Data Group
Control Name / Readback Name
FE XBPMs
S01IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S01IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S01IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S01IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S01IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S01IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S01IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S01IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S01IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S01IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S01IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S01IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S01IDFE-XBPM:CM1ds:PositionOffsetX / S01IDFE-XBPM:CM1ds:PositionOffsetX
S01IDFE-XBPM:CM1ds:PositionOffsetY / S01IDFE-XBPM:CM1ds:PositionOffsetY
S01IDFE-XBPM:CM1ds:PositionScaleX / S01IDFE-XBPM:CM1ds:PositionScaleX
S01IDFE-XBPM:CM1ds:PositionScaleY / S01IDFE-XBPM:CM1ds:PositionScaleY
S01IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S01IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S01IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S01IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S01IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S01IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S01IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S01IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S01IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S01IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S01IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S01IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S01IDFE-XBPM:CM2ds:PositionOffsetX / S01IDFE-XBPM:CM2ds:PositionOffsetX
S01IDFE-XBPM:CM2ds:PositionOffsetY / S01IDFE-XBPM:CM2ds:PositionOffsetY
S01IDFE-XBPM:CM2ds:PositionScaleX / S01IDFE-XBPM:CM2ds:PositionScaleX
S01IDFE-XBPM:CM2ds:PositionScaleY / S01IDFE-XBPM:CM2ds:PositionScaleY
S01IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S01IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S01IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S01IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S01IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S01IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S01IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S01IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S01IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S01IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S01IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S01IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S01IDFE-XBPM:CM3ds:PositionOffsetX / S01IDFE-XBPM:CM3ds:PositionOffsetX
S01IDFE-XBPM:CM3ds:PositionOffsetY / S01IDFE-XBPM:CM3ds:PositionOffsetY
S01IDFE-XBPM:CM3ds:PositionScaleX / S01IDFE-XBPM:CM3ds:PositionScaleX
S01IDFE-XBPM:CM3ds:PositionScaleY / S01IDFE-XBPM:CM3ds:PositionScaleY
S01IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S01IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S01IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S01IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S01IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S01IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S01IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S01IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S01IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S01IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S01IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S01IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S01IDFE-XBPM:CM4ds:PositionOffsetX / S01IDFE-XBPM:CM4ds:PositionOffsetX
S01IDFE-XBPM:CM4ds:PositionOffsetY / S01IDFE-XBPM:CM4ds:PositionOffsetY
S01IDFE-XBPM:CM4ds:PositionScaleX / S01IDFE-XBPM:CM4ds:PositionScaleX
S01IDFE-XBPM:CM4ds:PositionScaleY / S01IDFE-XBPM:CM4ds:PositionScaleY
S02IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S02IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S02IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S02IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S02IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S02IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S02IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S02IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S02IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S02IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S02IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S02IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S02IDFE-XBPM:CM1ds:PositionOffsetX / S02IDFE-XBPM:CM1ds:PositionOffsetX
S02IDFE-XBPM:CM1ds:PositionOffsetY / S02IDFE-XBPM:CM1ds:PositionOffsetY
S02IDFE-XBPM:CM1ds:PositionScaleX / S02IDFE-XBPM:CM1ds:PositionScaleX
S02IDFE-XBPM:CM1ds:PositionScaleY / S02IDFE-XBPM:CM1ds:PositionScaleY
S02IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S02IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S02IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S02IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S02IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S02IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S02IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S02IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S02IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S02IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S02IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S02IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S02IDFE-XBPM:CM1us:PositionOffsetX / S02IDFE-XBPM:CM1us:PositionOffsetX
S02IDFE-XBPM:CM1us:PositionOffsetY / S02IDFE-XBPM:CM1us:PositionOffsetY
S02IDFE-XBPM:CM1us:PositionScaleX / S02IDFE-XBPM:CM1us:PositionScaleX
S02IDFE-XBPM:CM1us:PositionScaleY / S02IDFE-XBPM:CM1us:PositionScaleY
S02IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S02IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S02IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S02IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S02IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S02IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S02IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S02IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S02IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S02IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S02IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S02IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S02IDFE-XBPM:CM2ds:PositionOffsetX / S02IDFE-XBPM:CM2ds:PositionOffsetX
S02IDFE-XBPM:CM2ds:PositionOffsetY / S02IDFE-XBPM:CM2ds:PositionOffsetY
S02IDFE-XBPM:CM2ds:PositionScaleX / S02IDFE-XBPM:CM2ds:PositionScaleX
S02IDFE-XBPM:CM2ds:PositionScaleY / S02IDFE-XBPM:CM2ds:PositionScaleY
S02IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S02IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S02IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S02IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S02IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S02IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S02IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S02IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S02IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S02IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S02IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S02IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S02IDFE-XBPM:CM2us:PositionOffsetX / S02IDFE-XBPM:CM2us:PositionOffsetX
S02IDFE-XBPM:CM2us:PositionOffsetY / S02IDFE-XBPM:CM2us:PositionOffsetY
S02IDFE-XBPM:CM2us:PositionScaleX / S02IDFE-XBPM:CM2us:PositionScaleX
S02IDFE-XBPM:CM2us:PositionScaleY / S02IDFE-XBPM:CM2us:PositionScaleY
S02IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S02IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S02IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S02IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S02IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S02IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S02IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S02IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S02IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S02IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S02IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S02IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S02IDFE-XBPM:CM3ds:PositionOffsetX / S02IDFE-XBPM:CM3ds:PositionOffsetX
S02IDFE-XBPM:CM3ds:PositionOffsetY / S02IDFE-XBPM:CM3ds:PositionOffsetY
S02IDFE-XBPM:CM3ds:PositionScaleX / S02IDFE-XBPM:CM3ds:PositionScaleX
S02IDFE-XBPM:CM3ds:PositionScaleY / S02IDFE-XBPM:CM3ds:PositionScaleY
S02IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S02IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S02IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S02IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S02IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S02IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S02IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S02IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S02IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S02IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S02IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S02IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S02IDFE-XBPM:CM3us:PositionOffsetX / S02IDFE-XBPM:CM3us:PositionOffsetX
S02IDFE-XBPM:CM3us:PositionOffsetY / S02IDFE-XBPM:CM3us:PositionOffsetY
S02IDFE-XBPM:CM3us:PositionScaleX / S02IDFE-XBPM:CM3us:PositionScaleX
S02IDFE-XBPM:CM3us:PositionScaleY / S02IDFE-XBPM:CM3us:PositionScaleY
S02IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S02IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S02IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S02IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S02IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S02IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S02IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S02IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S02IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S02IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S02IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S02IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S02IDFE-XBPM:CM4ds:PositionOffsetX / S02IDFE-XBPM:CM4ds:PositionOffsetX
S02IDFE-XBPM:CM4ds:PositionOffsetY / S02IDFE-XBPM:CM4ds:PositionOffsetY
S02IDFE-XBPM:CM4ds:PositionScaleX / S02IDFE-XBPM:CM4ds:PositionScaleX
S02IDFE-XBPM:CM4ds:PositionScaleY / S02IDFE-XBPM:CM4ds:PositionScaleY
S02IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S02IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S02IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S02IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S02IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S02IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S02IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S02IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S02IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S02IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S02IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S02IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S02IDFE-XBPM:CM4us:PositionOffsetX / S02IDFE-XBPM:CM4us:PositionOffsetX
S02IDFE-XBPM:CM4us:PositionOffsetY / S02IDFE-XBPM:CM4us:PositionOffsetY
S02IDFE-XBPM:CM4us:PositionScaleX / S02IDFE-XBPM:CM4us:PositionScaleX
S02IDFE-XBPM:CM4us:PositionScaleY / S02IDFE-XBPM:CM4us:PositionScaleY
S03IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S03IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S03IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S03IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S03IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S03IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S03IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S03IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S03IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S03IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S03IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S03IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S03IDFE-XBPM:CM1ds:PositionOffsetX / S03IDFE-XBPM:CM1ds:PositionOffsetX
S03IDFE-XBPM:CM1ds:PositionOffsetY / S03IDFE-XBPM:CM1ds:PositionOffsetY
S03IDFE-XBPM:CM1ds:PositionScaleX / S03IDFE-XBPM:CM1ds:PositionScaleX
S03IDFE-XBPM:CM1ds:PositionScaleY / S03IDFE-XBPM:CM1ds:PositionScaleY
S03IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S03IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S03IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S03IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S03IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S03IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S03IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S03IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S03IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S03IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S03IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S03IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S03IDFE-XBPM:CM2ds:PositionOffsetX / S03IDFE-XBPM:CM2ds:PositionOffsetX
S03IDFE-XBPM:CM2ds:PositionOffsetY / S03IDFE-XBPM:CM2ds:PositionOffsetY
S03IDFE-XBPM:CM2ds:PositionScaleX / S03IDFE-XBPM:CM2ds:PositionScaleX
S03IDFE-XBPM:CM2ds:PositionScaleY / S03IDFE-XBPM:CM2ds:PositionScaleY
S03IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S03IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S03IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S03IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S03IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S03IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S03IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S03IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S03IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S03IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S03IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S03IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S03IDFE-XBPM:CM3ds:PositionOffsetX / S03IDFE-XBPM:CM3ds:PositionOffsetX
S03IDFE-XBPM:CM3ds:PositionOffsetY / S03IDFE-XBPM:CM3ds:PositionOffsetY
S03IDFE-XBPM:CM3ds:PositionScaleX / S03IDFE-XBPM:CM3ds:PositionScaleX
S03IDFE-XBPM:CM3ds:PositionScaleY / S03IDFE-XBPM:CM3ds:PositionScaleY
S03IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S03IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S03IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S03IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S03IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S03IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S03IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S03IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S03IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S03IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S03IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S03IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S03IDFE-XBPM:CM4ds:PositionOffsetX / S03IDFE-XBPM:CM4ds:PositionOffsetX
S03IDFE-XBPM:CM4ds:PositionOffsetY / S03IDFE-XBPM:CM4ds:PositionOffsetY
S03IDFE-XBPM:CM4ds:PositionScaleX / S03IDFE-XBPM:CM4ds:PositionScaleX
S03IDFE-XBPM:CM4ds:PositionScaleY / S03IDFE-XBPM:CM4ds:PositionScaleY
S04IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S04IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S04IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S04IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S04IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S04IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S04IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S04IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S04IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S04IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S04IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S04IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S04IDFE-XBPM:CM1ds:PositionOffsetX / S04IDFE-XBPM:CM1ds:PositionOffsetX
S04IDFE-XBPM:CM1ds:PositionOffsetY / S04IDFE-XBPM:CM1ds:PositionOffsetY
S04IDFE-XBPM:CM1ds:PositionScaleX / S04IDFE-XBPM:CM1ds:PositionScaleX
S04IDFE-XBPM:CM1ds:PositionScaleY / S04IDFE-XBPM:CM1ds:PositionScaleY
S04IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S04IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S04IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S04IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S04IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S04IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S04IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S04IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S04IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S04IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S04IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S04IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S04IDFE-XBPM:CM2ds:PositionOffsetX / S04IDFE-XBPM:CM2ds:PositionOffsetX
S04IDFE-XBPM:CM2ds:PositionOffsetY / S04IDFE-XBPM:CM2ds:PositionOffsetY
S04IDFE-XBPM:CM2ds:PositionScaleX / S04IDFE-XBPM:CM2ds:PositionScaleX
S04IDFE-XBPM:CM2ds:PositionScaleY / S04IDFE-XBPM:CM2ds:PositionScaleY
S04IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S04IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S04IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S04IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S04IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S04IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S04IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S04IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S04IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S04IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S04IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S04IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S04IDFE-XBPM:CM3ds:PositionOffsetX / S04IDFE-XBPM:CM3ds:PositionOffsetX
S04IDFE-XBPM:CM3ds:PositionOffsetY / S04IDFE-XBPM:CM3ds:PositionOffsetY
S04IDFE-XBPM:CM3ds:PositionScaleX / S04IDFE-XBPM:CM3ds:PositionScaleX
S04IDFE-XBPM:CM3ds:PositionScaleY / S04IDFE-XBPM:CM3ds:PositionScaleY
S04IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S04IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S04IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S04IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S04IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S04IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S04IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S04IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S04IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S04IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S04IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S04IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S04IDFE-XBPM:CM4ds:PositionOffsetX / S04IDFE-XBPM:CM4ds:PositionOffsetX
S04IDFE-XBPM:CM4ds:PositionOffsetY / S04IDFE-XBPM:CM4ds:PositionOffsetY
S04IDFE-XBPM:CM4ds:PositionScaleX / S04IDFE-XBPM:CM4ds:PositionScaleX
S04IDFE-XBPM:CM4ds:PositionScaleY / S04IDFE-XBPM:CM4ds:PositionScaleY
S05IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S05IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S05IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S05IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S05IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S05IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S05IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S05IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S05IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S05IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S05IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S05IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S05IDFE-XBPM:CM1ds:PositionOffsetX / S05IDFE-XBPM:CM1ds:PositionOffsetX
S05IDFE-XBPM:CM1ds:PositionOffsetY / S05IDFE-XBPM:CM1ds:PositionOffsetY
S05IDFE-XBPM:CM1ds:PositionScaleX / S05IDFE-XBPM:CM1ds:PositionScaleX
S05IDFE-XBPM:CM1ds:PositionScaleY / S05IDFE-XBPM:CM1ds:PositionScaleY
S05IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S05IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S05IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S05IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S05IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S05IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S05IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S05IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S05IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S05IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S05IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S05IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S05IDFE-XBPM:CM2ds:PositionOffsetX / S05IDFE-XBPM:CM2ds:PositionOffsetX
S05IDFE-XBPM:CM2ds:PositionOffsetY / S05IDFE-XBPM:CM2ds:PositionOffsetY
S05IDFE-XBPM:CM2ds:PositionScaleX / S05IDFE-XBPM:CM2ds:PositionScaleX
S05IDFE-XBPM:CM2ds:PositionScaleY / S05IDFE-XBPM:CM2ds:PositionScaleY
S05IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S05IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S05IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S05IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S05IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S05IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S05IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S05IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S05IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S05IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S05IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S05IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S05IDFE-XBPM:CM3ds:PositionOffsetX / S05IDFE-XBPM:CM3ds:PositionOffsetX
S05IDFE-XBPM:CM3ds:PositionOffsetY / S05IDFE-XBPM:CM3ds:PositionOffsetY
S05IDFE-XBPM:CM3ds:PositionScaleX / S05IDFE-XBPM:CM3ds:PositionScaleX
S05IDFE-XBPM:CM3ds:PositionScaleY / S05IDFE-XBPM:CM3ds:PositionScaleY
S05IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S05IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S05IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S05IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S05IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S05IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S05IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S05IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S05IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S05IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S05IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S05IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S05IDFE-XBPM:CM4ds:PositionOffsetX / S05IDFE-XBPM:CM4ds:PositionOffsetX
S05IDFE-XBPM:CM4ds:PositionOffsetY / S05IDFE-XBPM:CM4ds:PositionOffsetY
S05IDFE-XBPM:CM4ds:PositionScaleX / S05IDFE-XBPM:CM4ds:PositionScaleX
S05IDFE-XBPM:CM4ds:PositionScaleY / S05IDFE-XBPM:CM4ds:PositionScaleY
S06IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S06IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S06IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S06IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S06IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S06IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S06IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S06IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S06IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S06IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S06IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S06IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S06IDFE-XBPM:CM1ds:PositionOffsetX / S06IDFE-XBPM:CM1ds:PositionOffsetX
S06IDFE-XBPM:CM1ds:PositionOffsetY / S06IDFE-XBPM:CM1ds:PositionOffsetY
S06IDFE-XBPM:CM1ds:PositionScaleX / S06IDFE-XBPM:CM1ds:PositionScaleX
S06IDFE-XBPM:CM1ds:PositionScaleY / S06IDFE-XBPM:CM1ds:PositionScaleY
S06IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S06IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S06IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S06IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S06IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S06IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S06IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S06IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S06IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S06IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S06IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S06IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S06IDFE-XBPM:CM1us:PositionOffsetX / S06IDFE-XBPM:CM1us:PositionOffsetX
S06IDFE-XBPM:CM1us:PositionOffsetY / S06IDFE-XBPM:CM1us:PositionOffsetY
S06IDFE-XBPM:CM1us:PositionScaleX / S06IDFE-XBPM:CM1us:PositionScaleX
S06IDFE-XBPM:CM1us:PositionScaleY / S06IDFE-XBPM:CM1us:PositionScaleY
S06IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S06IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S06IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S06IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S06IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S06IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S06IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S06IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S06IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S06IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S06IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S06IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S06IDFE-XBPM:CM2ds:PositionOffsetX / S06IDFE-XBPM:CM2ds:PositionOffsetX
S06IDFE-XBPM:CM2ds:PositionOffsetY / S06IDFE-XBPM:CM2ds:PositionOffsetY
S06IDFE-XBPM:CM2ds:PositionScaleX / S06IDFE-XBPM:CM2ds:PositionScaleX
S06IDFE-XBPM:CM2ds:PositionScaleY / S06IDFE-XBPM:CM2ds:PositionScaleY
S06IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S06IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S06IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S06IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S06IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S06IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S06IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S06IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S06IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S06IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S06IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S06IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S06IDFE-XBPM:CM2us:PositionOffsetX / S06IDFE-XBPM:CM2us:PositionOffsetX
S06IDFE-XBPM:CM2us:PositionOffsetY / S06IDFE-XBPM:CM2us:PositionOffsetY
S06IDFE-XBPM:CM2us:PositionScaleX / S06IDFE-XBPM:CM2us:PositionScaleX
S06IDFE-XBPM:CM2us:PositionScaleY / S06IDFE-XBPM:CM2us:PositionScaleY
S06IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S06IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S06IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S06IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S06IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S06IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S06IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S06IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S06IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S06IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S06IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S06IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S06IDFE-XBPM:CM3ds:PositionOffsetX / S06IDFE-XBPM:CM3ds:PositionOffsetX
S06IDFE-XBPM:CM3ds:PositionOffsetY / S06IDFE-XBPM:CM3ds:PositionOffsetY
S06IDFE-XBPM:CM3ds:PositionScaleX / S06IDFE-XBPM:CM3ds:PositionScaleX
S06IDFE-XBPM:CM3ds:PositionScaleY / S06IDFE-XBPM:CM3ds:PositionScaleY
S06IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S06IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S06IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S06IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S06IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S06IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S06IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S06IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S06IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S06IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S06IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S06IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S06IDFE-XBPM:CM3us:PositionOffsetX / S06IDFE-XBPM:CM3us:PositionOffsetX
S06IDFE-XBPM:CM3us:PositionOffsetY / S06IDFE-XBPM:CM3us:PositionOffsetY
S06IDFE-XBPM:CM3us:PositionScaleX / S06IDFE-XBPM:CM3us:PositionScaleX
S06IDFE-XBPM:CM3us:PositionScaleY / S06IDFE-XBPM:CM3us:PositionScaleY
S06IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S06IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S06IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S06IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S06IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S06IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S06IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S06IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S06IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S06IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S06IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S06IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S06IDFE-XBPM:CM4ds:PositionOffsetX / S06IDFE-XBPM:CM4ds:PositionOffsetX
S06IDFE-XBPM:CM4ds:PositionOffsetY / S06IDFE-XBPM:CM4ds:PositionOffsetY
S06IDFE-XBPM:CM4ds:PositionScaleX / S06IDFE-XBPM:CM4ds:PositionScaleX
S06IDFE-XBPM:CM4ds:PositionScaleY / S06IDFE-XBPM:CM4ds:PositionScaleY
S06IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S06IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S06IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S06IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S06IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S06IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S06IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S06IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S06IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S06IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S06IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S06IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S06IDFE-XBPM:CM4us:PositionOffsetX / S06IDFE-XBPM:CM4us:PositionOffsetX
S06IDFE-XBPM:CM4us:PositionOffsetY / S06IDFE-XBPM:CM4us:PositionOffsetY
S06IDFE-XBPM:CM4us:PositionScaleX / S06IDFE-XBPM:CM4us:PositionScaleX
S06IDFE-XBPM:CM4us:PositionScaleY / S06IDFE-XBPM:CM4us:PositionScaleY
S07IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S07IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S07IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S07IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S07IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S07IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S07IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S07IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S07IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S07IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S07IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S07IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S07IDFE-XBPM:CM1ds:PositionOffsetX / S07IDFE-XBPM:CM1ds:PositionOffsetX
S07IDFE-XBPM:CM1ds:PositionOffsetY / S07IDFE-XBPM:CM1ds:PositionOffsetY
S07IDFE-XBPM:CM1ds:PositionScaleX / S07IDFE-XBPM:CM1ds:PositionScaleX
S07IDFE-XBPM:CM1ds:PositionScaleY / S07IDFE-XBPM:CM1ds:PositionScaleY
S07IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S07IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S07IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S07IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S07IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S07IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S07IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S07IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S07IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S07IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S07IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S07IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S07IDFE-XBPM:CM2ds:PositionOffsetX / S07IDFE-XBPM:CM2ds:PositionOffsetX
S07IDFE-XBPM:CM2ds:PositionOffsetY / S07IDFE-XBPM:CM2ds:PositionOffsetY
S07IDFE-XBPM:CM2ds:PositionScaleX / S07IDFE-XBPM:CM2ds:PositionScaleX
S07IDFE-XBPM:CM2ds:PositionScaleY / S07IDFE-XBPM:CM2ds:PositionScaleY
S07IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S07IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S07IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S07IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S07IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S07IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S07IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S07IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S07IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S07IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S07IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S07IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S07IDFE-XBPM:CM3ds:PositionOffsetX / S07IDFE-XBPM:CM3ds:PositionOffsetX
S07IDFE-XBPM:CM3ds:PositionOffsetY / S07IDFE-XBPM:CM3ds:PositionOffsetY
S07IDFE-XBPM:CM3ds:PositionScaleX / S07IDFE-XBPM:CM3ds:PositionScaleX
S07IDFE-XBPM:CM3ds:PositionScaleY / S07IDFE-XBPM:CM3ds:PositionScaleY
S07IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S07IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S07IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S07IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S07IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S07IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S07IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S07IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S07IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S07IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S07IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S07IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S07IDFE-XBPM:CM4ds:PositionOffsetX / S07IDFE-XBPM:CM4ds:PositionOffsetX
S07IDFE-XBPM:CM4ds:PositionOffsetY / S07IDFE-XBPM:CM4ds:PositionOffsetY
S07IDFE-XBPM:CM4ds:PositionScaleX / S07IDFE-XBPM:CM4ds:PositionScaleX
S07IDFE-XBPM:CM4ds:PositionScaleY / S07IDFE-XBPM:CM4ds:PositionScaleY
S08IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S08IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S08IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S08IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S08IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S08IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S08IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S08IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S08IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S08IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S08IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S08IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S08IDFE-XBPM:CM1ds:PositionOffsetX / S08IDFE-XBPM:CM1ds:PositionOffsetX
S08IDFE-XBPM:CM1ds:PositionOffsetY / S08IDFE-XBPM:CM1ds:PositionOffsetY
S08IDFE-XBPM:CM1ds:PositionScaleX / S08IDFE-XBPM:CM1ds:PositionScaleX
S08IDFE-XBPM:CM1ds:PositionScaleY / S08IDFE-XBPM:CM1ds:PositionScaleY
S08IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S08IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S08IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S08IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S08IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S08IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S08IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S08IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S08IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S08IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S08IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S08IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S08IDFE-XBPM:CM2ds:PositionOffsetX / S08IDFE-XBPM:CM2ds:PositionOffsetX
S08IDFE-XBPM:CM2ds:PositionOffsetY / S08IDFE-XBPM:CM2ds:PositionOffsetY
S08IDFE-XBPM:CM2ds:PositionScaleX / S08IDFE-XBPM:CM2ds:PositionScaleX
S08IDFE-XBPM:CM2ds:PositionScaleY / S08IDFE-XBPM:CM2ds:PositionScaleY
S08IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S08IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S08IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S08IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S08IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S08IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S08IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S08IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S08IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S08IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S08IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S08IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S08IDFE-XBPM:CM3ds:PositionOffsetX / S08IDFE-XBPM:CM3ds:PositionOffsetX
S08IDFE-XBPM:CM3ds:PositionOffsetY / S08IDFE-XBPM:CM3ds:PositionOffsetY
S08IDFE-XBPM:CM3ds:PositionScaleX / S08IDFE-XBPM:CM3ds:PositionScaleX
S08IDFE-XBPM:CM3ds:PositionScaleY / S08IDFE-XBPM:CM3ds:PositionScaleY
S08IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S08IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S08IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S08IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S08IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S08IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S08IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S08IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S08IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S08IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S08IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S08IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S08IDFE-XBPM:CM4ds:PositionOffsetX / S08IDFE-XBPM:CM4ds:PositionOffsetX
S08IDFE-XBPM:CM4ds:PositionOffsetY / S08IDFE-XBPM:CM4ds:PositionOffsetY
S08IDFE-XBPM:CM4ds:PositionScaleX / S08IDFE-XBPM:CM4ds:PositionScaleX
S08IDFE-XBPM:CM4ds:PositionScaleY / S08IDFE-XBPM:CM4ds:PositionScaleY
S09IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S09IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S09IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S09IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S09IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S09IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S09IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S09IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S09IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S09IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S09IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S09IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S09IDFE-XBPM:CM1ds:PositionOffsetX / S09IDFE-XBPM:CM1ds:PositionOffsetX
S09IDFE-XBPM:CM1ds:PositionOffsetY / S09IDFE-XBPM:CM1ds:PositionOffsetY
S09IDFE-XBPM:CM1ds:PositionScaleX / S09IDFE-XBPM:CM1ds:PositionScaleX
S09IDFE-XBPM:CM1ds:PositionScaleY / S09IDFE-XBPM:CM1ds:PositionScaleY
S09IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S09IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S09IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S09IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S09IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S09IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S09IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S09IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S09IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S09IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S09IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S09IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S09IDFE-XBPM:CM2ds:PositionOffsetX / S09IDFE-XBPM:CM2ds:PositionOffsetX
S09IDFE-XBPM:CM2ds:PositionOffsetY / S09IDFE-XBPM:CM2ds:PositionOffsetY
S09IDFE-XBPM:CM2ds:PositionScaleX / S09IDFE-XBPM:CM2ds:PositionScaleX
S09IDFE-XBPM:CM2ds:PositionScaleY / S09IDFE-XBPM:CM2ds:PositionScaleY
S09IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S09IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S09IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S09IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S09IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S09IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S09IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S09IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S09IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S09IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S09IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S09IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S09IDFE-XBPM:CM3ds:PositionOffsetX / S09IDFE-XBPM:CM3ds:PositionOffsetX
S09IDFE-XBPM:CM3ds:PositionOffsetY / S09IDFE-XBPM:CM3ds:PositionOffsetY
S09IDFE-XBPM:CM3ds:PositionScaleX / S09IDFE-XBPM:CM3ds:PositionScaleX
S09IDFE-XBPM:CM3ds:PositionScaleY / S09IDFE-XBPM:CM3ds:PositionScaleY
S09IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S09IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S09IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S09IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S09IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S09IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S09IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S09IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S09IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S09IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S09IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S09IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S09IDFE-XBPM:CM4ds:PositionOffsetX / S09IDFE-XBPM:CM4ds:PositionOffsetX
S09IDFE-XBPM:CM4ds:PositionOffsetY / S09IDFE-XBPM:CM4ds:PositionOffsetY
S09IDFE-XBPM:CM4ds:PositionScaleX / S09IDFE-XBPM:CM4ds:PositionScaleX
S09IDFE-XBPM:CM4ds:PositionScaleY / S09IDFE-XBPM:CM4ds:PositionScaleY
S10IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S10IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S10IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S10IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S10IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S10IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S10IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S10IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S10IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S10IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S10IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S10IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S10IDFE-XBPM:CM1ds:PositionOffsetX / S10IDFE-XBPM:CM1ds:PositionOffsetX
S10IDFE-XBPM:CM1ds:PositionOffsetY / S10IDFE-XBPM:CM1ds:PositionOffsetY
S10IDFE-XBPM:CM1ds:PositionScaleX / S10IDFE-XBPM:CM1ds:PositionScaleX
S10IDFE-XBPM:CM1ds:PositionScaleY / S10IDFE-XBPM:CM1ds:PositionScaleY
S10IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S10IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S10IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S10IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S10IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S10IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S10IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S10IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S10IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S10IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S10IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S10IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S10IDFE-XBPM:CM2ds:PositionOffsetX / S10IDFE-XBPM:CM2ds:PositionOffsetX
S10IDFE-XBPM:CM2ds:PositionOffsetY / S10IDFE-XBPM:CM2ds:PositionOffsetY
S10IDFE-XBPM:CM2ds:PositionScaleX / S10IDFE-XBPM:CM2ds:PositionScaleX
S10IDFE-XBPM:CM2ds:PositionScaleY / S10IDFE-XBPM:CM2ds:PositionScaleY
S10IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S10IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S10IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S10IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S10IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S10IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S10IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S10IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S10IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S10IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S10IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S10IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S10IDFE-XBPM:CM3ds:PositionOffsetX / S10IDFE-XBPM:CM3ds:PositionOffsetX
S10IDFE-XBPM:CM3ds:PositionOffsetY / S10IDFE-XBPM:CM3ds:PositionOffsetY
S10IDFE-XBPM:CM3ds:PositionScaleX / S10IDFE-XBPM:CM3ds:PositionScaleX
S10IDFE-XBPM:CM3ds:PositionScaleY / S10IDFE-XBPM:CM3ds:PositionScaleY
S10IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S10IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S10IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S10IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S10IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S10IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S10IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S10IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S10IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S10IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S10IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S10IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S10IDFE-XBPM:CM4ds:PositionOffsetX / S10IDFE-XBPM:CM4ds:PositionOffsetX
S10IDFE-XBPM:CM4ds:PositionOffsetY / S10IDFE-XBPM:CM4ds:PositionOffsetY
S10IDFE-XBPM:CM4ds:PositionScaleX / S10IDFE-XBPM:CM4ds:PositionScaleX
S10IDFE-XBPM:CM4ds:PositionScaleY / S10IDFE-XBPM:CM4ds:PositionScaleY
S11IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S11IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S11IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S11IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S11IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S11IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S11IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S11IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S11IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S11IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S11IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S11IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S11IDFE-XBPM:CM1ds:PositionOffsetX / S11IDFE-XBPM:CM1ds:PositionOffsetX
S11IDFE-XBPM:CM1ds:PositionOffsetY / S11IDFE-XBPM:CM1ds:PositionOffsetY
S11IDFE-XBPM:CM1ds:PositionScaleX / S11IDFE-XBPM:CM1ds:PositionScaleX
S11IDFE-XBPM:CM1ds:PositionScaleY / S11IDFE-XBPM:CM1ds:PositionScaleY
S11IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S11IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S11IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S11IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S11IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S11IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S11IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S11IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S11IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S11IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S11IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S11IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S11IDFE-XBPM:CM1us:PositionOffsetX / S11IDFE-XBPM:CM1us:PositionOffsetX
S11IDFE-XBPM:CM1us:PositionOffsetY / S11IDFE-XBPM:CM1us:PositionOffsetY
S11IDFE-XBPM:CM1us:PositionScaleX / S11IDFE-XBPM:CM1us:PositionScaleX
S11IDFE-XBPM:CM1us:PositionScaleY / S11IDFE-XBPM:CM1us:PositionScaleY
S11IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S11IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S11IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S11IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S11IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S11IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S11IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S11IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S11IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S11IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S11IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S11IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S11IDFE-XBPM:CM2ds:PositionOffsetX / S11IDFE-XBPM:CM2ds:PositionOffsetX
S11IDFE-XBPM:CM2ds:PositionOffsetY / S11IDFE-XBPM:CM2ds:PositionOffsetY
S11IDFE-XBPM:CM2ds:PositionScaleX / S11IDFE-XBPM:CM2ds:PositionScaleX
S11IDFE-XBPM:CM2ds:PositionScaleY / S11IDFE-XBPM:CM2ds:PositionScaleY
S11IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S11IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S11IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S11IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S11IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S11IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S11IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S11IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S11IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S11IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S11IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S11IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S11IDFE-XBPM:CM2us:PositionOffsetX / S11IDFE-XBPM:CM2us:PositionOffsetX
S11IDFE-XBPM:CM2us:PositionOffsetY / S11IDFE-XBPM:CM2us:PositionOffsetY
S11IDFE-XBPM:CM2us:PositionScaleX / S11IDFE-XBPM:CM2us:PositionScaleX
S11IDFE-XBPM:CM2us:PositionScaleY / S11IDFE-XBPM:CM2us:PositionScaleY
S11IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S11IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S11IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S11IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S11IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S11IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S11IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S11IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S11IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S11IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S11IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S11IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S11IDFE-XBPM:CM3ds:PositionOffsetX / S11IDFE-XBPM:CM3ds:PositionOffsetX
S11IDFE-XBPM:CM3ds:PositionOffsetY / S11IDFE-XBPM:CM3ds:PositionOffsetY
S11IDFE-XBPM:CM3ds:PositionScaleX / S11IDFE-XBPM:CM3ds:PositionScaleX
S11IDFE-XBPM:CM3ds:PositionScaleY / S11IDFE-XBPM:CM3ds:PositionScaleY
S11IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S11IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S11IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S11IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S11IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S11IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S11IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S11IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S11IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S11IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S11IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S11IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S11IDFE-XBPM:CM3us:PositionOffsetX / S11IDFE-XBPM:CM3us:PositionOffsetX
S11IDFE-XBPM:CM3us:PositionOffsetY / S11IDFE-XBPM:CM3us:PositionOffsetY
S11IDFE-XBPM:CM3us:PositionScaleX / S11IDFE-XBPM:CM3us:PositionScaleX
S11IDFE-XBPM:CM3us:PositionScaleY / S11IDFE-XBPM:CM3us:PositionScaleY
S11IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S11IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S11IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S11IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S11IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S11IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S11IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S11IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S11IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S11IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S11IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S11IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S11IDFE-XBPM:CM4ds:PositionOffsetX / S11IDFE-XBPM:CM4ds:PositionOffsetX
S11IDFE-XBPM:CM4ds:PositionOffsetY / S11IDFE-XBPM:CM4ds:PositionOffsetY
S11IDFE-XBPM:CM4ds:PositionScaleX / S11IDFE-XBPM:CM4ds:PositionScaleX
S11IDFE-XBPM:CM4ds:PositionScaleY / S11IDFE-XBPM:CM4ds:PositionScaleY
S11IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S11IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S11IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S11IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S11IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S11IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S11IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S11IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S11IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S11IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S11IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S11IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S11IDFE-XBPM:CM4us:PositionOffsetX / S11IDFE-XBPM:CM4us:PositionOffsetX
S11IDFE-XBPM:CM4us:PositionOffsetY / S11IDFE-XBPM:CM4us:PositionOffsetY
S11IDFE-XBPM:CM4us:PositionScaleX / S11IDFE-XBPM:CM4us:PositionScaleX
S11IDFE-XBPM:CM4us:PositionScaleY / S11IDFE-XBPM:CM4us:PositionScaleY
S12IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S12IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S12IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S12IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S12IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S12IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S12IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S12IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S12IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S12IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S12IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S12IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S12IDFE-XBPM:CM1ds:PositionOffsetX / S12IDFE-XBPM:CM1ds:PositionOffsetX
S12IDFE-XBPM:CM1ds:PositionOffsetY / S12IDFE-XBPM:CM1ds:PositionOffsetY
S12IDFE-XBPM:CM1ds:PositionScaleX / S12IDFE-XBPM:CM1ds:PositionScaleX
S12IDFE-XBPM:CM1ds:PositionScaleY / S12IDFE-XBPM:CM1ds:PositionScaleY
S12IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S12IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S12IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S12IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S12IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S12IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S12IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S12IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S12IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S12IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S12IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S12IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S12IDFE-XBPM:CM1us:PositionOffsetX / S12IDFE-XBPM:CM1us:PositionOffsetX
S12IDFE-XBPM:CM1us:PositionOffsetY / S12IDFE-XBPM:CM1us:PositionOffsetY
S12IDFE-XBPM:CM1us:PositionScaleX / S12IDFE-XBPM:CM1us:PositionScaleX
S12IDFE-XBPM:CM1us:PositionScaleY / S12IDFE-XBPM:CM1us:PositionScaleY
S12IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S12IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S12IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S12IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S12IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S12IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S12IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S12IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S12IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S12IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S12IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S12IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S12IDFE-XBPM:CM2ds:PositionOffsetX / S12IDFE-XBPM:CM2ds:PositionOffsetX
S12IDFE-XBPM:CM2ds:PositionOffsetY / S12IDFE-XBPM:CM2ds:PositionOffsetY
S12IDFE-XBPM:CM2ds:PositionScaleX / S12IDFE-XBPM:CM2ds:PositionScaleX
S12IDFE-XBPM:CM2ds:PositionScaleY / S12IDFE-XBPM:CM2ds:PositionScaleY
S12IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S12IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S12IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S12IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S12IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S12IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S12IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S12IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S12IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S12IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S12IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S12IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S12IDFE-XBPM:CM2us:PositionOffsetX / S12IDFE-XBPM:CM2us:PositionOffsetX
S12IDFE-XBPM:CM2us:PositionOffsetY / S12IDFE-XBPM:CM2us:PositionOffsetY
S12IDFE-XBPM:CM2us:PositionScaleX / S12IDFE-XBPM:CM2us:PositionScaleX
S12IDFE-XBPM:CM2us:PositionScaleY / S12IDFE-XBPM:CM2us:PositionScaleY
S12IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S12IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S12IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S12IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S12IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S12IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S12IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S12IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S12IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S12IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S12IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S12IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S12IDFE-XBPM:CM3ds:PositionOffsetX / S12IDFE-XBPM:CM3ds:PositionOffsetX
S12IDFE-XBPM:CM3ds:PositionOffsetY / S12IDFE-XBPM:CM3ds:PositionOffsetY
S12IDFE-XBPM:CM3ds:PositionScaleX / S12IDFE-XBPM:CM3ds:PositionScaleX
S12IDFE-XBPM:CM3ds:PositionScaleY / S12IDFE-XBPM:CM3ds:PositionScaleY
S12IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S12IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S12IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S12IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S12IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S12IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S12IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S12IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S12IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S12IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S12IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S12IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S12IDFE-XBPM:CM3us:PositionOffsetX / S12IDFE-XBPM:CM3us:PositionOffsetX
S12IDFE-XBPM:CM3us:PositionOffsetY / S12IDFE-XBPM:CM3us:PositionOffsetY
S12IDFE-XBPM:CM3us:PositionScaleX / S12IDFE-XBPM:CM3us:PositionScaleX
S12IDFE-XBPM:CM3us:PositionScaleY / S12IDFE-XBPM:CM3us:PositionScaleY
S12IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S12IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S12IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S12IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S12IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S12IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S12IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S12IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S12IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S12IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S12IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S12IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S12IDFE-XBPM:CM4ds:PositionOffsetX / S12IDFE-XBPM:CM4ds:PositionOffsetX
S12IDFE-XBPM:CM4ds:PositionOffsetY / S12IDFE-XBPM:CM4ds:PositionOffsetY
S12IDFE-XBPM:CM4ds:PositionScaleX / S12IDFE-XBPM:CM4ds:PositionScaleX
S12IDFE-XBPM:CM4ds:PositionScaleY / S12IDFE-XBPM:CM4ds:PositionScaleY
S12IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S12IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S12IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S12IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S12IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S12IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S12IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S12IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S12IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S12IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S12IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S12IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S12IDFE-XBPM:CM4us:PositionOffsetX / S12IDFE-XBPM:CM4us:PositionOffsetX
S12IDFE-XBPM:CM4us:PositionOffsetY / S12IDFE-XBPM:CM4us:PositionOffsetY
S12IDFE-XBPM:CM4us:PositionScaleX / S12IDFE-XBPM:CM4us:PositionScaleX
S12IDFE-XBPM:CM4us:PositionScaleY / S12IDFE-XBPM:CM4us:PositionScaleY
S13IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S13IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S13IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S13IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S13IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S13IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S13IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S13IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S13IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S13IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S13IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S13IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S13IDFE-XBPM:CM1ds:PositionOffsetX / S13IDFE-XBPM:CM1ds:PositionOffsetX
S13IDFE-XBPM:CM1ds:PositionOffsetY / S13IDFE-XBPM:CM1ds:PositionOffsetY
S13IDFE-XBPM:CM1ds:PositionScaleX / S13IDFE-XBPM:CM1ds:PositionScaleX
S13IDFE-XBPM:CM1ds:PositionScaleY / S13IDFE-XBPM:CM1ds:PositionScaleY
S13IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S13IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S13IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S13IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S13IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S13IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S13IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S13IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S13IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S13IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S13IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S13IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S13IDFE-XBPM:CM1us:PositionOffsetX / S13IDFE-XBPM:CM1us:PositionOffsetX
S13IDFE-XBPM:CM1us:PositionOffsetY / S13IDFE-XBPM:CM1us:PositionOffsetY
S13IDFE-XBPM:CM1us:PositionScaleX / S13IDFE-XBPM:CM1us:PositionScaleX
S13IDFE-XBPM:CM1us:PositionScaleY / S13IDFE-XBPM:CM1us:PositionScaleY
S13IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S13IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S13IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S13IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S13IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S13IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S13IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S13IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S13IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S13IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S13IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S13IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S13IDFE-XBPM:CM2ds:PositionOffsetX / S13IDFE-XBPM:CM2ds:PositionOffsetX
S13IDFE-XBPM:CM2ds:PositionOffsetY / S13IDFE-XBPM:CM2ds:PositionOffsetY
S13IDFE-XBPM:CM2ds:PositionScaleX / S13IDFE-XBPM:CM2ds:PositionScaleX
S13IDFE-XBPM:CM2ds:PositionScaleY / S13IDFE-XBPM:CM2ds:PositionScaleY
S13IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S13IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S13IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S13IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S13IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S13IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S13IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S13IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S13IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S13IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S13IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S13IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S13IDFE-XBPM:CM2us:PositionOffsetX / S13IDFE-XBPM:CM2us:PositionOffsetX
S13IDFE-XBPM:CM2us:PositionOffsetY / S13IDFE-XBPM:CM2us:PositionOffsetY
S13IDFE-XBPM:CM2us:PositionScaleX / S13IDFE-XBPM:CM2us:PositionScaleX
S13IDFE-XBPM:CM2us:PositionScaleY / S13IDFE-XBPM:CM2us:PositionScaleY
S13IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S13IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S13IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S13IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S13IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S13IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S13IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S13IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S13IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S13IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S13IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S13IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S13IDFE-XBPM:CM3ds:PositionOffsetX / S13IDFE-XBPM:CM3ds:PositionOffsetX
S13IDFE-XBPM:CM3ds:PositionOffsetY / S13IDFE-XBPM:CM3ds:PositionOffsetY
S13IDFE-XBPM:CM3ds:PositionScaleX / S13IDFE-XBPM:CM3ds:PositionScaleX
S13IDFE-XBPM:CM3ds:PositionScaleY / S13IDFE-XBPM:CM3ds:PositionScaleY
S13IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S13IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S13IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S13IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S13IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S13IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S13IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S13IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S13IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S13IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S13IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S13IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S13IDFE-XBPM:CM3us:PositionOffsetX / S13IDFE-XBPM:CM3us:PositionOffsetX
S13IDFE-XBPM:CM3us:PositionOffsetY / S13IDFE-XBPM:CM3us:PositionOffsetY
S13IDFE-XBPM:CM3us:PositionScaleX / S13IDFE-XBPM:CM3us:PositionScaleX
S13IDFE-XBPM:CM3us:PositionScaleY / S13IDFE-XBPM:CM3us:PositionScaleY
S13IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S13IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S13IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S13IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S13IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S13IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S13IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S13IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S13IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S13IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S13IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S13IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S13IDFE-XBPM:CM4ds:PositionOffsetX / S13IDFE-XBPM:CM4ds:PositionOffsetX
S13IDFE-XBPM:CM4ds:PositionOffsetY / S13IDFE-XBPM:CM4ds:PositionOffsetY
S13IDFE-XBPM:CM4ds:PositionScaleX / S13IDFE-XBPM:CM4ds:PositionScaleX
S13IDFE-XBPM:CM4ds:PositionScaleY / S13IDFE-XBPM:CM4ds:PositionScaleY
S13IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S13IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S13IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S13IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S13IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S13IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S13IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S13IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S13IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S13IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S13IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S13IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S13IDFE-XBPM:CM4us:PositionOffsetX / S13IDFE-XBPM:CM4us:PositionOffsetX
S13IDFE-XBPM:CM4us:PositionOffsetY / S13IDFE-XBPM:CM4us:PositionOffsetY
S13IDFE-XBPM:CM4us:PositionScaleX / S13IDFE-XBPM:CM4us:PositionScaleX
S13IDFE-XBPM:CM4us:PositionScaleY / S13IDFE-XBPM:CM4us:PositionScaleY
S14IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S14IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S14IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S14IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S14IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S14IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S14IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S14IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S14IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S14IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S14IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S14IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S14IDFE-XBPM:CM1ds:PositionOffsetX / S14IDFE-XBPM:CM1ds:PositionOffsetX
S14IDFE-XBPM:CM1ds:PositionOffsetY / S14IDFE-XBPM:CM1ds:PositionOffsetY
S14IDFE-XBPM:CM1ds:PositionScaleX / S14IDFE-XBPM:CM1ds:PositionScaleX
S14IDFE-XBPM:CM1ds:PositionScaleY / S14IDFE-XBPM:CM1ds:PositionScaleY
S14IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S14IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S14IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S14IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S14IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S14IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S14IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S14IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S14IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S14IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S14IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S14IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S14IDFE-XBPM:CM2ds:PositionOffsetX / S14IDFE-XBPM:CM2ds:PositionOffsetX
S14IDFE-XBPM:CM2ds:PositionOffsetY / S14IDFE-XBPM:CM2ds:PositionOffsetY
S14IDFE-XBPM:CM2ds:PositionScaleX / S14IDFE-XBPM:CM2ds:PositionScaleX
S14IDFE-XBPM:CM2ds:PositionScaleY / S14IDFE-XBPM:CM2ds:PositionScaleY
S14IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S14IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S14IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S14IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S14IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S14IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S14IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S14IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S14IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S14IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S14IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S14IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S14IDFE-XBPM:CM3ds:PositionOffsetX / S14IDFE-XBPM:CM3ds:PositionOffsetX
S14IDFE-XBPM:CM3ds:PositionOffsetY / S14IDFE-XBPM:CM3ds:PositionOffsetY
S14IDFE-XBPM:CM3ds:PositionScaleX / S14IDFE-XBPM:CM3ds:PositionScaleX
S14IDFE-XBPM:CM3ds:PositionScaleY / S14IDFE-XBPM:CM3ds:PositionScaleY
S14IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S14IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S14IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S14IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S14IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S14IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S14IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S14IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S14IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S14IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S14IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S14IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S14IDFE-XBPM:CM4ds:PositionOffsetX / S14IDFE-XBPM:CM4ds:PositionOffsetX
S14IDFE-XBPM:CM4ds:PositionOffsetY / S14IDFE-XBPM:CM4ds:PositionOffsetY
S14IDFE-XBPM:CM4ds:PositionScaleX / S14IDFE-XBPM:CM4ds:PositionScaleX
S14IDFE-XBPM:CM4ds:PositionScaleY / S14IDFE-XBPM:CM4ds:PositionScaleY
S15IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S15IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S15IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S15IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S15IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S15IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S15IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S15IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S15IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S15IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S15IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S15IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S15IDFE-XBPM:CM1ds:PositionOffsetX / S15IDFE-XBPM:CM1ds:PositionOffsetX
S15IDFE-XBPM:CM1ds:PositionOffsetY / S15IDFE-XBPM:CM1ds:PositionOffsetY
S15IDFE-XBPM:CM1ds:PositionScaleX / S15IDFE-XBPM:CM1ds:PositionScaleX
S15IDFE-XBPM:CM1ds:PositionScaleY / S15IDFE-XBPM:CM1ds:PositionScaleY
S15IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S15IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S15IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S15IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S15IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S15IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S15IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S15IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S15IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S15IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S15IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S15IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S15IDFE-XBPM:CM1us:PositionOffsetX / S15IDFE-XBPM:CM1us:PositionOffsetX
S15IDFE-XBPM:CM1us:PositionOffsetY / S15IDFE-XBPM:CM1us:PositionOffsetY
S15IDFE-XBPM:CM1us:PositionScaleX / S15IDFE-XBPM:CM1us:PositionScaleX
S15IDFE-XBPM:CM1us:PositionScaleY / S15IDFE-XBPM:CM1us:PositionScaleY
S15IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S15IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S15IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S15IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S15IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S15IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S15IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S15IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S15IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S15IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S15IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S15IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S15IDFE-XBPM:CM2ds:PositionOffsetX / S15IDFE-XBPM:CM2ds:PositionOffsetX
S15IDFE-XBPM:CM2ds:PositionOffsetY / S15IDFE-XBPM:CM2ds:PositionOffsetY
S15IDFE-XBPM:CM2ds:PositionScaleX / S15IDFE-XBPM:CM2ds:PositionScaleX
S15IDFE-XBPM:CM2ds:PositionScaleY / S15IDFE-XBPM:CM2ds:PositionScaleY
S15IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S15IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S15IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S15IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S15IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S15IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S15IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S15IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S15IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S15IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S15IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S15IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S15IDFE-XBPM:CM2us:PositionOffsetX / S15IDFE-XBPM:CM2us:PositionOffsetX
S15IDFE-XBPM:CM2us:PositionOffsetY / S15IDFE-XBPM:CM2us:PositionOffsetY
S15IDFE-XBPM:CM2us:PositionScaleX / S15IDFE-XBPM:CM2us:PositionScaleX
S15IDFE-XBPM:CM2us:PositionScaleY / S15IDFE-XBPM:CM2us:PositionScaleY
S15IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S15IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S15IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S15IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S15IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S15IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S15IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S15IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S15IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S15IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S15IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S15IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S15IDFE-XBPM:CM3ds:PositionOffsetX / S15IDFE-XBPM:CM3ds:PositionOffsetX
S15IDFE-XBPM:CM3ds:PositionOffsetY / S15IDFE-XBPM:CM3ds:PositionOffsetY
S15IDFE-XBPM:CM3ds:PositionScaleX / S15IDFE-XBPM:CM3ds:PositionScaleX
S15IDFE-XBPM:CM3ds:PositionScaleY / S15IDFE-XBPM:CM3ds:PositionScaleY
S15IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S15IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S15IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S15IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S15IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S15IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S15IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S15IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S15IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S15IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S15IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S15IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S15IDFE-XBPM:CM3us:PositionOffsetX / S15IDFE-XBPM:CM3us:PositionOffsetX
S15IDFE-XBPM:CM3us:PositionOffsetY / S15IDFE-XBPM:CM3us:PositionOffsetY
S15IDFE-XBPM:CM3us:PositionScaleX / S15IDFE-XBPM:CM3us:PositionScaleX
S15IDFE-XBPM:CM3us:PositionScaleY / S15IDFE-XBPM:CM3us:PositionScaleY
S15IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S15IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S15IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S15IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S15IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S15IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S15IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S15IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S15IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S15IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S15IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S15IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S15IDFE-XBPM:CM4ds:PositionOffsetX / S15IDFE-XBPM:CM4ds:PositionOffsetX
S15IDFE-XBPM:CM4ds:PositionOffsetY / S15IDFE-XBPM:CM4ds:PositionOffsetY
S15IDFE-XBPM:CM4ds:PositionScaleX / S15IDFE-XBPM:CM4ds:PositionScaleX
S15IDFE-XBPM:CM4ds:PositionScaleY / S15IDFE-XBPM:CM4ds:PositionScaleY
S15IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S15IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S15IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S15IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S15IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S15IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S15IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S15IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S15IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S15IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S15IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S15IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S15IDFE-XBPM:CM4us:PositionOffsetX / S15IDFE-XBPM:CM4us:PositionOffsetX
S15IDFE-XBPM:CM4us:PositionOffsetY / S15IDFE-XBPM:CM4us:PositionOffsetY
S15IDFE-XBPM:CM4us:PositionScaleX / S15IDFE-XBPM:CM4us:PositionScaleX
S15IDFE-XBPM:CM4us:PositionScaleY / S15IDFE-XBPM:CM4us:PositionScaleY
S16IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S16IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S16IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S16IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S16IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S16IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S16IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S16IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S16IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S16IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S16IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S16IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S16IDFE-XBPM:CM1ds:PositionOffsetX / S16IDFE-XBPM:CM1ds:PositionOffsetX
S16IDFE-XBPM:CM1ds:PositionOffsetY / S16IDFE-XBPM:CM1ds:PositionOffsetY
S16IDFE-XBPM:CM1ds:PositionScaleX / S16IDFE-XBPM:CM1ds:PositionScaleX
S16IDFE-XBPM:CM1ds:PositionScaleY / S16IDFE-XBPM:CM1ds:PositionScaleY
S16IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S16IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S16IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S16IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S16IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S16IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S16IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S16IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S16IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S16IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S16IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S16IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S16IDFE-XBPM:CM1us:PositionOffsetX / S16IDFE-XBPM:CM1us:PositionOffsetX
S16IDFE-XBPM:CM1us:PositionOffsetY / S16IDFE-XBPM:CM1us:PositionOffsetY
S16IDFE-XBPM:CM1us:PositionScaleX / S16IDFE-XBPM:CM1us:PositionScaleX
S16IDFE-XBPM:CM1us:PositionScaleY / S16IDFE-XBPM:CM1us:PositionScaleY
S16IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S16IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S16IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S16IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S16IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S16IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S16IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S16IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S16IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S16IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S16IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S16IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S16IDFE-XBPM:CM2ds:PositionOffsetX / S16IDFE-XBPM:CM2ds:PositionOffsetX
S16IDFE-XBPM:CM2ds:PositionOffsetY / S16IDFE-XBPM:CM2ds:PositionOffsetY
S16IDFE-XBPM:CM2ds:PositionScaleX / S16IDFE-XBPM:CM2ds:PositionScaleX
S16IDFE-XBPM:CM2ds:PositionScaleY / S16IDFE-XBPM:CM2ds:PositionScaleY
S16IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S16IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S16IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S16IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S16IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S16IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S16IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S16IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S16IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S16IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S16IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S16IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S16IDFE-XBPM:CM2us:PositionOffsetX / S16IDFE-XBPM:CM2us:PositionOffsetX
S16IDFE-XBPM:CM2us:PositionOffsetY / S16IDFE-XBPM:CM2us:PositionOffsetY
S16IDFE-XBPM:CM2us:PositionScaleX / S16IDFE-XBPM:CM2us:PositionScaleX
S16IDFE-XBPM:CM2us:PositionScaleY / S16IDFE-XBPM:CM2us:PositionScaleY
S16IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S16IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S16IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S16IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S16IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S16IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S16IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S16IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S16IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S16IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S16IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S16IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S16IDFE-XBPM:CM3ds:PositionOffsetX / S16IDFE-XBPM:CM3ds:PositionOffsetX
S16IDFE-XBPM:CM3ds:PositionOffsetY / S16IDFE-XBPM:CM3ds:PositionOffsetY
S16IDFE-XBPM:CM3ds:PositionScaleX / S16IDFE-XBPM:CM3ds:PositionScaleX
S16IDFE-XBPM:CM3ds:PositionScaleY / S16IDFE-XBPM:CM3ds:PositionScaleY
S16IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S16IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S16IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S16IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S16IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S16IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S16IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S16IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S16IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S16IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S16IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S16IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S16IDFE-XBPM:CM3us:PositionOffsetX / S16IDFE-XBPM:CM3us:PositionOffsetX
S16IDFE-XBPM:CM3us:PositionOffsetY / S16IDFE-XBPM:CM3us:PositionOffsetY
S16IDFE-XBPM:CM3us:PositionScaleX / S16IDFE-XBPM:CM3us:PositionScaleX
S16IDFE-XBPM:CM3us:PositionScaleY / S16IDFE-XBPM:CM3us:PositionScaleY
S16IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S16IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S16IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S16IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S16IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S16IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S16IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S16IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S16IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S16IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S16IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S16IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S16IDFE-XBPM:CM4ds:PositionOffsetX / S16IDFE-XBPM:CM4ds:PositionOffsetX
S16IDFE-XBPM:CM4ds:PositionOffsetY / S16IDFE-XBPM:CM4ds:PositionOffsetY
S16IDFE-XBPM:CM4ds:PositionScaleX / S16IDFE-XBPM:CM4ds:PositionScaleX
S16IDFE-XBPM:CM4ds:PositionScaleY / S16IDFE-XBPM:CM4ds:PositionScaleY
S16IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S16IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S16IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S16IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S16IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S16IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S16IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S16IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S16IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S16IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S16IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S16IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S16IDFE-XBPM:CM4us:PositionOffsetX / S16IDFE-XBPM:CM4us:PositionOffsetX
S16IDFE-XBPM:CM4us:PositionOffsetY / S16IDFE-XBPM:CM4us:PositionOffsetY
S16IDFE-XBPM:CM4us:PositionScaleX / S16IDFE-XBPM:CM4us:PositionScaleX
S16IDFE-XBPM:CM4us:PositionScaleY / S16IDFE-XBPM:CM4us:PositionScaleY
S17IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S17IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S17IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S17IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S17IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S17IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S17IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S17IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S17IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S17IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S17IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S17IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S17IDFE-XBPM:CM1ds:PositionOffsetX / S17IDFE-XBPM:CM1ds:PositionOffsetX
S17IDFE-XBPM:CM1ds:PositionOffsetY / S17IDFE-XBPM:CM1ds:PositionOffsetY
S17IDFE-XBPM:CM1ds:PositionScaleX / S17IDFE-XBPM:CM1ds:PositionScaleX
S17IDFE-XBPM:CM1ds:PositionScaleY / S17IDFE-XBPM:CM1ds:PositionScaleY
S17IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S17IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S17IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S17IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S17IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S17IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S17IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S17IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S17IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S17IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S17IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S17IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S17IDFE-XBPM:CM2ds:PositionOffsetX / S17IDFE-XBPM:CM2ds:PositionOffsetX
S17IDFE-XBPM:CM2ds:PositionOffsetY / S17IDFE-XBPM:CM2ds:PositionOffsetY
S17IDFE-XBPM:CM2ds:PositionScaleX / S17IDFE-XBPM:CM2ds:PositionScaleX
S17IDFE-XBPM:CM2ds:PositionScaleY / S17IDFE-XBPM:CM2ds:PositionScaleY
S17IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S17IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S17IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S17IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S17IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S17IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S17IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S17IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S17IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S17IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S17IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S17IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S17IDFE-XBPM:CM3ds:PositionOffsetX / S17IDFE-XBPM:CM3ds:PositionOffsetX
S17IDFE-XBPM:CM3ds:PositionOffsetY / S17IDFE-XBPM:CM3ds:PositionOffsetY
S17IDFE-XBPM:CM3ds:PositionScaleX / S17IDFE-XBPM:CM3ds:PositionScaleX
S17IDFE-XBPM:CM3ds:PositionScaleY / S17IDFE-XBPM:CM3ds:PositionScaleY
S17IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S17IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S17IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S17IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S17IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S17IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S17IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S17IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S17IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S17IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S17IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S17IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S17IDFE-XBPM:CM4ds:PositionOffsetX / S17IDFE-XBPM:CM4ds:PositionOffsetX
S17IDFE-XBPM:CM4ds:PositionOffsetY / S17IDFE-XBPM:CM4ds:PositionOffsetY
S17IDFE-XBPM:CM4ds:PositionScaleX / S17IDFE-XBPM:CM4ds:PositionScaleX
S17IDFE-XBPM:CM4ds:PositionScaleY / S17IDFE-XBPM:CM4ds:PositionScaleY
S18IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S18IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S18IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S18IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S18IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S18IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S18IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S18IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S18IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S18IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S18IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S18IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S18IDFE-XBPM:CM1ds:PositionOffsetX / S18IDFE-XBPM:CM1ds:PositionOffsetX
S18IDFE-XBPM:CM1ds:PositionOffsetY / S18IDFE-XBPM:CM1ds:PositionOffsetY
S18IDFE-XBPM:CM1ds:PositionScaleX / S18IDFE-XBPM:CM1ds:PositionScaleX
S18IDFE-XBPM:CM1ds:PositionScaleY / S18IDFE-XBPM:CM1ds:PositionScaleY
S18IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S18IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S18IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S18IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S18IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S18IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S18IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S18IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S18IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S18IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S18IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S18IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S18IDFE-XBPM:CM2ds:PositionOffsetX / S18IDFE-XBPM:CM2ds:PositionOffsetX
S18IDFE-XBPM:CM2ds:PositionOffsetY / S18IDFE-XBPM:CM2ds:PositionOffsetY
S18IDFE-XBPM:CM2ds:PositionScaleX / S18IDFE-XBPM:CM2ds:PositionScaleX
S18IDFE-XBPM:CM2ds:PositionScaleY / S18IDFE-XBPM:CM2ds:PositionScaleY
S18IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S18IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S18IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S18IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S18IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S18IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S18IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S18IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S18IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S18IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S18IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S18IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S18IDFE-XBPM:CM3ds:PositionOffsetX / S18IDFE-XBPM:CM3ds:PositionOffsetX
S18IDFE-XBPM:CM3ds:PositionOffsetY / S18IDFE-XBPM:CM3ds:PositionOffsetY
S18IDFE-XBPM:CM3ds:PositionScaleX / S18IDFE-XBPM:CM3ds:PositionScaleX
S18IDFE-XBPM:CM3ds:PositionScaleY / S18IDFE-XBPM:CM3ds:PositionScaleY
S18IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S18IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S18IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S18IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S18IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S18IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S18IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S18IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S18IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S18IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S18IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S18IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S18IDFE-XBPM:CM4ds:PositionOffsetX / S18IDFE-XBPM:CM4ds:PositionOffsetX
S18IDFE-XBPM:CM4ds:PositionOffsetY / S18IDFE-XBPM:CM4ds:PositionOffsetY
S18IDFE-XBPM:CM4ds:PositionScaleX / S18IDFE-XBPM:CM4ds:PositionScaleX
S18IDFE-XBPM:CM4ds:PositionScaleY / S18IDFE-XBPM:CM4ds:PositionScaleY
S19IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S19IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S19IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S19IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S19IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S19IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S19IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S19IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S19IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S19IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S19IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S19IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S19IDFE-XBPM:CM1ds:PositionOffsetX / S19IDFE-XBPM:CM1ds:PositionOffsetX
S19IDFE-XBPM:CM1ds:PositionOffsetY / S19IDFE-XBPM:CM1ds:PositionOffsetY
S19IDFE-XBPM:CM1ds:PositionScaleX / S19IDFE-XBPM:CM1ds:PositionScaleX
S19IDFE-XBPM:CM1ds:PositionScaleY / S19IDFE-XBPM:CM1ds:PositionScaleY
S19IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S19IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S19IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S19IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S19IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S19IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S19IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S19IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S19IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S19IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S19IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S19IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S19IDFE-XBPM:CM2ds:PositionOffsetX / S19IDFE-XBPM:CM2ds:PositionOffsetX
S19IDFE-XBPM:CM2ds:PositionOffsetY / S19IDFE-XBPM:CM2ds:PositionOffsetY
S19IDFE-XBPM:CM2ds:PositionScaleX / S19IDFE-XBPM:CM2ds:PositionScaleX
S19IDFE-XBPM:CM2ds:PositionScaleY / S19IDFE-XBPM:CM2ds:PositionScaleY
S19IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S19IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S19IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S19IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S19IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S19IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S19IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S19IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S19IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S19IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S19IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S19IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S19IDFE-XBPM:CM3ds:PositionOffsetX / S19IDFE-XBPM:CM3ds:PositionOffsetX
S19IDFE-XBPM:CM3ds:PositionOffsetY / S19IDFE-XBPM:CM3ds:PositionOffsetY
S19IDFE-XBPM:CM3ds:PositionScaleX / S19IDFE-XBPM:CM3ds:PositionScaleX
S19IDFE-XBPM:CM3ds:PositionScaleY / S19IDFE-XBPM:CM3ds:PositionScaleY
S19IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S19IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S19IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S19IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S19IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S19IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S19IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S19IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S19IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S19IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S19IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S19IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S19IDFE-XBPM:CM4ds:PositionOffsetX / S19IDFE-XBPM:CM4ds:PositionOffsetX
S19IDFE-XBPM:CM4ds:PositionOffsetY / S19IDFE-XBPM:CM4ds:PositionOffsetY
S19IDFE-XBPM:CM4ds:PositionScaleX / S19IDFE-XBPM:CM4ds:PositionScaleX
S19IDFE-XBPM:CM4ds:PositionScaleY / S19IDFE-XBPM:CM4ds:PositionScaleY
S20IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S20IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S20IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S20IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S20IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S20IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S20IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S20IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S20IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S20IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S20IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S20IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S20IDFE-XBPM:CM1ds:PositionOffsetX / S20IDFE-XBPM:CM1ds:PositionOffsetX
S20IDFE-XBPM:CM1ds:PositionOffsetY / S20IDFE-XBPM:CM1ds:PositionOffsetY
S20IDFE-XBPM:CM1ds:PositionScaleX / S20IDFE-XBPM:CM1ds:PositionScaleX
S20IDFE-XBPM:CM1ds:PositionScaleY / S20IDFE-XBPM:CM1ds:PositionScaleY
S20IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S20IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S20IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S20IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S20IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S20IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S20IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S20IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S20IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S20IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S20IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S20IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S20IDFE-XBPM:CM2ds:PositionOffsetX / S20IDFE-XBPM:CM2ds:PositionOffsetX
S20IDFE-XBPM:CM2ds:PositionOffsetY / S20IDFE-XBPM:CM2ds:PositionOffsetY
S20IDFE-XBPM:CM2ds:PositionScaleX / S20IDFE-XBPM:CM2ds:PositionScaleX
S20IDFE-XBPM:CM2ds:PositionScaleY / S20IDFE-XBPM:CM2ds:PositionScaleY
S20IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S20IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S20IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S20IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S20IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S20IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S20IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S20IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S20IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S20IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S20IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S20IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S20IDFE-XBPM:CM3ds:PositionOffsetX / S20IDFE-XBPM:CM3ds:PositionOffsetX
S20IDFE-XBPM:CM3ds:PositionOffsetY / S20IDFE-XBPM:CM3ds:PositionOffsetY
S20IDFE-XBPM:CM3ds:PositionScaleX / S20IDFE-XBPM:CM3ds:PositionScaleX
S20IDFE-XBPM:CM3ds:PositionScaleY / S20IDFE-XBPM:CM3ds:PositionScaleY
S20IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S20IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S20IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S20IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S20IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S20IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S20IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S20IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S20IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S20IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S20IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S20IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S20IDFE-XBPM:CM4ds:PositionOffsetX / S20IDFE-XBPM:CM4ds:PositionOffsetX
S20IDFE-XBPM:CM4ds:PositionOffsetY / S20IDFE-XBPM:CM4ds:PositionOffsetY
S20IDFE-XBPM:CM4ds:PositionScaleX / S20IDFE-XBPM:CM4ds:PositionScaleX
S20IDFE-XBPM:CM4ds:PositionScaleY / S20IDFE-XBPM:CM4ds:PositionScaleY
S21IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S21IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S21IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S21IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S21IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S21IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S21IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S21IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S21IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S21IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S21IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S21IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S21IDFE-XBPM:CM1ds:PositionOffsetX / S21IDFE-XBPM:CM1ds:PositionOffsetX
S21IDFE-XBPM:CM1ds:PositionOffsetY / S21IDFE-XBPM:CM1ds:PositionOffsetY
S21IDFE-XBPM:CM1ds:PositionScaleX / S21IDFE-XBPM:CM1ds:PositionScaleX
S21IDFE-XBPM:CM1ds:PositionScaleY / S21IDFE-XBPM:CM1ds:PositionScaleY
S21IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S21IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S21IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S21IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S21IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S21IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S21IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S21IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S21IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S21IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S21IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S21IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S21IDFE-XBPM:CM1us:PositionOffsetX / S21IDFE-XBPM:CM1us:PositionOffsetX
S21IDFE-XBPM:CM1us:PositionOffsetY / S21IDFE-XBPM:CM1us:PositionOffsetY
S21IDFE-XBPM:CM1us:PositionScaleX / S21IDFE-XBPM:CM1us:PositionScaleX
S21IDFE-XBPM:CM1us:PositionScaleY / S21IDFE-XBPM:CM1us:PositionScaleY
S21IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S21IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S21IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S21IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S21IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S21IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S21IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S21IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S21IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S21IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S21IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S21IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S21IDFE-XBPM:CM2ds:PositionOffsetX / S21IDFE-XBPM:CM2ds:PositionOffsetX
S21IDFE-XBPM:CM2ds:PositionOffsetY / S21IDFE-XBPM:CM2ds:PositionOffsetY
S21IDFE-XBPM:CM2ds:PositionScaleX / S21IDFE-XBPM:CM2ds:PositionScaleX
S21IDFE-XBPM:CM2ds:PositionScaleY / S21IDFE-XBPM:CM2ds:PositionScaleY
S21IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S21IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S21IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S21IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S21IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S21IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S21IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S21IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S21IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S21IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S21IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S21IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S21IDFE-XBPM:CM2us:PositionOffsetX / S21IDFE-XBPM:CM2us:PositionOffsetX
S21IDFE-XBPM:CM2us:PositionOffsetY / S21IDFE-XBPM:CM2us:PositionOffsetY
S21IDFE-XBPM:CM2us:PositionScaleX / S21IDFE-XBPM:CM2us:PositionScaleX
S21IDFE-XBPM:CM2us:PositionScaleY / S21IDFE-XBPM:CM2us:PositionScaleY
S21IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S21IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S21IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S21IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S21IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S21IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S21IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S21IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S21IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S21IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S21IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S21IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S21IDFE-XBPM:CM3ds:PositionOffsetX / S21IDFE-XBPM:CM3ds:PositionOffsetX
S21IDFE-XBPM:CM3ds:PositionOffsetY / S21IDFE-XBPM:CM3ds:PositionOffsetY
S21IDFE-XBPM:CM3ds:PositionScaleX / S21IDFE-XBPM:CM3ds:PositionScaleX
S21IDFE-XBPM:CM3ds:PositionScaleY / S21IDFE-XBPM:CM3ds:PositionScaleY
S21IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S21IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S21IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S21IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S21IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S21IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S21IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S21IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S21IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S21IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S21IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S21IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S21IDFE-XBPM:CM3us:PositionOffsetX / S21IDFE-XBPM:CM3us:PositionOffsetX
S21IDFE-XBPM:CM3us:PositionOffsetY / S21IDFE-XBPM:CM3us:PositionOffsetY
S21IDFE-XBPM:CM3us:PositionScaleX / S21IDFE-XBPM:CM3us:PositionScaleX
S21IDFE-XBPM:CM3us:PositionScaleY / S21IDFE-XBPM:CM3us:PositionScaleY
S21IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S21IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S21IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S21IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S21IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S21IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S21IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S21IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S21IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S21IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S21IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S21IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S21IDFE-XBPM:CM4ds:PositionOffsetX / S21IDFE-XBPM:CM4ds:PositionOffsetX
S21IDFE-XBPM:CM4ds:PositionOffsetY / S21IDFE-XBPM:CM4ds:PositionOffsetY
S21IDFE-XBPM:CM4ds:PositionScaleX / S21IDFE-XBPM:CM4ds:PositionScaleX
S21IDFE-XBPM:CM4ds:PositionScaleY / S21IDFE-XBPM:CM4ds:PositionScaleY
S21IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S21IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S21IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S21IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S21IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S21IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S21IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S21IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S21IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S21IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S21IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S21IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S21IDFE-XBPM:CM4us:PositionOffsetX / S21IDFE-XBPM:CM4us:PositionOffsetX
S21IDFE-XBPM:CM4us:PositionOffsetY / S21IDFE-XBPM:CM4us:PositionOffsetY
S21IDFE-XBPM:CM4us:PositionScaleX / S21IDFE-XBPM:CM4us:PositionScaleX
S21IDFE-XBPM:CM4us:PositionScaleY / S21IDFE-XBPM:CM4us:PositionScaleY
S22IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S22IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S22IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S22IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S22IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S22IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S22IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S22IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S22IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S22IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S22IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S22IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S22IDFE-XBPM:CM1ds:PositionOffsetX / S22IDFE-XBPM:CM1ds:PositionOffsetX
S22IDFE-XBPM:CM1ds:PositionOffsetY / S22IDFE-XBPM:CM1ds:PositionOffsetY
S22IDFE-XBPM:CM1ds:PositionScaleX / S22IDFE-XBPM:CM1ds:PositionScaleX
S22IDFE-XBPM:CM1ds:PositionScaleY / S22IDFE-XBPM:CM1ds:PositionScaleY
S22IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S22IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S22IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S22IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S22IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S22IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S22IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S22IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S22IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S22IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S22IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S22IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S22IDFE-XBPM:CM1us:PositionOffsetX / S22IDFE-XBPM:CM1us:PositionOffsetX
S22IDFE-XBPM:CM1us:PositionOffsetY / S22IDFE-XBPM:CM1us:PositionOffsetY
S22IDFE-XBPM:CM1us:PositionScaleX / S22IDFE-XBPM:CM1us:PositionScaleX
S22IDFE-XBPM:CM1us:PositionScaleY / S22IDFE-XBPM:CM1us:PositionScaleY
S22IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S22IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S22IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S22IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S22IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S22IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S22IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S22IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S22IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S22IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S22IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S22IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S22IDFE-XBPM:CM2ds:PositionOffsetX / S22IDFE-XBPM:CM2ds:PositionOffsetX
S22IDFE-XBPM:CM2ds:PositionOffsetY / S22IDFE-XBPM:CM2ds:PositionOffsetY
S22IDFE-XBPM:CM2ds:PositionScaleX / S22IDFE-XBPM:CM2ds:PositionScaleX
S22IDFE-XBPM:CM2ds:PositionScaleY / S22IDFE-XBPM:CM2ds:PositionScaleY
S22IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S22IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S22IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S22IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S22IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S22IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S22IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S22IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S22IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S22IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S22IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S22IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S22IDFE-XBPM:CM2us:PositionOffsetX / S22IDFE-XBPM:CM2us:PositionOffsetX
S22IDFE-XBPM:CM2us:PositionOffsetY / S22IDFE-XBPM:CM2us:PositionOffsetY
S22IDFE-XBPM:CM2us:PositionScaleX / S22IDFE-XBPM:CM2us:PositionScaleX
S22IDFE-XBPM:CM2us:PositionScaleY / S22IDFE-XBPM:CM2us:PositionScaleY
S22IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S22IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S22IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S22IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S22IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S22IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S22IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S22IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S22IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S22IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S22IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S22IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S22IDFE-XBPM:CM3ds:PositionOffsetX / S22IDFE-XBPM:CM3ds:PositionOffsetX
S22IDFE-XBPM:CM3ds:PositionOffsetY / S22IDFE-XBPM:CM3ds:PositionOffsetY
S22IDFE-XBPM:CM3ds:PositionScaleX / S22IDFE-XBPM:CM3ds:PositionScaleX
S22IDFE-XBPM:CM3ds:PositionScaleY / S22IDFE-XBPM:CM3ds:PositionScaleY
S22IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S22IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S22IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S22IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S22IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S22IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S22IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S22IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S22IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S22IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S22IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S22IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S22IDFE-XBPM:CM3us:PositionOffsetX / S22IDFE-XBPM:CM3us:PositionOffsetX
S22IDFE-XBPM:CM3us:PositionOffsetY / S22IDFE-XBPM:CM3us:PositionOffsetY
S22IDFE-XBPM:CM3us:PositionScaleX / S22IDFE-XBPM:CM3us:PositionScaleX
S22IDFE-XBPM:CM3us:PositionScaleY / S22IDFE-XBPM:CM3us:PositionScaleY
S22IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S22IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S22IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S22IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S22IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S22IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S22IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S22IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S22IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S22IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S22IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S22IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S22IDFE-XBPM:CM4ds:PositionOffsetX / S22IDFE-XBPM:CM4ds:PositionOffsetX
S22IDFE-XBPM:CM4ds:PositionOffsetY / S22IDFE-XBPM:CM4ds:PositionOffsetY
S22IDFE-XBPM:CM4ds:PositionScaleX / S22IDFE-XBPM:CM4ds:PositionScaleX
S22IDFE-XBPM:CM4ds:PositionScaleY / S22IDFE-XBPM:CM4ds:PositionScaleY
S22IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S22IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S22IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S22IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S22IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S22IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S22IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S22IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S22IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S22IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S22IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S22IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S22IDFE-XBPM:CM4us:PositionOffsetX / S22IDFE-XBPM:CM4us:PositionOffsetX
S22IDFE-XBPM:CM4us:PositionOffsetY / S22IDFE-XBPM:CM4us:PositionOffsetY
S22IDFE-XBPM:CM4us:PositionScaleX / S22IDFE-XBPM:CM4us:PositionScaleX
S22IDFE-XBPM:CM4us:PositionScaleY / S22IDFE-XBPM:CM4us:PositionScaleY
S23IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S23IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S23IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S23IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S23IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S23IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S23IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S23IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S23IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S23IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S23IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S23IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S23IDFE-XBPM:CM1ds:PositionOffsetX / S23IDFE-XBPM:CM1ds:PositionOffsetX
S23IDFE-XBPM:CM1ds:PositionOffsetY / S23IDFE-XBPM:CM1ds:PositionOffsetY
S23IDFE-XBPM:CM1ds:PositionScaleX / S23IDFE-XBPM:CM1ds:PositionScaleX
S23IDFE-XBPM:CM1ds:PositionScaleY / S23IDFE-XBPM:CM1ds:PositionScaleY
S23IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S23IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S23IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S23IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S23IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S23IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S23IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S23IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S23IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S23IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S23IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S23IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S23IDFE-XBPM:CM1us:PositionOffsetX / S23IDFE-XBPM:CM1us:PositionOffsetX
S23IDFE-XBPM:CM1us:PositionOffsetY / S23IDFE-XBPM:CM1us:PositionOffsetY
S23IDFE-XBPM:CM1us:PositionScaleX / S23IDFE-XBPM:CM1us:PositionScaleX
S23IDFE-XBPM:CM1us:PositionScaleY / S23IDFE-XBPM:CM1us:PositionScaleY
S23IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S23IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S23IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S23IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S23IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S23IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S23IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S23IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S23IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S23IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S23IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S23IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S23IDFE-XBPM:CM2ds:PositionOffsetX / S23IDFE-XBPM:CM2ds:PositionOffsetX
S23IDFE-XBPM:CM2ds:PositionOffsetY / S23IDFE-XBPM:CM2ds:PositionOffsetY
S23IDFE-XBPM:CM2ds:PositionScaleX / S23IDFE-XBPM:CM2ds:PositionScaleX
S23IDFE-XBPM:CM2ds:PositionScaleY / S23IDFE-XBPM:CM2ds:PositionScaleY
S23IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S23IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S23IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S23IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S23IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S23IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S23IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S23IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S23IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S23IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S23IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S23IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S23IDFE-XBPM:CM2us:PositionOffsetX / S23IDFE-XBPM:CM2us:PositionOffsetX
S23IDFE-XBPM:CM2us:PositionOffsetY / S23IDFE-XBPM:CM2us:PositionOffsetY
S23IDFE-XBPM:CM2us:PositionScaleX / S23IDFE-XBPM:CM2us:PositionScaleX
S23IDFE-XBPM:CM2us:PositionScaleY / S23IDFE-XBPM:CM2us:PositionScaleY
S23IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S23IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S23IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S23IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S23IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S23IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S23IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S23IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S23IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S23IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S23IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S23IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S23IDFE-XBPM:CM3ds:PositionOffsetX / S23IDFE-XBPM:CM3ds:PositionOffsetX
S23IDFE-XBPM:CM3ds:PositionOffsetY / S23IDFE-XBPM:CM3ds:PositionOffsetY
S23IDFE-XBPM:CM3ds:PositionScaleX / S23IDFE-XBPM:CM3ds:PositionScaleX
S23IDFE-XBPM:CM3ds:PositionScaleY / S23IDFE-XBPM:CM3ds:PositionScaleY
S23IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S23IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S23IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S23IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S23IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S23IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S23IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S23IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S23IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S23IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S23IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S23IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S23IDFE-XBPM:CM3us:PositionOffsetX / S23IDFE-XBPM:CM3us:PositionOffsetX
S23IDFE-XBPM:CM3us:PositionOffsetY / S23IDFE-XBPM:CM3us:PositionOffsetY
S23IDFE-XBPM:CM3us:PositionScaleX / S23IDFE-XBPM:CM3us:PositionScaleX
S23IDFE-XBPM:CM3us:PositionScaleY / S23IDFE-XBPM:CM3us:PositionScaleY
S23IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S23IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S23IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S23IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S23IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S23IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S23IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S23IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S23IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S23IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S23IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S23IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S23IDFE-XBPM:CM4ds:PositionOffsetX / S23IDFE-XBPM:CM4ds:PositionOffsetX
S23IDFE-XBPM:CM4ds:PositionOffsetY / S23IDFE-XBPM:CM4ds:PositionOffsetY
S23IDFE-XBPM:CM4ds:PositionScaleX / S23IDFE-XBPM:CM4ds:PositionScaleX
S23IDFE-XBPM:CM4ds:PositionScaleY / S23IDFE-XBPM:CM4ds:PositionScaleY
S23IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S23IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S23IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S23IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S23IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S23IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S23IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S23IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S23IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S23IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S23IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S23IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S23IDFE-XBPM:CM4us:PositionOffsetX / S23IDFE-XBPM:CM4us:PositionOffsetX
S23IDFE-XBPM:CM4us:PositionOffsetY / S23IDFE-XBPM:CM4us:PositionOffsetY
S23IDFE-XBPM:CM4us:PositionScaleX / S23IDFE-XBPM:CM4us:PositionScaleX
S23IDFE-XBPM:CM4us:PositionScaleY / S23IDFE-XBPM:CM4us:PositionScaleY
S24IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S24IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S24IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S24IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S24IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S24IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S24IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S24IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S24IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S24IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S24IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S24IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S24IDFE-XBPM:CM1ds:PositionOffsetX / S24IDFE-XBPM:CM1ds:PositionOffsetX
S24IDFE-XBPM:CM1ds:PositionOffsetY / S24IDFE-XBPM:CM1ds:PositionOffsetY
S24IDFE-XBPM:CM1ds:PositionScaleX / S24IDFE-XBPM:CM1ds:PositionScaleX
S24IDFE-XBPM:CM1ds:PositionScaleY / S24IDFE-XBPM:CM1ds:PositionScaleY
S24IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S24IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S24IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S24IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S24IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S24IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S24IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S24IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S24IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S24IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S24IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S24IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S24IDFE-XBPM:CM1us:PositionOffsetX / S24IDFE-XBPM:CM1us:PositionOffsetX
S24IDFE-XBPM:CM1us:PositionOffsetY / S24IDFE-XBPM:CM1us:PositionOffsetY
S24IDFE-XBPM:CM1us:PositionScaleX / S24IDFE-XBPM:CM1us:PositionScaleX
S24IDFE-XBPM:CM1us:PositionScaleY / S24IDFE-XBPM:CM1us:PositionScaleY
S24IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S24IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S24IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S24IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S24IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S24IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S24IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S24IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S24IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S24IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S24IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S24IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S24IDFE-XBPM:CM2ds:PositionOffsetX / S24IDFE-XBPM:CM2ds:PositionOffsetX
S24IDFE-XBPM:CM2ds:PositionOffsetY / S24IDFE-XBPM:CM2ds:PositionOffsetY
S24IDFE-XBPM:CM2ds:PositionScaleX / S24IDFE-XBPM:CM2ds:PositionScaleX
S24IDFE-XBPM:CM2ds:PositionScaleY / S24IDFE-XBPM:CM2ds:PositionScaleY
S24IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S24IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S24IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S24IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S24IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S24IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S24IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S24IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S24IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S24IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S24IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S24IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S24IDFE-XBPM:CM2us:PositionOffsetX / S24IDFE-XBPM:CM2us:PositionOffsetX
S24IDFE-XBPM:CM2us:PositionOffsetY / S24IDFE-XBPM:CM2us:PositionOffsetY
S24IDFE-XBPM:CM2us:PositionScaleX / S24IDFE-XBPM:CM2us:PositionScaleX
S24IDFE-XBPM:CM2us:PositionScaleY / S24IDFE-XBPM:CM2us:PositionScaleY
S24IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S24IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S24IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S24IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S24IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S24IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S24IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S24IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S24IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S24IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S24IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S24IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S24IDFE-XBPM:CM3ds:PositionOffsetX / S24IDFE-XBPM:CM3ds:PositionOffsetX
S24IDFE-XBPM:CM3ds:PositionOffsetY / S24IDFE-XBPM:CM3ds:PositionOffsetY
S24IDFE-XBPM:CM3ds:PositionScaleX / S24IDFE-XBPM:CM3ds:PositionScaleX
S24IDFE-XBPM:CM3ds:PositionScaleY / S24IDFE-XBPM:CM3ds:PositionScaleY
S24IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S24IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S24IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S24IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S24IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S24IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S24IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S24IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S24IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S24IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S24IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S24IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S24IDFE-XBPM:CM3us:PositionOffsetX / S24IDFE-XBPM:CM3us:PositionOffsetX
S24IDFE-XBPM:CM3us:PositionOffsetY / S24IDFE-XBPM:CM3us:PositionOffsetY
S24IDFE-XBPM:CM3us:PositionScaleX / S24IDFE-XBPM:CM3us:PositionScaleX
S24IDFE-XBPM:CM3us:PositionScaleY / S24IDFE-XBPM:CM3us:PositionScaleY
S24IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S24IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S24IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S24IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S24IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S24IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S24IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S24IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S24IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S24IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S24IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S24IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S24IDFE-XBPM:CM4ds:PositionOffsetX / S24IDFE-XBPM:CM4ds:PositionOffsetX
S24IDFE-XBPM:CM4ds:PositionOffsetY / S24IDFE-XBPM:CM4ds:PositionOffsetY
S24IDFE-XBPM:CM4ds:PositionScaleX / S24IDFE-XBPM:CM4ds:PositionScaleX
S24IDFE-XBPM:CM4ds:PositionScaleY / S24IDFE-XBPM:CM4ds:PositionScaleY
S24IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S24IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S24IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S24IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S24IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S24IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S24IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S24IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S24IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S24IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S24IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S24IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S24IDFE-XBPM:CM4us:PositionOffsetX / S24IDFE-XBPM:CM4us:PositionOffsetX
S24IDFE-XBPM:CM4us:PositionOffsetY / S24IDFE-XBPM:CM4us:PositionOffsetY
S24IDFE-XBPM:CM4us:PositionScaleX / S24IDFE-XBPM:CM4us:PositionScaleX
S24IDFE-XBPM:CM4us:PositionScaleY / S24IDFE-XBPM:CM4us:PositionScaleY
S25IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S25IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S25IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S25IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S25IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S25IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S25IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S25IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S25IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S25IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S25IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S25IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S25IDFE-XBPM:CM1ds:PositionOffsetX / S25IDFE-XBPM:CM1ds:PositionOffsetX
S25IDFE-XBPM:CM1ds:PositionOffsetY / S25IDFE-XBPM:CM1ds:PositionOffsetY
S25IDFE-XBPM:CM1ds:PositionScaleX / S25IDFE-XBPM:CM1ds:PositionScaleX
S25IDFE-XBPM:CM1ds:PositionScaleY / S25IDFE-XBPM:CM1ds:PositionScaleY
S25IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S25IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S25IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S25IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S25IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S25IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S25IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S25IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S25IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S25IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S25IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S25IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S25IDFE-XBPM:CM1us:PositionOffsetX / S25IDFE-XBPM:CM1us:PositionOffsetX
S25IDFE-XBPM:CM1us:PositionOffsetY / S25IDFE-XBPM:CM1us:PositionOffsetY
S25IDFE-XBPM:CM1us:PositionScaleX / S25IDFE-XBPM:CM1us:PositionScaleX
S25IDFE-XBPM:CM1us:PositionScaleY / S25IDFE-XBPM:CM1us:PositionScaleY
S25IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S25IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S25IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S25IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S25IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S25IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S25IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S25IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S25IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S25IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S25IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S25IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S25IDFE-XBPM:CM2ds:PositionOffsetX / S25IDFE-XBPM:CM2ds:PositionOffsetX
S25IDFE-XBPM:CM2ds:PositionOffsetY / S25IDFE-XBPM:CM2ds:PositionOffsetY
S25IDFE-XBPM:CM2ds:PositionScaleX / S25IDFE-XBPM:CM2ds:PositionScaleX
S25IDFE-XBPM:CM2ds:PositionScaleY / S25IDFE-XBPM:CM2ds:PositionScaleY
S25IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S25IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S25IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S25IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S25IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S25IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S25IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S25IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S25IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S25IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S25IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S25IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S25IDFE-XBPM:CM2us:PositionOffsetX / S25IDFE-XBPM:CM2us:PositionOffsetX
S25IDFE-XBPM:CM2us:PositionOffsetY / S25IDFE-XBPM:CM2us:PositionOffsetY
S25IDFE-XBPM:CM2us:PositionScaleX / S25IDFE-XBPM:CM2us:PositionScaleX
S25IDFE-XBPM:CM2us:PositionScaleY / S25IDFE-XBPM:CM2us:PositionScaleY
S25IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S25IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S25IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S25IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S25IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S25IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S25IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S25IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S25IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S25IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S25IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S25IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S25IDFE-XBPM:CM3ds:PositionOffsetX / S25IDFE-XBPM:CM3ds:PositionOffsetX
S25IDFE-XBPM:CM3ds:PositionOffsetY / S25IDFE-XBPM:CM3ds:PositionOffsetY
S25IDFE-XBPM:CM3ds:PositionScaleX / S25IDFE-XBPM:CM3ds:PositionScaleX
S25IDFE-XBPM:CM3ds:PositionScaleY / S25IDFE-XBPM:CM3ds:PositionScaleY
S25IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S25IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S25IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S25IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S25IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S25IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S25IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S25IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S25IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S25IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S25IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S25IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S25IDFE-XBPM:CM3us:PositionOffsetX / S25IDFE-XBPM:CM3us:PositionOffsetX
S25IDFE-XBPM:CM3us:PositionOffsetY / S25IDFE-XBPM:CM3us:PositionOffsetY
S25IDFE-XBPM:CM3us:PositionScaleX / S25IDFE-XBPM:CM3us:PositionScaleX
S25IDFE-XBPM:CM3us:PositionScaleY / S25IDFE-XBPM:CM3us:PositionScaleY
S25IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S25IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S25IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S25IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S25IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S25IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S25IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S25IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S25IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S25IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S25IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S25IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S25IDFE-XBPM:CM4ds:PositionOffsetX / S25IDFE-XBPM:CM4ds:PositionOffsetX
S25IDFE-XBPM:CM4ds:PositionOffsetY / S25IDFE-XBPM:CM4ds:PositionOffsetY
S25IDFE-XBPM:CM4ds:PositionScaleX / S25IDFE-XBPM:CM4ds:PositionScaleX
S25IDFE-XBPM:CM4ds:PositionScaleY / S25IDFE-XBPM:CM4ds:PositionScaleY
S25IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S25IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S25IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S25IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S25IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S25IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S25IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S25IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S25IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S25IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S25IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S25IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S25IDFE-XBPM:CM4us:PositionOffsetX / S25IDFE-XBPM:CM4us:PositionOffsetX
S25IDFE-XBPM:CM4us:PositionOffsetY / S25IDFE-XBPM:CM4us:PositionOffsetY
S25IDFE-XBPM:CM4us:PositionScaleX / S25IDFE-XBPM:CM4us:PositionScaleX
S25IDFE-XBPM:CM4us:PositionScaleY / S25IDFE-XBPM:CM4us:PositionScaleY
S26IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S26IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S26IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S26IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S26IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S26IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S26IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S26IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S26IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S26IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S26IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S26IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S26IDFE-XBPM:CM1ds:PositionOffsetX / S26IDFE-XBPM:CM1ds:PositionOffsetX
S26IDFE-XBPM:CM1ds:PositionOffsetY / S26IDFE-XBPM:CM1ds:PositionOffsetY
S26IDFE-XBPM:CM1ds:PositionScaleX / S26IDFE-XBPM:CM1ds:PositionScaleX
S26IDFE-XBPM:CM1ds:PositionScaleY / S26IDFE-XBPM:CM1ds:PositionScaleY
S26IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S26IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S26IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S26IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S26IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S26IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S26IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S26IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S26IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S26IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S26IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S26IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S26IDFE-XBPM:CM2ds:PositionOffsetX / S26IDFE-XBPM:CM2ds:PositionOffsetX
S26IDFE-XBPM:CM2ds:PositionOffsetY / S26IDFE-XBPM:CM2ds:PositionOffsetY
S26IDFE-XBPM:CM2ds:PositionScaleX / S26IDFE-XBPM:CM2ds:PositionScaleX
S26IDFE-XBPM:CM2ds:PositionScaleY / S26IDFE-XBPM:CM2ds:PositionScaleY
S26IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S26IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S26IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S26IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S26IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S26IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S26IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S26IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S26IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S26IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S26IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S26IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S26IDFE-XBPM:CM3ds:PositionOffsetX / S26IDFE-XBPM:CM3ds:PositionOffsetX
S26IDFE-XBPM:CM3ds:PositionOffsetY / S26IDFE-XBPM:CM3ds:PositionOffsetY
S26IDFE-XBPM:CM3ds:PositionScaleX / S26IDFE-XBPM:CM3ds:PositionScaleX
S26IDFE-XBPM:CM3ds:PositionScaleY / S26IDFE-XBPM:CM3ds:PositionScaleY
S26IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S26IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S26IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S26IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S26IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S26IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S26IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S26IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S26IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S26IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S26IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S26IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S26IDFE-XBPM:CM4ds:PositionOffsetX / S26IDFE-XBPM:CM4ds:PositionOffsetX
S26IDFE-XBPM:CM4ds:PositionOffsetY / S26IDFE-XBPM:CM4ds:PositionOffsetY
S26IDFE-XBPM:CM4ds:PositionScaleX / S26IDFE-XBPM:CM4ds:PositionScaleX
S26IDFE-XBPM:CM4ds:PositionScaleY / S26IDFE-XBPM:CM4ds:PositionScaleY
S27IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S27IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S27IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S27IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S27IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S27IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S27IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S27IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S27IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S27IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S27IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S27IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S27IDFE-XBPM:CM1ds:PositionOffsetX / S27IDFE-XBPM:CM1ds:PositionOffsetX
S27IDFE-XBPM:CM1ds:PositionOffsetY / S27IDFE-XBPM:CM1ds:PositionOffsetY
S27IDFE-XBPM:CM1ds:PositionScaleX / S27IDFE-XBPM:CM1ds:PositionScaleX
S27IDFE-XBPM:CM1ds:PositionScaleY / S27IDFE-XBPM:CM1ds:PositionScaleY
S27IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S27IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S27IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S27IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S27IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S27IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S27IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S27IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S27IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S27IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S27IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S27IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S27IDFE-XBPM:CM2ds:PositionOffsetX / S27IDFE-XBPM:CM2ds:PositionOffsetX
S27IDFE-XBPM:CM2ds:PositionOffsetY / S27IDFE-XBPM:CM2ds:PositionOffsetY
S27IDFE-XBPM:CM2ds:PositionScaleX / S27IDFE-XBPM:CM2ds:PositionScaleX
S27IDFE-XBPM:CM2ds:PositionScaleY / S27IDFE-XBPM:CM2ds:PositionScaleY
S27IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S27IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S27IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S27IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S27IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S27IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S27IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S27IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S27IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S27IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S27IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S27IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S27IDFE-XBPM:CM3ds:PositionOffsetX / S27IDFE-XBPM:CM3ds:PositionOffsetX
S27IDFE-XBPM:CM3ds:PositionOffsetY / S27IDFE-XBPM:CM3ds:PositionOffsetY
S27IDFE-XBPM:CM3ds:PositionScaleX / S27IDFE-XBPM:CM3ds:PositionScaleX
S27IDFE-XBPM:CM3ds:PositionScaleY / S27IDFE-XBPM:CM3ds:PositionScaleY
S27IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S27IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S27IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S27IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S27IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S27IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S27IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S27IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S27IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S27IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S27IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S27IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S27IDFE-XBPM:CM4ds:PositionOffsetX / S27IDFE-XBPM:CM4ds:PositionOffsetX
S27IDFE-XBPM:CM4ds:PositionOffsetY / S27IDFE-XBPM:CM4ds:PositionOffsetY
S27IDFE-XBPM:CM4ds:PositionScaleX / S27IDFE-XBPM:CM4ds:PositionScaleX
S27IDFE-XBPM:CM4ds:PositionScaleY / S27IDFE-XBPM:CM4ds:PositionScaleY
S28IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S28IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S28IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S28IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S28IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S28IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S28IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S28IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S28IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S28IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S28IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S28IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S28IDFE-XBPM:CM1ds:PositionOffsetX / S28IDFE-XBPM:CM1ds:PositionOffsetX
S28IDFE-XBPM:CM1ds:PositionOffsetY / S28IDFE-XBPM:CM1ds:PositionOffsetY
S28IDFE-XBPM:CM1ds:PositionScaleX / S28IDFE-XBPM:CM1ds:PositionScaleX
S28IDFE-XBPM:CM1ds:PositionScaleY / S28IDFE-XBPM:CM1ds:PositionScaleY
S28IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S28IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S28IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S28IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S28IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S28IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S28IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S28IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S28IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S28IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S28IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S28IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S28IDFE-XBPM:CM1us:PositionOffsetX / S28IDFE-XBPM:CM1us:PositionOffsetX
S28IDFE-XBPM:CM1us:PositionOffsetY / S28IDFE-XBPM:CM1us:PositionOffsetY
S28IDFE-XBPM:CM1us:PositionScaleX / S28IDFE-XBPM:CM1us:PositionScaleX
S28IDFE-XBPM:CM1us:PositionScaleY / S28IDFE-XBPM:CM1us:PositionScaleY
S28IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S28IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S28IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S28IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S28IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S28IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S28IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S28IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S28IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S28IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S28IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S28IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S28IDFE-XBPM:CM2ds:PositionOffsetX / S28IDFE-XBPM:CM2ds:PositionOffsetX
S28IDFE-XBPM:CM2ds:PositionOffsetY / S28IDFE-XBPM:CM2ds:PositionOffsetY
S28IDFE-XBPM:CM2ds:PositionScaleX / S28IDFE-XBPM:CM2ds:PositionScaleX
S28IDFE-XBPM:CM2ds:PositionScaleY / S28IDFE-XBPM:CM2ds:PositionScaleY
S28IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S28IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S28IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S28IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S28IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S28IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S28IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S28IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S28IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S28IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S28IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S28IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S28IDFE-XBPM:CM2us:PositionOffsetX / S28IDFE-XBPM:CM2us:PositionOffsetX
S28IDFE-XBPM:CM2us:PositionOffsetY / S28IDFE-XBPM:CM2us:PositionOffsetY
S28IDFE-XBPM:CM2us:PositionScaleX / S28IDFE-XBPM:CM2us:PositionScaleX
S28IDFE-XBPM:CM2us:PositionScaleY / S28IDFE-XBPM:CM2us:PositionScaleY
S28IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S28IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S28IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S28IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S28IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S28IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S28IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S28IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S28IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S28IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S28IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S28IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S28IDFE-XBPM:CM3ds:PositionOffsetX / S28IDFE-XBPM:CM3ds:PositionOffsetX
S28IDFE-XBPM:CM3ds:PositionOffsetY / S28IDFE-XBPM:CM3ds:PositionOffsetY
S28IDFE-XBPM:CM3ds:PositionScaleX / S28IDFE-XBPM:CM3ds:PositionScaleX
S28IDFE-XBPM:CM3ds:PositionScaleY / S28IDFE-XBPM:CM3ds:PositionScaleY
S28IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S28IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S28IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S28IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S28IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S28IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S28IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S28IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S28IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S28IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S28IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S28IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S28IDFE-XBPM:CM3us:PositionOffsetX / S28IDFE-XBPM:CM3us:PositionOffsetX
S28IDFE-XBPM:CM3us:PositionOffsetY / S28IDFE-XBPM:CM3us:PositionOffsetY
S28IDFE-XBPM:CM3us:PositionScaleX / S28IDFE-XBPM:CM3us:PositionScaleX
S28IDFE-XBPM:CM3us:PositionScaleY / S28IDFE-XBPM:CM3us:PositionScaleY
S28IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S28IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S28IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S28IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S28IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S28IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S28IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S28IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S28IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S28IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S28IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S28IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S28IDFE-XBPM:CM4ds:PositionOffsetX / S28IDFE-XBPM:CM4ds:PositionOffsetX
S28IDFE-XBPM:CM4ds:PositionOffsetY / S28IDFE-XBPM:CM4ds:PositionOffsetY
S28IDFE-XBPM:CM4ds:PositionScaleX / S28IDFE-XBPM:CM4ds:PositionScaleX
S28IDFE-XBPM:CM4ds:PositionScaleY / S28IDFE-XBPM:CM4ds:PositionScaleY
S28IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S28IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S28IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S28IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S28IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S28IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S28IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S28IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S28IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S28IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S28IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S28IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S28IDFE-XBPM:CM4us:PositionOffsetX / S28IDFE-XBPM:CM4us:PositionOffsetX
S28IDFE-XBPM:CM4us:PositionOffsetY / S28IDFE-XBPM:CM4us:PositionOffsetY
S28IDFE-XBPM:CM4us:PositionScaleX / S28IDFE-XBPM:CM4us:PositionScaleX
S28IDFE-XBPM:CM4us:PositionScaleY / S28IDFE-XBPM:CM4us:PositionScaleY
S29IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S29IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S29IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S29IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S29IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S29IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S29IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S29IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S29IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S29IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S29IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S29IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S29IDFE-XBPM:CM1ds:PositionOffsetX / S29IDFE-XBPM:CM1ds:PositionOffsetX
S29IDFE-XBPM:CM1ds:PositionOffsetY / S29IDFE-XBPM:CM1ds:PositionOffsetY
S29IDFE-XBPM:CM1ds:PositionScaleX / S29IDFE-XBPM:CM1ds:PositionScaleX
S29IDFE-XBPM:CM1ds:PositionScaleY / S29IDFE-XBPM:CM1ds:PositionScaleY
S29IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S29IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S29IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S29IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S29IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S29IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S29IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S29IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S29IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S29IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S29IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S29IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S29IDFE-XBPM:CM2ds:PositionOffsetX / S29IDFE-XBPM:CM2ds:PositionOffsetX
S29IDFE-XBPM:CM2ds:PositionOffsetY / S29IDFE-XBPM:CM2ds:PositionOffsetY
S29IDFE-XBPM:CM2ds:PositionScaleX / S29IDFE-XBPM:CM2ds:PositionScaleX
S29IDFE-XBPM:CM2ds:PositionScaleY / S29IDFE-XBPM:CM2ds:PositionScaleY
S29IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S29IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S29IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S29IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S29IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S29IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S29IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S29IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S29IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S29IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S29IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S29IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S29IDFE-XBPM:CM3ds:PositionOffsetX / S29IDFE-XBPM:CM3ds:PositionOffsetX
S29IDFE-XBPM:CM3ds:PositionOffsetY / S29IDFE-XBPM:CM3ds:PositionOffsetY
S29IDFE-XBPM:CM3ds:PositionScaleX / S29IDFE-XBPM:CM3ds:PositionScaleX
S29IDFE-XBPM:CM3ds:PositionScaleY / S29IDFE-XBPM:CM3ds:PositionScaleY
S29IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S29IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S29IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S29IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S29IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S29IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S29IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S29IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S29IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S29IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S29IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S29IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S29IDFE-XBPM:CM4ds:PositionOffsetX / S29IDFE-XBPM:CM4ds:PositionOffsetX
S29IDFE-XBPM:CM4ds:PositionOffsetY / S29IDFE-XBPM:CM4ds:PositionOffsetY
S29IDFE-XBPM:CM4ds:PositionScaleX / S29IDFE-XBPM:CM4ds:PositionScaleX
S29IDFE-XBPM:CM4ds:PositionScaleY / S29IDFE-XBPM:CM4ds:PositionScaleY
S30IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S30IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S30IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S30IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S30IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S30IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S30IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S30IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S30IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S30IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S30IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S30IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S30IDFE-XBPM:CM1ds:PositionOffsetX / S30IDFE-XBPM:CM1ds:PositionOffsetX
S30IDFE-XBPM:CM1ds:PositionOffsetY / S30IDFE-XBPM:CM1ds:PositionOffsetY
S30IDFE-XBPM:CM1ds:PositionScaleX / S30IDFE-XBPM:CM1ds:PositionScaleX
S30IDFE-XBPM:CM1ds:PositionScaleY / S30IDFE-XBPM:CM1ds:PositionScaleY
S30IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S30IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S30IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S30IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S30IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S30IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S30IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S30IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S30IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S30IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S30IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S30IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S30IDFE-XBPM:CM2ds:PositionOffsetX / S30IDFE-XBPM:CM2ds:PositionOffsetX
S30IDFE-XBPM:CM2ds:PositionOffsetY / S30IDFE-XBPM:CM2ds:PositionOffsetY
S30IDFE-XBPM:CM2ds:PositionScaleX / S30IDFE-XBPM:CM2ds:PositionScaleX
S30IDFE-XBPM:CM2ds:PositionScaleY / S30IDFE-XBPM:CM2ds:PositionScaleY
S30IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S30IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S30IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S30IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S30IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S30IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S30IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S30IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S30IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S30IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S30IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S30IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S30IDFE-XBPM:CM3ds:PositionOffsetX / S30IDFE-XBPM:CM3ds:PositionOffsetX
S30IDFE-XBPM:CM3ds:PositionOffsetY / S30IDFE-XBPM:CM3ds:PositionOffsetY
S30IDFE-XBPM:CM3ds:PositionScaleX / S30IDFE-XBPM:CM3ds:PositionScaleX
S30IDFE-XBPM:CM3ds:PositionScaleY / S30IDFE-XBPM:CM3ds:PositionScaleY
S30IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S30IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S30IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S30IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S30IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S30IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S30IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S30IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S30IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S30IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S30IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S30IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S30IDFE-XBPM:CM4ds:PositionOffsetX / S30IDFE-XBPM:CM4ds:PositionOffsetX
S30IDFE-XBPM:CM4ds:PositionOffsetY / S30IDFE-XBPM:CM4ds:PositionOffsetY
S30IDFE-XBPM:CM4ds:PositionScaleX / S30IDFE-XBPM:CM4ds:PositionScaleX
S30IDFE-XBPM:CM4ds:PositionScaleY / S30IDFE-XBPM:CM4ds:PositionScaleY
S31IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S31IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S31IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S31IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S31IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S31IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S31IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S31IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S31IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S31IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S31IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S31IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S31IDFE-XBPM:CM1ds:PositionOffsetX / S31IDFE-XBPM:CM1ds:PositionOffsetX
S31IDFE-XBPM:CM1ds:PositionOffsetY / S31IDFE-XBPM:CM1ds:PositionOffsetY
S31IDFE-XBPM:CM1ds:PositionScaleX / S31IDFE-XBPM:CM1ds:PositionScaleX
S31IDFE-XBPM:CM1ds:PositionScaleY / S31IDFE-XBPM:CM1ds:PositionScaleY
S31IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S31IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S31IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S31IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S31IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S31IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S31IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S31IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S31IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S31IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S31IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S31IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S31IDFE-XBPM:CM1us:PositionOffsetX / S31IDFE-XBPM:CM1us:PositionOffsetX
S31IDFE-XBPM:CM1us:PositionOffsetY / S31IDFE-XBPM:CM1us:PositionOffsetY
S31IDFE-XBPM:CM1us:PositionScaleX / S31IDFE-XBPM:CM1us:PositionScaleX
S31IDFE-XBPM:CM1us:PositionScaleY / S31IDFE-XBPM:CM1us:PositionScaleY
S31IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S31IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S31IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S31IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S31IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S31IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S31IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S31IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S31IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S31IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S31IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S31IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S31IDFE-XBPM:CM2ds:PositionOffsetX / S31IDFE-XBPM:CM2ds:PositionOffsetX
S31IDFE-XBPM:CM2ds:PositionOffsetY / S31IDFE-XBPM:CM2ds:PositionOffsetY
S31IDFE-XBPM:CM2ds:PositionScaleX / S31IDFE-XBPM:CM2ds:PositionScaleX
S31IDFE-XBPM:CM2ds:PositionScaleY / S31IDFE-XBPM:CM2ds:PositionScaleY
S31IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S31IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S31IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S31IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S31IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S31IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S31IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S31IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S31IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S31IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S31IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S31IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S31IDFE-XBPM:CM2us:PositionOffsetX / S31IDFE-XBPM:CM2us:PositionOffsetX
S31IDFE-XBPM:CM2us:PositionOffsetY / S31IDFE-XBPM:CM2us:PositionOffsetY
S31IDFE-XBPM:CM2us:PositionScaleX / S31IDFE-XBPM:CM2us:PositionScaleX
S31IDFE-XBPM:CM2us:PositionScaleY / S31IDFE-XBPM:CM2us:PositionScaleY
S31IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S31IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S31IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S31IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S31IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S31IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S31IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S31IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S31IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S31IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S31IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S31IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S31IDFE-XBPM:CM3ds:PositionOffsetX / S31IDFE-XBPM:CM3ds:PositionOffsetX
S31IDFE-XBPM:CM3ds:PositionOffsetY / S31IDFE-XBPM:CM3ds:PositionOffsetY
S31IDFE-XBPM:CM3ds:PositionScaleX / S31IDFE-XBPM:CM3ds:PositionScaleX
S31IDFE-XBPM:CM3ds:PositionScaleY / S31IDFE-XBPM:CM3ds:PositionScaleY
S31IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S31IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S31IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S31IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S31IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S31IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S31IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S31IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S31IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S31IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S31IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S31IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S31IDFE-XBPM:CM3us:PositionOffsetX / S31IDFE-XBPM:CM3us:PositionOffsetX
S31IDFE-XBPM:CM3us:PositionOffsetY / S31IDFE-XBPM:CM3us:PositionOffsetY
S31IDFE-XBPM:CM3us:PositionScaleX / S31IDFE-XBPM:CM3us:PositionScaleX
S31IDFE-XBPM:CM3us:PositionScaleY / S31IDFE-XBPM:CM3us:PositionScaleY
S31IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S31IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S31IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S31IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S31IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S31IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S31IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S31IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S31IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S31IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S31IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S31IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S31IDFE-XBPM:CM4ds:PositionOffsetX / S31IDFE-XBPM:CM4ds:PositionOffsetX
S31IDFE-XBPM:CM4ds:PositionOffsetY / S31IDFE-XBPM:CM4ds:PositionOffsetY
S31IDFE-XBPM:CM4ds:PositionScaleX / S31IDFE-XBPM:CM4ds:PositionScaleX
S31IDFE-XBPM:CM4ds:PositionScaleY / S31IDFE-XBPM:CM4ds:PositionScaleY
S31IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S31IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S31IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S31IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S31IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S31IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S31IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S31IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S31IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S31IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S31IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S31IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S31IDFE-XBPM:CM4us:PositionOffsetX / S31IDFE-XBPM:CM4us:PositionOffsetX
S31IDFE-XBPM:CM4us:PositionOffsetY / S31IDFE-XBPM:CM4us:PositionOffsetY
S31IDFE-XBPM:CM4us:PositionScaleX / S31IDFE-XBPM:CM4us:PositionScaleX
S31IDFE-XBPM:CM4us:PositionScaleY / S31IDFE-XBPM:CM4us:PositionScaleY
S32IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S32IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S32IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S32IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S32IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S32IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S32IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S32IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S32IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S32IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S32IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S32IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S32IDFE-XBPM:CM1ds:PositionOffsetX / S32IDFE-XBPM:CM1ds:PositionOffsetX
S32IDFE-XBPM:CM1ds:PositionOffsetY / S32IDFE-XBPM:CM1ds:PositionOffsetY
S32IDFE-XBPM:CM1ds:PositionScaleX / S32IDFE-XBPM:CM1ds:PositionScaleX
S32IDFE-XBPM:CM1ds:PositionScaleY / S32IDFE-XBPM:CM1ds:PositionScaleY
S32IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S32IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S32IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S32IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S32IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S32IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S32IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S32IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S32IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S32IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S32IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S32IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S32IDFE-XBPM:CM1us:PositionOffsetX / S32IDFE-XBPM:CM1us:PositionOffsetX
S32IDFE-XBPM:CM1us:PositionOffsetY / S32IDFE-XBPM:CM1us:PositionOffsetY
S32IDFE-XBPM:CM1us:PositionScaleX / S32IDFE-XBPM:CM1us:PositionScaleX
S32IDFE-XBPM:CM1us:PositionScaleY / S32IDFE-XBPM:CM1us:PositionScaleY
S32IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S32IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S32IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S32IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S32IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S32IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S32IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S32IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S32IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S32IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S32IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S32IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S32IDFE-XBPM:CM2ds:PositionOffsetX / S32IDFE-XBPM:CM2ds:PositionOffsetX
S32IDFE-XBPM:CM2ds:PositionOffsetY / S32IDFE-XBPM:CM2ds:PositionOffsetY
S32IDFE-XBPM:CM2ds:PositionScaleX / S32IDFE-XBPM:CM2ds:PositionScaleX
S32IDFE-XBPM:CM2ds:PositionScaleY / S32IDFE-XBPM:CM2ds:PositionScaleY
S32IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S32IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S32IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S32IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S32IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S32IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S32IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S32IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S32IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S32IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S32IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S32IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S32IDFE-XBPM:CM2us:PositionOffsetX / S32IDFE-XBPM:CM2us:PositionOffsetX
S32IDFE-XBPM:CM2us:PositionOffsetY / S32IDFE-XBPM:CM2us:PositionOffsetY
S32IDFE-XBPM:CM2us:PositionScaleX / S32IDFE-XBPM:CM2us:PositionScaleX
S32IDFE-XBPM:CM2us:PositionScaleY / S32IDFE-XBPM:CM2us:PositionScaleY
S32IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S32IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S32IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S32IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S32IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S32IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S32IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S32IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S32IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S32IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S32IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S32IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S32IDFE-XBPM:CM3ds:PositionOffsetX / S32IDFE-XBPM:CM3ds:PositionOffsetX
S32IDFE-XBPM:CM3ds:PositionOffsetY / S32IDFE-XBPM:CM3ds:PositionOffsetY
S32IDFE-XBPM:CM3ds:PositionScaleX / S32IDFE-XBPM:CM3ds:PositionScaleX
S32IDFE-XBPM:CM3ds:PositionScaleY / S32IDFE-XBPM:CM3ds:PositionScaleY
S32IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S32IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S32IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S32IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S32IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S32IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S32IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S32IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S32IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S32IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S32IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S32IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S32IDFE-XBPM:CM3us:PositionOffsetX / S32IDFE-XBPM:CM3us:PositionOffsetX
S32IDFE-XBPM:CM3us:PositionOffsetY / S32IDFE-XBPM:CM3us:PositionOffsetY
S32IDFE-XBPM:CM3us:PositionScaleX / S32IDFE-XBPM:CM3us:PositionScaleX
S32IDFE-XBPM:CM3us:PositionScaleY / S32IDFE-XBPM:CM3us:PositionScaleY
S32IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S32IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S32IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S32IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S32IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S32IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S32IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S32IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S32IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S32IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S32IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S32IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S32IDFE-XBPM:CM4ds:PositionOffsetX / S32IDFE-XBPM:CM4ds:PositionOffsetX
S32IDFE-XBPM:CM4ds:PositionOffsetY / S32IDFE-XBPM:CM4ds:PositionOffsetY
S32IDFE-XBPM:CM4ds:PositionScaleX / S32IDFE-XBPM:CM4ds:PositionScaleX
S32IDFE-XBPM:CM4ds:PositionScaleY / S32IDFE-XBPM:CM4ds:PositionScaleY
S32IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S32IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S32IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S32IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S32IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S32IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S32IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S32IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S32IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S32IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S32IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S32IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S32IDFE-XBPM:CM4us:PositionOffsetX / S32IDFE-XBPM:CM4us:PositionOffsetX
S32IDFE-XBPM:CM4us:PositionOffsetY / S32IDFE-XBPM:CM4us:PositionOffsetY
S32IDFE-XBPM:CM4us:PositionScaleX / S32IDFE-XBPM:CM4us:PositionScaleX
S32IDFE-XBPM:CM4us:PositionScaleY / S32IDFE-XBPM:CM4us:PositionScaleY
S33IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S33IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S33IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S33IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S33IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S33IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S33IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S33IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S33IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S33IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S33IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S33IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S33IDFE-XBPM:CM1ds:PositionOffsetX / S33IDFE-XBPM:CM1ds:PositionOffsetX
S33IDFE-XBPM:CM1ds:PositionOffsetY / S33IDFE-XBPM:CM1ds:PositionOffsetY
S33IDFE-XBPM:CM1ds:PositionScaleX / S33IDFE-XBPM:CM1ds:PositionScaleX
S33IDFE-XBPM:CM1ds:PositionScaleY / S33IDFE-XBPM:CM1ds:PositionScaleY
S33IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S33IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S33IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S33IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S33IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S33IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S33IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S33IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S33IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S33IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S33IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S33IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S33IDFE-XBPM:CM2ds:PositionOffsetX / S33IDFE-XBPM:CM2ds:PositionOffsetX
S33IDFE-XBPM:CM2ds:PositionOffsetY / S33IDFE-XBPM:CM2ds:PositionOffsetY
S33IDFE-XBPM:CM2ds:PositionScaleX / S33IDFE-XBPM:CM2ds:PositionScaleX
S33IDFE-XBPM:CM2ds:PositionScaleY / S33IDFE-XBPM:CM2ds:PositionScaleY
S33IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S33IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S33IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S33IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S33IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S33IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S33IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S33IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S33IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S33IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S33IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S33IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S33IDFE-XBPM:CM3ds:PositionOffsetX / S33IDFE-XBPM:CM3ds:PositionOffsetX
S33IDFE-XBPM:CM3ds:PositionOffsetY / S33IDFE-XBPM:CM3ds:PositionOffsetY
S33IDFE-XBPM:CM3ds:PositionScaleX / S33IDFE-XBPM:CM3ds:PositionScaleX
S33IDFE-XBPM:CM3ds:PositionScaleY / S33IDFE-XBPM:CM3ds:PositionScaleY
S33IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S33IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S33IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S33IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S33IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S33IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S33IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S33IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S33IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S33IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S33IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S33IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S33IDFE-XBPM:CM4ds:PositionOffsetX / S33IDFE-XBPM:CM4ds:PositionOffsetX
S33IDFE-XBPM:CM4ds:PositionOffsetY / S33IDFE-XBPM:CM4ds:PositionOffsetY
S33IDFE-XBPM:CM4ds:PositionScaleX / S33IDFE-XBPM:CM4ds:PositionScaleX
S33IDFE-XBPM:CM4ds:PositionScaleY / S33IDFE-XBPM:CM4ds:PositionScaleY
S34IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S34IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S34IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S34IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S34IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S34IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S34IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S34IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S34IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S34IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S34IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S34IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S34IDFE-XBPM:CM1ds:PositionOffsetX / S34IDFE-XBPM:CM1ds:PositionOffsetX
S34IDFE-XBPM:CM1ds:PositionOffsetY / S34IDFE-XBPM:CM1ds:PositionOffsetY
S34IDFE-XBPM:CM1ds:PositionScaleX / S34IDFE-XBPM:CM1ds:PositionScaleX
S34IDFE-XBPM:CM1ds:PositionScaleY / S34IDFE-XBPM:CM1ds:PositionScaleY
S34IDFE-XBPM:CM1us:Current1:MeanValue_RBV / S34IDFE-XBPM:CM1us:Current1:MeanValue_RBV
S34IDFE-XBPM:CM1us:Current2:MeanValue_RBV / S34IDFE-XBPM:CM1us:Current2:MeanValue_RBV
S34IDFE-XBPM:CM1us:Current3:MeanValue_RBV / S34IDFE-XBPM:CM1us:Current3:MeanValue_RBV
S34IDFE-XBPM:CM1us:Current4:MeanValue_RBV / S34IDFE-XBPM:CM1us:Current4:MeanValue_RBV
S34IDFE-XBPM:CM1us:PosX:MeanValue_RBV / S34IDFE-XBPM:CM1us:PosX:MeanValue_RBV
S34IDFE-XBPM:CM1us:PosY:MeanValue_RBV / S34IDFE-XBPM:CM1us:PosY:MeanValue_RBV
S34IDFE-XBPM:CM1us:PositionOffsetX / S34IDFE-XBPM:CM1us:PositionOffsetX
S34IDFE-XBPM:CM1us:PositionOffsetY / S34IDFE-XBPM:CM1us:PositionOffsetY
S34IDFE-XBPM:CM1us:PositionScaleX / S34IDFE-XBPM:CM1us:PositionScaleX
S34IDFE-XBPM:CM1us:PositionScaleY / S34IDFE-XBPM:CM1us:PositionScaleY
S34IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S34IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S34IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S34IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S34IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S34IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S34IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S34IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S34IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S34IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S34IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S34IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S34IDFE-XBPM:CM2ds:PositionOffsetX / S34IDFE-XBPM:CM2ds:PositionOffsetX
S34IDFE-XBPM:CM2ds:PositionOffsetY / S34IDFE-XBPM:CM2ds:PositionOffsetY
S34IDFE-XBPM:CM2ds:PositionScaleX / S34IDFE-XBPM:CM2ds:PositionScaleX
S34IDFE-XBPM:CM2ds:PositionScaleY / S34IDFE-XBPM:CM2ds:PositionScaleY
S34IDFE-XBPM:CM2us:Current1:MeanValue_RBV / S34IDFE-XBPM:CM2us:Current1:MeanValue_RBV
S34IDFE-XBPM:CM2us:Current2:MeanValue_RBV / S34IDFE-XBPM:CM2us:Current2:MeanValue_RBV
S34IDFE-XBPM:CM2us:Current3:MeanValue_RBV / S34IDFE-XBPM:CM2us:Current3:MeanValue_RBV
S34IDFE-XBPM:CM2us:Current4:MeanValue_RBV / S34IDFE-XBPM:CM2us:Current4:MeanValue_RBV
S34IDFE-XBPM:CM2us:PosX:MeanValue_RBV / S34IDFE-XBPM:CM2us:PosX:MeanValue_RBV
S34IDFE-XBPM:CM2us:PosY:MeanValue_RBV / S34IDFE-XBPM:CM2us:PosY:MeanValue_RBV
S34IDFE-XBPM:CM2us:PositionOffsetX / S34IDFE-XBPM:CM2us:PositionOffsetX
S34IDFE-XBPM:CM2us:PositionOffsetY / S34IDFE-XBPM:CM2us:PositionOffsetY
S34IDFE-XBPM:CM2us:PositionScaleX / S34IDFE-XBPM:CM2us:PositionScaleX
S34IDFE-XBPM:CM2us:PositionScaleY / S34IDFE-XBPM:CM2us:PositionScaleY
S34IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S34IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S34IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S34IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S34IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S34IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S34IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S34IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S34IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S34IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S34IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S34IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S34IDFE-XBPM:CM3ds:PositionOffsetX / S34IDFE-XBPM:CM3ds:PositionOffsetX
S34IDFE-XBPM:CM3ds:PositionOffsetY / S34IDFE-XBPM:CM3ds:PositionOffsetY
S34IDFE-XBPM:CM3ds:PositionScaleX / S34IDFE-XBPM:CM3ds:PositionScaleX
S34IDFE-XBPM:CM3ds:PositionScaleY / S34IDFE-XBPM:CM3ds:PositionScaleY
S34IDFE-XBPM:CM3us:Current1:MeanValue_RBV / S34IDFE-XBPM:CM3us:Current1:MeanValue_RBV
S34IDFE-XBPM:CM3us:Current2:MeanValue_RBV / S34IDFE-XBPM:CM3us:Current2:MeanValue_RBV
S34IDFE-XBPM:CM3us:Current3:MeanValue_RBV / S34IDFE-XBPM:CM3us:Current3:MeanValue_RBV
S34IDFE-XBPM:CM3us:Current4:MeanValue_RBV / S34IDFE-XBPM:CM3us:Current4:MeanValue_RBV
S34IDFE-XBPM:CM3us:PosX:MeanValue_RBV / S34IDFE-XBPM:CM3us:PosX:MeanValue_RBV
S34IDFE-XBPM:CM3us:PosY:MeanValue_RBV / S34IDFE-XBPM:CM3us:PosY:MeanValue_RBV
S34IDFE-XBPM:CM3us:PositionOffsetX / S34IDFE-XBPM:CM3us:PositionOffsetX
S34IDFE-XBPM:CM3us:PositionOffsetY / S34IDFE-XBPM:CM3us:PositionOffsetY
S34IDFE-XBPM:CM3us:PositionScaleX / S34IDFE-XBPM:CM3us:PositionScaleX
S34IDFE-XBPM:CM3us:PositionScaleY / S34IDFE-XBPM:CM3us:PositionScaleY
S34IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S34IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S34IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S34IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S34IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S34IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S34IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S34IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S34IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S34IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S34IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S34IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S34IDFE-XBPM:CM4ds:PositionOffsetX / S34IDFE-XBPM:CM4ds:PositionOffsetX
S34IDFE-XBPM:CM4ds:PositionOffsetY / S34IDFE-XBPM:CM4ds:PositionOffsetY
S34IDFE-XBPM:CM4ds:PositionScaleX / S34IDFE-XBPM:CM4ds:PositionScaleX
S34IDFE-XBPM:CM4ds:PositionScaleY / S34IDFE-XBPM:CM4ds:PositionScaleY
S34IDFE-XBPM:CM4us:Current1:MeanValue_RBV / S34IDFE-XBPM:CM4us:Current1:MeanValue_RBV
S34IDFE-XBPM:CM4us:Current2:MeanValue_RBV / S34IDFE-XBPM:CM4us:Current2:MeanValue_RBV
S34IDFE-XBPM:CM4us:Current3:MeanValue_RBV / S34IDFE-XBPM:CM4us:Current3:MeanValue_RBV
S34IDFE-XBPM:CM4us:Current4:MeanValue_RBV / S34IDFE-XBPM:CM4us:Current4:MeanValue_RBV
S34IDFE-XBPM:CM4us:PosX:MeanValue_RBV / S34IDFE-XBPM:CM4us:PosX:MeanValue_RBV
S34IDFE-XBPM:CM4us:PosY:MeanValue_RBV / S34IDFE-XBPM:CM4us:PosY:MeanValue_RBV
S34IDFE-XBPM:CM4us:PositionOffsetX / S34IDFE-XBPM:CM4us:PositionOffsetX
S34IDFE-XBPM:CM4us:PositionOffsetY / S34IDFE-XBPM:CM4us:PositionOffsetY
S34IDFE-XBPM:CM4us:PositionScaleX / S34IDFE-XBPM:CM4us:PositionScaleX
S34IDFE-XBPM:CM4us:PositionScaleY / S34IDFE-XBPM:CM4us:PositionScaleY
S35IDFE-XBPM:CM1ds:Current1:MeanValue_RBV / S35IDFE-XBPM:CM1ds:Current1:MeanValue_RBV
S35IDFE-XBPM:CM1ds:Current2:MeanValue_RBV / S35IDFE-XBPM:CM1ds:Current2:MeanValue_RBV
S35IDFE-XBPM:CM1ds:Current3:MeanValue_RBV / S35IDFE-XBPM:CM1ds:Current3:MeanValue_RBV
S35IDFE-XBPM:CM1ds:Current4:MeanValue_RBV / S35IDFE-XBPM:CM1ds:Current4:MeanValue_RBV
S35IDFE-XBPM:CM1ds:PosX:MeanValue_RBV / S35IDFE-XBPM:CM1ds:PosX:MeanValue_RBV
S35IDFE-XBPM:CM1ds:PosY:MeanValue_RBV / S35IDFE-XBPM:CM1ds:PosY:MeanValue_RBV
S35IDFE-XBPM:CM1ds:PositionOffsetX / S35IDFE-XBPM:CM1ds:PositionOffsetX
S35IDFE-XBPM:CM1ds:PositionOffsetY / S35IDFE-XBPM:CM1ds:PositionOffsetY
S35IDFE-XBPM:CM1ds:PositionScaleX / S35IDFE-XBPM:CM1ds:PositionScaleX
S35IDFE-XBPM:CM1ds:PositionScaleY / S35IDFE-XBPM:CM1ds:PositionScaleY
S35IDFE-XBPM:CM2ds:Current1:MeanValue_RBV / S35IDFE-XBPM:CM2ds:Current1:MeanValue_RBV
S35IDFE-XBPM:CM2ds:Current2:MeanValue_RBV / S35IDFE-XBPM:CM2ds:Current2:MeanValue_RBV
S35IDFE-XBPM:CM2ds:Current3:MeanValue_RBV / S35IDFE-XBPM:CM2ds:Current3:MeanValue_RBV
S35IDFE-XBPM:CM2ds:Current4:MeanValue_RBV / S35IDFE-XBPM:CM2ds:Current4:MeanValue_RBV
S35IDFE-XBPM:CM2ds:PosX:MeanValue_RBV / S35IDFE-XBPM:CM2ds:PosX:MeanValue_RBV
S35IDFE-XBPM:CM2ds:PosY:MeanValue_RBV / S35IDFE-XBPM:CM2ds:PosY:MeanValue_RBV
S35IDFE-XBPM:CM2ds:PositionOffsetX / S35IDFE-XBPM:CM2ds:PositionOffsetX
S35IDFE-XBPM:CM2ds:PositionOffsetY / S35IDFE-XBPM:CM2ds:PositionOffsetY
S35IDFE-XBPM:CM2ds:PositionScaleX / S35IDFE-XBPM:CM2ds:PositionScaleX
S35IDFE-XBPM:CM2ds:PositionScaleY / S35IDFE-XBPM:CM2ds:PositionScaleY
S35IDFE-XBPM:CM3ds:Current1:MeanValue_RBV / S35IDFE-XBPM:CM3ds:Current1:MeanValue_RBV
S35IDFE-XBPM:CM3ds:Current2:MeanValue_RBV / S35IDFE-XBPM:CM3ds:Current2:MeanValue_RBV
S35IDFE-XBPM:CM3ds:Current3:MeanValue_RBV / S35IDFE-XBPM:CM3ds:Current3:MeanValue_RBV
S35IDFE-XBPM:CM3ds:Current4:MeanValue_RBV / S35IDFE-XBPM:CM3ds:Current4:MeanValue_RBV
S35IDFE-XBPM:CM3ds:PosX:MeanValue_RBV / S35IDFE-XBPM:CM3ds:PosX:MeanValue_RBV
S35IDFE-XBPM:CM3ds:PosY:MeanValue_RBV / S35IDFE-XBPM:CM3ds:PosY:MeanValue_RBV
S35IDFE-XBPM:CM3ds:PositionOffsetX / S35IDFE-XBPM:CM3ds:PositionOffsetX
S35IDFE-XBPM:CM3ds:PositionOffsetY / S35IDFE-XBPM:CM3ds:PositionOffsetY
S35IDFE-XBPM:CM3ds:PositionScaleX / S35IDFE-XBPM:CM3ds:PositionScaleX
S35IDFE-XBPM:CM3ds:PositionScaleY / S35IDFE-XBPM:CM3ds:PositionScaleY
S35IDFE-XBPM:CM4ds:Current1:MeanValue_RBV / S35IDFE-XBPM:CM4ds:Current1:MeanValue_RBV
S35IDFE-XBPM:CM4ds:Current2:MeanValue_RBV / S35IDFE-XBPM:CM4ds:Current2:MeanValue_RBV
S35IDFE-XBPM:CM4ds:Current3:MeanValue_RBV / S35IDFE-XBPM:CM4ds:Current3:MeanValue_RBV
S35IDFE-XBPM:CM4ds:Current4:MeanValue_RBV / S35IDFE-XBPM:CM4ds:Current4:MeanValue_RBV
S35IDFE-XBPM:CM4ds:PosX:MeanValue_RBV / S35IDFE-XBPM:CM4ds:PosX:MeanValue_RBV
S35IDFE-XBPM:CM4ds:PosY:MeanValue_RBV / S35IDFE-XBPM:CM4ds:PosY:MeanValue_RBV
S35IDFE-XBPM:CM4ds:PositionOffsetX / S35IDFE-XBPM:CM4ds:PositionOffsetX
S35IDFE-XBPM:CM4ds:PositionOffsetY / S35IDFE-XBPM:CM4ds:PositionOffsetY
S35IDFE-XBPM:CM4ds:PositionScaleX / S35IDFE-XBPM:CM4ds:PositionScaleX
S35IDFE-XBPM:CM4ds:PositionScaleY / S35IDFE-XBPM:CM4ds:PositionScaleY
Date/Time Range of Interest
Year
Month
Day
Hour
Starting date/time:
2024
2023
2022
2021
2020
2019
2018
2017
2016
2015
2014
2013
2012
2011
2010
2009
2008
2007
2006
2005
2004
2003
2002
2001
2000
1
2
3
4
5
6
7
8
9
10
11
12
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
0
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
Ending date/time:
2024
2023
2022
2021
2020
2019
2018
2017
2016
2015
2014
2013
2012
2011
2010
2009
2008
2007
2006
2005
2004
2003
2002
2001
2000
1
2
3
4
5
6
7
8
9
10
11
12
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
Plot Options
Size:
Normal
PDA Size
Tiny
Small
Medium
Large
Background Color:
White
Black
Layout:
1x1
1x2
2x1
2x2
3x3
4x4
5x5
Label size:
Normal
+15%
+30%
+45%
+60%
Sparsing:
None
2
4
8
16
32
64
128
Miscellaneous:
With Beam Current
Same Y scales
Y offset mode
Separate
Option override
Extra Options: