us:PositionScaleX
S15IDFE-XBPM:CM4us:PositionScaleY / S15IDFE-XBPM:CM4us:PositionScaleY
S15IDFE-XBPM:P1ds:BMcUsedM / S15IDFE-XBPM:P1ds:BMcUsedM
S15IDFE-XBPM:P1ds:GapUsedC / S15IDFE-XBPM:P1ds:GapUsedC
S15IDFE-XBPM:P1ds:Wx1UsedM / S15IDFE-XBPM:P1ds:Wx1UsedM
S15IDFE-XBPM:P1ds:Wx2UsedM / S15IDFE-XBPM:P1ds:Wx2UsedM
S15IDFE-XBPM:P1ds:Wx3UsedM / S15IDFE-XBPM:P1ds:Wx3UsedM
S15IDFE-XBPM:P1ds:Wy1UsedM / S15IDFE-XBPM:P1ds:Wy1UsedM
S15IDFE-XBPM:P1ds:Wy2UsedM / S15IDFE-XBPM:P1ds:Wy2UsedM
S15IDFE-XBPM:P1ds:Wy3UsedM / S15IDFE-XBPM:P1ds:Wy3UsedM
S15IDFE-XBPM:P1ds:x / S15IDFE-XBPM:P1ds:x
S15IDFE-XBPM:P1ds:x:CalFactor1M / S15IDFE-XBPM:P1ds:x:CalFactor1M
S15IDFE-XBPM:P1ds:x:CalFactor2M / S15IDFE-XBPM:P1ds:x:CalFactor2M
S15IDFE-XBPM:P1ds:x:LowPass1sM / S15IDFE-XBPM:P1ds:x:LowPass1sM
S15IDFE-XBPM:P1ds:x:LowPass8sM / S15IDFE-XBPM:P1ds:x:LowPass8sM
S15IDFE-XBPM:P1ds:x:LowPass64sM / S15IDFE-XBPM:P1ds:x:LowPass64sM
S15IDFE-XBPM:P1ds:x:Offset1M / S15IDFE-XBPM:P1ds:x:Offset1M
S15IDFE-XBPM:P1ds:x:Offset2M / S15IDFE-XBPM:P1ds:x:Offset2M
S15IDFE-XBPM:P1ds:x:ResolutionM / S15IDFE-XBPM:P1ds:x:ResolutionM
S15IDFE-XBPM:P1ds:x:Resolution1sM / S15IDFE-XBPM:P1ds:x:Resolution1sM
S15IDFE-XBPM:P1ds:x:Resolution8sM / S15IDFE-XBPM:P1ds:x:Resolution8sM
S15IDFE-XBPM:P1ds:x:Resolution64sM / S15IDFE-XBPM:P1ds:x:Resolution64sM
S15IDFE-XBPM:P1ds:x:StdDevM / S15IDFE-XBPM:P1ds:x:StdDevM
S15IDFE-XBPM:P1ds:x:StdDev1sM / S15IDFE-XBPM:P1ds:x:StdDev1sM
S15IDFE-XBPM:P1ds:x:StdDev8sM / S15IDFE-XBPM:P1ds:x:StdDev8sM
S15IDFE-XBPM:P1ds:x:StdDev64sM / S15IDFE-XBPM:P1ds:x:StdDev64sM
S15IDFE-XBPM:P1ds:x1:LowPass1sM / S15IDFE-XBPM:P1ds:x1:LowPass1sM
S15IDFE-XBPM:P1ds:x1:LowPass8sM / S15IDFE-XBPM:P1ds:x1:LowPass8sM
S15IDFE-XBPM:P1ds:x1:LowPass64sM / S15IDFE-XBPM:P1ds:x1:LowPass64sM
S15IDFE-XBPM:P1ds:x2:LowPass1sM / S15IDFE-XBPM:P1ds:x2:LowPass1sM
S15IDFE-XBPM:P1ds:x2:LowPass8sM / S15IDFE-XBPM:P1ds:x2:LowPass8sM
S15IDFE-XBPM:P1ds:x2:LowPass64sM / S15IDFE-XBPM:P1ds:x2:LowPass64sM
S15IDFE-XBPM:P1ds:y / S15IDFE-XBPM:P1ds:y
S15IDFE-XBPM:P1ds:y:CalFactor1M / S15IDFE-XBPM:P1ds:y:CalFactor1M
S15IDFE-XBPM:P1ds:y:CalFactor2M / S15IDFE-XBPM:P1ds:y:CalFactor2M
S15IDFE-XBPM:P1ds:y:LowPass1sM / S15IDFE-XBPM:P1ds:y:LowPass1sM
S15IDFE-XBPM:P1ds:y:LowPass8sM / S15IDFE-XBPM:P1ds:y:LowPass8sM
S15IDFE-XBPM:P1ds:y:LowPass64sM / S15IDFE-XBPM:P1ds:y:LowPass64sM
S15IDFE-XBPM:P1ds:y:Offset1M / S15IDFE-XBPM:P1ds:y:Offset1M
S15IDFE-XBPM:P1ds:y:Offset2M / S15IDFE-XBPM:P1ds:y:Offset2M
S15IDFE-XBPM:P1ds:y:ResolutionM / S15IDFE-XBPM:P1ds:y:ResolutionM
S15IDFE-XBPM:P1ds:y:Resolution1sM / S15IDFE-XBPM:P1ds:y:Resolution1sM
S15IDFE-XBPM:P1ds:y:Resolution8sM / S15IDFE-XBPM:P1ds:y:Resolution8sM
S15IDFE-XBPM:P1ds:y:Resolution64sM / S15IDFE-XBPM:P1ds:y:Resolution64sM
S15IDFE-XBPM:P1ds:y:StdDevM / S15IDFE-XBPM:P1ds:y:StdDevM
S15IDFE-XBPM:P1ds:y:StdDev1sM / S15IDFE-XBPM:P1ds:y:StdDev1sM
S15IDFE-XBPM:P1ds:y:StdDev8sM / S15IDFE-XBPM:P1ds:y:StdDev8sM
S15IDFE-XBPM:P1ds:y:StdDev64sM / S15IDFE-XBPM:P1ds:y:StdDev64sM
S15IDFE-XBPM:P1ds:y1:LowPass1sM / S15IDFE-XBPM:P1ds:y1:LowPass1sM
S15IDFE-XBPM:P1ds:y1:LowPass8sM / S15IDFE-XBPM:P1ds:y1:LowPass8sM
S15IDFE-XBPM:P1ds:y1:LowPass64sM / S15IDFE-XBPM:P1ds:y1:LowPass64sM
S15IDFE-XBPM:P1ds:y2:LowPass1sM / S15IDFE-XBPM:P1ds:y2:LowPass1sM
S15IDFE-XBPM:P1ds:y2:LowPass8sM / S15IDFE-XBPM:P1ds:y2:LowPass8sM
S15IDFE-XBPM:P1ds:y2:LowPass64sM / S15IDFE-XBPM:P1ds:y2:LowPass64sM
S15IDFE-XBPM:P1us:BMcUsedM / S15IDFE-XBPM:P1us:BMcUsedM
S15IDFE-XBPM:P1us:GapUsedC / S15IDFE-XBPM:P1us:GapUsedC
S15IDFE-XBPM:P1us:Wx1UsedM / S15IDFE-XBPM:P1us:Wx1UsedM
S15IDFE-XBPM:P1us:Wx2UsedM / S15IDFE-XBPM:P1us:Wx2UsedM
S15IDFE-XBPM:P1us:Wx3UsedM / S15IDFE-XBPM:P1us:Wx3UsedM
S15IDFE-XBPM:P1us:Wy1UsedM / S15IDFE-XBPM:P1us:Wy1UsedM
S15IDFE-XBPM:P1us:Wy2UsedM / S15IDFE-XBPM:P1us:Wy2UsedM
S15IDFE-XBPM:P1us:Wy3UsedM / S15IDFE-XBPM:P1us:Wy3UsedM
S15IDFE-XBPM:P1us:x / S15IDFE-XBPM:P1us:x
S15IDFE-XBPM:P1us:x:CalFactor1M / S15IDFE-XBPM:P1us:x:CalFactor1M
S15IDFE-XBPM:P1us:x:CalFactor2M / S15IDFE-XBPM:P1us:x:CalFactor2M
S15IDFE-XBPM:P1us:x:LowPass1sM / S15IDFE-XBPM:P1us:x:LowPass1sM
S15IDFE-XBPM:P1us:x:LowPass8sM / S15IDFE-XBPM:P1us:x:LowPass8sM
S15IDFE-XBPM:P1us:x:LowPass64sM / S15IDFE-XBPM:P1us:x:LowPass64sM
S15IDFE-XBPM:P1us:x:Offset1M / S15IDFE-XBPM:P1us:x:Offset1M
S15IDFE-XBPM:P1us:x:Offset2M / S15IDFE-XBPM:P1us:x:Offset2M
S15IDFE-XBPM:P1us:x:ResolutionM / S15IDFE-XBPM:P1us:x:ResolutionM
S15IDFE-XBPM:P1us:x:Resolution1sM / S15IDFE-XBPM:P1us:x:Resolution1sM
S15IDFE-XBPM:P1us:x:Resolution8sM / S15IDFE-XBPM:P1us:x:Resolution8sM
S15IDFE-XBPM:P1us:x:Resolution64sM / S15IDFE-XBPM:P1us:x:Resolution64sM
S15IDFE-XBPM:P1us:x:StdDevM / S15IDFE-XBPM:P1us:x:StdDevM
S15IDFE-XBPM:P1us:x:StdDev1sM / S15IDFE-XBPM:P1us:x:StdDev1sM
S15IDFE-XBPM:P1us:x:StdDev8sM / S15IDFE-XBPM:P1us:x:StdDev8sM
S15IDFE-XBPM:P1us:x:StdDev64sM / S15IDFE-XBPM:P1us:x:StdDev64sM
S15IDFE-XBPM:P1us:x1:LowPass1sM / S15IDFE-XBPM:P1us:x1:LowPass1sM
S15IDFE-XBPM:P1us:x1:LowPass8sM / S15IDFE-XBPM:P1us:x1:LowPass8sM
S15IDFE-XBPM:P1us:x1:LowPass64sM / S15IDFE-XBPM:P1us:x1:LowPass64sM
S15IDFE-XBPM:P1us:x2:LowPass1sM / S15IDFE-XBPM:P1us:x2:LowPass1sM
S15IDFE-XBPM:P1us:x2:LowPass8sM / S15IDFE-XBPM:P1us:x2:LowPass8sM
S15IDFE-XBPM:P1us:x2:LowPass64sM / S15IDFE-XBPM:P1us:x2:LowPass64sM
S15IDFE-XBPM:P1us:y / S15IDFE-XBPM:P1us:y
S15IDFE-XBPM:P1us:y:CalFactor1M / S15IDFE-XBPM:P1us:y:CalFactor1M
S15IDFE-XBPM:P1us:y:CalFactor2M / S15IDFE-XBPM:P1us:y:CalFactor2M
S15IDFE-XBPM:P1us:y:LowPass1sM / S15IDFE-XBPM:P1us:y:LowPass1sM
S15IDFE-XBPM:P1us:y:LowPass8sM / S15IDFE-XBPM:P1us:y:LowPass8sM
S15IDFE-XBPM:P1us:y:LowPass64sM / S15IDFE-XBPM:P1us:y:LowPass64sM
S15IDFE-XBPM:P1us:y:Offset1M / S15IDFE-XBPM:P1us:y:Offset1M
S15IDFE-XBPM:P1us:y:Offset2M / S15IDFE-XBPM:P1us:y:Offset2M
S15IDFE-XBPM:P1us:y:ResolutionM / S15IDFE-XBPM:P1us:y:ResolutionM
S15IDFE-XBPM:P1us:y:Resolution1sM / S15IDFE-XBPM:P1us:y:Resolution1sM
S15IDFE-XBPM:P1us:y:Resolution8sM / S15IDFE-XBPM:P1us:y:Resolution8sM
S15IDFE-XBPM:P1us:y:Resolution64sM / S15IDFE-XBPM:P1us:y:Resolution64sM
S15IDFE-XBPM:P1us:y:StdDevM / S15IDFE-XBPM:P1us:y:StdDevM
S15IDFE-XBPM:P1us:y:StdDev1sM / S15IDFE-XBPM:P1us:y:StdDev1sM
S15IDFE-XBPM:P1us:y:StdDev8sM / S15IDFE-XBPM:P1us:y:StdDev8sM
S15IDFE-XBPM:P1us:y:StdDev64sM / S15IDFE-XBPM:P1us:y:StdDev64sM
S15IDFE-XBPM:P1us:y1:LowPass1sM / S15IDFE-XBPM:P1us:y1:LowPass1sM
S15IDFE-XBPM:P1us:y1:LowPass8sM / S15IDFE-XBPM:P1us:y1:LowPass8sM
S15IDFE-XBPM:P1us:y1:LowPass64sM / S15IDFE-XBPM:P1us:y1:LowPass64sM
S15IDFE-XBPM:P1us:y2:LowPass1sM / S15IDFE-XBPM:P1us:y2:LowPass1sM
S15IDFE-XBPM:P1us:y2:LowPass8sM / S15IDFE-XBPM:P1us:y2:LowPass8sM
S15IDFE-XBPM:P1us:y2:LowPass64sM / S15IDFE-XBPM:P1us:y2:LowPass64sM
S15IDFE-XBPM:P2ds:GapUsedC / S15IDFE-XBPM:P2ds:GapUsedC
S15IDFE-XBPM:P2ds:XCalM / S15IDFE-XBPM:P2ds:XCalM
S15IDFE-XBPM:P2ds:YCalM / S15IDFE-XBPM:P2ds:YCalM
S15IDFE-XBPM:P2ds:x:CalFactorM / S15IDFE-XBPM:P2ds:x:CalFactorM
S15IDFE-XBPM:P2ds:x:OffsetM / S15IDFE-XBPM:P2ds:x:OffsetM
S15IDFE-XBPM:P2ds:y:CalFactorM / S15IDFE-XBPM:P2ds:y:CalFactorM
S15IDFE-XBPM:P2ds:y:OffsetM / S15IDFE-XBPM:P2ds:y:OffsetM
S15IDFE-XBPM:P2us:GapUsedC / S15IDFE-XBPM:P2us:GapUsedC
S15IDFE-XBPM:P2us:XCalM / S15IDFE-XBPM:P2us:XCalM
S15IDFE-XBPM:P2us:YCalM / S15IDFE-XBPM:P2us:YCalM
S15IDFE-XBPM:P2us:x:CalFactorM / S15IDFE-XBPM:P2us:x:CalFactorM
S15IDFE-XBPM:P2us:x:OffsetM / S15IDFE-XBPM:P2us:x:OffsetM
S15IDFE-XBPM:P2us:y:CalFactorM / S15IDFE-XBPM:P2us:y:CalFactorM
S15IDFE-XBPM:P2us:y:OffsetM / S15IDFE-XBPM:P2us:y:OffsetM
S16BMFE-XBPM:P1:AM / S16BMFE-XBPM:P1:AM
S16BMFE-XBPM:P1:BM / S16BMFE-XBPM:P1:BM
S16BMFE-XBPM:P1:y / S16BMFE-XBPM:P1:y
S16BMFE-XBPM:P1:y:LowPass1sM / S16BMFE-XBPM:P1:y:LowPass1sM
S16BMFE-XBPM:P1:y:LowPass8sM / S16BMFE-XBPM:P1:y:LowPass8sM
S16BMFE-XBPM:P1:y:LowPass64sM / S16BMFE-XBPM:P1:y:LowPass64sM
S16BMFE-XBPM:P1:y:StdDevM / S16BMFE-XBPM:P1:y:StdDevM
S16BMFE-XBPM:P1:y:StdDev1sM / S16BMFE-XBPM:P1:y:StdDev1sM
S16BMFE-XBPM:P1:y:StdDev8sM / S16BMFE-XBPM:P1:y:StdDev8sM
S16BMFE-XBPM:P1:y:StdDev64sM / S16BMFE-XBPM:P1:y:StdDev64sM
S16BMFE-XBPM:P2:AM / S16BMFE-XBPM:P2:AM
S16BMFE-XBPM:P2:BM / S16BMFE-XBPM:P2:BM
S16BMFE-XBPM:P2:y / S16BMFE-XBPM:P2:y
S16BMFE-XBPM:P2:y:LowPass1sM / S16BMFE-XBPM:P2:y:LowPass1sM
S16BMFE-XBPM:P2:y:LowPass8sM / S16BMFE-XBPM:P2:y:LowPass8sM
S16BMFE-XBPM:P2:y:LowPass64sM / S16BMFE-XBPM:P2:y:LowPass64sM
S16BMFE-XBPM:P2:y:StdDevM / S16BMFE-XBPM:P2:y:StdDevM
S16BMFE-XBPM:P2:y:StdDev1sM / S16BMFE-XBPM:P2:y:StdDev1sM
S16BMFE-XBPM:P2:y:StdDev8sM / S16BMFE-XBPM:P2:y:StdDev8sM
S16BMFE-XBPM:P2:y:StdDev64sM / S16BMFE-XBPM:P2:y:StdDev64sM
S16IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S16IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S16IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S16IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S16IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S16IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S16IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S16IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S16IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S16IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S16IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S16IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S16IDFE-XBPM:CM1ds:PositionOffsetX / S16IDFE-XBPM:CM1ds:PositionOffsetX
S16IDFE-XBPM:CM1ds:PositionOffsetY / S16IDFE-XBPM:CM1ds:PositionOffsetY
S16IDFE-XBPM:CM1ds:PositionScaleX / S16IDFE-XBPM:CM1ds:PositionScaleX
S16IDFE-XBPM:CM1ds:PositionScaleY / S16IDFE-XBPM:CM1ds:PositionScaleY
S16IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S16IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S16IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S16IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S16IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S16IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S16IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S16IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S16IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S16IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S16IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S16IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S16IDFE-XBPM:CM1us:PositionOffsetX / S16IDFE-XBPM:CM1us:PositionOffsetX
S16IDFE-XBPM:CM1us:PositionOffsetY / S16IDFE-XBPM:CM1us:PositionOffsetY
S16IDFE-XBPM:CM1us:PositionScaleX / S16IDFE-XBPM:CM1us:PositionScaleX
S16IDFE-XBPM:CM1us:PositionScaleY / S16IDFE-XBPM:CM1us:PositionScaleY
S16IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S16IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S16IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S16IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S16IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S16IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S16IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S16IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S16IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S16IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S16IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S16IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S16IDFE-XBPM:CM2ds:PositionOffsetX / S16IDFE-XBPM:CM2ds:PositionOffsetX
S16IDFE-XBPM:CM2ds:PositionOffsetY / S16IDFE-XBPM:CM2ds:PositionOffsetY
S16IDFE-XBPM:CM2ds:PositionScaleX / S16IDFE-XBPM:CM2ds:PositionScaleX
S16IDFE-XBPM:CM2ds:PositionScaleY / S16IDFE-XBPM:CM2ds:PositionScaleY
S16IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S16IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S16IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S16IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S16IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S16IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S16IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S16IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S16IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S16IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S16IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S16IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S16IDFE-XBPM:CM2us:PositionOffsetX / S16IDFE-XBPM:CM2us:PositionOffsetX
S16IDFE-XBPM:CM2us:PositionOffsetY / S16IDFE-XBPM:CM2us:PositionOffsetY
S16IDFE-XBPM:CM2us:PositionScaleX / S16IDFE-XBPM:CM2us:PositionScaleX
S16IDFE-XBPM:CM2us:PositionScaleY / S16IDFE-XBPM:CM2us:PositionScaleY
S16IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S16IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S16IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S16IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S16IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S16IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S16IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S16IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S16IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S16IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S16IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S16IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S16IDFE-XBPM:CM3ds:PositionOffsetX / S16IDFE-XBPM:CM3ds:PositionOffsetX
S16IDFE-XBPM:CM3ds:PositionOffsetY / S16IDFE-XBPM:CM3ds:PositionOffsetY
S16IDFE-XBPM:CM3ds:PositionScaleX / S16IDFE-XBPM:CM3ds:PositionScaleX
S16IDFE-XBPM:CM3ds:PositionScaleY / S16IDFE-XBPM:CM3ds:PositionScaleY
S16IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S16IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S16IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S16IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S16IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S16IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S16IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S16IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S16IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S16IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S16IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S16IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S16IDFE-XBPM:CM3us:PositionOffsetX / S16IDFE-XBPM:CM3us:PositionOffsetX
S16IDFE-XBPM:CM3us:PositionOffsetY / S16IDFE-XBPM:CM3us:PositionOffsetY
S16IDFE-XBPM:CM3us:PositionScaleX / S16IDFE-XBPM:CM3us:PositionScaleX
S16IDFE-XBPM:CM3us:PositionScaleY / S16IDFE-XBPM:CM3us:PositionScaleY
S16IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S16IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S16IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S16IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S16IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S16IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S16IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S16IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S16IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S16IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S16IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S16IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S16IDFE-XBPM:CM4ds:PositionOffsetX / S16IDFE-XBPM:CM4ds:PositionOffsetX
S16IDFE-XBPM:CM4ds:PositionOffsetY / S16IDFE-XBPM:CM4ds:PositionOffsetY
S16IDFE-XBPM:CM4ds:PositionScaleX / S16IDFE-XBPM:CM4ds:PositionScaleX
S16IDFE-XBPM:CM4ds:PositionScaleY / S16IDFE-XBPM:CM4ds:PositionScaleY
S16IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S16IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S16IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S16IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S16IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S16IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S16IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S16IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S16IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S16IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S16IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S16IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S16IDFE-XBPM:CM4us:PositionOffsetX / S16IDFE-XBPM:CM4us:PositionOffsetX
S16IDFE-XBPM:CM4us:PositionOffsetY / S16IDFE-XBPM:CM4us:PositionOffsetY
S16IDFE-XBPM:CM4us:PositionScaleX / S16IDFE-XBPM:CM4us:PositionScaleX
S16IDFE-XBPM:CM4us:PositionScaleY / S16IDFE-XBPM:CM4us:PositionScaleY
S16IDFE-XBPM:P1ds:BMcUsedM / S16IDFE-XBPM:P1ds:BMcUsedM
S16IDFE-XBPM:P1ds:GapUsedC / S16IDFE-XBPM:P1ds:GapUsedC
S16IDFE-XBPM:P1ds:Wx1UsedM / S16IDFE-XBPM:P1ds:Wx1UsedM
S16IDFE-XBPM:P1ds:Wx2UsedM / S16IDFE-XBPM:P1ds:Wx2UsedM
S16IDFE-XBPM:P1ds:Wx3UsedM / S16IDFE-XBPM:P1ds:Wx3UsedM
S16IDFE-XBPM:P1ds:Wy1UsedM / S16IDFE-XBPM:P1ds:Wy1UsedM
S16IDFE-XBPM:P1ds:Wy2UsedM / S16IDFE-XBPM:P1ds:Wy2UsedM
S16IDFE-XBPM:P1ds:Wy3UsedM / S16IDFE-XBPM:P1ds:Wy3UsedM
S16IDFE-XBPM:P1ds:x / S16IDFE-XBPM:P1ds:x
S16IDFE-XBPM:P1ds:x:CalFactor1M / S16IDFE-XBPM:P1ds:x:CalFactor1M
S16IDFE-XBPM:P1ds:x:CalFactor2M / S16IDFE-XBPM:P1ds:x:CalFactor2M
S16IDFE-XBPM:P1ds:x:LowPass1sM / S16IDFE-XBPM:P1ds:x:LowPass1sM
S16IDFE-XBPM:P1ds:x:LowPass8sM / S16IDFE-XBPM:P1ds:x:LowPass8sM
S16IDFE-XBPM:P1ds:x:LowPass64sM / S16IDFE-XBPM:P1ds:x:LowPass64sM
S16IDFE-XBPM:P1ds:x:Offset1M / S16IDFE-XBPM:P1ds:x:Offset1M
S16IDFE-XBPM:P1ds:x:Offset2M / S16IDFE-XBPM:P1ds:x:Offset2M
S16IDFE-XBPM:P1ds:x:ResolutionM / S16IDFE-XBPM:P1ds:x:ResolutionM
S16IDFE-XBPM:P1ds:x:Resolution1sM / S16IDFE-XBPM:P1ds:x:Resolution1sM
S16IDFE-XBPM:P1ds:x:Resolution8sM / S16IDFE-XBPM:P1ds:x:Resolution8sM
S16IDFE-XBPM:P1ds:x:Resolution64sM / S16IDFE-XBPM:P1ds:x:Resolution64sM
S16IDFE-XBPM:P1ds:x:StdDevM / S16IDFE-XBPM:P1ds:x:StdDevM
S16IDFE-XBPM:P1ds:x:StdDev1sM / S16IDFE-XBPM:P1ds:x:StdDev1sM
S16IDFE-XBPM:P1ds:x:StdDev8sM / S16IDFE-XBPM:P1ds:x:StdDev8sM
S16IDFE-XBPM:P1ds:x:StdDev64sM / S16IDFE-XBPM:P1ds:x:StdDev64sM
S16IDFE-XBPM:P1ds:x1:LowPass1sM / S16IDFE-XBPM:P1ds:x1:LowPass1sM
S16IDFE-XBPM:P1ds:x1:LowPass8sM / S16IDFE-XBPM:P1ds:x1:LowPass8sM
S16IDFE-XBPM:P1ds:x1:LowPass64sM / S16IDFE-XBPM:P1ds:x1:LowPass64sM
S16IDFE-XBPM:P1ds:x2:LowPass1sM / S16IDFE-XBPM:P1ds:x2:LowPass1sM
S16IDFE-XBPM:P1ds:x2:LowPass8sM / S16IDFE-XBPM:P1ds:x2:LowPass8sM
S16IDFE-XBPM:P1ds:x2:LowPass64sM / S16IDFE-XBPM:P1ds:x2:LowPass64sM
S16IDFE-XBPM:P1ds:y / S16IDFE-XBPM:P1ds:y
S16IDFE-XBPM:P1ds:y:CalFactor1M / S16IDFE-XBPM:P1ds:y:CalFactor1M
S16IDFE-XBPM:P1ds:y:CalFactor2M / S16IDFE-XBPM:P1ds:y:CalFactor2M
S16IDFE-XBPM:P1ds:y:LowPass1sM / S16IDFE-XBPM:P1ds:y:LowPass1sM
S16IDFE-XBPM:P1ds:y:LowPass8sM / S16IDFE-XBPM:P1ds:y:LowPass8sM
S16IDFE-XBPM:P1ds:y:LowPass64sM / S16IDFE-XBPM:P1ds:y:LowPass64sM
S16IDFE-XBPM:P1ds:y:Offset1M / S16IDFE-XBPM:P1ds:y:Offset1M
S16IDFE-XBPM:P1ds:y:Offset2M / S16IDFE-XBPM:P1ds:y:Offset2M
S16IDFE-XBPM:P1ds:y:ResolutionM / S16IDFE-XBPM:P1ds:y:ResolutionM
S16IDFE-XBPM:P1ds:y:Resolution1sM / S16IDFE-XBPM:P1ds:y:Resolution1sM
S16IDFE-XBPM:P1ds:y:Resolution8sM / S16IDFE-XBPM:P1ds:y:Resolution8sM
S16IDFE-XBPM:P1ds:y:Resolution64sM / S16IDFE-XBPM:P1ds:y:Resolution64sM
S16IDFE-XBPM:P1ds:y:StdDevM / S16IDFE-XBPM:P1ds:y:StdDevM
S16IDFE-XBPM:P1ds:y:StdDev1sM / S16IDFE-XBPM:P1ds:y:StdDev1sM
S16IDFE-XBPM:P1ds:y:StdDev8sM / S16IDFE-XBPM:P1ds:y:StdDev8sM
S16IDFE-XBPM:P1ds:y:StdDev64sM / S16IDFE-XBPM:P1ds:y:StdDev64sM
S16IDFE-XBPM:P1ds:y1:LowPass1sM / S16IDFE-XBPM:P1ds:y1:LowPass1sM
S16IDFE-XBPM:P1ds:y1:LowPass8sM / S16IDFE-XBPM:P1ds:y1:LowPass8sM
S16IDFE-XBPM:P1ds:y1:LowPass64sM / S16IDFE-XBPM:P1ds:y1:LowPass64sM
S16IDFE-XBPM:P1ds:y2:LowPass1sM / S16IDFE-XBPM:P1ds:y2:LowPass1sM
S16IDFE-XBPM:P1ds:y2:LowPass8sM / S16IDFE-XBPM:P1ds:y2:LowPass8sM
S16IDFE-XBPM:P1ds:y2:LowPass64sM / S16IDFE-XBPM:P1ds:y2:LowPass64sM
S16IDFE-XBPM:P1us:BMcUsedM / S16IDFE-XBPM:P1us:BMcUsedM
S16IDFE-XBPM:P1us:GapUsedC / S16IDFE-XBPM:P1us:GapUsedC
S16IDFE-XBPM:P1us:Wx1UsedM / S16IDFE-XBPM:P1us:Wx1UsedM
S16IDFE-XBPM:P1us:Wx2UsedM / S16IDFE-XBPM:P1us:Wx2UsedM
S16IDFE-XBPM:P1us:Wx3UsedM / S16IDFE-XBPM:P1us:Wx3UsedM
S16IDFE-XBPM:P1us:Wy1UsedM / S16IDFE-XBPM:P1us:Wy1UsedM
S16IDFE-XBPM:P1us:Wy2UsedM / S16IDFE-XBPM:P1us:Wy2UsedM
S16IDFE-XBPM:P1us:Wy3UsedM / S16IDFE-XBPM:P1us:Wy3UsedM
S16IDFE-XBPM:P1us:x / S16IDFE-XBPM:P1us:x
S16IDFE-XBPM:P1us:x:CalFactor1M / S16IDFE-XBPM:P1us:x:CalFactor1M
S16IDFE-XBPM:P1us:x:CalFactor2M / S16IDFE-XBPM:P1us:x:CalFactor2M
S16IDFE-XBPM:P1us:x:LowPass1sM / S16IDFE-XBPM:P1us:x:LowPass1sM
S16IDFE-XBPM:P1us:x:LowPass8sM / S16IDFE-XBPM:P1us:x:LowPass8sM
S16IDFE-XBPM:P1us:x:LowPass64sM / S16IDFE-XBPM:P1us:x:LowPass64sM
S16IDFE-XBPM:P1us:x:Offset1M / S16IDFE-XBPM:P1us:x:Offset1M
S16IDFE-XBPM:P1us:x:Offset2M / S16IDFE-XBPM:P1us:x:Offset2M
S16IDFE-XBPM:P1us:x:ResolutionM / S16IDFE-XBPM:P1us:x:ResolutionM
S16IDFE-XBPM:P1us:x:Resolution1sM / S16IDFE-XBPM:P1us:x:Resolution1sM
S16IDFE-XBPM:P1us:x:Resolution8sM / S16IDFE-XBPM:P1us:x:Resolution8sM
S16IDFE-XBPM:P1us:x:Resolution64sM / S16IDFE-XBPM:P1us:x:Resolution64sM
S16IDFE-XBPM:P1us:x:StdDevM / S16IDFE-XBPM:P1us:x:StdDevM
S16IDFE-XBPM:P1us:x:StdDev1sM / S16IDFE-XBPM:P1us:x:StdDev1sM
S16IDFE-XBPM:P1us:x:StdDev8sM / S16IDFE-XBPM:P1us:x:StdDev8sM
S16IDFE-XBPM:P1us:x:StdDev64sM / S16IDFE-XBPM:P1us:x:StdDev64sM
S16IDFE-XBPM:P1us:x1:LowPass1sM / S16IDFE-XBPM:P1us:x1:LowPass1sM
S16IDFE-XBPM:P1us:x1:LowPass8sM / S16IDFE-XBPM:P1us:x1:LowPass8sM
S16IDFE-XBPM:P1us:x1:LowPass64sM / S16IDFE-XBPM:P1us:x1:LowPass64sM
S16IDFE-XBPM:P1us:x2:LowPass1sM / S16IDFE-XBPM:P1us:x2:LowPass1sM
S16IDFE-XBPM:P1us:x2:LowPass8sM / S16IDFE-XBPM:P1us:x2:LowPass8sM
S16IDFE-XBPM:P1us:x2:LowPass64sM / S16IDFE-XBPM:P1us:x2:LowPass64sM
S16IDFE-XBPM:P1us:y / S16IDFE-XBPM:P1us:y
S16IDFE-XBPM:P1us:y:CalFactor1M / S16IDFE-XBPM:P1us:y:CalFactor1M
S16IDFE-XBPM:P1us:y:CalFactor2M / S16IDFE-XBPM:P1us:y:CalFactor2M
S16IDFE-XBPM:P1us:y:LowPass1sM / S16IDFE-XBPM:P1us:y:LowPass1sM
S16IDFE-XBPM:P1us:y:LowPass8sM / S16IDFE-XBPM:P1us:y:LowPass8sM
S16IDFE-XBPM:P1us:y:LowPass64sM / S16IDFE-XBPM:P1us:y:LowPass64sM
S16IDFE-XBPM:P1us:y:Offset1M / S16IDFE-XBPM:P1us:y:Offset1M
S16IDFE-XBPM:P1us:y:Offset2M / S16IDFE-XBPM:P1us:y:Offset2M
S16IDFE-XBPM:P1us:y:ResolutionM / S16IDFE-XBPM:P1us:y:ResolutionM
S16IDFE-XBPM:P1us:y:Resolution1sM / S16IDFE-XBPM:P1us:y:Resolution1sM
S16IDFE-XBPM:P1us:y:Resolution8sM / S16IDFE-XBPM:P1us:y:Resolution8sM
S16IDFE-XBPM:P1us:y:Resolution64sM / S16IDFE-XBPM:P1us:y:Resolution64sM
S16IDFE-XBPM:P1us:y:StdDevM / S16IDFE-XBPM:P1us:y:StdDevM
S16IDFE-XBPM:P1us:y:StdDev1sM / S16IDFE-XBPM:P1us:y:StdDev1sM
S16IDFE-XBPM:P1us:y:StdDev8sM / S16IDFE-XBPM:P1us:y:StdDev8sM
S16IDFE-XBPM:P1us:y:StdDev64sM / S16IDFE-XBPM:P1us:y:StdDev64sM
S16IDFE-XBPM:P1us:y1:LowPass1sM / S16IDFE-XBPM:P1us:y1:LowPass1sM
S16IDFE-XBPM:P1us:y1:LowPass8sM / S16IDFE-XBPM:P1us:y1:LowPass8sM
S16IDFE-XBPM:P1us:y1:LowPass64sM / S16IDFE-XBPM:P1us:y1:LowPass64sM
S16IDFE-XBPM:P1us:y2:LowPass1sM / S16IDFE-XBPM:P1us:y2:LowPass1sM
S16IDFE-XBPM:P1us:y2:LowPass8sM / S16IDFE-XBPM:P1us:y2:LowPass8sM
S16IDFE-XBPM:P1us:y2:LowPass64sM / S16IDFE-XBPM:P1us:y2:LowPass64sM
S16IDFE-XBPM:P2ds:GapUsedC / S16IDFE-XBPM:P2ds:GapUsedC
S16IDFE-XBPM:P2ds:XCalM / S16IDFE-XBPM:P2ds:XCalM
S16IDFE-XBPM:P2ds:YCalM / S16IDFE-XBPM:P2ds:YCalM
S16IDFE-XBPM:P2ds:x:CalFactorM / S16IDFE-XBPM:P2ds:x:CalFactorM
S16IDFE-XBPM:P2ds:x:OffsetM / S16IDFE-XBPM:P2ds:x:OffsetM
S16IDFE-XBPM:P2ds:y:CalFactorM / S16IDFE-XBPM:P2ds:y:CalFactorM
S16IDFE-XBPM:P2ds:y:OffsetM / S16IDFE-XBPM:P2ds:y:OffsetM
S16IDFE-XBPM:P2us:GapUsedC / S16IDFE-XBPM:P2us:GapUsedC
S16IDFE-XBPM:P2us:XCalM / S16IDFE-XBPM:P2us:XCalM
S16IDFE-XBPM:P2us:YCalM / S16IDFE-XBPM:P2us:YCalM
S16IDFE-XBPM:P2us:x:CalFactorM / S16IDFE-XBPM:P2us:x:CalFactorM
S16IDFE-XBPM:P2us:x:OffsetM / S16IDFE-XBPM:P2us:x:OffsetM
S16IDFE-XBPM:P2us:y:CalFactorM / S16IDFE-XBPM:P2us:y:CalFactorM
S16IDFE-XBPM:P2us:y:OffsetM / S16IDFE-XBPM:P2us:y:OffsetM
S17BMFE-XBPM:P1:AM / S17BMFE-XBPM:P1:AM
S17BMFE-XBPM:P1:BM / S17BMFE-XBPM:P1:BM
S17BMFE-XBPM:P1:y / S17BMFE-XBPM:P1:y
S17BMFE-XBPM:P1:y:LowPass1sM / S17BMFE-XBPM:P1:y:LowPass1sM
S17BMFE-XBPM:P1:y:LowPass8sM / S17BMFE-XBPM:P1:y:LowPass8sM
S17BMFE-XBPM:P1:y:LowPass64sM / S17BMFE-XBPM:P1:y:LowPass64sM
S17BMFE-XBPM:P1:y:StdDevM / S17BMFE-XBPM:P1:y:StdDevM
S17BMFE-XBPM:P1:y:StdDev1sM / S17BMFE-XBPM:P1:y:StdDev1sM
S17BMFE-XBPM:P1:y:StdDev8sM / S17BMFE-XBPM:P1:y:StdDev8sM
S17BMFE-XBPM:P1:y:StdDev64sM / S17BMFE-XBPM:P1:y:StdDev64sM
S17BMFE-XBPM:P2:AM / S17BMFE-XBPM:P2:AM
S17BMFE-XBPM:P2:BM / S17BMFE-XBPM:P2:BM
S17BMFE-XBPM:P2:y / S17BMFE-XBPM:P2:y
S17BMFE-XBPM:P2:y:LowPass1sM / S17BMFE-XBPM:P2:y:LowPass1sM
S17BMFE-XBPM:P2:y:LowPass8sM / S17BMFE-XBPM:P2:y:LowPass8sM
S17BMFE-XBPM:P2:y:LowPass64sM / S17BMFE-XBPM:P2:y:LowPass64sM
S17BMFE-XBPM:P2:y:StdDevM / S17BMFE-XBPM:P2:y:StdDevM
S17BMFE-XBPM:P2:y:StdDev1sM / S17BMFE-XBPM:P2:y:StdDev1sM
S17BMFE-XBPM:P2:y:StdDev8sM / S17BMFE-XBPM:P2:y:StdDev8sM
S17BMFE-XBPM:P2:y:StdDev64sM / S17BMFE-XBPM:P2:y:StdDev64sM
S17IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S17IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S17IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S17IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S17IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S17IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S17IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S17IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S17IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S17IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S17IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S17IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S17IDFE-XBPM:CM1ds:PositionOffsetX / S17IDFE-XBPM:CM1ds:PositionOffsetX
S17IDFE-XBPM:CM1ds:PositionOffsetY / S17IDFE-XBPM:CM1ds:PositionOffsetY
S17IDFE-XBPM:CM1ds:PositionScaleX / S17IDFE-XBPM:CM1ds:PositionScaleX
S17IDFE-XBPM:CM1ds:PositionScaleY / S17IDFE-XBPM:CM1ds:PositionScaleY
S17IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S17IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S17IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S17IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S17IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S17IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S17IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S17IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S17IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S17IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S17IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S17IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S17IDFE-XBPM:CM2ds:PositionOffsetX / S17IDFE-XBPM:CM2ds:PositionOffsetX
S17IDFE-XBPM:CM2ds:PositionOffsetY / S17IDFE-XBPM:CM2ds:PositionOffsetY
S17IDFE-XBPM:CM2ds:PositionScaleX / S17IDFE-XBPM:CM2ds:PositionScaleX
S17IDFE-XBPM:CM2ds:PositionScaleY / S17IDFE-XBPM:CM2ds:PositionScaleY
S17IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S17IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S17IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S17IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S17IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S17IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S17IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S17IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S17IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S17IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S17IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S17IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S17IDFE-XBPM:CM3ds:PositionOffsetX / S17IDFE-XBPM:CM3ds:PositionOffsetX
S17IDFE-XBPM:CM3ds:PositionOffsetY / S17IDFE-XBPM:CM3ds:PositionOffsetY
S17IDFE-XBPM:CM3ds:PositionScaleX / S17IDFE-XBPM:CM3ds:PositionScaleX
S17IDFE-XBPM:CM3ds:PositionScaleY / S17IDFE-XBPM:CM3ds:PositionScaleY
S17IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S17IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S17IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S17IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S17IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S17IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S17IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S17IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S17IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S17IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S17IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S17IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S17IDFE-XBPM:CM4ds:PositionOffsetX / S17IDFE-XBPM:CM4ds:PositionOffsetX
S17IDFE-XBPM:CM4ds:PositionOffsetY / S17IDFE-XBPM:CM4ds:PositionOffsetY
S17IDFE-XBPM:CM4ds:PositionScaleX / S17IDFE-XBPM:CM4ds:PositionScaleX
S17IDFE-XBPM:CM4ds:PositionScaleY / S17IDFE-XBPM:CM4ds:PositionScaleY
S17IDFE-XBPM:P1ds:BMcUsedM / S17IDFE-XBPM:P1ds:BMcUsedM
S17IDFE-XBPM:P1ds:GapUsedC / S17IDFE-XBPM:P1ds:GapUsedC
S17IDFE-XBPM:P1ds:Wx1UsedM / S17IDFE-XBPM:P1ds:Wx1UsedM
S17IDFE-XBPM:P1ds:Wx2UsedM / S17IDFE-XBPM:P1ds:Wx2UsedM
S17IDFE-XBPM:P1ds:Wx3UsedM / S17IDFE-XBPM:P1ds:Wx3UsedM
S17IDFE-XBPM:P1ds:Wy1UsedM / S17IDFE-XBPM:P1ds:Wy1UsedM
S17IDFE-XBPM:P1ds:Wy2UsedM / S17IDFE-XBPM:P1ds:Wy2UsedM
S17IDFE-XBPM:P1ds:Wy3UsedM / S17IDFE-XBPM:P1ds:Wy3UsedM
S17IDFE-XBPM:P1ds:x / S17IDFE-XBPM:P1ds:x
S17IDFE-XBPM:P1ds:x:CalFactor1M / S17IDFE-XBPM:P1ds:x:CalFactor1M
S17IDFE-XBPM:P1ds:x:CalFactor2M / S17IDFE-XBPM:P1ds:x:CalFactor2M
S17IDFE-XBPM:P1ds:x:LowPass1sM / S17IDFE-XBPM:P1ds:x:LowPass1sM
S17IDFE-XBPM:P1ds:x:LowPass8sM / S17IDFE-XBPM:P1ds:x:LowPass8sM
S17IDFE-XBPM:P1ds:x:LowPass64sM / S17IDFE-XBPM:P1ds:x:LowPass64sM
S17IDFE-XBPM:P1ds:x:Offset1M / S17IDFE-XBPM:P1ds:x:Offset1M
S17IDFE-XBPM:P1ds:x:Offset2M / S17IDFE-XBPM:P1ds:x:Offset2M
S17IDFE-XBPM:P1ds:x:ResolutionM / S17IDFE-XBPM:P1ds:x:ResolutionM
S17IDFE-XBPM:P1ds:x:Resolution1sM / S17IDFE-XBPM:P1ds:x:Resolution1sM
S17IDFE-XBPM:P1ds:x:Resolution8sM / S17IDFE-XBPM:P1ds:x:Resolution8sM
S17IDFE-XBPM:P1ds:x:Resolution64sM / S17IDFE-XBPM:P1ds:x:Resolution64sM
S17IDFE-XBPM:P1ds:x:StdDevM / S17IDFE-XBPM:P1ds:x:StdDevM
S17IDFE-XBPM:P1ds:x:StdDev1sM / S17IDFE-XBPM:P1ds:x:StdDev1sM
S17IDFE-XBPM:P1ds:x:StdDev8sM / S17IDFE-XBPM:P1ds:x:StdDev8sM
S17IDFE-XBPM:P1ds:x:StdDev64sM / S17IDFE-XBPM:P1ds:x:StdDev64sM
S17IDFE-XBPM:P1ds:x1:LowPass1sM / S17IDFE-XBPM:P1ds:x1:LowPass1sM
S17IDFE-XBPM:P1ds:x1:LowPass8sM / S17IDFE-XBPM:P1ds:x1:LowPass8sM
S17IDFE-XBPM:P1ds:x1:LowPass64sM / S17IDFE-XBPM:P1ds:x1:LowPass64sM
S17IDFE-XBPM:P1ds:x2:LowPass1sM / S17IDFE-XBPM:P1ds:x2:LowPass1sM
S17IDFE-XBPM:P1ds:x2:LowPass8sM / S17IDFE-XBPM:P1ds:x2:LowPass8sM
S17IDFE-XBPM:P1ds:x2:LowPass64sM / S17IDFE-XBPM:P1ds:x2:LowPass64sM
S17IDFE-XBPM:P1ds:y / S17IDFE-XBPM:P1ds:y
S17IDFE-XBPM:P1ds:y:CalFactor1M / S17IDFE-XBPM:P1ds:y:CalFactor1M
S17IDFE-XBPM:P1ds:y:CalFactor2M / S17IDFE-XBPM:P1ds:y:CalFactor2M
S17IDFE-XBPM:P1ds:y:LowPass1sM / S17IDFE-XBPM:P1ds:y:LowPass1sM
S17IDFE-XBPM:P1ds:y:LowPass8sM / S17IDFE-XBPM:P1ds:y:LowPass8sM
S17IDFE-XBPM:P1ds:y:LowPass64sM / S17IDFE-XBPM:P1ds:y:LowPass64sM
S17IDFE-XBPM:P1ds:y:Offset1M / S17IDFE-XBPM:P1ds:y:Offset1M
S17IDFE-XBPM:P1ds:y:Offset2M / S17IDFE-XBPM:P1ds:y:Offset2M
S17IDFE-XBPM:P1ds:y:ResolutionM / S17IDFE-XBPM:P1ds:y:ResolutionM
S17IDFE-XBPM:P1ds:y:Resolution1sM / S17IDFE-XBPM:P1ds:y:Resolution1sM
S17IDFE-XBPM:P1ds:y:Resolution8sM / S17IDFE-XBPM:P1ds:y:Resolution8sM
S17IDFE-XBPM:P1ds:y:Resolution64sM / S17IDFE-XBPM:P1ds:y:Resolution64sM
S17IDFE-XBPM:P1ds:y:StdDevM / S17IDFE-XBPM:P1ds:y:StdDevM
S17IDFE-XBPM:P1ds:y:StdDev1sM / S17IDFE-XBPM:P1ds:y:StdDev1sM
S17IDFE-XBPM:P1ds:y:StdDev8sM / S17IDFE-XBPM:P1ds:y:StdDev8sM
S17IDFE-XBPM:P1ds:y:StdDev64sM / S17IDFE-XBPM:P1ds:y:StdDev64sM
S17IDFE-XBPM:P1ds:y1:LowPass1sM / S17IDFE-XBPM:P1ds:y1:LowPass1sM
S17IDFE-XBPM:P1ds:y1:LowPass8sM / S17IDFE-XBPM:P1ds:y1:LowPass8sM
S17IDFE-XBPM:P1ds:y1:LowPass64sM / S17IDFE-XBPM:P1ds:y1:LowPass64sM
S17IDFE-XBPM:P1ds:y2:LowPass1sM / S17IDFE-XBPM:P1ds:y2:LowPass1sM
S17IDFE-XBPM:P1ds:y2:LowPass8sM / S17IDFE-XBPM:P1ds:y2:LowPass8sM
S17IDFE-XBPM:P1ds:y2:LowPass64sM / S17IDFE-XBPM:P1ds:y2:LowPass64sM
S17IDFE-XBPM:P2ds:GapUsedC / S17IDFE-XBPM:P2ds:GapUsedC
S17IDFE-XBPM:P2ds:XCalM / S17IDFE-XBPM:P2ds:XCalM
S17IDFE-XBPM:P2ds:YCalM / S17IDFE-XBPM:P2ds:YCalM
S17IDFE-XBPM:P2ds:x:CalFactorM / S17IDFE-XBPM:P2ds:x:CalFactorM
S17IDFE-XBPM:P2ds:x:OffsetM / S17IDFE-XBPM:P2ds:x:OffsetM
S17IDFE-XBPM:P2ds:y:CalFactorM / S17IDFE-XBPM:P2ds:y:CalFactorM
S17IDFE-XBPM:P2ds:y:OffsetM / S17IDFE-XBPM:P2ds:y:OffsetM
S18IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S18IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S18IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S18IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S18IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S18IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S18IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S18IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S18IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S18IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S18IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S18IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S18IDFE-XBPM:CM1ds:PositionOffsetX / S18IDFE-XBPM:CM1ds:PositionOffsetX
S18IDFE-XBPM:CM1ds:PositionOffsetY / S18IDFE-XBPM:CM1ds:PositionOffsetY
S18IDFE-XBPM:CM1ds:PositionScaleX / S18IDFE-XBPM:CM1ds:PositionScaleX
S18IDFE-XBPM:CM1ds:PositionScaleY / S18IDFE-XBPM:CM1ds:PositionScaleY
S18IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S18IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S18IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S18IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S18IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S18IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S18IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S18IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S18IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S18IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S18IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S18IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S18IDFE-XBPM:CM2ds:PositionOffsetX / S18IDFE-XBPM:CM2ds:PositionOffsetX
S18IDFE-XBPM:CM2ds:PositionOffsetY / S18IDFE-XBPM:CM2ds:PositionOffsetY
S18IDFE-XBPM:CM2ds:PositionScaleX / S18IDFE-XBPM:CM2ds:PositionScaleX
S18IDFE-XBPM:CM2ds:PositionScaleY / S18IDFE-XBPM:CM2ds:PositionScaleY
S18IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S18IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S18IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S18IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S18IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S18IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S18IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S18IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S18IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S18IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S18IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S18IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S18IDFE-XBPM:CM3ds:PositionOffsetX / S18IDFE-XBPM:CM3ds:PositionOffsetX
S18IDFE-XBPM:CM3ds:PositionOffsetY / S18IDFE-XBPM:CM3ds:PositionOffsetY
S18IDFE-XBPM:CM3ds:PositionScaleX / S18IDFE-XBPM:CM3ds:PositionScaleX
S18IDFE-XBPM:CM3ds:PositionScaleY / S18IDFE-XBPM:CM3ds:PositionScaleY
S18IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S18IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S18IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S18IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S18IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S18IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S18IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S18IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S18IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S18IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S18IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S18IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S18IDFE-XBPM:CM4ds:PositionOffsetX / S18IDFE-XBPM:CM4ds:PositionOffsetX
S18IDFE-XBPM:CM4ds:PositionOffsetY / S18IDFE-XBPM:CM4ds:PositionOffsetY
S18IDFE-XBPM:CM4ds:PositionScaleX / S18IDFE-XBPM:CM4ds:PositionScaleX
S18IDFE-XBPM:CM4ds:PositionScaleY / S18IDFE-XBPM:CM4ds:PositionScaleY
S18IDFE-XBPM:P1ds:BMcUsedM / S18IDFE-XBPM:P1ds:BMcUsedM
S18IDFE-XBPM:P1ds:GapUsedC / S18IDFE-XBPM:P1ds:GapUsedC
S18IDFE-XBPM:P1ds:Wx1UsedM / S18IDFE-XBPM:P1ds:Wx1UsedM
S18IDFE-XBPM:P1ds:Wx2UsedM / S18IDFE-XBPM:P1ds:Wx2UsedM
S18IDFE-XBPM:P1ds:Wx3UsedM / S18IDFE-XBPM:P1ds:Wx3UsedM
S18IDFE-XBPM:P1ds:Wy1UsedM / S18IDFE-XBPM:P1ds:Wy1UsedM
S18IDFE-XBPM:P1ds:Wy2UsedM / S18IDFE-XBPM:P1ds:Wy2UsedM
S18IDFE-XBPM:P1ds:Wy3UsedM / S18IDFE-XBPM:P1ds:Wy3UsedM
S18IDFE-XBPM:P1ds:x / S18IDFE-XBPM:P1ds:x
S18IDFE-XBPM:P1ds:x:CalFactor1M / S18IDFE-XBPM:P1ds:x:CalFactor1M
S18IDFE-XBPM:P1ds:x:CalFactor2M / S18IDFE-XBPM:P1ds:x:CalFactor2M
S18IDFE-XBPM:P1ds:x:LowPass1sM / S18IDFE-XBPM:P1ds:x:LowPass1sM
S18IDFE-XBPM:P1ds:x:LowPass8sM / S18IDFE-XBPM:P1ds:x:LowPass8sM
S18IDFE-XBPM:P1ds:x:LowPass64sM / S18IDFE-XBPM:P1ds:x:LowPass64sM
S18IDFE-XBPM:P1ds:x:Offset1M / S18IDFE-XBPM:P1ds:x:Offset1M
S18IDFE-XBPM:P1ds:x:Offset2M / S18IDFE-XBPM:P1ds:x:Offset2M
S18IDFE-XBPM:P1ds:x:ResolutionM / S18IDFE-XBPM:P1ds:x:ResolutionM
S18IDFE-XBPM:P1ds:x:Resolution1sM / S18IDFE-XBPM:P1ds:x:Resolution1sM
S18IDFE-XBPM:P1ds:x:Resolution8sM / S18IDFE-XBPM:P1ds:x:Resolution8sM
S18IDFE-XBPM:P1ds:x:Resolution64sM / S18IDFE-XBPM:P1ds:x:Resolution64sM
S18IDFE-XBPM:P1ds:x:StdDevM / S18IDFE-XBPM:P1ds:x:StdDevM
S18IDFE-XBPM:P1ds:x:StdDev1sM / S18IDFE-XBPM:P1ds:x:StdDev1sM
S18IDFE-XBPM:P1ds:x:StdDev8sM / S18IDFE-XBPM:P1ds:x:StdDev8sM
S18IDFE-XBPM:P1ds:x:StdDev64sM / S18IDFE-XBPM:P1ds:x:StdDev64sM
S18IDFE-XBPM:P1ds:x1:LowPass1sM / S18IDFE-XBPM:P1ds:x1:LowPass1sM
S18IDFE-XBPM:P1ds:x1:LowPass8sM / S18IDFE-XBPM:P1ds:x1:LowPass8sM
S18IDFE-XBPM:P1ds:x1:LowPass64sM / S18IDFE-XBPM:P1ds:x1:LowPass64sM
S18IDFE-XBPM:P1ds:x2:LowPass1sM / S18IDFE-XBPM:P1ds:x2:LowPass1sM
S18IDFE-XBPM:P1ds:x2:LowPass8sM / S18IDFE-XBPM:P1ds:x2:LowPass8sM
S18IDFE-XBPM:P1ds:x2:LowPass64sM / S18IDFE-XBPM:P1ds:x2:LowPass64sM
S18IDFE-XBPM:P1ds:y / S18IDFE-XBPM:P1ds:y
S18IDFE-XBPM:P1ds:y:CalFactor1M / S18IDFE-XBPM:P1ds:y:CalFactor1M
S18IDFE-XBPM:P1ds:y:CalFactor2M / S18IDFE-XBPM:P1ds:y:CalFactor2M
S18IDFE-XBPM:P1ds:y:LowPass1sM / S18IDFE-XBPM:P1ds:y:LowPass1sM
S18IDFE-XBPM:P1ds:y:LowPass8sM / S18IDFE-XBPM:P1ds:y:LowPass8sM
S18IDFE-XBPM:P1ds:y:LowPass64sM / S18IDFE-XBPM:P1ds:y:LowPass64sM
S18IDFE-XBPM:P1ds:y:Offset1M / S18IDFE-XBPM:P1ds:y:Offset1M
S18IDFE-XBPM:P1ds:y:Offset2M / S18IDFE-XBPM:P1ds:y:Offset2M
S18IDFE-XBPM:P1ds:y:ResolutionM / S18IDFE-XBPM:P1ds:y:ResolutionM
S18IDFE-XBPM:P1ds:y:Resolution1sM / S18IDFE-XBPM:P1ds:y:Resolution1sM
S18IDFE-XBPM:P1ds:y:Resolution8sM / S18IDFE-XBPM:P1ds:y:Resolution8sM
S18IDFE-XBPM:P1ds:y:Resolution64sM / S18IDFE-XBPM:P1ds:y:Resolution64sM
S18IDFE-XBPM:P1ds:y:StdDevM / S18IDFE-XBPM:P1ds:y:StdDevM
S18IDFE-XBPM:P1ds:y:StdDev1sM / S18IDFE-XBPM:P1ds:y:StdDev1sM
S18IDFE-XBPM:P1ds:y:StdDev8sM / S18IDFE-XBPM:P1ds:y:StdDev8sM
S18IDFE-XBPM:P1ds:y:StdDev64sM / S18IDFE-XBPM:P1ds:y:StdDev64sM
S18IDFE-XBPM:P1ds:y1:LowPass1sM / S18IDFE-XBPM:P1ds:y1:LowPass1sM
S18IDFE-XBPM:P1ds:y1:LowPass8sM / S18IDFE-XBPM:P1ds:y1:LowPass8sM
S18IDFE-XBPM:P1ds:y1:LowPass64sM / S18IDFE-XBPM:P1ds:y1:LowPass64sM
S18IDFE-XBPM:P1ds:y2:LowPass1sM / S18IDFE-XBPM:P1ds:y2:LowPass1sM
S18IDFE-XBPM:P1ds:y2:LowPass8sM / S18IDFE-XBPM:P1ds:y2:LowPass8sM
S18IDFE-XBPM:P1ds:y2:LowPass64sM / S18IDFE-XBPM:P1ds:y2:LowPass64sM
S18IDFE-XBPM:P2ds:GapUsedC / S18IDFE-XBPM:P2ds:GapUsedC
S18IDFE-XBPM:P2ds:XCalM / S18IDFE-XBPM:P2ds:XCalM
S18IDFE-XBPM:P2ds:YCalM / S18IDFE-XBPM:P2ds:YCalM
S18IDFE-XBPM:P2ds:x:CalFactorM / S18IDFE-XBPM:P2ds:x:CalFactorM
S18IDFE-XBPM:P2ds:x:OffsetM / S18IDFE-XBPM:P2ds:x:OffsetM
S18IDFE-XBPM:P2ds:y:CalFactorM / S18IDFE-XBPM:P2ds:y:CalFactorM
S18IDFE-XBPM:P2ds:y:OffsetM / S18IDFE-XBPM:P2ds:y:OffsetM
S19BMFE-XBPM:P1:AM / S19BMFE-XBPM:P1:AM
S19BMFE-XBPM:P1:BM / S19BMFE-XBPM:P1:BM
S19BMFE-XBPM:P1:y / S19BMFE-XBPM:P1:y
S19BMFE-XBPM:P1:y:LowPass1sM / S19BMFE-XBPM:P1:y:LowPass1sM
S19BMFE-XBPM:P1:y:LowPass8sM / S19BMFE-XBPM:P1:y:LowPass8sM
S19BMFE-XBPM:P1:y:LowPass64sM / S19BMFE-XBPM:P1:y:LowPass64sM
S19BMFE-XBPM:P1:y:StdDevM / S19BMFE-XBPM:P1:y:StdDevM
S19BMFE-XBPM:P1:y:StdDev1sM / S19BMFE-XBPM:P1:y:StdDev1sM
S19BMFE-XBPM:P1:y:StdDev8sM / S19BMFE-XBPM:P1:y:StdDev8sM
S19BMFE-XBPM:P1:y:StdDev64sM / S19BMFE-XBPM:P1:y:StdDev64sM
S19BMFE-XBPM:P2:AM / S19BMFE-XBPM:P2:AM
S19BMFE-XBPM:P2:BM / S19BMFE-XBPM:P2:BM
S19BMFE-XBPM:P2:y / S19BMFE-XBPM:P2:y
S19BMFE-XBPM:P2:y:LowPass1sM / S19BMFE-XBPM:P2:y:LowPass1sM
S19BMFE-XBPM:P2:y:LowPass8sM / S19BMFE-XBPM:P2:y:LowPass8sM
S19BMFE-XBPM:P2:y:LowPass64sM / S19BMFE-XBPM:P2:y:LowPass64sM
S19BMFE-XBPM:P2:y:StdDevM / S19BMFE-XBPM:P2:y:StdDevM
S19BMFE-XBPM:P2:y:StdDev1sM / S19BMFE-XBPM:P2:y:StdDev1sM
S19BMFE-XBPM:P2:y:StdDev8sM / S19BMFE-XBPM:P2:y:StdDev8sM
S19BMFE-XBPM:P2:y:StdDev64sM / S19BMFE-XBPM:P2:y:StdDev64sM
S19IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S19IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S19IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S19IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S19IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S19IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S19IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S19IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S19IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S19IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S19IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S19IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S19IDFE-XBPM:CM1ds:PositionOffsetX / S19IDFE-XBPM:CM1ds:PositionOffsetX
S19IDFE-XBPM:CM1ds:PositionOffsetY / S19IDFE-XBPM:CM1ds:PositionOffsetY
S19IDFE-XBPM:CM1ds:PositionScaleX / S19IDFE-XBPM:CM1ds:PositionScaleX
S19IDFE-XBPM:CM1ds:PositionScaleY / S19IDFE-XBPM:CM1ds:PositionScaleY
S19IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S19IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S19IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S19IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S19IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S19IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S19IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S19IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S19IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S19IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S19IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S19IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S19IDFE-XBPM:CM2ds:PositionOffsetX / S19IDFE-XBPM:CM2ds:PositionOffsetX
S19IDFE-XBPM:CM2ds:PositionOffsetY / S19IDFE-XBPM:CM2ds:PositionOffsetY
S19IDFE-XBPM:CM2ds:PositionScaleX / S19IDFE-XBPM:CM2ds:PositionScaleX
S19IDFE-XBPM:CM2ds:PositionScaleY / S19IDFE-XBPM:CM2ds:PositionScaleY
S19IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S19IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S19IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S19IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S19IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S19IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S19IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S19IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S19IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S19IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S19IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S19IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S19IDFE-XBPM:CM3ds:PositionOffsetX / S19IDFE-XBPM:CM3ds:PositionOffsetX
S19IDFE-XBPM:CM3ds:PositionOffsetY / S19IDFE-XBPM:CM3ds:PositionOffsetY
S19IDFE-XBPM:CM3ds:PositionScaleX / S19IDFE-XBPM:CM3ds:PositionScaleX
S19IDFE-XBPM:CM3ds:PositionScaleY / S19IDFE-XBPM:CM3ds:PositionScaleY
S19IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S19IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S19IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S19IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S19IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S19IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S19IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S19IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S19IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S19IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S19IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S19IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S19IDFE-XBPM:CM4ds:PositionOffsetX / S19IDFE-XBPM:CM4ds:PositionOffsetX
S19IDFE-XBPM:CM4ds:PositionOffsetY / S19IDFE-XBPM:CM4ds:PositionOffsetY
S19IDFE-XBPM:CM4ds:PositionScaleX / S19IDFE-XBPM:CM4ds:PositionScaleX
S19IDFE-XBPM:CM4ds:PositionScaleY / S19IDFE-XBPM:CM4ds:PositionScaleY
S19IDFE-XBPM:P1ds:BMcUsedM / S19IDFE-XBPM:P1ds:BMcUsedM
S19IDFE-XBPM:P1ds:GapUsedC / S19IDFE-XBPM:P1ds:GapUsedC
S19IDFE-XBPM:P1ds:Wx1UsedM / S19IDFE-XBPM:P1ds:Wx1UsedM
S19IDFE-XBPM:P1ds:Wx2UsedM / S19IDFE-XBPM:P1ds:Wx2UsedM
S19IDFE-XBPM:P1ds:Wx3UsedM / S19IDFE-XBPM:P1ds:Wx3UsedM
S19IDFE-XBPM:P1ds:Wy1UsedM / S19IDFE-XBPM:P1ds:Wy1UsedM
S19IDFE-XBPM:P1ds:Wy2UsedM / S19IDFE-XBPM:P1ds:Wy2UsedM
S19IDFE-XBPM:P1ds:Wy3UsedM / S19IDFE-XBPM:P1ds:Wy3UsedM
S19IDFE-XBPM:P1ds:x / S19IDFE-XBPM:P1ds:x
S19IDFE-XBPM:P1ds:x:CalFactor1M / S19IDFE-XBPM:P1ds:x:CalFactor1M
S19IDFE-XBPM:P1ds:x:CalFactor2M / S19IDFE-XBPM:P1ds:x:CalFactor2M
S19IDFE-XBPM:P1ds:x:LowPass1sM / S19IDFE-XBPM:P1ds:x:LowPass1sM
S19IDFE-XBPM:P1ds:x:LowPass8sM / S19IDFE-XBPM:P1ds:x:LowPass8sM
S19IDFE-XBPM:P1ds:x:LowPass64sM / S19IDFE-XBPM:P1ds:x:LowPass64sM
S19IDFE-XBPM:P1ds:x:Offset1M / S19IDFE-XBPM:P1ds:x:Offset1M
S19IDFE-XBPM:P1ds:x:Offset2M / S19IDFE-XBPM:P1ds:x:Offset2M
S19IDFE-XBPM:P1ds:x:ResolutionM / S19IDFE-XBPM:P1ds:x:ResolutionM
S19IDFE-XBPM:P1ds:x:Resolution1sM / S19IDFE-XBPM:P1ds:x:Resolution1sM
S19IDFE-XBPM:P1ds:x:Resolution8sM / S19IDFE-XBPM:P1ds:x:Resolution8sM
S19IDFE-XBPM:P1ds:x:Resolution64sM / S19IDFE-XBPM:P1ds:x:Resolution64sM
S19IDFE-XBPM:P1ds:x:StdDevM / S19IDFE-XBPM:P1ds:x:StdDevM
S19IDFE-XBPM:P1ds:x:StdDev1sM / S19IDFE-XBPM:P1ds:x:StdDev1sM
S19IDFE-XBPM:P1ds:x:StdDev8sM / S19IDFE-XBPM:P1ds:x:StdDev8sM
S19IDFE-XBPM:P1ds:x:StdDev64sM / S19IDFE-XBPM:P1ds:x:StdDev64sM
S19IDFE-XBPM:P1ds:x1:LowPass1sM / S19IDFE-XBPM:P1ds:x1:LowPass1sM
S19IDFE-XBPM:P1ds:x1:LowPass8sM / S19IDFE-XBPM:P1ds:x1:LowPass8sM
S19IDFE-XBPM:P1ds:x1:LowPass64sM / S19IDFE-XBPM:P1ds:x1:LowPass64sM
S19IDFE-XBPM:P1ds:x2:LowPass1sM / S19IDFE-XBPM:P1ds:x2:LowPass1sM
S19IDFE-XBPM:P1ds:x2:LowPass8sM / S19IDFE-XBPM:P1ds:x2:LowPass8sM
S19IDFE-XBPM:P1ds:x2:LowPass64sM / S19IDFE-XBPM:P1ds:x2:LowPass64sM
S19IDFE-XBPM:P1ds:y / S19IDFE-XBPM:P1ds:y
S19IDFE-XBPM:P1ds:y:CalFactor1M / S19IDFE-XBPM:P1ds:y:CalFactor1M
S19IDFE-XBPM:P1ds:y:CalFactor2M / S19IDFE-XBPM:P1ds:y:CalFactor2M
S19IDFE-XBPM:P1ds:y:LowPass1sM / S19IDFE-XBPM:P1ds:y:LowPass1sM
S19IDFE-XBPM:P1ds:y:LowPass8sM / S19IDFE-XBPM:P1ds:y:LowPass8sM
S19IDFE-XBPM:P1ds:y:LowPass64sM / S19IDFE-XBPM:P1ds:y:LowPass64sM
S19IDFE-XBPM:P1ds:y:Offset1M / S19IDFE-XBPM:P1ds:y:Offset1M
S19IDFE-XBPM:P1ds:y:Offset2M / S19IDFE-XBPM:P1ds:y:Offset2M
S19IDFE-XBPM:P1ds:y:ResolutionM / S19IDFE-XBPM:P1ds:y:ResolutionM
S19IDFE-XBPM:P1ds:y:Resolution1sM / S19IDFE-XBPM:P1ds:y:Resolution1sM
S19IDFE-XBPM:P1ds:y:Resolution8sM / S19IDFE-XBPM:P1ds:y:Resolution8sM
S19IDFE-XBPM:P1ds:y:Resolution64sM / S19IDFE-XBPM:P1ds:y:Resolution64sM
S19IDFE-XBPM:P1ds:y:StdDevM / S19IDFE-XBPM:P1ds:y:StdDevM
S19IDFE-XBPM:P1ds:y:StdDev1sM / S19IDFE-XBPM:P1ds:y:StdDev1sM
S19IDFE-XBPM:P1ds:y:StdDev8sM / S19IDFE-XBPM:P1ds:y:StdDev8sM
S19IDFE-XBPM:P1ds:y:StdDev64sM / S19IDFE-XBPM:P1ds:y:StdDev64sM
S19IDFE-XBPM:P1ds:y1:LowPass1sM / S19IDFE-XBPM:P1ds:y1:LowPass1sM
S19IDFE-XBPM:P1ds:y1:LowPass8sM / S19IDFE-XBPM:P1ds:y1:LowPass8sM
S19IDFE-XBPM:P1ds:y1:LowPass64sM / S19IDFE-XBPM:P1ds:y1:LowPass64sM
S19IDFE-XBPM:P1ds:y2:LowPass1sM / S19IDFE-XBPM:P1ds:y2:LowPass1sM
S19IDFE-XBPM:P1ds:y2:LowPass8sM / S19IDFE-XBPM:P1ds:y2:LowPass8sM
S19IDFE-XBPM:P1ds:y2:LowPass64sM / S19IDFE-XBPM:P1ds:y2:LowPass64sM
S19IDFE-XBPM:P2ds:GapUsedC / S19IDFE-XBPM:P2ds:GapUsedC
S19IDFE-XBPM:P2ds:XCalM / S19IDFE-XBPM:P2ds:XCalM
S19IDFE-XBPM:P2ds:YCalM / S19IDFE-XBPM:P2ds:YCalM
S19IDFE-XBPM:P2ds:x:CalFactorM / S19IDFE-XBPM:P2ds:x:CalFactorM
S19IDFE-XBPM:P2ds:x:OffsetM / S19IDFE-XBPM:P2ds:x:OffsetM
S19IDFE-XBPM:P2ds:y:CalFactorM / S19IDFE-XBPM:P2ds:y:CalFactorM
S19IDFE-XBPM:P2ds:y:OffsetM / S19IDFE-XBPM:P2ds:y:OffsetM
S20BMFE-XBPM:P1:AM / S20BMFE-XBPM:P1:AM
S20BMFE-XBPM:P1:BM / S20BMFE-XBPM:P1:BM
S20BMFE-XBPM:P1:y / S20BMFE-XBPM:P1:y
S20BMFE-XBPM:P1:y:LowPass1sM / S20BMFE-XBPM:P1:y:LowPass1sM
S20BMFE-XBPM:P1:y:LowPass8sM / S20BMFE-XBPM:P1:y:LowPass8sM
S20BMFE-XBPM:P1:y:LowPass64sM / S20BMFE-XBPM:P1:y:LowPass64sM
S20BMFE-XBPM:P1:y:StdDevM / S20BMFE-XBPM:P1:y:StdDevM
S20BMFE-XBPM:P1:y:StdDev1sM / S20BMFE-XBPM:P1:y:StdDev1sM
S20BMFE-XBPM:P1:y:StdDev8sM / S20BMFE-XBPM:P1:y:StdDev8sM
S20BMFE-XBPM:P1:y:StdDev64sM / S20BMFE-XBPM:P1:y:StdDev64sM
S20BMFE-XBPM:P2:AM / S20BMFE-XBPM:P2:AM
S20BMFE-XBPM:P2:BM / S20BMFE-XBPM:P2:BM
S20BMFE-XBPM:P2:y / S20BMFE-XBPM:P2:y
S20BMFE-XBPM:P2:y:LowPass1sM / S20BMFE-XBPM:P2:y:LowPass1sM
S20BMFE-XBPM:P2:y:LowPass8sM / S20BMFE-XBPM:P2:y:LowPass8sM
S20BMFE-XBPM:P2:y:LowPass64sM / S20BMFE-XBPM:P2:y:LowPass64sM
S20BMFE-XBPM:P2:y:StdDevM / S20BMFE-XBPM:P2:y:StdDevM
S20BMFE-XBPM:P2:y:StdDev1sM / S20BMFE-XBPM:P2:y:StdDev1sM
S20BMFE-XBPM:P2:y:StdDev8sM / S20BMFE-XBPM:P2:y:StdDev8sM
S20BMFE-XBPM:P2:y:StdDev64sM / S20BMFE-XBPM:P2:y:StdDev64sM
S20IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S20IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S20IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S20IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S20IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S20IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S20IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S20IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S20IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S20IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S20IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S20IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S20IDFE-XBPM:CM1ds:PositionOffsetX / S20IDFE-XBPM:CM1ds:PositionOffsetX
S20IDFE-XBPM:CM1ds:PositionOffsetY / S20IDFE-XBPM:CM1ds:PositionOffsetY
S20IDFE-XBPM:CM1ds:PositionScaleX / S20IDFE-XBPM:CM1ds:PositionScaleX
S20IDFE-XBPM:CM1ds:PositionScaleY / S20IDFE-XBPM:CM1ds:PositionScaleY
S20IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S20IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S20IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S20IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S20IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S20IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S20IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S20IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S20IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S20IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S20IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S20IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S20IDFE-XBPM:CM2ds:PositionOffsetX / S20IDFE-XBPM:CM2ds:PositionOffsetX
S20IDFE-XBPM:CM2ds:PositionOffsetY / S20IDFE-XBPM:CM2ds:PositionOffsetY
S20IDFE-XBPM:CM2ds:PositionScaleX / S20IDFE-XBPM:CM2ds:PositionScaleX
S20IDFE-XBPM:CM2ds:PositionScaleY / S20IDFE-XBPM:CM2ds:PositionScaleY
S20IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S20IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S20IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S20IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S20IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S20IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S20IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S20IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S20IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S20IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S20IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S20IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S20IDFE-XBPM:CM3ds:PositionOffsetX / S20IDFE-XBPM:CM3ds:PositionOffsetX
S20IDFE-XBPM:CM3ds:PositionOffsetY / S20IDFE-XBPM:CM3ds:PositionOffsetY
S20IDFE-XBPM:CM3ds:PositionScaleX / S20IDFE-XBPM:CM3ds:PositionScaleX
S20IDFE-XBPM:CM3ds:PositionScaleY / S20IDFE-XBPM:CM3ds:PositionScaleY
S20IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S20IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S20IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S20IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S20IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S20IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S20IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S20IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S20IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S20IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S20IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S20IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S20IDFE-XBPM:CM4ds:PositionOffsetX / S20IDFE-XBPM:CM4ds:PositionOffsetX
S20IDFE-XBPM:CM4ds:PositionOffsetY / S20IDFE-XBPM:CM4ds:PositionOffsetY
S20IDFE-XBPM:CM4ds:PositionScaleX / S20IDFE-XBPM:CM4ds:PositionScaleX
S20IDFE-XBPM:CM4ds:PositionScaleY / S20IDFE-XBPM:CM4ds:PositionScaleY
S20IDFE-XBPM:P1ds:BMcUsedM / S20IDFE-XBPM:P1ds:BMcUsedM
S20IDFE-XBPM:P1ds:GapUsedC / S20IDFE-XBPM:P1ds:GapUsedC
S20IDFE-XBPM:P1ds:Wx1UsedM / S20IDFE-XBPM:P1ds:Wx1UsedM
S20IDFE-XBPM:P1ds:Wx2UsedM / S20IDFE-XBPM:P1ds:Wx2UsedM
S20IDFE-XBPM:P1ds:Wx3UsedM / S20IDFE-XBPM:P1ds:Wx3UsedM
S20IDFE-XBPM:P1ds:Wy1UsedM / S20IDFE-XBPM:P1ds:Wy1UsedM
S20IDFE-XBPM:P1ds:Wy2UsedM / S20IDFE-XBPM:P1ds:Wy2UsedM
S20IDFE-XBPM:P1ds:Wy3UsedM / S20IDFE-XBPM:P1ds:Wy3UsedM
S20IDFE-XBPM:P1ds:x / S20IDFE-XBPM:P1ds:x
S20IDFE-XBPM:P1ds:x:CalFactor1M / S20IDFE-XBPM:P1ds:x:CalFactor1M
S20IDFE-XBPM:P1ds:x:CalFactor2M / S20IDFE-XBPM:P1ds:x:CalFactor2M
S20IDFE-XBPM:P1ds:x:LowPass1sM / S20IDFE-XBPM:P1ds:x:LowPass1sM
S20IDFE-XBPM:P1ds:x:LowPass8sM / S20IDFE-XBPM:P1ds:x:LowPass8sM
S20IDFE-XBPM:P1ds:x:LowPass64sM / S20IDFE-XBPM:P1ds:x:LowPass64sM
S20IDFE-XBPM:P1ds:x:Offset1M / S20IDFE-XBPM:P1ds:x:Offset1M
S20IDFE-XBPM:P1ds:x:Offset2M / S20IDFE-XBPM:P1ds:x:Offset2M
S20IDFE-XBPM:P1ds:x:ResolutionM / S20IDFE-XBPM:P1ds:x:ResolutionM
S20IDFE-XBPM:P1ds:x:Resolution1sM / S20IDFE-XBPM:P1ds:x:Resolution1sM
S20IDFE-XBPM:P1ds:x:Resolution8sM / S20IDFE-XBPM:P1ds:x:Resolution8sM
S20IDFE-XBPM:P1ds:x:Resolution64sM / S20IDFE-XBPM:P1ds:x:Resolution64sM
S20IDFE-XBPM:P1ds:x:StdDevM / S20IDFE-XBPM:P1ds:x:StdDevM
S20IDFE-XBPM:P1ds:x:StdDev1sM / S20IDFE-XBPM:P1ds:x:StdDev1sM
S20IDFE-XBPM:P1ds:x:StdDev8sM / S20IDFE-XBPM:P1ds:x:StdDev8sM
S20IDFE-XBPM:P1ds:x:StdDev64sM / S20IDFE-XBPM:P1ds:x:StdDev64sM
S20IDFE-XBPM:P1ds:x1:LowPass1sM / S20IDFE-XBPM:P1ds:x1:LowPass1sM
S20IDFE-XBPM:P1ds:x1:LowPass8sM / S20IDFE-XBPM:P1ds:x1:LowPass8sM
S20IDFE-XBPM:P1ds:x1:LowPass64sM / S20IDFE-XBPM:P1ds:x1:LowPass64sM
S20IDFE-XBPM:P1ds:x2:LowPass1sM / S20IDFE-XBPM:P1ds:x2:LowPass1sM
S20IDFE-XBPM:P1ds:x2:LowPass8sM / S20IDFE-XBPM:P1ds:x2:LowPass8sM
S20IDFE-XBPM:P1ds:x2:LowPass64sM / S20IDFE-XBPM:P1ds:x2:LowPass64sM
S20IDFE-XBPM:P1ds:y / S20IDFE-XBPM:P1ds:y
S20IDFE-XBPM:P1ds:y:CalFactor1M / S20IDFE-XBPM:P1ds:y:CalFactor1M
S20IDFE-XBPM:P1ds:y:CalFactor2M / S20IDFE-XBPM:P1ds:y:CalFactor2M
S20IDFE-XBPM:P1ds:y:LowPass1sM / S20IDFE-XBPM:P1ds:y:LowPass1sM
S20IDFE-XBPM:P1ds:y:LowPass8sM / S20IDFE-XBPM:P1ds:y:LowPass8sM
S20IDFE-XBPM:P1ds:y:LowPass64sM / S20IDFE-XBPM:P1ds:y:LowPass64sM
S20IDFE-XBPM:P1ds:y:Offset1M / S20IDFE-XBPM:P1ds:y:Offset1M
S20IDFE-XBPM:P1ds:y:Offset2M / S20IDFE-XBPM:P1ds:y:Offset2M
S20IDFE-XBPM:P1ds:y:ResolutionM / S20IDFE-XBPM:P1ds:y:ResolutionM
S20IDFE-XBPM:P1ds:y:Resolution1sM / S20IDFE-XBPM:P1ds:y:Resolution1sM
S20IDFE-XBPM:P1ds:y:Resolution8sM / S20IDFE-XBPM:P1ds:y:Resolution8sM
S20IDFE-XBPM:P1ds:y:Resolution64sM / S20IDFE-XBPM:P1ds:y:Resolution64sM
S20IDFE-XBPM:P1ds:y:StdDevM / S20IDFE-XBPM:P1ds:y:StdDevM
S20IDFE-XBPM:P1ds:y:StdDev1sM / S20IDFE-XBPM:P1ds:y:StdDev1sM
S20IDFE-XBPM:P1ds:y:StdDev8sM / S20IDFE-XBPM:P1ds:y:StdDev8sM
S20IDFE-XBPM:P1ds:y:StdDev64sM / S20IDFE-XBPM:P1ds:y:StdDev64sM
S20IDFE-XBPM:P1ds:y1:LowPass1sM / S20IDFE-XBPM:P1ds:y1:LowPass1sM
S20IDFE-XBPM:P1ds:y1:LowPass8sM / S20IDFE-XBPM:P1ds:y1:LowPass8sM
S20IDFE-XBPM:P1ds:y1:LowPass64sM / S20IDFE-XBPM:P1ds:y1:LowPass64sM
S20IDFE-XBPM:P1ds:y2:LowPass1sM / S20IDFE-XBPM:P1ds:y2:LowPass1sM
S20IDFE-XBPM:P1ds:y2:LowPass8sM / S20IDFE-XBPM:P1ds:y2:LowPass8sM
S20IDFE-XBPM:P1ds:y2:LowPass64sM / S20IDFE-XBPM:P1ds:y2:LowPass64sM
S20IDFE-XBPM:P2ds:GapUsedC / S20IDFE-XBPM:P2ds:GapUsedC
S20IDFE-XBPM:P2ds:XCalM / S20IDFE-XBPM:P2ds:XCalM
S20IDFE-XBPM:P2ds:YCalM / S20IDFE-XBPM:P2ds:YCalM
S20IDFE-XBPM:P2ds:x:CalFactorM / S20IDFE-XBPM:P2ds:x:CalFactorM
S20IDFE-XBPM:P2ds:x:OffsetM / S20IDFE-XBPM:P2ds:x:OffsetM
S20IDFE-XBPM:P2ds:y:CalFactorM / S20IDFE-XBPM:P2ds:y:CalFactorM
S20IDFE-XBPM:P2ds:y:OffsetM / S20IDFE-XBPM:P2ds:y:OffsetM
S21IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S21IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S21IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S21IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S21IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S21IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S21IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S21IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S21IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S21IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S21IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S21IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S21IDFE-XBPM:CM1ds:PositionOffsetX / S21IDFE-XBPM:CM1ds:PositionOffsetX
S21IDFE-XBPM:CM1ds:PositionOffsetY / S21IDFE-XBPM:CM1ds:PositionOffsetY
S21IDFE-XBPM:CM1ds:PositionScaleX / S21IDFE-XBPM:CM1ds:PositionScaleX
S21IDFE-XBPM:CM1ds:PositionScaleY / S21IDFE-XBPM:CM1ds:PositionScaleY
S21IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S21IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S21IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S21IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S21IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S21IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S21IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S21IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S21IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S21IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S21IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S21IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S21IDFE-XBPM:CM1us:PositionOffsetX / S21IDFE-XBPM:CM1us:PositionOffsetX
S21IDFE-XBPM:CM1us:PositionOffsetY / S21IDFE-XBPM:CM1us:PositionOffsetY
S21IDFE-XBPM:CM1us:PositionScaleX / S21IDFE-XBPM:CM1us:PositionScaleX
S21IDFE-XBPM:CM1us:PositionScaleY / S21IDFE-XBPM:CM1us:PositionScaleY
S21IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S21IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S21IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S21IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S21IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S21IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S21IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S21IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S21IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S21IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S21IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S21IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S21IDFE-XBPM:CM2ds:PositionOffsetX / S21IDFE-XBPM:CM2ds:PositionOffsetX
S21IDFE-XBPM:CM2ds:PositionOffsetY / S21IDFE-XBPM:CM2ds:PositionOffsetY
S21IDFE-XBPM:CM2ds:PositionScaleX / S21IDFE-XBPM:CM2ds:PositionScaleX
S21IDFE-XBPM:CM2ds:PositionScaleY / S21IDFE-XBPM:CM2ds:PositionScaleY
S21IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S21IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S21IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S21IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S21IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S21IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S21IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S21IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S21IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S21IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S21IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S21IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S21IDFE-XBPM:CM2us:PositionOffsetX / S21IDFE-XBPM:CM2us:PositionOffsetX
S21IDFE-XBPM:CM2us:PositionOffsetY / S21IDFE-XBPM:CM2us:PositionOffsetY
S21IDFE-XBPM:CM2us:PositionScaleX / S21IDFE-XBPM:CM2us:PositionScaleX
S21IDFE-XBPM:CM2us:PositionScaleY / S21IDFE-XBPM:CM2us:PositionScaleY
S21IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S21IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S21IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S21IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S21IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S21IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S21IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S21IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S21IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S21IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S21IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S21IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S21IDFE-XBPM:CM3ds:PositionOffsetX / S21IDFE-XBPM:CM3ds:PositionOffsetX
S21IDFE-XBPM:CM3ds:PositionOffsetY / S21IDFE-XBPM:CM3ds:PositionOffsetY
S21IDFE-XBPM:CM3ds:PositionScaleX / S21IDFE-XBPM:CM3ds:PositionScaleX
S21IDFE-XBPM:CM3ds:PositionScaleY / S21IDFE-XBPM:CM3ds:PositionScaleY
S21IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S21IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S21IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S21IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S21IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S21IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S21IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S21IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S21IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S21IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S21IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S21IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S21IDFE-XBPM:CM3us:PositionOffsetX / S21IDFE-XBPM:CM3us:PositionOffsetX
S21IDFE-XBPM:CM3us:PositionOffsetY / S21IDFE-XBPM:CM3us:PositionOffsetY
S21IDFE-XBPM:CM3us:PositionScaleX / S21IDFE-XBPM:CM3us:PositionScaleX
S21IDFE-XBPM:CM3us:PositionScaleY / S21IDFE-XBPM:CM3us:PositionScaleY
S21IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S21IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S21IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S21IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S21IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S21IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S21IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S21IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S21IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S21IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S21IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S21IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S21IDFE-XBPM:CM4ds:PositionOffsetX / S21IDFE-XBPM:CM4ds:PositionOffsetX
S21IDFE-XBPM:CM4ds:PositionOffsetY / S21IDFE-XBPM:CM4ds:PositionOffsetY
S21IDFE-XBPM:CM4ds:PositionScaleX / S21IDFE-XBPM:CM4ds:PositionScaleX
S21IDFE-XBPM:CM4ds:PositionScaleY / S21IDFE-XBPM:CM4ds:PositionScaleY
S21IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S21IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S21IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S21IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S21IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S21IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S21IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S21IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S21IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S21IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S21IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S21IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S21IDFE-XBPM:CM4us:PositionOffsetX / S21IDFE-XBPM:CM4us:PositionOffsetX
S21IDFE-XBPM:CM4us:PositionOffsetY / S21IDFE-XBPM:CM4us:PositionOffsetY
S21IDFE-XBPM:CM4us:PositionScaleX / S21IDFE-XBPM:CM4us:PositionScaleX
S21IDFE-XBPM:CM4us:PositionScaleY / S21IDFE-XBPM:CM4us:PositionScaleY
S21IDFE-XBPM:P1ds:BMcUsedM / S21IDFE-XBPM:P1ds:BMcUsedM
S21IDFE-XBPM:P1ds:GapUsedC / S21IDFE-XBPM:P1ds:GapUsedC
S21IDFE-XBPM:P1ds:Wx1UsedM / S21IDFE-XBPM:P1ds:Wx1UsedM
S21IDFE-XBPM:P1ds:Wx2UsedM / S21IDFE-XBPM:P1ds:Wx2UsedM
S21IDFE-XBPM:P1ds:Wx3UsedM / S21IDFE-XBPM:P1ds:Wx3UsedM
S21IDFE-XBPM:P1ds:Wy1UsedM / S21IDFE-XBPM:P1ds:Wy1UsedM
S21IDFE-XBPM:P1ds:Wy2UsedM / S21IDFE-XBPM:P1ds:Wy2UsedM
S21IDFE-XBPM:P1ds:Wy3UsedM / S21IDFE-XBPM:P1ds:Wy3UsedM
S21IDFE-XBPM:P1ds:x / S21IDFE-XBPM:P1ds:x
S21IDFE-XBPM:P1ds:x:CalFactor1M / S21IDFE-XBPM:P1ds:x:CalFactor1M
S21IDFE-XBPM:P1ds:x:CalFactor2M / S21IDFE-XBPM:P1ds:x:CalFactor2M
S21IDFE-XBPM:P1ds:x:LowPass1sM / S21IDFE-XBPM:P1ds:x:LowPass1sM
S21IDFE-XBPM:P1ds:x:LowPass8sM / S21IDFE-XBPM:P1ds:x:LowPass8sM
S21IDFE-XBPM:P1ds:x:LowPass64sM / S21IDFE-XBPM:P1ds:x:LowPass64sM
S21IDFE-XBPM:P1ds:x:Offset1M / S21IDFE-XBPM:P1ds:x:Offset1M
S21IDFE-XBPM:P1ds:x:Offset2M / S21IDFE-XBPM:P1ds:x:Offset2M
S21IDFE-XBPM:P1ds:x:ResolutionM / S21IDFE-XBPM:P1ds:x:ResolutionM
S21IDFE-XBPM:P1ds:x:Resolution1sM / S21IDFE-XBPM:P1ds:x:Resolution1sM
S21IDFE-XBPM:P1ds:x:Resolution8sM / S21IDFE-XBPM:P1ds:x:Resolution8sM
S21IDFE-XBPM:P1ds:x:Resolution64sM / S21IDFE-XBPM:P1ds:x:Resolution64sM
S21IDFE-XBPM:P1ds:x:StdDevM / S21IDFE-XBPM:P1ds:x:StdDevM
S21IDFE-XBPM:P1ds:x:StdDev1sM / S21IDFE-XBPM:P1ds:x:StdDev1sM
S21IDFE-XBPM:P1ds:x:StdDev8sM / S21IDFE-XBPM:P1ds:x:StdDev8sM
S21IDFE-XBPM:P1ds:x:StdDev64sM / S21IDFE-XBPM:P1ds:x:StdDev64sM
S21IDFE-XBPM:P1ds:x1:LowPass1sM / S21IDFE-XBPM:P1ds:x1:LowPass1sM
S21IDFE-XBPM:P1ds:x1:LowPass8sM / S21IDFE-XBPM:P1ds:x1:LowPass8sM
S21IDFE-XBPM:P1ds:x1:LowPass64sM / S21IDFE-XBPM:P1ds:x1:LowPass64sM
S21IDFE-XBPM:P1ds:x2:LowPass1sM / S21IDFE-XBPM:P1ds:x2:LowPass1sM
S21IDFE-XBPM:P1ds:x2:LowPass8sM / S21IDFE-XBPM:P1ds:x2:LowPass8sM
S21IDFE-XBPM:P1ds:x2:LowPass64sM / S21IDFE-XBPM:P1ds:x2:LowPass64sM
S21IDFE-XBPM:P1ds:y / S21IDFE-XBPM:P1ds:y
S21IDFE-XBPM:P1ds:y:CalFactor1M / S21IDFE-XBPM:P1ds:y:CalFactor1M
S21IDFE-XBPM:P1ds:y:CalFactor2M / S21IDFE-XBPM:P1ds:y:CalFactor2M
S21IDFE-XBPM:P1ds:y:LowPass1sM / S21IDFE-XBPM:P1ds:y:LowPass1sM
S21IDFE-XBPM:P1ds:y:LowPass8sM / S21IDFE-XBPM:P1ds:y:LowPass8sM
S21IDFE-XBPM:P1ds:y:LowPass64sM / S21IDFE-XBPM:P1ds:y:LowPass64sM
S21IDFE-XBPM:P1ds:y:Offset1M / S21IDFE-XBPM:P1ds:y:Offset1M
S21IDFE-XBPM:P1ds:y:Offset2M / S21IDFE-XBPM:P1ds:y:Offset2M
S21IDFE-XBPM:P1ds:y:ResolutionM / S21IDFE-XBPM:P1ds:y:ResolutionM
S21IDFE-XBPM:P1ds:y:Resolution1sM / S21IDFE-XBPM:P1ds:y:Resolution1sM
S21IDFE-XBPM:P1ds:y:Resolution8sM / S21IDFE-XBPM:P1ds:y:Resolution8sM
S21IDFE-XBPM:P1ds:y:Resolution64sM / S21IDFE-XBPM:P1ds:y:Resolution64sM
S21IDFE-XBPM:P1ds:y:StdDevM / S21IDFE-XBPM:P1ds:y:StdDevM
S21IDFE-XBPM:P1ds:y:StdDev1sM / S21IDFE-XBPM:P1ds:y:StdDev1sM
S21IDFE-XBPM:P1ds:y:StdDev8sM / S21IDFE-XBPM:P1ds:y:StdDev8sM
S21IDFE-XBPM:P1ds:y:StdDev64sM / S21IDFE-XBPM:P1ds:y:StdDev64sM
S21IDFE-XBPM:P1ds:y1:LowPass1sM / S21IDFE-XBPM:P1ds:y1:LowPass1sM
S21IDFE-XBPM:P1ds:y1:LowPass8sM / S21IDFE-XBPM:P1ds:y1:LowPass8sM
S21IDFE-XBPM:P1ds:y1:LowPass64sM / S21IDFE-XBPM:P1ds:y1:LowPass64sM
S21IDFE-XBPM:P1ds:y2:LowPass1sM / S21IDFE-XBPM:P1ds:y2:LowPass1sM
S21IDFE-XBPM:P1ds:y2:LowPass8sM / S21IDFE-XBPM:P1ds:y2:LowPass8sM
S21IDFE-XBPM:P1ds:y2:LowPass64sM / S21IDFE-XBPM:P1ds:y2:LowPass64sM
S21IDFE-XBPM:P1us:BMcUsedM / S21IDFE-XBPM:P1us:BMcUsedM
S21IDFE-XBPM:P1us:GapUsedC / S21IDFE-XBPM:P1us:GapUsedC
S21IDFE-XBPM:P1us:Wx1UsedM / S21IDFE-XBPM:P1us:Wx1UsedM
S21IDFE-XBPM:P1us:Wx2UsedM / S21IDFE-XBPM:P1us:Wx2UsedM
S21IDFE-XBPM:P1us:Wx3UsedM / S21IDFE-XBPM:P1us:Wx3UsedM
S21IDFE-XBPM:P1us:Wy1UsedM / S21IDFE-XBPM:P1us:Wy1UsedM
S21IDFE-XBPM:P1us:Wy2UsedM / S21IDFE-XBPM:P1us:Wy2UsedM
S21IDFE-XBPM:P1us:Wy3UsedM / S21IDFE-XBPM:P1us:Wy3UsedM
S21IDFE-XBPM:P1us:x / S21IDFE-XBPM:P1us:x
S21IDFE-XBPM:P1us:x:CalFactor1M / S21IDFE-XBPM:P1us:x:CalFactor1M
S21IDFE-XBPM:P1us:x:CalFactor2M / S21IDFE-XBPM:P1us:x:CalFactor2M
S21IDFE-XBPM:P1us:x:LowPass1sM / S21IDFE-XBPM:P1us:x:LowPass1sM
S21IDFE-XBPM:P1us:x:LowPass8sM / S21IDFE-XBPM:P1us:x:LowPass8sM
S21IDFE-XBPM:P1us:x:LowPass64sM / S21IDFE-XBPM:P1us:x:LowPass64sM
S21IDFE-XBPM:P1us:x:Offset1M / S21IDFE-XBPM:P1us:x:Offset1M
S21IDFE-XBPM:P1us:x:Offset2M / S21IDFE-XBPM:P1us:x:Offset2M
S21IDFE-XBPM:P1us:x:ResolutionM / S21IDFE-XBPM:P1us:x:ResolutionM
S21IDFE-XBPM:P1us:x:Resolution1sM / S21IDFE-XBPM:P1us:x:Resolution1sM
S21IDFE-XBPM:P1us:x:Resolution8sM / S21IDFE-XBPM:P1us:x:Resolution8sM
S21IDFE-XBPM:P1us:x:Resolution64sM / S21IDFE-XBPM:P1us:x:Resolution64sM
S21IDFE-XBPM:P1us:x:StdDevM / S21IDFE-XBPM:P1us:x:StdDevM
S21IDFE-XBPM:P1us:x:StdDev1sM / S21IDFE-XBPM:P1us:x:StdDev1sM
S21IDFE-XBPM:P1us:x:StdDev8sM / S21IDFE-XBPM:P1us:x:StdDev8sM
S21IDFE-XBPM:P1us:x:StdDev64sM / S21IDFE-XBPM:P1us:x:StdDev64sM
S21IDFE-XBPM:P1us:x1:LowPass1sM / S21IDFE-XBPM:P1us:x1:LowPass1sM
S21IDFE-XBPM:P1us:x1:LowPass8sM / S21IDFE-XBPM:P1us:x1:LowPass8sM
S21IDFE-XBPM:P1us:x1:LowPass64sM / S21IDFE-XBPM:P1us:x1:LowPass64sM
S21IDFE-XBPM:P1us:x2:LowPass1sM / S21IDFE-XBPM:P1us:x2:LowPass1sM
S21IDFE-XBPM:P1us:x2:LowPass8sM / S21IDFE-XBPM:P1us:x2:LowPass8sM
S21IDFE-XBPM:P1us:x2:LowPass64sM / S21IDFE-XBPM:P1us:x2:LowPass64sM
S21IDFE-XBPM:P1us:y / S21IDFE-XBPM:P1us:y
S21IDFE-XBPM:P1us:y:CalFactor1M / S21IDFE-XBPM:P1us:y:CalFactor1M
S21IDFE-XBPM:P1us:y:CalFactor2M / S21IDFE-XBPM:P1us:y:CalFactor2M
S21IDFE-XBPM:P1us:y:LowPass1sM / S21IDFE-XBPM:P1us:y:LowPass1sM
S21IDFE-XBPM:P1us:y:LowPass8sM / S21IDFE-XBPM:P1us:y:LowPass8sM
S21IDFE-XBPM:P1us:y:LowPass64sM / S21IDFE-XBPM:P1us:y:LowPass64sM
S21IDFE-XBPM:P1us:y:Offset1M / S21IDFE-XBPM:P1us:y:Offset1M
S21IDFE-XBPM:P1us:y:Offset2M / S21IDFE-XBPM:P1us:y:Offset2M
S21IDFE-XBPM:P1us:y:ResolutionM / S21IDFE-XBPM:P1us:y:ResolutionM
S21IDFE-XBPM:P1us:y:Resolution1sM / S21IDFE-XBPM:P1us:y:Resolution1sM
S21IDFE-XBPM:P1us:y:Resolution8sM / S21IDFE-XBPM:P1us:y:Resolution8sM
S21IDFE-XBPM:P1us:y:Resolution64sM / S21IDFE-XBPM:P1us:y:Resolution64sM
S21IDFE-XBPM:P1us:y:StdDevM / S21IDFE-XBPM:P1us:y:StdDevM
S21IDFE-XBPM:P1us:y:StdDev1sM / S21IDFE-XBPM:P1us:y:StdDev1sM
S21IDFE-XBPM:P1us:y:StdDev8sM / S21IDFE-XBPM:P1us:y:StdDev8sM
S21IDFE-XBPM:P1us:y:StdDev64sM / S21IDFE-XBPM:P1us:y:StdDev64sM
S21IDFE-XBPM:P1us:y1:LowPass1sM / S21IDFE-XBPM:P1us:y1:LowPass1sM
S21IDFE-XBPM:P1us:y1:LowPass8sM / S21IDFE-XBPM:P1us:y1:LowPass8sM
S21IDFE-XBPM:P1us:y1:LowPass64sM / S21IDFE-XBPM:P1us:y1:LowPass64sM
S21IDFE-XBPM:P1us:y2:LowPass1sM / S21IDFE-XBPM:P1us:y2:LowPass1sM
S21IDFE-XBPM:P1us:y2:LowPass8sM / S21IDFE-XBPM:P1us:y2:LowPass8sM
S21IDFE-XBPM:P1us:y2:LowPass64sM / S21IDFE-XBPM:P1us:y2:LowPass64sM
S21IDFE-XBPM:P2ds:GapUsedC / S21IDFE-XBPM:P2ds:GapUsedC
S21IDFE-XBPM:P2ds:XCalM / S21IDFE-XBPM:P2ds:XCalM
S21IDFE-XBPM:P2ds:YCalM / S21IDFE-XBPM:P2ds:YCalM
S21IDFE-XBPM:P2ds:x:CalFactorM / S21IDFE-XBPM:P2ds:x:CalFactorM
S21IDFE-XBPM:P2ds:x:OffsetM / S21IDFE-XBPM:P2ds:x:OffsetM
S21IDFE-XBPM:P2ds:y:CalFactorM / S21IDFE-XBPM:P2ds:y:CalFactorM
S21IDFE-XBPM:P2ds:y:OffsetM / S21IDFE-XBPM:P2ds:y:OffsetM
S21IDFE-XBPM:P2us:GapUsedC / S21IDFE-XBPM:P2us:GapUsedC
S21IDFE-XBPM:P2us:XCalM / S21IDFE-XBPM:P2us:XCalM
S21IDFE-XBPM:P2us:YCalM / S21IDFE-XBPM:P2us:YCalM
S21IDFE-XBPM:P2us:x:CalFactorM / S21IDFE-XBPM:P2us:x:CalFactorM
S21IDFE-XBPM:P2us:x:OffsetM / S21IDFE-XBPM:P2us:x:OffsetM
S21IDFE-XBPM:P2us:y:CalFactorM / S21IDFE-XBPM:P2us:y:CalFactorM
S21IDFE-XBPM:P2us:y:OffsetM / S21IDFE-XBPM:P2us:y:OffsetM
S22IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S22IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S22IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S22IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S22IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S22IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S22IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S22IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S22IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S22IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S22IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S22IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S22IDFE-XBPM:CM1ds:PositionOffsetX / S22IDFE-XBPM:CM1ds:PositionOffsetX
S22IDFE-XBPM:CM1ds:PositionOffsetY / S22IDFE-XBPM:CM1ds:PositionOffsetY
S22IDFE-XBPM:CM1ds:PositionScaleX / S22IDFE-XBPM:CM1ds:PositionScaleX
S22IDFE-XBPM:CM1ds:PositionScaleY / S22IDFE-XBPM:CM1ds:PositionScaleY
S22IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S22IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S22IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S22IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S22IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S22IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S22IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S22IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S22IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S22IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S22IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S22IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S22IDFE-XBPM:CM1us:PositionOffsetX / S22IDFE-XBPM:CM1us:PositionOffsetX
S22IDFE-XBPM:CM1us:PositionOffsetY / S22IDFE-XBPM:CM1us:PositionOffsetY
S22IDFE-XBPM:CM1us:PositionScaleX / S22IDFE-XBPM:CM1us:PositionScaleX
S22IDFE-XBPM:CM1us:PositionScaleY / S22IDFE-XBPM:CM1us:PositionScaleY
S22IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S22IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S22IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S22IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S22IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S22IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S22IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S22IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S22IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S22IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S22IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S22IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S22IDFE-XBPM:CM2ds:PositionOffsetX / S22IDFE-XBPM:CM2ds:PositionOffsetX
S22IDFE-XBPM:CM2ds:PositionOffsetY / S22IDFE-XBPM:CM2ds:PositionOffsetY
S22IDFE-XBPM:CM2ds:PositionScaleX / S22IDFE-XBPM:CM2ds:PositionScaleX
S22IDFE-XBPM:CM2ds:PositionScaleY / S22IDFE-XBPM:CM2ds:PositionScaleY
S22IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S22IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S22IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S22IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S22IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S22IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S22IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S22IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S22IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S22IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S22IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S22IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S22IDFE-XBPM:CM2us:PositionOffsetX / S22IDFE-XBPM:CM2us:PositionOffsetX
S22IDFE-XBPM:CM2us:PositionOffsetY / S22IDFE-XBPM:CM2us:PositionOffsetY
S22IDFE-XBPM:CM2us:PositionScaleX / S22IDFE-XBPM:CM2us:PositionScaleX
S22IDFE-XBPM:CM2us:PositionScaleY / S22IDFE-XBPM:CM2us:PositionScaleY
S22IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S22IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S22IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S22IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S22IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S22IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S22IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S22IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S22IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S22IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S22IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S22IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S22IDFE-XBPM:CM3ds:PositionOffsetX / S22IDFE-XBPM:CM3ds:PositionOffsetX
S22IDFE-XBPM:CM3ds:PositionOffsetY / S22IDFE-XBPM:CM3ds:PositionOffsetY
S22IDFE-XBPM:CM3ds:PositionScaleX / S22IDFE-XBPM:CM3ds:PositionScaleX
S22IDFE-XBPM:CM3ds:PositionScaleY / S22IDFE-XBPM:CM3ds:PositionScaleY
S22IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S22IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S22IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S22IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S22IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S22IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S22IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S22IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S22IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S22IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S22IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S22IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S22IDFE-XBPM:CM3us:PositionOffsetX / S22IDFE-XBPM:CM3us:PositionOffsetX
S22IDFE-XBPM:CM3us:PositionOffsetY / S22IDFE-XBPM:CM3us:PositionOffsetY
S22IDFE-XBPM:CM3us:PositionScaleX / S22IDFE-XBPM:CM3us:PositionScaleX
S22IDFE-XBPM:CM3us:PositionScaleY / S22IDFE-XBPM:CM3us:PositionScaleY
S22IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S22IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S22IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S22IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S22IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S22IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S22IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S22IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S22IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S22IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S22IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S22IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S22IDFE-XBPM:CM4ds:PositionOffsetX / S22IDFE-XBPM:CM4ds:PositionOffsetX
S22IDFE-XBPM:CM4ds:PositionOffsetY / S22IDFE-XBPM:CM4ds:PositionOffsetY
S22IDFE-XBPM:CM4ds:PositionScaleX / S22IDFE-XBPM:CM4ds:PositionScaleX
S22IDFE-XBPM:CM4ds:PositionScaleY / S22IDFE-XBPM:CM4ds:PositionScaleY
S22IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S22IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S22IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S22IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S22IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S22IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S22IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S22IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S22IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S22IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S22IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S22IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S22IDFE-XBPM:CM4us:PositionOffsetX / S22IDFE-XBPM:CM4us:PositionOffsetX
S22IDFE-XBPM:CM4us:PositionOffsetY / S22IDFE-XBPM:CM4us:PositionOffsetY
S22IDFE-XBPM:CM4us:PositionScaleX / S22IDFE-XBPM:CM4us:PositionScaleX
S22IDFE-XBPM:CM4us:PositionScaleY / S22IDFE-XBPM:CM4us:PositionScaleY
S22IDFE-XBPM:P1ds:BMcUsedM / S22IDFE-XBPM:P1ds:BMcUsedM
S22IDFE-XBPM:P1ds:GapUsedC / S22IDFE-XBPM:P1ds:GapUsedC
S22IDFE-XBPM:P1ds:Wx1UsedM / S22IDFE-XBPM:P1ds:Wx1UsedM
S22IDFE-XBPM:P1ds:Wx2UsedM / S22IDFE-XBPM:P1ds:Wx2UsedM
S22IDFE-XBPM:P1ds:Wx3UsedM / S22IDFE-XBPM:P1ds:Wx3UsedM
S22IDFE-XBPM:P1ds:Wy1UsedM / S22IDFE-XBPM:P1ds:Wy1UsedM
S22IDFE-XBPM:P1ds:Wy2UsedM / S22IDFE-XBPM:P1ds:Wy2UsedM
S22IDFE-XBPM:P1ds:Wy3UsedM / S22IDFE-XBPM:P1ds:Wy3UsedM
S22IDFE-XBPM:P1ds:x / S22IDFE-XBPM:P1ds:x
S22IDFE-XBPM:P1ds:x:CalFactor1M / S22IDFE-XBPM:P1ds:x:CalFactor1M
S22IDFE-XBPM:P1ds:x:CalFactor2M / S22IDFE-XBPM:P1ds:x:CalFactor2M
S22IDFE-XBPM:P1ds:x:LowPass1sM / S22IDFE-XBPM:P1ds:x:LowPass1sM
S22IDFE-XBPM:P1ds:x:LowPass8sM / S22IDFE-XBPM:P1ds:x:LowPass8sM
S22IDFE-XBPM:P1ds:x:LowPass64sM / S22IDFE-XBPM:P1ds:x:LowPass64sM
S22IDFE-XBPM:P1ds:x:Offset1M / S22IDFE-XBPM:P1ds:x:Offset1M
S22IDFE-XBPM:P1ds:x:Offset2M / S22IDFE-XBPM:P1ds:x:Offset2M
S22IDFE-XBPM:P1ds:x:ResolutionM / S22IDFE-XBPM:P1ds:x:ResolutionM
S22IDFE-XBPM:P1ds:x:Resolution1sM / S22IDFE-XBPM:P1ds:x:Resolution1sM
S22IDFE-XBPM:P1ds:x:Resolution8sM / S22IDFE-XBPM:P1ds:x:Resolution8sM
S22IDFE-XBPM:P1ds:x:Resolution64sM / S22IDFE-XBPM:P1ds:x:Resolution64sM
S22IDFE-XBPM:P1ds:x:StdDevM / S22IDFE-XBPM:P1ds:x:StdDevM
S22IDFE-XBPM:P1ds:x:StdDev1sM / S22IDFE-XBPM:P1ds:x:StdDev1sM
S22IDFE-XBPM:P1ds:x:StdDev8sM / S22IDFE-XBPM:P1ds:x:StdDev8sM
S22IDFE-XBPM:P1ds:x:StdDev64sM / S22IDFE-XBPM:P1ds:x:StdDev64sM
S22IDFE-XBPM:P1ds:x1:LowPass1sM / S22IDFE-XBPM:P1ds:x1:LowPass1sM
S22IDFE-XBPM:P1ds:x1:LowPass8sM / S22IDFE-XBPM:P1ds:x1:LowPass8sM
S22IDFE-XBPM:P1ds:x1:LowPass64sM / S22IDFE-XBPM:P1ds:x1:LowPass64sM
S22IDFE-XBPM:P1ds:x2:LowPass1sM / S22IDFE-XBPM:P1ds:x2:LowPass1sM
S22IDFE-XBPM:P1ds:x2:LowPass8sM / S22IDFE-XBPM:P1ds:x2:LowPass8sM
S22IDFE-XBPM:P1ds:x2:LowPass64sM / S22IDFE-XBPM:P1ds:x2:LowPass64sM
S22IDFE-XBPM:P1ds:y / S22IDFE-XBPM:P1ds:y
S22IDFE-XBPM:P1ds:y:CalFactor1M / S22IDFE-XBPM:P1ds:y:CalFactor1M
S22IDFE-XBPM:P1ds:y:CalFactor2M / S22IDFE-XBPM:P1ds:y:CalFactor2M
S22IDFE-XBPM:P1ds:y:LowPass1sM / S22IDFE-XBPM:P1ds:y:LowPass1sM
S22IDFE-XBPM:P1ds:y:LowPass8sM / S22IDFE-XBPM:P1ds:y:LowPass8sM
S22IDFE-XBPM:P1ds:y:LowPass64sM / S22IDFE-XBPM:P1ds:y:LowPass64sM
S22IDFE-XBPM:P1ds:y:Offset1M / S22IDFE-XBPM:P1ds:y:Offset1M
S22IDFE-XBPM:P1ds:y:Offset2M / S22IDFE-XBPM:P1ds:y:Offset2M
S22IDFE-XBPM:P1ds:y:ResolutionM / S22IDFE-XBPM:P1ds:y:ResolutionM
S22IDFE-XBPM:P1ds:y:Resolution1sM / S22IDFE-XBPM:P1ds:y:Resolution1sM
S22IDFE-XBPM:P1ds:y:Resolution8sM / S22IDFE-XBPM:P1ds:y:Resolution8sM
S22IDFE-XBPM:P1ds:y:Resolution64sM / S22IDFE-XBPM:P1ds:y:Resolution64sM
S22IDFE-XBPM:P1ds:y:StdDevM / S22IDFE-XBPM:P1ds:y:StdDevM
S22IDFE-XBPM:P1ds:y:StdDev1sM / S22IDFE-XBPM:P1ds:y:StdDev1sM
S22IDFE-XBPM:P1ds:y:StdDev8sM / S22IDFE-XBPM:P1ds:y:StdDev8sM
S22IDFE-XBPM:P1ds:y:StdDev64sM / S22IDFE-XBPM:P1ds:y:StdDev64sM
S22IDFE-XBPM:P1ds:y1:LowPass1sM / S22IDFE-XBPM:P1ds:y1:LowPass1sM
S22IDFE-XBPM:P1ds:y1:LowPass8sM / S22IDFE-XBPM:P1ds:y1:LowPass8sM
S22IDFE-XBPM:P1ds:y1:LowPass64sM / S22IDFE-XBPM:P1ds:y1:LowPass64sM
S22IDFE-XBPM:P1ds:y2:LowPass1sM / S22IDFE-XBPM:P1ds:y2:LowPass1sM
S22IDFE-XBPM:P1ds:y2:LowPass8sM / S22IDFE-XBPM:P1ds:y2:LowPass8sM
S22IDFE-XBPM:P1ds:y2:LowPass64sM / S22IDFE-XBPM:P1ds:y2:LowPass64sM
S22IDFE-XBPM:P1us:BMcUsedM / S22IDFE-XBPM:P1us:BMcUsedM
S22IDFE-XBPM:P1us:GapUsedC / S22IDFE-XBPM:P1us:GapUsedC
S22IDFE-XBPM:P1us:Wx1UsedM / S22IDFE-XBPM:P1us:Wx1UsedM
S22IDFE-XBPM:P1us:Wx2UsedM / S22IDFE-XBPM:P1us:Wx2UsedM
S22IDFE-XBPM:P1us:Wx3UsedM / S22IDFE-XBPM:P1us:Wx3UsedM
S22IDFE-XBPM:P1us:Wy1UsedM / S22IDFE-XBPM:P1us:Wy1UsedM
S22IDFE-XBPM:P1us:Wy2UsedM / S22IDFE-XBPM:P1us:Wy2UsedM
S22IDFE-XBPM:P1us:Wy3UsedM / S22IDFE-XBPM:P1us:Wy3UsedM
S22IDFE-XBPM:P1us:x / S22IDFE-XBPM:P1us:x
S22IDFE-XBPM:P1us:x:CalFactor1M / S22IDFE-XBPM:P1us:x:CalFactor1M
S22IDFE-XBPM:P1us:x:CalFactor2M / S22IDFE-XBPM:P1us:x:CalFactor2M
S22IDFE-XBPM:P1us:x:LowPass1sM / S22IDFE-XBPM:P1us:x:LowPass1sM
S22IDFE-XBPM:P1us:x:LowPass8sM / S22IDFE-XBPM:P1us:x:LowPass8sM
S22IDFE-XBPM:P1us:x:LowPass64sM / S22IDFE-XBPM:P1us:x:LowPass64sM
S22IDFE-XBPM:P1us:x:Offset1M / S22IDFE-XBPM:P1us:x:Offset1M
S22IDFE-XBPM:P1us:x:Offset2M / S22IDFE-XBPM:P1us:x:Offset2M
S22IDFE-XBPM:P1us:x:ResolutionM / S22IDFE-XBPM:P1us:x:ResolutionM
S22IDFE-XBPM:P1us:x:Resolution1sM / S22IDFE-XBPM:P1us:x:Resolution1sM
S22IDFE-XBPM:P1us:x:Resolution8sM / S22IDFE-XBPM:P1us:x:Resolution8sM
S22IDFE-XBPM:P1us:x:Resolution64sM / S22IDFE-XBPM:P1us:x:Resolution64sM
S22IDFE-XBPM:P1us:x:StdDevM / S22IDFE-XBPM:P1us:x:StdDevM
S22IDFE-XBPM:P1us:x:StdDev1sM / S22IDFE-XBPM:P1us:x:StdDev1sM
S22IDFE-XBPM:P1us:x:StdDev8sM / S22IDFE-XBPM:P1us:x:StdDev8sM
S22IDFE-XBPM:P1us:x:StdDev64sM / S22IDFE-XBPM:P1us:x:StdDev64sM
S22IDFE-XBPM:P1us:x1:LowPass1sM / S22IDFE-XBPM:P1us:x1:LowPass1sM
S22IDFE-XBPM:P1us:x1:LowPass8sM / S22IDFE-XBPM:P1us:x1:LowPass8sM
S22IDFE-XBPM:P1us:x1:LowPass64sM / S22IDFE-XBPM:P1us:x1:LowPass64sM
S22IDFE-XBPM:P1us:x2:LowPass1sM / S22IDFE-XBPM:P1us:x2:LowPass1sM
S22IDFE-XBPM:P1us:x2:LowPass8sM / S22IDFE-XBPM:P1us:x2:LowPass8sM
S22IDFE-XBPM:P1us:x2:LowPass64sM / S22IDFE-XBPM:P1us:x2:LowPass64sM
S22IDFE-XBPM:P1us:y / S22IDFE-XBPM:P1us:y
S22IDFE-XBPM:P1us:y:CalFactor1M / S22IDFE-XBPM:P1us:y:CalFactor1M
S22IDFE-XBPM:P1us:y:CalFactor2M / S22IDFE-XBPM:P1us:y:CalFactor2M
S22IDFE-XBPM:P1us:y:LowPass1sM / S22IDFE-XBPM:P1us:y:LowPass1sM
S22IDFE-XBPM:P1us:y:LowPass8sM / S22IDFE-XBPM:P1us:y:LowPass8sM
S22IDFE-XBPM:P1us:y:LowPass64sM / S22IDFE-XBPM:P1us:y:LowPass64sM
S22IDFE-XBPM:P1us:y:Offset1M / S22IDFE-XBPM:P1us:y:Offset1M
S22IDFE-XBPM:P1us:y:Offset2M / S22IDFE-XBPM:P1us:y:Offset2M
S22IDFE-XBPM:P1us:y:ResolutionM / S22IDFE-XBPM:P1us:y:ResolutionM
S22IDFE-XBPM:P1us:y:Resolution1sM / S22IDFE-XBPM:P1us:y:Resolution1sM
S22IDFE-XBPM:P1us:y:Resolution8sM / S22IDFE-XBPM:P1us:y:Resolution8sM
S22IDFE-XBPM:P1us:y:Resolution64sM / S22IDFE-XBPM:P1us:y:Resolution64sM
S22IDFE-XBPM:P1us:y:StdDevM / S22IDFE-XBPM:P1us:y:StdDevM
S22IDFE-XBPM:P1us:y:StdDev1sM / S22IDFE-XBPM:P1us:y:StdDev1sM
S22IDFE-XBPM:P1us:y:StdDev8sM / S22IDFE-XBPM:P1us:y:StdDev8sM
S22IDFE-XBPM:P1us:y:StdDev64sM / S22IDFE-XBPM:P1us:y:StdDev64sM
S22IDFE-XBPM:P1us:y1:LowPass1sM / S22IDFE-XBPM:P1us:y1:LowPass1sM
S22IDFE-XBPM:P1us:y1:LowPass8sM / S22IDFE-XBPM:P1us:y1:LowPass8sM
S22IDFE-XBPM:P1us:y1:LowPass64sM / S22IDFE-XBPM:P1us:y1:LowPass64sM
S22IDFE-XBPM:P1us:y2:LowPass1sM / S22IDFE-XBPM:P1us:y2:LowPass1sM
S22IDFE-XBPM:P1us:y2:LowPass8sM / S22IDFE-XBPM:P1us:y2:LowPass8sM
S22IDFE-XBPM:P1us:y2:LowPass64sM / S22IDFE-XBPM:P1us:y2:LowPass64sM
S22IDFE-XBPM:P2ds:GapUsedC / S22IDFE-XBPM:P2ds:GapUsedC
S22IDFE-XBPM:P2ds:XCalM / S22IDFE-XBPM:P2ds:XCalM
S22IDFE-XBPM:P2ds:YCalM / S22IDFE-XBPM:P2ds:YCalM
S22IDFE-XBPM:P2ds:x:CalFactorM / S22IDFE-XBPM:P2ds:x:CalFactorM
S22IDFE-XBPM:P2ds:x:OffsetM / S22IDFE-XBPM:P2ds:x:OffsetM
S22IDFE-XBPM:P2ds:y:CalFactorM / S22IDFE-XBPM:P2ds:y:CalFactorM
S22IDFE-XBPM:P2ds:y:OffsetM / S22IDFE-XBPM:P2ds:y:OffsetM
S22IDFE-XBPM:P2us:GapUsedC / S22IDFE-XBPM:P2us:GapUsedC
S22IDFE-XBPM:P2us:XCalM / S22IDFE-XBPM:P2us:XCalM
S22IDFE-XBPM:P2us:YCalM / S22IDFE-XBPM:P2us:YCalM
S22IDFE-XBPM:P2us:x:CalFactorM / S22IDFE-XBPM:P2us:x:CalFactorM
S22IDFE-XBPM:P2us:x:OffsetM / S22IDFE-XBPM:P2us:x:OffsetM
S22IDFE-XBPM:P2us:y:CalFactorM / S22IDFE-XBPM:P2us:y:CalFactorM
S22IDFE-XBPM:P2us:y:OffsetM / S22IDFE-XBPM:P2us:y:OffsetM
S23BMFE-XBPM:P1:AM / S23BMFE-XBPM:P1:AM
S23BMFE-XBPM:P1:BM / S23BMFE-XBPM:P1:BM
S23BMFE-XBPM:P1:y / S23BMFE-XBPM:P1:y
S23BMFE-XBPM:P1:y:LowPass1sM / S23BMFE-XBPM:P1:y:LowPass1sM
S23BMFE-XBPM:P1:y:LowPass8sM / S23BMFE-XBPM:P1:y:LowPass8sM
S23BMFE-XBPM:P1:y:LowPass64sM / S23BMFE-XBPM:P1:y:LowPass64sM
S23BMFE-XBPM:P1:y:StdDevM / S23BMFE-XBPM:P1:y:StdDevM
S23BMFE-XBPM:P1:y:StdDev1sM / S23BMFE-XBPM:P1:y:StdDev1sM
S23BMFE-XBPM:P1:y:StdDev8sM / S23BMFE-XBPM:P1:y:StdDev8sM
S23BMFE-XBPM:P1:y:StdDev64sM / S23BMFE-XBPM:P1:y:StdDev64sM
S23BMFE-XBPM:P2:AM / S23BMFE-XBPM:P2:AM
S23BMFE-XBPM:P2:BM / S23BMFE-XBPM:P2:BM
S23BMFE-XBPM:P2:y / S23BMFE-XBPM:P2:y
S23BMFE-XBPM:P2:y:LowPass1sM / S23BMFE-XBPM:P2:y:LowPass1sM
S23BMFE-XBPM:P2:y:LowPass8sM / S23BMFE-XBPM:P2:y:LowPass8sM
S23BMFE-XBPM:P2:y:LowPass64sM / S23BMFE-XBPM:P2:y:LowPass64sM
S23BMFE-XBPM:P2:y:StdDevM / S23BMFE-XBPM:P2:y:StdDevM
S23BMFE-XBPM:P2:y:StdDev1sM / S23BMFE-XBPM:P2:y:StdDev1sM
S23BMFE-XBPM:P2:y:StdDev8sM / S23BMFE-XBPM:P2:y:StdDev8sM
S23BMFE-XBPM:P2:y:StdDev64sM / S23BMFE-XBPM:P2:y:StdDev64sM
S23IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S23IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S23IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S23IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S23IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S23IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S23IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S23IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S23IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S23IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S23IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S23IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S23IDFE-XBPM:CM1ds:PositionOffsetX / S23IDFE-XBPM:CM1ds:PositionOffsetX
S23IDFE-XBPM:CM1ds:PositionOffsetY / S23IDFE-XBPM:CM1ds:PositionOffsetY
S23IDFE-XBPM:CM1ds:PositionScaleX / S23IDFE-XBPM:CM1ds:PositionScaleX
S23IDFE-XBPM:CM1ds:PositionScaleY / S23IDFE-XBPM:CM1ds:PositionScaleY
S23IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S23IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S23IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S23IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S23IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S23IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S23IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S23IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S23IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S23IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S23IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S23IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S23IDFE-XBPM:CM1us:PositionOffsetX / S23IDFE-XBPM:CM1us:PositionOffsetX
S23IDFE-XBPM:CM1us:PositionOffsetY / S23IDFE-XBPM:CM1us:PositionOffsetY
S23IDFE-XBPM:CM1us:PositionScaleX / S23IDFE-XBPM:CM1us:PositionScaleX
S23IDFE-XBPM:CM1us:PositionScaleY / S23IDFE-XBPM:CM1us:PositionScaleY
S23IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S23IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S23IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S23IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S23IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S23IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S23IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S23IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S23IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S23IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S23IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S23IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S23IDFE-XBPM:CM2ds:PositionOffsetX / S23IDFE-XBPM:CM2ds:PositionOffsetX
S23IDFE-XBPM:CM2ds:PositionOffsetY / S23IDFE-XBPM:CM2ds:PositionOffsetY
S23IDFE-XBPM:CM2ds:PositionScaleX / S23IDFE-XBPM:CM2ds:PositionScaleX
S23IDFE-XBPM:CM2ds:PositionScaleY / S23IDFE-XBPM:CM2ds:PositionScaleY
S23IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S23IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S23IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S23IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S23IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S23IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S23IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S23IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S23IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S23IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S23IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S23IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S23IDFE-XBPM:CM2us:PositionOffsetX / S23IDFE-XBPM:CM2us:PositionOffsetX
S23IDFE-XBPM:CM2us:PositionOffsetY / S23IDFE-XBPM:CM2us:PositionOffsetY
S23IDFE-XBPM:CM2us:PositionScaleX / S23IDFE-XBPM:CM2us:PositionScaleX
S23IDFE-XBPM:CM2us:PositionScaleY / S23IDFE-XBPM:CM2us:PositionScaleY
S23IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S23IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S23IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S23IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S23IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S23IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S23IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S23IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S23IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S23IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S23IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S23IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S23IDFE-XBPM:CM3ds:PositionOffsetX / S23IDFE-XBPM:CM3ds:PositionOffsetX
S23IDFE-XBPM:CM3ds:PositionOffsetY / S23IDFE-XBPM:CM3ds:PositionOffsetY
S23IDFE-XBPM:CM3ds:PositionScaleX / S23IDFE-XBPM:CM3ds:PositionScaleX
S23IDFE-XBPM:CM3ds:PositionScaleY / S23IDFE-XBPM:CM3ds:PositionScaleY
S23IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S23IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S23IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S23IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S23IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S23IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S23IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S23IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S23IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S23IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S23IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S23IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S23IDFE-XBPM:CM3us:PositionOffsetX / S23IDFE-XBPM:CM3us:PositionOffsetX
S23IDFE-XBPM:CM3us:PositionOffsetY / S23IDFE-XBPM:CM3us:PositionOffsetY
S23IDFE-XBPM:CM3us:PositionScaleX / S23IDFE-XBPM:CM3us:PositionScaleX
S23IDFE-XBPM:CM3us:PositionScaleY / S23IDFE-XBPM:CM3us:PositionScaleY
S23IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S23IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S23IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S23IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S23IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S23IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S23IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S23IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S23IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S23IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S23IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S23IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S23IDFE-XBPM:CM4ds:PositionOffsetX / S23IDFE-XBPM:CM4ds:PositionOffsetX
S23IDFE-XBPM:CM4ds:PositionOffsetY / S23IDFE-XBPM:CM4ds:PositionOffsetY
S23IDFE-XBPM:CM4ds:PositionScaleX / S23IDFE-XBPM:CM4ds:PositionScaleX
S23IDFE-XBPM:CM4ds:PositionScaleY / S23IDFE-XBPM:CM4ds:PositionScaleY
S23IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S23IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S23IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S23IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S23IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S23IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S23IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S23IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S23IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S23IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S23IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S23IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S23IDFE-XBPM:CM4us:PositionOffsetX / S23IDFE-XBPM:CM4us:PositionOffsetX
S23IDFE-XBPM:CM4us:PositionOffsetY / S23IDFE-XBPM:CM4us:PositionOffsetY
S23IDFE-XBPM:CM4us:PositionScaleX / S23IDFE-XBPM:CM4us:PositionScaleX
S23IDFE-XBPM:CM4us:PositionScaleY / S23IDFE-XBPM:CM4us:PositionScaleY
S23IDFE-XBPM:P1ds:BMcUsedM / S23IDFE-XBPM:P1ds:BMcUsedM
S23IDFE-XBPM:P1ds:GapUsedC / S23IDFE-XBPM:P1ds:GapUsedC
S23IDFE-XBPM:P1ds:Wx1UsedM / S23IDFE-XBPM:P1ds:Wx1UsedM
S23IDFE-XBPM:P1ds:Wx2UsedM / S23IDFE-XBPM:P1ds:Wx2UsedM
S23IDFE-XBPM:P1ds:Wx3UsedM / S23IDFE-XBPM:P1ds:Wx3UsedM
S23IDFE-XBPM:P1ds:Wy1UsedM / S23IDFE-XBPM:P1ds:Wy1UsedM
S23IDFE-XBPM:P1ds:Wy2UsedM / S23IDFE-XBPM:P1ds:Wy2UsedM
S23IDFE-XBPM:P1ds:Wy3UsedM / S23IDFE-XBPM:P1ds:Wy3UsedM
S23IDFE-XBPM:P1ds:x / S23IDFE-XBPM:P1ds:x
S23IDFE-XBPM:P1ds:x:CalFactor1M / S23IDFE-XBPM:P1ds:x:CalFactor1M
S23IDFE-XBPM:P1ds:x:CalFactor2M / S23IDFE-XBPM:P1ds:x:CalFactor2M
S23IDFE-XBPM:P1ds:x:LowPass1sM / S23IDFE-XBPM:P1ds:x:LowPass1sM
S23IDFE-XBPM:P1ds:x:LowPass8sM / S23IDFE-XBPM:P1ds:x:LowPass8sM
S23IDFE-XBPM:P1ds:x:LowPass64sM / S23IDFE-XBPM:P1ds:x:LowPass64sM
S23IDFE-XBPM:P1ds:x:Offset1M / S23IDFE-XBPM:P1ds:x:Offset1M
S23IDFE-XBPM:P1ds:x:Offset2M / S23IDFE-XBPM:P1ds:x:Offset2M
S23IDFE-XBPM:P1ds:x:ResolutionM / S23IDFE-XBPM:P1ds:x:ResolutionM
S23IDFE-XBPM:P1ds:x:Resolution1sM / S23IDFE-XBPM:P1ds:x:Resolution1sM
S23IDFE-XBPM:P1ds:x:Resolution8sM / S23IDFE-XBPM:P1ds:x:Resolution8sM
S23IDFE-XBPM:P1ds:x:Resolution64sM / S23IDFE-XBPM:P1ds:x:Resolution64sM
S23IDFE-XBPM:P1ds:x:StdDevM / S23IDFE-XBPM:P1ds:x:StdDevM
S23IDFE-XBPM:P1ds:x:StdDev1sM / S23IDFE-XBPM:P1ds:x:StdDev1sM
S23IDFE-XBPM:P1ds:x:StdDev8sM / S23IDFE-XBPM:P1ds:x:StdDev8sM
S23IDFE-XBPM:P1ds:x:StdDev64sM / S23IDFE-XBPM:P1ds:x:StdDev64sM
S23IDFE-XBPM:P1ds:x1:LowPass1sM / S23IDFE-XBPM:P1ds:x1:LowPass1sM
S23IDFE-XBPM:P1ds:x1:LowPass8sM / S23IDFE-XBPM:P1ds:x1:LowPass8sM
S23IDFE-XBPM:P1ds:x1:LowPass64sM / S23IDFE-XBPM:P1ds:x1:LowPass64sM
S23IDFE-XBPM:P1ds:x2:LowPass1sM / S23IDFE-XBPM:P1ds:x2:LowPass1sM
S23IDFE-XBPM:P1ds:x2:LowPass8sM / S23IDFE-XBPM:P1ds:x2:LowPass8sM
S23IDFE-XBPM:P1ds:x2:LowPass64sM / S23IDFE-XBPM:P1ds:x2:LowPass64sM
S23IDFE-XBPM:P1ds:y / S23IDFE-XBPM:P1ds:y
S23IDFE-XBPM:P1ds:y:CalFactor1M / S23IDFE-XBPM:P1ds:y:CalFactor1M
S23IDFE-XBPM:P1ds:y:CalFactor2M / S23IDFE-XBPM:P1ds:y:CalFactor2M
S23IDFE-XBPM:P1ds:y:LowPass1sM / S23IDFE-XBPM:P1ds:y:LowPass1sM
S23IDFE-XBPM:P1ds:y:LowPass8sM / S23IDFE-XBPM:P1ds:y:LowPass8sM
S23IDFE-XBPM:P1ds:y:LowPass64sM / S23IDFE-XBPM:P1ds:y:LowPass64sM
S23IDFE-XBPM:P1ds:y:Offset1M / S23IDFE-XBPM:P1ds:y:Offset1M
S23IDFE-XBPM:P1ds:y:Offset2M / S23IDFE-XBPM:P1ds:y:Offset2M
S23IDFE-XBPM:P1ds:y:ResolutionM / S23IDFE-XBPM:P1ds:y:ResolutionM
S23IDFE-XBPM:P1ds:y:Resolution1sM / S23IDFE-XBPM:P1ds:y:Resolution1sM
S23IDFE-XBPM:P1ds:y:Resolution8sM / S23IDFE-XBPM:P1ds:y:Resolution8sM
S23IDFE-XBPM:P1ds:y:Resolution64sM / S23IDFE-XBPM:P1ds:y:Resolution64sM
S23IDFE-XBPM:P1ds:y:StdDevM / S23IDFE-XBPM:P1ds:y:StdDevM
S23IDFE-XBPM:P1ds:y:StdDev1sM / S23IDFE-XBPM:P1ds:y:StdDev1sM
S23IDFE-XBPM:P1ds:y:StdDev8sM / S23IDFE-XBPM:P1ds:y:StdDev8sM
S23IDFE-XBPM:P1ds:y:StdDev64sM / S23IDFE-XBPM:P1ds:y:StdDev64sM
S23IDFE-XBPM:P1ds:y1:LowPass1sM / S23IDFE-XBPM:P1ds:y1:LowPass1sM
S23IDFE-XBPM:P1ds:y1:LowPass8sM / S23IDFE-XBPM:P1ds:y1:LowPass8sM
S23IDFE-XBPM:P1ds:y1:LowPass64sM / S23IDFE-XBPM:P1ds:y1:LowPass64sM
S23IDFE-XBPM:P1ds:y2:LowPass1sM / S23IDFE-XBPM:P1ds:y2:LowPass1sM
S23IDFE-XBPM:P1ds:y2:LowPass8sM / S23IDFE-XBPM:P1ds:y2:LowPass8sM
S23IDFE-XBPM:P1ds:y2:LowPass64sM / S23IDFE-XBPM:P1ds:y2:LowPass64sM
S23IDFE-XBPM:P1us:BMcUsedM / S23IDFE-XBPM:P1us:BMcUsedM
S23IDFE-XBPM:P1us:GapUsedC / S23IDFE-XBPM:P1us:GapUsedC
S23IDFE-XBPM:P1us:Wx1UsedM / S23IDFE-XBPM:P1us:Wx1UsedM
S23IDFE-XBPM:P1us:Wx2UsedM / S23IDFE-XBPM:P1us:Wx2UsedM
S23IDFE-XBPM:P1us:Wx3UsedM / S23IDFE-XBPM:P1us:Wx3UsedM
S23IDFE-XBPM:P1us:Wy1UsedM / S23IDFE-XBPM:P1us:Wy1UsedM
S23IDFE-XBPM:P1us:Wy2UsedM / S23IDFE-XBPM:P1us:Wy2UsedM
S23IDFE-XBPM:P1us:Wy3UsedM / S23IDFE-XBPM:P1us:Wy3UsedM
S23IDFE-XBPM:P1us:x / S23IDFE-XBPM:P1us:x
S23IDFE-XBPM:P1us:x:CalFactor1M / S23IDFE-XBPM:P1us:x:CalFactor1M
S23IDFE-XBPM:P1us:x:CalFactor2M / S23IDFE-XBPM:P1us:x:CalFactor2M
S23IDFE-XBPM:P1us:x:LowPass1sM / S23IDFE-XBPM:P1us:x:LowPass1sM
S23IDFE-XBPM:P1us:x:LowPass8sM / S23IDFE-XBPM:P1us:x:LowPass8sM
S23IDFE-XBPM:P1us:x:LowPass64sM / S23IDFE-XBPM:P1us:x:LowPass64sM
S23IDFE-XBPM:P1us:x:Offset1M / S23IDFE-XBPM:P1us:x:Offset1M
S23IDFE-XBPM:P1us:x:Offset2M / S23IDFE-XBPM:P1us:x:Offset2M
S23IDFE-XBPM:P1us:x:ResolutionM / S23IDFE-XBPM:P1us:x:ResolutionM
S23IDFE-XBPM:P1us:x:Resolution1sM / S23IDFE-XBPM:P1us:x:Resolution1sM
S23IDFE-XBPM:P1us:x:Resolution8sM / S23IDFE-XBPM:P1us:x:Resolution8sM
S23IDFE-XBPM:P1us:x:Resolution64sM / S23IDFE-XBPM:P1us:x:Resolution64sM
S23IDFE-XBPM:P1us:x:StdDevM / S23IDFE-XBPM:P1us:x:StdDevM
S23IDFE-XBPM:P1us:x:StdDev1sM / S23IDFE-XBPM:P1us:x:StdDev1sM
S23IDFE-XBPM:P1us:x:StdDev8sM / S23IDFE-XBPM:P1us:x:StdDev8sM
S23IDFE-XBPM:P1us:x:StdDev64sM / S23IDFE-XBPM:P1us:x:StdDev64sM
S23IDFE-XBPM:P1us:x1:LowPass1sM / S23IDFE-XBPM:P1us:x1:LowPass1sM
S23IDFE-XBPM:P1us:x1:LowPass8sM / S23IDFE-XBPM:P1us:x1:LowPass8sM
S23IDFE-XBPM:P1us:x1:LowPass64sM / S23IDFE-XBPM:P1us:x1:LowPass64sM
S23IDFE-XBPM:P1us:x2:LowPass1sM / S23IDFE-XBPM:P1us:x2:LowPass1sM
S23IDFE-XBPM:P1us:x2:LowPass8sM / S23IDFE-XBPM:P1us:x2:LowPass8sM
S23IDFE-XBPM:P1us:x2:LowPass64sM / S23IDFE-XBPM:P1us:x2:LowPass64sM
S23IDFE-XBPM:P1us:y / S23IDFE-XBPM:P1us:y
S23IDFE-XBPM:P1us:y:CalFactor1M / S23IDFE-XBPM:P1us:y:CalFactor1M
S23IDFE-XBPM:P1us:y:CalFactor2M / S23IDFE-XBPM:P1us:y:CalFactor2M
S23IDFE-XBPM:P1us:y:LowPass1sM / S23IDFE-XBPM:P1us:y:LowPass1sM
S23IDFE-XBPM:P1us:y:LowPass8sM / S23IDFE-XBPM:P1us:y:LowPass8sM
S23IDFE-XBPM:P1us:y:LowPass64sM / S23IDFE-XBPM:P1us:y:LowPass64sM
S23IDFE-XBPM:P1us:y:Offset1M / S23IDFE-XBPM:P1us:y:Offset1M
S23IDFE-XBPM:P1us:y:Offset2M / S23IDFE-XBPM:P1us:y:Offset2M
S23IDFE-XBPM:P1us:y:ResolutionM / S23IDFE-XBPM:P1us:y:ResolutionM
S23IDFE-XBPM:P1us:y:Resolution1sM / S23IDFE-XBPM:P1us:y:Resolution1sM
S23IDFE-XBPM:P1us:y:Resolution8sM / S23IDFE-XBPM:P1us:y:Resolution8sM
S23IDFE-XBPM:P1us:y:Resolution64sM / S23IDFE-XBPM:P1us:y:Resolution64sM
S23IDFE-XBPM:P1us:y:StdDevM / S23IDFE-XBPM:P1us:y:StdDevM
S23IDFE-XBPM:P1us:y:StdDev1sM / S23IDFE-XBPM:P1us:y:StdDev1sM
S23IDFE-XBPM:P1us:y:StdDev8sM / S23IDFE-XBPM:P1us:y:StdDev8sM
S23IDFE-XBPM:P1us:y:StdDev64sM / S23IDFE-XBPM:P1us:y:StdDev64sM
S23IDFE-XBPM:P1us:y1:LowPass1sM / S23IDFE-XBPM:P1us:y1:LowPass1sM
S23IDFE-XBPM:P1us:y1:LowPass8sM / S23IDFE-XBPM:P1us:y1:LowPass8sM
S23IDFE-XBPM:P1us:y1:LowPass64sM / S23IDFE-XBPM:P1us:y1:LowPass64sM
S23IDFE-XBPM:P1us:y2:LowPass1sM / S23IDFE-XBPM:P1us:y2:LowPass1sM
S23IDFE-XBPM:P1us:y2:LowPass8sM / S23IDFE-XBPM:P1us:y2:LowPass8sM
S23IDFE-XBPM:P1us:y2:LowPass64sM / S23IDFE-XBPM:P1us:y2:LowPass64sM
S23IDFE-XBPM:P2ds:GapUsedC / S23IDFE-XBPM:P2ds:GapUsedC
S23IDFE-XBPM:P2ds:XCalM / S23IDFE-XBPM:P2ds:XCalM
S23IDFE-XBPM:P2ds:YCalM / S23IDFE-XBPM:P2ds:YCalM
S23IDFE-XBPM:P2ds:x:CalFactorM / S23IDFE-XBPM:P2ds:x:CalFactorM
S23IDFE-XBPM:P2ds:x:OffsetM / S23IDFE-XBPM:P2ds:x:OffsetM
S23IDFE-XBPM:P2ds:y:CalFactorM / S23IDFE-XBPM:P2ds:y:CalFactorM
S23IDFE-XBPM:P2ds:y:OffsetM / S23IDFE-XBPM:P2ds:y:OffsetM
S23IDFE-XBPM:P2us:GapUsedC / S23IDFE-XBPM:P2us:GapUsedC
S23IDFE-XBPM:P2us:XCalM / S23IDFE-XBPM:P2us:XCalM
S23IDFE-XBPM:P2us:YCalM / S23IDFE-XBPM:P2us:YCalM
S23IDFE-XBPM:P2us:x:CalFactorM / S23IDFE-XBPM:P2us:x:CalFactorM
S23IDFE-XBPM:P2us:x:OffsetM / S23IDFE-XBPM:P2us:x:OffsetM
S23IDFE-XBPM:P2us:y:CalFactorM / S23IDFE-XBPM:P2us:y:CalFactorM
S23IDFE-XBPM:P2us:y:OffsetM / S23IDFE-XBPM:P2us:y:OffsetM
S24IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S24IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S24IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S24IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S24IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S24IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S24IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S24IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S24IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S24IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S24IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S24IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S24IDFE-XBPM:CM1ds:PositionOffsetX / S24IDFE-XBPM:CM1ds:PositionOffsetX
S24IDFE-XBPM:CM1ds:PositionOffsetY / S24IDFE-XBPM:CM1ds:PositionOffsetY
S24IDFE-XBPM:CM1ds:PositionScaleX / S24IDFE-XBPM:CM1ds:PositionScaleX
S24IDFE-XBPM:CM1ds:PositionScaleY / S24IDFE-XBPM:CM1ds:PositionScaleY
S24IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S24IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S24IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S24IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S24IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S24IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S24IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S24IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S24IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S24IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S24IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S24IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S24IDFE-XBPM:CM1us:PositionOffsetX / S24IDFE-XBPM:CM1us:PositionOffsetX
S24IDFE-XBPM:CM1us:PositionOffsetY / S24IDFE-XBPM:CM1us:PositionOffsetY
S24IDFE-XBPM:CM1us:PositionScaleX / S24IDFE-XBPM:CM1us:PositionScaleX
S24IDFE-XBPM:CM1us:PositionScaleY / S24IDFE-XBPM:CM1us:PositionScaleY
S24IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S24IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S24IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S24IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S24IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S24IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S24IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S24IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S24IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S24IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S24IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S24IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S24IDFE-XBPM:CM2ds:PositionOffsetX / S24IDFE-XBPM:CM2ds:PositionOffsetX
S24IDFE-XBPM:CM2ds:PositionOffsetY / S24IDFE-XBPM:CM2ds:PositionOffsetY
S24IDFE-XBPM:CM2ds:PositionScaleX / S24IDFE-XBPM:CM2ds:PositionScaleX
S24IDFE-XBPM:CM2ds:PositionScaleY / S24IDFE-XBPM:CM2ds:PositionScaleY
S24IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S24IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S24IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S24IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S24IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S24IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S24IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S24IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S24IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S24IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S24IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S24IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S24IDFE-XBPM:CM2us:PositionOffsetX / S24IDFE-XBPM:CM2us:PositionOffsetX
S24IDFE-XBPM:CM2us:PositionOffsetY / S24IDFE-XBPM:CM2us:PositionOffsetY
S24IDFE-XBPM:CM2us:PositionScaleX / S24IDFE-XBPM:CM2us:PositionScaleX
S24IDFE-XBPM:CM2us:PositionScaleY / S24IDFE-XBPM:CM2us:PositionScaleY
S24IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S24IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S24IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S24IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S24IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S24IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S24IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S24IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S24IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S24IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S24IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S24IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S24IDFE-XBPM:CM3ds:PositionOffsetX / S24IDFE-XBPM:CM3ds:PositionOffsetX
S24IDFE-XBPM:CM3ds:PositionOffsetY / S24IDFE-XBPM:CM3ds:PositionOffsetY
S24IDFE-XBPM:CM3ds:PositionScaleX / S24IDFE-XBPM:CM3ds:PositionScaleX
S24IDFE-XBPM:CM3ds:PositionScaleY / S24IDFE-XBPM:CM3ds:PositionScaleY
S24IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S24IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S24IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S24IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S24IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S24IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S24IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S24IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S24IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S24IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S24IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S24IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S24IDFE-XBPM:CM3us:PositionOffsetX / S24IDFE-XBPM:CM3us:PositionOffsetX
S24IDFE-XBPM:CM3us:PositionOffsetY / S24IDFE-XBPM:CM3us:PositionOffsetY
S24IDFE-XBPM:CM3us:PositionScaleX / S24IDFE-XBPM:CM3us:PositionScaleX
S24IDFE-XBPM:CM3us:PositionScaleY / S24IDFE-XBPM:CM3us:PositionScaleY
S24IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S24IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S24IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S24IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S24IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S24IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S24IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S24IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S24IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S24IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S24IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S24IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S24IDFE-XBPM:CM4ds:PositionOffsetX / S24IDFE-XBPM:CM4ds:PositionOffsetX
S24IDFE-XBPM:CM4ds:PositionOffsetY / S24IDFE-XBPM:CM4ds:PositionOffsetY
S24IDFE-XBPM:CM4ds:PositionScaleX / S24IDFE-XBPM:CM4ds:PositionScaleX
S24IDFE-XBPM:CM4ds:PositionScaleY / S24IDFE-XBPM:CM4ds:PositionScaleY
S24IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S24IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S24IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S24IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S24IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S24IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S24IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S24IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S24IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S24IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S24IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S24IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S24IDFE-XBPM:CM4us:PositionOffsetX / S24IDFE-XBPM:CM4us:PositionOffsetX
S24IDFE-XBPM:CM4us:PositionOffsetY / S24IDFE-XBPM:CM4us:PositionOffsetY
S24IDFE-XBPM:CM4us:PositionScaleX / S24IDFE-XBPM:CM4us:PositionScaleX
S24IDFE-XBPM:CM4us:PositionScaleY / S24IDFE-XBPM:CM4us:PositionScaleY
S24IDFE-XBPM:P1ds:BMcUsedM / S24IDFE-XBPM:P1ds:BMcUsedM
S24IDFE-XBPM:P1ds:GapUsedC / S24IDFE-XBPM:P1ds:GapUsedC
S24IDFE-XBPM:P1ds:Wx1UsedM / S24IDFE-XBPM:P1ds:Wx1UsedM
S24IDFE-XBPM:P1ds:Wx2UsedM / S24IDFE-XBPM:P1ds:Wx2UsedM
S24IDFE-XBPM:P1ds:Wx3UsedM / S24IDFE-XBPM:P1ds:Wx3UsedM
S24IDFE-XBPM:P1ds:Wy1UsedM / S24IDFE-XBPM:P1ds:Wy1UsedM
S24IDFE-XBPM:P1ds:Wy2UsedM / S24IDFE-XBPM:P1ds:Wy2UsedM
S24IDFE-XBPM:P1ds:Wy3UsedM / S24IDFE-XBPM:P1ds:Wy3UsedM
S24IDFE-XBPM:P1ds:x / S24IDFE-XBPM:P1ds:x
S24IDFE-XBPM:P1ds:x:CalFactor1M / S24IDFE-XBPM:P1ds:x:CalFactor1M
S24IDFE-XBPM:P1ds:x:CalFactor2M / S24IDFE-XBPM:P1ds:x:CalFactor2M
S24IDFE-XBPM:P1ds:x:LowPass1sM / S24IDFE-XBPM:P1ds:x:LowPass1sM
S24IDFE-XBPM:P1ds:x:LowPass8sM / S24IDFE-XBPM:P1ds:x:LowPass8sM
S24IDFE-XBPM:P1ds:x:LowPass64sM / S24IDFE-XBPM:P1ds:x:LowPass64sM
S24IDFE-XBPM:P1ds:x:Offset1M / S24IDFE-XBPM:P1ds:x:Offset1M
S24IDFE-XBPM:P1ds:x:Offset2M / S24IDFE-XBPM:P1ds:x:Offset2M
S24IDFE-XBPM:P1ds:x:ResolutionM / S24IDFE-XBPM:P1ds:x:ResolutionM
S24IDFE-XBPM:P1ds:x:Resolution1sM / S24IDFE-XBPM:P1ds:x:Resolution1sM
S24IDFE-XBPM:P1ds:x:Resolution8sM / S24IDFE-XBPM:P1ds:x:Resolution8sM
S24IDFE-XBPM:P1ds:x:Resolution64sM / S24IDFE-XBPM:P1ds:x:Resolution64sM
S24IDFE-XBPM:P1ds:x:StdDevM / S24IDFE-XBPM:P1ds:x:StdDevM
S24IDFE-XBPM:P1ds:x:StdDev1sM / S24IDFE-XBPM:P1ds:x:StdDev1sM
S24IDFE-XBPM:P1ds:x:StdDev8sM / S24IDFE-XBPM:P1ds:x:StdDev8sM
S24IDFE-XBPM:P1ds:x:StdDev64sM / S24IDFE-XBPM:P1ds:x:StdDev64sM
S24IDFE-XBPM:P1ds:x1:LowPass1sM / S24IDFE-XBPM:P1ds:x1:LowPass1sM
S24IDFE-XBPM:P1ds:x1:LowPass8sM / S24IDFE-XBPM:P1ds:x1:LowPass8sM
S24IDFE-XBPM:P1ds:x1:LowPass64sM / S24IDFE-XBPM:P1ds:x1:LowPass64sM
S24IDFE-XBPM:P1ds:x2:LowPass1sM / S24IDFE-XBPM:P1ds:x2:LowPass1sM
S24IDFE-XBPM:P1ds:x2:LowPass8sM / S24IDFE-XBPM:P1ds:x2:LowPass8sM
S24IDFE-XBPM:P1ds:x2:LowPass64sM / S24IDFE-XBPM:P1ds:x2:LowPass64sM
S24IDFE-XBPM:P1ds:y / S24IDFE-XBPM:P1ds:y
S24IDFE-XBPM:P1ds:y:CalFactor1M / S24IDFE-XBPM:P1ds:y:CalFactor1M
S24IDFE-XBPM:P1ds:y:CalFactor2M / S24IDFE-XBPM:P1ds:y:CalFactor2M
S24IDFE-XBPM:P1ds:y:LowPass1sM / S24IDFE-XBPM:P1ds:y:LowPass1sM
S24IDFE-XBPM:P1ds:y:LowPass8sM / S24IDFE-XBPM:P1ds:y:LowPass8sM
S24IDFE-XBPM:P1ds:y:LowPass64sM / S24IDFE-XBPM:P1ds:y:LowPass64sM
S24IDFE-XBPM:P1ds:y:Offset1M / S24IDFE-XBPM:P1ds:y:Offset1M
S24IDFE-XBPM:P1ds:y:Offset2M / S24IDFE-XBPM:P1ds:y:Offset2M
S24IDFE-XBPM:P1ds:y:ResolutionM / S24IDFE-XBPM:P1ds:y:ResolutionM
S24IDFE-XBPM:P1ds:y:Resolution1sM / S24IDFE-XBPM:P1ds:y:Resolution1sM
S24IDFE-XBPM:P1ds:y:Resolution8sM / S24IDFE-XBPM:P1ds:y:Resolution8sM
S24IDFE-XBPM:P1ds:y:Resolution64sM / S24IDFE-XBPM:P1ds:y:Resolution64sM
S24IDFE-XBPM:P1ds:y:StdDevM / S24IDFE-XBPM:P1ds:y:StdDevM
S24IDFE-XBPM:P1ds:y:StdDev1sM / S24IDFE-XBPM:P1ds:y:StdDev1sM
S24IDFE-XBPM:P1ds:y:StdDev8sM / S24IDFE-XBPM:P1ds:y:StdDev8sM
S24IDFE-XBPM:P1ds:y:StdDev64sM / S24IDFE-XBPM:P1ds:y:StdDev64sM
S24IDFE-XBPM:P1ds:y1:LowPass1sM / S24IDFE-XBPM:P1ds:y1:LowPass1sM
S24IDFE-XBPM:P1ds:y1:LowPass8sM / S24IDFE-XBPM:P1ds:y1:LowPass8sM
S24IDFE-XBPM:P1ds:y1:LowPass64sM / S24IDFE-XBPM:P1ds:y1:LowPass64sM
S24IDFE-XBPM:P1ds:y2:LowPass1sM / S24IDFE-XBPM:P1ds:y2:LowPass1sM
S24IDFE-XBPM:P1ds:y2:LowPass8sM / S24IDFE-XBPM:P1ds:y2:LowPass8sM
S24IDFE-XBPM:P1ds:y2:LowPass64sM / S24IDFE-XBPM:P1ds:y2:LowPass64sM
S24IDFE-XBPM:P1us:BMcUsedM / S24IDFE-XBPM:P1us:BMcUsedM
S24IDFE-XBPM:P1us:GapUsedC / S24IDFE-XBPM:P1us:GapUsedC
S24IDFE-XBPM:P1us:Wx1UsedM / S24IDFE-XBPM:P1us:Wx1UsedM
S24IDFE-XBPM:P1us:Wx2UsedM / S24IDFE-XBPM:P1us:Wx2UsedM
S24IDFE-XBPM:P1us:Wx3UsedM / S24IDFE-XBPM:P1us:Wx3UsedM
S24IDFE-XBPM:P1us:Wy1UsedM / S24IDFE-XBPM:P1us:Wy1UsedM
S24IDFE-XBPM:P1us:Wy2UsedM / S24IDFE-XBPM:P1us:Wy2UsedM
S24IDFE-XBPM:P1us:Wy3UsedM / S24IDFE-XBPM:P1us:Wy3UsedM
S24IDFE-XBPM:P1us:x / S24IDFE-XBPM:P1us:x
S24IDFE-XBPM:P1us:x:CalFactor1M / S24IDFE-XBPM:P1us:x:CalFactor1M
S24IDFE-XBPM:P1us:x:CalFactor2M / S24IDFE-XBPM:P1us:x:CalFactor2M
S24IDFE-XBPM:P1us:x:LowPass1sM / S24IDFE-XBPM:P1us:x:LowPass1sM
S24IDFE-XBPM:P1us:x:LowPass8sM / S24IDFE-XBPM:P1us:x:LowPass8sM
S24IDFE-XBPM:P1us:x:LowPass64sM / S24IDFE-XBPM:P1us:x:LowPass64sM
S24IDFE-XBPM:P1us:x:Offset1M / S24IDFE-XBPM:P1us:x:Offset1M
S24IDFE-XBPM:P1us:x:Offset2M / S24IDFE-XBPM:P1us:x:Offset2M
S24IDFE-XBPM:P1us:x:ResolutionM / S24IDFE-XBPM:P1us:x:ResolutionM
S24IDFE-XBPM:P1us:x:Resolution1sM / S24IDFE-XBPM:P1us:x:Resolution1sM
S24IDFE-XBPM:P1us:x:Resolution8sM / S24IDFE-XBPM:P1us:x:Resolution8sM
S24IDFE-XBPM:P1us:x:Resolution64sM / S24IDFE-XBPM:P1us:x:Resolution64sM
S24IDFE-XBPM:P1us:x:StdDevM / S24IDFE-XBPM:P1us:x:StdDevM
S24IDFE-XBPM:P1us:x:StdDev1sM / S24IDFE-XBPM:P1us:x:StdDev1sM
S24IDFE-XBPM:P1us:x:StdDev8sM / S24IDFE-XBPM:P1us:x:StdDev8sM
S24IDFE-XBPM:P1us:x:StdDev64sM / S24IDFE-XBPM:P1us:x:StdDev64sM
S24IDFE-XBPM:P1us:x1:LowPass1sM / S24IDFE-XBPM:P1us:x1:LowPass1sM
S24IDFE-XBPM:P1us:x1:LowPass8sM / S24IDFE-XBPM:P1us:x1:LowPass8sM
S24IDFE-XBPM:P1us:x1:LowPass64sM / S24IDFE-XBPM:P1us:x1:LowPass64sM
S24IDFE-XBPM:P1us:x2:LowPass1sM / S24IDFE-XBPM:P1us:x2:LowPass1sM
S24IDFE-XBPM:P1us:x2:LowPass8sM / S24IDFE-XBPM:P1us:x2:LowPass8sM
S24IDFE-XBPM:P1us:x2:LowPass64sM / S24IDFE-XBPM:P1us:x2:LowPass64sM
S24IDFE-XBPM:P1us:y / S24IDFE-XBPM:P1us:y
S24IDFE-XBPM:P1us:y:CalFactor1M / S24IDFE-XBPM:P1us:y:CalFactor1M
S24IDFE-XBPM:P1us:y:CalFactor2M / S24IDFE-XBPM:P1us:y:CalFactor2M
S24IDFE-XBPM:P1us:y:LowPass1sM / S24IDFE-XBPM:P1us:y:LowPass1sM
S24IDFE-XBPM:P1us:y:LowPass8sM / S24IDFE-XBPM:P1us:y:LowPass8sM
S24IDFE-XBPM:P1us:y:LowPass64sM / S24IDFE-XBPM:P1us:y:LowPass64sM
S24IDFE-XBPM:P1us:y:Offset1M / S24IDFE-XBPM:P1us:y:Offset1M
S24IDFE-XBPM:P1us:y:Offset2M / S24IDFE-XBPM:P1us:y:Offset2M
S24IDFE-XBPM:P1us:y:ResolutionM / S24IDFE-XBPM:P1us:y:ResolutionM
S24IDFE-XBPM:P1us:y:Resolution1sM / S24IDFE-XBPM:P1us:y:Resolution1sM
S24IDFE-XBPM:P1us:y:Resolution8sM / S24IDFE-XBPM:P1us:y:Resolution8sM
S24IDFE-XBPM:P1us:y:Resolution64sM / S24IDFE-XBPM:P1us:y:Resolution64sM
S24IDFE-XBPM:P1us:y:StdDevM / S24IDFE-XBPM:P1us:y:StdDevM
S24IDFE-XBPM:P1us:y:StdDev1sM / S24IDFE-XBPM:P1us:y:StdDev1sM
S24IDFE-XBPM:P1us:y:StdDev8sM / S24IDFE-XBPM:P1us:y:StdDev8sM
S24IDFE-XBPM:P1us:y:StdDev64sM / S24IDFE-XBPM:P1us:y:StdDev64sM
S24IDFE-XBPM:P1us:y1:LowPass1sM / S24IDFE-XBPM:P1us:y1:LowPass1sM
S24IDFE-XBPM:P1us:y1:LowPass8sM / S24IDFE-XBPM:P1us:y1:LowPass8sM
S24IDFE-XBPM:P1us:y1:LowPass64sM / S24IDFE-XBPM:P1us:y1:LowPass64sM
S24IDFE-XBPM:P1us:y2:LowPass1sM / S24IDFE-XBPM:P1us:y2:LowPass1sM
S24IDFE-XBPM:P1us:y2:LowPass8sM / S24IDFE-XBPM:P1us:y2:LowPass8sM
S24IDFE-XBPM:P1us:y2:LowPass64sM / S24IDFE-XBPM:P1us:y2:LowPass64sM
S24IDFE-XBPM:P2ds:GapUsedC / S24IDFE-XBPM:P2ds:GapUsedC
S24IDFE-XBPM:P2ds:XCalM / S24IDFE-XBPM:P2ds:XCalM
S24IDFE-XBPM:P2ds:YCalM / S24IDFE-XBPM:P2ds:YCalM
S24IDFE-XBPM:P2ds:x:CalFactorM / S24IDFE-XBPM:P2ds:x:CalFactorM
S24IDFE-XBPM:P2ds:x:OffsetM / S24IDFE-XBPM:P2ds:x:OffsetM
S24IDFE-XBPM:P2ds:y:CalFactorM / S24IDFE-XBPM:P2ds:y:CalFactorM
S24IDFE-XBPM:P2ds:y:OffsetM / S24IDFE-XBPM:P2ds:y:OffsetM
S24IDFE-XBPM:P2us:GapUsedC / S24IDFE-XBPM:P2us:GapUsedC
S24IDFE-XBPM:P2us:XCalM / S24IDFE-XBPM:P2us:XCalM
S24IDFE-XBPM:P2us:YCalM / S24IDFE-XBPM:P2us:YCalM
S24IDFE-XBPM:P2us:x:CalFactorM / S24IDFE-XBPM:P2us:x:CalFactorM
S24IDFE-XBPM:P2us:x:OffsetM / S24IDFE-XBPM:P2us:x:OffsetM
S24IDFE-XBPM:P2us:y:CalFactorM / S24IDFE-XBPM:P2us:y:CalFactorM
S24IDFE-XBPM:P2us:y:OffsetM / S24IDFE-XBPM:P2us:y:OffsetM
S25IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S25IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S25IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S25IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S25IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S25IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S25IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S25IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S25IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S25IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S25IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S25IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S25IDFE-XBPM:CM1ds:PositionOffsetX / S25IDFE-XBPM:CM1ds:PositionOffsetX
S25IDFE-XBPM:CM1ds:PositionOffsetY / S25IDFE-XBPM:CM1ds:PositionOffsetY
S25IDFE-XBPM:CM1ds:PositionScaleX / S25IDFE-XBPM:CM1ds:PositionScaleX
S25IDFE-XBPM:CM1ds:PositionScaleY / S25IDFE-XBPM:CM1ds:PositionScaleY
S25IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S25IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S25IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S25IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S25IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S25IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S25IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S25IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S25IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S25IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S25IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S25IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S25IDFE-XBPM:CM1us:PositionOffsetX / S25IDFE-XBPM:CM1us:PositionOffsetX
S25IDFE-XBPM:CM1us:PositionOffsetY / S25IDFE-XBPM:CM1us:PositionOffsetY
S25IDFE-XBPM:CM1us:PositionScaleX / S25IDFE-XBPM:CM1us:PositionScaleX
S25IDFE-XBPM:CM1us:PositionScaleY / S25IDFE-XBPM:CM1us:PositionScaleY
S25IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S25IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S25IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S25IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S25IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S25IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S25IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S25IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S25IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S25IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S25IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S25IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S25IDFE-XBPM:CM2ds:PositionOffsetX / S25IDFE-XBPM:CM2ds:PositionOffsetX
S25IDFE-XBPM:CM2ds:PositionOffsetY / S25IDFE-XBPM:CM2ds:PositionOffsetY
S25IDFE-XBPM:CM2ds:PositionScaleX / S25IDFE-XBPM:CM2ds:PositionScaleX
S25IDFE-XBPM:CM2ds:PositionScaleY / S25IDFE-XBPM:CM2ds:PositionScaleY
S25IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S25IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S25IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S25IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S25IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S25IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S25IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S25IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S25IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S25IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S25IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S25IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S25IDFE-XBPM:CM2us:PositionOffsetX / S25IDFE-XBPM:CM2us:PositionOffsetX
S25IDFE-XBPM:CM2us:PositionOffsetY / S25IDFE-XBPM:CM2us:PositionOffsetY
S25IDFE-XBPM:CM2us:PositionScaleX / S25IDFE-XBPM:CM2us:PositionScaleX
S25IDFE-XBPM:CM2us:PositionScaleY / S25IDFE-XBPM:CM2us:PositionScaleY
S25IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S25IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S25IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S25IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S25IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S25IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S25IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S25IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S25IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S25IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S25IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S25IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S25IDFE-XBPM:CM3ds:PositionOffsetX / S25IDFE-XBPM:CM3ds:PositionOffsetX
S25IDFE-XBPM:CM3ds:PositionOffsetY / S25IDFE-XBPM:CM3ds:PositionOffsetY
S25IDFE-XBPM:CM3ds:PositionScaleX / S25IDFE-XBPM:CM3ds:PositionScaleX
S25IDFE-XBPM:CM3ds:PositionScaleY / S25IDFE-XBPM:CM3ds:PositionScaleY
S25IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S25IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S25IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S25IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S25IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S25IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S25IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S25IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S25IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S25IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S25IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S25IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S25IDFE-XBPM:CM3us:PositionOffsetX / S25IDFE-XBPM:CM3us:PositionOffsetX
S25IDFE-XBPM:CM3us:PositionOffsetY / S25IDFE-XBPM:CM3us:PositionOffsetY
S25IDFE-XBPM:CM3us:PositionScaleX / S25IDFE-XBPM:CM3us:PositionScaleX
S25IDFE-XBPM:CM3us:PositionScaleY / S25IDFE-XBPM:CM3us:PositionScaleY
S25IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S25IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S25IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S25IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S25IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S25IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S25IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S25IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S25IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S25IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S25IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S25IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S25IDFE-XBPM:CM4ds:PositionOffsetX / S25IDFE-XBPM:CM4ds:PositionOffsetX
S25IDFE-XBPM:CM4ds:PositionOffsetY / S25IDFE-XBPM:CM4ds:PositionOffsetY
S25IDFE-XBPM:CM4ds:PositionScaleX / S25IDFE-XBPM:CM4ds:PositionScaleX
S25IDFE-XBPM:CM4ds:PositionScaleY / S25IDFE-XBPM:CM4ds:PositionScaleY
S25IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S25IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S25IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S25IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S25IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S25IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S25IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S25IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S25IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S25IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S25IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S25IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S25IDFE-XBPM:CM4us:PositionOffsetX / S25IDFE-XBPM:CM4us:PositionOffsetX
S25IDFE-XBPM:CM4us:PositionOffsetY / S25IDFE-XBPM:CM4us:PositionOffsetY
S25IDFE-XBPM:CM4us:PositionScaleX / S25IDFE-XBPM:CM4us:PositionScaleX
S25IDFE-XBPM:CM4us:PositionScaleY / S25IDFE-XBPM:CM4us:PositionScaleY
S25IDFE-XBPM:P1ds:BMcUsedM / S25IDFE-XBPM:P1ds:BMcUsedM
S25IDFE-XBPM:P1ds:GapUsedC / S25IDFE-XBPM:P1ds:GapUsedC
S25IDFE-XBPM:P1ds:Wx1UsedM / S25IDFE-XBPM:P1ds:Wx1UsedM
S25IDFE-XBPM:P1ds:Wx2UsedM / S25IDFE-XBPM:P1ds:Wx2UsedM
S25IDFE-XBPM:P1ds:Wx3UsedM / S25IDFE-XBPM:P1ds:Wx3UsedM
S25IDFE-XBPM:P1ds:Wy1UsedM / S25IDFE-XBPM:P1ds:Wy1UsedM
S25IDFE-XBPM:P1ds:Wy2UsedM / S25IDFE-XBPM:P1ds:Wy2UsedM
S25IDFE-XBPM:P1ds:Wy3UsedM / S25IDFE-XBPM:P1ds:Wy3UsedM
S25IDFE-XBPM:P1ds:x / S25IDFE-XBPM:P1ds:x
S25IDFE-XBPM:P1ds:x:CalFactor1M / S25IDFE-XBPM:P1ds:x:CalFactor1M
S25IDFE-XBPM:P1ds:x:CalFactor2M / S25IDFE-XBPM:P1ds:x:CalFactor2M
S25IDFE-XBPM:P1ds:x:LowPass1sM / S25IDFE-XBPM:P1ds:x:LowPass1sM
S25IDFE-XBPM:P1ds:x:LowPass8sM / S25IDFE-XBPM:P1ds:x:LowPass8sM
S25IDFE-XBPM:P1ds:x:LowPass64sM / S25IDFE-XBPM:P1ds:x:LowPass64sM
S25IDFE-XBPM:P1ds:x:Offset1M / S25IDFE-XBPM:P1ds:x:Offset1M
S25IDFE-XBPM:P1ds:x:Offset2M / S25IDFE-XBPM:P1ds:x:Offset2M
S25IDFE-XBPM:P1ds:x:ResolutionM / S25IDFE-XBPM:P1ds:x:ResolutionM
S25IDFE-XBPM:P1ds:x:Resolution1sM / S25IDFE-XBPM:P1ds:x:Resolution1sM
S25IDFE-XBPM:P1ds:x:Resolution8sM / S25IDFE-XBPM:P1ds:x:Resolution8sM
S25IDFE-XBPM:P1ds:x:Resolution64sM / S25IDFE-XBPM:P1ds:x:Resolution64sM
S25IDFE-XBPM:P1ds:x:StdDevM / S25IDFE-XBPM:P1ds:x:StdDevM
S25IDFE-XBPM:P1ds:x:StdDev1sM / S25IDFE-XBPM:P1ds:x:StdDev1sM
S25IDFE-XBPM:P1ds:x:StdDev8sM / S25IDFE-XBPM:P1ds:x:StdDev8sM
S25IDFE-XBPM:P1ds:x:StdDev64sM / S25IDFE-XBPM:P1ds:x:StdDev64sM
S25IDFE-XBPM:P1ds:x1:LowPass1sM / S25IDFE-XBPM:P1ds:x1:LowPass1sM
S25IDFE-XBPM:P1ds:x1:LowPass8sM / S25IDFE-XBPM:P1ds:x1:LowPass8sM
S25IDFE-XBPM:P1ds:x1:LowPass64sM / S25IDFE-XBPM:P1ds:x1:LowPass64sM
S25IDFE-XBPM:P1ds:x2:LowPass1sM / S25IDFE-XBPM:P1ds:x2:LowPass1sM
S25IDFE-XBPM:P1ds:x2:LowPass8sM / S25IDFE-XBPM:P1ds:x2:LowPass8sM
S25IDFE-XBPM:P1ds:x2:LowPass64sM / S25IDFE-XBPM:P1ds:x2:LowPass64sM
S25IDFE-XBPM:P1ds:y / S25IDFE-XBPM:P1ds:y
S25IDFE-XBPM:P1ds:y:CalFactor1M / S25IDFE-XBPM:P1ds:y:CalFactor1M
S25IDFE-XBPM:P1ds:y:CalFactor2M / S25IDFE-XBPM:P1ds:y:CalFactor2M
S25IDFE-XBPM:P1ds:y:LowPass1sM / S25IDFE-XBPM:P1ds:y:LowPass1sM
S25IDFE-XBPM:P1ds:y:LowPass8sM / S25IDFE-XBPM:P1ds:y:LowPass8sM
S25IDFE-XBPM:P1ds:y:LowPass64sM / S25IDFE-XBPM:P1ds:y:LowPass64sM
S25IDFE-XBPM:P1ds:y:Offset1M / S25IDFE-XBPM:P1ds:y:Offset1M
S25IDFE-XBPM:P1ds:y:Offset2M / S25IDFE-XBPM:P1ds:y:Offset2M
S25IDFE-XBPM:P1ds:y:ResolutionM / S25IDFE-XBPM:P1ds:y:ResolutionM
S25IDFE-XBPM:P1ds:y:Resolution1sM / S25IDFE-XBPM:P1ds:y:Resolution1sM
S25IDFE-XBPM:P1ds:y:Resolution8sM / S25IDFE-XBPM:P1ds:y:Resolution8sM
S25IDFE-XBPM:P1ds:y:Resolution64sM / S25IDFE-XBPM:P1ds:y:Resolution64sM
S25IDFE-XBPM:P1ds:y:StdDevM / S25IDFE-XBPM:P1ds:y:StdDevM
S25IDFE-XBPM:P1ds:y:StdDev1sM / S25IDFE-XBPM:P1ds:y:StdDev1sM
S25IDFE-XBPM:P1ds:y:StdDev8sM / S25IDFE-XBPM:P1ds:y:StdDev8sM
S25IDFE-XBPM:P1ds:y:StdDev64sM / S25IDFE-XBPM:P1ds:y:StdDev64sM
S25IDFE-XBPM:P1ds:y1:LowPass1sM / S25IDFE-XBPM:P1ds:y1:LowPass1sM
S25IDFE-XBPM:P1ds:y1:LowPass8sM / S25IDFE-XBPM:P1ds:y1:LowPass8sM
S25IDFE-XBPM:P1ds:y1:LowPass64sM / S25IDFE-XBPM:P1ds:y1:LowPass64sM
S25IDFE-XBPM:P1ds:y2:LowPass1sM / S25IDFE-XBPM:P1ds:y2:LowPass1sM
S25IDFE-XBPM:P1ds:y2:LowPass8sM / S25IDFE-XBPM:P1ds:y2:LowPass8sM
S25IDFE-XBPM:P1ds:y2:LowPass64sM / S25IDFE-XBPM:P1ds:y2:LowPass64sM
S25IDFE-XBPM:P1us:BMcUsedM / S25IDFE-XBPM:P1us:BMcUsedM
S25IDFE-XBPM:P1us:GapUsedC / S25IDFE-XBPM:P1us:GapUsedC
S25IDFE-XBPM:P1us:Wx1UsedM / S25IDFE-XBPM:P1us:Wx1UsedM
S25IDFE-XBPM:P1us:Wx2UsedM / S25IDFE-XBPM:P1us:Wx2UsedM
S25IDFE-XBPM:P1us:Wx3UsedM / S25IDFE-XBPM:P1us:Wx3UsedM
S25IDFE-XBPM:P1us:Wy1UsedM / S25IDFE-XBPM:P1us:Wy1UsedM
S25IDFE-XBPM:P1us:Wy2UsedM / S25IDFE-XBPM:P1us:Wy2UsedM
S25IDFE-XBPM:P1us:Wy3UsedM / S25IDFE-XBPM:P1us:Wy3UsedM
S25IDFE-XBPM:P1us:x / S25IDFE-XBPM:P1us:x
S25IDFE-XBPM:P1us:x:CalFactor1M / S25IDFE-XBPM:P1us:x:CalFactor1M
S25IDFE-XBPM:P1us:x:CalFactor2M / S25IDFE-XBPM:P1us:x:CalFactor2M
S25IDFE-XBPM:P1us:x:LowPass1sM / S25IDFE-XBPM:P1us:x:LowPass1sM
S25IDFE-XBPM:P1us:x:LowPass8sM / S25IDFE-XBPM:P1us:x:LowPass8sM
S25IDFE-XBPM:P1us:x:LowPass64sM / S25IDFE-XBPM:P1us:x:LowPass64sM
S25IDFE-XBPM:P1us:x:Offset1M / S25IDFE-XBPM:P1us:x:Offset1M
S25IDFE-XBPM:P1us:x:Offset2M / S25IDFE-XBPM:P1us:x:Offset2M
S25IDFE-XBPM:P1us:x:ResolutionM / S25IDFE-XBPM:P1us:x:ResolutionM
S25IDFE-XBPM:P1us:x:Resolution1sM / S25IDFE-XBPM:P1us:x:Resolution1sM
S25IDFE-XBPM:P1us:x:Resolution8sM / S25IDFE-XBPM:P1us:x:Resolution8sM
S25IDFE-XBPM:P1us:x:Resolution64sM / S25IDFE-XBPM:P1us:x:Resolution64sM
S25IDFE-XBPM:P1us:x:StdDevM / S25IDFE-XBPM:P1us:x:StdDevM
S25IDFE-XBPM:P1us:x:StdDev1sM / S25IDFE-XBPM:P1us:x:StdDev1sM
S25IDFE-XBPM:P1us:x:StdDev8sM / S25IDFE-XBPM:P1us:x:StdDev8sM
S25IDFE-XBPM:P1us:x:StdDev64sM / S25IDFE-XBPM:P1us:x:StdDev64sM
S25IDFE-XBPM:P1us:x1:LowPass1sM / S25IDFE-XBPM:P1us:x1:LowPass1sM
S25IDFE-XBPM:P1us:x1:LowPass8sM / S25IDFE-XBPM:P1us:x1:LowPass8sM
S25IDFE-XBPM:P1us:x1:LowPass64sM / S25IDFE-XBPM:P1us:x1:LowPass64sM
S25IDFE-XBPM:P1us:x2:LowPass1sM / S25IDFE-XBPM:P1us:x2:LowPass1sM
S25IDFE-XBPM:P1us:x2:LowPass8sM / S25IDFE-XBPM:P1us:x2:LowPass8sM
S25IDFE-XBPM:P1us:x2:LowPass64sM / S25IDFE-XBPM:P1us:x2:LowPass64sM
S25IDFE-XBPM:P1us:y / S25IDFE-XBPM:P1us:y
S25IDFE-XBPM:P1us:y:CalFactor1M / S25IDFE-XBPM:P1us:y:CalFactor1M
S25IDFE-XBPM:P1us:y:CalFactor2M / S25IDFE-XBPM:P1us:y:CalFactor2M
S25IDFE-XBPM:P1us:y:LowPass1sM / S25IDFE-XBPM:P1us:y:LowPass1sM
S25IDFE-XBPM:P1us:y:LowPass8sM / S25IDFE-XBPM:P1us:y:LowPass8sM
S25IDFE-XBPM:P1us:y:LowPass64sM / S25IDFE-XBPM:P1us:y:LowPass64sM
S25IDFE-XBPM:P1us:y:Offset1M / S25IDFE-XBPM:P1us:y:Offset1M
S25IDFE-XBPM:P1us:y:Offset2M / S25IDFE-XBPM:P1us:y:Offset2M
S25IDFE-XBPM:P1us:y:ResolutionM / S25IDFE-XBPM:P1us:y:ResolutionM
S25IDFE-XBPM:P1us:y:Resolution1sM / S25IDFE-XBPM:P1us:y:Resolution1sM
S25IDFE-XBPM:P1us:y:Resolution8sM / S25IDFE-XBPM:P1us:y:Resolution8sM
S25IDFE-XBPM:P1us:y:Resolution64sM / S25IDFE-XBPM:P1us:y:Resolution64sM
S25IDFE-XBPM:P1us:y:StdDevM / S25IDFE-XBPM:P1us:y:StdDevM
S25IDFE-XBPM:P1us:y:StdDev1sM / S25IDFE-XBPM:P1us:y:StdDev1sM
S25IDFE-XBPM:P1us:y:StdDev8sM / S25IDFE-XBPM:P1us:y:StdDev8sM
S25IDFE-XBPM:P1us:y:StdDev64sM / S25IDFE-XBPM:P1us:y:StdDev64sM
S25IDFE-XBPM:P1us:y1:LowPass1sM / S25IDFE-XBPM:P1us:y1:LowPass1sM
S25IDFE-XBPM:P1us:y1:LowPass8sM / S25IDFE-XBPM:P1us:y1:LowPass8sM
S25IDFE-XBPM:P1us:y1:LowPass64sM / S25IDFE-XBPM:P1us:y1:LowPass64sM
S25IDFE-XBPM:P1us:y2:LowPass1sM / S25IDFE-XBPM:P1us:y2:LowPass1sM
S25IDFE-XBPM:P1us:y2:LowPass8sM / S25IDFE-XBPM:P1us:y2:LowPass8sM
S25IDFE-XBPM:P1us:y2:LowPass64sM / S25IDFE-XBPM:P1us:y2:LowPass64sM
S25IDFE-XBPM:P2ds:GapUsedC / S25IDFE-XBPM:P2ds:GapUsedC
S25IDFE-XBPM:P2ds:XCalM / S25IDFE-XBPM:P2ds:XCalM
S25IDFE-XBPM:P2ds:YCalM / S25IDFE-XBPM:P2ds:YCalM
S25IDFE-XBPM:P2ds:x:CalFactorM / S25IDFE-XBPM:P2ds:x:CalFactorM
S25IDFE-XBPM:P2ds:x:OffsetM / S25IDFE-XBPM:P2ds:x:OffsetM
S25IDFE-XBPM:P2ds:y:CalFactorM / S25IDFE-XBPM:P2ds:y:CalFactorM
S25IDFE-XBPM:P2ds:y:OffsetM / S25IDFE-XBPM:P2ds:y:OffsetM
S25IDFE-XBPM:P2us:GapUsedC / S25IDFE-XBPM:P2us:GapUsedC
S25IDFE-XBPM:P2us:XCalM / S25IDFE-XBPM:P2us:XCalM
S25IDFE-XBPM:P2us:YCalM / S25IDFE-XBPM:P2us:YCalM
S25IDFE-XBPM:P2us:x:CalFactorM / S25IDFE-XBPM:P2us:x:CalFactorM
S25IDFE-XBPM:P2us:x:OffsetM / S25IDFE-XBPM:P2us:x:OffsetM
S25IDFE-XBPM:P2us:y:CalFactorM / S25IDFE-XBPM:P2us:y:CalFactorM
S25IDFE-XBPM:P2us:y:OffsetM / S25IDFE-XBPM:P2us:y:OffsetM
S26IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S26IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S26IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S26IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S26IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S26IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S26IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S26IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S26IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S26IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S26IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S26IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S26IDFE-XBPM:CM1ds:PositionOffsetX / S26IDFE-XBPM:CM1ds:PositionOffsetX
S26IDFE-XBPM:CM1ds:PositionOffsetY / S26IDFE-XBPM:CM1ds:PositionOffsetY
S26IDFE-XBPM:CM1ds:PositionScaleX / S26IDFE-XBPM:CM1ds:PositionScaleX
S26IDFE-XBPM:CM1ds:PositionScaleY / S26IDFE-XBPM:CM1ds:PositionScaleY
S26IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S26IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S26IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S26IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S26IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S26IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S26IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S26IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S26IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S26IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S26IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S26IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S26IDFE-XBPM:CM2ds:PositionOffsetX / S26IDFE-XBPM:CM2ds:PositionOffsetX
S26IDFE-XBPM:CM2ds:PositionOffsetY / S26IDFE-XBPM:CM2ds:PositionOffsetY
S26IDFE-XBPM:CM2ds:PositionScaleX / S26IDFE-XBPM:CM2ds:PositionScaleX
S26IDFE-XBPM:CM2ds:PositionScaleY / S26IDFE-XBPM:CM2ds:PositionScaleY
S26IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S26IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S26IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S26IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S26IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S26IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S26IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S26IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S26IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S26IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S26IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S26IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S26IDFE-XBPM:CM3ds:PositionOffsetX / S26IDFE-XBPM:CM3ds:PositionOffsetX
S26IDFE-XBPM:CM3ds:PositionOffsetY / S26IDFE-XBPM:CM3ds:PositionOffsetY
S26IDFE-XBPM:CM3ds:PositionScaleX / S26IDFE-XBPM:CM3ds:PositionScaleX
S26IDFE-XBPM:CM3ds:PositionScaleY / S26IDFE-XBPM:CM3ds:PositionScaleY
S26IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S26IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S26IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S26IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S26IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S26IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S26IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S26IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S26IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S26IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S26IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S26IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S26IDFE-XBPM:CM4ds:PositionOffsetX / S26IDFE-XBPM:CM4ds:PositionOffsetX
S26IDFE-XBPM:CM4ds:PositionOffsetY / S26IDFE-XBPM:CM4ds:PositionOffsetY
S26IDFE-XBPM:CM4ds:PositionScaleX / S26IDFE-XBPM:CM4ds:PositionScaleX
S26IDFE-XBPM:CM4ds:PositionScaleY / S26IDFE-XBPM:CM4ds:PositionScaleY
S26IDFE-XBPM:P1ds:BMcUsedM / S26IDFE-XBPM:P1ds:BMcUsedM
S26IDFE-XBPM:P1ds:GapUsedC / S26IDFE-XBPM:P1ds:GapUsedC
S26IDFE-XBPM:P1ds:Wx1UsedM / S26IDFE-XBPM:P1ds:Wx1UsedM
S26IDFE-XBPM:P1ds:Wx2UsedM / S26IDFE-XBPM:P1ds:Wx2UsedM
S26IDFE-XBPM:P1ds:Wx3UsedM / S26IDFE-XBPM:P1ds:Wx3UsedM
S26IDFE-XBPM:P1ds:Wy1UsedM / S26IDFE-XBPM:P1ds:Wy1UsedM
S26IDFE-XBPM:P1ds:Wy2UsedM / S26IDFE-XBPM:P1ds:Wy2UsedM
S26IDFE-XBPM:P1ds:Wy3UsedM / S26IDFE-XBPM:P1ds:Wy3UsedM
S26IDFE-XBPM:P1ds:x / S26IDFE-XBPM:P1ds:x
S26IDFE-XBPM:P1ds:x:CalFactor1M / S26IDFE-XBPM:P1ds:x:CalFactor1M
S26IDFE-XBPM:P1ds:x:CalFactor2M / S26IDFE-XBPM:P1ds:x:CalFactor2M
S26IDFE-XBPM:P1ds:x:LowPass1sM / S26IDFE-XBPM:P1ds:x:LowPass1sM
S26IDFE-XBPM:P1ds:x:LowPass8sM / S26IDFE-XBPM:P1ds:x:LowPass8sM
S26IDFE-XBPM:P1ds:x:LowPass64sM / S26IDFE-XBPM:P1ds:x:LowPass64sM
S26IDFE-XBPM:P1ds:x:Offset1M / S26IDFE-XBPM:P1ds:x:Offset1M
S26IDFE-XBPM:P1ds:x:Offset2M / S26IDFE-XBPM:P1ds:x:Offset2M
S26IDFE-XBPM:P1ds:x:ResolutionM / S26IDFE-XBPM:P1ds:x:ResolutionM
S26IDFE-XBPM:P1ds:x:Resolution1sM / S26IDFE-XBPM:P1ds:x:Resolution1sM
S26IDFE-XBPM:P1ds:x:Resolution8sM / S26IDFE-XBPM:P1ds:x:Resolution8sM
S26IDFE-XBPM:P1ds:x:Resolution64sM / S26IDFE-XBPM:P1ds:x:Resolution64sM
S26IDFE-XBPM:P1ds:x:StdDevM / S26IDFE-XBPM:P1ds:x:StdDevM
S26IDFE-XBPM:P1ds:x:StdDev1sM / S26IDFE-XBPM:P1ds:x:StdDev1sM
S26IDFE-XBPM:P1ds:x:StdDev8sM / S26IDFE-XBPM:P1ds:x:StdDev8sM
S26IDFE-XBPM:P1ds:x:StdDev64sM / S26IDFE-XBPM:P1ds:x:StdDev64sM
S26IDFE-XBPM:P1ds:x1:LowPass1sM / S26IDFE-XBPM:P1ds:x1:LowPass1sM
S26IDFE-XBPM:P1ds:x1:LowPass8sM / S26IDFE-XBPM:P1ds:x1:LowPass8sM
S26IDFE-XBPM:P1ds:x1:LowPass64sM / S26IDFE-XBPM:P1ds:x1:LowPass64sM
S26IDFE-XBPM:P1ds:x2:LowPass1sM / S26IDFE-XBPM:P1ds:x2:LowPass1sM
S26IDFE-XBPM:P1ds:x2:LowPass8sM / S26IDFE-XBPM:P1ds:x2:LowPass8sM
S26IDFE-XBPM:P1ds:x2:LowPass64sM / S26IDFE-XBPM:P1ds:x2:LowPass64sM
S26IDFE-XBPM:P1ds:y / S26IDFE-XBPM:P1ds:y
S26IDFE-XBPM:P1ds:y:CalFactor1M / S26IDFE-XBPM:P1ds:y:CalFactor1M
S26IDFE-XBPM:P1ds:y:CalFactor2M / S26IDFE-XBPM:P1ds:y:CalFactor2M
S26IDFE-XBPM:P1ds:y:LowPass1sM / S26IDFE-XBPM:P1ds:y:LowPass1sM
S26IDFE-XBPM:P1ds:y:LowPass8sM / S26IDFE-XBPM:P1ds:y:LowPass8sM
S26IDFE-XBPM:P1ds:y:LowPass64sM / S26IDFE-XBPM:P1ds:y:LowPass64sM
S26IDFE-XBPM:P1ds:y:Offset1M / S26IDFE-XBPM:P1ds:y:Offset1M
S26IDFE-XBPM:P1ds:y:Offset2M / S26IDFE-XBPM:P1ds:y:Offset2M
S26IDFE-XBPM:P1ds:y:ResolutionM / S26IDFE-XBPM:P1ds:y:ResolutionM
S26IDFE-XBPM:P1ds:y:Resolution1sM / S26IDFE-XBPM:P1ds:y:Resolution1sM
S26IDFE-XBPM:P1ds:y:Resolution8sM / S26IDFE-XBPM:P1ds:y:Resolution8sM
S26IDFE-XBPM:P1ds:y:Resolution64sM / S26IDFE-XBPM:P1ds:y:Resolution64sM
S26IDFE-XBPM:P1ds:y:StdDevM / S26IDFE-XBPM:P1ds:y:StdDevM
S26IDFE-XBPM:P1ds:y:StdDev1sM / S26IDFE-XBPM:P1ds:y:StdDev1sM
S26IDFE-XBPM:P1ds:y:StdDev8sM / S26IDFE-XBPM:P1ds:y:StdDev8sM
S26IDFE-XBPM:P1ds:y:StdDev64sM / S26IDFE-XBPM:P1ds:y:StdDev64sM
S26IDFE-XBPM:P1ds:y1:LowPass1sM / S26IDFE-XBPM:P1ds:y1:LowPass1sM
S26IDFE-XBPM:P1ds:y1:LowPass8sM / S26IDFE-XBPM:P1ds:y1:LowPass8sM
S26IDFE-XBPM:P1ds:y1:LowPass64sM / S26IDFE-XBPM:P1ds:y1:LowPass64sM
S26IDFE-XBPM:P1ds:y2:LowPass1sM / S26IDFE-XBPM:P1ds:y2:LowPass1sM
S26IDFE-XBPM:P1ds:y2:LowPass8sM / S26IDFE-XBPM:P1ds:y2:LowPass8sM
S26IDFE-XBPM:P1ds:y2:LowPass64sM / S26IDFE-XBPM:P1ds:y2:LowPass64sM
S26IDFE-XBPM:P2ds:GapUsedC / S26IDFE-XBPM:P2ds:GapUsedC
S26IDFE-XBPM:P2ds:XCalM / S26IDFE-XBPM:P2ds:XCalM
S26IDFE-XBPM:P2ds:YCalM / S26IDFE-XBPM:P2ds:YCalM
S26IDFE-XBPM:P2ds:x:CalFactorM / S26IDFE-XBPM:P2ds:x:CalFactorM
S26IDFE-XBPM:P2ds:x:OffsetM / S26IDFE-XBPM:P2ds:x:OffsetM
S26IDFE-XBPM:P2ds:y:CalFactorM / S26IDFE-XBPM:P2ds:y:CalFactorM
S26IDFE-XBPM:P2ds:y:OffsetM / S26IDFE-XBPM:P2ds:y:OffsetM
S27IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S27IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S27IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S27IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S27IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S27IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S27IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S27IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S27IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S27IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S27IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S27IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S27IDFE-XBPM:CM1ds:PositionOffsetX / S27IDFE-XBPM:CM1ds:PositionOffsetX
S27IDFE-XBPM:CM1ds:PositionOffsetY / S27IDFE-XBPM:CM1ds:PositionOffsetY
S27IDFE-XBPM:CM1ds:PositionScaleX / S27IDFE-XBPM:CM1ds:PositionScaleX
S27IDFE-XBPM:CM1ds:PositionScaleY / S27IDFE-XBPM:CM1ds:PositionScaleY
S27IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S27IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S27IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S27IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S27IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S27IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S27IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S27IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S27IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S27IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S27IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S27IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S27IDFE-XBPM:CM2ds:PositionOffsetX / S27IDFE-XBPM:CM2ds:PositionOffsetX
S27IDFE-XBPM:CM2ds:PositionOffsetY / S27IDFE-XBPM:CM2ds:PositionOffsetY
S27IDFE-XBPM:CM2ds:PositionScaleX / S27IDFE-XBPM:CM2ds:PositionScaleX
S27IDFE-XBPM:CM2ds:PositionScaleY / S27IDFE-XBPM:CM2ds:PositionScaleY
S27IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S27IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S27IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S27IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S27IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S27IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S27IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S27IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S27IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S27IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S27IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S27IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S27IDFE-XBPM:CM3ds:PositionOffsetX / S27IDFE-XBPM:CM3ds:PositionOffsetX
S27IDFE-XBPM:CM3ds:PositionOffsetY / S27IDFE-XBPM:CM3ds:PositionOffsetY
S27IDFE-XBPM:CM3ds:PositionScaleX / S27IDFE-XBPM:CM3ds:PositionScaleX
S27IDFE-XBPM:CM3ds:PositionScaleY / S27IDFE-XBPM:CM3ds:PositionScaleY
S27IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S27IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S27IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S27IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S27IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S27IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S27IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S27IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S27IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S27IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S27IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S27IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S27IDFE-XBPM:CM4ds:PositionOffsetX / S27IDFE-XBPM:CM4ds:PositionOffsetX
S27IDFE-XBPM:CM4ds:PositionOffsetY / S27IDFE-XBPM:CM4ds:PositionOffsetY
S27IDFE-XBPM:CM4ds:PositionScaleX / S27IDFE-XBPM:CM4ds:PositionScaleX
S27IDFE-XBPM:CM4ds:PositionScaleY / S27IDFE-XBPM:CM4ds:PositionScaleY
S27IDFE-XBPM:P1ds:BMcUsedM / S27IDFE-XBPM:P1ds:BMcUsedM
S27IDFE-XBPM:P1ds:GapUsedC / S27IDFE-XBPM:P1ds:GapUsedC
S27IDFE-XBPM:P1ds:Wx1UsedM / S27IDFE-XBPM:P1ds:Wx1UsedM
S27IDFE-XBPM:P1ds:Wx2UsedM / S27IDFE-XBPM:P1ds:Wx2UsedM
S27IDFE-XBPM:P1ds:Wx3UsedM / S27IDFE-XBPM:P1ds:Wx3UsedM
S27IDFE-XBPM:P1ds:Wy1UsedM / S27IDFE-XBPM:P1ds:Wy1UsedM
S27IDFE-XBPM:P1ds:Wy2UsedM / S27IDFE-XBPM:P1ds:Wy2UsedM
S27IDFE-XBPM:P1ds:Wy3UsedM / S27IDFE-XBPM:P1ds:Wy3UsedM
S27IDFE-XBPM:P1ds:x / S27IDFE-XBPM:P1ds:x
S27IDFE-XBPM:P1ds:x:CalFactor1M / S27IDFE-XBPM:P1ds:x:CalFactor1M
S27IDFE-XBPM:P1ds:x:CalFactor2M / S27IDFE-XBPM:P1ds:x:CalFactor2M
S27IDFE-XBPM:P1ds:x:LowPass1sM / S27IDFE-XBPM:P1ds:x:LowPass1sM
S27IDFE-XBPM:P1ds:x:LowPass8sM / S27IDFE-XBPM:P1ds:x:LowPass8sM
S27IDFE-XBPM:P1ds:x:LowPass64sM / S27IDFE-XBPM:P1ds:x:LowPass64sM
S27IDFE-XBPM:P1ds:x:Offset1M / S27IDFE-XBPM:P1ds:x:Offset1M
S27IDFE-XBPM:P1ds:x:Offset2M / S27IDFE-XBPM:P1ds:x:Offset2M
S27IDFE-XBPM:P1ds:x:ResolutionM / S27IDFE-XBPM:P1ds:x:ResolutionM
S27IDFE-XBPM:P1ds:x:Resolution1sM / S27IDFE-XBPM:P1ds:x:Resolution1sM
S27IDFE-XBPM:P1ds:x:Resolution8sM / S27IDFE-XBPM:P1ds:x:Resolution8sM
S27IDFE-XBPM:P1ds:x:Resolution64sM / S27IDFE-XBPM:P1ds:x:Resolution64sM
S27IDFE-XBPM:P1ds:x:StdDevM / S27IDFE-XBPM:P1ds:x:StdDevM
S27IDFE-XBPM:P1ds:x:StdDev1sM / S27IDFE-XBPM:P1ds:x:StdDev1sM
S27IDFE-XBPM:P1ds:x:StdDev8sM / S27IDFE-XBPM:P1ds:x:StdDev8sM
S27IDFE-XBPM:P1ds:x:StdDev64sM / S27IDFE-XBPM:P1ds:x:StdDev64sM
S27IDFE-XBPM:P1ds:x1:LowPass1sM / S27IDFE-XBPM:P1ds:x1:LowPass1sM
S27IDFE-XBPM:P1ds:x1:LowPass8sM / S27IDFE-XBPM:P1ds:x1:LowPass8sM
S27IDFE-XBPM:P1ds:x1:LowPass64sM / S27IDFE-XBPM:P1ds:x1:LowPass64sM
S27IDFE-XBPM:P1ds:x2:LowPass1sM / S27IDFE-XBPM:P1ds:x2:LowPass1sM
S27IDFE-XBPM:P1ds:x2:LowPass8sM / S27IDFE-XBPM:P1ds:x2:LowPass8sM
S27IDFE-XBPM:P1ds:x2:LowPass64sM / S27IDFE-XBPM:P1ds:x2:LowPass64sM
S27IDFE-XBPM:P1ds:y / S27IDFE-XBPM:P1ds:y
S27IDFE-XBPM:P1ds:y:CalFactor1M / S27IDFE-XBPM:P1ds:y:CalFactor1M
S27IDFE-XBPM:P1ds:y:CalFactor2M / S27IDFE-XBPM:P1ds:y:CalFactor2M
S27IDFE-XBPM:P1ds:y:LowPass1sM / S27IDFE-XBPM:P1ds:y:LowPass1sM
S27IDFE-XBPM:P1ds:y:LowPass8sM / S27IDFE-XBPM:P1ds:y:LowPass8sM
S27IDFE-XBPM:P1ds:y:LowPass64sM / S27IDFE-XBPM:P1ds:y:LowPass64sM
S27IDFE-XBPM:P1ds:y:Offset1M / S27IDFE-XBPM:P1ds:y:Offset1M
S27IDFE-XBPM:P1ds:y:Offset2M / S27IDFE-XBPM:P1ds:y:Offset2M
S27IDFE-XBPM:P1ds:y:ResolutionM / S27IDFE-XBPM:P1ds:y:ResolutionM
S27IDFE-XBPM:P1ds:y:Resolution1sM / S27IDFE-XBPM:P1ds:y:Resolution1sM
S27IDFE-XBPM:P1ds:y:Resolution8sM / S27IDFE-XBPM:P1ds:y:Resolution8sM
S27IDFE-XBPM:P1ds:y:Resolution64sM / S27IDFE-XBPM:P1ds:y:Resolution64sM
S27IDFE-XBPM:P1ds:y:StdDevM / S27IDFE-XBPM:P1ds:y:StdDevM
S27IDFE-XBPM:P1ds:y:StdDev1sM / S27IDFE-XBPM:P1ds:y:StdDev1sM
S27IDFE-XBPM:P1ds:y:StdDev8sM / S27IDFE-XBPM:P1ds:y:StdDev8sM
S27IDFE-XBPM:P1ds:y:StdDev64sM / S27IDFE-XBPM:P1ds:y:StdDev64sM
S27IDFE-XBPM:P1ds:y1:LowPass1sM / S27IDFE-XBPM:P1ds:y1:LowPass1sM
S27IDFE-XBPM:P1ds:y1:LowPass8sM / S27IDFE-XBPM:P1ds:y1:LowPass8sM
S27IDFE-XBPM:P1ds:y1:LowPass64sM / S27IDFE-XBPM:P1ds:y1:LowPass64sM
S27IDFE-XBPM:P1ds:y2:LowPass1sM / S27IDFE-XBPM:P1ds:y2:LowPass1sM
S27IDFE-XBPM:P1ds:y2:LowPass8sM / S27IDFE-XBPM:P1ds:y2:LowPass8sM
S27IDFE-XBPM:P1ds:y2:LowPass64sM / S27IDFE-XBPM:P1ds:y2:LowPass64sM
S27IDFE-XBPM:P2ds:GapUsedC / S27IDFE-XBPM:P2ds:GapUsedC
S27IDFE-XBPM:P2ds:XCalM / S27IDFE-XBPM:P2ds:XCalM
S27IDFE-XBPM:P2ds:YCalM / S27IDFE-XBPM:P2ds:YCalM
S27IDFE-XBPM:P2ds:x:CalFactorM / S27IDFE-XBPM:P2ds:x:CalFactorM
S27IDFE-XBPM:P2ds:x:OffsetM / S27IDFE-XBPM:P2ds:x:OffsetM
S27IDFE-XBPM:P2ds:y:CalFactorM / S27IDFE-XBPM:P2ds:y:CalFactorM
S27IDFE-XBPM:P2ds:y:OffsetM / S27IDFE-XBPM:P2ds:y:OffsetM
S28IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S28IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S28IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S28IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S28IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S28IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S28IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S28IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S28IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S28IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S28IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S28IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S28IDFE-XBPM:CM1ds:PositionOffsetX / S28IDFE-XBPM:CM1ds:PositionOffsetX
S28IDFE-XBPM:CM1ds:PositionOffsetY / S28IDFE-XBPM:CM1ds:PositionOffsetY
S28IDFE-XBPM:CM1ds:PositionScaleX / S28IDFE-XBPM:CM1ds:PositionScaleX
S28IDFE-XBPM:CM1ds:PositionScaleY / S28IDFE-XBPM:CM1ds:PositionScaleY
S28IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S28IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S28IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S28IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S28IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S28IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S28IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S28IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S28IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S28IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S28IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S28IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S28IDFE-XBPM:CM1us:PositionOffsetX / S28IDFE-XBPM:CM1us:PositionOffsetX
S28IDFE-XBPM:CM1us:PositionOffsetY / S28IDFE-XBPM:CM1us:PositionOffsetY
S28IDFE-XBPM:CM1us:PositionScaleX / S28IDFE-XBPM:CM1us:PositionScaleX
S28IDFE-XBPM:CM1us:PositionScaleY / S28IDFE-XBPM:CM1us:PositionScaleY
S28IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S28IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S28IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S28IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S28IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S28IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S28IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S28IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S28IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S28IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S28IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S28IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S28IDFE-XBPM:CM2ds:PositionOffsetX / S28IDFE-XBPM:CM2ds:PositionOffsetX
S28IDFE-XBPM:CM2ds:PositionOffsetY / S28IDFE-XBPM:CM2ds:PositionOffsetY
S28IDFE-XBPM:CM2ds:PositionScaleX / S28IDFE-XBPM:CM2ds:PositionScaleX
S28IDFE-XBPM:CM2ds:PositionScaleY / S28IDFE-XBPM:CM2ds:PositionScaleY
S28IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S28IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S28IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S28IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S28IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S28IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S28IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S28IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S28IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S28IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S28IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S28IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S28IDFE-XBPM:CM2us:PositionOffsetX / S28IDFE-XBPM:CM2us:PositionOffsetX
S28IDFE-XBPM:CM2us:PositionOffsetY / S28IDFE-XBPM:CM2us:PositionOffsetY
S28IDFE-XBPM:CM2us:PositionScaleX / S28IDFE-XBPM:CM2us:PositionScaleX
S28IDFE-XBPM:CM2us:PositionScaleY / S28IDFE-XBPM:CM2us:PositionScaleY
S28IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S28IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S28IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S28IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S28IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S28IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S28IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S28IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S28IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S28IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S28IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S28IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S28IDFE-XBPM:CM3ds:PositionOffsetX / S28IDFE-XBPM:CM3ds:PositionOffsetX
S28IDFE-XBPM:CM3ds:PositionOffsetY / S28IDFE-XBPM:CM3ds:PositionOffsetY
S28IDFE-XBPM:CM3ds:PositionScaleX / S28IDFE-XBPM:CM3ds:PositionScaleX
S28IDFE-XBPM:CM3ds:PositionScaleY / S28IDFE-XBPM:CM3ds:PositionScaleY
S28IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S28IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S28IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S28IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S28IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S28IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S28IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S28IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S28IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S28IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S28IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S28IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S28IDFE-XBPM:CM3us:PositionOffsetX / S28IDFE-XBPM:CM3us:PositionOffsetX
S28IDFE-XBPM:CM3us:PositionOffsetY / S28IDFE-XBPM:CM3us:PositionOffsetY
S28IDFE-XBPM:CM3us:PositionScaleX / S28IDFE-XBPM:CM3us:PositionScaleX
S28IDFE-XBPM:CM3us:PositionScaleY / S28IDFE-XBPM:CM3us:PositionScaleY
S28IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S28IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S28IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S28IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S28IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S28IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S28IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S28IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S28IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S28IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S28IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S28IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S28IDFE-XBPM:CM4ds:PositionOffsetX / S28IDFE-XBPM:CM4ds:PositionOffsetX
S28IDFE-XBPM:CM4ds:PositionOffsetY / S28IDFE-XBPM:CM4ds:PositionOffsetY
S28IDFE-XBPM:CM4ds:PositionScaleX / S28IDFE-XBPM:CM4ds:PositionScaleX
S28IDFE-XBPM:CM4ds:PositionScaleY / S28IDFE-XBPM:CM4ds:PositionScaleY
S28IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S28IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S28IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S28IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S28IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S28IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S28IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S28IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S28IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S28IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S28IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S28IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S28IDFE-XBPM:CM4us:PositionOffsetX / S28IDFE-XBPM:CM4us:PositionOffsetX
S28IDFE-XBPM:CM4us:PositionOffsetY / S28IDFE-XBPM:CM4us:PositionOffsetY
S28IDFE-XBPM:CM4us:PositionScaleX / S28IDFE-XBPM:CM4us:PositionScaleX
S28IDFE-XBPM:CM4us:PositionScaleY / S28IDFE-XBPM:CM4us:PositionScaleY
S28IDFE-XBPM:P1ds:BMcUsedM / S28IDFE-XBPM:P1ds:BMcUsedM
S28IDFE-XBPM:P1ds:GapUsedC / S28IDFE-XBPM:P1ds:GapUsedC
S28IDFE-XBPM:P1ds:Wx1UsedM / S28IDFE-XBPM:P1ds:Wx1UsedM
S28IDFE-XBPM:P1ds:Wx2UsedM / S28IDFE-XBPM:P1ds:Wx2UsedM
S28IDFE-XBPM:P1ds:Wx3UsedM / S28IDFE-XBPM:P1ds:Wx3UsedM
S28IDFE-XBPM:P1ds:Wy1UsedM / S28IDFE-XBPM:P1ds:Wy1UsedM
S28IDFE-XBPM:P1ds:Wy2UsedM / S28IDFE-XBPM:P1ds:Wy2UsedM
S28IDFE-XBPM:P1ds:Wy3UsedM / S28IDFE-XBPM:P1ds:Wy3UsedM
S28IDFE-XBPM:P1ds:x / S28IDFE-XBPM:P1ds:x
S28IDFE-XBPM:P1ds:x:CalFactor1M / S28IDFE-XBPM:P1ds:x:CalFactor1M
S28IDFE-XBPM:P1ds:x:CalFactor2M / S28IDFE-XBPM:P1ds:x:CalFactor2M
S28IDFE-XBPM:P1ds:x:LowPass1sM / S28IDFE-XBPM:P1ds:x:LowPass1sM
S28IDFE-XBPM:P1ds:x:LowPass8sM / S28IDFE-XBPM:P1ds:x:LowPass8sM
S28IDFE-XBPM:P1ds:x:LowPass64sM / S28IDFE-XBPM:P1ds:x:LowPass64sM
S28IDFE-XBPM:P1ds:x:Offset1M / S28IDFE-XBPM:P1ds:x:Offset1M
S28IDFE-XBPM:P1ds:x:Offset2M / S28IDFE-XBPM:P1ds:x:Offset2M
S28IDFE-XBPM:P1ds:x:ResolutionM / S28IDFE-XBPM:P1ds:x:ResolutionM
S28IDFE-XBPM:P1ds:x:Resolution1sM / S28IDFE-XBPM:P1ds:x:Resolution1sM
S28IDFE-XBPM:P1ds:x:Resolution8sM / S28IDFE-XBPM:P1ds:x:Resolution8sM
S28IDFE-XBPM:P1ds:x:Resolution64sM / S28IDFE-XBPM:P1ds:x:Resolution64sM
S28IDFE-XBPM:P1ds:x:StdDevM / S28IDFE-XBPM:P1ds:x:StdDevM
S28IDFE-XBPM:P1ds:x:StdDev1sM / S28IDFE-XBPM:P1ds:x:StdDev1sM
S28IDFE-XBPM:P1ds:x:StdDev8sM / S28IDFE-XBPM:P1ds:x:StdDev8sM
S28IDFE-XBPM:P1ds:x:StdDev64sM / S28IDFE-XBPM:P1ds:x:StdDev64sM
S28IDFE-XBPM:P1ds:x1:LowPass1sM / S28IDFE-XBPM:P1ds:x1:LowPass1sM
S28IDFE-XBPM:P1ds:x1:LowPass8sM / S28IDFE-XBPM:P1ds:x1:LowPass8sM
S28IDFE-XBPM:P1ds:x1:LowPass64sM / S28IDFE-XBPM:P1ds:x1:LowPass64sM
S28IDFE-XBPM:P1ds:x2:LowPass1sM / S28IDFE-XBPM:P1ds:x2:LowPass1sM
S28IDFE-XBPM:P1ds:x2:LowPass8sM / S28IDFE-XBPM:P1ds:x2:LowPass8sM
S28IDFE-XBPM:P1ds:x2:LowPass64sM / S28IDFE-XBPM:P1ds:x2:LowPass64sM
S28IDFE-XBPM:P1ds:y / S28IDFE-XBPM:P1ds:y
S28IDFE-XBPM:P1ds:y:CalFactor1M / S28IDFE-XBPM:P1ds:y:CalFactor1M
S28IDFE-XBPM:P1ds:y:CalFactor2M / S28IDFE-XBPM:P1ds:y:CalFactor2M
S28IDFE-XBPM:P1ds:y:LowPass1sM / S28IDFE-XBPM:P1ds:y:LowPass1sM
S28IDFE-XBPM:P1ds:y:LowPass8sM / S28IDFE-XBPM:P1ds:y:LowPass8sM
S28IDFE-XBPM:P1ds:y:LowPass64sM / S28IDFE-XBPM:P1ds:y:LowPass64sM
S28IDFE-XBPM:P1ds:y:Offset1M / S28IDFE-XBPM:P1ds:y:Offset1M
S28IDFE-XBPM:P1ds:y:Offset2M / S28IDFE-XBPM:P1ds:y:Offset2M
S28IDFE-XBPM:P1ds:y:ResolutionM / S28IDFE-XBPM:P1ds:y:ResolutionM
S28IDFE-XBPM:P1ds:y:Resolution1sM / S28IDFE-XBPM:P1ds:y:Resolution1sM
S28IDFE-XBPM:P1ds:y:Resolution8sM / S28IDFE-XBPM:P1ds:y:Resolution8sM
S28IDFE-XBPM:P1ds:y:Resolution64sM / S28IDFE-XBPM:P1ds:y:Resolution64sM
S28IDFE-XBPM:P1ds:y:StdDevM / S28IDFE-XBPM:P1ds:y:StdDevM
S28IDFE-XBPM:P1ds:y:StdDev1sM / S28IDFE-XBPM:P1ds:y:StdDev1sM
S28IDFE-XBPM:P1ds:y:StdDev8sM / S28IDFE-XBPM:P1ds:y:StdDev8sM
S28IDFE-XBPM:P1ds:y:StdDev64sM / S28IDFE-XBPM:P1ds:y:StdDev64sM
S28IDFE-XBPM:P1ds:y1:LowPass1sM / S28IDFE-XBPM:P1ds:y1:LowPass1sM
S28IDFE-XBPM:P1ds:y1:LowPass8sM / S28IDFE-XBPM:P1ds:y1:LowPass8sM
S28IDFE-XBPM:P1ds:y1:LowPass64sM / S28IDFE-XBPM:P1ds:y1:LowPass64sM
S28IDFE-XBPM:P1ds:y2:LowPass1sM / S28IDFE-XBPM:P1ds:y2:LowPass1sM
S28IDFE-XBPM:P1ds:y2:LowPass8sM / S28IDFE-XBPM:P1ds:y2:LowPass8sM
S28IDFE-XBPM:P1ds:y2:LowPass64sM / S28IDFE-XBPM:P1ds:y2:LowPass64sM
S28IDFE-XBPM:P1us:BMcUsedM / S28IDFE-XBPM:P1us:BMcUsedM
S28IDFE-XBPM:P1us:GapUsedC / S28IDFE-XBPM:P1us:GapUsedC
S28IDFE-XBPM:P1us:Wx1UsedM / S28IDFE-XBPM:P1us:Wx1UsedM
S28IDFE-XBPM:P1us:Wx2UsedM / S28IDFE-XBPM:P1us:Wx2UsedM
S28IDFE-XBPM:P1us:Wx3UsedM / S28IDFE-XBPM:P1us:Wx3UsedM
S28IDFE-XBPM:P1us:Wy1UsedM / S28IDFE-XBPM:P1us:Wy1UsedM
S28IDFE-XBPM:P1us:Wy2UsedM / S28IDFE-XBPM:P1us:Wy2UsedM
S28IDFE-XBPM:P1us:Wy3UsedM / S28IDFE-XBPM:P1us:Wy3UsedM
S28IDFE-XBPM:P1us:x / S28IDFE-XBPM:P1us:x
S28IDFE-XBPM:P1us:x:CalFactor1M / S28IDFE-XBPM:P1us:x:CalFactor1M
S28IDFE-XBPM:P1us:x:CalFactor2M / S28IDFE-XBPM:P1us:x:CalFactor2M
S28IDFE-XBPM:P1us:x:LowPass1sM / S28IDFE-XBPM:P1us:x:LowPass1sM
S28IDFE-XBPM:P1us:x:LowPass8sM / S28IDFE-XBPM:P1us:x:LowPass8sM
S28IDFE-XBPM:P1us:x:LowPass64sM / S28IDFE-XBPM:P1us:x:LowPass64sM
S28IDFE-XBPM:P1us:x:Offset1M / S28IDFE-XBPM:P1us:x:Offset1M
S28IDFE-XBPM:P1us:x:Offset2M / S28IDFE-XBPM:P1us:x:Offset2M
S28IDFE-XBPM:P1us:x:ResolutionM / S28IDFE-XBPM:P1us:x:ResolutionM
S28IDFE-XBPM:P1us:x:Resolution1sM / S28IDFE-XBPM:P1us:x:Resolution1sM
S28IDFE-XBPM:P1us:x:Resolution8sM / S28IDFE-XBPM:P1us:x:Resolution8sM
S28IDFE-XBPM:P1us:x:Resolution64sM / S28IDFE-XBPM:P1us:x:Resolution64sM
S28IDFE-XBPM:P1us:x:StdDevM / S28IDFE-XBPM:P1us:x:StdDevM
S28IDFE-XBPM:P1us:x:StdDev1sM / S28IDFE-XBPM:P1us:x:StdDev1sM
S28IDFE-XBPM:P1us:x:StdDev8sM / S28IDFE-XBPM:P1us:x:StdDev8sM
S28IDFE-XBPM:P1us:x:StdDev64sM / S28IDFE-XBPM:P1us:x:StdDev64sM
S28IDFE-XBPM:P1us:x1:LowPass1sM / S28IDFE-XBPM:P1us:x1:LowPass1sM
S28IDFE-XBPM:P1us:x1:LowPass8sM / S28IDFE-XBPM:P1us:x1:LowPass8sM
S28IDFE-XBPM:P1us:x1:LowPass64sM / S28IDFE-XBPM:P1us:x1:LowPass64sM
S28IDFE-XBPM:P1us:x2:LowPass1sM / S28IDFE-XBPM:P1us:x2:LowPass1sM
S28IDFE-XBPM:P1us:x2:LowPass8sM / S28IDFE-XBPM:P1us:x2:LowPass8sM
S28IDFE-XBPM:P1us:x2:LowPass64sM / S28IDFE-XBPM:P1us:x2:LowPass64sM
S28IDFE-XBPM:P1us:y / S28IDFE-XBPM:P1us:y
S28IDFE-XBPM:P1us:y:CalFactor1M / S28IDFE-XBPM:P1us:y:CalFactor1M
S28IDFE-XBPM:P1us:y:CalFactor2M / S28IDFE-XBPM:P1us:y:CalFactor2M
S28IDFE-XBPM:P1us:y:LowPass1sM / S28IDFE-XBPM:P1us:y:LowPass1sM
S28IDFE-XBPM:P1us:y:LowPass8sM / S28IDFE-XBPM:P1us:y:LowPass8sM
S28IDFE-XBPM:P1us:y:LowPass64sM / S28IDFE-XBPM:P1us:y:LowPass64sM
S28IDFE-XBPM:P1us:y:Offset1M / S28IDFE-XBPM:P1us:y:Offset1M
S28IDFE-XBPM:P1us:y:Offset2M / S28IDFE-XBPM:P1us:y:Offset2M
S28IDFE-XBPM:P1us:y:ResolutionM / S28IDFE-XBPM:P1us:y:ResolutionM
S28IDFE-XBPM:P1us:y:Resolution1sM / S28IDFE-XBPM:P1us:y:Resolution1sM
S28IDFE-XBPM:P1us:y:Resolution8sM / S28IDFE-XBPM:P1us:y:Resolution8sM
S28IDFE-XBPM:P1us:y:Resolution64sM / S28IDFE-XBPM:P1us:y:Resolution64sM
S28IDFE-XBPM:P1us:y:StdDevM / S28IDFE-XBPM:P1us:y:StdDevM
S28IDFE-XBPM:P1us:y:StdDev1sM / S28IDFE-XBPM:P1us:y:StdDev1sM
S28IDFE-XBPM:P1us:y:StdDev8sM / S28IDFE-XBPM:P1us:y:StdDev8sM
S28IDFE-XBPM:P1us:y:StdDev64sM / S28IDFE-XBPM:P1us:y:StdDev64sM
S28IDFE-XBPM:P1us:y1:LowPass1sM / S28IDFE-XBPM:P1us:y1:LowPass1sM
S28IDFE-XBPM:P1us:y1:LowPass8sM / S28IDFE-XBPM:P1us:y1:LowPass8sM
S28IDFE-XBPM:P1us:y1:LowPass64sM / S28IDFE-XBPM:P1us:y1:LowPass64sM
S28IDFE-XBPM:P1us:y2:LowPass1sM / S28IDFE-XBPM:P1us:y2:LowPass1sM
S28IDFE-XBPM:P1us:y2:LowPass8sM / S28IDFE-XBPM:P1us:y2:LowPass8sM
S28IDFE-XBPM:P1us:y2:LowPass64sM / S28IDFE-XBPM:P1us:y2:LowPass64sM
S28IDFE-XBPM:P2ds:GapUsedC / S28IDFE-XBPM:P2ds:GapUsedC
S28IDFE-XBPM:P2ds:XCalM / S28IDFE-XBPM:P2ds:XCalM
S28IDFE-XBPM:P2ds:YCalM / S28IDFE-XBPM:P2ds:YCalM
S28IDFE-XBPM:P2ds:x:CalFactorM / S28IDFE-XBPM:P2ds:x:CalFactorM
S28IDFE-XBPM:P2ds:x:OffsetM / S28IDFE-XBPM:P2ds:x:OffsetM
S28IDFE-XBPM:P2ds:y:CalFactorM / S28IDFE-XBPM:P2ds:y:CalFactorM
S28IDFE-XBPM:P2ds:y:OffsetM / S28IDFE-XBPM:P2ds:y:OffsetM
S28IDFE-XBPM:P2us:GapUsedC / S28IDFE-XBPM:P2us:GapUsedC
S28IDFE-XBPM:P2us:XCalM / S28IDFE-XBPM:P2us:XCalM
S28IDFE-XBPM:P2us:YCalM / S28IDFE-XBPM:P2us:YCalM
S28IDFE-XBPM:P2us:x:CalFactorM / S28IDFE-XBPM:P2us:x:CalFactorM
S28IDFE-XBPM:P2us:x:OffsetM / S28IDFE-XBPM:P2us:x:OffsetM
S28IDFE-XBPM:P2us:y:CalFactorM / S28IDFE-XBPM:P2us:y:CalFactorM
S28IDFE-XBPM:P2us:y:OffsetM / S28IDFE-XBPM:P2us:y:OffsetM
S29IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S29IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S29IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S29IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S29IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S29IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S29IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S29IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S29IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S29IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S29IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S29IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S29IDFE-XBPM:CM1ds:PositionOffsetX / S29IDFE-XBPM:CM1ds:PositionOffsetX
S29IDFE-XBPM:CM1ds:PositionOffsetY / S29IDFE-XBPM:CM1ds:PositionOffsetY
S29IDFE-XBPM:CM1ds:PositionScaleX / S29IDFE-XBPM:CM1ds:PositionScaleX
S29IDFE-XBPM:CM1ds:PositionScaleY / S29IDFE-XBPM:CM1ds:PositionScaleY
S29IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S29IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S29IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S29IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S29IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S29IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S29IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S29IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S29IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S29IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S29IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S29IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S29IDFE-XBPM:CM2ds:PositionOffsetX / S29IDFE-XBPM:CM2ds:PositionOffsetX
S29IDFE-XBPM:CM2ds:PositionOffsetY / S29IDFE-XBPM:CM2ds:PositionOffsetY
S29IDFE-XBPM:CM2ds:PositionScaleX / S29IDFE-XBPM:CM2ds:PositionScaleX
S29IDFE-XBPM:CM2ds:PositionScaleY / S29IDFE-XBPM:CM2ds:PositionScaleY
S29IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S29IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S29IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S29IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S29IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S29IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S29IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S29IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S29IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S29IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S29IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S29IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S29IDFE-XBPM:CM3ds:PositionOffsetX / S29IDFE-XBPM:CM3ds:PositionOffsetX
S29IDFE-XBPM:CM3ds:PositionOffsetY / S29IDFE-XBPM:CM3ds:PositionOffsetY
S29IDFE-XBPM:CM3ds:PositionScaleX / S29IDFE-XBPM:CM3ds:PositionScaleX
S29IDFE-XBPM:CM3ds:PositionScaleY / S29IDFE-XBPM:CM3ds:PositionScaleY
S29IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S29IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S29IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S29IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S29IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S29IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S29IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S29IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S29IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S29IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S29IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S29IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S29IDFE-XBPM:CM4ds:PositionOffsetX / S29IDFE-XBPM:CM4ds:PositionOffsetX
S29IDFE-XBPM:CM4ds:PositionOffsetY / S29IDFE-XBPM:CM4ds:PositionOffsetY
S29IDFE-XBPM:CM4ds:PositionScaleX / S29IDFE-XBPM:CM4ds:PositionScaleX
S29IDFE-XBPM:CM4ds:PositionScaleY / S29IDFE-XBPM:CM4ds:PositionScaleY
S29IDFE-XBPM:P1ds:BMcUsedM / S29IDFE-XBPM:P1ds:BMcUsedM
S29IDFE-XBPM:P1ds:GapUsedC / S29IDFE-XBPM:P1ds:GapUsedC
S29IDFE-XBPM:P1ds:Wx1UsedM / S29IDFE-XBPM:P1ds:Wx1UsedM
S29IDFE-XBPM:P1ds:Wx2UsedM / S29IDFE-XBPM:P1ds:Wx2UsedM
S29IDFE-XBPM:P1ds:Wx3UsedM / S29IDFE-XBPM:P1ds:Wx3UsedM
S29IDFE-XBPM:P1ds:Wy1UsedM / S29IDFE-XBPM:P1ds:Wy1UsedM
S29IDFE-XBPM:P1ds:Wy2UsedM / S29IDFE-XBPM:P1ds:Wy2UsedM
S29IDFE-XBPM:P1ds:Wy3UsedM / S29IDFE-XBPM:P1ds:Wy3UsedM
S29IDFE-XBPM:P1ds:x / S29IDFE-XBPM:P1ds:x
S29IDFE-XBPM:P1ds:x:CalFactor1M / S29IDFE-XBPM:P1ds:x:CalFactor1M
S29IDFE-XBPM:P1ds:x:CalFactor2M / S29IDFE-XBPM:P1ds:x:CalFactor2M
S29IDFE-XBPM:P1ds:x:LowPass1sM / S29IDFE-XBPM:P1ds:x:LowPass1sM
S29IDFE-XBPM:P1ds:x:LowPass8sM / S29IDFE-XBPM:P1ds:x:LowPass8sM
S29IDFE-XBPM:P1ds:x:LowPass64sM / S29IDFE-XBPM:P1ds:x:LowPass64sM
S29IDFE-XBPM:P1ds:x:Offset1M / S29IDFE-XBPM:P1ds:x:Offset1M
S29IDFE-XBPM:P1ds:x:Offset2M / S29IDFE-XBPM:P1ds:x:Offset2M
S29IDFE-XBPM:P1ds:x:ResolutionM / S29IDFE-XBPM:P1ds:x:ResolutionM
S29IDFE-XBPM:P1ds:x:Resolution1sM / S29IDFE-XBPM:P1ds:x:Resolution1sM
S29IDFE-XBPM:P1ds:x:Resolution8sM / S29IDFE-XBPM:P1ds:x:Resolution8sM
S29IDFE-XBPM:P1ds:x:Resolution64sM / S29IDFE-XBPM:P1ds:x:Resolution64sM
S29IDFE-XBPM:P1ds:x:StdDevM / S29IDFE-XBPM:P1ds:x:StdDevM
S29IDFE-XBPM:P1ds:x:StdDev1sM / S29IDFE-XBPM:P1ds:x:StdDev1sM
S29IDFE-XBPM:P1ds:x:StdDev8sM / S29IDFE-XBPM:P1ds:x:StdDev8sM
S29IDFE-XBPM:P1ds:x:StdDev64sM / S29IDFE-XBPM:P1ds:x:StdDev64sM
S29IDFE-XBPM:P1ds:x1:LowPass1sM / S29IDFE-XBPM:P1ds:x1:LowPass1sM
S29IDFE-XBPM:P1ds:x1:LowPass8sM / S29IDFE-XBPM:P1ds:x1:LowPass8sM
S29IDFE-XBPM:P1ds:x1:LowPass64sM / S29IDFE-XBPM:P1ds:x1:LowPass64sM
S29IDFE-XBPM:P1ds:x2:LowPass1sM / S29IDFE-XBPM:P1ds:x2:LowPass1sM
S29IDFE-XBPM:P1ds:x2:LowPass8sM / S29IDFE-XBPM:P1ds:x2:LowPass8sM
S29IDFE-XBPM:P1ds:x2:LowPass64sM / S29IDFE-XBPM:P1ds:x2:LowPass64sM
S29IDFE-XBPM:P1ds:y / S29IDFE-XBPM:P1ds:y
S29IDFE-XBPM:P1ds:y:CalFactor1M / S29IDFE-XBPM:P1ds:y:CalFactor1M
S29IDFE-XBPM:P1ds:y:CalFactor2M / S29IDFE-XBPM:P1ds:y:CalFactor2M
S29IDFE-XBPM:P1ds:y:LowPass1sM / S29IDFE-XBPM:P1ds:y:LowPass1sM
S29IDFE-XBPM:P1ds:y:LowPass8sM / S29IDFE-XBPM:P1ds:y:LowPass8sM
S29IDFE-XBPM:P1ds:y:LowPass64sM / S29IDFE-XBPM:P1ds:y:LowPass64sM
S29IDFE-XBPM:P1ds:y:Offset1M / S29IDFE-XBPM:P1ds:y:Offset1M
S29IDFE-XBPM:P1ds:y:Offset2M / S29IDFE-XBPM:P1ds:y:Offset2M
S29IDFE-XBPM:P1ds:y:ResolutionM / S29IDFE-XBPM:P1ds:y:ResolutionM
S29IDFE-XBPM:P1ds:y:Resolution1sM / S29IDFE-XBPM:P1ds:y:Resolution1sM
S29IDFE-XBPM:P1ds:y:Resolution8sM / S29IDFE-XBPM:P1ds:y:Resolution8sM
S29IDFE-XBPM:P1ds:y:Resolution64sM / S29IDFE-XBPM:P1ds:y:Resolution64sM
S29IDFE-XBPM:P1ds:y:StdDevM / S29IDFE-XBPM:P1ds:y:StdDevM
S29IDFE-XBPM:P1ds:y:StdDev1sM / S29IDFE-XBPM:P1ds:y:StdDev1sM
S29IDFE-XBPM:P1ds:y:StdDev8sM / S29IDFE-XBPM:P1ds:y:StdDev8sM
S29IDFE-XBPM:P1ds:y:StdDev64sM / S29IDFE-XBPM:P1ds:y:StdDev64sM
S29IDFE-XBPM:P1ds:y1:LowPass1sM / S29IDFE-XBPM:P1ds:y1:LowPass1sM
S29IDFE-XBPM:P1ds:y1:LowPass8sM / S29IDFE-XBPM:P1ds:y1:LowPass8sM
S29IDFE-XBPM:P1ds:y1:LowPass64sM / S29IDFE-XBPM:P1ds:y1:LowPass64sM
S29IDFE-XBPM:P1ds:y2:LowPass1sM / S29IDFE-XBPM:P1ds:y2:LowPass1sM
S29IDFE-XBPM:P1ds:y2:LowPass8sM / S29IDFE-XBPM:P1ds:y2:LowPass8sM
S29IDFE-XBPM:P1ds:y2:LowPass64sM / S29IDFE-XBPM:P1ds:y2:LowPass64sM
S29IDFE-XBPM:P2ds:GapUsedC / S29IDFE-XBPM:P2ds:GapUsedC
S29IDFE-XBPM:P2ds:XCalM / S29IDFE-XBPM:P2ds:XCalM
S29IDFE-XBPM:P2ds:YCalM / S29IDFE-XBPM:P2ds:YCalM
S29IDFE-XBPM:P2ds:x:CalFactorM / S29IDFE-XBPM:P2ds:x:CalFactorM
S29IDFE-XBPM:P2ds:x:OffsetM / S29IDFE-XBPM:P2ds:x:OffsetM
S29IDFE-XBPM:P2ds:y:CalFactorM / S29IDFE-XBPM:P2ds:y:CalFactorM
S29IDFE-XBPM:P2ds:y:OffsetM / S29IDFE-XBPM:P2ds:y:OffsetM
S30IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S30IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S30IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S30IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S30IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S30IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S30IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S30IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S30IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S30IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S30IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S30IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S30IDFE-XBPM:CM1ds:PositionOffsetX / S30IDFE-XBPM:CM1ds:PositionOffsetX
S30IDFE-XBPM:CM1ds:PositionOffsetY / S30IDFE-XBPM:CM1ds:PositionOffsetY
S30IDFE-XBPM:CM1ds:PositionScaleX / S30IDFE-XBPM:CM1ds:PositionScaleX
S30IDFE-XBPM:CM1ds:PositionScaleY / S30IDFE-XBPM:CM1ds:PositionScaleY
S30IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S30IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S30IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S30IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S30IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S30IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S30IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S30IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S30IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S30IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S30IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S30IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S30IDFE-XBPM:CM2ds:PositionOffsetX / S30IDFE-XBPM:CM2ds:PositionOffsetX
S30IDFE-XBPM:CM2ds:PositionOffsetY / S30IDFE-XBPM:CM2ds:PositionOffsetY
S30IDFE-XBPM:CM2ds:PositionScaleX / S30IDFE-XBPM:CM2ds:PositionScaleX
S30IDFE-XBPM:CM2ds:PositionScaleY / S30IDFE-XBPM:CM2ds:PositionScaleY
S30IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S30IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S30IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S30IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S30IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S30IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S30IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S30IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S30IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S30IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S30IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S30IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S30IDFE-XBPM:CM3ds:PositionOffsetX / S30IDFE-XBPM:CM3ds:PositionOffsetX
S30IDFE-XBPM:CM3ds:PositionOffsetY / S30IDFE-XBPM:CM3ds:PositionOffsetY
S30IDFE-XBPM:CM3ds:PositionScaleX / S30IDFE-XBPM:CM3ds:PositionScaleX
S30IDFE-XBPM:CM3ds:PositionScaleY / S30IDFE-XBPM:CM3ds:PositionScaleY
S30IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S30IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S30IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S30IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S30IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S30IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S30IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S30IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S30IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S30IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S30IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S30IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S30IDFE-XBPM:CM4ds:PositionOffsetX / S30IDFE-XBPM:CM4ds:PositionOffsetX
S30IDFE-XBPM:CM4ds:PositionOffsetY / S30IDFE-XBPM:CM4ds:PositionOffsetY
S30IDFE-XBPM:CM4ds:PositionScaleX / S30IDFE-XBPM:CM4ds:PositionScaleX
S30IDFE-XBPM:CM4ds:PositionScaleY / S30IDFE-XBPM:CM4ds:PositionScaleY
S30IDFE-XBPM:P1ds:BMcUsedM / S30IDFE-XBPM:P1ds:BMcUsedM
S30IDFE-XBPM:P1ds:GapUsedC / S30IDFE-XBPM:P1ds:GapUsedC
S30IDFE-XBPM:P1ds:Wx1UsedM / S30IDFE-XBPM:P1ds:Wx1UsedM
S30IDFE-XBPM:P1ds:Wx2UsedM / S30IDFE-XBPM:P1ds:Wx2UsedM
S30IDFE-XBPM:P1ds:Wx3UsedM / S30IDFE-XBPM:P1ds:Wx3UsedM
S30IDFE-XBPM:P1ds:Wy1UsedM / S30IDFE-XBPM:P1ds:Wy1UsedM
S30IDFE-XBPM:P1ds:Wy2UsedM / S30IDFE-XBPM:P1ds:Wy2UsedM
S30IDFE-XBPM:P1ds:Wy3UsedM / S30IDFE-XBPM:P1ds:Wy3UsedM
S30IDFE-XBPM:P1ds:x / S30IDFE-XBPM:P1ds:x
S30IDFE-XBPM:P1ds:x:CalFactor1M / S30IDFE-XBPM:P1ds:x:CalFactor1M
S30IDFE-XBPM:P1ds:x:CalFactor2M / S30IDFE-XBPM:P1ds:x:CalFactor2M
S30IDFE-XBPM:P1ds:x:LowPass1sM / S30IDFE-XBPM:P1ds:x:LowPass1sM
S30IDFE-XBPM:P1ds:x:LowPass8sM / S30IDFE-XBPM:P1ds:x:LowPass8sM
S30IDFE-XBPM:P1ds:x:LowPass64sM / S30IDFE-XBPM:P1ds:x:LowPass64sM
S30IDFE-XBPM:P1ds:x:Offset1M / S30IDFE-XBPM:P1ds:x:Offset1M
S30IDFE-XBPM:P1ds:x:Offset2M / S30IDFE-XBPM:P1ds:x:Offset2M
S30IDFE-XBPM:P1ds:x:ResolutionM / S30IDFE-XBPM:P1ds:x:ResolutionM
S30IDFE-XBPM:P1ds:x:Resolution1sM / S30IDFE-XBPM:P1ds:x:Resolution1sM
S30IDFE-XBPM:P1ds:x:Resolution8sM / S30IDFE-XBPM:P1ds:x:Resolution8sM
S30IDFE-XBPM:P1ds:x:Resolution64sM / S30IDFE-XBPM:P1ds:x:Resolution64sM
S30IDFE-XBPM:P1ds:x:StdDevM / S30IDFE-XBPM:P1ds:x:StdDevM
S30IDFE-XBPM:P1ds:x:StdDev1sM / S30IDFE-XBPM:P1ds:x:StdDev1sM
S30IDFE-XBPM:P1ds:x:StdDev8sM / S30IDFE-XBPM:P1ds:x:StdDev8sM
S30IDFE-XBPM:P1ds:x:StdDev64sM / S30IDFE-XBPM:P1ds:x:StdDev64sM
S30IDFE-XBPM:P1ds:x1:LowPass1sM / S30IDFE-XBPM:P1ds:x1:LowPass1sM
S30IDFE-XBPM:P1ds:x1:LowPass8sM / S30IDFE-XBPM:P1ds:x1:LowPass8sM
S30IDFE-XBPM:P1ds:x1:LowPass64sM / S30IDFE-XBPM:P1ds:x1:LowPass64sM
S30IDFE-XBPM:P1ds:x2:LowPass1sM / S30IDFE-XBPM:P1ds:x2:LowPass1sM
S30IDFE-XBPM:P1ds:x2:LowPass8sM / S30IDFE-XBPM:P1ds:x2:LowPass8sM
S30IDFE-XBPM:P1ds:x2:LowPass64sM / S30IDFE-XBPM:P1ds:x2:LowPass64sM
S30IDFE-XBPM:P1ds:y / S30IDFE-XBPM:P1ds:y
S30IDFE-XBPM:P1ds:y:CalFactor1M / S30IDFE-XBPM:P1ds:y:CalFactor1M
S30IDFE-XBPM:P1ds:y:CalFactor2M / S30IDFE-XBPM:P1ds:y:CalFactor2M
S30IDFE-XBPM:P1ds:y:LowPass1sM / S30IDFE-XBPM:P1ds:y:LowPass1sM
S30IDFE-XBPM:P1ds:y:LowPass8sM / S30IDFE-XBPM:P1ds:y:LowPass8sM
S30IDFE-XBPM:P1ds:y:LowPass64sM / S30IDFE-XBPM:P1ds:y:LowPass64sM
S30IDFE-XBPM:P1ds:y:Offset1M / S30IDFE-XBPM:P1ds:y:Offset1M
S30IDFE-XBPM:P1ds:y:Offset2M / S30IDFE-XBPM:P1ds:y:Offset2M
S30IDFE-XBPM:P1ds:y:ResolutionM / S30IDFE-XBPM:P1ds:y:ResolutionM
S30IDFE-XBPM:P1ds:y:Resolution1sM / S30IDFE-XBPM:P1ds:y:Resolution1sM
S30IDFE-XBPM:P1ds:y:Resolution8sM / S30IDFE-XBPM:P1ds:y:Resolution8sM
S30IDFE-XBPM:P1ds:y:Resolution64sM / S30IDFE-XBPM:P1ds:y:Resolution64sM
S30IDFE-XBPM:P1ds:y:StdDevM / S30IDFE-XBPM:P1ds:y:StdDevM
S30IDFE-XBPM:P1ds:y:StdDev1sM / S30IDFE-XBPM:P1ds:y:StdDev1sM
S30IDFE-XBPM:P1ds:y:StdDev8sM / S30IDFE-XBPM:P1ds:y:StdDev8sM
S30IDFE-XBPM:P1ds:y:StdDev64sM / S30IDFE-XBPM:P1ds:y:StdDev64sM
S30IDFE-XBPM:P1ds:y1:LowPass1sM / S30IDFE-XBPM:P1ds:y1:LowPass1sM
S30IDFE-XBPM:P1ds:y1:LowPass8sM / S30IDFE-XBPM:P1ds:y1:LowPass8sM
S30IDFE-XBPM:P1ds:y1:LowPass64sM / S30IDFE-XBPM:P1ds:y1:LowPass64sM
S30IDFE-XBPM:P1ds:y2:LowPass1sM / S30IDFE-XBPM:P1ds:y2:LowPass1sM
S30IDFE-XBPM:P1ds:y2:LowPass8sM / S30IDFE-XBPM:P1ds:y2:LowPass8sM
S30IDFE-XBPM:P1ds:y2:LowPass64sM / S30IDFE-XBPM:P1ds:y2:LowPass64sM
S30IDFE-XBPM:P2ds:GapUsedC / S30IDFE-XBPM:P2ds:GapUsedC
S30IDFE-XBPM:P2ds:XCalM / S30IDFE-XBPM:P2ds:XCalM
S30IDFE-XBPM:P2ds:YCalM / S30IDFE-XBPM:P2ds:YCalM
S30IDFE-XBPM:P2ds:x:CalFactorM / S30IDFE-XBPM:P2ds:x:CalFactorM
S30IDFE-XBPM:P2ds:x:OffsetM / S30IDFE-XBPM:P2ds:x:OffsetM
S30IDFE-XBPM:P2ds:y:CalFactorM / S30IDFE-XBPM:P2ds:y:CalFactorM
S30IDFE-XBPM:P2ds:y:OffsetM / S30IDFE-XBPM:P2ds:y:OffsetM
S31IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S31IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S31IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S31IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S31IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S31IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S31IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S31IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S31IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S31IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S31IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S31IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S31IDFE-XBPM:CM1ds:PositionOffsetX / S31IDFE-XBPM:CM1ds:PositionOffsetX
S31IDFE-XBPM:CM1ds:PositionOffsetY / S31IDFE-XBPM:CM1ds:PositionOffsetY
S31IDFE-XBPM:CM1ds:PositionScaleX / S31IDFE-XBPM:CM1ds:PositionScaleX
S31IDFE-XBPM:CM1ds:PositionScaleY / S31IDFE-XBPM:CM1ds:PositionScaleY
S31IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S31IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S31IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S31IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S31IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S31IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S31IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S31IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S31IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S31IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S31IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S31IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S31IDFE-XBPM:CM1us:PositionOffsetX / S31IDFE-XBPM:CM1us:PositionOffsetX
S31IDFE-XBPM:CM1us:PositionOffsetY / S31IDFE-XBPM:CM1us:PositionOffsetY
S31IDFE-XBPM:CM1us:PositionScaleX / S31IDFE-XBPM:CM1us:PositionScaleX
S31IDFE-XBPM:CM1us:PositionScaleY / S31IDFE-XBPM:CM1us:PositionScaleY
S31IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S31IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S31IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S31IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S31IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S31IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S31IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S31IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S31IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S31IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S31IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S31IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S31IDFE-XBPM:CM2ds:PositionOffsetX / S31IDFE-XBPM:CM2ds:PositionOffsetX
S31IDFE-XBPM:CM2ds:PositionOffsetY / S31IDFE-XBPM:CM2ds:PositionOffsetY
S31IDFE-XBPM:CM2ds:PositionScaleX / S31IDFE-XBPM:CM2ds:PositionScaleX
S31IDFE-XBPM:CM2ds:PositionScaleY / S31IDFE-XBPM:CM2ds:PositionScaleY
S31IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S31IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S31IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S31IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S31IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S31IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S31IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S31IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S31IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S31IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S31IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S31IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S31IDFE-XBPM:CM2us:PositionOffsetX / S31IDFE-XBPM:CM2us:PositionOffsetX
S31IDFE-XBPM:CM2us:PositionOffsetY / S31IDFE-XBPM:CM2us:PositionOffsetY
S31IDFE-XBPM:CM2us:PositionScaleX / S31IDFE-XBPM:CM2us:PositionScaleX
S31IDFE-XBPM:CM2us:PositionScaleY / S31IDFE-XBPM:CM2us:PositionScaleY
S31IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S31IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S31IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S31IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S31IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S31IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S31IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S31IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S31IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S31IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S31IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S31IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S31IDFE-XBPM:CM3ds:PositionOffsetX / S31IDFE-XBPM:CM3ds:PositionOffsetX
S31IDFE-XBPM:CM3ds:PositionOffsetY / S31IDFE-XBPM:CM3ds:PositionOffsetY
S31IDFE-XBPM:CM3ds:PositionScaleX / S31IDFE-XBPM:CM3ds:PositionScaleX
S31IDFE-XBPM:CM3ds:PositionScaleY / S31IDFE-XBPM:CM3ds:PositionScaleY
S31IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S31IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S31IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S31IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S31IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S31IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S31IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S31IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S31IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S31IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S31IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S31IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S31IDFE-XBPM:CM3us:PositionOffsetX / S31IDFE-XBPM:CM3us:PositionOffsetX
S31IDFE-XBPM:CM3us:PositionOffsetY / S31IDFE-XBPM:CM3us:PositionOffsetY
S31IDFE-XBPM:CM3us:PositionScaleX / S31IDFE-XBPM:CM3us:PositionScaleX
S31IDFE-XBPM:CM3us:PositionScaleY / S31IDFE-XBPM:CM3us:PositionScaleY
S31IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S31IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S31IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S31IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S31IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S31IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S31IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S31IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S31IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S31IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S31IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S31IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S31IDFE-XBPM:CM4ds:PositionOffsetX / S31IDFE-XBPM:CM4ds:PositionOffsetX
S31IDFE-XBPM:CM4ds:PositionOffsetY / S31IDFE-XBPM:CM4ds:PositionOffsetY
S31IDFE-XBPM:CM4ds:PositionScaleX / S31IDFE-XBPM:CM4ds:PositionScaleX
S31IDFE-XBPM:CM4ds:PositionScaleY / S31IDFE-XBPM:CM4ds:PositionScaleY
S31IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S31IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S31IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S31IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S31IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S31IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S31IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S31IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S31IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S31IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S31IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S31IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S31IDFE-XBPM:CM4us:PositionOffsetX / S31IDFE-XBPM:CM4us:PositionOffsetX
S31IDFE-XBPM:CM4us:PositionOffsetY / S31IDFE-XBPM:CM4us:PositionOffsetY
S31IDFE-XBPM:CM4us:PositionScaleX / S31IDFE-XBPM:CM4us:PositionScaleX
S31IDFE-XBPM:CM4us:PositionScaleY / S31IDFE-XBPM:CM4us:PositionScaleY
S31IDFE-XBPM:P1ds:BMcUsedM / S31IDFE-XBPM:P1ds:BMcUsedM
S31IDFE-XBPM:P1ds:GapUsedC / S31IDFE-XBPM:P1ds:GapUsedC
S31IDFE-XBPM:P1ds:Wx1UsedM / S31IDFE-XBPM:P1ds:Wx1UsedM
S31IDFE-XBPM:P1ds:Wx2UsedM / S31IDFE-XBPM:P1ds:Wx2UsedM
S31IDFE-XBPM:P1ds:Wx3UsedM / S31IDFE-XBPM:P1ds:Wx3UsedM
S31IDFE-XBPM:P1ds:Wy1UsedM / S31IDFE-XBPM:P1ds:Wy1UsedM
S31IDFE-XBPM:P1ds:Wy2UsedM / S31IDFE-XBPM:P1ds:Wy2UsedM
S31IDFE-XBPM:P1ds:Wy3UsedM / S31IDFE-XBPM:P1ds:Wy3UsedM
S31IDFE-XBPM:P1ds:x / S31IDFE-XBPM:P1ds:x
S31IDFE-XBPM:P1ds:x:CalFactor1M / S31IDFE-XBPM:P1ds:x:CalFactor1M
S31IDFE-XBPM:P1ds:x:CalFactor2M / S31IDFE-XBPM:P1ds:x:CalFactor2M
S31IDFE-XBPM:P1ds:x:LowPass1sM / S31IDFE-XBPM:P1ds:x:LowPass1sM
S31IDFE-XBPM:P1ds:x:LowPass8sM / S31IDFE-XBPM:P1ds:x:LowPass8sM
S31IDFE-XBPM:P1ds:x:LowPass64sM / S31IDFE-XBPM:P1ds:x:LowPass64sM
S31IDFE-XBPM:P1ds:x:Offset1M / S31IDFE-XBPM:P1ds:x:Offset1M
S31IDFE-XBPM:P1ds:x:Offset2M / S31IDFE-XBPM:P1ds:x:Offset2M
S31IDFE-XBPM:P1ds:x:ResolutionM / S31IDFE-XBPM:P1ds:x:ResolutionM
S31IDFE-XBPM:P1ds:x:Resolution1sM / S31IDFE-XBPM:P1ds:x:Resolution1sM
S31IDFE-XBPM:P1ds:x:Resolution8sM / S31IDFE-XBPM:P1ds:x:Resolution8sM
S31IDFE-XBPM:P1ds:x:Resolution64sM / S31IDFE-XBPM:P1ds:x:Resolution64sM
S31IDFE-XBPM:P1ds:x:StdDevM / S31IDFE-XBPM:P1ds:x:StdDevM
S31IDFE-XBPM:P1ds:x:StdDev1sM / S31IDFE-XBPM:P1ds:x:StdDev1sM
S31IDFE-XBPM:P1ds:x:StdDev8sM / S31IDFE-XBPM:P1ds:x:StdDev8sM
S31IDFE-XBPM:P1ds:x:StdDev64sM / S31IDFE-XBPM:P1ds:x:StdDev64sM
S31IDFE-XBPM:P1ds:x1:LowPass1sM / S31IDFE-XBPM:P1ds:x1:LowPass1sM
S31IDFE-XBPM:P1ds:x1:LowPass8sM / S31IDFE-XBPM:P1ds:x1:LowPass8sM
S31IDFE-XBPM:P1ds:x1:LowPass64sM / S31IDFE-XBPM:P1ds:x1:LowPass64sM
S31IDFE-XBPM:P1ds:x2:LowPass1sM / S31IDFE-XBPM:P1ds:x2:LowPass1sM
S31IDFE-XBPM:P1ds:x2:LowPass8sM / S31IDFE-XBPM:P1ds:x2:LowPass8sM
S31IDFE-XBPM:P1ds:x2:LowPass64sM / S31IDFE-XBPM:P1ds:x2:LowPass64sM
S31IDFE-XBPM:P1ds:y / S31IDFE-XBPM:P1ds:y
S31IDFE-XBPM:P1ds:y:CalFactor1M / S31IDFE-XBPM:P1ds:y:CalFactor1M
S31IDFE-XBPM:P1ds:y:CalFactor2M / S31IDFE-XBPM:P1ds:y:CalFactor2M
S31IDFE-XBPM:P1ds:y:LowPass1sM / S31IDFE-XBPM:P1ds:y:LowPass1sM
S31IDFE-XBPM:P1ds:y:LowPass8sM / S31IDFE-XBPM:P1ds:y:LowPass8sM
S31IDFE-XBPM:P1ds:y:LowPass64sM / S31IDFE-XBPM:P1ds:y:LowPass64sM
S31IDFE-XBPM:P1ds:y:Offset1M / S31IDFE-XBPM:P1ds:y:Offset1M
S31IDFE-XBPM:P1ds:y:Offset2M / S31IDFE-XBPM:P1ds:y:Offset2M
S31IDFE-XBPM:P1ds:y:ResolutionM / S31IDFE-XBPM:P1ds:y:ResolutionM
S31IDFE-XBPM:P1ds:y:Resolution1sM / S31IDFE-XBPM:P1ds:y:Resolution1sM
S31IDFE-XBPM:P1ds:y:Resolution8sM / S31IDFE-XBPM:P1ds:y:Resolution8sM
S31IDFE-XBPM:P1ds:y:Resolution64sM / S31IDFE-XBPM:P1ds:y:Resolution64sM
S31IDFE-XBPM:P1ds:y:StdDevM / S31IDFE-XBPM:P1ds:y:StdDevM
S31IDFE-XBPM:P1ds:y:StdDev1sM / S31IDFE-XBPM:P1ds:y:StdDev1sM
S31IDFE-XBPM:P1ds:y:StdDev8sM / S31IDFE-XBPM:P1ds:y:StdDev8sM
S31IDFE-XBPM:P1ds:y:StdDev64sM / S31IDFE-XBPM:P1ds:y:StdDev64sM
S31IDFE-XBPM:P1ds:y1:LowPass1sM / S31IDFE-XBPM:P1ds:y1:LowPass1sM
S31IDFE-XBPM:P1ds:y1:LowPass8sM / S31IDFE-XBPM:P1ds:y1:LowPass8sM
S31IDFE-XBPM:P1ds:y1:LowPass64sM / S31IDFE-XBPM:P1ds:y1:LowPass64sM
S31IDFE-XBPM:P1ds:y2:LowPass1sM / S31IDFE-XBPM:P1ds:y2:LowPass1sM
S31IDFE-XBPM:P1ds:y2:LowPass8sM / S31IDFE-XBPM:P1ds:y2:LowPass8sM
S31IDFE-XBPM:P1ds:y2:LowPass64sM / S31IDFE-XBPM:P1ds:y2:LowPass64sM
S31IDFE-XBPM:P1us:BMcUsedM / S31IDFE-XBPM:P1us:BMcUsedM
S31IDFE-XBPM:P1us:GapUsedC / S31IDFE-XBPM:P1us:GapUsedC
S31IDFE-XBPM:P1us:Wx1UsedM / S31IDFE-XBPM:P1us:Wx1UsedM
S31IDFE-XBPM:P1us:Wx2UsedM / S31IDFE-XBPM:P1us:Wx2UsedM
S31IDFE-XBPM:P1us:Wx3UsedM / S31IDFE-XBPM:P1us:Wx3UsedM
S31IDFE-XBPM:P1us:Wy1UsedM / S31IDFE-XBPM:P1us:Wy1UsedM
S31IDFE-XBPM:P1us:Wy2UsedM / S31IDFE-XBPM:P1us:Wy2UsedM
S31IDFE-XBPM:P1us:Wy3UsedM / S31IDFE-XBPM:P1us:Wy3UsedM
S31IDFE-XBPM:P1us:x / S31IDFE-XBPM:P1us:x
S31IDFE-XBPM:P1us:x:CalFactor1M / S31IDFE-XBPM:P1us:x:CalFactor1M
S31IDFE-XBPM:P1us:x:CalFactor2M / S31IDFE-XBPM:P1us:x:CalFactor2M
S31IDFE-XBPM:P1us:x:LowPass1sM / S31IDFE-XBPM:P1us:x:LowPass1sM
S31IDFE-XBPM:P1us:x:LowPass8sM / S31IDFE-XBPM:P1us:x:LowPass8sM
S31IDFE-XBPM:P1us:x:LowPass64sM / S31IDFE-XBPM:P1us:x:LowPass64sM
S31IDFE-XBPM:P1us:x:Offset1M / S31IDFE-XBPM:P1us:x:Offset1M
S31IDFE-XBPM:P1us:x:Offset2M / S31IDFE-XBPM:P1us:x:Offset2M
S31IDFE-XBPM:P1us:x:ResolutionM / S31IDFE-XBPM:P1us:x:ResolutionM
S31IDFE-XBPM:P1us:x:Resolution1sM / S31IDFE-XBPM:P1us:x:Resolution1sM
S31IDFE-XBPM:P1us:x:Resolution8sM / S31IDFE-XBPM:P1us:x:Resolution8sM
S31IDFE-XBPM:P1us:x:Resolution64sM / S31IDFE-XBPM:P1us:x:Resolution64sM
S31IDFE-XBPM:P1us:x:StdDevM / S31IDFE-XBPM:P1us:x:StdDevM
S31IDFE-XBPM:P1us:x:StdDev1sM / S31IDFE-XBPM:P1us:x:StdDev1sM
S31IDFE-XBPM:P1us:x:StdDev8sM / S31IDFE-XBPM:P1us:x:StdDev8sM
S31IDFE-XBPM:P1us:x:StdDev64sM / S31IDFE-XBPM:P1us:x:StdDev64sM
S31IDFE-XBPM:P1us:x1:LowPass1sM / S31IDFE-XBPM:P1us:x1:LowPass1sM
S31IDFE-XBPM:P1us:x1:LowPass8sM / S31IDFE-XBPM:P1us:x1:LowPass8sM
S31IDFE-XBPM:P1us:x1:LowPass64sM / S31IDFE-XBPM:P1us:x1:LowPass64sM
S31IDFE-XBPM:P1us:x2:LowPass1sM / S31IDFE-XBPM:P1us:x2:LowPass1sM
S31IDFE-XBPM:P1us:x2:LowPass8sM / S31IDFE-XBPM:P1us:x2:LowPass8sM
S31IDFE-XBPM:P1us:x2:LowPass64sM / S31IDFE-XBPM:P1us:x2:LowPass64sM
S31IDFE-XBPM:P1us:y / S31IDFE-XBPM:P1us:y
S31IDFE-XBPM:P1us:y:CalFactor1M / S31IDFE-XBPM:P1us:y:CalFactor1M
S31IDFE-XBPM:P1us:y:CalFactor2M / S31IDFE-XBPM:P1us:y:CalFactor2M
S31IDFE-XBPM:P1us:y:LowPass1sM / S31IDFE-XBPM:P1us:y:LowPass1sM
S31IDFE-XBPM:P1us:y:LowPass8sM / S31IDFE-XBPM:P1us:y:LowPass8sM
S31IDFE-XBPM:P1us:y:LowPass64sM / S31IDFE-XBPM:P1us:y:LowPass64sM
S31IDFE-XBPM:P1us:y:Offset1M / S31IDFE-XBPM:P1us:y:Offset1M
S31IDFE-XBPM:P1us:y:Offset2M / S31IDFE-XBPM:P1us:y:Offset2M
S31IDFE-XBPM:P1us:y:ResolutionM / S31IDFE-XBPM:P1us:y:ResolutionM
S31IDFE-XBPM:P1us:y:Resolution1sM / S31IDFE-XBPM:P1us:y:Resolution1sM
S31IDFE-XBPM:P1us:y:Resolution8sM / S31IDFE-XBPM:P1us:y:Resolution8sM
S31IDFE-XBPM:P1us:y:Resolution64sM / S31IDFE-XBPM:P1us:y:Resolution64sM
S31IDFE-XBPM:P1us:y:StdDevM / S31IDFE-XBPM:P1us:y:StdDevM
S31IDFE-XBPM:P1us:y:StdDev1sM / S31IDFE-XBPM:P1us:y:StdDev1sM
S31IDFE-XBPM:P1us:y:StdDev8sM / S31IDFE-XBPM:P1us:y:StdDev8sM
S31IDFE-XBPM:P1us:y:StdDev64sM / S31IDFE-XBPM:P1us:y:StdDev64sM
S31IDFE-XBPM:P1us:y1:LowPass1sM / S31IDFE-XBPM:P1us:y1:LowPass1sM
S31IDFE-XBPM:P1us:y1:LowPass8sM / S31IDFE-XBPM:P1us:y1:LowPass8sM
S31IDFE-XBPM:P1us:y1:LowPass64sM / S31IDFE-XBPM:P1us:y1:LowPass64sM
S31IDFE-XBPM:P1us:y2:LowPass1sM / S31IDFE-XBPM:P1us:y2:LowPass1sM
S31IDFE-XBPM:P1us:y2:LowPass8sM / S31IDFE-XBPM:P1us:y2:LowPass8sM
S31IDFE-XBPM:P1us:y2:LowPass64sM / S31IDFE-XBPM:P1us:y2:LowPass64sM
S31IDFE-XBPM:P2ds:GapUsedC / S31IDFE-XBPM:P2ds:GapUsedC
S31IDFE-XBPM:P2ds:XCalM / S31IDFE-XBPM:P2ds:XCalM
S31IDFE-XBPM:P2ds:YCalM / S31IDFE-XBPM:P2ds:YCalM
S31IDFE-XBPM:P2ds:x:CalFactorM / S31IDFE-XBPM:P2ds:x:CalFactorM
S31IDFE-XBPM:P2ds:x:OffsetM / S31IDFE-XBPM:P2ds:x:OffsetM
S31IDFE-XBPM:P2ds:y:CalFactorM / S31IDFE-XBPM:P2ds:y:CalFactorM
S31IDFE-XBPM:P2ds:y:OffsetM / S31IDFE-XBPM:P2ds:y:OffsetM
S31IDFE-XBPM:P2us:GapUsedC / S31IDFE-XBPM:P2us:GapUsedC
S31IDFE-XBPM:P2us:XCalM / S31IDFE-XBPM:P2us:XCalM
S31IDFE-XBPM:P2us:YCalM / S31IDFE-XBPM:P2us:YCalM
S31IDFE-XBPM:P2us:x:CalFactorM / S31IDFE-XBPM:P2us:x:CalFactorM
S31IDFE-XBPM:P2us:x:OffsetM / S31IDFE-XBPM:P2us:x:OffsetM
S31IDFE-XBPM:P2us:y:CalFactorM / S31IDFE-XBPM:P2us:y:CalFactorM
S31IDFE-XBPM:P2us:y:OffsetM / S31IDFE-XBPM:P2us:y:OffsetM
S32IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S32IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S32IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S32IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S32IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S32IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S32IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S32IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S32IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S32IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S32IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S32IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S32IDFE-XBPM:CM1ds:PositionOffsetX / S32IDFE-XBPM:CM1ds:PositionOffsetX
S32IDFE-XBPM:CM1ds:PositionOffsetY / S32IDFE-XBPM:CM1ds:PositionOffsetY
S32IDFE-XBPM:CM1ds:PositionScaleX / S32IDFE-XBPM:CM1ds:PositionScaleX
S32IDFE-XBPM:CM1ds:PositionScaleY / S32IDFE-XBPM:CM1ds:PositionScaleY
S32IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S32IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S32IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S32IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S32IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S32IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S32IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S32IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S32IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S32IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S32IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S32IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S32IDFE-XBPM:CM1us:PositionOffsetX / S32IDFE-XBPM:CM1us:PositionOffsetX
S32IDFE-XBPM:CM1us:PositionOffsetY / S32IDFE-XBPM:CM1us:PositionOffsetY
S32IDFE-XBPM:CM1us:PositionScaleX / S32IDFE-XBPM:CM1us:PositionScaleX
S32IDFE-XBPM:CM1us:PositionScaleY / S32IDFE-XBPM:CM1us:PositionScaleY
S32IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S32IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S32IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S32IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S32IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S32IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S32IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S32IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S32IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S32IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S32IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S32IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S32IDFE-XBPM:CM2ds:PositionOffsetX / S32IDFE-XBPM:CM2ds:PositionOffsetX
S32IDFE-XBPM:CM2ds:PositionOffsetY / S32IDFE-XBPM:CM2ds:PositionOffsetY
S32IDFE-XBPM:CM2ds:PositionScaleX / S32IDFE-XBPM:CM2ds:PositionScaleX
S32IDFE-XBPM:CM2ds:PositionScaleY / S32IDFE-XBPM:CM2ds:PositionScaleY
S32IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S32IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S32IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S32IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S32IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S32IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S32IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S32IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S32IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S32IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S32IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S32IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S32IDFE-XBPM:CM2us:PositionOffsetX / S32IDFE-XBPM:CM2us:PositionOffsetX
S32IDFE-XBPM:CM2us:PositionOffsetY / S32IDFE-XBPM:CM2us:PositionOffsetY
S32IDFE-XBPM:CM2us:PositionScaleX / S32IDFE-XBPM:CM2us:PositionScaleX
S32IDFE-XBPM:CM2us:PositionScaleY / S32IDFE-XBPM:CM2us:PositionScaleY
S32IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S32IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S32IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S32IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S32IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S32IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S32IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S32IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S32IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S32IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S32IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S32IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S32IDFE-XBPM:CM3ds:PositionOffsetX / S32IDFE-XBPM:CM3ds:PositionOffsetX
S32IDFE-XBPM:CM3ds:PositionOffsetY / S32IDFE-XBPM:CM3ds:PositionOffsetY
S32IDFE-XBPM:CM3ds:PositionScaleX / S32IDFE-XBPM:CM3ds:PositionScaleX
S32IDFE-XBPM:CM3ds:PositionScaleY / S32IDFE-XBPM:CM3ds:PositionScaleY
S32IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S32IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S32IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S32IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S32IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S32IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S32IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S32IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S32IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S32IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S32IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S32IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S32IDFE-XBPM:CM3us:PositionOffsetX / S32IDFE-XBPM:CM3us:PositionOffsetX
S32IDFE-XBPM:CM3us:PositionOffsetY / S32IDFE-XBPM:CM3us:PositionOffsetY
S32IDFE-XBPM:CM3us:PositionScaleX / S32IDFE-XBPM:CM3us:PositionScaleX
S32IDFE-XBPM:CM3us:PositionScaleY / S32IDFE-XBPM:CM3us:PositionScaleY
S32IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S32IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S32IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S32IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S32IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S32IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S32IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S32IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S32IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S32IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S32IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S32IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S32IDFE-XBPM:CM4ds:PositionOffsetX / S32IDFE-XBPM:CM4ds:PositionOffsetX
S32IDFE-XBPM:CM4ds:PositionOffsetY / S32IDFE-XBPM:CM4ds:PositionOffsetY
S32IDFE-XBPM:CM4ds:PositionScaleX / S32IDFE-XBPM:CM4ds:PositionScaleX
S32IDFE-XBPM:CM4ds:PositionScaleY / S32IDFE-XBPM:CM4ds:PositionScaleY
S32IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S32IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S32IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S32IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S32IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S32IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S32IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S32IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S32IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S32IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S32IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S32IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S32IDFE-XBPM:CM4us:PositionOffsetX / S32IDFE-XBPM:CM4us:PositionOffsetX
S32IDFE-XBPM:CM4us:PositionOffsetY / S32IDFE-XBPM:CM4us:PositionOffsetY
S32IDFE-XBPM:CM4us:PositionScaleX / S32IDFE-XBPM:CM4us:PositionScaleX
S32IDFE-XBPM:CM4us:PositionScaleY / S32IDFE-XBPM:CM4us:PositionScaleY
S32IDFE-XBPM:P1ds:BMcUsedM / S32IDFE-XBPM:P1ds:BMcUsedM
S32IDFE-XBPM:P1ds:GapUsedC / S32IDFE-XBPM:P1ds:GapUsedC
S32IDFE-XBPM:P1ds:Wx1UsedM / S32IDFE-XBPM:P1ds:Wx1UsedM
S32IDFE-XBPM:P1ds:Wx2UsedM / S32IDFE-XBPM:P1ds:Wx2UsedM
S32IDFE-XBPM:P1ds:Wx3UsedM / S32IDFE-XBPM:P1ds:Wx3UsedM
S32IDFE-XBPM:P1ds:Wy1UsedM / S32IDFE-XBPM:P1ds:Wy1UsedM
S32IDFE-XBPM:P1ds:Wy2UsedM / S32IDFE-XBPM:P1ds:Wy2UsedM
S32IDFE-XBPM:P1ds:Wy3UsedM / S32IDFE-XBPM:P1ds:Wy3UsedM
S32IDFE-XBPM:P1ds:x / S32IDFE-XBPM:P1ds:x
S32IDFE-XBPM:P1ds:x:CalFactor1M / S32IDFE-XBPM:P1ds:x:CalFactor1M
S32IDFE-XBPM:P1ds:x:CalFactor2M / S32IDFE-XBPM:P1ds:x:CalFactor2M
S32IDFE-XBPM:P1ds:x:LowPass1sM / S32IDFE-XBPM:P1ds:x:LowPass1sM
S32IDFE-XBPM:P1ds:x:LowPass8sM / S32IDFE-XBPM:P1ds:x:LowPass8sM
S32IDFE-XBPM:P1ds:x:LowPass64sM / S32IDFE-XBPM:P1ds:x:LowPass64sM
S32IDFE-XBPM:P1ds:x:Offset1M / S32IDFE-XBPM:P1ds:x:Offset1M
S32IDFE-XBPM:P1ds:x:Offset2M / S32IDFE-XBPM:P1ds:x:Offset2M
S32IDFE-XBPM:P1ds:x:ResolutionM / S32IDFE-XBPM:P1ds:x:ResolutionM
S32IDFE-XBPM:P1ds:x:Resolution1sM / S32IDFE-XBPM:P1ds:x:Resolution1sM
S32IDFE-XBPM:P1ds:x:Resolution8sM / S32IDFE-XBPM:P1ds:x:Resolution8sM
S32IDFE-XBPM:P1ds:x:Resolution64sM / S32IDFE-XBPM:P1ds:x:Resolution64sM
S32IDFE-XBPM:P1ds:x:StdDevM / S32IDFE-XBPM:P1ds:x:StdDevM
S32IDFE-XBPM:P1ds:x:StdDev1sM / S32IDFE-XBPM:P1ds:x:StdDev1sM
S32IDFE-XBPM:P1ds:x:StdDev8sM / S32IDFE-XBPM:P1ds:x:StdDev8sM
S32IDFE-XBPM:P1ds:x:StdDev64sM / S32IDFE-XBPM:P1ds:x:StdDev64sM
S32IDFE-XBPM:P1ds:x1:LowPass1sM / S32IDFE-XBPM:P1ds:x1:LowPass1sM
S32IDFE-XBPM:P1ds:x1:LowPass8sM / S32IDFE-XBPM:P1ds:x1:LowPass8sM
S32IDFE-XBPM:P1ds:x1:LowPass64sM / S32IDFE-XBPM:P1ds:x1:LowPass64sM
S32IDFE-XBPM:P1ds:x2:LowPass1sM / S32IDFE-XBPM:P1ds:x2:LowPass1sM
S32IDFE-XBPM:P1ds:x2:LowPass8sM / S32IDFE-XBPM:P1ds:x2:LowPass8sM
S32IDFE-XBPM:P1ds:x2:LowPass64sM / S32IDFE-XBPM:P1ds:x2:LowPass64sM
S32IDFE-XBPM:P1ds:y / S32IDFE-XBPM:P1ds:y
S32IDFE-XBPM:P1ds:y:CalFactor1M / S32IDFE-XBPM:P1ds:y:CalFactor1M
S32IDFE-XBPM:P1ds:y:CalFactor2M / S32IDFE-XBPM:P1ds:y:CalFactor2M
S32IDFE-XBPM:P1ds:y:LowPass1sM / S32IDFE-XBPM:P1ds:y:LowPass1sM
S32IDFE-XBPM:P1ds:y:LowPass8sM / S32IDFE-XBPM:P1ds:y:LowPass8sM
S32IDFE-XBPM:P1ds:y:LowPass64sM / S32IDFE-XBPM:P1ds:y:LowPass64sM
S32IDFE-XBPM:P1ds:y:Offset1M / S32IDFE-XBPM:P1ds:y:Offset1M
S32IDFE-XBPM:P1ds:y:Offset2M / S32IDFE-XBPM:P1ds:y:Offset2M
S32IDFE-XBPM:P1ds:y:ResolutionM / S32IDFE-XBPM:P1ds:y:ResolutionM
S32IDFE-XBPM:P1ds:y:Resolution1sM / S32IDFE-XBPM:P1ds:y:Resolution1sM
S32IDFE-XBPM:P1ds:y:Resolution8sM / S32IDFE-XBPM:P1ds:y:Resolution8sM
S32IDFE-XBPM:P1ds:y:Resolution64sM / S32IDFE-XBPM:P1ds:y:Resolution64sM
S32IDFE-XBPM:P1ds:y:StdDevM / S32IDFE-XBPM:P1ds:y:StdDevM
S32IDFE-XBPM:P1ds:y:StdDev1sM / S32IDFE-XBPM:P1ds:y:StdDev1sM
S32IDFE-XBPM:P1ds:y:StdDev8sM / S32IDFE-XBPM:P1ds:y:StdDev8sM
S32IDFE-XBPM:P1ds:y:StdDev64sM / S32IDFE-XBPM:P1ds:y:StdDev64sM
S32IDFE-XBPM:P1ds:y1:LowPass1sM / S32IDFE-XBPM:P1ds:y1:LowPass1sM
S32IDFE-XBPM:P1ds:y1:LowPass8sM / S32IDFE-XBPM:P1ds:y1:LowPass8sM
S32IDFE-XBPM:P1ds:y1:LowPass64sM / S32IDFE-XBPM:P1ds:y1:LowPass64sM
S32IDFE-XBPM:P1ds:y2:LowPass1sM / S32IDFE-XBPM:P1ds:y2:LowPass1sM
S32IDFE-XBPM:P1ds:y2:LowPass8sM / S32IDFE-XBPM:P1ds:y2:LowPass8sM
S32IDFE-XBPM:P1ds:y2:LowPass64sM / S32IDFE-XBPM:P1ds:y2:LowPass64sM
S32IDFE-XBPM:P1us:BMcUsedM / S32IDFE-XBPM:P1us:BMcUsedM
S32IDFE-XBPM:P1us:GapUsedC / S32IDFE-XBPM:P1us:GapUsedC
S32IDFE-XBPM:P1us:Wx1UsedM / S32IDFE-XBPM:P1us:Wx1UsedM
S32IDFE-XBPM:P1us:Wx2UsedM / S32IDFE-XBPM:P1us:Wx2UsedM
S32IDFE-XBPM:P1us:Wx3UsedM / S32IDFE-XBPM:P1us:Wx3UsedM
S32IDFE-XBPM:P1us:Wy1UsedM / S32IDFE-XBPM:P1us:Wy1UsedM
S32IDFE-XBPM:P1us:Wy2UsedM / S32IDFE-XBPM:P1us:Wy2UsedM
S32IDFE-XBPM:P1us:Wy3UsedM / S32IDFE-XBPM:P1us:Wy3UsedM
S32IDFE-XBPM:P1us:x / S32IDFE-XBPM:P1us:x
S32IDFE-XBPM:P1us:x:CalFactor1M / S32IDFE-XBPM:P1us:x:CalFactor1M
S32IDFE-XBPM:P1us:x:CalFactor2M / S32IDFE-XBPM:P1us:x:CalFactor2M
S32IDFE-XBPM:P1us:x:LowPass1sM / S32IDFE-XBPM:P1us:x:LowPass1sM
S32IDFE-XBPM:P1us:x:LowPass8sM / S32IDFE-XBPM:P1us:x:LowPass8sM
S32IDFE-XBPM:P1us:x:LowPass64sM / S32IDFE-XBPM:P1us:x:LowPass64sM
S32IDFE-XBPM:P1us:x:Offset1M / S32IDFE-XBPM:P1us:x:Offset1M
S32IDFE-XBPM:P1us:x:Offset2M / S32IDFE-XBPM:P1us:x:Offset2M
S32IDFE-XBPM:P1us:x:ResolutionM / S32IDFE-XBPM:P1us:x:ResolutionM
S32IDFE-XBPM:P1us:x:Resolution1sM / S32IDFE-XBPM:P1us:x:Resolution1sM
S32IDFE-XBPM:P1us:x:Resolution8sM / S32IDFE-XBPM:P1us:x:Resolution8sM
S32IDFE-XBPM:P1us:x:Resolution64sM / S32IDFE-XBPM:P1us:x:Resolution64sM
S32IDFE-XBPM:P1us:x:StdDevM / S32IDFE-XBPM:P1us:x:StdDevM
S32IDFE-XBPM:P1us:x:StdDev1sM / S32IDFE-XBPM:P1us:x:StdDev1sM
S32IDFE-XBPM:P1us:x:StdDev8sM / S32IDFE-XBPM:P1us:x:StdDev8sM
S32IDFE-XBPM:P1us:x:StdDev64sM / S32IDFE-XBPM:P1us:x:StdDev64sM
S32IDFE-XBPM:P1us:x1:LowPass1sM / S32IDFE-XBPM:P1us:x1:LowPass1sM
S32IDFE-XBPM:P1us:x1:LowPass8sM / S32IDFE-XBPM:P1us:x1:LowPass8sM
S32IDFE-XBPM:P1us:x1:LowPass64sM / S32IDFE-XBPM:P1us:x1:LowPass64sM
S32IDFE-XBPM:P1us:x2:LowPass1sM / S32IDFE-XBPM:P1us:x2:LowPass1sM
S32IDFE-XBPM:P1us:x2:LowPass8sM / S32IDFE-XBPM:P1us:x2:LowPass8sM
S32IDFE-XBPM:P1us:x2:LowPass64sM / S32IDFE-XBPM:P1us:x2:LowPass64sM
S32IDFE-XBPM:P1us:y / S32IDFE-XBPM:P1us:y
S32IDFE-XBPM:P1us:y:CalFactor1M / S32IDFE-XBPM:P1us:y:CalFactor1M
S32IDFE-XBPM:P1us:y:CalFactor2M / S32IDFE-XBPM:P1us:y:CalFactor2M
S32IDFE-XBPM:P1us:y:LowPass1sM / S32IDFE-XBPM:P1us:y:LowPass1sM
S32IDFE-XBPM:P1us:y:LowPass8sM / S32IDFE-XBPM:P1us:y:LowPass8sM
S32IDFE-XBPM:P1us:y:LowPass64sM / S32IDFE-XBPM:P1us:y:LowPass64sM
S32IDFE-XBPM:P1us:y:Offset1M / S32IDFE-XBPM:P1us:y:Offset1M
S32IDFE-XBPM:P1us:y:Offset2M / S32IDFE-XBPM:P1us:y:Offset2M
S32IDFE-XBPM:P1us:y:ResolutionM / S32IDFE-XBPM:P1us:y:ResolutionM
S32IDFE-XBPM:P1us:y:Resolution1sM / S32IDFE-XBPM:P1us:y:Resolution1sM
S32IDFE-XBPM:P1us:y:Resolution8sM / S32IDFE-XBPM:P1us:y:Resolution8sM
S32IDFE-XBPM:P1us:y:Resolution64sM / S32IDFE-XBPM:P1us:y:Resolution64sM
S32IDFE-XBPM:P1us:y:StdDevM / S32IDFE-XBPM:P1us:y:StdDevM
S32IDFE-XBPM:P1us:y:StdDev1sM / S32IDFE-XBPM:P1us:y:StdDev1sM
S32IDFE-XBPM:P1us:y:StdDev8sM / S32IDFE-XBPM:P1us:y:StdDev8sM
S32IDFE-XBPM:P1us:y:StdDev64sM / S32IDFE-XBPM:P1us:y:StdDev64sM
S32IDFE-XBPM:P1us:y1:LowPass1sM / S32IDFE-XBPM:P1us:y1:LowPass1sM
S32IDFE-XBPM:P1us:y1:LowPass8sM / S32IDFE-XBPM:P1us:y1:LowPass8sM
S32IDFE-XBPM:P1us:y1:LowPass64sM / S32IDFE-XBPM:P1us:y1:LowPass64sM
S32IDFE-XBPM:P1us:y2:LowPass1sM / S32IDFE-XBPM:P1us:y2:LowPass1sM
S32IDFE-XBPM:P1us:y2:LowPass8sM / S32IDFE-XBPM:P1us:y2:LowPass8sM
S32IDFE-XBPM:P1us:y2:LowPass64sM / S32IDFE-XBPM:P1us:y2:LowPass64sM
S32IDFE-XBPM:P2ds:GapUsedC / S32IDFE-XBPM:P2ds:GapUsedC
S32IDFE-XBPM:P2ds:XCalM / S32IDFE-XBPM:P2ds:XCalM
S32IDFE-XBPM:P2ds:YCalM / S32IDFE-XBPM:P2ds:YCalM
S32IDFE-XBPM:P2ds:x:CalFactorM / S32IDFE-XBPM:P2ds:x:CalFactorM
S32IDFE-XBPM:P2ds:x:OffsetM / S32IDFE-XBPM:P2ds:x:OffsetM
S32IDFE-XBPM:P2ds:y:CalFactorM / S32IDFE-XBPM:P2ds:y:CalFactorM
S32IDFE-XBPM:P2ds:y:OffsetM / S32IDFE-XBPM:P2ds:y:OffsetM
S32IDFE-XBPM:P2us:GapUsedC / S32IDFE-XBPM:P2us:GapUsedC
S32IDFE-XBPM:P2us:XCalM / S32IDFE-XBPM:P2us:XCalM
S32IDFE-XBPM:P2us:YCalM / S32IDFE-XBPM:P2us:YCalM
S32IDFE-XBPM:P2us:x:CalFactorM / S32IDFE-XBPM:P2us:x:CalFactorM
S32IDFE-XBPM:P2us:x:OffsetM / S32IDFE-XBPM:P2us:x:OffsetM
S32IDFE-XBPM:P2us:y:CalFactorM / S32IDFE-XBPM:P2us:y:CalFactorM
S32IDFE-XBPM:P2us:y:OffsetM / S32IDFE-XBPM:P2us:y:OffsetM
S33BMFE-XBPM:P1:AM / S33BMFE-XBPM:P1:AM
S33BMFE-XBPM:P1:BM / S33BMFE-XBPM:P1:BM
S33BMFE-XBPM:P1:y / S33BMFE-XBPM:P1:y
S33BMFE-XBPM:P1:y:LowPass1sM / S33BMFE-XBPM:P1:y:LowPass1sM
S33BMFE-XBPM:P1:y:LowPass8sM / S33BMFE-XBPM:P1:y:LowPass8sM
S33BMFE-XBPM:P1:y:LowPass64sM / S33BMFE-XBPM:P1:y:LowPass64sM
S33BMFE-XBPM:P1:y:StdDevM / S33BMFE-XBPM:P1:y:StdDevM
S33BMFE-XBPM:P1:y:StdDev1sM / S33BMFE-XBPM:P1:y:StdDev1sM
S33BMFE-XBPM:P1:y:StdDev8sM / S33BMFE-XBPM:P1:y:StdDev8sM
S33BMFE-XBPM:P1:y:StdDev64sM / S33BMFE-XBPM:P1:y:StdDev64sM
S33BMFE-XBPM:P2:AM / S33BMFE-XBPM:P2:AM
S33BMFE-XBPM:P2:BM / S33BMFE-XBPM:P2:BM
S33BMFE-XBPM:P2:y / S33BMFE-XBPM:P2:y
S33BMFE-XBPM:P2:y:LowPass1sM / S33BMFE-XBPM:P2:y:LowPass1sM
S33BMFE-XBPM:P2:y:LowPass8sM / S33BMFE-XBPM:P2:y:LowPass8sM
S33BMFE-XBPM:P2:y:LowPass64sM / S33BMFE-XBPM:P2:y:LowPass64sM
S33BMFE-XBPM:P2:y:StdDevM / S33BMFE-XBPM:P2:y:StdDevM
S33BMFE-XBPM:P2:y:StdDev1sM / S33BMFE-XBPM:P2:y:StdDev1sM
S33BMFE-XBPM:P2:y:StdDev8sM / S33BMFE-XBPM:P2:y:StdDev8sM
S33BMFE-XBPM:P2:y:StdDev64sM / S33BMFE-XBPM:P2:y:StdDev64sM
S33IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S33IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S33IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S33IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S33IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S33IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S33IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S33IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S33IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S33IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S33IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S33IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S33IDFE-XBPM:CM1ds:PositionOffsetX / S33IDFE-XBPM:CM1ds:PositionOffsetX
S33IDFE-XBPM:CM1ds:PositionOffsetY / S33IDFE-XBPM:CM1ds:PositionOffsetY
S33IDFE-XBPM:CM1ds:PositionScaleX / S33IDFE-XBPM:CM1ds:PositionScaleX
S33IDFE-XBPM:CM1ds:PositionScaleY / S33IDFE-XBPM:CM1ds:PositionScaleY
S33IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S33IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S33IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S33IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S33IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S33IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S33IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S33IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S33IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S33IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S33IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S33IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S33IDFE-XBPM:CM2ds:PositionOffsetX / S33IDFE-XBPM:CM2ds:PositionOffsetX
S33IDFE-XBPM:CM2ds:PositionOffsetY / S33IDFE-XBPM:CM2ds:PositionOffsetY
S33IDFE-XBPM:CM2ds:PositionScaleX / S33IDFE-XBPM:CM2ds:PositionScaleX
S33IDFE-XBPM:CM2ds:PositionScaleY / S33IDFE-XBPM:CM2ds:PositionScaleY
S33IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S33IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S33IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S33IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S33IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S33IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S33IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S33IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S33IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S33IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S33IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S33IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S33IDFE-XBPM:CM3ds:PositionOffsetX / S33IDFE-XBPM:CM3ds:PositionOffsetX
S33IDFE-XBPM:CM3ds:PositionOffsetY / S33IDFE-XBPM:CM3ds:PositionOffsetY
S33IDFE-XBPM:CM3ds:PositionScaleX / S33IDFE-XBPM:CM3ds:PositionScaleX
S33IDFE-XBPM:CM3ds:PositionScaleY / S33IDFE-XBPM:CM3ds:PositionScaleY
S33IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S33IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S33IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S33IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S33IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S33IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S33IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S33IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S33IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S33IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S33IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S33IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S33IDFE-XBPM:CM4ds:PositionOffsetX / S33IDFE-XBPM:CM4ds:PositionOffsetX
S33IDFE-XBPM:CM4ds:PositionOffsetY / S33IDFE-XBPM:CM4ds:PositionOffsetY
S33IDFE-XBPM:CM4ds:PositionScaleX / S33IDFE-XBPM:CM4ds:PositionScaleX
S33IDFE-XBPM:CM4ds:PositionScaleY / S33IDFE-XBPM:CM4ds:PositionScaleY
S33IDFE-XBPM:P1ds:BMcUsedM / S33IDFE-XBPM:P1ds:BMcUsedM
S33IDFE-XBPM:P1ds:GapUsedC / S33IDFE-XBPM:P1ds:GapUsedC
S33IDFE-XBPM:P1ds:Wx1UsedM / S33IDFE-XBPM:P1ds:Wx1UsedM
S33IDFE-XBPM:P1ds:Wx2UsedM / S33IDFE-XBPM:P1ds:Wx2UsedM
S33IDFE-XBPM:P1ds:Wx3UsedM / S33IDFE-XBPM:P1ds:Wx3UsedM
S33IDFE-XBPM:P1ds:Wy1UsedM / S33IDFE-XBPM:P1ds:Wy1UsedM
S33IDFE-XBPM:P1ds:Wy2UsedM / S33IDFE-XBPM:P1ds:Wy2UsedM
S33IDFE-XBPM:P1ds:Wy3UsedM / S33IDFE-XBPM:P1ds:Wy3UsedM
S33IDFE-XBPM:P1ds:x / S33IDFE-XBPM:P1ds:x
S33IDFE-XBPM:P1ds:x:CalFactor1M / S33IDFE-XBPM:P1ds:x:CalFactor1M
S33IDFE-XBPM:P1ds:x:CalFactor2M / S33IDFE-XBPM:P1ds:x:CalFactor2M
S33IDFE-XBPM:P1ds:x:LowPass1sM / S33IDFE-XBPM:P1ds:x:LowPass1sM
S33IDFE-XBPM:P1ds:x:LowPass8sM / S33IDFE-XBPM:P1ds:x:LowPass8sM
S33IDFE-XBPM:P1ds:x:LowPass64sM / S33IDFE-XBPM:P1ds:x:LowPass64sM
S33IDFE-XBPM:P1ds:x:Offset1M / S33IDFE-XBPM:P1ds:x:Offset1M
S33IDFE-XBPM:P1ds:x:Offset2M / S33IDFE-XBPM:P1ds:x:Offset2M
S33IDFE-XBPM:P1ds:x:ResolutionM / S33IDFE-XBPM:P1ds:x:ResolutionM
S33IDFE-XBPM:P1ds:x:Resolution1sM / S33IDFE-XBPM:P1ds:x:Resolution1sM
S33IDFE-XBPM:P1ds:x:Resolution8sM / S33IDFE-XBPM:P1ds:x:Resolution8sM
S33IDFE-XBPM:P1ds:x:Resolution64sM / S33IDFE-XBPM:P1ds:x:Resolution64sM
S33IDFE-XBPM:P1ds:x:StdDevM / S33IDFE-XBPM:P1ds:x:StdDevM
S33IDFE-XBPM:P1ds:x:StdDev1sM / S33IDFE-XBPM:P1ds:x:StdDev1sM
S33IDFE-XBPM:P1ds:x:StdDev8sM / S33IDFE-XBPM:P1ds:x:StdDev8sM
S33IDFE-XBPM:P1ds:x:StdDev64sM / S33IDFE-XBPM:P1ds:x:StdDev64sM
S33IDFE-XBPM:P1ds:x1:LowPass1sM / S33IDFE-XBPM:P1ds:x1:LowPass1sM
S33IDFE-XBPM:P1ds:x1:LowPass8sM / S33IDFE-XBPM:P1ds:x1:LowPass8sM
S33IDFE-XBPM:P1ds:x1:LowPass64sM / S33IDFE-XBPM:P1ds:x1:LowPass64sM
S33IDFE-XBPM:P1ds:x2:LowPass1sM / S33IDFE-XBPM:P1ds:x2:LowPass1sM
S33IDFE-XBPM:P1ds:x2:LowPass8sM / S33IDFE-XBPM:P1ds:x2:LowPass8sM
S33IDFE-XBPM:P1ds:x2:LowPass64sM / S33IDFE-XBPM:P1ds:x2:LowPass64sM
S33IDFE-XBPM:P1ds:y / S33IDFE-XBPM:P1ds:y
S33IDFE-XBPM:P1ds:y:CalFactor1M / S33IDFE-XBPM:P1ds:y:CalFactor1M
S33IDFE-XBPM:P1ds:y:CalFactor2M / S33IDFE-XBPM:P1ds:y:CalFactor2M
S33IDFE-XBPM:P1ds:y:LowPass1sM / S33IDFE-XBPM:P1ds:y:LowPass1sM
S33IDFE-XBPM:P1ds:y:LowPass8sM / S33IDFE-XBPM:P1ds:y:LowPass8sM
S33IDFE-XBPM:P1ds:y:LowPass64sM / S33IDFE-XBPM:P1ds:y:LowPass64sM
S33IDFE-XBPM:P1ds:y:Offset1M / S33IDFE-XBPM:P1ds:y:Offset1M
S33IDFE-XBPM:P1ds:y:Offset2M / S33IDFE-XBPM:P1ds:y:Offset2M
S33IDFE-XBPM:P1ds:y:ResolutionM / S33IDFE-XBPM:P1ds:y:ResolutionM
S33IDFE-XBPM:P1ds:y:Resolution1sM / S33IDFE-XBPM:P1ds:y:Resolution1sM
S33IDFE-XBPM:P1ds:y:Resolution8sM / S33IDFE-XBPM:P1ds:y:Resolution8sM
S33IDFE-XBPM:P1ds:y:Resolution64sM / S33IDFE-XBPM:P1ds:y:Resolution64sM
S33IDFE-XBPM:P1ds:y:StdDevM / S33IDFE-XBPM:P1ds:y:StdDevM
S33IDFE-XBPM:P1ds:y:StdDev1sM / S33IDFE-XBPM:P1ds:y:StdDev1sM
S33IDFE-XBPM:P1ds:y:StdDev8sM / S33IDFE-XBPM:P1ds:y:StdDev8sM
S33IDFE-XBPM:P1ds:y:StdDev64sM / S33IDFE-XBPM:P1ds:y:StdDev64sM
S33IDFE-XBPM:P1ds:y1:LowPass1sM / S33IDFE-XBPM:P1ds:y1:LowPass1sM
S33IDFE-XBPM:P1ds:y1:LowPass8sM / S33IDFE-XBPM:P1ds:y1:LowPass8sM
S33IDFE-XBPM:P1ds:y1:LowPass64sM / S33IDFE-XBPM:P1ds:y1:LowPass64sM
S33IDFE-XBPM:P1ds:y2:LowPass1sM / S33IDFE-XBPM:P1ds:y2:LowPass1sM
S33IDFE-XBPM:P1ds:y2:LowPass8sM / S33IDFE-XBPM:P1ds:y2:LowPass8sM
S33IDFE-XBPM:P1ds:y2:LowPass64sM / S33IDFE-XBPM:P1ds:y2:LowPass64sM
S33IDFE-XBPM:P2ds:GapUsedC / S33IDFE-XBPM:P2ds:GapUsedC
S33IDFE-XBPM:P2ds:XCalM / S33IDFE-XBPM:P2ds:XCalM
S33IDFE-XBPM:P2ds:YCalM / S33IDFE-XBPM:P2ds:YCalM
S33IDFE-XBPM:P2ds:x:CalFactorM / S33IDFE-XBPM:P2ds:x:CalFactorM
S33IDFE-XBPM:P2ds:x:OffsetM / S33IDFE-XBPM:P2ds:x:OffsetM
S33IDFE-XBPM:P2ds:y:CalFactorM / S33IDFE-XBPM:P2ds:y:CalFactorM
S33IDFE-XBPM:P2ds:y:OffsetM / S33IDFE-XBPM:P2ds:y:OffsetM
S34IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S34IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S34IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S34IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S34IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S34IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S34IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S34IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S34IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S34IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S34IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S34IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S34IDFE-XBPM:CM1ds:PositionOffsetX / S34IDFE-XBPM:CM1ds:PositionOffsetX
S34IDFE-XBPM:CM1ds:PositionOffsetY / S34IDFE-XBPM:CM1ds:PositionOffsetY
S34IDFE-XBPM:CM1ds:PositionScaleX / S34IDFE-XBPM:CM1ds:PositionScaleX
S34IDFE-XBPM:CM1ds:PositionScaleY / S34IDFE-XBPM:CM1ds:PositionScaleY
S34IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S34IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S34IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S34IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S34IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S34IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S34IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S34IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S34IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S34IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S34IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S34IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S34IDFE-XBPM:CM1us:PositionOffsetX / S34IDFE-XBPM:CM1us:PositionOffsetX
S34IDFE-XBPM:CM1us:PositionOffsetY / S34IDFE-XBPM:CM1us:PositionOffsetY
S34IDFE-XBPM:CM1us:PositionScaleX / S34IDFE-XBPM:CM1us:PositionScaleX
S34IDFE-XBPM:CM1us:PositionScaleY / S34IDFE-XBPM:CM1us:PositionScaleY
S34IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S34IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S34IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S34IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S34IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S34IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S34IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S34IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S34IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S34IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S34IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S34IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S34IDFE-XBPM:CM2ds:PositionOffsetX / S34IDFE-XBPM:CM2ds:PositionOffsetX
S34IDFE-XBPM:CM2ds:PositionOffsetY / S34IDFE-XBPM:CM2ds:PositionOffsetY
S34IDFE-XBPM:CM2ds:PositionScaleX / S34IDFE-XBPM:CM2ds:PositionScaleX
S34IDFE-XBPM:CM2ds:PositionScaleY / S34IDFE-XBPM:CM2ds:PositionScaleY
S34IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S34IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S34IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S34IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S34IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S34IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S34IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S34IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S34IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S34IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S34IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S34IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S34IDFE-XBPM:CM2us:PositionOffsetX / S34IDFE-XBPM:CM2us:PositionOffsetX
S34IDFE-XBPM:CM2us:PositionOffsetY / S34IDFE-XBPM:CM2us:PositionOffsetY
S34IDFE-XBPM:CM2us:PositionScaleX / S34IDFE-XBPM:CM2us:PositionScaleX
S34IDFE-XBPM:CM2us:PositionScaleY / S34IDFE-XBPM:CM2us:PositionScaleY
S34IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S34IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S34IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S34IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S34IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S34IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S34IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S34IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S34IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S34IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S34IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S34IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S34IDFE-XBPM:CM3ds:PositionOffsetX / S34IDFE-XBPM:CM3ds:PositionOffsetX
S34IDFE-XBPM:CM3ds:PositionOffsetY / S34IDFE-XBPM:CM3ds:PositionOffsetY
S34IDFE-XBPM:CM3ds:PositionScaleX / S34IDFE-XBPM:CM3ds:PositionScaleX
S34IDFE-XBPM:CM3ds:PositionScaleY / S34IDFE-XBPM:CM3ds:PositionScaleY
S34IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S34IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S34IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S34IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S34IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S34IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S34IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S34IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S34IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S34IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S34IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S34IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S34IDFE-XBPM:CM3us:PositionOffsetX / S34IDFE-XBPM:CM3us:PositionOffsetX
S34IDFE-XBPM:CM3us:PositionOffsetY / S34IDFE-XBPM:CM3us:PositionOffsetY
S34IDFE-XBPM:CM3us:PositionScaleX / S34IDFE-XBPM:CM3us:PositionScaleX
S34IDFE-XBPM:CM3us:PositionScaleY / S34IDFE-XBPM:CM3us:PositionScaleY
S34IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S34IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S34IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S34IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S34IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S34IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S34IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S34IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S34IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S34IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S34IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S34IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S34IDFE-XBPM:CM4ds:PositionOffsetX / S34IDFE-XBPM:CM4ds:PositionOffsetX
S34IDFE-XBPM:CM4ds:PositionOffsetY / S34IDFE-XBPM:CM4ds:PositionOffsetY
S34IDFE-XBPM:CM4ds:PositionScaleX / S34IDFE-XBPM:CM4ds:PositionScaleX
S34IDFE-XBPM:CM4ds:PositionScaleY / S34IDFE-XBPM:CM4ds:PositionScaleY
S34IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S34IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S34IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S34IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S34IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S34IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S34IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S34IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S34IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S34IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S34IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S34IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S34IDFE-XBPM:CM4us:PositionOffsetX / S34IDFE-XBPM:CM4us:PositionOffsetX
S34IDFE-XBPM:CM4us:PositionOffsetY / S34IDFE-XBPM:CM4us:PositionOffsetY
S34IDFE-XBPM:CM4us:PositionScaleX / S34IDFE-XBPM:CM4us:PositionScaleX
S34IDFE-XBPM:CM4us:PositionScaleY / S34IDFE-XBPM:CM4us:PositionScaleY
S34IDFE-XBPM:P1ds:BMcUsedM / S34IDFE-XBPM:P1ds:BMcUsedM
S34IDFE-XBPM:P1ds:GapUsedC / S34IDFE-XBPM:P1ds:GapUsedC
S34IDFE-XBPM:P1ds:Wx1UsedM / S34IDFE-XBPM:P1ds:Wx1UsedM
S34IDFE-XBPM:P1ds:Wx2UsedM / S34IDFE-XBPM:P1ds:Wx2UsedM
S34IDFE-XBPM:P1ds:Wx3UsedM / S34IDFE-XBPM:P1ds:Wx3UsedM
S34IDFE-XBPM:P1ds:Wy1UsedM / S34IDFE-XBPM:P1ds:Wy1UsedM
S34IDFE-XBPM:P1ds:Wy2UsedM / S34IDFE-XBPM:P1ds:Wy2UsedM
S34IDFE-XBPM:P1ds:Wy3UsedM / S34IDFE-XBPM:P1ds:Wy3UsedM
S34IDFE-XBPM:P1ds:x / S34IDFE-XBPM:P1ds:x
S34IDFE-XBPM:P1ds:x:CalFactor1M / S34IDFE-XBPM:P1ds:x:CalFactor1M
S34IDFE-XBPM:P1ds:x:CalFactor2M / S34IDFE-XBPM:P1ds:x:CalFactor2M
S34IDFE-XBPM:P1ds:x:LowPass1sM / S34IDFE-XBPM:P1ds:x:LowPass1sM
S34IDFE-XBPM:P1ds:x:LowPass8sM / S34IDFE-XBPM:P1ds:x:LowPass8sM
S34IDFE-XBPM:P1ds:x:LowPass64sM / S34IDFE-XBPM:P1ds:x:LowPass64sM
S34IDFE-XBPM:P1ds:x:Offset1M / S34IDFE-XBPM:P1ds:x:Offset1M
S34IDFE-XBPM:P1ds:x:Offset2M / S34IDFE-XBPM:P1ds:x:Offset2M
S34IDFE-XBPM:P1ds:x:ResolutionM / S34IDFE-XBPM:P1ds:x:ResolutionM
S34IDFE-XBPM:P1ds:x:Resolution1sM / S34IDFE-XBPM:P1ds:x:Resolution1sM
S34IDFE-XBPM:P1ds:x:Resolution8sM / S34IDFE-XBPM:P1ds:x:Resolution8sM
S34IDFE-XBPM:P1ds:x:Resolution64sM / S34IDFE-XBPM:P1ds:x:Resolution64sM
S34IDFE-XBPM:P1ds:x:StdDevM / S34IDFE-XBPM:P1ds:x:StdDevM
S34IDFE-XBPM:P1ds:x:StdDev1sM / S34IDFE-XBPM:P1ds:x:StdDev1sM
S34IDFE-XBPM:P1ds:x:StdDev8sM / S34IDFE-XBPM:P1ds:x:StdDev8sM
S34IDFE-XBPM:P1ds:x:StdDev64sM / S34IDFE-XBPM:P1ds:x:StdDev64sM
S34IDFE-XBPM:P1ds:x1:LowPass1sM / S34IDFE-XBPM:P1ds:x1:LowPass1sM
S34IDFE-XBPM:P1ds:x1:LowPass8sM / S34IDFE-XBPM:P1ds:x1:LowPass8sM
S34IDFE-XBPM:P1ds:x1:LowPass64sM / S34IDFE-XBPM:P1ds:x1:LowPass64sM
S34IDFE-XBPM:P1ds:x2:LowPass1sM / S34IDFE-XBPM:P1ds:x2:LowPass1sM
S34IDFE-XBPM:P1ds:x2:LowPass8sM / S34IDFE-XBPM:P1ds:x2:LowPass8sM
S34IDFE-XBPM:P1ds:x2:LowPass64sM / S34IDFE-XBPM:P1ds:x2:LowPass64sM
S34IDFE-XBPM:P1ds:y / S34IDFE-XBPM:P1ds:y
S34IDFE-XBPM:P1ds:y:CalFactor1M / S34IDFE-XBPM:P1ds:y:CalFactor1M
S34IDFE-XBPM:P1ds:y:CalFactor2M / S34IDFE-XBPM:P1ds:y:CalFactor2M
S34IDFE-XBPM:P1ds:y:LowPass1sM / S34IDFE-XBPM:P1ds:y:LowPass1sM
S34IDFE-XBPM:P1ds:y:LowPass8sM / S34IDFE-XBPM:P1ds:y:LowPass8sM
S34IDFE-XBPM:P1ds:y:LowPass64sM / S34IDFE-XBPM:P1ds:y:LowPass64sM
S34IDFE-XBPM:P1ds:y:Offset1M / S34IDFE-XBPM:P1ds:y:Offset1M
S34IDFE-XBPM:P1ds:y:Offset2M / S34IDFE-XBPM:P1ds:y:Offset2M
S34IDFE-XBPM:P1ds:y:ResolutionM / S34IDFE-XBPM:P1ds:y:ResolutionM
S34IDFE-XBPM:P1ds:y:Resolution1sM / S34IDFE-XBPM:P1ds:y:Resolution1sM
S34IDFE-XBPM:P1ds:y:Resolution8sM / S34IDFE-XBPM:P1ds:y:Resolution8sM
S34IDFE-XBPM:P1ds:y:Resolution64sM / S34IDFE-XBPM:P1ds:y:Resolution64sM
S34IDFE-XBPM:P1ds:y:StdDevM / S34IDFE-XBPM:P1ds:y:StdDevM
S34IDFE-XBPM:P1ds:y:StdDev1sM / S34IDFE-XBPM:P1ds:y:StdDev1sM
S34IDFE-XBPM:P1ds:y:StdDev8sM / S34IDFE-XBPM:P1ds:y:StdDev8sM
S34IDFE-XBPM:P1ds:y:StdDev64sM / S34IDFE-XBPM:P1ds:y:StdDev64sM
S34IDFE-XBPM:P1ds:y1:LowPass1sM / S34IDFE-XBPM:P1ds:y1:LowPass1sM
S34IDFE-XBPM:P1ds:y1:LowPass8sM / S34IDFE-XBPM:P1ds:y1:LowPass8sM
S34IDFE-XBPM:P1ds:y1:LowPass64sM / S34IDFE-XBPM:P1ds:y1:LowPass64sM
S34IDFE-XBPM:P1ds:y2:LowPass1sM / S34IDFE-XBPM:P1ds:y2:LowPass1sM
S34IDFE-XBPM:P1ds:y2:LowPass8sM / S34IDFE-XBPM:P1ds:y2:LowPass8sM
S34IDFE-XBPM:P1ds:y2:LowPass64sM / S34IDFE-XBPM:P1ds:y2:LowPass64sM
S34IDFE-XBPM:P1us:BMcUsedM / S34IDFE-XBPM:P1us:BMcUsedM
S34IDFE-XBPM:P1us:GapUsedC / S34IDFE-XBPM:P1us:GapUsedC
S34IDFE-XBPM:P1us:Wx1UsedM / S34IDFE-XBPM:P1us:Wx1UsedM
S34IDFE-XBPM:P1us:Wx2UsedM / S34IDFE-XBPM:P1us:Wx2UsedM
S34IDFE-XBPM:P1us:Wx3UsedM / S34IDFE-XBPM:P1us:Wx3UsedM
S34IDFE-XBPM:P1us:Wy1UsedM / S34IDFE-XBPM:P1us:Wy1UsedM
S34IDFE-XBPM:P1us:Wy2UsedM / S34IDFE-XBPM:P1us:Wy2UsedM
S34IDFE-XBPM:P1us:Wy3UsedM / S34IDFE-XBPM:P1us:Wy3UsedM
S34IDFE-XBPM:P1us:x / S34IDFE-XBPM:P1us:x
S34IDFE-XBPM:P1us:x:CalFactor1M / S34IDFE-XBPM:P1us:x:CalFactor1M
S34IDFE-XBPM:P1us:x:CalFactor2M / S34IDFE-XBPM:P1us:x:CalFactor2M
S34IDFE-XBPM:P1us:x:LowPass1sM / S34IDFE-XBPM:P1us:x:LowPass1sM
S34IDFE-XBPM:P1us:x:LowPass8sM / S34IDFE-XBPM:P1us:x:LowPass8sM
S34IDFE-XBPM:P1us:x:LowPass64sM / S34IDFE-XBPM:P1us:x:LowPass64sM
S34IDFE-XBPM:P1us:x:Offset1M / S34IDFE-XBPM:P1us:x:Offset1M
S34IDFE-XBPM:P1us:x:Offset2M / S34IDFE-XBPM:P1us:x:Offset2M
S34IDFE-XBPM:P1us:x:ResolutionM / S34IDFE-XBPM:P1us:x:ResolutionM
S34IDFE-XBPM:P1us:x:Resolution1sM / S34IDFE-XBPM:P1us:x:Resolution1sM
S34IDFE-XBPM:P1us:x:Resolution8sM / S34IDFE-XBPM:P1us:x:Resolution8sM
S34IDFE-XBPM:P1us:x:Resolution64sM / S34IDFE-XBPM:P1us:x:Resolution64sM
S34IDFE-XBPM:P1us:x:StdDevM / S34IDFE-XBPM:P1us:x:StdDevM
S34IDFE-XBPM:P1us:x:StdDev1sM / S34IDFE-XBPM:P1us:x:StdDev1sM
S34IDFE-XBPM:P1us:x:StdDev8sM / S34IDFE-XBPM:P1us:x:StdDev8sM
S34IDFE-XBPM:P1us:x:StdDev64sM / S34IDFE-XBPM:P1us:x:StdDev64sM
S34IDFE-XBPM:P1us:x1:LowPass1sM / S34IDFE-XBPM:P1us:x1:LowPass1sM
S34IDFE-XBPM:P1us:x1:LowPass8sM / S34IDFE-XBPM:P1us:x1:LowPass8sM
S34IDFE-XBPM:P1us:x1:LowPass64sM / S34IDFE-XBPM:P1us:x1:LowPass64sM
S34IDFE-XBPM:P1us:x2:LowPass1sM / S34IDFE-XBPM:P1us:x2:LowPass1sM
S34IDFE-XBPM:P1us:x2:LowPass8sM / S34IDFE-XBPM:P1us:x2:LowPass8sM
S34IDFE-XBPM:P1us:x2:LowPass64sM / S34IDFE-XBPM:P1us:x2:LowPass64sM
S34IDFE-XBPM:P1us:y / S34IDFE-XBPM:P1us:y
S34IDFE-XBPM:P1us:y:CalFactor1M / S34IDFE-XBPM:P1us:y:CalFactor1M
S34IDFE-XBPM:P1us:y:CalFactor2M / S34IDFE-XBPM:P1us:y:CalFactor2M
S34IDFE-XBPM:P1us:y:LowPass1sM / S34IDFE-XBPM:P1us:y:LowPass1sM
S34IDFE-XBPM:P1us:y:LowPass8sM / S34IDFE-XBPM:P1us:y:LowPass8sM
S34IDFE-XBPM:P1us:y:LowPass64sM / S34IDFE-XBPM:P1us:y:LowPass64sM
S34IDFE-XBPM:P1us:y:Offset1M / S34IDFE-XBPM:P1us:y:Offset1M
S34IDFE-XBPM:P1us:y:Offset2M / S34IDFE-XBPM:P1us:y:Offset2M
S34IDFE-XBPM:P1us:y:ResolutionM / S34IDFE-XBPM:P1us:y:ResolutionM
S34IDFE-XBPM:P1us:y:Resolution1sM / S34IDFE-XBPM:P1us:y:Resolution1sM
S34IDFE-XBPM:P1us:y:Resolution8sM / S34IDFE-XBPM:P1us:y:Resolution8sM
S34IDFE-XBPM:P1us:y:Resolution64sM / S34IDFE-XBPM:P1us:y:Resolution64sM
S34IDFE-XBPM:P1us:y:StdDevM / S34IDFE-XBPM:P1us:y:StdDevM
S34IDFE-XBPM:P1us:y:StdDev1sM / S34IDFE-XBPM:P1us:y:StdDev1sM
S34IDFE-XBPM:P1us:y:StdDev8sM / S34IDFE-XBPM:P1us:y:StdDev8sM
S34IDFE-XBPM:P1us:y:StdDev64sM / S34IDFE-XBPM:P1us:y:StdDev64sM
S34IDFE-XBPM:P1us:y1:LowPass1sM / S34IDFE-XBPM:P1us:y1:LowPass1sM
S34IDFE-XBPM:P1us:y1:LowPass8sM / S34IDFE-XBPM:P1us:y1:LowPass8sM
S34IDFE-XBPM:P1us:y1:LowPass64sM / S34IDFE-XBPM:P1us:y1:LowPass64sM
S34IDFE-XBPM:P1us:y2:LowPass1sM / S34IDFE-XBPM:P1us:y2:LowPass1sM
S34IDFE-XBPM:P1us:y2:LowPass8sM / S34IDFE-XBPM:P1us:y2:LowPass8sM
S34IDFE-XBPM:P1us:y2:LowPass64sM / S34IDFE-XBPM:P1us:y2:LowPass64sM
S34IDFE-XBPM:P2ds:GapUsedC / S34IDFE-XBPM:P2ds:GapUsedC
S34IDFE-XBPM:P2ds:XCalM / S34IDFE-XBPM:P2ds:XCalM
S34IDFE-XBPM:P2ds:YCalM / S34IDFE-XBPM:P2ds:YCalM
S34IDFE-XBPM:P2ds:x:CalFactorM / S34IDFE-XBPM:P2ds:x:CalFactorM
S34IDFE-XBPM:P2ds:x:OffsetM / S34IDFE-XBPM:P2ds:x:OffsetM
S34IDFE-XBPM:P2ds:y:CalFactorM / S34IDFE-XBPM:P2ds:y:CalFactorM
S34IDFE-XBPM:P2ds:y:OffsetM / S34IDFE-XBPM:P2ds:y:OffsetM
S34IDFE-XBPM:P2us:GapUsedC / S34IDFE-XBPM:P2us:GapUsedC
S34IDFE-XBPM:P2us:XCalM / S34IDFE-XBPM:P2us:XCalM
S34IDFE-XBPM:P2us:YCalM / S34IDFE-XBPM:P2us:YCalM
S34IDFE-XBPM:P2us:x:CalFactorM / S34IDFE-XBPM:P2us:x:CalFactorM
S34IDFE-XBPM:P2us:x:OffsetM / S34IDFE-XBPM:P2us:x:OffsetM
S34IDFE-XBPM:P2us:y:CalFactorM / S34IDFE-XBPM:P2us:y:CalFactorM
S34IDFE-XBPM:P2us:y:OffsetM / S34IDFE-XBPM:P2us:y:OffsetM
S35BMFE-XBPM:P1:AM / S35BMFE-XBPM:P1:AM
S35BMFE-XBPM:P1:BM / S35BMFE-XBPM:P1:BM
S35BMFE-XBPM:P1:y / S35BMFE-XBPM:P1:y
S35BMFE-XBPM:P1:y:LowPass1sM / S35BMFE-XBPM:P1:y:LowPass1sM
S35BMFE-XBPM:P1:y:LowPass8sM / S35BMFE-XBPM:P1:y:LowPass8sM
S35BMFE-XBPM:P1:y:LowPass64sM / S35BMFE-XBPM:P1:y:LowPass64sM
S35BMFE-XBPM:P1:y:StdDevM / S35BMFE-XBPM:P1:y:StdDevM
S35BMFE-XBPM:P1:y:StdDev1sM / S35BMFE-XBPM:P1:y:StdDev1sM
S35BMFE-XBPM:P1:y:StdDev8sM / S35BMFE-XBPM:P1:y:StdDev8sM
S35BMFE-XBPM:P1:y:StdDev64sM / S35BMFE-XBPM:P1:y:StdDev64sM
S35BMFE-XBPM:P2:AM / S35BMFE-XBPM:P2:AM
S35BMFE-XBPM:P2:BM / S35BMFE-XBPM:P2:BM
S35BMFE-XBPM:P2:y / S35BMFE-XBPM:P2:y
S35BMFE-XBPM:P2:y:LowPass1sM / S35BMFE-XBPM:P2:y:LowPass1sM
S35BMFE-XBPM:P2:y:LowPass8sM / S35BMFE-XBPM:P2:y:LowPass8sM
S35BMFE-XBPM:P2:y:LowPass64sM / S35BMFE-XBPM:P2:y:LowPass64sM
S35BMFE-XBPM:P2:y:StdDevM / S35BMFE-XBPM:P2:y:StdDevM
S35BMFE-XBPM:P2:y:StdDev1sM / S35BMFE-XBPM:P2:y:StdDev1sM
S35BMFE-XBPM:P2:y:StdDev8sM / S35BMFE-XBPM:P2:y:StdDev8sM
S35BMFE-XBPM:P2:y:StdDev64sM / S35BMFE-XBPM:P2:y:StdDev64sM
S35IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S35IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S35IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S35IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S35IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S35IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S35IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S35IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S35IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S35IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S35IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S35IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S35IDFE-XBPM:CM1ds:PositionOffsetX / S35IDFE-XBPM:CM1ds:PositionOffsetX
S35IDFE-XBPM:CM1ds:PositionOffsetY / S35IDFE-XBPM:CM1ds:PositionOffsetY
S35IDFE-XBPM:CM1ds:PositionScaleX / S35IDFE-XBPM:CM1ds:PositionScaleX
S35IDFE-XBPM:CM1ds:PositionScaleY / S35IDFE-XBPM:CM1ds:PositionScaleY
S35IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S35IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S35IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S35IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S35IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S35IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S35IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S35IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S35IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S35IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S35IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S35IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S35IDFE-XBPM:CM2ds:PositionOffsetX / S35IDFE-XBPM:CM2ds:PositionOffsetX
S35IDFE-XBPM:CM2ds:PositionOffsetY / S35IDFE-XBPM:CM2ds:PositionOffsetY
S35IDFE-XBPM:CM2ds:PositionScaleX / S35IDFE-XBPM:CM2ds:PositionScaleX
S35IDFE-XBPM:CM2ds:PositionScaleY / S35IDFE-XBPM:CM2ds:PositionScaleY
S35IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S35IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S35IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S35IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S35IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S35IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S35IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S35IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S35IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S35IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S35IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S35IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S35IDFE-XBPM:CM3ds:PositionOffsetX / S35IDFE-XBPM:CM3ds:PositionOffsetX
S35IDFE-XBPM:CM3ds:PositionOffsetY / S35IDFE-XBPM:CM3ds:PositionOffsetY
S35IDFE-XBPM:CM3ds:PositionScaleX / S35IDFE-XBPM:CM3ds:PositionScaleX
S35IDFE-XBPM:CM3ds:PositionScaleY / S35IDFE-XBPM:CM3ds:PositionScaleY
S35IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S35IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S35IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S35IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S35IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S35IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S35IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S35IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S35IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S35IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S35IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S35IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S35IDFE-XBPM:CM4ds:PositionOffsetX / S35IDFE-XBPM:CM4ds:PositionOffsetX
S35IDFE-XBPM:CM4ds:PositionOffsetY / S35IDFE-XBPM:CM4ds:PositionOffsetY
S35IDFE-XBPM:CM4ds:PositionScaleX / S35IDFE-XBPM:CM4ds:PositionScaleX
S35IDFE-XBPM:CM4ds:PositionScaleY / S35IDFE-XBPM:CM4ds:PositionScaleY
S35IDFE-XBPM:P1ds:BMcUsedM / S35IDFE-XBPM:P1ds:BMcUsedM
S35IDFE-XBPM:P1ds:GapUsedC / S35IDFE-XBPM:P1ds:GapUsedC
S35IDFE-XBPM:P1ds:Wx1UsedM / S35IDFE-XBPM:P1ds:Wx1UsedM
S35IDFE-XBPM:P1ds:Wx2UsedM / S35IDFE-XBPM:P1ds:Wx2UsedM
S35IDFE-XBPM:P1ds:Wx3UsedM / S35IDFE-XBPM:P1ds:Wx3UsedM
S35IDFE-XBPM:P1ds:Wy1UsedM / S35IDFE-XBPM:P1ds:Wy1UsedM
S35IDFE-XBPM:P1ds:Wy2UsedM / S35IDFE-XBPM:P1ds:Wy2UsedM
S35IDFE-XBPM:P1ds:Wy3UsedM / S35IDFE-XBPM:P1ds:Wy3UsedM
S35IDFE-XBPM:P1ds:x / S35IDFE-XBPM:P1ds:x
S35IDFE-XBPM:P1ds:x:CalFactor1M / S35IDFE-XBPM:P1ds:x:CalFactor1M
S35IDFE-XBPM:P1ds:x:CalFactor2M / S35IDFE-XBPM:P1ds:x:CalFactor2M
S35IDFE-XBPM:P1ds:x:LowPass1sM / S35IDFE-XBPM:P1ds:x:LowPass1sM
S35IDFE-XBPM:P1ds:x:LowPass8sM / S35IDFE-XBPM:P1ds:x:LowPass8sM
S35IDFE-XBPM:P1ds:x:LowPass64sM / S35IDFE-XBPM:P1ds:x:LowPass64sM
S35IDFE-XBPM:P1ds:x:Offset1M / S35IDFE-XBPM:P1ds:x:Offset1M
S35IDFE-XBPM:P1ds:x:Offset2M / S35IDFE-XBPM:P1ds:x:Offset2M
S35IDFE-XBPM:P1ds:x:ResolutionM / S35IDFE-XBPM:P1ds:x:ResolutionM
S35IDFE-XBPM:P1ds:x:Resolution1sM / S35IDFE-XBPM:P1ds:x:Resolution1sM
S35IDFE-XBPM:P1ds:x:Resolution8sM / S35IDFE-XBPM:P1ds:x:Resolution8sM
S35IDFE-XBPM:P1ds:x:Resolution64sM / S35IDFE-XBPM:P1ds:x:Resolution64sM
S35IDFE-XBPM:P1ds:x:StdDevM / S35IDFE-XBPM:P1ds:x:StdDevM
S35IDFE-XBPM:P1ds:x:StdDev1sM / S35IDFE-XBPM:P1ds:x:StdDev1sM
S35IDFE-XBPM:P1ds:x:StdDev8sM / S35IDFE-XBPM:P1ds:x:StdDev8sM
S35IDFE-XBPM:P1ds:x:StdDev64sM / S35IDFE-XBPM:P1ds:x:StdDev64sM
S35IDFE-XBPM:P1ds:x1:LowPass1sM / S35IDFE-XBPM:P1ds:x1:LowPass1sM
S35IDFE-XBPM:P1ds:x1:LowPass8sM / S35IDFE-XBPM:P1ds:x1:LowPass8sM
S35IDFE-XBPM:P1ds:x1:LowPass64sM / S35IDFE-XBPM:P1ds:x1:LowPass64sM
S35IDFE-XBPM:P1ds:x2:LowPass1sM / S35IDFE-XBPM:P1ds:x2:LowPass1sM
S35IDFE-XBPM:P1ds:x2:LowPass8sM / S35IDFE-XBPM:P1ds:x2:LowPass8sM
S35IDFE-XBPM:P1ds:x2:LowPass64sM / S35IDFE-XBPM:P1ds:x2:LowPass64sM
S35IDFE-XBPM:P1ds:y / S35IDFE-XBPM:P1ds:y
S35IDFE-XBPM:P1ds:y:CalFactor1M / S35IDFE-XBPM:P1ds:y:CalFactor1M
S35IDFE-XBPM:P1ds:y:CalFactor2M / S35IDFE-XBPM:P1ds:y:CalFactor2M
S35IDFE-XBPM:P1ds:y:LowPass1sM / S35IDFE-XBPM:P1ds:y:LowPass1sM
S35IDFE-XBPM:P1ds:y:LowPass8sM / S35IDFE-XBPM:P1ds:y:LowPass8sM
S35IDFE-XBPM:P1ds:y:LowPass64sM / S35IDFE-XBPM:P1ds:y:LowPass64sM
S35IDFE-XBPM:P1ds:y:Offset1M / S35IDFE-XBPM:P1ds:y:Offset1M
S35IDFE-XBPM:P1ds:y:Offset2M / S35IDFE-XBPM:P1ds:y:Offset2M
S35IDFE-XBPM:P1ds:y:ResolutionM / S35IDFE-XBPM:P1ds:y:ResolutionM
S35IDFE-XBPM:P1ds:y:Resolution1sM / S35IDFE-XBPM:P1ds:y:Resolution1sM
S35IDFE-XBPM:P1ds:y:Resolution8sM / S35IDFE-XBPM:P1ds:y:Resolution8sM
S35IDFE-XBPM:P1ds:y:Resolution64sM / S35IDFE-XBPM:P1ds:y:Resolution64sM
S35IDFE-XBPM:P1ds:y:StdDevM / S35IDFE-XBPM:P1ds:y:StdDevM
S35IDFE-XBPM:P1ds:y:StdDev1sM / S35IDFE-XBPM:P1ds:y:StdDev1sM
S35IDFE-XBPM:P1ds:y:StdDev8sM / S35IDFE-XBPM:P1ds:y:StdDev8sM
S35IDFE-XBPM:P1ds:y:StdDev64sM / S35IDFE-XBPM:P1ds:y:StdDev64sM
S35IDFE-XBPM:P1ds:y1:LowPass1sM / S35IDFE-XBPM:P1ds:y1:LowPass1sM
S35IDFE-XBPM:P1ds:y1:LowPass8sM / S35IDFE-XBPM:P1ds:y1:LowPass8sM
S35IDFE-XBPM:P1ds:y1:LowPass64sM / S35IDFE-XBPM:P1ds:y1:LowPass64sM
S35IDFE-XBPM:P1ds:y2:LowPass1sM / S35IDFE-XBPM:P1ds:y2:LowPass1sM
S35IDFE-XBPM:P1ds:y2:LowPass8sM / S35IDFE-XBPM:P1ds:y2:LowPass8sM
S35IDFE-XBPM:P1ds:y2:LowPass64sM / S35IDFE-XBPM:P1ds:y2:LowPass64sM
S35IDFE-XBPM:P2ds:GapUsedC / S35IDFE-XBPM:P2ds:GapUsedC
S35IDFE-XBPM:P2ds:XCalM / S35IDFE-XBPM:P2ds:XCalM
S35IDFE-XBPM:P2ds:YCalM / S35IDFE-XBPM:P2ds:YCalM
S35IDFE-XBPM:P2ds:x:CalFactorM / S35IDFE-XBPM:P2ds:x:CalFactorM
S35IDFE-XBPM:P2ds:x:OffsetM / S35IDFE-XBPM:P2ds:x:OffsetM
S35IDFE-XBPM:P2ds:y:CalFactorM / S35IDFE-XBPM:P2ds:y:CalFactorM
S35IDFE-XBPM:P2ds:y:OffsetM / S35IDFE-XBPM:P2ds:y:OffsetM
Date/Time Range of Interest
Year
Month
Day
Hour
Starting date/time:
2024
2023
2022
2021
2020
2019
2018
2017
2016
2015
2014
2013
2012
2011
2010
2009
2008
2007
2006
2005
2004
2003
2002
2001
2000
1
2
3
4
5
6
7
8
9
10
11
12
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
0
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
Ending date/time:
2024
2023
2022
2021
2020
2019
2018
2017
2016
2015
2014
2013
2012
2011
2010
2009
2008
2007
2006
2005
2004
2003
2002
2001
2000
1
2
3
4
5
6
7
8
9
10
11
12
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
Plot Options
Size:
Normal
PDA Size
Tiny
Small
Medium
Large
Background Color:
White
Black
Layout:
1x1
1x2
2x1
2x2
3x3
4x4
5x5
Label size:
Normal
+15%
+30%
+45%
+60%
Sparsing:
None
2
4
8
16
32
64
128
Miscellaneous:
With Beam Current
Same Y scales
Y offset mode
Separate
Option override
Extra Options: